Holding device and method for holding an optical element for testing the same

Abstract

A holding device for holding an optical element for testing the optical element includes a hollow base body, a fixed ring, and a movable ring. The fixed ring part is arranged or fastened on the base body, and the fixed ring part is provided with a contact surface for abutting against the optical element at the axial end. The movable ring part is supported on the base body in an axially displaceable manner relative to the fixed ring part and the base body, and the movable ring part is provided with a contact surface at the axial end part for abutting against the optical element. The fixed ring part and the movable ring part are arranged coaxially with each other, a gap is arranged at least between the fixed ring part and the movable ring part, and a vacuum for holding the optical element can be generated in the gap.

Description

Technical Field

[0001] The present invention relates to a device or a method. Background Art

[0002] With conventional vacuum holding with vacuum, the optical element or test piece to be tested can be measured only on one side or through a glass window. Alternatively, the test piece can usually be clamped mechanically in the circumferential direction.

[0003] JP2014000621A describes a device for holding a lens with a vacuum without a window during the bonding process. Here, the lens holder comprises an outer region and an inner region, which are flexibly and sealingly connected to each other via a bearing. Summary of the invention

[0004] Against this background, an improved holding device for holding an optical element for testing it and an improved method for holding an optical element for testing it are proposed by means of the solution proposed here. Advantageous improvements and enhancements to the device given in the independent claim can be achieved by means of the measures implemented in the dependent claims.

[0005] The described solution makes it possible in particular to securely hold the optical element to be tested during its testing (or in other words during the measuring and alignment process). In this case, for example, it is also possible to prevent the test from being influenced by the holding device. In addition, in particular, a universal holding device can be provided, which can hold optical elements with different geometries.

[0006] A holding device for holding an optical element for testing the same, the holding device comprising the following features:

[0007] A hollow matrix;

[0008] a fixed ring part which is arranged or fastened on the base body, wherein the fixed ring part has a contact surface at an axial end for abutting against the optical element; and

[0009] a movable ring part which is supported on the base body so as to be axially displaceable relative to the fixed ring part and the base body, wherein the movable ring part has a contact surface at an axial end for abutting against the optical element,

[0010] In this case, the fixed ring part and the movable ring part are arranged coaxially with respect to one another, wherein a gap is arranged at least between the fixed ring part and the movable ring part, in which a vacuum can be generated for holding the optical element.

[0011] The optical element can be, for example, a lens. The substrate can be fastened to an actuator or an actuator or has been fastened thereto. The fixed annular part and the substrate can be implemented as separate components or a single component. When the fixed annular part is arranged on the substrate, the fixed annular part and the substrate can be implemented as a single component or an integral component. In addition, depending on the type of the optical element to be maintained, the substrate can have a rotationally symmetrical or non-rotationally symmetrical geometry. If the optical element to be maintained is spherical or non-spherical, a cylindrical substrate can be used. The fixed annular part can be shaped as a hollow column. The movable annular part can be shaped as a hollow column. Here, the annular part can also be referred to as an annular component, an annular element or an annular unit.

[0012] According to one embodiment, the movable annular member can be arranged radially inside or outside the fixed annular member. In this way, the protection and support of the movable annular member can be reliably achieved.

[0013] Furthermore, a through hole can be formed in the movable annular part or the fixed annular part, which passes axially through the entire movable annular part. The through hole can also be referred to as an aperture. Thus, it is possible to prevent the holding device from influencing the test or measurement, because the window can be omitted. Otherwise, the measurement performed through the glass window may be erroneous, because the glass window may have an influence on the measurement result that cannot be easily quantified and is variable.

[0014] In particular, the contact surface of the ring can be shaped as a cutting portion. Additionally or alternatively, the contact surface can be designed for abutting against the optical element along concentric circles. In this regard, other concentric geometries, such as a cylinder, are also conceivable in order to also hold non-rotationally symmetrical test pieces. Thus, a holding device in the form of a vacuum double ring cutter can be provided, which can ensure that the optical element, also referred to as the test piece, is securely held during the measurement and alignment process. In addition, the vacuum double ring cutter can be universally adapted to a plurality of test piece geometries during the assembly process.

[0015] The holding device can also have a preloading device for preloading the movable ring away from the base body. Here, the preloading device can especially have an elastic device or a compressed air device. Then, regardless of the orientation of the holding device relative to the earth's gravitational field, the movable ring can be reliably brought into contact with the optical element.

[0016] According to one embodiment, the base body can have a guide section, which is shaped to guide the movement of the movable ring relative to the base body and the fixed ring. In this way, the movable ring can be accurately and reliably guided to achieve the geometry of the adaptive optical element.

[0017] In this case, a fit, in particular a clearance fit, can be provided as a sliding guide between the guide section of the basic body and the guided section of the movable ring part.

[0018] Additionally or alternatively, the holding device can have guide means arranged on the base body, which are designed to guide the movement of the movable ring relative to the base body and the fixed ring. In this case, the guide means can in particular have film guides. In this way, precise movement guidance can also be achieved while achieving sealing against the vacuum to be applied.

[0019] In addition, the base body can have at least one stop section, which is shaped to limit the movement of the movable ring relative to the base body and the fixed ring. Therefore, the movable ring can be firmly held on the base body in particular without falling off. In addition, the stroke of the movement can be accurately preset.

[0020] A shoulder can also be formed on the movable ring, which is designed to limit the movement of the movable ring relative to the matrix and the fixed ring. The stroke of the movement can also be accurately preset in this way. In addition, the reliable retention of the movable ring on the matrix can also be achieved.

[0021] According to one embodiment, the movable ring can be formed in one piece. Such an embodiment provides the following advantage, that is, the number of individual parts of the holding device can be kept at a low level. In particular, the movable ring can also be implemented particularly firmly in this way.

[0022] Alternatively, the movable ring can be implemented in a multi-piece manner. Here, a contact surface can be arranged on the first part of the movable ring. A section guided by the substrate can be arranged on the second part of the movable ring. Here, the first part and the second part of the movable ring can be connected to each other. The first part and the second part can be connected to each other in a force-fitting manner, and can be connected to each other in a form-fitting manner additionally or alternatively. The first part and the second part can be connected to each other directly or by at least one intermediate part.

[0023] A method for holding an optical component for testing the same, the method comprising the steps of:

[0024] The embodiments of the holding device mentioned here are arranged to bear against the optical element with the contact surface; and

[0025] A vacuum is created in the gap to hold the optical components.

[0026] Advantageously, the arranging step and the generating step can be performed automatically. Subsequently, the test can be performed on the optical element. During the arranging step, the holding device can be moved, or the optical element can be moved, or both of them can be moved.

[0027] According to one embodiment, in the arrangement step, the contact surface of the movable ring can be preloaded by means of a preloading device so that it abuts against the optical element. In this way, the abutment of the movable ring and the optical element can be reliably achieved independently of the orientation of the holding device in space. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] An exemplary embodiment of the solution proposed here is shown in the drawings and is explained in detail in the following description. In the drawings:

[0029] Figure 1 A schematic cross-sectional view showing an embodiment of a holding device for holding an optical element for testing the same;

[0030] Figure 2 A schematic cross-sectional view showing an embodiment of a holding device for holding an optical element for testing thereof with a preloading device; and

[0031] Figure 3 A flow chart illustrating an embodiment of a method for holding an optical component for testing thereof. DETAILED DESCRIPTION

[0032] In the following description of advantageous exemplary embodiments of the invention, identical or similar reference numerals are used for elements which are illustrated in the various figures and act similarly, wherein a repeated description of these elements is omitted.

[0033] Figure 1 A schematic cross-sectional view of an embodiment of a holding device 100 for holding an optical element OE for testing the same is shown. The holding device 100 is designed to hold an optical element OE, such as a lens, which may also be referred to as a test piece, at least during a test or measurement and alignment process of the optical element OE.

[0034] The holding device 100 comprises a base body 110 , a stationary or fixed ring 120 and a movable ring 130 .

[0035] The base body 110 is shaped as hollow, advantageously in the shape of a hollow column. A fixed annular member 120 is arranged or fastened on the base body 110. The fixed annular member 120 has a contact surface or a first contact surface 122 for abutting against the optical element OE at its axial end. A movable annular member 130 is supported on the base body 110 axially displaceably relative to the fixed annular member 120 and the base body 110. The movable annular member 130 has a contact surface or a second contact surface 132 for abutting against the optical element OE at its axial end. Here, the fixed annular member 120 and the movable annular member 130 are arranged coaxially with each other. In addition, a gap 140 is arranged at least between the fixed annular member 120 and the movable annular member 130. A vacuum for holding the optical element OE can be generated in the gap 140. The fixed annular member 120 and the movable annular member 130 are radially spaced apart from each other by the gap 140.

[0036] In particular, the base body 110 serves as a fastening element for the stationary or fixed ring 120, or in other words as a carrier for the fixed ring 120 and as a guide for the movable ring 130. Furthermore, the base body 110 of the holding device 100 can be mounted, for example, on a test instrument or in particular on an actuator of a test instrument.

[0037] The axially displaceable, movable ring 130 moves along axis A. According to the embodiment shown here, at least the base body 110, the fixed ring 120 and the movable ring 130 are aligned on axis A, in particular rotationally symmetrically about this axis. Axis A represents, for example, an axis of symmetry and / or a main axis of extension of the holding device 100.

[0038] According to the embodiment shown here, the movable ring 130 is arranged radially inside the fixed ring 120. In addition, a through hole 134 is formed in the movable ring 130, which passes through the entire movable ring 130 axially or along the axis A. The through hole 134 can also be called an aperture. The aperture extends through the entire holding device 100 along the axis A here. According to another embodiment, the fixed ring 120 can be arranged radially inside the movable ring 130. A through hole 134 can also be formed in the fixed ring 120, which passes through the entire fixed ring 120 axially or along the axis A.

[0039] In addition, according to the embodiment shown here, the contact surfaces 122 and 132 of the rings 120 and 130 are shaped as cutting portions. Therefore, the holding device 100 can also be referred to as a vacuum double ring cutter. In particular, the contact surfaces 122 and 132 are therefore designed to abut against the optical element OE along concentric circles. For non-rotationally symmetrical test pieces, such as cylindrical lenses, the rings 120 / 130 can have corresponding non-rotationally symmetrical concentric geometries.

[0040] According to the embodiment shown here, the base body 110 also has a guide surface or guide section 112. The guide section 112 is shaped to guide the movement of the movable ring 130 relative to the base body 110 and the fixed ring 120. Here, a fit 150, in particular a clearance fit, is provided as a sliding guide between the guide section 112 of the base body 110 and the guided section 136 of the movable ring 130.

[0041] According to another embodiment, guide means may be additionally or alternatively arranged on the base body 110, which guide means are designed to guide the movement of the movable ring 130 relative to the base body 110 and the fixed ring 120. Such guide means may in particular include film guides or the like.

[0042] According to an embodiment, the base body 110 has at least one stop section 114. The stop section 114 is shaped to limit the movement of the movable ring 130 relative to the base body 110 and the fixed ring 120. In other words, the stop section 114 is shaped to limit the movement of the movable ring 130 axially along the axis A in at least one direction.

[0043] Additionally or alternatively, according to one embodiment, a shoulder 138 is formed on the movable ring 130. The shoulder 138 is formed or designed to limit the movement of the movable ring 130 relative to the base 110 and the fixed ring 120. In other words, the shoulder 138 is formed to limit the movement of the movable ring 130 axially in at least one direction along the axis A.

[0044] In particular, according to one embodiment, the stop section 114 and the shoulder 138 may interact to limit the movement of the movable ring 130 relative to the base 110 and the fixed ring 120 .

[0045] According to an embodiment, the movable ring 130 is formed in a single piece or in one piece. Alternatively, the movable ring 130 is implemented in a multi-piece manner, in particular, a first part 160 and a second part 170 are implemented. Here, a contact surface 132 is arranged on the first part 160 of the movable ring 130, and a section 136 guided by the base 110 is arranged on the second part 170 of the movable ring. The first part 160 and the second part 170 of the movable ring 130 are connected to each other.

[0046] Figure 2 A schematic cross-sectional view of an embodiment of a holding device 100 for holding an optical element for testing the same with a preloading device is shown. The holding device 100 corresponds to Figure 1The holding device 100 is special in that the holding device 100 further has a preloading device 280.

[0047] The preloading device 280 is designed to preload the movable ring 130 away from the base body 110. Here, the preloading device 280 comprises, for example, elastic means, such as springs or compressed air means, to move the movable ring 130 away from the base body 110 and / or toward the optical element OE.

[0048] The preloading device 280 is shown here merely by way of example as being arranged between the end of the movable ring 130 (eg the second part 170 thereof) facing away from the optical element OE and the end of the base body 110 facing away from the optical element OE.

[0049] Figure 3 A flow chart of an embodiment of a method 300 for holding an optical element for testing the same is shown. The method 300 for holding comprises an arrangement step 302 and a generation step 304. In the arrangement step 302, a holding device from one of the above figures or a similar holding device is arranged with its contact surface against the optical element. Subsequently, in the generation step 304, a vacuum is generated in the interspace of the holding device in order to hold the optical element.

[0050] According to one embodiment, in the arrangement step 302, the contact surface of the movable ring is preloaded by means of a preloading device so that it abuts against the optical element. Figure 2 Such a preloading device is shown in .

[0051] With reference to the above-mentioned figures, embodiments and advantages of embodiments are explained again in summary and in other words briefly below.

[0052] According to the embodiment, it is possible in particular to measure and hold the test piece or optical element OE simultaneously and from the same direction without the holder or holding device 100 having any influence on the measurement. In this case, the holding device 100 is designed independently of the test piece and can therefore be universal. The holding device 100 can be mounted or already mounted on an actuator which can move the optical element OE, also referred to as the test piece.

[0053] Thus, according to an embodiment, it can be prevented that when testing the optical element OE, measurements must be performed through the glass window, which measurements are usually subject to errors because the glass window has an influence that cannot be easily quantified and is variable. This can also be prevented in particular by the through hole 134. Since it is usually not possible to clamp the optical element OE in the circumferential direction of the optical element when there is no space between the test piece or the optical element OE and the fixture, according to an embodiment, advantageous other ways of holding can be achieved. Unlike holding in the circumferential direction, the holding achieved by means of the holding device 100 is also universal, because the holding device 100 can be adapted to any or almost any test piece geometry.

[0054] The holding device 100, which is embodied in particular as a vacuum double ring cutter (VDR), ensures that the test piece or optical element OE is securely held during the measurement and alignment process or during the test. The vacuum double ring cutter or holding device 100 has no direct influence on the measurement result. In addition, the universal vacuum double ring cutter or holding device 100 is particularly suitable for a plurality of test piece geometries during the assembly process.

[0055] According to an embodiment, a rigid, force-fit connection between a test piece or optical element and a peripheral component can be established by means of the holding device 100. The peripheral component can be an actuator. Instead of a window, an unobstructed aperture or through hole 134 can be used to avoid influences on the measurement. This can be applied to all instruments where disturbing influences of the window are critical. The universal embodiment of the holding device 100 saves time and money and therefore provides added value.

[0056] According to an embodiment, one of the two rings 120 and 130 (more precisely, the movable ring 130) is supported displaceably perpendicular to the holding direction. The stationary or fixed ring 120 defines the position, and the movable ring 130 is adapted to the test piece or optical element OE and ensures vacuum. The contact between the movable ring 130 and the test piece or optical element OE can be ensured by gravity or by the preloading of the preloading device 280 and can therefore be applied to any orientation. The aperture or through hole 134 in the inner ring (being the movable ring 130 at this) can realize interference-free measurement. Vacuum is established in the gap 140 between the two rings 120 and 130. The movable ring 130 can be easily moved on the one hand, to adapt the profile of the optical element OE, and can ensure vacuum on the other hand by the close guidance and concentricity of the rings 120 and 130.

[0057] The movement of the movable ring 130 can also be realized by means of a film guide, instead of the fitting 150 as a sliding guide. The preload can be generated by gravity or other force storage means, such as a spring or compressed air as a preload device 280. The movable ring 130 can be implemented in one piece or in multiple pieces.

Claims

1. A holding device (100) for holding an optical element (OE) for testing the same, characterized in that The holding device (100) comprises: A hollow substrate (110); a fixed annular part (120), which is arranged or fastened on the base body (110), wherein the fixed annular part (120) has a contact surface (122) at an axial end for abutting against the optical element (OE); and a movable annular part (130), the movable annular part (130) being supported on the base body (110) so as to be axially displaceable relative to the fixed annular part (120) and the base body (110), wherein the movable annular part (130) has a contact surface (132) at an axial end for abutting against the optical element (OE), The fixed annular member (120) and the movable annular member (130) are arranged coaxially with each other, wherein a gap (140) is arranged at least between the fixed annular member (120) and the movable annular member (130), and a vacuum can be generated in the gap (140) for holding the optical element (OE).

2. The holding device (100) according to claim 1, characterized in that: The movable annular member (130) is arranged radially inside the fixed annular member (120).

3. The holding device (100) according to claim 1, characterized in that: The movable annular member (130) is arranged radially outside the fixed annular member (120).

4. The holding device (100) according to claim 1 or 2, characterized in that: The base body (110) has a rotationally symmetrical or non-rotationally symmetrical geometry.

5. The holding device (100) according to claim 1 or 2, characterized in that: A through hole (134) is formed in the movable annular member (130) or the fixed annular member (120) and axially passes through the entire movable annular member (130) or the fixed annular member (120).

6. The holding device (100) according to claim 1 or 2, characterized in that: The contact surface (122, 132) of the ring (120, 130) is shaped as a cutout and / or the contact surface (122, 132) is designed to abut against the optical element (OE) along a concentric, rotationally symmetrical or non-rotationally symmetrical geometry.

7. The holding device (100) according to claim 1 or 2, characterized in that: The holding device has a preloading device (280) for preloading the movable ring (130) away from the base body (110), in particular wherein the preloading device (280) has elastic means or compressed air means.

8. The holding device (100) according to claim 1 or 2, characterized in that: The base body (110) has a guide section (112) which is shaped to guide the movement of the movable ring (130) relative to the base body (110) and the fixed ring (120).

9. The holding device (100) according to claim 8, characterized in that A fit (150), in particular a clearance fit, is provided as a sliding guide between a guide section (112) of the base body (110) and a guided section (136) of the movable ring part (130).

10. The holding device (100) according to claim 1 or 2, characterized in that: The holding device has a guide element arranged on the base body (110), which is designed to guide the movement of the movable ring element (130) relative to the base body (110) and the fixed ring element (120), in particular, wherein the guide element has a film guide.

11. The holding device (100) according to claim 1 or 2, characterized in that: The base body (110) has at least one stop section (114) which is shaped to limit the movement of the movable ring (130) relative to the base body (110) and the fixed ring (120).

12. The holding device (100) according to claim 1 or 2, characterized in that: A shoulder (138) is formed on the movable annular member (130), and the shoulder (138) is designed to limit the movement of the movable annular member (130) relative to the base body (110) and the fixed annular member (120).

13. The holding device (100) according to claim 1 or 2, characterized in that: The movable annular element (130) is formed in one piece.

14. The holding device (100) according to claim 1 or 2, characterized in that: The movable ring part (130) is embodied in multiple parts, wherein the contact surface (132) is arranged on a first part (160) of the movable ring part (130), wherein a section (136) guided by the base body (110) is arranged on a second part (170) of the movable ring part (130), wherein the first part (160) and the second part (170) of the movable ring part (130) are connected to each other.

15. A method (300) for holding an optical element (OE) for testing the same, characterized in that The method (300) comprises the following steps: Arranging (302) a holding device (100) according to any one of the preceding claims so that the contact surface (122, 132) lies against the optical element (OE); and A vacuum is created (304) in the gap (140) to hold the optical element (OE).

16. The method (300) according to claim 15, characterized in that: In the arrangement step (302), the contact surface (132) of the movable ring (130) is preloaded against the optical element (OE) by means of a preloading device (280).

Images