Sample transfer device and vacuum interconnection system

Abstract

The invention discloses a sample transfer device and a vacuum interconnection system. The sample transfer device comprises a transfer chamber, a transfer table, a sample self-locking table and an operating rod. Wherein the transfer table is movably arranged in the transfer chamber; the sample self-locking table is movably arranged on the transfer table, and the sample self-locking table comprises a table body and a plurality of elastic sheet assemblies; the operating rod is used for driving the sample self-locking table to move, so that the sample self-locking table is switched from the first state to the second state; in the first state, the sample self-locking table is located on the operating rod, the elastic piece assembly abuts against a sample, and the sample is locked on the table body. In the second state, the sample self-locking table is arranged on the transfer table, the elastic piece assembly is separated from the sample, and the sample is unlocked from the table body. The sample self-locking table on which the sample is placed can be directly moved through the operating rod, so that the risk that the sample falls from the table body in the sample transfer process is avoided, the reliability and efficiency of sample transfer are enhanced, the user experience can also be improved, and a user does not need to worry about falling of the sample.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum interconnection systems, and in particular relates to a sample transfer device and a vacuum interconnection system. Background Art

[0002] After entering the nano era, the research on the surface and interface properties of nanomaterials has become increasingly in-depth. Due to the uncontrollable nature of some special materials and the external environment, the characterization technology of nanomaterials is difficult. In order to avoid surface contamination caused by exposure of samples to the atmospheric environment, they need to be placed in an ultra-high vacuum pipe to achieve a fully controllable environment and obtain an atomically clean and orderly surface. In the process of transferring samples, an operating rod is usually used to transfer samples. During the transfer process, improper operation may cause the sample to fall from the operating rod, affecting the reliability of sample transfer.

[0003] Therefore, in view of the above technical problems, it is necessary to provide a sample transfer device and a vacuum interconnection system. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a sample transfer device and a vacuum interconnection system.

[0005] In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:

[0006] A sample transfer device, comprising:

[0007] Transit Room;

[0008] A transfer table, movably disposed in the transfer chamber;

[0009] A sample self-locking platform, movably arranged on the transfer platform, the sample self-locking platform comprises a platform body and a plurality of spring sheet assemblies;

[0010] An operating rod, used to drive the sample self-locking platform to move, so that the sample self-locking platform switches from a first state to a second state;

[0011] In the first state, the sample self-locking platform is located on the operating rod, the spring assembly abuts against the sample, and the sample is locked on the platform;

[0012] In the second state, the sample self-locking platform is disposed on the transfer platform, the spring assembly is separated from the sample, and the sample is unlocked from the platform.

[0013] In one embodiment, a receiving hole is provided on the platform, and a positioning column matching with the receiving hole is provided on the transfer platform;

[0014] The spring assembly includes a pin shaft penetrating the side wall of the platform body, a spring sheet fixedly connected to the first end of the pin shaft, and an elastic member sleeved on the pin shaft, wherein the elastic member makes the pin shaft have a tendency to move inwards;

[0015] In the first state, the second end of the pin extends into the receiving hole, and the spring sheet abuts against the sample;

[0016] In the second state, the positioning column extends into the receiving hole and abuts against the second end of the pin, and the spring is separated from the sample.

[0017] In one embodiment, the spring piece includes a first main body portion fixedly mounted on the pin shaft, a second main body portion abutting against the sample, and a connecting portion connecting the first main body portion and the second main body portion, wherein the connecting portion is inclined upward from the inside to the outside, the highest point of the second main body portion is higher than the upper surface of the sample, and the lowest point of the second main body portion is lower than the upper surface of the sample.

[0018] In one embodiment, the spring assembly further includes a connecting piece fixedly mounted on the pin shaft and a limiting pin fixedly mounted on the connecting piece, and the limiting pin is at least partially penetrated in the platform body.

[0019] In one embodiment, the limiting pin includes a pin body and a limiting portion fixedly mounted on the pin body;

[0020] In the first state, the limiting portion abuts against the platform;

[0021] In the second state, the limiting portion is separated from the platform.

[0022] In one embodiment, the end surface of the second end of the pin is spherical; and / or,

[0023] The positioning column is provided with a chamfer.

[0024] In one embodiment, a limiting protrusion is provided on the upper surface of the platform extending upward; and / or,

[0025] A positioning protrusion is extended downwardly from the lower surface of the platform body, and a positioning groove matched with the positioning protrusion is provided on the transfer platform.

[0026] In one embodiment, the operating rod includes a rod body and a first operating arm and a second operating arm arranged opposite to each other. A clamping plate is provided on the platform body, and a first clamping groove and a second clamping groove matching with the clamping plate are respectively provided on the first operating arm and the second operating arm.

[0027] In one embodiment, the operating rod further includes a first elastic limiting piece fixedly installed in the first slot and a second elastic limiting piece fixedly installed in the second slot.

[0028] Another embodiment of the present invention provides a technical solution as follows:

[0029] A vacuum interconnection system, comprising:

[0030] Observation equipment and / or deposition equipment;

[0031] As the aforementioned sample transfer device, the sample transfer device is connected to the observation device and / or the deposition device.

[0032] The present invention has the following beneficial effects:

[0033] The present invention provides a sample transfer device and a vacuum interconnection system, which are provided with a sample self-locking table capable of locking samples. The sample self-locking table on which the samples are placed can be directly moved by an operating rod, thereby avoiding the risk of the samples falling from the table during the sample transfer process, thereby enhancing the reliability and efficiency of the sample transfer, and also improving the user experience, without having to worry about the samples falling due to operational errors. The present invention realizes the sample transmission between observation equipment such as scanning electron microscopes and the sample transfer device in the superior environment of ultra-high vacuum, thereby avoiding the surface contamination caused by the samples being exposed to the atmospheric environment, and improving the effect of the results of the observation by the observation equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0035] Figure 1 It is a structural schematic diagram of a part of the structure of the sample transfer device in the first embodiment of the present invention;

[0036] Figure 2 Schematic diagram of the three-dimensional structure of the transfer platform in the first embodiment of the present invention;

[0037] Figure 3 It is a schematic cross-sectional structural diagram of the sample self-locking platform in the first state in the first embodiment of the present invention;

[0038] Figure 4 It is a schematic cross-sectional structural diagram of the sample self-locking platform and the transfer platform in the second state in the first embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of the first three-dimensional structure of the sample self-locking platform in the first embodiment of the present invention;

[0040] Figure 6 It is a schematic diagram of the second three-dimensional structure of the sample self-locking platform in the first embodiment of the present invention;

[0041] Figure 7 It is a schematic diagram of the three-dimensional structure of the sample self-locking platform and the transfer platform in the first embodiment of the present invention;

[0042] Figure 8 is a schematic diagram of the three-dimensional structure of the operating lever in the first embodiment of the present invention;

[0043] Fig. 9 is a schematic cross-sectional structural diagram of an operating lever in Embodiment 1 of the present invention;

[0044] Fig.10 for Fig. 9 A magnified view of the local structure at point A in the middle;

[0045] Fig.11 for Fig. 9 A magnified view of the local structure at B in the middle;

[0046] Fig.12 It is a three-dimensional structural schematic diagram of a part of the structure of the vacuum interconnection system in the second embodiment of the present invention. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0050] In the description of the embodiments of the present invention, it should be understood that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the product of the application is conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0051] In the description of the embodiments of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] In the description of the embodiments of the present invention, it should be noted that the terms “first”, “second”, etc. used herein do not specifically refer to order or sequence, nor are they used to limit the present case. They are only used to distinguish components or operations described with the same technical terms.

[0053] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0054] The technical solution of the present invention will be described below in conjunction with the accompanying drawings.

[0055] Embodiment 1:

[0056] Reference Figure 1 to Figure 4 As shown, the sample transfer device in this embodiment includes: a transfer chamber 1, a transfer table 2, a sample self-locking table 3 and an operating rod 4. Among them, the transfer table 2 is movably arranged in the transfer chamber 1; the sample self-locking table 3 is movably arranged on the transfer table 2, and the sample self-locking table 3 includes a table body 31 and a plurality of spring components 32; the operating rod 4 is used to drive the sample self-locking table 3 to move, so that the sample self-locking table 3 switches from a first state to a second state; in the first state, the sample self-locking table 3 is located on the operating rod 4, the spring component 32 is in contact with the sample 5, and the sample 5 is locked on the table body 31; in the second state, the sample self-locking table 3 is arranged on the transfer table 2, the spring component 32 is separated from the sample 5, and the sample 5 is unlocked from the table body 31.

[0057] According to this design, during the process of transferring the sample 5, the sample self-locking table 3 on which the sample 5 is placed is directly moved by the operating rod 4 to prevent the sample 5 from falling from the table body 31, thereby enhancing the reliability and efficiency of the sample 5 transfer and improving the user experience without having to worry about the sample 5 falling due to operational errors.

[0058] In order to lock the sample 5 on the platform 31 when the operating rod 4 transfers the sample self-locking platform 3, refer to Figure 5 As shown, in this embodiment, not only one spring assembly 32 can be provided, but also multiple spring assembly 32 can be provided along the circumferential interval of the platform 31, such as 2, 3, or 4, etc., and the effect is better than using one spring assembly 32 to lock the sample 5, which can be understood and accepted by technical personnel in this field.

[0059] Specifically, refer to Figure 2 to Figure 4 As shown, in this embodiment, a receiving hole 311 is provided on the platform 31, and a positioning column 21 matching the receiving hole 311 is provided on the transfer platform 2; the spring assembly 32 includes a pin 321 penetrating the side wall of the platform 31, a spring 322 fixedly connected to the first end of the pin 321, and an elastic member 323 sleeved on the pin 321, and the elastic member 323 makes the pin 321 have a tendency to move inward; in the first state, the second end of the pin 321 extends into the receiving hole 311, and the spring 322 abuts against the sample 5; in the second state, the positioning column 21 extends into the receiving hole 311 and abuts against the second end of the pin 321, and the spring 322 is separated from the sample 5. Among them, the elastic member 323 can be a structure such as a spring, a leaf spring, an air bag, etc. that has elastic force and makes the pin 321 have a tendency to move inward. According to this design, when the sample self-locking platform 3 is set on the transfer platform 2, the positioning column 21 can drive the spool to move outward. Since the spring piece 322 is fixedly connected to the pin shaft 321, the spring piece 322 can move outward, thereby realizing the separation of the spring piece 322 and the sample 5; when the sample 5 is lifted from the transfer platform 2, due to the action of the elastic member 323, the pin shaft 321 can move inward, thereby driving the spring piece 322 to move inward, so that the spring piece 322 abuts against the sample 5, so that the sample 5 is locked on the platform body 31.

[0060] Among them, refer to Figure 3-4As shown, the spring piece 322 in this embodiment includes a first main body 3221 fixedly mounted with the pin 321, a second main body 3222 abutting against the sample 5, and a connecting portion 3223 connecting the first main body 3221 and the second main body 3222, the connecting portion 3223 is tilted upward from the inside to the outside, the highest point of the second main body 3222 is higher than the upper surface of the sample 5, and the lowest point of the second main body 3222 is lower than the upper surface of the sample 5. According to this design, the spring piece 322 can be fixedly mounted on the pin 321 by fixing the first main body 3221 with the pin 321. At the same time, since the spring piece 322 has the ability of elastic deformation, when the spring piece 322 abuts against the sample 5, the second main body 3222 elastically deforms upward so that the lowest point of the second main body 3222 is higher than the upper surface of the sample 5, so that the second main body 3222 is located above the sample 5. Since the second main body 3222 has a tendency to rebound downward, the sample 5 can be pressed by the second main body 3222 to lock the sample 5 on the platform 31.

[0061] In addition, refer to Figure 3-4 As shown, the spring piece assembly 32 in this embodiment further includes a connecting piece 324 fixedly mounted on the pin shaft 321 and a limiting pin 325 fixedly mounted on the connecting piece 324, and the limiting pin 325 is at least partially penetrated in the platform 31. It can be understood that, due to the principle that two points can determine a straight line, the position of the pin shaft 321 can be determined by setting the pin shaft 321 and the limiting pin 325, so as to prevent the pin shaft 321 from rotating, thereby preventing the spring piece 322 from rotating.

[0062] Further, in order to prevent the pin 321 from extending too much into the receiving hole 311, refer to Figure 3-4 As shown, the limiting pin 325 in this embodiment includes a pin body 3251 and a limiting portion 3252 fixedly mounted on the pin body 3251; in the first state, the limiting portion 3252 is in contact with the platform body 31; in the second state, the limiting portion 3252 is separated from the platform body 31. It can be understood that this embodiment can limit the portion of the pin shaft 321 protruding into the receiving hole 311 to prevent the pin shaft 321 from excessively extending into the receiving hole 311 due to the action of the elastic member 323. When the sample self-locking platform 3 is located on the transfer platform 2, the pin shaft 321 will abut against the side wall of the positioning column 21. When the elastic force is too large, the friction resistance between the pin shaft 321 and the positioning column 21 will be too large, which will eventually make it difficult to remove the sample self-locking platform 3 from the transfer platform 2 through the operating rod 4. Therefore, according to this design, it can be prevented that the sample self-locking platform 3 cannot be quickly removed from or placed on the transfer platform 2 during the state switching process between the first state and the second state of the sample transfer device.

[0063] In order to further facilitate the rapid removal of the sample from the transfer table 2 or the placement of the sample on the self-locking table 3, refer to Figure 3-4As shown, the end surface of the second end of the pin shaft 321 in this embodiment is spherical. According to this design, the friction resistance between the pin shaft 321 and the positioning column 21 can be further reduced; at the same time, when the sample self-locking platform 3 is placed on the transfer platform 2, the positioning column 21 extends into the receiving hole 311, and the positioning column 21 can push the pin shaft 321 outward through the spherical end surface of the pin shaft 321, so that the spring piece 322 can be moved outward through the pin shaft 321, thereby facilitating the placement of the sample 5.

[0064] Preferably, in order to facilitate the pin 321 to be ejected outwards through the positioning column 21, refer to Figure 2 to Figure 4 As shown, the outer wall of the positioning column 21 in this embodiment is provided with a chamfer 211. When the positioning column 21 extends into the receiving hole 311, the chamfer 211 of the positioning column 21 abuts against the end surface of the second end of the pin shaft 321 extending into the receiving hole 311, thereby converting the upward movement of the positioning column 21 into the outward movement of the pin shaft 321.

[0065] To facilitate the placement of sample 5, refer to Figure 5 As shown, the upper surface of the platform 31 in this embodiment extends upward to be provided with a limiting protrusion 312. A plurality of limiting protrusions 312 are provided, and a plurality of limiting protrusions 312 enclose a mounting cavity, and the sample 5 can be quickly positioned and placed in the mounting cavity.

[0066] In order to facilitate the accurate positioning of the sample self-locking table 3 and the transfer table 2 to prevent misalignment during the process of picking up or putting down the sample self-locking table 3, refer to Figure 6-7 As shown, a positioning protrusion 313 is extended downwardly from the lower surface of the platform body 31 in this embodiment, and a positioning groove 22 matching with the positioning protrusion 313 is provided on the transfer platform 2 .

[0067] In order to facilitate the movement of the sample self-locking table 3 by the operating rod 4, the operating rod 4 in this embodiment includes a rod body and a first operating arm 41 and a second operating arm 42 arranged opposite to each other. A clamping plate 314 is provided on the table body 31, and the first operating arm 41 and the second operating arm 42 are respectively provided with a first clamping groove 411 and a second clamping groove 421 that cooperate with the clamping plate 314.

[0068] In order to prevent the sample self-locking platform 3 from sliding out of the operating rod 4, refer to Figure 5 Combined with Figure 8 to Figure 11As shown, the operating rod 4 in this embodiment also includes a first elastic limiting piece 412 fixedly installed in the first card slot 411 and a second elastic limiting piece 422 fixedly installed in the second card slot 421. The first elastic limiting piece 412 includes a first fixing portion 4121 and a first stop portion 4122 fixedly installed with the first card slot 411, and the second elastic limiting piece 422 includes a second fixing portion 4221 and a second stop portion 4222 fixedly installed with the second card slot 421. When the card plate 314 is located in the first card slot 411 and the second card slot 421, the card plate 314 is respectively against the first stop portion 4122 of the first elastic limiting piece 412 and the second stop portion 4222 of the second elastic limiting piece 422. According to this design, the card plate 314 can be prevented from sliding out of the first card slot 411 and the second card slot 421, thereby preventing the sample self-locking platform 3 from sliding out of the operating rod 4.

[0069] Embodiment 2:

[0070] Reference Fig.12 As shown, the vacuum interconnection system in this embodiment includes: an observation device and a sample transfer device as described in Example 1, and the sample transfer device is connected to the observation device. The operating rod 4 can transfer the sample self-locking table 3 from the sample 5 transfer device to the observation device. Among them, the observation device can be a scanning electron microscope (SEM). Among them, the SEM includes a placement rack 6, and the placement rack 6 is provided with a placement table 61 that matches the sample self-locking table 3, and the placement table 61 has the same structure as the transfer table 2 in the embodiment. The present invention realizes the transmission of sample 5 between observation equipment such as a scanning electron microscope and a sample transfer device in a superior environment of ultra-high vacuum, thereby protecting the surface of the sample 5 from oxidation or other structural or chemical changes related to atmospheric exposure.

[0071] Of course, the present invention is not limited to this. The vacuum interconnection system in another embodiment of the present invention may also include a deposition device, which can be used to generate samples, thereby transferring the samples to the sample self-locking table in the sample transfer device, and then transferring the sample self-locking table to the observation device through the operating rod.

[0072] It can be seen from the above technical solutions that the present invention has the following beneficial effects:

[0073] The present invention provides a sample transfer device and a vacuum interconnection system, which are provided with a sample self-locking table capable of locking samples. The sample self-locking table on which the samples are placed can be directly moved by an operating rod, thereby avoiding the risk of the samples falling from the table during the sample transfer process, thereby enhancing the reliability and efficiency of the sample transfer, and also improving the user experience, without having to worry about the samples falling due to operational errors. The present invention realizes the sample transmission between observation equipment such as scanning electron microscopes and the sample transfer device in the superior environment of ultra-high vacuum, thereby avoiding the surface contamination caused by the samples being exposed to the atmospheric environment, and improving the effect of the results of the observation by the observation equipment.

[0074] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and range of equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0075] In addition, it should be understood that although the present specification is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample transfer device, characterized in that: The sample delivery device comprises: Transit Room; A transfer table, movably disposed in the transfer chamber; A sample self-locking platform, movably arranged on the transfer platform, the sample self-locking platform comprises a platform body and a plurality of spring sheet assemblies; An operating rod, used to drive the sample self-locking platform to move, so that the sample self-locking platform switches from a first state to a second state; In the first state, the sample self-locking platform is located on the operating rod, the spring assembly abuts against the sample, and the sample is locked on the platform; In the second state, the sample self-locking platform is disposed on the transfer platform, the spring assembly is separated from the sample, and the sample is unlocked from the platform.

2. The sample transfer device according to claim 1, characterized in that: A receiving hole is provided on the platform body, and a positioning column matched with the receiving hole is provided on the transfer platform; The spring assembly includes a pin shaft penetrating the side wall of the platform body, a spring sheet fixedly connected to the first end of the pin shaft, and an elastic member sleeved on the pin shaft, wherein the elastic member makes the pin shaft have a tendency to move inwards; In the first state, the second end of the pin extends into the receiving hole, and the spring sheet abuts against the sample; In the second state, the positioning column extends into the receiving hole and abuts against the second end of the pin, and the spring is separated from the sample.

3. The sample transfer device according to claim 2, characterized in that: The spring piece includes a first main body portion fixedly mounted on the pin shaft, a second main body portion abutting against the sample, and a connecting portion connecting the first main body portion and the second main body portion, wherein the connecting portion is inclined upward from the inside to the outside, the highest point of the second main body portion is higher than the upper surface of the sample, and the lowest point of the second main body portion is lower than the upper surface of the sample.

4. The sample transfer device according to claim 2, characterized in that: The spring sheet assembly further comprises a connecting sheet fixedly mounted on the pin shaft and a limiting pin fixedly mounted on the connecting sheet, wherein at least a portion of the limiting pin is penetrated through the platform body.

5. The sample transfer device according to claim 4, characterized in that: The limiting pin comprises a pin body and a limiting portion fixedly mounted on the pin body; In the first state, the limiting portion abuts against the platform; In the second state, the limiting portion is separated from the platform.

6. The sample transfer device according to claim 2, characterized in that: The end surface of the second end of the pin is spherical; and / or, The positioning column is provided with a chamfer.

7. The sample transfer device according to claim 1, characterized in that: The upper surface of the platform is provided with a limit protrusion extending upward; and / or, A positioning protrusion is extended downwardly from the lower surface of the platform body, and a positioning groove matched with the positioning protrusion is provided on the transfer platform.

8. The sample transfer device according to claim 1, characterized in that: The operating rod comprises a rod body and a first operating arm and a second operating arm which are arranged opposite to each other. A clamping plate is arranged on the platform body. The first operating arm and the second operating arm are respectively provided with a first clamping groove and a second clamping groove which match with the clamping plate.

9. The sample transfer device according to claim 8, characterized in that: The operating rod also includes a first elastic limiting piece fixedly installed in the first slot and a second elastic limiting piece fixedly installed in the second slot.

10. A vacuum interconnection system, characterized in that: The vacuum interconnection system comprises: Observation equipment and / or deposition equipment; The sample transfer device according to any one of claims 1 to 9, wherein the sample transfer device is connected to an observation device and / or a deposition device.

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