Sample fine adjustment device based on flag-shaped sample support

Abstract

The invention provides a sample fine adjustment device based on a flag-shaped sample support, and relates to the field of technical adjustment of precision machinery. The sample fine adjustment device based on the flag-shaped sample support comprises a heightened base, the flag-shaped sample support, a base and a movable platform, a flag-shaped sample support clamping groove is formed in the heightened base, the flag-shaped sample support is detachably arranged in the flag-shaped sample support clamping groove, the base is arranged on the flag-shaped sample support, a movable platform groove is formed in the base, and the movable platform is arranged in the movable platform groove. The movable platform can slide on the inner bottom surface of the movable platform groove; and the top of the movable platform is used for mounting a sample. The sample fine adjustment device further comprises two groups of displacement mechanisms, and the two groups of displacement mechanisms are respectively used for adjusting two different horizontal directions of the movable platform. The invention has the advantages of high precision, low cost, small size, customizable stroke, suitability for vacuum environment and the like.

Description

Technical Field

[0001] The invention relates to the field of precision mechanical technology adjustment, in particular to a sample fine-tuning device based on a flag-shaped sample holder. Background Art

[0002] In the field of precision mechanical adjustment technology, the two-dimensional displacement adjustment platform is a core component in scenarios such as optical equipment calibration, microelectronic component assembly, and precision instrument debugging. Its performance directly affects the working accuracy and operating efficiency of the equipment.

[0003] At present, the mainstream high-precision displacement platforms on the market mostly use piezoelectric ceramic drive or high-precision ball screw structure. Although they can achieve micron-level displacement accuracy, there are two significant pain points: on the one hand, the complex transmission structure makes it difficult to miniaturize the device (usually the overall size exceeds 50mm). 3 ), it is difficult to adapt to miniaturized application scenarios such as flag-shaped sample holders; on the other hand, the introduction of high-precision processing components and closed-loop feedback systems has kept the manufacturing cost high (the price of conventional products is in the tens of thousands of yuan), especially for scientific research instruments or industrial testing equipment that need to be deployed in batches. The contradiction between cost control and space utilization in traditional solutions is becoming increasingly prominent. In addition, existing adjustment platforms generally adopt a fixed stroke design, which lacks parameter adjustability when facing different application scenarios. Users cannot dynamically balance between accuracy (typical value 0.1~10μm) and stroke range (conventional 5~20mm) according to actual needs, resulting in limited flexibility in equipment use. In addition, in traditional solutions, the adjustment of the sample position must be carried out in a vacuum environment, so related components must be connected from the external environment into the vacuum environment, which is easy to damage the vacuum environment.

[0004] These problems have severely restricted the promotion and application of high-precision displacement technology in emerging fields such as small and medium-sized optical platforms and portable detection equipment. There is an urgent need for an innovative solution that is miniaturized, low-cost and customizable. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a sample fine-tuning device based on a flag-shaped sample holder, which has the advantages of high precision, low cost, small size, customizable stroke and suitability for vacuum environment.

[0006] A sample fine-tuning device based on a flag-shaped sample holder comprises a heightened base, a flag-shaped sample holder, a pedestal and a moving platform, wherein the heightened base is provided with a flag-shaped sample holder slot, the flag-shaped sample holder is detachably arranged in the flag-shaped sample holder slot, the pedestal is arranged on the flag-shaped sample holder, the pedestal is provided with a moving platform groove, the moving platform can slide on the inner bottom surface of the moving platform groove, and the top of the moving platform is used to install the sample; the sample fine-tuning device also comprises two groups of displacement mechanisms, both groups of the displacement mechanisms comprise a displacement adjustment mechanism and a displacement auxiliary mechanism, the displacement adjustment mechanism and the displacement auxiliary mechanism in the same group of displacement mechanisms are respectively located outside the opposite side walls of the moving platform and abut against the corresponding side walls, and the two groups of displacement mechanisms are respectively used to adjust different directions on the same horizontal plane of the moving platform; the displacement adjustment mechanism includes a differential screw, a fixed frame and a moving frame, the differential screw includes a first screw and a second screw connected in sequence, the pitch of the first screw is different from the pitch of the second screw; the fixed frame is provided with an internal thread and forms a thread pair with the first screw, the moving frame is provided with an internal thread and forms a thread pair with the second screw; the moving frame is provided with a first push rod, and the free end of the first push rod abuts against the side wall of the moving platform; the displacement auxiliary mechanism includes a spring sleeve, and also includes a spring, a spring push rod and a second push rod connected in sequence, parts of the spring and the spring push rod are located in the inner cavity of the spring sleeve, and the free end of the second push rod abuts against the side wall of the moving platform.

[0007] In a feasible embodiment, the sample fine-tuning device also includes a plurality of guide pillars, and a plurality of first guide pillar grooves are provided on the top of the side wall of the base, each guide pillar corresponds to a first guide pillar groove and can slide in the corresponding first guide pillar groove; a push rod groove is provided at the tail of the guide pillar, and the free end of the first push rod or the free end of the second push rod is detachably connected to the push rod groove.

[0008] In a feasible embodiment, the sample fine-tuning device also includes a top cover, the bottom of which is provided with a plurality of second guide column grooves, each second guide column groove corresponds to a first guide column groove; the top cover is detachably connected to the top of the side wall of the base.

[0009] In a feasible embodiment, the first screw and the second screw in the same differential screw are coaxially arranged; and / or the different differential screws are all on the same horizontal plane; and / or the differential screw and the corresponding first push rod and second push rod are all on the same horizontal plane.

[0010] In a feasible implementation manner, the displacement adjustment mechanism further includes a fixedly arranged slide rail, and a sliding block matching the slide rail is provided at the bottom of the movable frame, and the sliding block is slidably connected to the slide rail.

[0011] In a feasible implementation manner, a plurality of ball grooves are provided on the inner bottom surface of the base, balls are provided in the ball grooves, and the bottom of the moving platform can roll on the balls.

[0012] In a feasible implementation manner, a fixing sleeve is provided in the fixing frame, and an internal thread is provided in the fixing sleeve to form a thread pair with the first screw rod.

[0013] In a feasible implementation manner, a knob is provided at one end of the differential screw away from the base, and a portion of the inner wall of the knob contacts the outer wall of the fixed sleeve; and a scale is provided on the outer surface of the fixed sleeve.

[0014] In a feasible implementation manner, the pitch difference between the first screw and the second screw is 0.05-0.2 mm, and the stroke of the moving platform is 0.5-2 mm.

[0015] The present invention also provides a method for using a sample fine-tuning device based on a flag-shaped sample holder, comprising the following steps:

[0016] Step 1) Rotate a differential screw in a displacement adjustment mechanism to move the moving platform to a specified position in the direction adjusted by the displacement adjustment mechanism.

[0017] Step 2) Rotate the differential screw in another displacement adjustment mechanism to move the moving platform to a specified position in the direction adjusted by the displacement adjustment mechanism.

[0018] The sample fine-tuning device based on the flag-shaped sample holder provided by the present invention has the following beneficial effects:

[0019] 1) The present invention has the advantages of high precision, low cost, small size, customizable stroke and suitability for vacuum environment. High precision: Through the ingenious design between the differential screw and other components, high-precision displacement output of the sample relative to the flag-shaped sample holder can be achieved, and the displacement accuracy can be controlled within 1 to 10 μm. Low cost: The components and parts in the present invention can all adopt standardized machined parts, which greatly reduces the cost while ensuring accuracy, and the cost is only less than 30% of similar products. Customizable stroke: Different displacement accuracy can be achieved by selecting different pitch differences between the first screw and the second screw, and the stroke and accuracy can be flexibly adjusted according to user needs. Small size: The volume of the whole device is less than 50×50×20 mm, which is suitable for small spaces. Furthermore, the two-dimensional size of the remaining device after disassembling the displacement mechanism does not exceed the size of the general flag-shaped sample holder, that is, 21x22 mm, and the overall height does not exceed 9 mm.

[0020] 2) The differential screw, the first push rod and the second push rod of the present invention are on the same horizontal plane, which can effectively reduce the Abbe error. After finite element simulation, the error is ≤0.4μm. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a top view of the overall structure of the present invention.

[0022] Figure 2 It is a side cross-sectional view of the overall structure of the present invention.

[0023] Figure 3 It is the overall structure diagram of the present invention.

[0024] Figure 4 It is a partial structural diagram of the present invention.

[0025] Figure 5 It is a structural diagram of the base in the present invention.

[0026] Figure 6 It is a structural diagram of the top cover in the present invention.

[0027] Figure 7 It is a simulation structure diagram of the present invention.

[0028] Figure 8 This is a simulation result diagram of the present invention.

[0029] Reference numerals

[0030] Raised base 1

[0031] Flag-shaped sample tray 11

[0032] Flag sample holder 2

[0033] Base 3

[0034] Moving platform groove 31

[0035] First guide post groove 32

[0036] Ball groove 33

[0037] Ball 33.1

[0038] Dynamic Platform 4

[0039] Displacement adjustment mechanism 5

[0040] Differential screw 51

[0041] First screw 51.1

[0042] Second screw 51.2

[0043] Knob 51.3

[0044] Fixed frame 52

[0045] Fixed sleeve 52.1

[0046] Mobile rack 53

[0047] Slide rail 53.1

[0048] First putter 54

[0049] Slide 55

[0050] Displacement auxiliary mechanism 6

[0051] Spring sleeve 61

[0052] Spring 62

[0053] Spring push rod 63

[0054] Second push rod 64

[0055] Guide column 7

[0056] Push rod groove 71

[0057] Top cover 8

[0058] Second guide post groove 81

[0059] Top cover groove 82 DETAILED DESCRIPTION

[0060] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without creative work belong to the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0061] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0062] Furthermore, in the description of the present invention, unless otherwise specified, “plurality” means two or more.

[0063] The embodiment of the present invention provides a sample fine-tuning device based on a flag-shaped sample holder, in combination with reference to Figure 1 to Figure 3 , comprising a heightened base 1, a flag-shaped sample holder 2, a base 3 and a moving platform 4, wherein the heightened base 1 is provided with a flag-shaped sample holder slot 11, the flag-shaped sample holder 2 is detachably arranged in the flag-shaped sample holder slot 11, and the base 3 is arranged on the flag-shaped sample holder 2, such as Figure 2 As shown, one end of the flag-shaped sample holder 2 is provided with an ear holder, which can be grasped by a vacuum manipulator. Therefore, in a preferred embodiment, one of the side walls of the elevated base 1 is disconnected from the middle to provide a side entrance and exit for the flag-shaped sample holder slot 11, so that the flag-shaped sample holder 2 can enter and exit from the entrance and exit. Figure 1 to Figure 3 The base 3 is provided with a moving platform groove 31, and the moving platform 4 can slide on the inner bottom surface of the moving platform groove 31. The height of the moving platform 4 is usually greater than the depth of the moving platform groove 31 to ensure that at least part of the side wall of the moving platform 4 can be exposed to the outside of the moving platform groove 31. The top of the moving platform 4 is used to install the sample. The top of the moving platform 4 is usually provided with a screw hole. After the sample is placed on the top of the moving platform 4, the external fixing part can be connected to the moving platform 4 by screws, so as to fix the sample. Continue to read Figure 1 to Figure 3 The sample fine-tuning device further comprises two sets of displacement mechanisms, the displacement mechanisms comprising a displacement adjustment mechanism 5 and a displacement auxiliary mechanism 6. The displacement adjustment mechanism 5 and the displacement auxiliary mechanism 6 in the same set of displacement mechanisms are respectively located outside the opposite side walls of the moving platform 4 and abut against the corresponding side walls. The two sets of displacement mechanisms are respectively used to adjust different directions on the same horizontal plane of the moving platform 4, which is actually to adjust the relative position of the moving platform 4 on the flag-shaped sample holder 2, so as to adjust the relative position between the sample and the flag-shaped sample holder 2. Generally speaking, the two directions are based on Figure 1 The horizontal and vertical directions are the reference. Figure 1 to Figure 3 , see Figure 2The displacement adjustment mechanism 5 includes a differential screw 51, a fixed frame 52 and a movable frame 53. The differential screw 51 includes a first screw 51.1 and a second screw 51.2 connected in sequence. The pitch of the first screw 51.1 is different from the pitch of the second screw 51.2. The fixed frame 52 is provided with an internal thread and forms a thread pair with the first screw 51.1. The movable frame 53 is provided with an internal thread and forms a thread pair with the second screw 51.2. It should be noted that the second screw 51.2 does not form a thread pair with the fixed frame 52, and similarly, the first screw 51.1 does not form a thread pair with the movable frame 53. A first push rod 54 is provided on the movable frame 53. The free end of the first push rod 54 abuts against the side wall of the moving platform 4. The free end of the first push rod 54 refers to the end of the first push rod 54 that is suspended. The first screw 51.1 and the second screw 51.2 can be spliced ​​into a differential screw 51 by machining. Continue reading Figure 1 to Figure 3 , see Figure 2 The displacement auxiliary mechanism 6 includes a spring sleeve 61, and also includes a spring 62, a spring push rod 63 and a second push rod 64 connected in sequence. Parts of the spring 62 and the spring push rod 63 are located in the inner cavity of the spring sleeve 61. The free end of the second push rod 64 abuts against the side wall of the moving platform 4. The free end of the second push rod 64 refers to the end of the second push rod 64 that is suspended. The working principle of the displacement adjustment mechanism 5 and the displacement auxiliary mechanism 6 is described here. The directional words in the following description can be used with Figure 2To understand: First, after the first screw 51.1 and the second screw 51.2 are combined to form the differential screw 51, the motion states of the two are the same. When the first screw 51.1 rotates one circle, the second screw 51.2 also rotates one circle synchronously. The first screw 51.1 rotates to the left, and the second screw 51.2 also rotates to the left. The only difference is the pitch between the first screw 51.1 and the second screw 51.2. When the differential screw 51 rotates one circle, since the fixing frame 52 is fixed and a thread pair is formed between the first screw 51.1 and the fixing frame 52, the first screw 51.1 will move to the left or right relative to the fixing frame 52 by a distance of the first screw 51.1 pitch, and the second screw 51.2 will also move to the left or right by a distance of the first screw 51.1 pitch. Then, since a thread pair is formed between the second screw 51.2 and the movable frame 53 and the movable frame 53 is movable, when the second screw 51.2 rotates one circle to the left or right, the movable frame 53 will move in the direction opposite to the moving direction of the differential screw 51 by a distance equal to the pitch of the second screw 51.2. Based on the distance previously moved by the second screw 51.2, the moving distance of the movable frame 53 is the pitch difference between the first screw 51.1 and the second screw 51.2. For example, the pitch of the first screw 51.1 is 0.45 mm, and the pitch of the second screw 51.2 is 0.4 mm. The first screw 51.1 and the second screw 51.2 are both right-handed threads or both are left-handed threads. Here, right-handed threads are taken as an example. Right-handed threads represent screwing in when rotating clockwise. When the differential screw 51 rotates clockwise one circle, the first screw 51.1 moves forward relative to the fixed frame 52 by a distance equal to the pitch of the first screw 51.1, i.e., 0.45 mm, while the movable frame 53 moves backward relative to the second screw 51.2 by a distance equal to the pitch of the second screw 51.2, i.e., 0.4 mm. Therefore, when the differential screw 51 rotates clockwise one circle, the movable frame 53 actually moves forward by a distance equal to the pitch of the first screw 51.1, i.e., 0.45 mm, minus the pitch of the second screw 51.2, i.e., 0.05 mm, i.e., 50 μm. Then the first push rod 54 will push the moving platform 4 forward by 50μm. Conversely, when the differential screw 51 rotates left one circle, the moving frame 53 actually retreats a distance of 0.45mm, the pitch of the first screw 51.1, minus 0.4mm, the pitch of the second screw 51.2, that is, 50μm. Because the second push rod 64 is always pushed against the moving platform 4 by the thrust of the spring 62, when the first push rod 54 retreats, the second push rod 64 will move forward and push the moving platform 4 to move 50μm, thereby keeping the opposite side walls of the moving platform 4 always against the first push rod 54 and the second push rod 64.

[0064] It is understandable that since the distance moved by the first push rod 54 when the differential screw 51 rotates one circle is the pitch difference between the first screw 51.1 and the second screw 51.2, the first screw 51.1 and the second screw 51.2 with different pitches can be combined to form a new differential screw 51, thereby adjusting the distance moved by the first push rod 54 when the differential screw 51 rotates one circle, for example: 0.05mm, 0.1mm, 0.15mm, 0.2mm, etc. In addition, the first screw 51.1 and the second screw 51.2 can both be made of standard parts and conventional stainless steel materials, which significantly reduces the manufacturing cost.

[0065] In summary, the present invention has the advantages of high precision, low cost, small size, customizable stroke and suitability for vacuum environment. High precision: Through the ingenious design between the differential screw 51 and other components, the high-precision displacement output of the sample relative to the flag-shaped sample holder 2 can be achieved, and the displacement accuracy can be controlled within 1 to 10 μm. Low cost: The components and parts in the present invention can all adopt standardized machined parts, which greatly reduces the cost while ensuring the accuracy, and the cost is only less than 30% of similar products. Customizable stroke: Different displacement accuracies can be achieved by selecting different pitch differences between the first screw 51.1 and the second screw 51.2, and the stroke and accuracy can be flexibly adjusted according to user needs. Small size: The volume of the whole device is less than 50×50×20 mm, which is suitable for small spaces. Furthermore, the two-dimensional size of the remaining device after the displacement mechanism is disassembled does not exceed the size of the general flag-shaped sample holder, that is, 21x22 mm, and the overall height does not exceed 9 mm.

[0066] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is further described in detail. Figure 1 to Figure 3 , see Figure 2 and Figure 4 The sample fine-tuning device further comprises a plurality of guide posts 7. The top of the side wall of the base 3 is provided with a plurality of first guide post grooves 32. Each guide post 7 corresponds to a first guide post groove 32 and can slide in the corresponding first guide post groove 32. The first guide post groove 32 can limit the moving direction of the guide post 7, thereby improving the straightness of the first push rod 54 and the second push rod 64 when pushing the moving platform 4. The head of the guide post 7 is usually a spherical ejector pin, which can reduce the friction of the contact surface with the side wall of the moving second screw 51.2 platform 4. The tail of the guide post 7 is provided with a push rod groove 71. The free end of the first push rod 54 or the free end of the second push rod 64 is detachably connected to the push rod groove 71. Generally speaking, the free end of the first push rod 54 or the free end of the second push rod 64 can be connected to the push rod groove 71 to complete the connection with the guide post 7. In a specific embodiment, the longitudinal section of the first guide post groove 32 is triangular, and the outer wall of the guide post 7 is tangent to the two outer walls of the first guide post groove 32.

[0067] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is further described in detail. Figure 1 to Figure 3 , see Figure 6 The sample fine-tuning device also includes a top cover 8, and a plurality of second guide column grooves 81 are provided at the bottom of the top cover 8, each second guide column groove 81 corresponds to a first guide column groove 32, and the top cover 8 and the top of the side wall of the base 3 are detachably connected. Generally speaking, a top cover groove 82 is provided in the top cover 8 so that the moving platform 4 and a part of the sample can be located therein. As an illustration, the function of the top cover 8 is: after the displacement adjustment mechanism 5 and the displacement auxiliary mechanism 6 have adjusted the position of the moving platform 4, the top cover 8 and the top of the side wall of the base 3 are connected. Usually, screw holes are preset on the bottom of the side wall of the top cover 8 and the top of the side wall of the base 3, and these screw holes can be connected by screws. When connecting the top cover 8 and the base 3, the correspondence between the second guide column groove 81 and the first guide column groove 32 should be ensured to ensure that each guide column 7 is fixedly clamped between the first guide column groove 32 and the second guide column groove 81. Then the first push rod and the second push rod can be pulled out of the guide column groove to separate them from the guide column 7. In this way, the connection between the displacement adjustment mechanism 5 and the displacement auxiliary mechanism 6 and the moving platform 4 can be disconnected. Finally, the ear tray of the flag-shaped sample tray 2 can be clamped by the vacuum manipulator to transfer the sample to the experimental area.

[0068] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is shown in FIG. Figure 2 , the first screw 51.1 and the second screw 51.2 in the same differential screw 51 are coaxially arranged, the different differential screws 51 are all on the same horizontal plane, and the differential screw 51 and the corresponding first push rod 54 and second push rod 64 are all on the same horizontal plane. In a specific embodiment, refer to Figure 1 , which can be used as an auxiliary reference Figure 2 , the number of the first push rod 54 in each displacement adjustment mechanism 5 and the number of the second push rod 64 in each displacement auxiliary mechanism 6 are both two, the differential thread, the first push rod 54 and the second push rod 64 in the same displacement mechanism are at the same level, preferably, the differential thread, the first push rod 54 and the second push rod 64 in different displacement mechanisms are at the same level. Figure 1 As shown, when the differential thread, the first push rod 54 and the second push rod 64 are on the same horizontal plane, the Abbe error can be effectively reduced. The Abbe error means that the axis of the measuring instrument and the axis of the workpiece to be measured must be on the same straight line, otherwise an error will occur. This error is called the Abbe error.

[0069] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is combined with reference to Figure 1 and Figure 2The displacement adjustment mechanism 5 also includes a fixed slide rail 55. The fixed setting means that the slide rail 55 cannot be moved. Generally speaking, the heightened base 1 will be fixed on an external workbench, and the slide rail 55 can also be fixed on an external workbench. A slider 53.1 matching the slide rail 55 is provided at the bottom of the mobile frame 53. The slider 53.1 is slidably connected to the slide rail 55. When the mobile frame 53 moves, the slider 53.1 at the bottom of the mobile frame 53 will move along the slide rail 55. The slide rail 55 can provide guidance for the slide rail 55, thereby improving the straightness and stability of the mobile frame 53 when moving.

[0070] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is shown in FIG. Figure 5 , a plurality of ball grooves 33 are provided on the inner bottom surface, and a ball 33.1 is provided in the ball groove 33. The bottom of the moving platform 4 can roll on the ball 33.1. The ball 33.1 can convert the sliding friction between the bottom of the moving platform 4 and the inner bottom surface of the moving platform groove 31 into rolling friction, thereby reducing the friction generated by the bottom of the moving platform 4 when moving, making the moving platform 4 move more smoothly. In a specific embodiment, five balls 33.1 are provided on the inner bottom surface of the moving platform groove 31, of which four balls 33.1 are respectively close to the four corners of the moving platform groove 31, and one ball 33.1 is located at the center point of the inner bottom surface of the moving platform groove 31. As a supplement, the ball 33.1 can be a small steel ball.

[0071] The sample fine-tuning device based on the flag-shaped sample holder provided in the embodiment of the present invention is shown in FIG. Figure 2 The fixing frame 52 is provided with a fixing sleeve 52.1, and the fixing sleeve 52.1 is provided with an internal thread and forms a thread pair with the first screw rod 51.1. When the first screw rod 51.1 rotates, the first screw rod 51.1 will move forward or backward relative to the fixing sleeve 52.1. Furthermore, a knob 51.3 is provided at the end of the differential screw 51 away from the base 3, and a portion of the inner wall of the knob 51.3 contacts the outer wall of the fixed sleeve 52.1. A scale is provided on the outer surface of the fixed sleeve 52.1, and the scale can be changed according to actual needs. Generally speaking, the edge of the knob 51.3 can be used as a marker for the current advancement distance of the differential screw 51. For example: the differential screw 51 rotates one circle, and the first push rod 54 moves forward or backward by 50 μm, then the interval between the scales can be 5 μm. When the edge of the knob 51.3 advances or retreats from one scale line to another scale line, it means that the differential screw 51 moves forward or backward by 5 μm, that is, the differential screw 51 rotates 1 / 10 of a circle. The specific moving direction of the first push rod 54 is determined according to the thread direction of the differential screw 51 and the rotation direction of the differential screw 51.

[0072] The embodiment of the present invention further provides a method for using a sample fine-tuning device based on a flag-shaped sample holder, comprising the following steps:

[0073] Preliminary steps 1) First, assemble the two displacement mechanisms, adjust the knob 51.3 to the 0 scale line, and then fix the sample on the moving platform 4.

[0074] Step 1) Rotate the differential screw 51 in a displacement adjustment mechanism 5 to move the movable platform 4 to a specified position in the direction adjusted by the displacement adjustment mechanism 5 .

[0075] Step 2) Rotate the differential screw 51 in another displacement adjustment mechanism 5 to move the movable platform 4 to a specified position in the direction adjusted by the displacement adjustment mechanism 5 .

[0076] Subsequent steps: 1) connecting the top cover 8 to the base 3, usually by using screws, and then disassembling the two displacement mechanisms.

[0077] Subsequent step 2) taking out the flag-shaped sample holder, usually requires removing the fixing screws used to fix the flag-shaped sample holder, and then the flag-shaped sample holder 2 can be grasped by the vacuum manipulator and placed in the experimental environment.

[0078] Embodiment 1

[0079] The first screw 51.1 adopts GB / T192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.4 mm. The second screw 51.2 adopts GB / 192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.45 mm. The first screw 51.1 and the second screw 51.2 are machined to form a differential screw 51.

[0080] Embodiment 2

[0081] The first screw 51.1 adopts GB / 192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.35 mm. The second screw 51.2 adopts GB / 192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.25 mm. The first screw 51.1 and the second screw 51.2 are machined to form a differential screw 51.

[0082] Embodiment 3

[0083] The first screw 51.1 adopts GB / 192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.4 mm. The second screw 51.2 adopts GB / 192-2003, corresponding to the national standard ISO 261, and has a pitch of 0.25 mm. The first screw 51.1 and the second screw 51.2 are machined to form a differential screw 51.

[0084] Example 4 Force Analysis of Differential Screw

[0085] 1. Calculate the thread pitch diameter (d2)

[0086] The thread pitch diameter is 0.64 times the nominal thread diameter. For M2 bolts, the nominal diameter d = 2 mm, so:

[0087] d2=0.64×d=0.64×2=1.28mm

[0088] 2. Calculate the nominal stress area (As)

[0089] The nominal stress area can be calculated by the formula Calculation, for M2 bolts:

[0090]

[0091] 3. Determine the yield strength of the material (o' S )

[0092] According to the mechanical properties of 20CrMnTi material, the yield strength o'S is about 395Mpa.

[0093] 4. Calculate the preload force (F)

[0094] The preload force is usually a certain proportion of the material yield strength, generally 60% to 80%. Here, 70% is taken as the calculated value:

[0095] F=0.7×o' s ×A s ≈80.15N

[0096] 5. Calculate the force required to advance 1 mm

[0097] According to the principle of screw transmission, the relationship between the forward distance (x) and the required force (F) can be expressed by the formula Calculate, where T is the torque, d2 is the thread diameter, P is the pitch, and x is the advance distance. Since we have already calculated the preload force F, we can use it to calculate the torque T, T ≈ 25.05Nm

[0098] 6. Convert torque to force

[0099] Finally, we need to convert torque to force, using the formula

[0100] F≈80.15N

[0101] 7. Simulation

[0102] Using ANSYS simulation software, a force of 80.15N is applied to the left side of the dynamic platform 4, and a soft spring is applied to the right side. Theoretically, there is about 0.05um deformation. The simulation structure diagram and simulation diagram can be found in Figure 7 and Figure 8 .

[0103] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A sample fine-tuning device based on a flag-shaped sample holder, characterized in that: The invention comprises a heightened base (1), a flag-shaped sample holder (2), a pedestal (3) and a movable platform (4); the heightened base (1) is provided with a flag-shaped sample holder slot (11); the flag-shaped sample holder (2) is detachably arranged in the flag-shaped sample holder slot (11); the pedestal (3) is arranged on the flag-shaped sample holder (2); a movable platform groove (31) is arranged in the pedestal (3); the movable platform (4) can slide on the inner bottom surface of the movable platform groove (31); and the top of the movable platform (4) is used for mounting a sample; The sample fine-tuning device further comprises two groups of displacement mechanisms, both groups of displacement mechanisms comprising a displacement adjustment mechanism (5) and a displacement auxiliary mechanism (6), the displacement adjustment mechanism (5) and the displacement auxiliary mechanism (6) in the same group of displacement mechanisms are respectively located outside the opposite side walls of the moving platform (4) and abut against the corresponding side walls, and the two groups of displacement mechanisms are respectively used to adjust different directions on the same horizontal plane of the moving platform (4); The displacement adjustment mechanism (5) comprises a differential screw (51), a fixed frame (52) and a movable frame (53); the differential screw (51) comprises a first screw (51.1) and a second screw (51.2) connected to each other; the pitch of the first screw (51.1) is different from the pitch of the second screw (51.2); the fixed frame (52) is provided with an internal thread and forms a thread pair with the first screw (51.1); the movable frame (53) is provided with an internal thread and forms a thread pair with the second screw (51.2); the movable frame (53) is provided with a first push rod (54), the free end of the first push rod (54) abuts against the side wall of the moving platform (4); The displacement assisting mechanism (6) comprises a spring sleeve (61), and also comprises a spring (62), a spring push rod (63) and a second push rod (64) connected in sequence, wherein parts of the spring (62) and the spring push rod (63) are located in the inner cavity of the spring sleeve (61), and the free end of the second push rod (64) abuts against the side wall of the moving platform (4).

2. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: The sample fine-tuning device further comprises a plurality of guide pillars (7), a plurality of first guide pillar grooves (32) are provided on the top of the side wall of the base (3), each guide pillar (7) corresponds to a first guide pillar groove (32) and can slide in the corresponding first guide pillar groove (32); A push rod groove (71) is provided at the tail of the guide column (7), and the free end of the first push rod (54) or the free end of the second push rod (64) is detachably connected to the push rod groove (71).

3. The sample fine-tuning device based on the flag-shaped sample holder according to claim 2, characterized in that: The sample fine-tuning device also includes a top cover (8), the bottom of which is provided with a plurality of second guide column grooves (81), each second guide column groove (81) corresponding to a first guide column groove (32); the top cover (8) and the top of the side wall of the base (3) are detachably connected.

4. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: The first screw (51.1) and the second screw (51.2) in the same differential screw (51) are coaxially arranged; and / or the different differential screws (51) are all located on the same horizontal plane; and / or the differential screw (51) and the corresponding first push rod (54) and second push rod (64) are all located on the same horizontal plane.

5. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: The displacement adjustment mechanism (5) further comprises a fixedly arranged slide rail (55); a slider 53.1 matching the slide rail (55) is provided at the bottom of the movable frame (53); and the slider (53.1) is slidably connected to the slide rail (55).

6. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: A plurality of ball grooves (33) are provided on the inner bottom surface of the base (3), balls (33.1) are provided in the ball grooves (33), and the bottom of the moving platform (4) can roll on the balls (33.1).

7. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: A fixing sleeve (52.1) is provided in the fixing frame (52), and an internal thread is provided in the fixing sleeve (52.1) to form a thread pair with the first screw rod (51.1).

8. The sample fine-tuning device based on the flag-shaped sample holder according to claim 7, characterized in that: A knob (51.3) is provided at one end of the differential screw (51) away from the base (3); a portion of the inner wall of the knob (51.3) contacts the outer wall of the fixed sleeve (52.1); and a scale is provided on the outer surface of the fixed sleeve (52.1).

9. The sample fine-tuning device based on the flag-shaped sample holder according to claim 1, characterized in that: The pitch difference between the first screw (51.1) and the second screw (51.2) is 0.05 to 0.2 mm, and the stroke of the moving platform (4) is 0.5 to 2 mm.

10. A method for using the sample fine-tuning device based on the flag-shaped sample holder according to any one of claims 1 to 9, comprising the following steps: Step 1) rotating a differential screw (51) in a displacement adjustment mechanism (5) to move the movable platform (4) to a specified position in the direction adjusted by the displacement adjustment mechanism (5); Step 2) Rotate the differential screw (51) in another displacement adjustment mechanism (5) to move the movable platform (4) to a specified position in the direction adjusted by the displacement adjustment mechanism (5).

Images