Atmospheric pressure plasma exciting electrode and production process thereof

Abstract

The invention discloses an atmospheric pressure plasma excitation electrode and a production process thereof, the production process comprises the steps of green body preparation, green body roasting, rough body cleaning, passivation treatment and insulation treatment, and the preparation raw materials comprise, by mass, 70-90% of a ceramic phase material, 2-5% of a lattice inhibitor and 5-28% of a conductive phase material. The atmospheric pressure plasma excitation electrode prepared by the invention has the advantages of high-temperature oxidation resistance, surface physical sputtering resistance, good normal-temperature and high-temperature conductivity and good machinability, and can meet the requirements of different working conditions such as normal-temperature and high-temperature conductivity at the same time.

Description

Technical Field

[0001] The present application relates to the technical field of electrode materials, and mainly to an atmospheric pressure plasma excitation electrode and a production process thereof. Background Art

[0002] Atmospheric pressure plasma combined combustion technology uses direct current air plasma as an ignition source, enabling oil-free ignition during cold boiler starts without a single drop of oil. Currently widely used in industrial production lines such as power plants, steel mills, and cement plants, it offers advantages such as high combustion efficiency, stable performance, and energy conservation and environmental protection. In the context of energy shortages and environmental protection initiatives in my country, the use of atmospheric pressure plasma combined combustion technology can significantly improve the economic benefits of enterprises. Plasma combustion temperatures can reach thousands of degrees Celsius or even higher, subjecting electrodes to prolonged high temperatures, oxidation, and arc surface physical sputtering, resulting in severe ablation.

[0003] Currently, plasma excitation electrodes are commonly cast from materials such as iron-chromium-aluminum alloy, tungsten-copper alloy, 310 stainless steel, high-manganese steel, and Gh3128. However, their service lives are generally less than 6,000 hours, which is insufficient for long-term use in furnaces, boilers, and other combustion equipment. Therefore, developing atmospheric pressure plasma excitation electrodes that are resistant to high-temperature oxidation and surface physical sputtering, exhibit good electrical conductivity at both room and high temperatures, and possess excellent machinability is crucial for promoting energy-saving plasma technologies. Summary of the Invention

[0004] In response to the problems existing in the prior art, the present application proposes an atmospheric pressure plasma excitation electrode and a production process thereof.

[0005] According to one aspect of the present application, an atmospheric pressure plasma excitation electrode is proposed. The raw materials for preparing the electrode include the following components, calculated by mass percentage: 70wt%-90wt% of a ceramic phase material, 2wt%-5wt% of a lattice inhibitor, and 5wt%-28wt% of a conductive phase material; the ceramic phase material includes one or more of zirconium oxide and zinc oxide; the lattice inhibitor includes one or more of cerium oxide and magnesium aluminum spinel; and the conductive phase material includes one or more of micron-sized tungsten powder, titanium nitride, indium tin oxide, and antimony oxide.

[0006] Furthermore, the ceramic phase material is zirconia, the lattice inhibitor is cerium oxide, and the conductive phase material is micron-sized tungsten powder. Zirconia ceramics have extremely high thermal stability, enabling continuous operation in high-temperature, high-pressure environments; cerium oxide stabilizes zirconia, improving product density; and tungsten powder, with its high melting point, high strength, and high conductivity, ensures the electrodes function properly under these conditions. Plasma-generating electrodes made from these materials can operate normally at temperatures of 800-900°C.

[0007] Furthermore, the ceramic phase material is zirconium oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material includes one or more of titanium nitride, indium tin oxide, and antimony oxide. Magnesium aluminum spinel can promote the growth of zirconium oxide tetragonal phase crystals, increase their density, and further improve the conductivity of the conductive material between the lattices, thereby increasing the proportion of zirconium oxide and reducing production costs. Furthermore, using titanium nitride, indium tin oxide, and antimony oxide instead of tungsten powder can further reduce production costs.

[0008] Furthermore, the ceramic phase material is zinc oxide, the lattice inhibitor is magnesium-aluminum spinel, and the conductive phase material is antimony oxide. Zinc oxide ceramics have high conductivity and superior thermal stability to zirconium oxide, making them less susceptible to shrinkage during sintering, which can affect product quality. Magnesium-aluminum spinel promotes the uniform growth of zinc oxide crystals, increasing their density and further improving the conductivity of the intercrystalline conductor. This plasma-induced electrode can operate stably at temperatures above normal operating temperatures (800-900°C).

[0009] According to the second aspect of the present application, a production process for an atmospheric pressure plasma excitation electrode is proposed, the specific steps of which are:

[0010] S1: preparing the ceramic phase material, lattice inhibitor and conductive phase material to prepare a green body;

[0011] S2: calcining the green body to obtain a rough electrode body;

[0012] S3: Cleaning the electrode blank with a NaOH solution to obtain an electrode conductive terminal;

[0013] S4: Encapsulating the electrode conductive terminals with rosin, and then placing them in HNO3 solution for surface passivation treatment;

[0014] S5: spraying glaze on the surface of the electrode conductive terminal which has been passivated in S4 to perform insulation treatment, and baking and cooling after the glaze spraying is completed to obtain an atmospheric pressure plasma excitation electrode.

[0015] In one embodiment:

[0016] Furthermore, in S1, the ceramic phase material is zirconium oxide, the lattice inhibitor is ceria, and the conductive phase material is micron-sized tungsten powder. The green body is specifically prepared by the following steps: mixing zirconium oxide and ceria to form a slurry, grinding the slurry, spray drying the slurry at high temperature, and forming pellets for later use; placing the mixed pellets and the micron-sized tungsten powder in a methanol or ethanol solution, and mixing them uniformly by ultrasonic oscillation or magnetic stirring to form a green body; and drying the green body and isostatically pressing it to form a green body. Thoroughly mixing the zirconium oxide and ceria first allows the ceria oxide to fully exert its effect.

[0017] Furthermore, in S2, the green body calcination specifically comprises the following steps: placing the cordierite crucible in an intermediate frequency furnace and heating the temperature to 1580°C at a rate of 5°C / min, then heating the temperature to 1720°C at a rate of 3°C / min, holding the temperature for 60 minutes, then naturally cooling the temperature to 800°C, holding the temperature for 12 hours, and finally naturally cooling the temperature to room temperature to obtain the electrode rough body. Nitrogen is used throughout the entire cooling process. During the calcination process, by controlling the sintering conditions, a balance is achieved between product strength and the porosity that ensures carrier mobility.

[0018] Furthermore, in S3, the NaOH concentration is 10% and the cleaning temperature is 50-60°C. NaOH is used to remove impurities from the surface of the electrode blank until no bubbles are generated. A NaOH solution concentration of approximately 10% can remove impurities without affecting the surface of the electrode blank, and facilitates subsequent wastewater treatment. A temperature of 50-60°C prevents NaOH crystallization and maintains the stability of the cleaning solution.

[0019] Furthermore, in S4, the HNO3 solution concentration is 20%, the passivation temperature is 60-70°C, and the passivation time is 120 minutes. Surface passivation can improve the corrosion resistance of the electrode and extend its service life. A HNO3 solution concentration of approximately 20% ensures the passivation effect without wasting the solution. Carrying out the passivation reaction at 60-70°C can increase the reaction rate and shorten the reaction time while maintaining the passivation effect.

[0020] Furthermore, in S5, according to different insulation requirements, it is necessary to spray glazes with different flow temperatures and burn them to 1000-1300°C according to the temperature requirements of the glaze to ensure that the glaze and the electrode conductive terminals are integrated with each other. The surface insulation treatment can enhance the oxidation resistance of the electrode.

[0021] In another embodiment:

[0022] Furthermore, in S1, the ceramic phase material is zirconium oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material is selected from one or more of titanium nitride, indium tin oxide, and antimony oxide. The specific steps for preparing the green body are: zirconia is made into a slurry and then ground. The slurry is spray-dried at high temperature after grinding and then pelletized for later use; the pellets, magnesium aluminum spinel, and conductive phase material are placed in a methanol or ethanol solution and uniformly mixed by ultrasonic oscillation or magnetic stirring to form a green body; the green body is dried and isostatically pressed to form a green body. Magnesium aluminum spinel can further improve the conductivity of the conductive material between the lattices, reduce the amount of conductive phase material used and the weight of a single electrode, thereby significantly reducing costs.

[0023] Furthermore, in S2, the specific steps of calcining the green body are as follows: placing the cordierite crucible into a medium frequency furnace and heating it to 1580°C at a heating rate of 5°C / min, then heating it to 1720°C at a rate of 3°C / min, keeping it warm for 60 minutes, then naturally cooling it to 800°C, keeping it at a constant temperature for 12 hours, and finally naturally cooling it to room temperature to obtain the electrode rough blank. All cooling processes are protected by nitrogen.

[0024] Furthermore, in S3, the NaOH concentration is 10% and the cleaning temperature is 50-60°C. Controlling the NaOH solution concentration at approximately 10% can remove impurities without affecting the surface of the electrode blank and facilitates subsequent waste liquid treatment; 50-60°C can prevent NaOH crystallization and maintain the stability of the cleaning solution.

[0025] Furthermore, in S4, the HNO3 solution concentration is 20%, the passivation temperature is 60-70°C, and the passivation time is 120 minutes. A HNO3 solution concentration of approximately 20% can ensure the passivation effect without wasting the solution, and performing the passivation reaction at 60-70°C can increase the reaction rate and shorten the reaction time while ensuring the passivation effect.

[0026] Furthermore, in the above S5, glazes with different flow temperatures are sprayed respectively according to different insulation requirements, and are fired to 1000-1300° C. respectively according to the temperature requirements of the glaze to ensure that the glaze and the electrode conductive terminal are integrated with each other.

[0027] In yet another embodiment:

[0028] Furthermore, in S1, the ceramic phase material is zinc oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material is antimony oxide. The specific steps for preparing the green body are: mixing zinc oxide and magnesium aluminum spinel in a kiln and roasting them to obtain zinc magnesium aluminum spinel; mixing the zinc magnesium aluminum spinel and antimony oxide in a methanol or ethanol solution and grinding them to obtain a green body; and isostatically pressing the green body after drying. Zinc oxide ceramic is a room temperature semiconductor material. By controlling its crystal structure through magnesium aluminum spinel, a new substance, new magnesium aluminum spinel, is generated, which increases its conductivity and operating stability in high temperature environments.

[0029] Specifically, the calcination temperature of the zinc-magnesium-aluminum spinel is 900° C., and the holding time is 2 hours. Zinc-magnesium-aluminum spinel begins to form at around 900° C., and carrying out the reaction at this temperature can reduce energy consumption while maintaining product quality.

[0030] Furthermore, in S2, the green body calcination step specifically comprises the following steps: placing the cordierite crucible in a conventional oxidizing flame natural gas kiln and heating the temperature to 1000°C at a rate of no more than 10°C / min. During the heating process, the calcination atmosphere is adjusted to a weakly reducing atmosphere, and the heating rate is appropriately reduced. After the temperature reaches 1000°C, the heating rate is reduced to 2°C / min. When the temperature reaches 1460°C, the temperature is maintained for 2 hours. During the calcination process, the calcination conditions are controlled to achieve a balance between product strength and the porosity required to ensure carrier mobility.

[0031] Furthermore, in S3, the NaOH concentration is 10% and the cleaning temperature is 50-60°C. Controlling the NaOH solution concentration at approximately 10% can remove impurities without affecting the surface of the electrode blank and facilitates subsequent waste liquid treatment; 50-60°C can prevent NaOH crystallization and maintain the stability of the cleaning solution.

[0032] Furthermore, in S4, the HNO3 solution concentration is 20%, the passivation temperature is 60-70°C, and the passivation time is 120 minutes. A HNO3 solution concentration of approximately 20% can ensure the passivation effect without wasting the solution, and performing the passivation reaction at 60-70°C can increase the reaction rate and shorten the reaction time while ensuring the passivation effect.

[0033] Furthermore, in the above S5, glazes with different flow temperatures are sprayed respectively according to different insulation requirements, and are fired to 1000-1300° C. respectively according to the temperature requirements of the glaze to ensure that the glaze and the electrode conductive terminal are integrated with each other.

[0034] Compared with the prior art, this application has the following beneficial effects:

[0035] By selecting and adjusting the raw material components, as well as controlling the firing conditions, the material prepared in this application is suitable for use in alternating plasma arc electrodes. It exhibits resistance to high-temperature oxidation and surface physical sputtering, excellent electrical conductivity at both room and high temperatures, and good machinability. In a destructive test involving 48 hours of oxygen calcination at 800-1250°C, as well as a thermal shock resistance test at 800-20°C, it maintained its electrical conductivity and its strength met machining requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated into and constitute a part of this specification. The accompanying drawings illustrate the embodiments and, together with the description, serve to explain the principles of the present invention. Other embodiments and many of the expected advantages of the embodiments will be readily appreciated as they become better understood by reference to the following detailed description.

[0037] Figure 1The flowchart of the production process of the atmospheric pressure plasma excitation electrode proposed in this application is shown.

[0038] Figure 2 An SEM image of a specific embodiment of the present application is shown.

[0039] Figure 3 The XRD spectrum of a specific embodiment of the present application is shown. DETAILED DESCRIPTION

[0040] The present application will be further described in detail below with reference to specific embodiments. It will be understood that the specific embodiments described herein are intended only to explain the relevant invention and are not intended to limit the invention. It should be noted that, unless there is a conflict, the embodiments and features in the embodiments of the present application may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0041] Example 1, an atmospheric pressure plasma excitation electrode, the specific preparation method of which is as follows:

[0042] S101: 70 wt% zirconium oxide and 2 wt% cerium oxide are mixed to form a slurry for grinding at a mill speed of 30 r / min for 5 minutes; the slurry is spray-dried at 800°C and pelletized for later use; the mixed pellets and 28 wt% micron-sized tungsten powder are placed in a methanol or ethanol solution and uniformly mixed by ultrasonic oscillation or magnetic stirring to form a blank; the blank is dried at 60°C and isostatically pressed at a pressure of 20 MPa for 24 hours to form a green body;

[0043] S102: The green billet is placed vertically in a cordierite crucible and filled with mullite powder to fix it. The green billet is placed in a medium frequency furnace and heated to 1580°C at a rate of 5°C / min, then heated to 1720°C at a rate of 3°C / min, kept at that temperature for 60 minutes, and then cooled naturally to 800°C, kept at that temperature for 12 hours, and finally cooled naturally to room temperature to obtain a rough electrode billet. Nitrogen protection is used during all cooling processes.

[0044] S103: Cleaning the electrode blank with a 10% NaOH solution at a temperature of 55° C. until no bubbles are generated to obtain the electrode conductive terminal;

[0045] S104: passivating the surface of the electrode conductive terminal using a 20% HNO3 solution at a passivation temperature of 65°C for 120 minutes;

[0046] S105: spraying the glaze on the surface of the electrode conductive terminal and firing the glaze at a temperature of 1200° C. to ensure that the glaze and the conductive ceramic are fused with each other, and obtaining an atmospheric pressure plasma excitation electrode after cooling.

[0047] Example 2, an atmospheric pressure plasma excitation electrode, the specific preparation method of which is as follows:

[0048] S201: 90 wt% zirconium oxide is prepared into a slurry and ground at a mill speed of 30 r / min for 5 minutes; the ground slurry is spray-dried at 800°C and pelletized for later use; zirconium balls, 3 wt% magnesia alumina spinel, and 7 wt% conductive phase material (titanium nitride, indium tin oxide, or antimony oxide) are placed in a methanol or ethanol solution and uniformly mixed by ultrasonic oscillation or magnetic stirring to form a blank; the blank is dried at 60°C and isostatically pressed at a pressure of 20 MPa for 24 hours to form a green body;

[0049] S202: The green billet is placed vertically in a cordierite crucible and filled with mullite powder to fix it. The green billet is placed in a medium frequency furnace and heated to 1580°C at a rate of 5°C / min, then heated to 1720°C at a rate of 3°C / min, kept at that temperature for 60 minutes, then cooled naturally to 800°C, kept at that temperature for 12 hours, and finally cooled naturally to room temperature to obtain a rough electrode billet. Nitrogen is used for protection during all cooling processes.

[0050] S203: Cleaning the electrode blank with a 10% NaOH solution at a temperature of 55° C. until no bubbles are generated to obtain an electrode conductive terminal;

[0051] S204: passivating the surface of the electrode conductive terminal using a 20% HNO3 solution at a passivation temperature of 65°C for 120 minutes;

[0052] S205: spraying the glaze on the surface of the electrode conductive terminal and firing the glaze at a temperature of 1200° C. to ensure that the glaze and the conductive ceramic are fused with each other, and obtaining an atmospheric pressure plasma excitation electrode after cooling.

[0053] Example 3, an atmospheric pressure plasma excitation electrode, the specific preparation method of which is as follows:

[0054] S301: 87 wt% zinc oxide and 3 wt% magnesia-aluminum spinel are mixed and calcined in a kiln at 900° C. for 2 hours to obtain zinc-magnesia-aluminum spinel; the zinc-magnesium-aluminum spinel and 10 wt% antimony oxide are mixed in a methanol or ethanol solution and ground to obtain a billet, wherein the mill speed is 30 r / min and the grinding time is 5 minutes; the billet is dried at 60° C. and isostatically pressed at a pressure of 20 MPa for 24 hours to form a green billet;

[0055] S302: The green body is placed vertically in a cordierite crucible and filled with mullite powder to fix it. The crucible is placed in a common oxidizing flame natural gas kiln and heated to 1000°C at a rate of no more than 10°C / min. During the heating process, the firing atmosphere is adjusted to a weak reducing atmosphere and the heating rate is appropriately reduced. After the temperature reaches 1000°C, the heating rate is reduced to 2°C / min. When the temperature reaches 1460°C, it is kept at this temperature for 2 hours.

[0056] S303: Cleaning the electrode blank with a 10% NaOH solution at a temperature of 55° C. until no bubbles are generated to obtain the electrode conductive terminal;

[0057] S304: passivating the surface of the electrode conductive terminal using a 20% HNO3 solution at a passivation temperature of 65°C for 120 minutes;

[0058] S305: spraying the glaze on the surface of the electrode conductive terminal and firing it at a temperature of 1200° C. to ensure that the glaze and the conductive ceramic are fused with each other, and obtaining an atmospheric pressure plasma excitation electrode after cooling.

[0059] Comparative Example 1: This comparative example differs from Example 1 in that the raw materials for the green body are 65 wt% zirconium oxide, 2 wt% cerium oxide and 33 wt% micron-sized tungsten powder.

[0060] Comparative Example 2: This comparative example differs from Example 2 in that the raw materials for the green body are 92 wt% zirconium oxide, 3 wt% magnesium aluminum spinel, and 5 wt% antimony oxide.

[0061] Comparative Example 3: This comparative example differs from Example 3 in that the raw materials for the green body are 92 wt% zinc oxide, 3 wt% magnesium aluminum spinel, and 5 wt% antimony oxide.

[0062] The performance test data of the atmospheric pressure plasma excitation electrodes prepared in Examples 1-3 and Comparative Examples 1-3 are shown in Table 1.

[0063] Table 1 Summary of performance test results of atmospheric pressure plasma excitation electrodes prepared in Examples 1-3 and Comparative Examples 1-3

[0064]

[0065] As can be seen from Table 1, the plasma excitation electrode prepared within the scope of protection of the present invention has a higher density and Vickers hardness, as well as a lower thermal expansion coefficient, resistivity, and higher withstand voltage. This shows that the plasma excitation electrode of the present invention is more stable and has excellent conductive properties, can operate stably in harsh working environments, and has a longer service life.

[0066] After the surface of the atmospheric pressure plasma excitation electrode prepared in Examples 1-3 was planed and the threads were milled, a plasma arc excitation experiment was carried out on an experimental torch. The arc was normally started within the normal setting value range of the frequency converter voltage, and after stable operation at 800V for 30 minutes, the electrode had no damage.

[0067] Figure 2 This is a surface SEM scanning image of the atmospheric pressure plasma excitation electrode prepared in Example 3. From the SEM characterization results, the samples exhibited an uneven flaky structure at the microscopic level and a large porosity. The semi-quantitative results of the micro-area were Zn31.08At%, O60.06At%, and Sb8.86%. Chemical analysis showed that the Sb content was 9.23%, which was basically consistent with the previous addition amount. Antimony oxide did not produce volatilization loss due to its low melting point.

[0068] Figure 3 This is the XRD spectrum of the atmospheric pressure plasma excitation electrode prepared in Example 3. From the test results, it can be seen that the sample has a stable hexagonal wurtzite structure. The ceramic phase and the conductive phase have formed a stable crystal structure during the sintering process. It clearly shows the characteristic spectrum of zinc oxide accompanied by a small peak of antimony oxide. At the same time, a new cubic phase mineral Zn 2.33 Sb 0.67 O4. This mineral is the key to achieving room-temperature conductivity of zinc oxide semiconductor ceramics.

[0069] In summary, the atmospheric pressure plasma excitation electrode prepared in this application has the advantages of resistance to high-temperature oxidation and surface physical sputtering, good conductivity at room temperature and high temperature, and good processability, and can simultaneously meet the requirements of different working conditions such as room temperature and high temperature conductivity.

[0070] The above describes the specific embodiments of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

[0071] In the description of this application, it should be understood that the word 'comprising' does not exclude the presence of elements or steps not listed in a claim. The word 'a' or 'an' preceding an element does not exclude the presence of a plurality of such elements. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.

Claims

1. An atmospheric pressure plasma excitation electrode, characterized in that: The raw materials include the following components by weight percentage: 70wt%-90wt% of ceramic phase material, 2wt%-5wt% of lattice inhibitor and 5wt%-28wt% of conductive phase material; The ceramic phase material includes one or more of zirconium oxide and zinc oxide; The lattice inhibitor includes one or more of cerium oxide and magnesium aluminum spinel; The conductive phase material includes one or more of micron-sized tungsten powder, titanium nitride, indium tin oxide and antimony oxide.

2. The atmospheric pressure plasma excitation electrode according to claim 1, characterized in that: The ceramic phase material is zirconium oxide, the lattice inhibitor is cerium oxide, and the conductive phase material is micron-sized tungsten powder.

3. The atmospheric pressure plasma excitation electrode according to claim 1, characterized in that: The ceramic phase material is zirconium oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material includes one or more of titanium nitride, indium tin oxide and antimony oxide.

4. The atmospheric pressure plasma excitation electrode according to claim 1, characterized in that: The ceramic phase material is zinc oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material is antimony oxide.

5. A process for producing an atmospheric pressure plasma excitation electrode according to any one of claims 1 to 4, characterized in that: The following steps are involved: S1: preparing the ceramic phase material, lattice inhibitor and conductive phase material to prepare a green body; S2: calcining the green body to obtain a rough electrode body; S3: using a NaOH solution to clean the electrode blank to obtain an electrode conductive terminal; S4: encapsulating the electrode conductive terminal with rosin, and then placing it in HNO3 solution for surface passivation treatment; S5: spraying glaze on the surface of the electrode conductive terminal which has been passivated in S4 to perform insulation treatment, and after the glaze spraying is completed, baking is performed and cooling is performed to obtain an atmospheric pressure plasma excitation electrode.

6. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In the S1, the ceramic phase material is zirconium oxide, the lattice inhibitor is cerium oxide, and the conductive phase material is micron-sized tungsten powder. The specific preparation steps of the green body are: mixing the zirconium oxide and the cerium oxide into a slurry for grinding, spray drying the slurry after grinding at high temperature, and making mixed material balls for standby use; putting the mixed material balls and the micron-sized tungsten powder into a methanol or ethanol solution, mixing them evenly by ultrasonic oscillation or magnetic stirring to form a green body; and isostatically pressing the green body after drying to form a green body.

7. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In S1, the ceramic phase material is zirconium oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material is selected from one or more of titanium nitride, indium tin oxide and antimony oxide. The specific preparation steps of the green body are: the zirconium oxide is made into a slurry for grinding, the slurry after grinding is spray-dried at high temperature to make zirconium balls for standby use; the zirconium balls, the magnesium aluminum spinel and the conductive phase material are put into a methanol or ethanol solution, and mixed evenly by ultrasonic oscillation or magnetic stirring to form a green body; the green body is dried and isostatically pressed to form a green body.

8. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In S1, the ceramic phase material is zinc oxide, the lattice inhibitor is magnesium aluminum spinel, and the conductive phase material is antimony oxide. The specific preparation steps of the green body are: mixing the zinc oxide and the magnesium aluminum spinel in a kiln and roasting them to obtain zinc magnesium aluminum spinel; putting the zinc magnesium aluminum spinel and the antimony oxide into a methanol or ethanol solution, mixing them, and grinding them to obtain a green body; and drying the green body and isostatically pressing it to form a green body.

9. The process for producing an atmospheric pressure plasma excitation electrode according to claim 8, characterized in that: The calcination temperature of the zinc-magnesium-aluminum spinel is 900° C., and the heat preservation time is 2 hours.

10. The process for producing an atmospheric pressure plasma excitation electrode according to any one of claims 5 to 7, characterized in that: In S2, the specific steps of green body roasting are: placing the cordierite crucible into a medium frequency furnace and heating the temperature to 1580°C at a heating rate of 5°C / min, then heating the temperature to 1720°C at a rate of 3°C / min, keeping the temperature for 60 minutes, then naturally cooling to 800°C, keeping the temperature constant for 12 hours, and finally naturally cooling to room temperature to obtain the electrode rough blank, and all cooling processes are protected by nitrogen.

11. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5 or 8, characterized in that: In S2, the specific steps of green body roasting are: placing the cordierite crucible into an ordinary oxidizing flame natural gas kiln, heating the temperature to 1000°C at a heating rate not higher than 10°C / min, adjusting the firing atmosphere to a weak reducing atmosphere during the heating process, and appropriately reducing the heating rate. After the temperature reaches 1000°C, the heating rate is reduced to 2°C / min. When the temperature reaches 1460°C, it is kept warm for 2 hours.

12. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In the S3, the NaOH concentration is 10% and the cleaning temperature is 50-60°C.

13. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In the S4, the concentration of HNO3 solution is 20%, the passivation temperature is 60-70°C, and the passivation time is 120 minutes.

14. The process for producing an atmospheric pressure plasma excitation electrode according to claim 5, characterized in that: In the step S5, the sintering temperature of the surface insulation treatment glaze is 1000-1300°C.

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