Separated crucible slewing mechanism

Abstract

The invention provides a separated crucible slewing mechanism which comprises an electronic gun device, a crucible body and a slewing mechanism, a connecting plate is arranged on the slewing mechanism, the connecting plate is arranged at the bottom of a bottom plate, a kidney-shaped groove is formed in the bottom plate, the slewing mechanism comprises a rotating shaft and a first motor device, and the rotating shaft penetrates through the kidney-shaped groove and is meshed with the first motor device. The rotating shaft is driven by the first motor device, the position of the rotating shaft in the kidney-shaped groove is adjusted according to an evaporation point when crucibles with different outer diameters are replaced, the crucible body is arranged on the top of the rotating mechanism, the electronic gun device is arranged on one side of the crucible body, and the crucible body is driven to rotate through the rotating mechanism. The top of the electron gun device extends towards the crucible body to be provided with a pair of magnetic pole pieces, the parts, located above the crucible body, of the two magnetic pole pieces are bent towards the center, the magnetic pole pieces restrain and guide the electron beam, the bending angle is adjusted according to the center of the crucible acupoint, the guided electron beam bombards the center of the acupoint, and the bombardment position is accurate.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation machines, and more specifically to a separate crucible rotating mechanism. Background Art

[0002] Traditional crucible rotation mechanisms usually adopt an integrated design, in which the drive system, sealing device and supporting structure are fixedly connected to the crucible body. When the drive system, sealing components or crucible body fails, the equipment must be disassembled as a whole for repair or replacement, resulting in long downtime and high maintenance costs; loading, emptying or replacing the crucible requires repeated disassembly and assembly of the entire rotation mechanism, which is inefficient and is especially unsuitable for high-frequency experiments or continuous production scenarios; there is a high risk of leakage of high temperature, high pressure or corrosive media, and it is difficult to quickly isolate faulty components, posing a safety hazard; the one-piece structure is difficult to be compatible with crucibles of different sizes, materials or process requirements, and has poor flexibility.

[0003] The prior art CN113981382A provides a crucible system for a vacuum evaporation machine. Although the crucible and the electron gun are designed as independent structures, the disadvantage of the integrated structure is solved so that one electron gun structure is suitable for various types of crucible structures. However, no matter which type is changed, the outer diameter of the replaced crucible cannot be changed, only the number of acupoints can be changed, and the total output remains unchanged. In addition, the electron gun lacks a guiding device, which can easily lead to inaccurate electron beam bombardment position.

[0004] Therefore, a separate crucible rotating mechanism is needed to improve the total crucible evaporation output and add a device to guide the electron beam so that the electron beam bombardment position is accurate. Summary of the invention

[0005] In view of this, in order to solve the above-mentioned problems that no matter what type is changed, the outer diameter of the replaced crucible cannot be changed, only the number of acupoints can be changed, the total output remains unchanged, and the electron gun lacks a guiding device, which may easily lead to inaccurate electron beam bombardment position, the present invention proposes a separate crucible rotation mechanism, which allows the outer diameter of the replaced crucible to be changed by setting a waist-shaped groove, thereby increasing the upper limit of evaporation output, and adding a magnetic pole piece to guide the electron beam, so that the electron beam bombardment position is accurate.

[0006] A separate crucible rotating mechanism, the crucible rotating mechanism is arranged on the cavity bottom plate 5 of the vacuum evaporation machine, characterized in that: the crucible rotating mechanism includes an electron gun device 1, a crucible body 2, and a rotating mechanism 3, the rotating mechanism 3 is provided with a connecting plate 31, the connecting plate 31 is arranged at the bottom of the bottom plate 5, the bottom plate 5 is provided with a waist groove 51, the rotating mechanism 3 includes a rotating shaft 32 and a first motor device 38, the rotating shaft 32 passes through the waist groove 51 and meshes with the first motor device 38, the rotating shaft 32 is driven by the first motor device 38, and when replacing crucibles of different outer diameters, the position of the rotating shaft 32 in the waist groove 51 is adjusted according to the evaporation point to adapt to Crucibles with different outer diameters, the crucible body 2 is arranged on the top of the rotating mechanism 3, the electron gun device 1 is arranged on one side of the crucible body 2, the crucible body 2 is driven to rotate by the rotating mechanism 3, the electron gun device 1 emits an electron beam after the magnetic field is turned to bombard and heat the film material in the crucible, and the electron kinetic energy is converted into thermal energy to achieve local or overall heating, the top of the electron gun device 1 extends toward the crucible body 2 to be provided with a pair of pole pieces 11, the two pole pieces 11 located above the crucible body 2 are bent toward the center, the pole pieces 11 will constrain and guide the electron beam, the bending angle is adjusted according to the center of the crucible acupoint, so that the guided electron beam bombards the center of the acupoint, and the bombardment position is accurate.

[0007] Furthermore, a circle of raised steps 215 is provided in the middle of the crucible top plate 21, and the cover plate 211 is embedded inside the steps 215 to prevent the connecting bolt 213 from being affected by the film layer and the screws from being locked. A recessed hole 216 is provided in the middle of the cover plate 211 for easy disassembly.

[0008] Furthermore, the crucible body 2 includes a crucible top plate 21 and a bottom sealing plate 23, the crucible top plate 21 and the bottom sealing plate 23 are clamped together, a sealing ring is provided at the clamping position, and a plurality of acupuncture points 212 are evenly spaced in an outer ring on the top plate.

[0009] Furthermore, a plurality of slots 321 are provided on the top ring of the rotating shaft 32, and a plurality of connecting bolts 213 are provided on the middle ring of the crucible body 2. The connecting bolts 213 pass through the crucible top plate 21 and the bottom sealing plate 23 from the upper part of the crucible body 2 and engage with the slots 321 on the top of the rotating shaft 32, so that the crucible body 2 is connected to the rotary mechanism 3 and the rotating shaft 32 can drive the crucible body 2 to move synchronously when the rotating shaft 32 moves, so that the crucible rotates evenly to ensure that the evaporated material is evenly distributed. An encoder 34 is provided below the rotating shaft 32, and the encoder 34 records and feedbacks the rotation angle.

[0010] Furthermore, a hollow flow channel 322 is provided inside the rotating shaft 32, a water inlet 323 is provided on the outer wall below the hollow flow channel 322, a water inlet joint 324 is provided outside the rotating shaft 32, the water inlet joint 324 and the water inlet 323 are located on the same horizontal line, and the water inlet joint 324 is used to connect external cooling water, a water distribution tray 22 is provided between the crucible top plate 21 and the bottom sealing plate 23, a water distribution port 214 is provided at the bottom of the crucible top plate 21, and the top of the hollow flow channel 322 passes through the bottom sealing plate 23. The plate 23 is placed in the water diversion port 214, and a circle of water outlet channels is also provided between the outer wall of the hollow flow channel 322 and the rotating shaft 32. The water outlet channels and the hollow flow channel 322 rotate synchronously with the rotating shaft 32. A water outlet joint 325 is also provided on the outside of the rotating shaft 32. After the cooling water enters the hollow flow channel 322 from the water inlet 323, it flows upward due to the impact force, and flows to the water uniforming plate 22 through the water diversion port 214 for cooling. After the cooling is completed, it flows downward through the water outlet channel and the water is pumped out from the water outlet joint 325.

[0011] Furthermore, a first opening 221 is provided at the center of the water evenly distributing plate 22, and a plurality of guide plates 222 radiating in all directions are provided on the upper and lower surfaces of the water evenly distributing plate 222. The guide plates 222 on each side are circumferentially arranged with the first opening 221 as the center, so that water flows through the guide plates 222 and radiates evenly around the water evenly distributing plate 22, thereby increasing the cooling area.

[0012] Furthermore, the guide piece 222 is L-shaped, and the guide piece 222 has long and short sides. One side of the short side of the guide piece 222 is perpendicular to the water uniforming plate 22, and one side of the long side of the guide piece 222 is connected to the water uniforming plate 22. The short sides of the guide piece 222 are all located on the same side along the circular direction, and one side of the short side of the guide piece 222 is aligned with the center of the first opening 221.

[0013] Furthermore, the first motor device 38 includes a first motor 381 and a first motor frame 383. The top of the first motor frame 383 is connected to the connecting plate 31, and the first motor frame 383 is connected to the first motor 381 at the bottom. The driving shaft of the first motor 381 is connected with a first gear 382. The second gear 33 is sleeved on the outer side of the middle part of the rotating shaft 32. The first gear 382 is correspondingly engaged with the second gear 33. The first motor 381 drives the first gear 382 to rotate, so that the first gear 382 drives the second gear 33 to rotate, thereby driving the rotating shaft 32 to rotate.

[0014] Furthermore, a first bracket 36 and a second bracket 37 are respectively provided on both sides of the rotating shaft 32. The top end of the first bracket 36 is connected to the connecting plate 31, and the bottom end of the first bracket 36 is clamped in the joint outside the water inlet 323 to limit the installation direction of the joint. One end of the second bracket 37 is connected to the encoder 34, and the other end is connected to the connecting plate 31 to support the encoder 34.

[0015] Furthermore, a baffle device 4 is provided above the crucible body 2, and the baffle device 4 includes a rotating mechanism 42 and a baffle 43. The top of the baffle 43 is connected to the top of the rotating mechanism 42 by a connecting rod 44. A rotating cylinder is provided inside the rotating mechanism 42. The material needs to be pre-dissolved before the crucible is completely heated. The rotating mechanism 42 is controlled to rotate by the rotating cylinder so that the baffle 43 is moved to the top of the crucible body 2 to shield the part of the material with poor uniformity. After the pre-dissolution is completed, the rotating mechanism 42 is controlled to rotate by the rotating cylinder so that the baffle 43 is removed from the top of the crucible body 2 for evaporation.

[0016] Furthermore, a cooling pipe 12 is provided on one side of the electron gun device 1 for cooling the electron gun device.

[0017] Beneficial effects of the present invention: The present invention proposes a separate crucible rotating mechanism, which is arranged on the cavity bottom plate 5 of the vacuum evaporation machine, and the crucible rotating mechanism includes an electron gun device 1, a crucible body 2, and a rotating mechanism 3. The rotating mechanism 3 is provided with a connecting plate 31, and the connecting plate 31 is arranged at the bottom of the bottom plate 5. The bottom plate 5 is provided with a waist-shaped groove 51. The rotating mechanism 3 includes a rotating shaft 32 and a first motor device 38. The rotating shaft 32 passes through the waist-shaped groove 51 and meshes with the first motor device 38. The rotating shaft 32 is driven by the first motor device 38. When replacing crucibles with different outer diameters, the position of the rotating shaft 32 in the waist-shaped groove 51 is adjusted according to the evaporation point. The invention is used to adapt to crucibles with different outer diameters. The crucible body 2 is arranged on the top of the rotating mechanism 3, and the electron gun device 1 is arranged on one side of the crucible body 2. The crucible body 2 is driven to rotate by the rotating mechanism 3. The electron gun device 1 emits an electron beam after deflecting the magnetic field to bombard and heat the film material in the crucible, and converts the electron kinetic energy into thermal energy to achieve local or overall heating. A pair of magnetic pole pieces 11 are provided on the top of the electron gun device 1 extending toward the crucible body 2. The parts of the two magnetic pole pieces 11 located above the crucible body 2 are bent toward the center. The magnetic pole pieces 11 will constrain and guide the electron beam. The bending angle is adjusted according to the center of the crucible acupuncture point, so that the guided electron beam bombards the center of the acupuncture point and the bombardment position is accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is the overall structure diagram of the separate crucible rotating mechanism of the present invention.

[0019] Figure 2 It is a bottom view of the overall structure diagram of the separate crucible rotating mechanism of the present invention.

[0020] Figure 3 It is a structural diagram of the crucible body and the rotating mechanism of the separate crucible rotating mechanism of the present invention.

[0021] Figure 4 It is a cross-sectional view of the crucible body and the rotating mechanism of the separate crucible rotating mechanism of the present invention.

[0022] Figure 5 It is an enlarged top view of the rotating shaft of the separable crucible rotating mechanism of the present invention.

[0023] Figure 6 The present invention is a structural diagram of a water-distributing plate and a bottom sealing plate of a separate crucible rotating mechanism.

[0024] Figure 7 It is a structural diagram of the shield device of the separate crucible rotating mechanism of the present invention.

[0025] Main component symbols

[0026] Electron gun device 1, pole piece 11, cooling tube 12, crucible body 2, crucible top plate 21, cover plate 211, acupuncture point 212, connecting bolt 213, water outlet 214, step 215, recessed hole 216, water uniforming plate 22, first opening 221, guide plate 222, bottom sealing plate 23, rotating mechanism 3, connecting plate 31, rotating shaft 32, slot 321, hollow flow channel 322, water inlet 323, water inlet joint 324, water outlet joint 325, second gear 33, encoder 34, bracket structure 35, first bracket 36, second bracket 37, first motor device 38, first motor 381, first gear 382, ​​first motor frame 383, shield device 4, rotating mechanism 42, shield 43, connecting rod 44, bottom plate 5, waist groove 51.

[0027] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION Embodiment 1:

[0028] A separate crucible rotating mechanism, the crucible rotating mechanism is arranged on the cavity bottom plate 5 of the vacuum evaporation machine, characterized in that: the crucible rotating mechanism includes an electron gun device 1, a crucible body 2, and a rotating mechanism 3, the rotating mechanism 3 is provided with a connecting plate 31, the connecting plate 31 is arranged at the bottom of the bottom plate 5, the bottom plate 5 is provided with a waist groove 51, the rotating mechanism 3 includes a rotating shaft 32 and a first motor device 38, the rotating shaft 32 passes through the waist groove 51 and meshes with the first motor device 38, the rotating shaft 32 is driven by the first motor device 38, and when replacing crucibles of different outer diameters, the position of the rotating shaft 32 in the waist groove 51 is adjusted according to the evaporation point to adapt to Crucibles with different outer diameters, the crucible body 2 is arranged on the top of the rotating mechanism 3, the electron gun device 1 is arranged on one side of the crucible body 2, the crucible body 2 is driven to rotate by the rotating mechanism 3, the electron gun device 1 emits an electron beam after the magnetic field is turned to bombard and heat the film material in the crucible, and the electron kinetic energy is converted into thermal energy to achieve local or overall heating, the top of the electron gun device 1 extends toward the crucible body 2 to be provided with a pair of pole pieces 11, the two pole pieces 11 located above the crucible body 2 are bent toward the center, the pole pieces 11 will constrain and guide the electron beam, the bending angle is adjusted according to the center of the crucible acupoint, so that the guided electron beam bombards the center of the acupoint, and the bombardment position is accurate.

[0029] A circle of raised steps 215 is provided in the middle of the crucible top plate 21, and the cover plate 211 is embedded in the step 215 to prevent the connection bolt 213 from being affected by the film layer and the screws from being locked. A recessed hole 216 is provided in the middle of the cover plate 211 for easy disassembly.

[0030] The crucible body 2 comprises a crucible top plate 21 and a bottom sealing plate 23, which are clamped together, and a sealing ring is provided at the clamping position. A plurality of acupuncture points 212 are evenly spaced in an outer ring on the top plate.

[0031] The top of the rotating shaft 32 is provided with a plurality of slots 321, and the middle of the crucible body 2 is provided with a plurality of connecting bolts 213. The connecting bolts 213 pass through the crucible top plate 21 and the bottom sealing plate 23 from the upper part of the crucible body 2 and engage with the slots 321 at the top of the rotating shaft 32, so that the crucible body 2 is connected to the rotary mechanism 3 and the rotating shaft 32 can drive the crucible body 2 to move synchronously when the rotating shaft 32 moves, so that the crucible rotates evenly, ensuring that the evaporated material is evenly distributed. An encoder 34 is provided below the rotating shaft 32, and the encoder 34 records and feedbacks the rotation angle.

[0032] A hollow channel 322 is provided inside the rotating shaft 32, a water inlet 323 is provided on the outer wall below the hollow channel 322, a water inlet joint 324 is provided outside the rotating shaft 32, the water inlet joint 324 and the water inlet 323 are located on the same horizontal line, and the water inlet joint 324 is used to connect external cooling water, a water distribution tray 22 is provided between the crucible top plate 21 and the bottom sealing plate 23, a water outlet 214 is provided at the bottom of the crucible top plate 21, and the top of the hollow channel 322 passes through the bottom sealing plate 2 3 and is placed in the water diversion port 214. A circle of water outlet channels is also provided between the outer wall of the hollow flow channel 322 and the rotating shaft 32. The water outlet channels and the hollow flow channel 322 rotate synchronously with the rotating shaft 32. A water outlet joint 325 is also provided on the outside of the rotating shaft 32. After the cooling water enters the hollow flow channel 322 from the water inlet 323, it flows upward due to the impact force and flows to the water distribution plate 22 through the water diversion port 214 for cooling. After the cooling is completed, it flows downward through the water outlet channels and is pumped out from the water outlet joint 325.

[0033] A first opening 221 is provided at the center of the water evenly distributing plate 22, and a plurality of guide plates 222 diverging to the surrounding areas are provided on the upper and lower surfaces of the water evenly distributing plate 222. The guide plates 222 on each side are circumferentially arranged with the first opening 221 as the center, so that water flows through the guide plates 222 and diverges evenly to the surrounding areas of the water evenly distributing plate 22, thereby increasing the cooling area.

[0034] The guide piece 222 is L-shaped, and has long and short sides. One side of the short side of the guide piece 222 is perpendicular to the water uniformity tray 22, and one side of the long side of the guide piece 222 is connected to the water uniformity tray 22. The short sides of the guide piece 222 are all located on the same side along the circular direction, and one side of the short side of the guide piece 222 is aligned with the center of the first opening 221.

[0035] The first motor device 38 includes a first motor 381 and a first motor frame 383. The top of the first motor frame 383 is connected to the connecting plate 31, and the first motor 381 is connected to the bottom of the first motor frame 383. The driving shaft of the first motor 381 is connected with a first gear 382. The second gear 33 is sleeved on the outer side of the middle part of the rotating shaft 32. The first gear 382 is correspondingly engaged with the second gear 33. The first motor 381 drives the first gear 382 to rotate, so that the first gear 382 drives the second gear 33 to rotate, thereby driving the rotating shaft 32 to rotate.

[0036] A first bracket 36 and a second bracket 37 are respectively provided on both sides of the rotating shaft 32. The top end of the first bracket 36 is connected to the connecting plate 31, and the bottom end of the first bracket 36 is clamped in the joint outside the water inlet 323 to limit the installation direction of the joint. One end of the second bracket 37 is connected to the encoder 34, and the other end is connected to the connecting plate 31 to support the encoder 34.

[0037] A shield device 4 is also provided above the crucible body 2, and the shield device 4 includes a rotating mechanism 42 and a shield 43. The top of the shield 43 is connected to the top of the rotating mechanism 42 by a connecting rod 44. A rotating cylinder is provided inside the rotating mechanism 42. Before the crucible is completely heated, the material needs to be pre-dissolved. The rotating mechanism 42 is controlled to rotate by the rotating cylinder so that the shield 43 is moved to the top of the crucible body 2 to shield the part of the material with poor uniformity. After the pre-dissolution is completed, the rotating mechanism 42 is controlled to rotate by the rotating cylinder so that the shield 43 is removed from the top of the crucible body 2 for evaporation.

[0038] A cooling pipe 12 is provided on one side of the electron gun device 1 for cooling the electron gun device.

[0039] Beneficial effects of the present invention: The present invention proposes a separate crucible rotating mechanism, which is arranged on the cavity bottom plate 5 of the vacuum evaporation machine, and the crucible rotating mechanism includes an electron gun device 1, a crucible body 2, and a rotating mechanism 3. The rotating mechanism 3 is provided with a connecting plate 31, and the connecting plate 31 is arranged at the bottom of the bottom plate 5. The bottom plate 5 is provided with a waist-shaped groove 51. The rotating mechanism 3 includes a rotating shaft 32 and a first motor device 38. The rotating shaft 32 passes through the waist-shaped groove 51 and meshes with the first motor device 38. The rotating shaft 32 is driven by the first motor device 38. When replacing crucibles with different outer diameters, the position of the rotating shaft 32 in the waist-shaped groove 51 is adjusted according to the evaporation point. The invention is used to adapt to crucibles with different outer diameters. The crucible body 2 is arranged on the top of the rotating mechanism 3, and the electron gun device 1 is arranged on one side of the crucible body 2. The crucible body 2 is driven to rotate by the rotating mechanism 3. The electron gun device 1 emits an electron beam after deflecting the magnetic field to bombard and heat the film material in the crucible, and converts the electron kinetic energy into thermal energy to achieve local or overall heating. A pair of magnetic pole pieces 11 are provided on the top of the electron gun device 1 extending toward the crucible body 2. The parts of the two magnetic pole pieces 11 located above the crucible body 2 are bent toward the center. The magnetic pole pieces 11 will constrain and guide the electron beam. The bending angle is adjusted according to the center of the crucible acupuncture point, so that the guided electron beam bombards the center of the acupuncture point and the bombardment position is accurate.

[0040] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A separate crucible rotating mechanism, the crucible rotating mechanism is arranged on the bottom plate (5) of the chamber of a vacuum evaporation machine, characterized in that: The crucible rotating mechanism comprises an electron gun device (1), a crucible body (2), and a rotating mechanism (3); a connecting plate (31) is provided on the rotating mechanism (3); the connecting plate (31) is arranged at the bottom of the bottom plate (5); a waist-shaped groove (51) is provided on the bottom plate (5); the rotating mechanism (3) comprises a rotating shaft (32) and a first motor device (38); the rotating shaft (32) passes through the waist-shaped groove (51) and meshes with the first motor device (38); the rotating shaft (32) is driven by the first motor device (38); when replacing a crucible with a different outer diameter, the position of the rotating shaft (32) in the waist-shaped groove (51) is adjusted according to the evaporation point to adapt to crucibles with different outer diameters; the crucible body ( 2) is arranged on the top of the rotating mechanism (3), the electron gun device (1) is arranged on one side of the crucible body (2), and the crucible body (2) is driven to rotate by the rotating mechanism (3). The electron gun device (1) emits an electron beam after the magnetic field is turned to bombard and heat the film material in the crucible, and converts the electron kinetic energy into heat energy to achieve local or overall heating. The top of the electron gun device (1) extends toward the crucible body (2) and is provided with a pair of magnetic pole pieces (11). The parts of the two magnetic pole pieces (11) located above the crucible body (2) are bent toward the center direction. The magnetic pole pieces (11) can constrain and guide the electron beam. The bending angle is adjusted according to the center of the crucible acupoint, so that the guided electron beam bombards the center of the acupoint and the bombardment position is accurate.

2. The separate crucible rotating mechanism according to claim 1, characterized in that: The crucible body (2) comprises a crucible top plate (21) and a bottom sealing plate (23), the crucible top plate (21) and the bottom sealing plate (23) being clamped together, a sealing ring being provided at the clamping position, and a plurality of acupuncture points (212) being evenly spaced on an outer ring of the top plate.

3. The separate crucible rotating mechanism according to claim 2, characterized in that: The top ring of the rotating shaft (32) is provided with a plurality of slots (321), and the middle ring of the crucible body (2) is provided with a plurality of connecting bolts (213). The connecting bolts (213) pass through the crucible top plate (21) and the bottom sealing plate (23) from the top of the crucible body (2) to the bottom and are connected to the slots (321) at the top of the rotating shaft (32), so that the crucible body (2) is connected to the rotary mechanism (3) and the rotating shaft (32) can drive the crucible body (2) to move synchronously when the rotating shaft (32) moves, so that the crucible rotates evenly, ensuring that the evaporated material is evenly distributed. An encoder (34) is provided below the rotating shaft (32), and the encoder (34) records and feeds back the rotation angle.

4. The separable crucible rotating mechanism according to claim 3, characterized in that: A circle of raised steps (215) is provided in the middle of the crucible top plate (21), and the cover plate (211) is embedded inside the steps (215) to prevent the connection bolts (213) from being affected by the film layer and causing the screws to be locked.

5. The separate crucible rotating mechanism according to claim 2, characterized in that: A hollow flow channel (322) is provided inside the rotating shaft (32), a water inlet (323) is provided on the outer wall below the hollow flow channel (322), a water inlet joint (324) is provided outside the rotating shaft (32), the water inlet joint (324) and the water inlet (323) are located on the same horizontal line, the water inlet joint (324) is used to connect external cooling water, a water distribution tray (22) is provided between the crucible top plate (21) and the bottom sealing plate (23), a water distribution port (214) is provided at the bottom of the crucible top plate (21), and the top of the hollow flow channel (322) passes through the bottom sealing plate (23). The plate (23) is placed in the water outlet (214); a circle of water outlet channels is provided between the outer wall of the hollow flow channel (322) and the rotating shaft (32); the water outlet channels and the hollow flow channel (322) rotate synchronously with the rotating shaft (32); a water outlet joint (325) is provided outside the rotating shaft (32); cooling water flows upward due to the impact force after entering the hollow flow channel (322) from the water inlet (323), and flows to the water distribution plate (22) through the water outlet (214) for cooling; after cooling, the water flows downward through the water outlet channels and is pumped out from the water outlet joint (325).

6. The separable crucible rotating mechanism according to claim 5, characterized in that: A first opening (221) is provided at the center of the water evenly distributing plate (22), and a plurality of guide plates (222) are provided on the upper and lower surfaces of the water evenly distributing plate (22) so as to spread out in all directions. The guide plates (222) on each side are arranged circumferentially with the first opening (221) as the center of the circle, so that water flows through the guide plates (222) and spreads out evenly in all directions of the water evenly distributing plate (22), thereby increasing the cooling area.

7. The separable crucible rotating mechanism according to claim 6, characterized in that: The guide piece (222) is L-shaped, the guide piece (222) has long and short sides, one side of the short side of the guide piece (222) is perpendicular to the water distribution plate (22), one side of the long side of the guide piece (222) is connected to the water distribution plate (22), the short sides of the guide piece (222) are all located on the same side along the circular direction, and one side of the short side of the guide piece (222) is aligned with the center of the first opening (221).

8. The separate crucible rotating mechanism according to claim 1, characterized in that: The first motor device (38) comprises a first motor (381) and a first motor frame (383); the top of the first motor frame (383) is connected to the connecting plate (31); the bottom of the first motor frame (383) is connected to the first motor (381); a first gear (382) is connected to the driving shaft of the first motor (381); a second gear (33) is sleeved on the outer side of the middle of the rotating shaft (32); the first gear (382) and the second gear (33) are correspondingly engaged; the first motor (381) drives the first gear (382) to rotate, so that the first gear (382) drives the second gear (33) to rotate, thereby driving the rotating shaft (32) to rotate.

9. The separable crucible rotating mechanism according to claim 5, characterized in that: A first bracket (36) and a second bracket (37) are respectively provided on both sides of the rotating shaft (32); the top end of the first bracket (36) is connected to the connecting plate (31); the bottom end of the first bracket (36) is clamped to a joint outside the water inlet (323) for limiting the installation direction of the joint; one end of the second bracket (37) is connected to the encoder (34) and the other end is connected to the connecting plate (31) for supporting the encoder (34).

10. The separable crucible rotating mechanism according to claim 1, characterized in that: A shield device (4) is also provided above the crucible body (2), the shield device (4) comprising a rotating mechanism (42) and a shield (43), the top of the shield (43) being connected to the top of the rotating mechanism (42) via a connecting rod (44), a rotating cylinder being provided inside the rotating mechanism (42), and the material needs to be pre-dissolved before the crucible is completely heated, the rotating mechanism (42) is controlled to rotate by the rotating cylinder so that the shield (43) is moved to the top of the crucible body (2) to shield the part of the material with poor uniformity, and after the pre-dissolution is completed, the rotating mechanism (42) is controlled to rotate by the rotating cylinder so that the shield (43) is moved away from the top of the crucible body (2) to perform vapor deposition.

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