Vacuum environment continuous powder vapor deposition device

Abstract

The invention relates to the technical field of vapor deposition powder preparation, and discloses a vacuum environment continuous powder vapor deposition device which comprises a sealed furnace shell, a second vacuum pump is arranged on the sealed furnace shell, and a rotating cylinder for powder vapor deposition is rotationally arranged in an inner cavity of the sealed furnace shell. A driving mechanism for driving the rotating cylinder to rotate is arranged at one end of the sealed furnace shell, heaters are uniformly arranged around the outer wall of the rotating cylinder, and a material pushing screw is arranged on the inner wall of the rotating cylinder in a fit manner. According to the vacuum environment continuous powder vapor deposition device, the rotating cylinder is placed in the vacuum environment, and then powder materials are guided into the rotating cylinder. And gas phase deposition occurs or other solid new materials are generated through full gas mixing reaction of the rotating cylinder and reaction gas in the furnace. In a vacuum environment, flammable and toxic gases such as silane and acetylene can be used as reaction gases, so that the overflow risk of a large amount of harmful gases is reduced, and the safety of a working environment is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vapor deposition powder making, in particular to a vacuum environment continuous powder vapor deposition device. Background Art

[0002] Powder vapor deposition usually refers to the application of chemical vapor deposition (CVD) technology in the preparation of powder materials. CVD is a process that uses gaseous substances to react chemically on the surface of a solid at a certain temperature and form a solid deposited film on the surface. This technology can be used to prepare compound powder materials such as metal powders, oxides, carbides, nitrides, etc. It is widely used in semiconductor manufacturing.

[0003] There are rotary kilns on the market now, which are non-vacuum equipment; they occupy a large area and have low thermal efficiency. When using gases such as silane, they are prone to safety hazards such as spontaneous combustion and explosion. Solid deposition leads to low efficiency in the use of reaction gases such as silane, which also makes the production cost of the finished product higher.

[0004] In addition, fluidized bed equipment is also used in the market to prepare materials, but the purity of the finished product is not high and the service life of the equipment parts is short.

[0005] The deposition materials required in the powder vapor deposition process are different, and the reaction gases used will also be different. Toxic and flammable gases such as silane and acetylene are often used.

[0006] Therefore, when preparing materials, an effective solution is needed to overcome the above-mentioned equipment shortcomings and provide a safe and healthy working environment. Summary of the invention

[0007] The object of the present invention is to provide a vacuum environment continuous powder vapor deposition device to solve the problems raised in the above background technology.

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a vacuum environment continuous powder vapor deposition device, comprising a sealed furnace shell, the sealed furnace shell is connected to a second vacuum pump, the inner cavity of the sealed furnace shell is rotatably provided with a rotating cylinder for powder vapor deposition, one end of the sealed furnace shell is provided with a driving mechanism for driving the rotating cylinder to rotate, heaters are evenly arranged around the outer wall of the rotating cylinder, a pushing screw is arranged in contact with the inner wall of the rotating cylinder, a silo for continuous feeding is fixedly connected to one end of the top of the sealed furnace shell, and a first vacuum pump is arranged on the silo. A feed pipe is provided at the bottom of the silo, which passes through the sealed furnace shell and the rotating drum in sequence. The feed pipe is rotatably connected to the side of the rotating drum away from the driving mechanism. A first vacuum valve is provided at the connection between the feed pipe and the silo. A discharge guide groove is provided on the outer wall of the rotating drum near one end of the driving mechanism, and a discharge port is provided on the sealed furnace shell below the discharge guide groove. A third vacuum valve is provided on the discharge port. The central axis of the driving mechanism is hollow, and an inflation tube core is rotatably connected in the hollow central axis, and the inflation tube core extends to the interior of the rotating drum.

[0009] Preferably, one end of the rotating cylinder away from the driving mechanism is connected to the sealed furnace shell through a support member, and the support member includes a support ring fixed to the inner wall of the sealed furnace shell, and a bearing rollingly connected to the rotating cylinder is arranged on the inner side of the support ring; wherein a bearing cover is arranged outside the bearing, and the bearing cover is connected to a blowing pipe for blowing air into the bearing cover.

[0010] Preferably, the driving mechanism comprises an output shaft penetrating the sealed furnace shell and connected to the rotating drum, a driving motor is arranged outside the output shaft, and a sealing outer cover for covering the connection between the output shaft and the sealed furnace shell is arranged outside the motor.

[0011] Preferably, the outer walls of the rotating drum and the heater are wrapped with a heat insulation layer.

[0012] Preferably, temperature sensors are evenly distributed between the heaters and are connected to the heater control ends.

[0013] Preferably, shielding plates for shielding materials are provided on both sides of the interior of the rotating drum.

[0014] Preferably, a material carrying plate is provided between the blades of the pushing spiral located in the heater coverage area inside the rotating cylinder.

[0015] Preferably, a residual material recovery port is provided at the bottom of the inner wall of the sealed furnace shell below the connection between the feed pipe and the rotating cylinder, and a second vacuum valve is provided on the residual material recovery port.

[0016] Preferably, the discharge guide groove is in a circular shape and covers the outer side of the outlet of the rotating drum. The bottom of the discharge guide groove is provided with an opening inserted into the discharge port.

[0017] Preferably, a material discharge assembly is installed on the inner side of the silo.

[0018] Compared with the prior art, the present invention has the following beneficial effects: The vacuum environment continuous powder vapor deposition device places a rotating drum in a vacuum environment, and then introduces the powder material into the rotating drum. After the rotating drum and the reaction gas in the furnace undergo a sufficient gas mixing reaction, vapor deposition occurs or other solid new materials are generated.

[0019] The left end of the rotating drum can realize automatic feeding, and the powder material is loaded into the inner side of the silo, and then the first vacuum pump and the second vacuum pump are used to extract the air inside the silo and the sealed furnace shell. After the air is extracted, the first vacuum valve is opened to control the operation of the unloading assembly, so that the powder material enters the inner side of the rotating drum. When the powder material in the silo is insufficient, the first vacuum valve is closed, the powder material is added to the silo, and then the air in the silo is extracted by the first vacuum pump, and then the first vacuum valve is opened. Ensure that the material is fed into the drum under a continuous vacuum environment.

[0020] In a vacuum environment, flammable and toxic gases such as silane and acetylene can be used as reaction gases, reducing the risk of spillage of large amounts of harmful gases and improving the safety of the working environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic cross-sectional view of a device in a preferred embodiment of the present invention; Figure 2 A top view of a device in a preferred embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a discharge guide groove in a preferred embodiment of the present invention; Figure 4 This is a schematic structural diagram of the connection relationship between the rotating cylinder and the bearing in a preferred embodiment of the present invention; Figure 5 This is a three-dimensional diagram of a bearing in a preferred embodiment of the present invention.

[0022] In the figure: 1. sealed furnace shell, 2. insulation layer, 3. heater, 4. rotating cylinder, 5. temperature sensor, 6. discharge guide groove, 7. driving mechanism, 8. inflation tube core, 9. third vacuum valve, 10. discharge port, 11. pushing screw, 12. baffle plate, 13. support member, 14. second vacuum valve, 15. feed pipe, 16. first vacuum valve, 17. unloading assembly, 18. silo, 19. first vacuum pump, 20. residual material recovery port, 21. second vacuum pump, 22. guide pipeline, 23. heat exchange fin, 24. fourth vacuum valve, 25. sealed outer cover, 26. outlet pipe, 27. inlet pipe, 28. bearing cover, 29. blowing pipe, 30. bearing. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] See also Figure 1-5 , the present invention provides a technical solution: A vacuum environment continuous powder vapor deposition device comprises a sealed furnace shell 1, to which a second vacuum pump 21 is connected, and the second vacuum pump 21 is used to extract the air in the sealed furnace shell 1 during operation. The inner cavity of the sealed furnace shell 1 is provided with a rotating cylinder 4 for performing powder vapor deposition, and one end of the sealed furnace shell 1 is provided with a driving mechanism 7 for driving the rotating cylinder 4 to rotate, and the driving mechanism 7 passes through one end of the sealed furnace shell 1 and is supported by the sealed furnace shell 1.

[0025] The interior of the rotating cylinder 4 is divided into three areas, namely, a feeding section, a heating reaction section, and a discharging section, by two shielding plates 12. Heaters 3 are evenly arranged around the outer wall of the heating reaction section of the rotating cylinder 4. Temperature sensors 5 are evenly distributed between the heaters 3 and are connected to the control ends of the heaters 3 so as to control the temperature inside the rotating cylinder 4.

[0026] The inner wall of the rotating cylinder 4 is provided with a push screw 11, and the push screw 11 is used to push the powder material to move. The push screw 11 in the feeding section transports the powder material, and the material is pushed into the heating reaction section at the bottom area of ​​the rotating cylinder 4. A material belt plate is provided on the push screw 11 in the heating reaction section. When the powder material is transported forward, it is carried up to the upper half of the cylinder by the material belt plate, and gradually falls and disperses in the upper half of the rotating cylinder to contact the reaction gas more fully. The two shielding plates 12 can prevent most of the stirred flying materials from entering the feeding section and the discharging section at both ends. The material in the heating reaction section is pushed and has a flipping and stirring function. After the material is fully reacted, it is transported to the discharge port by the push screw at the bottom of the discharging section.

[0027] A silo 18 for continuous feeding is fixedly connected to one end of the top of the sealed furnace shell 1. First, the powder material is added into the silo 18. A feeding assembly 17 is installed on the inner side of the silo 18. The feeding assembly 17 includes a motor. A transmission shaft is arranged at the output end of the motor. Then, a spiral is arranged on the transmission shaft to improve the conveying effect of the powder material in the pipeline. Then, the powder material is conveyed to the feeding pipe 15 through the feeding assembly 17. A first vacuum pump 19 is arranged on the silo 18. The air in the silo 18 is extracted by the first vacuum pump 19. A feeding pipe 15 is arranged at the bottom of the silo 18, which passes through the sealed furnace shell 1 and the rotating drum 4 in sequence. The feeding pipe 15 guides the powder material into the rotating drum 4. The feeding pipe 15 is rotatably connected to the side of the rotating drum 4 away from the driving mechanism 7. A first vacuum valve 16 is arranged at the connection between the feeding pipe 15 and the silo 18. The first vacuum valve 16 is used to control the communication between the rotating drum 4 and the silo 18. When adding powder material into the silo 18 , the first vacuum valve 16 is closed to prevent the reaction gas inside the rotating cylinder 4 from overflowing and air from entering the sealed furnace shell 1 .

[0028] The outer wall of the rotating drum 4 is provided with a discharge guide groove 6 at one end near the driving mechanism 7, and the rotating drum 4 is rotatably connected to the discharge guide groove 6, wherein the outer wall of the rotating drum 4 covered by the discharge guide groove 6 is evenly provided with openings for discharge. A discharge port 10 is provided on the sealed furnace shell 1 below the discharge guide groove 6, and the top of the discharge guide groove 6 is provided with a circular groove body, and a protruding guide pipe is provided at the bottom and inserted into the discharge port 10. A third vacuum valve 9 is provided on the discharge port 10.

[0029] The bottom of the discharge port 10 is connected to a guide pipe 22, and the outer wall of the guide pipe 22 is evenly provided with heat exchange fins 23, which cool the guide pipe 22 and thus complete the initial cooling of the vapor deposited material. A fourth vacuum valve 24 is also provided at the end of the guide pipe 22.

[0030] The central axis of the driving mechanism 7 is hollow, wherein a gas-filled tube core 8 is rotatably connected inside the hollow central axis, and the gas-filled tube core 8 extends into the interior of the rotating cylinder 4 , and the gas-filled tube core 8 is used to introduce reaction gas into the rotating cylinder 4 .

[0031] The driving mechanism 7 includes an output shaft that penetrates the sealed furnace shell 1 and is connected to the rotating cylinder 4. A driving motor is arranged on the outside of the output shaft. A sealing cover 25 for covering the connection between the output shaft and the sealed furnace shell 1 is arranged on the outside of the motor. The sealing cover 25 is connected to the second vacuum pump 21, and the internal air is pumped out through the second vacuum pump 21. At the same time, the sealing cover 25 is also connected to the nitrogen inlet pipe 27 and the outlet pipe 26 respectively. The axis of the driving motor and the output shaft are both provided with holes for the gas-filled tube core 8 to pass through, wherein the gas-filled tube core 8 is rotatably connected to the driving motor and the output shaft.

[0032] The end of the rotating drum 4 away from the driving mechanism 7 is connected to the sealed furnace shell 1 through a support member 13, and the support member 13 is used to support the rotating drum 4. The support member 13 includes a support ring fixedly connected to the inner wall of the sealed furnace shell 1, and a bearing rollingly connected to the rotating drum 4 is arranged on the inner side of the support ring; wherein a bearing cover 28 is arranged outside the bearing 30, and a blowing pipe 29 for blowing air into the bearing cover 28 is connected to the bearing cover 28, and the blowing pipe is connected to the external pipeline, and the gas used for blowing into the bearing cover 28 is a reaction gas. Due to the small volume of powder materials, it is difficult for the bearing cover 28 to prevent the powder materials from entering the bearing 30, which is easy to affect the life of the bearing. The bearing is always inflated through the pipeline and the blowing pipe, so that the air pressure in the bearing is always greater than that in the outside, avoiding a large amount of powder materials from entering, increasing the service life of the bearing, and reducing maintenance costs.

[0033] The outer walls of the rotating cylinder 4 and the heater 3 are wrapped with a heat insulation layer 2 to improve the temperature stability in the rotating cylinder 4 .

[0034] Shielding plates 12 for shielding materials are provided on both sides of the interior of the rotating cylinder 4. The two shielding plates 12 are respectively located between the feeding section and the heating reaction section and between the heating reaction section and the discharging section. The shielding plate 12 between the feeding section and the heating reaction section is located just in front of the discharging point of the feeding pipe 15, and is used to shield materials to prevent powder materials from directly splashing onto the heating reaction section. Powder materials can be preheated in the feeding section, enter the heating reaction section one by one, and contact with the reaction gas one by one, thereby improving the vapor deposition effect. The shielding plate 12 between the heating reaction section and the discharging section is used to shield materials that have completed the reaction, and is mainly used to prevent intermediate materials from splashing out of the reaction area. After blocking, the materials are discharged according to the spiral, so that the powder materials floating on the intermediate material plate can fully contact with the reaction gas.

[0035] A material belt plate is provided between the blades of the push screw 11 in the area covered by the heater 3 inside the rotating cylinder 4. The material belt plate is fixed between the pitches of the push screw 11 and is used to drive the material when the rotating cylinder 4 rotates.

[0036] A residual material recovery port 20 is provided at the bottom of the inner wall of the sealed furnace shell 1 below the connection between the feed pipe 15 and the rotating cylinder 4 , and a second vacuum valve 14 for discharging overflowed powdered materials is provided on the residual material recovery port 20 .

[0037] Working principle: First, the powder material is loaded into the inner side of the silo 18, and then the first vacuum pump 19 and the second vacuum pump 21 are used to extract the air in the silo 18 and the sealed furnace shell 1. After the air is extracted, the first vacuum valve 16 is opened to control the operation of the unloading assembly 17, so that the powder material enters the inner side of the rotating cylinder 4. When the powder material in the silo 18 is insufficient, the first vacuum valve 16 is closed, the powder material is added to the silo 18, and then the air in the silo is extracted by the first vacuum pump 19. Then the first vacuum valve 16 is opened.

[0038] At the same time, the heater 3 and the driving mechanism 7 are controlled to work, the rotating cylinder 4 rotates, and the reaction gas is introduced into the inner side of the rotating cylinder 4 through the gas filling pipe core 8.

[0039] The interior of the rotating cylinder 4 is divided into three sections: a feeding section, a heating reaction section, and a discharging section. The powder material first enters the feeding section. Since the heater 3 heats the rotating cylinder 4, the temperature inside the rotating cylinder 4 rises. The powder material is preheated in the feeding section and then enters the heating reaction section. The powder material and the reaction gas meet in the heating reaction section in the rotating cylinder 4, and the vapor deposition operation is performed inside the rotating cylinder 4.

[0040] The rotating cylinder 4 rotates to drive the push screw 11, which pushes the materials forward one by one. At the same time, the heater 3 heats the rotating cylinder 4 to make the interior of the rotating cylinder reach the temperature conditions required for vapor deposition. When the push screw 11 rotates, the powder material is driven to rise higher by the material plate, and the contact area with the reaction gas is larger when falling.

[0041] The materials that have completed the reaction will gradually enter the discharge section, gradually move to the discharge guide groove 6, and then be introduced into the inner side of the discharge port 10.

[0042] The third vacuum valve 9 is opened to allow the material to enter the guide pipe 22, and the third vacuum valve 9 is closed after a certain amount of discharge. After the temperature of the material in the guide pipe 22 drops to a certain value, the fourth vacuum valve 24 is opened to discharge the material, and then the fourth vacuum valve 24 is closed, and the air in the guide pipe 22 is exhausted by a vacuum pump.

[0043] In the description of the present invention, it is necessary to understand that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0044] In addition, the terms "first", "second", "third" and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first", "second", "third" and "fourth" may explicitly or implicitly include at least one of such features.

[0045] In the present invention, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0046] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum environment continuous powder vapor deposition device, characterized in that: The invention comprises a sealed furnace shell (1), to which a second vacuum pump (21) is connected, an inner cavity of the sealed furnace shell (1) is rotatably provided with a rotating cylinder (4) for powder vapor deposition, one end of the sealed furnace shell (1) is provided with a driving mechanism (7) for driving the rotating cylinder (4) to rotate, heaters (3) are evenly arranged around the outer wall of the rotating cylinder (4), a pushing screw (11) is arranged in contact with the inner wall of the rotating cylinder (4), a silo (18) for continuous feeding is fixedly connected to one end of the top of the sealed furnace shell (1), a first vacuum pump (19) is arranged on the silo (18), and a plurality of vacuum pumps (19) are arranged at the bottom of the silo (18) which sequentially penetrate the sealed furnace shell (1) and the rotating cylinder. (4), the feed pipe (15) is rotatably connected to the side of the rotating cylinder (4) away from the driving mechanism (7), a first vacuum valve (16) is provided at the connection between the feed pipe (15) and the material bin (18), a discharge guide groove (6) is provided on the outer wall of the rotating cylinder (4) close to one end of the driving mechanism (7), a discharge port (10) is provided on the sealed furnace shell (1) below the discharge guide groove (6), a third vacuum valve (9) is provided on the discharge port (10), the central axis of the driving mechanism (7) is hollow, wherein an air filling tube core (8) is rotatably connected inside the hollow central axis, and the air filling tube core (8) extends to the inside of the rotating cylinder (4).

2. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: One end of the rotating cylinder (4) away from the driving mechanism (7) is connected to the sealed furnace shell (1) via a support member (13); the support member (13) comprises a support ring fixedly connected to the inner wall of the sealed furnace shell (1); a bearing rollingly connected to the rotating cylinder (4) is arranged on the inner side of the support ring; a bearing cover (28) is arranged outside the bearing (30); and a blowing pipe (29) for blowing air into the bearing cover (28) is connected to the bearing cover (28).

3. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: The driving mechanism (7) comprises an output shaft penetrating the sealed furnace shell (1) and connected to the rotating cylinder (4); a driving motor is arranged outside the output shaft; and a sealing outer cover (25) for covering the connection between the output shaft and the sealed furnace shell (1) is arranged outside the motor.

4. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: The outer walls of the rotating cylinder (4) and the heater (3) are wrapped with a heat insulation layer (2).

5. The vacuum environment continuous powder vapor deposition device according to claim 4, characterized in that: Temperature sensors (5) are evenly distributed between the heaters (3) and are connected to control ends of the heaters (3).

6. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: Shielding plates (12) for shielding materials are provided on both sides of the interior of the rotating cylinder (4).

7. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: A material carrying plate is provided between the blades of the pushing spiral (11) located in the area covered by the heater (3) inside the rotating cylinder (4).

8. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: A residual material recovery port (20) is provided at the bottom of the inner wall of the sealed furnace shell (1) below the connection between the feed pipe (15) and the rotating cylinder (4), and a second vacuum valve (14) is provided on the residual material recovery port (20).

9. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: The discharge guide groove (6) is in the shape of a ring and covers the outside of the outlet of the rotating cylinder (4). An opening is provided at the bottom of the discharge guide groove (6) for inserting into the discharge port (10).

10. The vacuum environment continuous powder vapor deposition device according to claim 1, characterized in that: A material discharge assembly (17) is installed on the inner side of the material bin (18).

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