Helium scroll compressor and refrigerating system

By setting up a throttle component with throttle holes on the fixed scroll of the helium scroll compressor, the vibration and noise problems caused by the pulsation of the lubricant oil flow rate are solved, and the reliability of the system and the life of the machine are improved.

CN119982513APending Publication Date: 2025-05-13HONGTONG ENVIRONMENTAL TECHNOLOGY (GUANGZHOU) CO LTD
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Patent Information

Application Number
CN202510144496.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-10
Publication Date
2025-05-13

AI Technical Summary

Technical Problem

In existing helium compressors, the lubricant oil has a flow velocity pulsation when it is injected into the compressor, causing vibration and noise in the return oil circuit to increase, shortening the entire life of the compressor, and risk of breakage, affecting the reliability of the system.

Method used

An oil injection hole is provided on the fixed scroll of the helium scroll compressor, and a throttling member with a throttling hole is installed on the oil injection hole to control the flow rate of lubricating oil entering the compressor and reduce the injection pressure and flow velocity pulsation.

Benefits of technology

By reducing the injection pressure and flow rate of lubricant oil, the vibration and noise of the compressor are reduced, the life of the entire machine is extended, the reliability of the refrigeration system is improved, and the risk of breakage of the return oil pipeline is reduced.

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Abstract

The invention discloses a helium scroll compressor and a refrigerating system, and the helium scroll compressor comprises a fixed scroll plate which is provided with an oil injection hole, and the oil injection hole is communicated with a compression cavity of the helium scroll compressor; the throttling component is arranged on the fixed scroll plate, and a throttling hole communicated with the oil injection hole is formed in the throttling component; the oil return pipe is connected to the throttling component, and a pipe opening of the oil return pipe is communicated with the throttling hole. Lubricating oil has speed pulsation when passing through the oil injection hole in the fixed scroll plate, and the throttling component with the throttling hole is arranged at the position, so that the flow speed of the lubricating oil entering the compressor in the oil return path can be controlled, the injection pressure of the lubricating oil at the position is reduced, the flow speed pulsation of the lubricating oil at the position is reduced, and cooling of a compression cavity is more facilitated; meanwhile, the influence of vibration of the compressor on the oil return line can be reduced, vibration and noise of the oil return line are reduced, the risk of breakage of the oil return line is greatly reduced, the reliability of the refrigerating system is improved, and the overall service life of the compressor is prolonged.
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Description

Technical Field

[0001] The invention is used in the field of helium compressors, and in particular relates to a helium scroll compressor and a refrigeration system. Background Art

[0002] The helium compressor is the core component of the cryogenic vacuum pump and cryogenic refrigerator system. It provides high-pressure helium to the refrigeration cycle system through the compressor. The helium inlet and outlet circulation pipelines and lubricating oil inlet and outlet circulation pipelines are connected to the compressor. Because the flow rate of the lubricating oil pulsates when it is sprayed back into the compressor, the vibration and noise of the oil return line increase. The vibration is transmitted to the compressor through the oil return pipeline, which increases the vibration and noise of the compressor and shortens the life of the compressor. The oil return pipeline is at risk of breaking under severe vibration, which is not conducive to the reliability of the compressor system. Summary of the invention

[0003] The purpose of the present invention is to solve at least one of the technical problems existing in the prior art and to provide a helium scroll compressor and a refrigeration system.

[0004] The technical solution adopted by the present invention to solve its technical problem is:

[0005] In a first aspect, a helium scroll compressor comprises:

[0006] The fixed scroll plate is provided with an oil injection hole, wherein the oil injection hole is connected to the compression chamber of the helium scroll compressor;

[0007] A throttling component is arranged on the fixed scroll plate, and the throttling component is provided with a throttling hole connected with the oil injection hole;

[0008] The oil return pipe is connected to the throttling component, and the pipe opening of the oil return pipe is communicated with the throttling hole.

[0009] In combination with the first aspect, in certain implementations of the first aspect, the throttling component extends from the first end face to the second end face along the thickness direction, the first end face is provided with a first boss, the first boss is embedded in the oil injection hole, the second end face is provided with a second boss, the second boss is provided with an oil return pipe mounting hole, the oil return pipe is inserted into the oil return pipe mounting hole, and the throttling hole extends from the bottom of the oil return pipe mounting hole to the end face of the first boss.

[0010] In combination with the first aspect and the above-mentioned implementations, in some implementations of the first aspect, the diameter of the throttling hole is d, and the length of the throttling hole is L, wherein L / d>4.

[0011] In combination with the first aspect and the above-mentioned implementations, in some implementations of the first aspect, a first annular groove is provided on the outer peripheral surface of the first boss, and a first sealing member cooperating with the hole wall of the oil injection hole is provided in the first annular groove.

[0012] In combination with the first aspect and the above-mentioned implementations, in some implementations of the first aspect, a second annular groove is provided on the outer peripheral surface of the end of the oil return pipe, and a second sealing member cooperating with the hole wall of the oil return pipe mounting hole is provided in the first annular groove.

[0013] In combination with the first aspect and the above-mentioned implementations, in certain implementations of the first aspect, the wall of the oil return pipe at the second annular groove contracts toward the inside of the oil return pipe to form a throttling structure.

[0014] In combination with the first aspect and the above-mentioned implementation methods, in some implementation methods of the first aspect, the oil injection hole includes a flaring section and a closing section, a step surface is formed between the flaring section and the closing section, the first boss is embedded in the flaring section, a gap is left between the first boss and the step surface, a valve plate is provided in the gap, the valve plate is provided with a through hole staggered from the throttling hole, the valve plate can float in the gap, the throttling hole is blocked when the valve plate is tightly attached to the first boss, and the throttling hole is connected when the valve plate is separated from the first boss.

[0015] In combination with the first aspect and the above-mentioned implementations, in certain implementations of the first aspect, the throttling component is provided with a plurality of connecting seats around the second boss, the connecting seats are provided with screw holes, and the throttling component is mounted on the fixed scroll plate by screws arranged in the screw holes.

[0016] In a second aspect, a refrigeration system comprises the helium scroll compressor described in any implementation of the first aspect.

[0017] In combination with the second aspect, in some implementations of the second aspect, a heat exchanger, an oil separator, an adsorber, a first buffer tank, a second buffer tank, a helium circulation loop and a lubricating oil circulation loop are included, the helium circulation loop includes an exhaust path and a return path, the exhaust path flows from the exhaust port of the helium scroll compressor through the heat exchanger, the oil separator and the adsorber in sequence, the return path includes a first return air branch, a second return air branch and a third return air branch, the first return air branch flows through the first buffer tank and then returns to the helium scroll compressor The oil return line is a return line of the helium scroll compressor, the second return line flows out of the oil separator and then returns to the return line of the helium scroll compressor through a throttle valve, the third return line flows out of the oil separator and then returns to the return line of the helium scroll compressor through a bypass valve and a solenoid valve arranged in parallel, the lubricating oil circulation loop includes an oil outlet line and an oil return line, the oil outlet line flows out of the lower part of the helium scroll compressor, flows through the heat exchanger and the second buffer tank in sequence, and then enters the oil return pipe, the volume of the second buffer tank is 0.05-1 liter.

[0018] One of the above technical solutions has at least one of the following advantages or beneficial effects: In the technical solution of the present invention, the throttling structure and function on the oil return circuit are transferred to the inside of the compressor for implementation, an oil injection hole is provided on the fixed scroll plate of the compressor, and a throttling component is installed on the oil injection hole. When the lubricating oil passes through the oil injection hole on the fixed scroll plate, there is a speed pulsation. A throttling component with a throttling hole is provided here, which can control the flow rate of the lubricating oil in the oil return circuit entering the compressor, reduce the injection pressure of the lubricating oil here, reduce the flow rate pulsation of the lubricating oil here, and is more beneficial to the cooling of the compression chamber. At the same time, it can reduce the influence of the vibration of the compressor on the oil return circuit, reduce the vibration and noise of the oil return circuit, greatly reduce the risk of rupture of the oil return pipeline, improve the reliability of the refrigeration system, and extend the overall life of the compressor.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0021] Figure 1 It is a schematic structural diagram of an embodiment of a refrigeration system of the present invention;

[0022] Figure 2 It is a schematic structural diagram of an embodiment of a helium scroll compressor of the present invention, in which a throttling component is arranged on a fixed scroll plate;

[0023] Figure 3 It is a schematic structural diagram of a throttle opening state of an embodiment of a helium scroll compressor of the present invention;

[0024] Figure 4 It is a schematic structural diagram of a throttle hole blocking state of an embodiment of a helium scroll compressor of the present invention;

[0025] Figure 5 It is a schematic diagram of the throttle hole structure of a throttling component of an embodiment of a helium scroll compressor of the present invention;

[0026] Figure 6 It is a schematic diagram of the valve plate structure of an embodiment of the helium scroll compressor of the present invention. DETAILED DESCRIPTION

[0027] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

[0028] In the present invention, if directions (up, down, left, right, front and back) are described, it is only for the convenience of describing the technical solution of the present invention, and does not indicate or imply that the technical features referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, it cannot be understood as a limitation of the present invention.

[0029] In the present invention, "several" means one or more, "multiple" means more than two, "greater than", "less than", "exceed" and the like are understood to exclude the number itself; "above", "below", "within" and the like are understood to include the number itself. In the description of the present invention, if there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0030] In the present invention, unless otherwise clearly defined, the words "set", "install", "connect" and the like should be understood in a broad sense, for example, they can be directly connected or indirectly connected through an intermediate medium; they can be fixedly connected or detachably connected or integrally formed; they can be mechanically connected or electrically connected or able to communicate with each other; they can be the internal connection of two elements or the interaction relationship between two elements. Those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0031] The embodiment of the present invention provides a helium scroll compressor and a refrigeration system, see Figure 1 The refrigeration system includes a helium scroll compressor 100, a heat exchanger 200, an oil separator 300, an adsorber 400, a first buffer tank 500, a second buffer tank 600, a helium circulation loop and a lubricating oil circulation loop. The heat exchanger 200 is provided with a cooling water circulation interface, a helium cooling interface and a lubricating oil cooling interface. The helium circulation loop includes an exhaust path and a return path. The exhaust path flows from the exhaust port of the helium scroll compressor 100 through the heat exchanger 200, the oil separator 300 and the adsorber 400 in sequence. The return path includes a first return branch 701, a second return branch 702 and a third return branch 703. The first return branch 701 flows through the first buffer tank 500 and then returns to the return port of the helium scroll compressor 100. The second return branch 702 flows out from the oil separator 300. Then it returns to the return air port of the helium scroll compressor 100 through the throttle valve 706. The third return air branch 703 flows out of the oil separator 300 and returns to the return air port of the helium scroll compressor 100 through the bypass valve 704 and the solenoid valve 705 arranged in parallel. The lubricating oil circulation loop includes an oil outlet circuit and an oil return circuit. The oil outlet circuit flows out from the lower part of the helium scroll compressor 100, flows through the heat exchanger 200 and the second buffer tank 600 in sequence, and then enters the oil return pipe 101.

[0032] Combination Figure 1 The helium discharged from the helium scroll compressor 100 enters the oil separator 300 after passing through the heat exchanger 200 and is discharged after passing through the adsorber 400. The circulating helium returns to the return port of the helium scroll compressor 100 through the first return air branch 701, the second return air branch 702 and the third return air branch 703, respectively. The helium circulating in the first return air branch 701 is buffered by the first buffer tank 500 and returns to the return port of the helium scroll compressor 100. The oil-gas mixture of the helium in the second return air branch 702 passing through the oil separator 300 returns to the return port of the helium scroll compressor 100 through the throttle valve. The helium in the third return air branch 703 passing through the oil separator 300 returns to the suction port of the helium scroll compressor 100 through the bypass valve 704 and the solenoid valve 705 arranged in parallel.

[0033] Combination Figure 1 The lubricating oil flows out from the lower part of the helium scroll compressor 100 and enters the heat exchanger 200 before being discharged. After passing through the second buffer tank 600, it enters the oil return port of the compressor, completing an oil circuit cycle outside the compressor. After the oil enters the compressor, it enters the compression chamber through the throttle hole of the throttle component set at the oil injection hole, and cools the compression chamber and the helium inside it.

[0034] In an embodiment of the present invention, a second buffer tank 600 is provided on the oil return line, which can effectively weaken the flow velocity pulsation of the lubricating oil when it flows back in the lubricating oil return line, and can also absorb the impact of the vibration of the compressor operation on the oil return circuit, thereby improving the reliability of the refrigeration system and reducing the vibration and noise of the system pipeline.

[0035] In some embodiments, the volume of the second buffer tank 600 is 0.05-1 liter. The space within this volume range of the second buffer tank 600 can effectively weaken the flow rate pulsation of the lubricating oil when it flows back in the lubricating oil return line, and can also absorb the impact of the vibration of the compressor operation on the oil return line, thereby improving the reliability of the refrigeration system and reducing the vibration and noise of the system pipelines.

[0036] The embodiment of the present invention further provides a helium scroll compressor 100, see Figure 2-Figure 4 The helium scroll compressor 100 includes a fixed scroll 102, a throttling component 103 and an oil return pipe 101. The fixed scroll 102 is provided with an oil injection hole 104, and the oil injection hole 104 is connected to the compression chamber of the helium scroll compressor 100; the throttling component 103 is arranged on the fixed scroll 102, and the throttling component 103 is provided with a throttling hole 105 connected to the oil injection hole 104; the oil return pipe 101 is connected to the throttling component 103, and the pipe mouth of the oil return pipe 101 is connected to the throttling hole 105. The oil return pipe 101 is used to return the lubricating oil to the compression chamber of the helium scroll compressor 100 to cool the compression chamber and the helium therein.

[0037] Combination Figure 2-Figure 4 In the technical solution of the present invention, the throttling structure and function on the oil return line are transferred to the inside of the compressor for implementation. An oil injection hole 104 is provided on the fixed scroll plate 102 of the compressor, and a throttling component 103 is installed on the oil injection hole 104. When the lubricating oil passes through the oil injection hole 104 on the fixed scroll plate 102, there is a velocity pulsation. A throttling component 103 with a throttling hole 105 is provided here, which can control the flow rate of the lubricating oil in the oil return line entering the compressor, reduce the injection pressure of the lubricating oil here, reduce the flow rate pulsation of the lubricating oil here, and is more beneficial to the cooling of the compression chamber. At the same time, it can reduce the influence of the vibration of the compressor on the oil return line, reduce the vibration and noise of the oil return line, greatly reduce the risk of breakage of the return oil pipe 101, improve the reliability of the refrigeration system, and extend the service life of the compressor.

[0038] In some embodiments, see Figure 3-Figure 5 The throttling component 103 extends from the first end face 106 to the second end face 107 along the thickness direction, and the first end face 106 is provided with a first boss 108. The first end face 106 of the throttling component 103 faces the fixed scroll plate 102, and the first boss 108 is embedded in the oil injection hole 104. The second end face 107 is provided with a second boss 109, and the second boss 109 is located on the back side of the first boss 108. The second boss 109 is provided with an oil return pipe mounting hole 110, and the oil return pipe 101 is inserted into the oil return pipe mounting hole 110, and the throttling hole 105 extends from the bottom of the oil return pipe mounting hole 110 to the end face of the first boss 108. In this embodiment, the first boss 108 is embedded in the oil injection hole 104, and the throttle hole 105 is set on the first boss 108 to achieve the communication between the throttle hole 105 and the oil injection hole 104, and the return oil pipe 101 is further inserted into the return oil pipe mounting hole 110 of the second boss 109 to achieve the communication between the return oil pipe 101 and the throttle hole 105, and finally the throttle hole 105 is set between the return oil pipe 101 and the oil injection hole 104, that is, the lubricating oil throttling is achieved in the process of the lubricating oil flowing from the return oil pipe 101 to the oil injection hole 104. The first boss 108 and the second boss 109 are set on the throttling component 103, and further the first boss 108 cooperates with the oil injection hole 104, and the return oil pipe 101 cooperates with the second boss 109 to achieve the installation of the return oil pipe 101 and the throttling component 103 on the fixed scroll 102, thereby improving the convenience and accuracy of the installation process of the entire throttling structure.

[0039] In some embodiments, see Figure 5 The diameter of the throttle hole 105 is d, and the length of the throttle hole 105 is L, wherein L / d> 4. The diameter d of the throttle hole 105 is a slender hole in the range of φ0.5-3 mm, rather than a thin-walled hole or a short hole, so that the damping effect of the throttle hole 105 is better.

[0040] In some embodiments, see Figure 3, Figure 4 The outer peripheral surface of the first boss 108 is provided with a first annular groove, and the first annular groove is provided with a first sealing member 111 that matches with the hole wall of the oil injection hole 104. The first sealing member 111 can be an O-ring, and the first sealing member 111 forms a seal between the throttling component 103 and the fixed scroll 102, so that the lubricating oil can only flow into the oil injection hole 104 of the fixed scroll 102 through the throttling hole 105 in the center of the throttling component 103.

[0041] In some embodiments, see Figure 3 , Figure 4 The outer peripheral surface of the end of the oil return pipe 101 is provided with a second annular groove, and the first annular groove is provided with a second sealing member 112 that matches the hole wall of the oil return pipe mounting hole 110. The second sealing member 112 is such as an O-ring, and the second sealing member 112 forms a seal between the throttling component 103 and the oil return pipe 101, so that the lubricating oil can only flow out through the throttling hole 105.

[0042] Further, see Figure 3 , Figure 4 , the wall of the oil return pipe 101 at the second annular groove contracts toward the inside of the oil return pipe 101 to form a throttling structure. In this embodiment, before the throttling hole 105 of the throttling component 103, a throttling structure is formed at the second annular groove through the oil return pipe 101, forming multiple throttling, so as to better control the flow rate of the lubricating oil in the oil return line entering the compressor, reduce the injection pressure of the lubricating oil at this point, reduce the flow rate pulsation of the lubricating oil at this point, and be more beneficial to the cooling of the compression chamber. At the same time, it can reduce the impact of the vibration of the compressor on the oil return line, reduce the vibration and noise of the oil return line, greatly reduce the risk of the oil return line 101 being broken, improve the reliability of the refrigeration system, and extend the service life of the compressor.

[0043] The oil injection hole 104 is a straight hole or a stepped hole. For example, in some embodiments, see Figure 3 , Figure 4 , Figure 6 The oil injection hole 104 includes a flaring section and a closing section, a step surface 113 is formed between the flaring section and the closing section, the first boss 108 is embedded in the flaring section, a gap 114 is left between the first boss 108 and the step surface 113, a valve plate 115 is provided in the gap 114, the valve plate 115 is provided with a through hole 116 staggered from the throttle hole 105, one or more through holes 116 are provided, the valve plate 115 can float in the gap 114, the throttle hole 105 is blocked when the valve plate 115 is tightly attached to the first boss 108, and the throttle hole 105 is connected when the valve plate 115 is separated from the first boss 108.

[0044] When the pressure in the oil return pipe 101 is greater than the pressure in the compression chamber connected to the oil injection hole 104 of the fixed scroll 102, the valve plate 115 moves to the bottom of the interval 114, and the lubricating oil passes through the throttle hole 105 of the throttling component 103 and the through hole 116 on the valve plate 115 into the fixed scroll 102; when the pressure in the oil return pipe 101 is less than the pressure in the compression chamber connected to the injection hole of the fixed scroll 102, the valve plate 115 presses upward against the throttling component 103. The throttle hole 105 of the flow component 103 is blocked by the end face of the valve plate 115, and the through hole 116 on the valve plate 115 is blocked by the cross section of the throttling component 103, so that neither the lubricating oil nor the helium can pass through the valve plate 115 into the return oil pipe 101. This structure makes the injection of the lubricating oil to the fixed scroll 102 unidirectional, and the lubricating oil and helium in the fixed scroll 102 cannot pass through the valve plate 115 in the reverse direction, effectively reducing the vibration and noise caused by the backflow of the lubricating oil and the helium.

[0045] See also Figure 2 , Figure 5 The throttling component 103 is provided with a plurality of connecting seats 117 around the second boss 109, and the connecting seats 117 are provided with screw holes 118. The throttling component 103 is installed on the fixed scroll plate 102 by means of screws 119 arranged in the screw holes 118. By means of the plurality of connecting seats 117 distributed around the second boss 109, the throttling component 103 can be stably installed on the fixed scroll plate 102, and the matching accuracy of the return oil pipe 101, the throttling hole 105 and the oil injection hole 104 can be fully guaranteed.

[0046] It is understandable that the throttling component 103 can also be installed on the fixed scroll 102 by means of snap-fitting, welding, etc.

[0047] In the description of this specification, the description with reference to the terms "example", "embodiment" or "some embodiments" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0048] Of course, the invention is not limited to the above-mentioned embodiments, and those skilled in the art may make equivalent modifications or substitutions without violating the spirit of the invention, and these equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A helium scroll compressor, characterized in that: include: The fixed scroll plate is provided with an oil injection hole, wherein the oil injection hole is connected to the compression chamber of the helium scroll compressor; A throttling component is arranged on the fixed scroll plate, and the throttling component is provided with a throttling hole connected with the oil injection hole; The oil return pipe is connected to the throttling component, and the pipe opening of the oil return pipe is communicated with the throttling hole.

2. The helium scroll compressor according to claim 1, characterized in that: The throttling component extends from the first end face to the second end face along the thickness direction, the first end face is provided with a first boss, the first boss is embedded in the oil injection hole, the second end face is provided with a second boss, the second boss is provided with an oil return pipe mounting hole, the oil return pipe is inserted into the oil return pipe mounting hole, and the throttling hole extends from the bottom of the oil return pipe mounting hole to the end face of the first boss.

3. The helium scroll compressor according to claim 2, characterized in that: The diameter of the throttling hole is d, and the length of the throttling hole is L, wherein L / d>4.

4. The helium scroll compressor according to claim 2, characterized in that: A first annular groove is disposed on the outer peripheral surface of the first boss, and a first sealing member matched with the hole wall of the oil injection hole is disposed in the first annular groove.

5. The helium scroll compressor according to claim 2, characterized in that: A second annular groove is disposed on the outer peripheral surface of the end of the oil return pipe, and a second sealing member matched with the hole wall of the oil return pipe mounting hole is disposed in the first annular groove.

6. The helium scroll compressor according to claim 5, characterized in that: The wall of the oil return pipe contracts toward the inside of the oil return pipe at the second annular groove to form a throttling structure.

7. The helium scroll compressor according to claim 2, characterized in that: The oil injection hole includes a flaring section and a closing section, a step surface is formed between the flaring section and the closing section, the first boss is embedded in the flaring section, a gap is left between the first boss and the step surface, a valve plate is provided in the gap, the valve plate is provided with a through hole staggered from the throttling hole, the valve plate can float in the gap, the throttling hole is blocked when the valve plate is tightly attached to the first boss, and the throttling hole is connected when the valve plate is separated from the first boss.

8. The helium scroll compressor according to claim 2, characterized in that: The throttling component is provided with a plurality of connecting seats around the second boss, the connecting seats are provided with screw holes, and the throttling component is mounted on the fixed scroll plate by screws arranged in the screw holes.

9. A refrigeration system, characterized in that: A helium scroll compressor comprising the helium scroll compressor according to any one of claims 1 to 8.

10. The refrigeration system according to claim 9, characterized in that: It includes a heat exchanger, an oil separator, an adsorber, a first buffer tank, a second buffer tank, a helium circulation loop and a lubricating oil circulation loop, wherein the helium circulation loop includes an exhaust path and a return path, wherein the exhaust path flows sequentially through the heat exchanger, the oil separator and the adsorber from the exhaust port of the helium scroll compressor, wherein the return path includes a first return air branch, a second return air branch and a third return air branch, wherein the first return air branch flows through the first buffer tank and then returns to the return air port of the helium scroll compressor, wherein the second return air branch flows out of the oil separator and then returns to the return air port of the helium scroll compressor through a throttle valve, wherein the third return air branch flows out of the oil separator and then returns to the return air port of the helium scroll compressor through a bypass valve and a solenoid valve arranged in parallel, wherein the lubricating oil circulation loop includes an oil outlet path and an oil return path, wherein the oil outlet path flows out of the lower part of the helium scroll compressor and then flows sequentially through the heat exchanger and the second buffer tank and then enters the oil return pipe, and the volume of the second buffer tank is 0.05-1 liter.

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