Energy-saving multi-stage high-vacuum dry-type Roots vacuum unit

Abstract

The invention belongs to the technical field of vacuum units, and particularly relates to an energy-saving multi-stage high-vacuum dry-type Roots vacuum unit which comprises a unit welding rack, a three-stage air-cooled Roots vacuum pump is fixedly mounted on the upper end face of the unit welding rack, and a first cooling loop is fixedly mounted on the three-stage air-cooled Roots vacuum pump. One end of the third-stage air-cooled roots vacuum pump is connected with an anti-explosion variable frequency motor, the anti-explosion variable frequency motor is fixedly connected with the unit welding rack, and one end of a unit air inlet elbow is fixedly installed on the upper end face of the third-stage air-cooled roots vacuum pump. According to the invention, the uniquely designed integrated multi-stage cooler is combined, step-by-step cooling and efficient heat exchange are carried out on each stage of pump cavity rotor, gas after partial condensation flows back to a pump cavity cold returning opening, the exhaust temperature of the pump cavity is reduced, the temperature of a working cavity is kept in a stable operation state all the time, and meanwhile, the exhausted gas is condensed.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum units, in particular to an energy-saving multi-stage high-vacuum dry-type Roots vacuum unit. Background Art

[0002] In recent years, as the country pays more and more attention to energy conservation, environmental protection and carbon emission indicators, energy-saving dry vacuum units are increasingly favored by the market. Traditional dry vacuum pumps include screw vacuum pumps, Roots vacuum pumps, and air-cooled Roots vacuum pumps. Screw vacuum pumps cannot be large-scaled due to the influence of processing equipment and structure. At present, the world's largest screw vacuum pump has a pumping speed of only 2700m 3 / h. The pumping rate of ordinary single-stage air-cooled Roots vacuum pumps can be large-scale, but the ultimate vacuum can only reach 16000Pa. If a higher vacuum is required, multiple Roots pumps or air-cooled Roots pumps are required to be connected in series. Multiple pumps have multiple failure points and multiple motors, and both power consumption and floor space are greatly increased. This also limits the promotion and application of dry vacuum pumps, especially in large-scale coal chemical, salt chemical, petroleum refining, steel and other industries. The vacuuming of process equipment needs to meet the requirements of large pumping rate and high vacuum degree. The traditional method of using multiple pumps in series leads to a series of problems such as increased cost, increased number of equipment and failure points, and increased floor space. Summary of the invention

[0003] In view of the deficiencies in the prior art, the present invention provides an energy-saving multi-stage high-vacuum dry Roots vacuum unit, which solves the problems raised in the background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an energy-saving multi-stage high-vacuum dry-type Roots vacuum unit, comprising a unit welding frame, a three-stage air-cooled Roots vacuum pump is fixedly installed on the upper end surface of the unit welding frame, a first cooling circuit is fixedly installed on the three-stage air-cooled Roots vacuum pump, one end of the three-stage air-cooled Roots vacuum pump is connected to an explosion-proof variable frequency motor, the explosion-proof variable frequency motor is fixedly connected to the unit welding frame, one end of the unit air inlet elbow is fixedly installed on the upper end surface of the three-stage air-cooled Roots vacuum pump, and a cooling water outlet is fixedly installed on one side of the three-stage air-cooled Roots vacuum pump. Component A, a Roots pump cooling water pipeline is also fixedly installed on one side of the three-stage air-cooled Roots vacuum pump, an inlet quick-opening filter is fixedly installed on the other end of the unit's air inlet elbow, a flange pressure transmitter is fixedly installed on the side of the unit's air inlet elbow, one end of a first-stage exhaust port short circuit is fixedly installed at the position of the inlet quick-opening filter on the lower side of the three-stage air-cooled Roots vacuum pump corresponding to the inlet quick-opening filter, a bellows E is fixedly installed on the other end of the first-stage exhaust port short circuit, the other end of the bellows E is fixedly connected to one end of the first-stage condenser air inlet, and the other end of the first-stage condenser air inlet is fixedly installed A primary condenser is installed, and a primary condenser cooling water inlet and a primary condenser cooling water outlet are provided on the primary condenser. The primary condenser is fixedly installed on the welding frame of the unit, and one end of the primary condenser exhaust port is fixedly installed on the other end of the primary condenser. A manual valve is provided on the lower side of the primary condenser and is fixedly connected to the drainage collection port. A primary condenser air outlet tee is fixedly installed on the other end of the primary condenser exhaust port, and one end of the primary condenser air outlet tee is fixedly installed on one end of the primary cooling elbow, and a primary cooling elbow is fixedly installed on the other end of the primary cooling elbow. The first-stage cooling pipe is fixedly installed on the side of the three-stage air-cooled Roots vacuum pump, the other end of the first-stage condenser air outlet tee is fixedly installed with the second-stage condenser air inlet and the first-stage anti-cold port, one end of the bellows A and the other end of the second-stage air inlet elbow are fixedly installed on the upper side of the second-stage condenser air inlet and the first-stage anti-cold port, the other end of the second-stage air inlet elbow is fixedly installed on the upper end surface of the three-stage air-cooled Roots vacuum pump, the upper end surface of the bellows A is fixedly installed on one end of the first-stage anti-cold port pipe, and the other end of the first-stage anti-cold port pipe is fixedly installed on one side of the three-stage air-cooled Roots vacuum pump; A second cooling circuit is fixedly installed at the position of the lower end surface of the three-stage air-cooled Roots vacuum pump corresponding to the secondary air inlet elbow; One end of the lower side of the first-stage condenser is fixedly connected with a drainage collection port, the other end of the lower side of the first-stage condenser is fixedly connected with an interstage liquid storage tank, the interstage liquid storage tank is externally connected to two interstage tank pressure relief ports, both ends of the interstage liquid storage tank are respectively provided with manual valves fixedly connected to the drainage collection port, the drainage collection port is fixedly connected to a pneumatic diaphragm pump, the diaphragm pump is provided with a pneumatic diaphragm pump air source inlet and a diaphragm pump total sewage outlet, the drainage collection port is fixedly connected to a post-pump sewage storage tank through a manual valve, the post-pump sewage storage tank is also provided with an exhaust port, a magnetic flap level gauge with a transmitter is fixedly installed on one side of the post-pump sewage storage tank, and a third cooling circuit is provided on the upper side of the post-pump sewage storage tank.

[0005] As a preferred technical solution of the present invention, the second cooling circuit includes a secondary exhaust port short circuit installed at the position of the secondary air inlet elbow corresponding to the lower end surface of the three-stage air-cooled Roots vacuum pump, a bellows C is fixedly installed on the lower end surface of the secondary exhaust port short circuit, one end of the secondary condenser air inlet is fixedly installed on the lower end surface of the bellows C, one end of the secondary condenser air inlet is fixedly installed on the other end of the secondary condenser air inlet is fixedly installed on one end of the secondary condenser, a secondary condenser cooling water inlet and a secondary condenser cooling water outlet are provided on the secondary condenser, and the lower side surface of one end of the secondary condenser is manually The valve is fixedly connected to the drainage collection port, the other end of the secondary condenser is fixedly connected to the interstage liquid storage tank through a manual valve, the secondary condenser is fixedly installed on the welding frame of the unit, the other end of the secondary condenser is fixedly installed with one end of the secondary condenser exhaust port, the other end of the secondary condenser exhaust port is fixedly installed with a three-stage air inlet pipe, the other end of the three-stage air inlet pipe is fixedly installed on the upper end surface of the three-stage air-cooled Roots vacuum pump, one side of the secondary condenser exhaust port is divided into two paths, and the two paths are respectively fixedly installed on both sides of the three-stage air-cooled Roots vacuum pump; A third cooling circuit is fixedly installed at a position on the lower end surface of the three-stage air-cooled Roots vacuum pump corresponding to the three-stage air inlet pipe.

[0006] As a preferred technical solution of the present invention, one end of a transition pipe A is fixedly installed on one side of the exhaust port of the secondary condenser, one end of a transition pipe E is fixedly installed on the other end of the transition pipe A, one end of a transition pipe D is fixedly installed on the other end of the transition pipe E, one end of a transition pipe C is fixedly installed on the other end of the transition pipe D, and the other end of the transition pipe C is fixedly installed on one side surface of the three-stage air-cooled Roots vacuum pump; One end of a transition pipe B is fixedly installed on the other side of the exhaust port of the secondary condenser, one end of a transition pipe H is fixedly installed on the other end of the transition pipe B, a transition pipe G is fixedly installed on the other end of the transition pipe H, the other end of the transition pipe G is fixedly installed on the other end of the transition pipe F, and the other end of the transition pipe F is fixedly installed on the other side of the three-stage air-cooled Roots vacuum pump.

[0007] As a preferred technical solution of the present invention, the third cooling circuit includes a three-stage exhaust port short circuit fixedly installed on the lower end surface of the three-stage air-cooled Roots vacuum pump corresponding to the position of the three-stage air inlet pipe, the lower end surface of the three-stage exhaust port short circuit is fixedly installed with a bellows D, the lower end surface of the bellows D is fixedly installed with one end of the three-stage condenser air inlet, the other end of the three-stage condenser air inlet is fixedly installed with one end of the three-stage condenser, the three-stage condenser is provided with a three-stage condenser cooling water inlet and a three-stage condenser cooling water outlet, the lower end surface of one side of the three-stage condenser is fixedly connected to the drain collection port through a manual valve, the three-stage condenser is fixedly installed on the upper end surface of the unit welding frame, and the other end of the three-stage condenser is fixedly installed with a three-stage condenser exhaust port A; The exhaust port A of the three-stage condenser is divided into two paths, one of which is fixedly installed with a sewage storage tank after the pump and the other is fixedly installed with the exhaust port of the three-stage condenser. The exhaust port of the three-stage condenser is divided into two paths, one of which is fixedly installed with a connecting pipe A and the other is fixedly installed with a connecting pipe B. The connecting pipe A and the connecting pipe B are respectively fixedly installed on both sides of the three-stage air-cooled Roots vacuum pump; The other end of the exhaust port A of the three-stage condenser is fixedly installed with a sewage storage tank behind the pump, the lower end surface of the three-stage condenser is fixedly installed with one end of a transition pipe B, the other end of the transition pipe B is fixedly installed with one end of a manual flange ball valve B, and the other end of the manual flange ball valve B is fixedly installed with a sewage storage tank behind the pump.

[0008] As a preferred technical solution of the present invention, the welding frame of the unit includes a pump mounting frame fixedly connected to a three-stage air-cooled Roots vacuum pump, a motor mounting frame is fixedly installed on the upper end of the pump mounting frame, an explosion-proof variable frequency motor is fixedly installed on the upper end surface of the motor mounting frame, a bracket is fixedly installed on the lower end surface of the pump mounting frame, a bottom mounting frame is fixedly installed on the lower end surface of the bracket, a mounting frame is fixedly installed on the upper end surface of the bottom mounting frame, a three-stage condenser is fixedly installed on the upper end surface of the mounting frame, and a first-stage condenser, a post-pump sewage storage tank and a second-stage condenser are fixedly installed on the upper end surface of the bottom mounting frame.

[0009] As a preferred technical solution of the present invention, an elbow A is fixedly installed on the side of the air inlet bend pipe of the unit, a manual flange ball valve A is fixedly installed on the upper end face of the elbow A, and a flange pressure transmitter is fixedly installed on the upper end face of the manual flange ball valve A.

[0010] As a preferred technical solution of the present invention, the three-stage air-cooled Roots vacuum pump includes a pump body, and the upper end face and the lower end face of the pump body are respectively provided with a pump body inlet, a secondary air inlet and a tertiary air inlet, and the two side faces of the pump body are respectively provided with a tertiary anti-cooling port, a secondary anti-cooling port and a primary anti-cooling port.

[0011] As a preferred technical solution of the present invention, a solvent cleaning tank is fixedly installed on the side of the manual flange ball valve B, and a solvent replenishing port and a solvent drain port are provided on the solvent cleaning tank. A solvent cleaning pipeline is fixedly installed on the upper end surface of the solvent cleaning tank, and the solvent cleaning pipeline is divided into three routes, and the three routes correspond to the unit air inlet bend, the secondary air inlet bend and the tertiary air inlet pipe. The three routes pass through the unit air inlet bend, the secondary air inlet bend and the tertiary air inlet pipe and then converge into one route, and after converging into one route, a nitrogen purge pipeline is fixedly connected.

[0012] As a preferred technical solution of the present invention, a pre-pump buffer tank is fixedly installed at one end of the inlet quick-opening filter away from the three-stage air-cooled Roots vacuum pump, and a pre-pump buffer tank drain port is provided at the pre-pump buffer tank. The pre-pump buffer tank is fixedly connected to a pre-pump condenser, and a pre-pump condenser cooling water inlet, a pre-pump condenser cooling water outlet, and a pre-pump condenser shell drain port are provided at the pre-pump condenser.

[0013] As a preferred technical solution of the present invention, the three-stage air inlet pipe includes a bend A, one end of which is fixedly installed on, the other end of which is fixedly installed with one end of a connecting pipe, the other end of which is fixedly installed with one end of a bend B, and the other end of the bend B is fixedly installed on the exhaust port of the secondary condenser.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention, in view of the above problems, designs and develops an energy-saving multi-stage high vacuum dry vacuum unit with a maximum pumping rate of 36,000m 3 / h; Different stages are designed according to working conditions. Up to five stages of pump chamber rotors can be connected in series, and the ultimate vacuum can reach up to 2Pa; Each stage of the rotor can select different structural forms according to different process vacuum requirements. It can adopt a non-return cooling structure or a return cooling structure. It can choose a claw pump profile or a composite structure of two-leaf, three-leaf, and four-leaf rotor profiles. It can also adopt a composite profile structure of a three-leaf rotor plus a variable pitch screw. Combined with the unique integrated multi-stage cooler, each stage of the pump cavity rotor is cooled step by step, with efficient heat exchange. Part of the condensed gas flows back to the pump cavity return cooling port, reducing the exhaust temperature of the pump cavity, keeping the working cavity temperature in a stable operating state, and condensing the exhaust gas at the same time. Combined with the unique integrated multi-stage condensate recovery tank, the condensate after cooling of the condenser is recovered, and the automatic valve setting can achieve online recovery and discharge. The design adopts a composite sealing structure of lip seal + nitrogen to ensure no leakage in the cavity. The front and rear bearing box covers adopt a jacketed water cooling structure.

[0015] The energy-saving multi-stage high vacuum dry vacuum unit can achieve high vacuum, high pumping speed, low temperature rise, automatic recovery and discharge of condensate, and ensure the continuous and stable operation of process equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a stereogram of the present invention; Figure 2 This is the formal diagram of the present invention; Figure 3 It is a right side view of the present invention; Figure 4 A top view of the present invention; Figure 5 It is a rear view of the present invention; Figure 6 This is a schematic diagram of the welding frame of the unit; Figure 7 This is a schematic diagram of a three-stage air-cooled Roots vacuum pump; Figure 8 It is a schematic diagram of the structure of the present invention; Fig. 9 It is a schematic diagram of the structure of the present invention; Fig.10 It is a flow chart of the present invention.

[0017] In the figure: 1. Inlet quick-open filter; 2. Flange pressure transmitter; 3. Manual flange ball valve A; 4. Elbow A; 5. Bend pipe at the air inlet of the unit; 6. Secondary air inlet elbow; 61. elbow A; 62. elbow B; 7. Three-stage air inlet pipe; 71. Elbow pipe A; 72. Connecting pipe; 73. Elbow pipe B; 8. Solvent cleaning pipeline; 9. Secondary condenser exhaust port; 901. Overtake A; 902. Overtake B; 903. Overtake C; 904. Overtake D; 905. Overtake E; 906. Overtake F; 907. Overtake G; 908. Overtake H; 10. First-stage anti-cold outlet pipe; 11. Bellows A; 12. Solvent cleaning tank; 14. Second-stage condenser; 15. Second-stage condenser air inlet; 16. Drainage collection port; 17. Interstage liquid storage tank; 18. First-stage condenser exhaust port; 19. Tee; 20. Pump rear sewage storage tank; 21. First-stage condenser; 22. First-stage condenser air inlet; 23. Third-stage condenser; 24. Third-stage condenser air inlet; 25. Second-stage condenser air inlet and first-stage anti-cold outlet; 26. Nitrogen purge pipeline; 27. Cooling water outlet assembly A; 28. Explosion-proof variable frequency motor; 29. ​​Third-stage anti-cold outlet pipe A; 30. Shield; 31. Bellows B; 32. Transition pipe A; 33. Second-stage anti-cold outlet pipe; 34. Third-stage exhaust port short circuit; 35. Roots pump cooling water pipeline; Three-stage air-cooled Roots vacuum pump; 361, pump body; 362, pump body inlet; 363, second-stage air inlet; 364, third-stage air inlet; 365, third-stage anti-cooling port; 366, second-stage anti-cooling port; 367, first-stage anti-cooling port; 37. Short-circuit the secondary exhaust port; 38. Bellows C; 39. Bellows D; 40. Short-circuit the primary exhaust port; 41 Bellows E; 42. Unit welding frame; 421. Motor mounting frame; 422. Pump mounting frame; 423. Bottom mounting frame; 424. Mounting frame; 425. Bracket; 43. Magnetic flap level gauge with transmitter; 44. Transition pipe B; 45. Manual flange ball valve B; 46. Three-stage reverse cold port pipe B; 47. Cooling water inlet assembly B; 48. Elbow B; 49. Welding elbow; 50. Exhaust port of the third-stage condenser; 501. Exhaust port A of the third-stage condenser; 502. Connecting pipe A; 503. Connecting pipe B; 51. Pneumatic diaphragm pump; 52. Diaphragm pump air inlet pipeline; 53. First-stage condenser air outlet tee; 531. First-stage cooling elbow; 532. First-stage cooling pipe; NO.1, air inlet; NO.2, exhaust port; NO.3, cooling water inlet of condenser before pump; NO.4, cooling water outlet of condenser before pump; NO.5, shell drain port of condenser before pump; NO.6, drain port of buffer tank before pump; NO.7, cooling water inlet of primary condenser; NO.8, cooling water outlet of primary condenser; NO.9, cooling water inlet of secondary condenser; NO.10, cooling water outlet of secondary condenser; NO.11, cooling water inlet of tertiary condenser; NO.12, cooling water outlet of tertiary condenser; NO.13, pressure relief port of interstage liquid storage tank; NO.14, cooling water inlet of air-cooled Roots pump; NO.15, cooling water outlet of air-cooled Roots pump; NO.16, air source inlet of pneumatic diaphragm pump; NO.17, nitrogen source inlet; NO.18, solvent replenishment port; NO.19, solvent drain port; NO.20, total sewage outlet of diaphragm pump. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Example

[0019] See also Figure 1-9The present invention provides the following technical solutions: an energy-saving multi-stage high-vacuum dry-type Roots vacuum unit, comprising a unit welding frame 42, a three-stage air-cooled Roots vacuum pump 36 is fixedly installed on the upper end surface of the unit welding frame 42, a first cooling circuit is fixedly installed on the three-stage air-cooled Roots vacuum pump 36, one end of the three-stage air-cooled Roots vacuum pump 36 is connected to an explosion-proof variable frequency motor 28, the explosion-proof variable frequency motor 28 is fixedly connected to the unit welding frame 42, one end of the unit air inlet elbow 5 is fixedly installed on the upper end surface of the three-stage air-cooled Roots vacuum pump 36, a cooling water outlet assembly A27 is fixedly installed on one side of the three-stage air-cooled Roots vacuum pump 36, and the three-stage air-cooled Roots vacuum pump 36 is fixedly installed with a cooling water outlet assembly A27. A Roots pump cooling water pipeline 35 is also fixedly installed on one side of the Roots vacuum pump 36, an inlet quick-opening filter 1 is fixedly installed on the other end of the unit air inlet elbow 5, and a flange pressure transmitter 2 is fixedly installed on the side of the unit air inlet elbow 5. One end of a first-stage exhaust port short-circuit 40 is fixedly installed at the position of the inlet quick-opening filter 1 on the lower side of the three-stage air-cooled Roots vacuum pump 36, and a bellows E41 is fixedly installed on the other end of the first-stage exhaust port short-circuit 40. The other end of the bellows E41 is fixedly connected to one end of the first-stage condenser air inlet 22, and the other end of the first-stage condenser air inlet 22 is fixedly installed with the first-stage condenser 21. The condenser 21 is provided with a first-stage condenser cooling water inlet NO.7 and a first-stage condenser cooling water outlet NO.8. The first-stage condenser 21 is fixedly mounted on the unit welding frame 42. One end of the first-stage condenser exhaust port 18 is fixedly mounted on the other end of the first-stage condenser 21. A manual valve is provided on the lower side of the first-stage condenser 21 and is fixedly connected to the drainage collection port 16. The other end of the first-stage condenser exhaust port 18 is fixedly mounted with a first-stage condenser air outlet tee 53. One end of the first-stage condenser air outlet tee 53 is fixedly mounted with one end of a first-stage cooling elbow 531. The other end of the first-stage cooling elbow 531 is fixedly mounted with a first-stage cooling pipe 532, the first-stage cooling pipe 532 is fixedly installed on the side of the three-stage air-cooled Roots vacuum pump 36, the other end of the first-stage condenser air outlet tee 53 is fixedly installed with the second-stage condenser air inlet and the first-stage anti-cold port 25, one end of the bellows A11 and the other end of the second-stage air inlet elbow 6 are fixedly installed on the upper side of the second-stage condenser air inlet and the first-stage anti-cold port 25, the other end of the second-stage air inlet elbow 6 is fixedly installed on the upper end surface of the three-stage air-cooled Roots vacuum pump 36, the upper end surface of the bellows A11 is fixedly installed on one end of the first-stage anti-cold port pipe 10, and the other end of the first-stage anti-cold port pipe 10 is fixedly installed on one side of the three-stage air-cooled Roots vacuum pump 36; A second cooling circuit is fixedly installed at the position of the lower end surface of the three-stage air-cooled Roots vacuum pump 36 corresponding to the second-stage air inlet elbow 6; One end of the lower side of the first-stage condenser 21 is fixedly connected with a drainage collection port 16, and the other end of the lower side of the first-stage condenser 21 is fixedly connected with an interstage liquid storage tank 17. The interstage liquid storage tank 17 is externally connected to two interstage tank pressure relief ports. Both ends of the interstage liquid storage tank 17 are respectively provided with manual valves fixedly connected to the drainage collection port 16. The drainage collection port 16 is fixedly connected to the pneumatic diaphragm pump 51. The diaphragm pump 51 is provided with a pneumatic diaphragm pump air source inlet NO.16 and a diaphragm pump total sewage port NO.20. The drainage collection port 16 is fixedly connected to the post-pump sewage storage tank 20 through a manual valve. The post-pump sewage storage tank 20 is also provided with an exhaust port NO.20. A magnetic flap liquid level gauge with a transmitter 43 is fixedly installed on one side of the post-pump sewage storage tank 20, and a third cooling circuit is provided on the upper side of the post-pump sewage storage tank 20.

[0020] Specifically, the second cooling circuit includes a secondary exhaust port short circuit 37 installed at the position of the secondary air inlet elbow 6 at the lower end surface of the three-stage air-cooled Roots vacuum pump 36, a bellows C39 is fixedly installed at the lower end surface of the secondary exhaust port short circuit 37, one end of the secondary condenser air inlet 15 is fixedly installed at the lower end surface of the bellows C39, one end of the secondary condenser air inlet 15 is fixedly installed at the other end of the secondary condenser air inlet 15 is fixedly installed at one end of the secondary condenser 14, a secondary condenser cooling water inlet NO.9 and a secondary condenser cooling water outlet NO.10 are provided on the secondary condenser 14, and the lower side surface of one end of the secondary condenser 14 is manually The valve is fixedly connected to the drainage collection port 16, the other end of the secondary condenser 14 is fixedly connected to the interstage liquid storage tank 17 through a manual valve, the secondary condenser 14 is fixedly installed on the unit welding frame 42, the other end of the secondary condenser 14 is fixedly installed with one end of the secondary condenser exhaust port 9, the other end of the secondary condenser exhaust port 9 is fixedly installed with a third-stage air inlet pipe 7, the other end of the third-stage air inlet pipe 7 is fixedly installed on the upper end surface of the third-stage air-cooled Roots vacuum pump 36, one side of the secondary condenser exhaust port 9 is divided into two paths, and the two paths are respectively fixedly installed on both sides of the third-stage air-cooled Roots vacuum pump 36; A third cooling circuit is fixedly installed at a position on the lower end surface of the three-stage air-cooled Roots vacuum pump 36 corresponding to the three-stage air inlet pipe 7 .

[0021] Specifically, one end of a transition pipe A901 is fixedly installed on one side of the secondary condenser exhaust port 9, one end of a transition pipe E905 is fixedly installed on the other end of the transition pipe A901, one end of a transition pipe D904 is fixedly installed on the other end of the transition pipe E905, one end of a transition pipe C903 is fixedly installed on the other end of the transition pipe D904, and the other end of the transition pipe C903 is fixedly installed on one side surface of the three-stage air-cooled Roots vacuum pump 36; One end of a transition pipe B902 is fixedly installed on the other side of the secondary condenser exhaust port 9, one end of a transition pipe H908 is fixedly installed on the other end of the transition pipe B902, one end of a transition pipe H908 is fixedly installed on the other end of the transition pipe H908, the other end of the transition pipe G907 is fixedly installed on the other end of the transition pipe F906, and the other end of the transition pipe F906 is fixedly installed on the other side of the three-stage air-cooled Roots vacuum pump 36.

[0022] Specifically, the third cooling circuit includes a third-stage exhaust port short circuit 34 fixedly installed on the lower end surface of the third-stage air-cooled Roots vacuum pump 36 corresponding to the position of the third-stage air inlet pipe 7, a bellows D38 is fixedly installed on the lower end surface of the third-stage exhaust port short circuit 34, one end of the third-stage condenser air inlet 24 is fixedly installed on the lower end surface of the bellows D38, one end of the third-stage condenser 23 is fixedly installed on the other end of the third-stage condenser air inlet 24, a third-stage condenser cooling water inlet NO.11 and a third-stage condenser cooling water outlet NO.12 are provided on the third-stage condenser 23, a lower end surface on one side of the third-stage condenser 23 is fixedly connected to the drain collection port 16 through a manual valve, the third-stage condenser 23 is fixedly installed on the upper end surface of the unit welding frame 42, and a third-stage condenser exhaust port A501 is fixedly installed on the other end of the third-stage condenser 23; The exhaust port A501 of the third-stage condenser is divided into two paths, one of which is fixedly installed with the post-pump sewage storage tank 20 and the other is fixedly installed with the exhaust port 50 of the third-stage condenser. The exhaust port 50 of the third-stage condenser is divided into two paths, one of which is fixedly installed with a connecting pipe A502 and the other is fixedly installed with a connecting pipe B503. The connecting pipe A502 and the connecting pipe B503 are respectively fixedly installed on both sides of the third-stage air-cooled Roots vacuum pump 36; The other end of the third-stage condenser exhaust port A501 is fixedly installed with a post-pump sewage storage tank 20, the lower end surface of the third-stage condenser 23 is fixedly installed with one end of a transition pipe B44, the other end of the transition pipe B44 is fixedly installed with one end of a manual flange ball valve B45, and the other end of the manual flange ball valve B45 is fixedly installed with a post-pump sewage storage tank 20.

[0023] Specifically, the unit welding frame 42 includes a pump mounting frame 422 fixedly connected to the three-stage air-cooled Roots vacuum pump 36, a motor mounting frame 421 is fixedly installed on the upper end of the pump mounting frame 422, an explosion-proof variable frequency motor 28 is fixedly installed on the upper end surface of the motor mounting frame 421, a bracket 425 is fixedly installed on the lower end surface of the pump mounting frame 422, a bottom mounting frame 423 is fixedly installed on the lower end surface of the bracket 425, a mounting frame 424 is fixedly installed on the upper end surface of the bottom mounting frame 423, a three-stage condenser 23 is fixedly installed on the upper end surface of the mounting frame 424, and a first-stage condenser 21, a post-pump sewage storage tank 20 and a second-stage condenser 14 are fixedly installed on the upper end surface of the bottom mounting frame 423.

[0024] Specifically, an elbow A4 is fixedly installed on the side of the unit air inlet elbow 5, a manual flange ball valve A3 is fixedly installed on the upper end surface of the elbow A4, and a flange pressure transmitter 2 is fixedly installed on the upper end surface of the manual flange ball valve A3.

[0025] Specifically, the three-stage air-cooled Roots vacuum pump 36 includes a pump body 361, and the upper end surface and the lower end surface of the pump body 361 are respectively provided with a pump body inlet 362, a secondary air inlet 363 and a tertiary air inlet 364, and the two side surfaces of the pump body 361 are respectively provided with a tertiary anti-cooling port 365, a secondary anti-cooling port 366 and a primary anti-cooling port 367.

[0026] Specifically, a solvent cleaning tank 12 is fixedly installed on the side of the manual flange ball valve B45, and a solvent replenishing port NO. 18 and a solvent drain port NO. 19 are provided on the solvent cleaning tank 12. A solvent cleaning pipeline 8 is fixedly installed on the upper end surface of the solvent cleaning tank 12. The solvent cleaning pipeline 8 is divided into three routes, and the three routes correspond to the unit air inlet bend 5, the secondary air inlet bend 6 and the tertiary air inlet pipe 7. The three routes pass through the unit air inlet bend 5, the secondary air inlet bend 6 and the tertiary air inlet pipe 7 and then converge into one route, and after converging into one route, a nitrogen purge pipeline 26 is fixedly connected.

[0027] Specifically, a pre-pump buffer tank is fixedly installed at one end of the inlet quick-opening filter 1 away from the three-stage air-cooled Roots vacuum pump 36, and a pre-pump buffer tank drain port NO.6 is provided at the pre-pump buffer tank. The pre-pump buffer tank is fixedly connected to a pre-pump condenser, and a pre-pump condenser cooling water inlet port NO.3, a pre-pump condenser cooling water outlet port NO.4, and a pre-pump condenser shell drain port NO.5 are provided at the pre-pump condenser.

[0028] Specifically, the tertiary air inlet pipe 7 includes a bend A71, one end of which is fixedly mounted on 364, the other end of which is fixedly mounted with one end of a connecting pipe 72, the other end of which is fixedly mounted with one end of a bend B73, and the other end of which is fixedly mounted on the secondary condenser exhaust port 9.

[0029] In the present embodiment, an energy-saving multi-stage high-vacuum dry Roots vacuum unit includes a unit welding frame 42, a three-stage air-cooled Roots vacuum pump 36 is installed on the upper end surface of the unit welding frame 42, and a first cooling circuit is provided on the three-stage air-cooled Roots vacuum pump 36 for cooling a pump body 361 to improve operating efficiency and extend service life. One end of the three-stage air-cooled Roots vacuum pump 36 is connected to an explosion-proof variable frequency motor 28, and the explosion-proof variable frequency motor 28 is connected to the unit welding frame 42 to drive the Roots vacuum pump to operate and achieve energy-saving operation through variable frequency regulation. The upper end surface of the three-stage air-cooled Roots vacuum pump 36 is connected to one end of the unit air inlet elbow 5 for introducing gas to be pumped. A cooling water outlet assembly A27 is installed on one side of the three-stage air-cooled Roots vacuum pump 36 for discharging cooling water. A Roots pump cooling water pipeline 35 is also installed on one side of the three-stage air-cooled Roots vacuum pump 36 for circulating cooling water to maintain a stable temperature of the pump body.

[0030] The other end of the unit air inlet elbow 5 is connected to the inlet quick-open filter 1, which is used to filter the gas entering the unit to prevent impurities from damaging the pump body 361. A flange pressure transmitter 2 is installed on the side of the unit air inlet elbow 5 to monitor the intake pressure. The lower side of the three-stage air-cooled Roots vacuum pump 36 is connected to one end of the first-stage exhaust port short-circuit 40 at the position corresponding to the inlet quick-open filter 1, which is used to discharge the gas compressed in the first stage. The other end of the first-stage exhaust port short-circuit 40 is connected to the bellows E41, and the other end of the bellows E41 is connected to one end of the first-stage condenser air inlet 22, which is used to introduce the gas into the first-stage condenser 21 for cooling. The other end of the first-stage condenser air inlet 22 is connected to the first-stage condenser 21, which is used to condense the condensable components in the gas. The first-stage condenser 21 is provided with a first-stage condenser cooling water inlet NO.7 and a first-stage condenser cooling water outlet NO.8 for the circulation of cooling water. The primary condenser 21 is fixed on the welding frame 42 of the unit, and the other end of the primary condenser 21 is connected to one end of the primary condenser exhaust port 18 for discharging the condensed gas. The lower side of the primary condenser 21 is connected to the drainage collection port 16 through a manual valve for collecting condensate. The other end of the primary condenser exhaust port 18 is connected to the primary condenser gas outlet tee 53 for diverting gas. One end of the primary condenser gas outlet tee 53 is connected to one end of the primary cooling elbow 531, and the other end of the primary cooling elbow 531 is connected to the primary cooling pipe 532. The primary cooling pipe 532 is installed on the side of the three-stage air-cooled Roots vacuum pump 36 for returning part of the gas to the pump body 361 for secondary compression. The other end of the primary condenser gas outlet tee 53 is connected to the secondary condenser air inlet and the primary anti-cold port 25 for introducing the gas into the secondary condenser 14 or returning it to the pump body 361.

[0031] The air inlet of the secondary condenser and the upper side of the first-stage anti-cold port 25 are connected to one end of the bellows A11 and the other end of the secondary air inlet elbow 6. The other end of the secondary air inlet elbow 6 is installed on the upper end surface of the three-stage air-cooled Roots vacuum pump 36, which is used to introduce the gas into the pump body 361 for the next stage of compression. The upper end surface of the bellows A11 is connected to one end of the first-stage anti-cold port pipe 10. The other end of the first-stage anti-cold port pipe 10 is installed on one side of the three-stage air-cooled Roots vacuum pump 36, which is used to reflux part of the gas to improve the compression efficiency.

[0032] A second cooling circuit is installed at the position of the lower end surface of the three-stage air-cooled Roots vacuum pump 36 corresponding to the position of the secondary air inlet elbow 6, which is used to cool the gas after the secondary compression. One end of the lower side of the primary condenser 21 is connected to the drainage collection port 16 for collecting the condensate. The other end of the lower side of the primary condenser 21 is connected to the interstage liquid storage tank 17 for temporarily storing the condensate. The interstage liquid storage tank 17 is externally connected to two interstage liquid storage tank pressure relief ports NO. 13 for balancing the pressure in the tank. The two ends of the interstage liquid storage tank 17 are respectively connected to the drainage collection port 16 through manual valves for controlling the discharge of the condensate. The drainage collection port 16 A pneumatic diaphragm pump 51 is connected to pump the condensate to a subsequent processing unit. The pneumatic diaphragm pump 51 is provided with a pneumatic diaphragm pump air source inlet NO.16 and a diaphragm pump total sewage outlet NO.20, which are used to drive the diaphragm pump and discharge the waste liquid. The total sewage outlet 16 is connected to the post-pump sewage storage tank 20 through a manual valve to store the final waste liquid. The post-pump sewage storage tank 20 is provided with an exhaust port NO.2 to discharge residual gas. A magnetic flap level gauge with a transmitter 43 is installed on one side of the post-pump sewage storage tank 20 to monitor the liquid level. A third cooling circuit is provided on the upper side of the post-pump sewage storage tank 20 to further cool the gas.

[0033] The second cooling circuit includes a secondary exhaust port short-circuit 37 installed at the lower end surface of the three-stage air-cooled Roots vacuum pump 36 corresponding to the position of the secondary air inlet elbow 6, which is used to discharge the gas after the secondary compression. The lower end surface of the secondary exhaust port short-circuit 37 is connected to the bellows C38, and the lower end surface of the bellows C38 is connected to one end of the secondary condenser air inlet 15, which is used to introduce the gas into the secondary condenser 14. The other end of the secondary condenser air inlet 15 is connected to one end of the secondary condenser 14, which is used to condense the condensable components in the gas. The secondary condenser 14 is provided with a secondary condenser cooling water inlet NO.9 and a secondary condenser cooling water outlet NO.10 for the circulation of cooling water. The lower side surface of one end of the secondary condenser 14 is connected to the secondary condenser 14 through a manual valve. The drainage collection port 16 is used to discharge the condensate. The other end of the secondary condenser 14 is connected to the interstage liquid storage tank 17 through a manual valve for temporarily storing the condensate. The secondary condenser 14 is fixed on the unit welding frame 42. The other end of the secondary condenser 14 is connected to one end of the secondary condenser exhaust port 9 for discharging the condensed gas. The other end of the secondary condenser exhaust port 9 is connected to the third-stage air inlet pipe 7. The other end of the third-stage air inlet pipe 7 is installed on the upper end surface of the three-stage air-cooled Roots vacuum pump 36 for introducing the gas into the pump body 361 for the third-stage compression. One side of the secondary condenser exhaust port 9 is divided into two paths, which are respectively installed on both sides of the three-stage air-cooled Roots vacuum pump 36 for reflowing part of the gas to improve the compression efficiency.

[0034] A third cooling circuit is installed at a position corresponding to the third-stage air inlet pipe 7 on the lower end surface of the three-stage air-cooled Roots vacuum pump 36, which is used to cool the gas after the third-stage compression. The third cooling circuit includes a third-stage exhaust port short-circuit 34 installed at a position corresponding to the third-stage air inlet pipe 7 on the lower end surface of the three-stage air-cooled Roots vacuum pump 36, which is used to discharge the gas after the third-stage compression. The lower end surface of the third-stage exhaust port short-circuit 34 is connected to a bellows D39, and the lower end surface of the bellows D39 is connected to one end of the third-stage condenser air inlet 24, which is used to introduce the gas into the third-stage condenser 23. The other end of the third-stage condenser air inlet 24 is connected to one end of the third-stage condenser 23, which is used for finally condensing the condensable components in the gas. The third-stage condenser 23 is provided with a third-stage condenser cooling water inlet NO.11 and a third-stage condenser cooling water outlet NO.12 for the circulation of cooling water. The lower end surface of one side of the third-stage condenser 23 is connected to the drainage collection port 16 through a manual valve for discharging the condensate. The third-stage condenser 23 is fixed on the upper end surface of the unit welding frame 42, and the other end of the third-stage condenser 23 is connected to the third-stage condenser exhaust port A501.

[0035] The exhaust port A501 of the third-stage condenser is divided into two paths, one of which is connected to the sewage storage tank 20 after the pump, and the other is connected to the exhaust port 50 of the third-stage condenser, which is used to discharge the finally treated gas or store waste liquid. The exhaust port 50 of the third-stage condenser is divided into two paths, one of which is connected to the connecting pipe A502, and the other is connected to the connecting pipe B503. The connecting pipe A502 and the connecting pipe B503 are respectively installed on both sides of the three-stage air-cooled Roots vacuum pump 36, which are used to reflux part of the gas to improve the system efficiency.

[0036] The other end of the third-stage condenser exhaust port A501 is connected to the sewage storage tank 20 after the pump, which is used to store the final waste liquid. The lower end face of the third-stage condenser 23 is connected to one end of the transition pipe B44, and the other end of the transition pipe B44 is connected to one end of the manual flange ball valve B45. The other end of the manual flange ball valve B45 is connected to the sewage storage tank 20 after the pump, which is used to control the discharge of the waste liquid.

[0037] The welding frame 42 of the unit includes a pump mounting frame 422 connected to the three-stage air-cooled Roots vacuum pump 36, which is used to support the pump body 361. The motor mounting frame 421 is installed on the upper end of the pump mounting frame 422 to fix the explosion-proof variable frequency motor 28. The explosion-proof variable frequency motor 28 is installed on the upper end surface of the motor mounting frame 421. The bracket 425 is installed on the lower end surface of the pump mounting frame 422 to support the overall structure. The lower end surface of the bracket 425 is connected to the bottom mounting frame 423 to fix the condenser and the liquid storage tank. The mounting frame 424 is installed on the upper end surface of the bottom mounting frame 423 to support the three-stage condenser 23. The three-stage condenser 23 is installed on the upper end surface of the mounting frame 424. The first-stage condenser 21, the post-pump sewage storage tank 20 and the second-stage condenser 14 are installed on the upper end surface of the bottom mounting frame 423 to ensure the stability of the overall structure.

[0038] The side of the unit air inlet elbow 5 is connected to an elbow A4 for connecting a pressure monitoring device. The upper end of the elbow A4 is connected to a manual flange ball valve A3 for controlling gas flow. The upper end of the manual flange ball valve A3 is installed with a flange pressure transmitter 2 for real-time monitoring of system pressure.

[0039] The three-stage air-cooled Roots vacuum pump 36 includes a pump body 361. The upper end face and the lower end face of the pump body 361 are respectively provided with a pump body inlet 362, a secondary air inlet 363 and a tertiary air inlet 364 for multi-stage gas compression. The two side faces of the pump body 361 are respectively provided with a tertiary anti-cooling port 365, a secondary anti-cooling port 366 and a primary anti-cooling port 367 for gas reflux to improve compression efficiency.

[0040] A solvent cleaning tank 12 is installed on the side of the manual flange ball valve B45 for storing cleaning solvent. The solvent cleaning tank 12 is provided with a solvent replenishing port NO. 18 and a solvent drain port NO. 19 for adding and discharging solvent. A solvent cleaning pipeline 8 is installed on the upper end face of the solvent cleaning tank 12 for cleaning the inside of the system. The solvent cleaning pipeline 8 is divided into three routes, which correspond to the unit air inlet elbow 5, the secondary air inlet elbow 6 and the tertiary air inlet pipe 7 for comprehensive cleaning of the system. The three routes pass through the unit air inlet elbow 5, the secondary air inlet elbow 6 and the tertiary air inlet pipe 7 and then converge into one route, which is then connected to the nitrogen purge pipeline 26 for purging residual solvent.

[0041] The end of the inlet quick-open filter 1 away from the three-stage air-cooled Roots vacuum pump 36 is connected to the pre-pump buffer tank for stabilizing the intake pressure. The pre-pump buffer tank is provided with a pre-pump buffer tank drain port NO.6 for discharging impurities. The pre-pump buffer tank is connected to the pre-pump condenser for pre-cooling the gas. The pre-pump condenser is provided with a pre-pump condenser cooling water inlet NO.3, a pre-pump condenser cooling water outlet NO.4, and a pre-pump condenser shell drain port NO.5 for the circulation and discharge of cooling water.

[0042] The tertiary air inlet pipe 7 includes a bend A71, one end of which is connected to the secondary condenser exhaust port 9 for introducing gas, the other end of which is connected to one end of a connecting pipe 72 for connecting to the pump body 361, the other end of the connecting pipe 72 is connected to one end of a bend B73, and the other end of the bend B73 is connected to the secondary condenser exhaust port 9 to ensure smooth gas flow.

[0043] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An energy-saving multi-stage high-vacuum dry-type Roots vacuum unit, comprising a unit welding frame (42), a three-stage air-cooled Roots vacuum pump (36) being fixedly mounted on the upper end surface of the unit welding frame (42), a first cooling circuit being fixedly mounted on the three-stage air-cooled Roots vacuum pump (36), and characterized in that: One end of the three-stage air-cooled Roots vacuum pump (36) is connected to an explosion-proof variable frequency motor (28), and the explosion-proof variable frequency motor (28) is fixedly connected to the unit welding frame (42). One end of the unit air inlet elbow (5) is fixedly mounted on the upper end surface of the three-stage air-cooled Roots vacuum pump (36). A cooling water outlet assembly A (27) is fixedly mounted on one side of the three-stage air-cooled Roots vacuum pump (36). A Roots pump cooling water pipeline (35) is also fixedly mounted on one side of the three-stage air-cooled Roots vacuum pump (36). An inlet quick-opening filter (1) is fixedly mounted on the other end of the unit air inlet elbow (5). A flange pressure transmitter (2) is provided, one end of a primary exhaust port short circuit (40) is fixedly installed at a position corresponding to the inlet quick-open filter (1) on the lower side of the three-stage air-cooled Roots vacuum pump (36), the other end of the primary exhaust port short circuit (40) is fixedly installed with a bellows E (41), the other end of the bellows E (41) is fixedly connected to one end of a primary condenser air inlet (22), the other end of the primary condenser air inlet (22) is fixedly installed with a primary condenser (21), the primary condenser (21) is provided with a primary condenser cooling water inlet (NO.7) and a primary condenser cooling water outlet (NO.8), the primary condenser ( 21) is fixedly mounted on the welding frame (42) of the unit, one end of the exhaust port (18) of the first-stage condenser is fixedly mounted on the other end of the first-stage condenser (21), a manual valve is provided on the lower side of the first-stage condenser (21) and is fixedly connected to the drainage collection port (16), the other end of the exhaust port (18) of the first-stage condenser is fixedly mounted on the first-stage condenser outlet tee (53), one end of the first-stage condenser outlet tee (53) is fixedly mounted on one end of the first-stage condenser outlet tee (53), the other end of the first-stage cooling elbow (531) is fixedly mounted on the first-stage cooling elbow (531), the first-stage cooling pipe (532) is fixedly mounted on the third stage On the side of the air-cooled Roots vacuum pump (36), the other end of the first-stage condenser air outlet tee (53) is fixedly mounted with a second-stage condenser air inlet and a first-stage anti-cold port (25), one end of a bellows A (11) and the other end of a second-stage air inlet elbow (6) are fixedly mounted on the upper side of the second-stage condenser air inlet and the first-stage anti-cold port (25), the other end of the second-stage air inlet elbow (6) is fixedly mounted on the upper end surface of the third-stage air-cooled Roots vacuum pump (36), the upper end surface of the bellows A (11) is fixedly mounted on one end of a first-stage anti-cold port pipe (10), and the other end of the first-stage anti-cold port pipe (10) is fixedly mounted on a side of the third-stage air-cooled Roots vacuum pump (36); A second cooling circuit is fixedly installed on the lower end surface of the three-stage air-cooled Roots vacuum pump (36) at a position corresponding to the secondary air inlet elbow (6); One end of the lower side of the primary condenser (21) is fixedly connected to a drainage collection port (16), and the other end of the lower side of the primary condenser (21) is fixedly connected to an interstage liquid storage tank (17). The interstage liquid storage tank (17) is externally connected to two interstage tank pressure relief ports. Both ends of the interstage liquid storage tank (17) are respectively provided with manual valves fixedly connected to the drainage collection port (16). The drainage collection port (16) is fixedly connected to a pneumatic diaphragm pump (51). The diaphragm pump (51) is A pneumatic diaphragm pump air source inlet (NO.16) and a diaphragm pump total sewage outlet (NO.20) are provided at the pump 51, the total sewage outlet (16) is fixedly connected to a post-pump sewage storage tank (20) via a manual valve, the post-pump sewage storage tank (20) is also provided with an exhaust port (NO.20), a magnetic flap level gauge with a transmitter (43) is fixedly installed on one side of the post-pump sewage storage tank (20), and a third cooling circuit is provided on the upper side of the post-pump sewage storage tank (20).

2. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: The second cooling circuit comprises a secondary exhaust port short circuit (37) installed at a position corresponding to the secondary air inlet elbow (6) on the lower end surface of the three-stage air-cooled Roots vacuum pump (36); a bellows C (39) is fixedly installed on the lower end surface of the secondary exhaust port short circuit (37); one end of the secondary condenser air inlet (15) is fixedly installed on the lower end surface of the bellows C (39); one end of the secondary condenser air inlet (15) is fixedly installed on the other end of the secondary condenser air inlet (15); a secondary condenser cooling water inlet (NO.9) and a secondary condenser cooling water outlet (NO.10) are provided on the secondary condenser (14); and the lower side surface of one end of the secondary condenser (14) is fixed by a manual valve. connected to the drainage collection port (16); the other end of the secondary condenser (14) is fixedly connected to the interstage liquid storage tank (17) via a manual valve; the secondary condenser (14) is fixedly mounted on the unit welding frame (42); the other end of the secondary condenser (14) is fixedly mounted with one end of the secondary condenser exhaust port (9); the other end of the secondary condenser exhaust port (9) is fixedly mounted with a third-stage air inlet pipe (7); the other end of the third-stage air inlet pipe (7) is fixedly mounted on the upper end surface of a third-stage air-cooled Roots vacuum pump (36); one side surface of the secondary condenser exhaust port (9) is divided into two paths, and the two paths are respectively fixedly mounted on two sides of the third-stage air-cooled Roots vacuum pump (36); A third cooling circuit is fixedly installed at a position on the lower end surface of the three-stage air-cooled Roots vacuum pump (36) corresponding to the three-stage air inlet pipe (7).

3. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 2, characterized in that: One end of a transition pipe A (901) is fixedly mounted on one side of the secondary condenser exhaust port (9), one end of a transition pipe E (905) is fixedly mounted on the other end of the transition pipe A (901), one end of a transition pipe D (904) is fixedly mounted on the other end of the transition pipe E (905), one end of a transition pipe C (903) is fixedly mounted on the other end of the transition pipe D (904), and the other end of the transition pipe C (903) is fixedly mounted on a side surface of the three-stage air-cooled Roots vacuum pump (36); One end of a transition pipe B (902) is fixedly installed on the other side of the secondary condenser exhaust port (9), one end of a transition pipe H (908) is fixedly installed on the other end of the transition pipe B (902), one end of a transition pipe G (907) is fixedly installed on the other end of the transition pipe H (908), the other end of the transition pipe G (907) is fixedly installed on the other end of the transition pipe F (906), and the other end of the transition pipe F (906) is fixedly installed on the other side of the three-stage air-cooled Roots vacuum pump (36).

4. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 2, characterized in that: The third cooling circuit comprises a third-stage exhaust port short circuit (34) fixedly mounted on the lower end surface of the third-stage air-cooled Roots vacuum pump (36) at a position corresponding to the third-stage air inlet pipe (7), a bellows D (38) fixedly mounted on the lower end surface of the third-stage exhaust port short circuit (34), one end of the third-stage condenser air inlet (24) fixedly mounted on the lower end surface of the bellows D (38), and the other end of the third-stage condenser air inlet (24) fixedly mounted on the third-stage condenser (23) At one end, the third-stage condenser (23) is provided with a third-stage condenser cooling water inlet (NO.11) and a third-stage condenser cooling water outlet (NO.12); a lower end surface of one side of the third-stage condenser (23) is fixedly connected to the drainage collection port (16) via a manual valve; the third-stage condenser (23) is fixedly mounted on the upper end surface of the unit welding frame (42); and a third-stage condenser exhaust port A (501) is fixedly mounted at the other end of the third-stage condenser (23); The exhaust port A (501) of the three-stage condenser is divided into two paths, one of which is fixedly installed with a post-pump sewage storage tank (20) and the other is fixedly installed with the exhaust port (50) of the three-stage condenser. The exhaust port (50) of the three-stage condenser is divided into two paths, one of which is fixedly installed with a connecting pipe A (502) and the other is fixedly installed with a connecting pipe B (503). The connecting pipe A (502) and the connecting pipe B (503) are respectively fixedly installed on both sides of the three-stage air-cooled Roots vacuum pump (36); The other end of the exhaust port A (501) of the third-stage condenser is fixedly mounted with a post-pump sewage storage tank (20); the lower end surface of the third-stage condenser (23) is fixedly mounted with one end of a transition pipe B (44); the other end of the transition pipe B (44) is fixedly mounted with one end of a manual flange ball valve B (45); and the other end of the manual flange ball valve B (45) is fixedly mounted with a post-pump sewage storage tank (20).

5. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: The unit welding frame (42) comprises a pump mounting frame (422) fixedly connected to a three-stage air-cooled Roots vacuum pump (36); a motor mounting frame (421) is fixedly mounted on the upper end of the pump mounting frame (422); an explosion-proof variable frequency motor (28) is fixedly mounted on the upper end surface of the motor mounting frame (421); a bracket (425) is fixedly mounted on the lower end surface of the pump mounting frame (422); a bottom mounting frame (423) is fixedly mounted on the lower end surface of the bracket (425); a mounting frame (424) is fixedly mounted on the upper end surface of the bottom mounting frame (423); a three-stage condenser (23) is fixedly mounted on the upper end surface of the mounting frame (424); and a first-stage condenser (21), a post-pump sewage storage tank (20), and a second-stage condenser (14) are fixedly mounted on the upper end surface of the bottom mounting frame (423).

6. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: An elbow A (4) is fixedly mounted on the side of the air inlet elbow (5) of the unit, a manual flange ball valve A (3) is fixedly mounted on the upper end surface of the elbow A (4), and a flange pressure transmitter (2) is fixedly mounted on the upper end surface of the manual flange ball valve A (3).

7. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: The three-stage air-cooled Roots vacuum pump (36) comprises a pump body (361), the upper end surface and the lower end surface of the pump body (361) are respectively provided with a pump body inlet (362), a secondary air inlet (363) and a tertiary air inlet (364), and the two side surfaces of the pump body (361) are respectively provided with a tertiary anti-cooling port (365), a secondary anti-cooling port (366) and a primary anti-cooling port (367).

8. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: A solvent cleaning tank (12) is fixedly mounted on the side of the manual flange ball valve B (45). The solvent cleaning tank (12) is provided with a solvent replenishing port (NO.18) and a solvent draining port (NO.19). A solvent cleaning pipeline (8) is fixedly mounted on the upper end surface of the solvent cleaning tank (12). The solvent cleaning pipeline (8) is divided into three routes. The three routes correspond to the unit air inlet elbow (5), the secondary air inlet elbow (6) and the tertiary air inlet pipe (7). The three routes pass through the unit air inlet elbow (5), the secondary air inlet elbow (6) and the tertiary air inlet pipe (7) and then converge into one route. After converging into one route, a nitrogen purge pipeline (26) is fixedly connected.

9. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 1, characterized in that: A pre-pump buffer tank is fixedly mounted on one end of the inlet quick-open filter (1) away from the three-stage air-cooled Roots vacuum pump (36), and a pre-pump buffer tank drain port (NO.6) is provided at the pre-pump buffer tank. The pre-pump buffer tank is fixedly connected to a pre-pump condenser, and a pre-pump condenser cooling water inlet (NO.3), a pre-pump condenser cooling water outlet (NO.4), and a pre-pump condenser shell drain port (NO.5) are provided at the pre-pump condenser.

10. The energy-saving multi-stage high vacuum dry Roots vacuum unit according to claim 8, characterized in that: The third-stage air inlet pipe (7) comprises an elbow A (71), one end of the elbow A (71) is fixedly mounted on (364), the other end of the elbow A (71) is fixedly mounted with one end of a connecting pipe (72), the other end of the connecting pipe (72) is fixedly mounted with one end of an elbow B (73), and the other end of the elbow B (73) is fixedly mounted on the exhaust port (9) of the secondary condenser.

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