Dehydration control method of novel energy-saving magnetic suspension turbine vacuum pump

Abstract

The invention provides a dehydration control method of a novel energy-saving magnetic suspension turbine vacuum pump, which comprises the following steps: responding to a starting instruction, controlling the magnetic suspension turbine vacuum pump to start and operate, and monitoring a motor vibration value and a motor current of the magnetic suspension turbine vacuum pump in real time; judging whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode or not according to the motor amplitude and the motor current; controlling the magnetic suspension turbine vacuum pump to execute the surge protection mode under the condition that the judgment result is that the magnetic suspension turbine vacuum pump needs to start the surge protection mode; wherein the surge protection mode comprises the step of controlling the opening degree of an anti-surge valve according to the air inlet vacuum degree, the air inlet temperature, the outlet flow and the outlet pressure of the magnetic suspension turbine vacuum pump. The magnetic suspension turbine vacuum pump can be protected, and equipment overload, shutdown or damage caused by surge of the magnetic suspension turbine vacuum pump can be avoided.

Description

Technical Field

[0001] The invention relates to the field of turbine vacuum pumps, and in particular to a dehydration control method for a novel energy-saving magnetically suspended turbine vacuum pump. Background Art

[0002] The magnetic levitation turbine vacuum pump is a high-efficiency, energy-saving and environmentally friendly vacuum pump that integrates magnetic levitation bearing technology, high-speed motor technology, frequency conversion control technology and three-dimensional flow impeller technology. It is widely used in papermaking, chemical industry, metallurgy, food, pharmaceuticals, electric power, aerospace and other industries.

[0003] The magnetic levitation turbine vacuum pump detects the displacement signal of the rotating shaft through the built-in radial sensor and axial sensor, and then sends the signal to the magnetic levitation bearing controller for conditioning, calculation and amplification to obtain the control current. The control current is then input into the radial magnetic bearing and the axial magnetic bearing, and the magnetic field is generated by the current, and the magnetic field generates suction, thereby realizing the suspension of the rotor. This technology makes the rotor have no mechanical contact and friction during operation, ensuring the high-speed and stable rotation of the rotor.

[0004] Magnetic levitation turbine vacuum pumps are widely used in many industries. For example, in the papermaking industry, magnetic levitation turbine vacuum pumps are used for vacuum processes of black liquor evaporation, rough pulp washing machine, lime mud and filter, sediment filter, vacuum dehydrator, raw material and white water degassing system, pulp mixing box compressor and other equipment. Power industry: magnetic levitation turbine vacuum pumps are used for condenser vacuum pumping, vacuum water absorption, flue gas desulfurization, fly ash transportation, turbine sealing pipe exhaust and other processes. Chemical industry: magnetic levitation turbine vacuum pumps are used for gas recovery, gas recovery, gas boosting, enhanced oil recovery and other processes. Pharmaceutical industry: magnetic levitation turbine vacuum pumps are used for vacuum processes in drug preparation, bioreactors and biomaterials. Environmental protection industry: magnetic levitation turbine vacuum pumps are used in wastewater treatment, biogas compression, vacuum water addition and other processes.

[0005] In short, the magnetic levitation turbine vacuum pump plays an important role in many industries with its high precision, high efficiency, low noise, maintenance-free and intelligent features. With the continuous advancement of technology and the continuous expansion of application fields, the market prospects of magnetic levitation turbine vacuum pumps will be broader.

[0006] Surge is an inherent property of high-speed turbine vacuum pumps. Once there is fluctuation in the vacuum system, it may cause surge beyond the safe operating range of the high-speed turbine vacuum pump. Severe surge can cause severe vibration of the equipment, scratches on the centrifugal impeller and other serious consequences.

[0007] The disadvantage of the prior art is that it is difficult to accurately monitor the surge problem during the operation of the magnetically suspended turbine vacuum pump. Summary of the invention

[0008] The present invention aims to solve at least one of the above technical problems.

[0009] To achieve the first object of the present invention, the present invention provides a novel dehydration control method for an energy-saving magnetic levitation turbine vacuum pump, wherein an air inlet of the magnetic levitation turbine vacuum pump is connected to an anti-surge valve, and the dehydration control method comprises:

[0010] In response to a start-up instruction, the magnetic levitation turbine vacuum pump is controlled to start up and run, and the motor vibration value and motor current of the magnetic levitation turbine vacuum pump are monitored in real time;

[0011] According to the motor amplitude and motor current, it is determined whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode;

[0012] When the result of the judgment is that the magnetic suspension turbine vacuum pump needs to start the surge protection mode, the magnetic suspension turbine vacuum pump is controlled to execute the surge protection mode;

[0013] Among them, the surge protection mode includes: controlling the opening of the anti-surge valve according to the inlet vacuum, inlet temperature, outlet flow, and outlet pressure of the magnetic levitation turbine vacuum pump.

[0014] In any of the above technical features, judging whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the motor amplitude and the motor current includes:

[0015] Acquire a first motor amplitude and a first motor current of the magnetic levitation turbine vacuum pump at a first time point;

[0016] After the first target time interval, obtaining a second motor amplitude and a second motor current of the magnetically suspended turbine vacuum pump at a second time point;

[0017] Whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode is determined according to the vibration difference between the second motor amplitude and the first motor amplitude and the current change rate of the second motor current relative to the first motor current.

[0018] In any of the above technical features, judging whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the vibration difference between the second motor amplitude and the first motor amplitude, and the current change rate of the second motor current relative to the first motor current, specifically includes:

[0019] Determining a vibration difference reference value corresponding to the second motor current according to the second motor current;

[0020] The quotient of the vibration difference value and the vibration difference reference value is used as the vibration coefficient;

[0021] The surge coefficient is obtained according to the vibration coefficient and the current change rate;

[0022] The surge coefficient is compared with the surge coefficient threshold, and based on the comparison result, it is determined whether the magnetic levitation turbine vacuum pump needs to execute the surge protection mode.

[0023] In any of the above technical features, judging whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the comparison result specifically includes:

[0024] When the comparison result is that the surge coefficient is greater than or equal to the surge coefficient threshold, it is determined that the magnetic suspension turbine vacuum pump needs to execute the surge protection mode.

[0025] In any of the above technical features, judging whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the comparison result specifically includes:

[0026] When the comparison result is that the surge coefficient is less than the surge coefficient threshold, it is determined that the magnetic levitation turbine vacuum pump does not need to execute the surge protection mode.

[0027] In any of the above technical features, the surge coefficient is obtained by the following formula:

[0028] S=|k×R V |+|R I |;

[0029] Among them, S is the surge coefficient, k is a constant, R V is the vibration coefficient, R I is the rate of change of current.

[0030] In any of the above technical features, the anti-surge valve opening is controlled according to the inlet vacuum, inlet temperature, outlet flow rate, and outlet pressure of the magnetic levitation turbine vacuum pump, specifically including:

[0031] Obtaining the initial air inlet vacuum degree and initial air inlet temperature of the magnetic levitation turbine vacuum pump at a third time point;

[0032] After the second target time interval, the final air inlet vacuum and the final air inlet temperature of the magnetic levitation turbine vacuum pump at a fourth time point are obtained;

[0033] Determining the rate of change of the vacuum degree at the air intake port according to the difference between the vacuum degree at the air intake port at the final stage and the vacuum degree at the air intake port at the initial stage, and the length of the second target time interval;

[0034] determining the rate of change of the air inlet temperature according to the difference between the final air inlet temperature and the initial air inlet temperature and the length of the second target time interval;

[0035] The opening of the anti-surge valve is controlled according to the change rate of the inlet vacuum, the change rate of the inlet temperature, the inlet temperature and the outlet flow.

[0036] In any of the above technical features, the anti-surge valve opening is controlled according to the inlet vacuum change rate, the inlet temperature change rate, the inlet temperature and the outlet flow rate, specifically including:

[0037] According to the outlet flow rate of the magnetic levitation turbine vacuum pump at a fourth time point, determining a threshold value of a change rate of an air inlet vacuum degree corresponding to the outlet flow rate;

[0038] Determining, according to the outlet pressure of the magnetically suspended turbine vacuum pump at a fourth time point, a threshold value of the rate of change of the air inlet temperature corresponding to the outlet pressure;

[0039] Compare the air inlet vacuum degree change rate with the air inlet vacuum degree change rate threshold to obtain a first comparison result;

[0040] The air inlet temperature change rate is compared with the air inlet temperature change rate threshold value to obtain a second comparison result;

[0041] The anti-surge valve opening is controlled according to the first comparison result and the second comparison result.

[0042] In any of the above technical features, controlling the opening of the anti-surge valve according to the first comparison result and the second comparison result specifically includes:

[0043] When the first comparison result is that the absolute value of the intake vacuum change rate is greater than or equal to the intake vacuum change rate threshold, and / or the second comparison result is that the absolute value of the intake temperature change rate is greater than the intake temperature change rate threshold, the anti-surge valve is controlled to increase its opening.

[0044] In any of the above technical features, controlling the opening of the anti-surge valve according to the first comparison result and the second comparison result specifically includes:

[0045] When the first comparison result is that the absolute value of the intake vacuum change rate is less than the intake vacuum change rate threshold, and the second comparison result is that the absolute value of the intake temperature change rate is less than the intake temperature change rate threshold, the opening of the anti-surge valve is controlled to remain unchanged.

[0046] After adopting the technical solution of the present invention, the technical effects that can be achieved are as follows:

[0047] The magnetic levitation turbine vacuum pump of the present invention responds to the start-up instruction, starts running, and monitors the motor vibration value and motor current of the magnetic levitation turbine vacuum pump in real time after starting running. Therefore, it can be judged whether the magnetic levitation turbine vacuum pump needs to execute the surge protection mode according to the motor amplitude and the motor current. In the case where the judgment result is that the magnetic levitation turbine vacuum pump needs to turn on the surge protection mode, the magnetic levitation turbine vacuum pump can be controlled to execute the surge protection mode. Among them, the surge protection mode of the present invention includes: controlling the opening of the anti-surge valve according to the inlet vacuum degree, inlet temperature, outlet flow rate, and outlet pressure of the magnetic levitation turbine vacuum pump. Through the present invention, the surge problem can be accurately monitored during the operation of the magnetic levitation turbine vacuum pump, thereby protecting the magnetic levitation turbine vacuum pump in real time to avoid its overload and damage, and improve the service life of the magnetic levitation turbine vacuum pump. DETAILED DESCRIPTION

[0048] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0049] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0050] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below.

[0051] The present invention provides a novel dehydration control method for an energy-saving magnetic levitation turbine vacuum pump, wherein the air inlet of the magnetic levitation turbine vacuum pump is connected to an anti-surge valve. In the dehydration process, when the flow rate of the turbine vacuum pump is too low (such as a sudden drop in the inlet pressure or a sudden increase in the system resistance), the gas separates in the impeller or diffuser, resulting in periodic and violent fluctuations in the airflow, causing severe vibration and noise. When approaching the critical point of surge, the anti-surge valve is controlled to open automatically, and external gas (such as atmosphere or bypass reflux) can be introduced to increase the flow rate in the pump and avoid surge.

[0052] In order to achieve accurate control of the anti-surge valve in the dehydration process, the dehydration control method of the present invention includes:

[0053] S100, in response to the start-up instruction, controlling the magnetic levitation turbine vacuum pump to start up and running, and monitoring the motor vibration value and motor current of the magnetic levitation turbine vacuum pump in real time;

[0054] S200, judging whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode according to the motor amplitude and the motor current;

[0055] S300: When it is determined that the magnetic levitation turbine vacuum pump needs to start the surge protection mode, control the magnetic levitation turbine vacuum pump to execute the surge protection mode.

[0056] The motor vibration value can be measured by the acceleration sensor method, which uses an acceleration sensor to convert the motor vibration signal into an electrical signal, and evaluates the motor vibration by measuring the acceleration, thereby measuring the vibration of the motor in different directions and obtaining the time domain and frequency domain information of the vibration. The motor vibration value can also be measured by the speed sensor method, which uses a speed sensor to measure the motor speed and evaluates the motor vibration according to the change in speed. The motor vibration value can also be measured by the displacement sensor method, which uses a displacement sensor to measure the axial or radial displacement of the motor and evaluates the motor vibration according to the change in displacement.

[0057] The motor current can be measured using a current sensor, which is a device that converts current into a voltage signal output. By measuring the voltage signal output by the current sensor, the value of the motor current can be indirectly obtained. Specifically, the current sensor can be connected to the motor current loop, and the voltage signal output by the current sensor can be measured using a voltmeter or oscilloscope. According to the conversion relationship of the current sensor, the voltage signal can be converted into a current value.

[0058] When a magnetic levitation turbine vacuum pump surges, it is usually accompanied by the following phenomena: the amplitude increases abnormally, and the surge causes the airflow to fluctuate violently periodically, resulting in increased rotor vibration. The vibration sensor of the magnetic levitation bearing will detect a significant increase in the amplitude; the current fluctuates or surges, and the surge causes a sudden change in the pump load. The motor requires additional power to maintain the speed, and the current may fluctuate periodically or continue to rise. Therefore, monitoring the abnormal motor vibration value and motor current of the magnetic levitation turbine vacuum pump can identify the surge problem in a timely manner and control the magnetic levitation turbine vacuum pump to execute the surge protection mode accordingly. Among them, the surge protection mode includes: controlling the opening of the anti-surge valve according to the inlet vacuum, inlet temperature, outlet flow, and outlet pressure of the magnetic levitation turbine vacuum pump.

[0059] S200 determines whether the magnetic suspension turbine vacuum pump needs to execute surge protection mode based on the motor amplitude and motor current, including:

[0060] S210, obtaining a first motor amplitude and a first motor current of the magnetic levitation turbine vacuum pump at a first time point;

[0061] S220, after the first target time interval, obtaining a second motor amplitude and a second motor current of the magnetic levitation turbine vacuum pump at a second time point;

[0062] S230. Determine whether the magnetic levitation turbine vacuum pump needs to execute a surge protection mode according to the vibration difference between the second motor amplitude and the first motor amplitude, and the current change rate of the second motor current relative to the first motor current.

[0063] It can be understood that in the present invention, during the dehydration process of the magnetic levitation turbine vacuum pump, the motor amplitude and motor current are cyclically monitored in real time. The first target time interval can be selected and adjusted by technical personnel in this field according to actual needs and experience. Exemplarily, the first target time interval is 10s, 20s or 30s.

[0064] It can be understood that the above-mentioned dynamic difference value is the difference between the second motor amplitude of the magnetic levitation turbine vacuum pump at the second time point and the first motor amplitude of the magnetic levitation turbine vacuum pump at the first time point.

[0065] The above current change rate is the difference between the second motor current of the magnetic levitation turbine vacuum pump at the second time point and the first motor current of the magnetic levitation turbine vacuum pump at the first time point, divided by the first motor current of the magnetic levitation turbine vacuum pump at the first time point.

[0066] Among them, S230 determines whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the vibration difference between the second motor amplitude and the first motor amplitude, and the current change rate of the second motor current relative to the first motor current, specifically including:

[0067] S231, determining a vibration difference reference value corresponding to the second motor current according to the second motor current;

[0068] S232, using the quotient of the vibration difference value divided by the vibration difference reference value as the vibration coefficient;

[0069] S233, obtaining a surge coefficient according to the vibration coefficient and the current change rate;

[0070] S234: Compare the surge coefficient with the surge coefficient threshold, and determine whether the magnetic levitation turbine vacuum pump needs to execute a surge protection mode based on the comparison result.

[0071] In other words, after obtaining the vibration difference, the present invention divides it with the vibration difference reference value, and determines the vibration coefficient according to the ratio between the vibration difference and the vibration difference reference value. It should be noted that in the present invention, the vibration difference reference value is not a fixed value, but is determined in real time according to the second motor current. Specifically, under different motor currents, the magnetic levitation turbine vacuum pump stores different corresponding vibration difference reference values. According to the magnitude of the second motor current, the vibration difference reference value corresponding to the second motor current can be determined by looking up a table. Among them, the larger the motor current detected in real time, the larger the vibration difference reference value, so as to avoid misjudgment of surge and ensure the working efficiency of the magnetic levitation turbine vacuum pump.

[0072] It should also be noted that the present invention uses the vibration coefficient and the current change rate to make a comprehensive judgment on the surge coefficient. Among them, the vibration coefficient characterizes the vibration condition of the motor, and relatively eliminates the judgment error caused by non-abnormal vibration when the magnetic levitation turbine vacuum pump is working with a higher motor current (the motor power of the magnetic levitation turbine vacuum pump is higher). The current change rate relatively objectively reflects the abnormal operation of the motor. The combination of the above two factors can make a more accurate assessment of the surge condition.

[0073] Specifically, the surge coefficient is obtained by the following formula:

[0074] S=|k×R V |+|R I |;

[0075] Among them, S is the surge coefficient, k is a constant, R V is the vibration coefficient, R I is the rate of change of current.

[0076] Preferably, the value of k is 2 to 10. The surge coefficient S is determined according to the absolute value of the vibration coefficient reflecting the vibration condition and the current change rate reflecting the current change.

[0077] After the surge coefficient is obtained, the surge coefficient can be compared with the surge coefficient threshold. S234 determines whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the comparison result, which specifically includes:

[0078] When the comparison result shows that the surge coefficient is greater than or equal to the surge coefficient threshold, it is determined that the magnetic suspension turbine vacuum pump needs to execute the surge protection mode;

[0079] When the comparison result is that the surge coefficient is less than the surge coefficient threshold, it is determined that the magnetic levitation turbine vacuum pump does not need to execute the surge protection mode.

[0080] When it is determined that the magnetic levitation turbine vacuum pump needs to turn on the surge protection mode, S300 controls the magnetic levitation turbine vacuum pump to execute the surge protection mode, specifically including: controlling the opening of the anti-surge valve according to the inlet vacuum, inlet temperature, outlet flow, and outlet pressure of the magnetic levitation turbine vacuum pump.

[0081] Among them, the air inlet vacuum and outlet pressure are detected by a pressure detection device, the air inlet temperature is detected by a temperature sensor, and the outlet flow is detected by a flow meter.

[0082] S300 controls the opening of the anti-surge valve according to the inlet vacuum, inlet temperature, outlet flow, and outlet pressure of the magnetic levitation turbine vacuum pump, including:

[0083] S310, obtaining the initial air inlet vacuum degree and initial air inlet temperature of the magnetic levitation turbine vacuum pump at a third time point;

[0084] S320, after the second target time interval, obtaining the final air inlet vacuum and final air inlet temperature of the magnetic levitation turbine vacuum pump at a fourth time point;

[0085] S330, determining the rate of change of the vacuum degree of the air intake port according to the difference between the vacuum degree of the air intake port at the final stage and the vacuum degree of the air intake port at the initial stage, and the length of the second target time interval;

[0086] S340, determining the rate of change of the air inlet temperature according to the difference between the final air inlet temperature and the initial air inlet temperature, and the length of the second target time interval;

[0087] S350, controlling the opening of the anti-surge valve according to the rate of change of the vacuum degree at the air inlet, the rate of change of the temperature at the air inlet, the air inlet temperature and the outlet flow rate.

[0088] It can be understood that in the present invention, during the process of the magnetic levitation turbine vacuum pump performing dehydration work and surge protection, the inlet vacuum degree and the inlet temperature are cyclically monitored in real time. The second target time interval can be selected and adjusted by technical personnel in this field according to actual needs and experience. Exemplarily, the first target time interval is 30s or 60s.

[0089] The rate of change of the intake vacuum is the difference between the final intake vacuum of the magnetic levitation turbine vacuum pump at the fourth time point and the initial intake vacuum of the magnetic levitation turbine vacuum pump at the third time point, divided by the second target time interval.

[0090] The rate of change of the air inlet temperature is the difference between the final air inlet temperature of the magnetic levitation turbine vacuum pump at the fourth time point and the initial air inlet temperature of the magnetic levitation turbine vacuum pump at the third time point, divided by the second target time interval.

[0091] Accordingly, S350, according to the change rate of the vacuum degree at the air inlet, the change rate of the air inlet temperature, the air inlet temperature and the outlet flow rate, controlling the opening of the anti-surge valve specifically includes:

[0092] S351, determining an inlet vacuum degree change rate threshold corresponding to the outlet flow rate according to the outlet flow rate of the magnetic levitation turbine vacuum pump at a fourth time point;

[0093] S352, determining an air inlet temperature change rate threshold value corresponding to the outlet pressure according to the outlet pressure of the magnetic levitation turbine vacuum pump at a fourth time point;

[0094] S353, comparing the air inlet vacuum degree change rate with the air inlet vacuum degree change rate threshold to obtain a first comparison result;

[0095] S354, comparing the air inlet temperature change rate with the air inlet temperature change rate threshold to obtain a second comparison result;

[0096] S355. Control the opening of the anti-surge valve according to the first comparison result and the second comparison result.

[0097] According to the first comparison result and the second comparison result, controlling the opening of the anti-surge valve specifically includes:

[0098] When the first comparison result is that the absolute value of the intake port vacuum change rate is greater than or equal to the intake port vacuum change rate threshold, and / or the second comparison result is that the absolute value of the intake port temperature change rate is greater than the intake port temperature change rate threshold, controlling the anti-surge valve to increase its opening;

[0099] When the first comparison result is that the absolute value of the intake vacuum change rate is less than the intake vacuum change rate threshold, and the second comparison result is that the absolute value of the intake temperature change rate is less than the intake temperature change rate threshold, the opening of the anti-surge valve is controlled to remain unchanged.

[0100] In other words, the inlet vacuum change rate threshold corresponds to the size of the outlet flow rate, the outlet flow rate at the fourth time point is obtained by real-time monitoring, and the inlet vacuum change rate threshold corresponding to the size of the outlet flow rate is obtained by looking up the table. The relationship between the inlet temperature change rate threshold and the outlet pressure, and the method for obtaining the inlet temperature change rate threshold are similar.

[0101] After obtaining the intake vacuum change rate threshold and the intake temperature change rate threshold, the intake vacuum change rate is compared with the intake vacuum change rate threshold, and the intake temperature change rate is compared with the intake temperature change rate threshold.

[0102] If the absolute value of the change rate of the vacuum degree of the air inlet is greater than or equal to the change rate threshold of the vacuum degree of the air inlet, and / or the absolute value of the change rate of the temperature of the air inlet is greater than the change rate threshold of the temperature of the air inlet, it indicates that a relatively serious surge that needs to be regulated has occurred, and at this time, the anti-surge valve is controlled to increase its opening. On the contrary, if the absolute value of the change rate of the vacuum degree of the air inlet is less than the change rate threshold of the vacuum degree of the air inlet, and the second comparison result is that the absolute value of the change rate of the temperature of the air inlet is less than the change rate threshold of the temperature of the air inlet, it indicates that the surge problem does not need to be regulated temporarily, and at this time, the opening of the anti-surge valve is controlled to remain unchanged.

[0103] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0104] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A novel dehydration control method for an energy-saving magnetically suspended turbine vacuum pump, characterized in that: The air inlet of the magnetically suspended turbine vacuum pump is connected to an anti-surge valve, and the dehydration control method includes: In response to a startup instruction, the magnetically suspended turbine vacuum pump is controlled to start operation, and a motor vibration value and a motor current of the magnetically suspended turbine vacuum pump are monitored in real time; Determining whether the magnetically suspended turbine vacuum pump needs to execute a surge protection mode according to the motor amplitude and the motor current; When the result of the judgment is that the magnetic levitation turbine vacuum pump needs to start the surge protection mode, controlling the magnetic levitation turbine vacuum pump to execute the surge protection mode; Wherein, the surge protection mode includes: controlling the opening of the anti-surge valve according to the inlet vacuum, inlet temperature, outlet flow, and outlet pressure of the magnetic levitation turbine vacuum pump.

2. The dehydration control method according to claim 1, characterized in that: The determining, based on the motor amplitude and the motor current, whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode specifically includes: Acquire a first motor amplitude and a first motor current of the magnetically suspended turbine vacuum pump at a first time point; After the first target time interval, obtaining a second motor amplitude and a second motor current of the magnetically suspended turbine vacuum pump at a second time point; Whether the magnetically levitated turbine vacuum pump needs to execute a surge protection mode is determined based on a vibration difference between the second motor amplitude and the first motor amplitude, and a current change rate of the second motor current relative to the first motor current.

3. The dehydration control method according to claim 2, characterized in that: The determining whether the magnetic suspension turbine vacuum pump needs to execute the surge protection mode according to the vibration difference between the second motor amplitude and the first motor amplitude, and the current change rate of the second motor current relative to the first motor current, specifically includes: determining a vibration difference reference value corresponding to the second motor current according to the second motor current; Using the quotient of the vibration difference value divided by the vibration difference reference value as the vibration coefficient; Obtaining a surge coefficient according to the vibration coefficient and the current change rate; The surge coefficient is compared with a surge coefficient threshold, and based on the comparison result, it is determined whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode.

4. The dehydration control method according to claim 3, characterized in that: The step of judging whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode according to the comparison result specifically includes: When the comparison result is that the surge coefficient is greater than or equal to the surge coefficient threshold, it is determined that the magnetic levitation turbine vacuum pump needs to execute the surge protection mode.

5. The dehydration control method according to claim 3, characterized in that: The step of judging whether the magnetic suspension turbine vacuum pump needs to execute a surge protection mode according to the comparison result specifically includes: When the comparison result is that the surge coefficient is less than the surge coefficient threshold, it is determined that the magnetically levitated turbine vacuum pump does not need to execute the surge protection mode.

6. The dehydration control method according to claim 3, characterized in that: The surge coefficient is obtained by the following formula: S=|k×R V |+|R I |; Wherein, S is the surge coefficient, k is a constant, R V is the vibration coefficient, R I is the current change rate.

7. The dehydration control method according to any one of claims 1 to 6, characterized in that: The controlling of the anti-surge valve opening according to the inlet vacuum degree, inlet temperature, outlet flow rate, and outlet pressure of the magnetic levitation turbine vacuum pump specifically includes: Obtaining an initial air inlet vacuum degree and an initial air inlet temperature of the magnetically suspended turbine vacuum pump at a third time point; After the second target time interval, the final air inlet vacuum and the final air inlet temperature of the magnetic levitation turbine vacuum pump at a fourth time point are obtained; Determining a change rate of the air intake vacuum degree according to a difference between the air intake vacuum degree at the final stage and the air intake vacuum degree at the initial stage, and the length of the second target time interval; determining an air inlet temperature change rate according to a difference between the final air inlet temperature and the initial air inlet temperature, and a length of a second target time interval; The anti-surge valve opening is controlled according to the intake vacuum change rate, the intake temperature change rate, the intake temperature and the outlet flow rate.

8. The dehydration control method according to claim 7, characterized in that: The controlling the anti-surge valve opening according to the intake vacuum change rate, the intake temperature change rate, the intake temperature and the outlet flow rate specifically includes: Determining, according to the outlet flow rate of the magnetically levitated turbine vacuum pump at the fourth time point, a threshold value of a change rate of an air inlet vacuum degree corresponding to the outlet flow rate; determining, according to the outlet pressure of the magnetically suspended turbine vacuum pump at the fourth time point, a threshold value of the rate of change of the air inlet temperature corresponding to the outlet pressure; Comparing the air inlet vacuum degree change rate with the air inlet vacuum degree change rate threshold to obtain a first comparison result; Comparing the air inlet temperature change rate with the air inlet temperature change rate threshold to obtain a second comparison result; The anti-surge valve opening is controlled according to the first comparison result and the second comparison result.

9. The dehydration control method according to claim 8, characterized in that: The controlling the anti-surge valve opening according to the first comparison result and the second comparison result specifically includes: When the first comparison result is that the absolute value of the intake vacuum change rate is greater than or equal to the intake vacuum change rate threshold, and / or the second comparison result is that the absolute value of the intake temperature change rate is greater than the intake temperature change rate threshold, the anti-surge valve is controlled to increase its opening.

10. The dehydration control method according to claim 8, characterized in that: The controlling the anti-surge valve opening according to the first comparison result and the second comparison result specifically includes: When the first comparison result is that the absolute value of the intake vacuum change rate is less than the intake vacuum change rate threshold, and the second comparison result is that the absolute value of the intake temperature change rate is less than the intake temperature change rate threshold, the opening of the anti-surge valve is controlled to remain unchanged.