High-vacuum gate valve
By designing a high vacuum insertion plate valve including a valve body, an end cover body, an insertion plate assembly, a connecting rod assembly, an isolation assembly, a cylinder block and a position adjustment member, the problems of inflexible movement of the insertion plate and friction wear in the prior art are solved, and the smooth movement and sealing protection of the insertion plate are achieved.
Patent Information
- Application Number
- CN202510410406.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-02
- Publication Date
- 2025-05-13
AI Technical Summary
The driving mechanism of the existing high vacuum insertion valve is difficult to move the insertion plate to the desired position, and the flexibility of use is poor, and the friction and wear between the insertion plate and the valve body reduces the sealing property, contaminating the vacuum system.
A high vacuum insertion plate valve is designed including a valve body, an end cover body, a plug plate assembly, a connecting rod assembly, an isolation assembly, a cylinder block and a position adjuster. Through the cylinder linkage isolation assembly, connecting rod assembly and insertion plate assembly, the insertion plate is realized smoothly in the hollow space, and the cylinder stroke is adjusted through the position adjuster to control the moving position of the insertion plate.
The relatively smooth movement of the insert plate assembly is achieved, which reduces friction and wear, ensures sealing, protects the vacuum system, and improves the flexibility of the insert plate moving position.
Smart Images
Figure CN119982934A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of valves, in particular to a high vacuum gate valve. Background Art
[0002] High vacuum gate valve is a valve used in vacuum system with working pressure lower than standard atmospheric pressure. It is suitable for connecting or cutting off airflow, and plays the role of airflow control, vacuum isolation, equipment protection and safety guarantee. Its structure mainly includes: valve body, plug plate, sealing ring and driving mechanism. The plug plate is driven by the driving mechanism to make the plug plate move, realize the opening and closing of the valve, and thus control the flow of gas in the vacuum system; When the plug is in the closed state, a completely sealed space is formed between the sealing ring and the valve body to prevent gas leakage; when it is opened, the plug is removed and the gas can flow; The high vacuum gate valve in the prior art has some shortcomings: 1. The driving mechanism is driven by a cylinder. This driving mode can only control the plug plate to move to a preset position, such as: the plug plate moves to a position where the valve is completely closed, and the plug plate moves to a position where the valve is completely opened. However, it is difficult to move the plug plate to a desired position, such as: moving to a position where the valve is half open. The moving position of the plug plate cannot be adjusted, and the flexibility of use is poor; 2. When the drive mechanism links the plug plate to move, there will inevitably be friction between the plug plate and the valve body. Long-term operation will cause wear and affect the sealing performance. In addition, the particles caused by friction will also pollute the vacuum system. Summary of the invention
[0003] In view of the above-mentioned deficiencies existing in the related art, the purpose is to provide a high vacuum gate valve to solve the technical problems that the gate in the related art cannot be moved to the required position, the flexibility of use is relatively poor, and the friction and wear between the gate and the valve body reduce the sealing performance, and the particles caused by friction will pollute the vacuum system; The technical solution to achieve the purpose is: a high vacuum gate valve, comprising: A valve body, wherein the valve body has a hollow space and an air flow channel, wherein the hollow space passes through one end of the valve body, and the air flow channel passes through a side wall of the valve body and is communicated with the hollow space; An end cover body, connected to one end of the valve body, covering the hollow space; A plug board assembly is arranged in the hollow space; A connecting rod assembly, one end of which is connected to the plugboard assembly, and the other end of which passes through the hollow space and is disposed in the end cover body; An isolation assembly, one end of which is connected to the end cover body, is arranged parallel to the valve body and spaced apart from the valve body, and is connected to the other end of the connecting rod assembly; A cylinder body connected to the other end of the isolation assembly, used to link the isolation assembly, the isolation assembly links the connecting rod assembly, the connecting rod assembly links the plug assembly, the plug assembly moves along the hollow space to open or close the airflow channel; And a position adjusting member is arranged on the cylinder body and is used for adjusting the stroke of the cylinder body.
[0004] Further: the plugboard assembly includes: a plugboard body, one end of which is connected to the connecting rod assembly; A first side plate portion, arranged on one side of the plug board body; A second side plate portion, arranged on the other side of the plug board body; An elastic component, disposed in the middle of the plug board body, connecting the first side plate portion and the second side plate portion; and a leading member connected to the first side plate portion and the second side plate portion and slidably connected to the other end of the plug board body.
[0005] Further: the plugboard body comprises: a plugboard, the plugboard having a first through slot and a avoidance block, the elastic component is arranged at the first through slot, and the avoidance block is arranged in the first through slot; A connecting seat, connected to one end of the plug plate and connected to the connecting rod assembly; A plurality of guide rollers connected to the side of the plug plate and used for rolling along the inner wall of the valve body; A plurality of ball assemblies are arranged on the plug plate at intervals and are arranged at intervals from the first through slots. The ball assemblies are in two layers, and are arranged symmetrically between the layers. One layer of the ball assemblies contacts the first side plate portion, and the other layer of the ball assemblies contacts the second side plate portion. And a plurality of shock absorbing members are arranged on the plug board at intervals, arranged in the grooves on the plug board, and arranged at intervals from the first through groove and the ball assembly. The shock absorbing members are divided into two layers, and the layers are symmetrically arranged.
[0006] Further: the ball assembly includes: a ball seat, which is arranged at the second through groove on the plug plate, and the ball seat is symmetrically provided with a concave space; A retaining spring connected to the ball seat, connecting the plug plate and the ball seat; And two round balls are arranged one by one in the concave space, and parts of the round balls protrude from the concave space and contact the first side plate part and the second side plate part.
[0007] Further: the first side plate portion comprises: a first side plate, a side wall of the first side plate having a plurality of first guide grooves, the first guide grooves being in one-to-one contact with the ball; And a first sealing ring is arranged on the other side wall of the first side plate and is used to form a seal with the inner wall of the valve body.
[0008] Further: the second side plate portion comprises: a second side plate, a side wall of the second side plate having a plurality of second guide grooves, the second guide grooves being in one-to-one contact with the ball; And a second sealing ring is arranged on the other side wall of the second side plate and is used to form a seal with the inner wall of the valve body.
[0009] Furthermore: the first guide groove and the second guide groove have the same structure, both having a shallow part and a deep part, and the width dimension of the shallow part is smaller than the width dimension of the deep part.
[0010] Further: the elastic component includes: a flat plate, connected to the first side plate, and spaced apart from the first guide groove; and an arc-shaped plate connected to the second side plate and spaced apart from the second guide groove; the arc-shaped plate is connected to the flat plate, and an elastic space is formed between the arc-shaped plate and the flat plate.
[0011] Further: the leading member comprises: a first connecting piece, one end of which is connected to the first side plate; a second connecting piece, one end of which is connected to the second side plate; and a connecting block connected between the other end of the first connecting piece and the other end of the second connecting piece.
[0012] Further: the connecting rod assembly comprises: two first connecting rods, symmetrically arranged, one end of which is movably connected to the connecting seat; And a second connecting rod, one end of which is movably connected to the other end of the first connecting rod, the middle position of which is movably connected to the end cover body, and the other end of which is connected to the isolation assembly.
[0013] Further: the isolation assembly comprises: a support seat, one end of which is connected to the end cover body, and the support seat has a stepped through space; A third sealing ring, connected to the support seat and arranged in the stepped through space; a bellows, arranged in the stepped through space and spaced apart from the third sealing ring; A central axis, one end of which is arranged in the stepped through space, abuts against the bellows, and links the bellows to expand and contract, and the other end of which passes through the stepped through space, is surrounded by the third sealing ring, and is connected to the cylinder body; And two third connecting rods are symmetrically arranged and movably connected between one end of the central shaft and the connecting rod assembly.
[0014] Further: the cylinder body comprises: a first cylinder body, one end of which is connected to the support seat; A fourth sealing ring, arranged between the first cylinder and the support seat; An air seat connected to the other end of the first cylinder; a fifth sealing ring, arranged between the first cylinder and the air seat; A second cylinder, one end of which is connected to the air seat; a sixth sealing ring, arranged between the second cylinder and the air seat; An upper cover connected to the other end of the second cylinder; a seventh sealing ring, arranged between the second cylinder and the upper cover; A first piston is disposed in the first cylinder to divide the first cylinder into a first space and a second space; a second piston, disposed in the second cylinder, dividing the second cylinder into a third space and a fourth space; An inner cylinder, one end of which is plugged into the central axis and connected to the first piston, the middle position of which is inserted into the air seat, and the other end of which is connected to the second piston; an eighth sealing ring, arranged between the middle shaft and the inner cylinder; A ninth sealing ring, arranged between the air seat and the inner cylinder; And a plurality of bolts are used to connect the support seat, the air seat and the upper cover.
[0015] Further: the position adjustment member comprises: a third piston, one end of which is slidably connected to the inner cylinder, and the other end is arranged in the fourth space, dividing the fourth space into a fifth space and a sixth space, and the middle position of the third piston has a stepped inner space; A rectangular tube, arranged in the stepped inner space; a spring, arranged in the stepped inner space and in the rectangular tube; A blocking piece, arranged in the stepped inner space, blocking the top of the rectangular tube; A nut, disposed in the rectangular tube and in contact with the spring; an adjusting bolt, one end of which is passed through the upper cover and the other end of which is threadedly connected to the nut; and a tenth sealing ring, which is arranged between the upper cover and the adjusting bolt.
[0016] The above technical solution has the following beneficial effects: a high vacuum gate valve, compared with the related art, is provided with a valve body, an end cover body, a gate assembly, a connecting rod assembly, an isolation assembly, a cylinder body and a position adjustment member; When the airflow channel is opened, the cylinder body is linked to the isolation assembly to be compressed, the isolation assembly is linked to the connecting rod assembly, the connecting rod assembly is linked to the plug assembly, and the plug assembly moves along the hollow space in a direction away from the airflow channel to open the airflow channel; When the airflow channel is closed, the cylinder body moves, the isolation assembly gradually rebounds, the isolation assembly links the connecting rod assembly, the connecting rod assembly links the plug assembly, the plug assembly moves along the hollow space toward the airflow channel, and the airflow channel is closed; It achieves relatively smooth movement, reduces friction and wear, ensures sealing, and protects the vacuum system; The position adjustment member is arranged on the cylinder body. By adjusting the position adjustment member, the stroke of the cylinder body is controlled, so that the cylinder body is linked to the isolation assembly. When the isolation assembly is linked to the connecting rod assembly, the movement stroke of the cylinder body is preset, thereby controlling the movement distance of the plug plate assembly, and adjusting the movement position of the plug plate assembly, and the flexibility of use is relatively good; Thereby overcoming the technical problems that the plug plate cannot be moved to the required position, the flexibility of use is relatively poor, the friction and wear between the plug plate and the valve body reduces the sealing, and the particles caused by friction will pollute the vacuum system. The moving position of the plug plate can be adjusted, the flexibility of use is relatively good, the friction and wear between the plug plate and the valve body are reduced, the sealing is guaranteed, and the technical effect of the vacuum system is protected. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is a schematic diagram of the general assembly structure; Figure 2 for Figure 1 A partial cross-sectional view of Figure 3 for Figure 2 A partial enlarged view of Figure 4 The exploded view of the plug board assembly; Figure 5 It is a structural schematic diagram of the plugboard body and the connecting rod assembly; Figure 6 It is a schematic diagram of the structure of the plug board; Figure 7 It is a partial cross-sectional view of the ball assembly connected to the plug plate; Figure 8 is a schematic structural diagram of a first side plate and an elastic component; Fig. 9 This is a schematic diagram of the structure of the sphere at a deep depth; Fig.10 This is a schematic diagram of the structure when the sphere is in a shallow position; Fig.11 is a schematic diagram of the structure of the elastic component; Fig.12 It is a structural schematic diagram of the leading part; Fig.13 It is a partial cross-sectional view of the second cylinder, the upper cover, the seventh sealing ring and the position adjusting member; In the figure: 10. valve body, 11. hollow space, 12. air flow channel, 20. end cover body, 30. plug plate assembly, 31. plug plate body, 31-1. plug plate, 31-11. first through groove, 31-12. avoidance block, 31-13. groove, 31-14. second through groove, 31-2. connecting seat, 31-3. guide roller, 31-4. ball assembly, 31-41. ball seat, 31-41-1. concave space, 31-42. retaining spring, 31-43. ball, 31-5. reduction Vibrating member, 32. First side plate, 32-1. First side plate, 32-11. First guide groove, 32-2. First sealing ring, 33. Second side plate, 33-1. Second side plate, 33-11. Second guide groove, 33-2. Second sealing ring, 32-11-1. Shallow place, 32-11-2. Deep place, 34. Elastic component, 34-1. Flat plate, 34-2. Arc plate, 34-3. Elastic space, 35. Leading member, 35-1. First connecting piece, 35-2. Second connecting piece, 35-3. Connecting block, 40. Connecting rod assembly, 41. First connecting rod, 42. Second connecting rod, 50. Isolation assembly, 51. Support seat, 51-1. Step-shaped through space, 52. Third sealing ring, 53. Bellows, 54. Middle shaft, 55. Third connecting rod, 60. Cylinder body, 61. First cylinder body, 62. Fourth sealing ring, 63. Air seat, 64. Fifth sealing ring, 65. Second cylinder body, 66. Sixth sealing ring, 67. Upper cover, 68. Seventh sealing ring, 69. First piston, 610 .The second piston, 620. The inner cylinder, 630. The eighth sealing ring, 640. The ninth sealing ring, 650. The bolt, 60-1. The first space, 60-2. The second space, 60-3. The third space, 60-4. The fourth space, 60-41. The fifth space, 60-42. The sixth space, 70. The position adjustment member, 71. The third piston, 71-1. The stepped inner space, 72. The rectangular tube, 73. The spring, 74. The baffle, 75. The nut, 76. The adjusting bolt, 77. The tenth sealing ring. DETAILED DESCRIPTION
[0018] In order to make the content easier to understand, the following is a further detailed description based on specific embodiments and in conjunction with the accompanying drawings; A high vacuum gate valve solves the technical problems that the gate cannot be moved to the required position in the related art, the flexibility of use is relatively poor, the friction and wear between the gate and the valve body reduces the sealing performance, and the particles caused by friction will pollute the vacuum system. The moving position of the gate can be adjusted, the flexibility of use is relatively good, the friction and wear between the gate and the valve body are reduced, the sealing performance is guaranteed, and the positive effects of protecting the vacuum system are achieved. The overall idea is as follows: Implementation
[0019] like Figure 1 , Figure 2 As shown; A high vacuum gate valve, comprising: A valve body 10, wherein the valve body 10 has a hollow space 11 and an air flow channel 12, wherein the hollow space 11 passes through one end of the valve body 10, and the air flow channel 12 passes through a side wall of the valve body 10 and communicates with the hollow space 11; An end cover 20 is connected to one end of the valve body 10 to cover the hollow space 11; The plugboard assembly 30 is arranged in the hollow space 11; A connecting rod assembly 40, one end of which is connected to the plugboard assembly 30, and the other end of which passes through the hollow space 11 and is disposed in the end cover body 20; An isolation assembly 50, one end of which is connected to the end cover body 20, is arranged parallel to the valve body 10 and spaced apart, and is connected to the other end of the connecting rod assembly 40; The cylinder 60 is connected to the other end of the isolation assembly 50, and is used to link the isolation assembly 50, the isolation assembly 50 links the connecting rod assembly 40, the connecting rod assembly 40 links the plug assembly 30, and the plug assembly 30 moves along the hollow space 11 to open or close the air flow channel 12; and a position adjusting member 70, which is disposed on the cylinder body 60 and is used to adjust the stroke of the cylinder body 60; Specifically, when the airflow channel 12 is opened, the cylinder 60 is linked to the isolation assembly 50 for compression, the isolation assembly 50 is linked to the connecting rod assembly 40, the connecting rod assembly 40 is linked to the plug assembly 30, and the plug assembly 30 moves along the hollow space 11 in a direction away from the airflow channel 12 to open the airflow channel 12; When the airflow channel 12 is closed, the cylinder 60 is actuated, the isolation assembly 50 gradually rebounds, the isolation assembly 50 is linked to the connecting rod assembly 40, the connecting rod assembly 40 is linked to the plug assembly 30, and the plug assembly 30 moves along the hollow space 11 toward the airflow channel 12 to close the airflow channel 12; The board assembly 30 is relatively smooth in movement, friction and wear are reduced, sealing is ensured, and the vacuum system is protected; The position adjusting member 70 is arranged on the cylinder body 60. By adjusting the position adjusting member 70, the stroke of the cylinder body 60 is controlled, so that the cylinder body 60 is linked with the isolation assembly 50. When the isolation assembly 50 is linked with the connecting rod assembly 40, the movement stroke of the cylinder body 60 is preset, thereby controlling the movement distance of the plug board assembly 30, and adjusting the movement position of the plug board assembly 30, and the flexibility of use is relatively good; Another embodiment: like Figure 1 , Figure 2 As shown; during implementation, the valve body 10 has a roughly "T"-shaped structure, a regular shape, and is relatively easy to manufacture; The hollow space 11 is provided, which is conducive to the plug board assembly 30 to move along the position, open or close the air flow channel 12, and the movement of the plug board assembly 30 is relatively smooth; Another embodiment: like Figure 1 , Figure 2 , Figure 3 As shown; during implementation, the end cover body 20 has a generally square shape and is connected to the valve body 10 by bolts, so the assembly is relatively convenient, and the end cover body 20 forms a reliable support structure, which is conducive to connecting the connecting rod assembly 40 and the isolation assembly 50; Another embodiment: like Figure 1 , Figure 2 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 , Fig.12 As shown; when implemented, the plugboard assembly 30 includes: a plugboard body 31, one end of which is connected to the connecting rod assembly 40; a first side plate portion 32, which is arranged on one side of the plugboard body 31; a second side plate portion 33, which is arranged on the other side of the plugboard body 31; an elastic component 34, which is arranged in the middle of the plugboard body 31 and connects the first side plate portion 32 and the second side plate portion 33; and a leading member 35, which is connected to the first side plate portion 32 and the second side plate portion 33, and is slidably connected to the other end of the plugboard body 31; The plug board body 31 includes: a plug board 31-1, the plug board 31-1 has a first through slot 31-11 and an avoidance block 31-12, the first through slot 31-11 is provided with the elastic component 34, the avoidance block 31-12 is provided in the first through slot 31-11; a connecting seat 31-2, connected to one end of the plug board 31-1, connected to the connecting rod assembly 40; a plurality of guide rollers 31-3, connected to the side of the plug board 31-1, for rolling along the inner wall of the valve body 10; a plurality of ball assemblies 31-4, arranged at intervals on the plug board 31-1. The board 31-1 is spaced apart from the first through slot 31-11, the ball assembly 31-4 is composed of two layers, and the layers are symmetrically arranged, one layer of the ball assembly 31-4 is in contact with the first side plate portion 32, and the other layer of the ball assembly 31-4 is in contact with the second side plate portion 33; and a plurality of shock absorbers 31-5 are spaced apart from each other on the plug board 31-1, and are arranged in the groove 31-13 on the plug board 31-1, and are spaced apart from the first through slot 31-11 and the ball assembly 31-4, and the shock absorbers 31-5 are composed of two layers, and the layers are symmetrically arranged; The outer shape of the plug board 31-1 is a square plate structure; The shape of the first through groove 31 - 11 is roughly a “T”-shaped structure, which is conducive to setting the elastic component 34 and is relatively convenient for assembly; The avoidance block 31 - 12 can move along the leading member 35 without colliding with the leading member 35 ; A groove 31-13 is provided, which is conducive to the installation of a shock absorbing member 31-5; A second through groove 31 - 14 is provided to facilitate connection of the ball assembly 31 - 4; The shape of the connecting seat 31 - 2 is roughly a “T”-shaped structure, which is used to connect with the connecting rod assembly 40 , and the assembly is relatively convenient; The guide rollers 31-3 are a common structure in the prior art, and there are eight of them, four in a group, and they are arranged to form a quadrilateral structure. The center line of one group is parallel to the plug plate 31-1, and the center line of the other group is perpendicular to the plug plate 31-1. The guide rollers 31-3 roll along the inner wall of the valve body 10, which not only moves smoothly and reduces friction and wear, but also forms a guide, which is conducive to the plug plate assembly 30 being able to always move along a straight line. The ball assembly 31-4 includes: a ball seat 31-41, which is arranged at the second through groove 31-14 on the plug board 31-1, and the ball seat 31-41 is symmetrically provided with a concave space 31-41-1; a retaining spring 31-42, which is connected to the ball seat 31-41, connecting the plug board 31-1 and the ball seat 31-41; and two balls 31-43, which are arranged one by one in the concave space 31-41-1, and the parts of the balls 31-43 protrude from the concave space 31-41-1 and contact the first side plate portion 32 and the second side plate portion 33; The number of the ball components 31 - 4 is six, but not limited to six, and they are evenly distributed, which is conducive to relatively even force and good stability when applying force to the first side plate portion 32 and the second side plate portion 33; The ball seat 31-41 is roughly T-shaped, with a concave space 31-41-1, which is conducive to setting the ball 31-43, and the ball 31-43 can rotate smoothly in the concave space 31-41-1; The retaining spring 31-42 is a common structure in the prior art, which is conducive to assembling the ball seat 31-41 at the second through groove 31-14, and the assembly is relatively convenient; The balls 31-43 are ceramic balls (with a relatively low friction coefficient), and the silver plating thickness at the concave space 31-41-1 is 3-5 microns, which has self-lubrication and reduces friction resistance; Two round balls 31 - 43 are arranged on a ball seat 31 - 41 , which is conducive to uniformly supporting the first side plate portion 32 and the second side plate portion 33 ; The number of the shock absorbing members 31-5 is six, for example, rubber rods, three in a layer, used to separate the plug board 31-1 and the first side plate 32-1, used to separate the plug board 31-1 and the second side plate 33-1, and has a vibration reduction effect, reducing noise; The first side plate portion 32 includes: a first side plate 32-1, a side wall of which has a plurality of first guide grooves 32-11, the first guide grooves 32-11 being in one-to-one contact with the ball 31-43; and a first sealing ring 32-2, which is disposed on the other side wall of the first side plate 32-1 and is used to form a seal with the inner wall of the valve body 10; The first side plate 32-1 is a circular plate structure; The first sealing ring 32-2 is an O-ring, which is conducive to ensuring sealing; The second side plate portion 33 includes: a second side plate 33-1, a side wall of which has a plurality of second guide grooves 33-11, the second guide grooves 33-11 being in one-to-one contact with the ball 31-43; and a second sealing ring 33-2, which is disposed on the other side wall of the second side plate 33-1 and is used to form a seal with the inner wall of the valve body 10; The second side plate 33-1 is a circular plate structure; The second sealing ring 33-2 is an O-ring, which is conducive to ensuring sealing; The first guide groove 32-11 and the second guide groove 33-11 have the same structure, both having a shallow portion 32-11-1 and a deep portion 32-11-2, and the width of the shallow portion 32-11-1 is smaller than the width of the deep portion 32-11-2, forming a structure roughly in the shape of half a water drop; the setting of the shape and size is conducive to matching with the ball 31-43, thereby reducing friction resistance; The elastic component 34 includes: a flat plate 34-1, connected to the first side plate 32-1, and spaced apart from the first guide groove 32-11; and an arc plate 34-2, connected to the second side plate 33-1, and spaced apart from the second guide groove 33-11, and the arc plate 34-2 is connected to the flat plate 34-1, and an elastic space 34-3 is formed between the arc plate 34-2 and the flat plate 34-1; The flat plate 34 - 1 and the first side plate 32 - 1 are connected by bolts, and the assembly is relatively convenient; The arc plate 34-2 is formed by bending a plate and has elasticity. It is connected to the second side plate 33-1 by bolts, and the arc plate 34-2 is connected to the flat plate 34-1 by bolts, and has an elastic space 34-3, forming an elastic effect. When the ball 31-43 reaches the shallow position 32-11-1, the first side plate 32 and the second side plate 33 are stretched open, and the elastic component 34 is also stretched open. At this time, the elastic component 34 has a rebound force, which provides the first side plate 32 and the second side plate 33 with the power to return to their original positions when the air flow channel 12 is opened next time; The leading member 35 includes: a first connecting piece 35-1, one end of which is connected to the first side plate 32-1; a second connecting piece 35-2, one end of which is connected to the second side plate 33-1; and a connecting block 35-3, which is connected between the other end of the first connecting piece 35-1 and the other end of the second connecting piece 35-2; One end of the first connecting piece 35-1 is connected to the first side plate 32-1 by a bolt, and the assembly is relatively convenient; One end of the second connecting piece 35-2 is connected to the second side plate 33-1 by a bolt, and the assembly is relatively convenient; The connecting block 35 - 3 is a rectangular block, which is connected to the first connecting piece 35 - 1 and the second connecting piece 35 - 2 by bolts, and is relatively easy to assemble; A leading member 35 is provided, which is conducive to limiting the first side plate portion 32 and the second side plate portion 33. When the airflow channel 12 is closed, the cylinder 60 is actuated, and the linkage plug plate assembly 30 moves along the hollow space 11 toward the airflow channel 12 until the leading member 35 contacts the inner wall of the valve body 10 to form a guide support. At this time, the first side plate portion 32 and the second side plate portion 33 are aligned with the airflow channel 12, and the plug plate body 31 continues to move. The ball 31-43 rolls in the concave space 31-41-1, the first guide groove 32-11 and the second guide groove 33-11. When it reaches the shallow position 32-11-1, the ball 31-43 supports the first side plate portion 32 and the second side plate portion 33, and the elastic assembly 34 is opened, and the first side plate portion 32 and the second side plate portion 33 close the airflow channel 12; Another embodiment: like Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown; when implemented, the connecting rod assembly 40 includes: two first connecting rods 41, which are symmetrically arranged and one end of which is movably connected to the connecting seat 31-2; and a second connecting rod 42, one end of which is movably connected to the other end of the first connecting rod 41, the middle position of which is movably connected to the end cover body 20, and the other end of which is connected to the isolation assembly 50; One end of the first connecting rod 41 is movably connected to the connecting seat 31-2 via a pin, and the other end is movably connected to the second connecting rod 42 via a pin; The second connecting rod 42 is movably connected to the end cover body 20 via a pin shaft, and is movably connected to the third connecting rod 55 via a pin shaft; A connecting rod assembly 40 is provided, which has a transmission function and is conducive to the linkage of the plug board assembly 30 to move along the hollow space 11; Another embodiment: like Figure 1 , Figure 2 , Figure 3As shown; when implemented, the isolation assembly 50 includes: a support seat 51, one end of which is connected to the end cover body 20, and the support seat 51 has a stepped through space 51-1; a third sealing ring 52, which is connected to the support seat 51 and is arranged in the stepped through space 51-1; a bellows 53, which is arranged in the stepped through space 51-1 and is spaced apart from the third sealing ring 52; a central axis 54, one end of which is arranged in the stepped through space 51-1, abuts against the bellows 53, and links the bellows 53 to extend and retract, and the other end passes through the stepped through space 51-1, is surrounded by the third sealing ring 52, and is connected to the cylinder body 60; and two third connecting rods 55, which are symmetrically arranged and movably connected between one end of the central axis 54 and the connecting rod assembly 40; The support base 51 forms a reliable support structure; The stepped through space 51-1 is provided, which is conducive to the connection and installation of the bellows 53, and the structural reliability is relatively good; The third sealing ring 52 is an O-ring to ensure sealing performance; The bellows 53 is a common structure in the prior art, one end of which is connected to the central axis 54 and is used to separate the cylinder body 60 and the end cover body 20; The middle shaft 54 is a stepped shaft, one end of which is connected to the third connecting rod 55 via a pin shaft, and the other end is plugged into the inner cylinder 620; An isolation assembly 50 is provided to isolate the cylinder body 60 from the end cover body 20 and prevent foreign matter from entering the hollow space 11; Another embodiment: like Figure 1 , Figure 2 , Figure 3 , Fig.13As shown; during implementation, the cylinder body 60 includes: a first cylinder body 61, one end of which is connected to the support seat 51; a fourth sealing ring 62, which is arranged between the first cylinder body 61 and the support seat 51; an air seat 63, which is connected to the other end of the first cylinder body 61; a fifth sealing ring 64, which is arranged between the first cylinder body 61 and the air seat 63; a second cylinder body 65, one end of which is connected to the air seat 63; a sixth sealing ring 66, which is arranged between the second cylinder body 65 and the air seat 63; an upper cover 67, which is connected to the other end of the second cylinder body 65; a seventh sealing ring 68, which is arranged between the second cylinder body 65 and the upper cover 67; a first piston 69, which is arranged in the first cylinder body 61, The first cylinder 61 is divided into a first space 60-1 and a second space 60-2; the second piston 610 is arranged in the second cylinder 65, and the second cylinder 65 is divided into a third space 60-3 and a fourth space 60-4; the inner cylinder 620, one end of which is plugged into the central axis 54 and connected to the first piston 69, the middle position is passed through the air seat 63, and the other end is connected to the second piston 610; the eighth sealing ring 630 is arranged between the central axis 54 and the inner cylinder 620; the ninth sealing ring 640 is arranged between the air seat 63 and the inner cylinder 620; and a plurality of bolts 650 are connected to the support seat 51, the air seat 63 and the upper cover 67; The first cylinder 61 is a cylindrical structure; The fourth sealing ring 62, the fifth sealing ring 64, the sixth sealing ring 66, the seventh sealing ring 68, the eighth sealing ring 630 and the ninth sealing ring 640 are all O-rings to ensure sealing performance; A gas seat 63 is provided, and pressurized gas is introduced from the gas seat 63, which is conducive to the downward / upward movement of the first piston 69, the second piston 610 and the inner cylinder 620; The second cylinder 65 is a cylindrical structure; The middle position of the upper cover 67 has a stepped through hole, through which the adjusting bolt 76 passes, and the stepped through hole can block one end of the adjusting bolt 76; The first piston 69 and the second piston 610 are common structures in the prior art, and their shapes are roughly circular ring structures; The number of bolts 650 is four and is used for locking; The position adjusting member 70 comprises: a third piston 71, one end of which is slidably connected to the inner cylinder 620, and the other end of which is arranged in the fourth space 60-4, dividing the fourth space 60-4 into a fifth space 60-41 and a sixth space 60-42, and the middle position of the third piston 71 has a stepped inner space 71-1; a rectangular tube 72, which is arranged in the stepped inner space 71-1; a spring 73, which is arranged in the stepped inner space 71-1 and arranged in the rectangular tube 72; a blocking piece 74, which is arranged in the stepped inner space 71-1 and blocks the top of the rectangular tube 72; a nut 75, which is arranged in the rectangular tube 72 and contacts the spring 73; an adjusting bolt 76, one end of which is passed through the upper cover 67, and the other end of which is threadedly connected to the nut 75; and a tenth sealing ring 77, which is arranged between the upper cover 67 and the adjusting bolt 76; The third piston 71 is roughly T-shaped; the rectangular tube 72 is used to limit the nut 75; the spring 73 is a cylindrical spring, used to support the nut 75, and has the function of preventing the nut 75 from being disengaged from the adjusting bolt 76; the adjusting bolt 76 is a hexagon socket bolt; the tenth sealing ring 77 is an O-ring, which ensures the sealing performance; A position adjustment member 70 is provided, and the adjusting bolt 76 is rotated to link the third piston 71, the rectangular tube 72, the spring 73, the baffle 74 and the nut 75 to move the position at the fourth space 60-4. The third piston 71 slides along the inner cylinder 620. Therefore, when the position is adjusted upward, the volume of the fifth space 60-41 gradually decreases, and the volume of the sixth space 60-42 gradually increases. When the position is adjusted downward, the volume of the fifth space 60-41 gradually increases, and the volume of the sixth space 60-42 gradually decreases. When the third piston 71, the rectangular tube 7 2. After the spring 73, the baffle 74 and the nut 75 move into position, a block is formed (because the pressure of the pressurized gas entering the fifth space 60-41 is greater than the pressure of the pressurized gas entering the gas seat 63, the upward position of the first piston 69, the second piston 610 and the inner cylinder 620 is blocked by the third piston 71, and the moving position of the pluggable plate assembly 30 is controlled, so that the pluggable plate assembly 30 can be in a half-open position), the stroke of the cylinder body 60 is adjusted, and thus the moving position of the pluggable plate assembly 30 is adjusted, and the flexibility of use is relatively good; In the description, it should be understood that the terms "upper", "lower", "left", "right", "front", "back" and the like indicating directions or positional relationships are based on the positional relationships described in the drawings and are only for the convenience of description or simplified description, rather than indicating specific directions that must be possessed; the operation process described in the embodiments is not an absolute usage procedure and may be adjusted accordingly in actual use; Unless otherwise defined, the technical or scientific terms used herein shall have the usual meanings understood by persons with ordinary skills in the relevant field; the words "first", "second" and similar words used in the specification and claims do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not necessarily indicate a quantity limitation, but indicate the existence of at least one, which needs to be determined according to the content of the embodiment; The above is only a preferred specific implementation method, but the scope of protection is not limited to it. Any equivalent replacement or change made according to the technical solution and its inventive concept within the technical scope disclosed by any technician familiar with this technical field should be covered by the scope of protection.
Claims
1. A high vacuum gate valve, characterized in that: include: A valve body, wherein the valve body has a hollow space and an air flow channel, wherein the hollow space passes through one end of the valve body, and the air flow channel passes through a side wall of the valve body and is communicated with the hollow space; An end cover body, connected to one end of the valve body, covering the hollow space; A plug board assembly is arranged in the hollow space; A connecting rod assembly, one end of which is connected to the plugboard assembly, and the other end of which passes through the hollow space and is disposed in the end cover body; An isolation assembly, one end of which is connected to the end cover body, is arranged parallel to the valve body and spaced apart from the valve body, and is connected to the other end of the connecting rod assembly; A cylinder body connected to the other end of the isolation assembly, used to link the isolation assembly, the isolation assembly links the connecting rod assembly, the connecting rod assembly links the plug assembly, the plug assembly moves along the hollow space to open or close the airflow channel; And a position adjusting member is arranged on the cylinder body and is used for adjusting the stroke of the cylinder body.
2. A high vacuum gate valve according to claim 1, characterized in that: The plugboard assembly comprises: a plugboard body, one end of which is connected to the connecting rod assembly; A first side plate portion, arranged on one side of the plug board body; A second side plate portion, arranged on the other side of the plug board body; An elastic component, disposed in the middle of the plug board body, connecting the first side plate portion and the second side plate portion; and a leading member connected to the first side plate portion and the second side plate portion and slidably connected to the other end of the plug board body.
3. A high vacuum gate valve according to claim 2, characterized in that: The plugboard body comprises: a plugboard, the plugboard having a first through slot and a avoidance block, the elastic component is arranged at the first through slot, and the avoidance block is arranged in the first through slot; A connecting seat, connected to one end of the plug plate and connected to the connecting rod assembly; A plurality of guide rollers connected to the side of the plug plate and used for rolling along the inner wall of the valve body; A plurality of ball assemblies are arranged on the plug plate at intervals and are arranged at intervals from the first through slots. The ball assemblies are in two layers, and are arranged symmetrically between the layers. One layer of the ball assemblies contacts the first side plate portion, and the other layer of the ball assemblies contacts the second side plate portion. And a plurality of shock absorbing members are arranged on the plug board at intervals, arranged in the grooves on the plug board, and arranged at intervals from the first through groove and the ball assembly. The shock absorbing members are divided into two layers, and the layers are symmetrically arranged.
4. A high vacuum gate valve according to claim 3, characterized in that: The ball assembly comprises: a ball seat, which is arranged at the second through slot on the plug plate, and the ball seat is symmetrically provided with a concave space; A retaining spring connected to the ball seat, connecting the plug plate and the ball seat; And two round balls are arranged one by one in the concave space, and parts of the round balls protrude from the concave space and contact the first side plate part and the second side plate part.
5. A high vacuum gate valve according to claim 4, characterized in that: The first side plate portion comprises: a first side plate, a side wall of which is provided with a plurality of first guide grooves, the first guide grooves being in one-to-one contact with the ball; And a first sealing ring is arranged on the other side wall of the first side plate and is used to form a seal with the inner wall of the valve body.
6. A high vacuum gate valve according to claim 5, characterized in that: The second side plate portion comprises: a second side plate, a side wall of the second side plate having a plurality of second guide grooves, the second guide grooves being in one-to-one contact with the ball; And a second sealing ring is arranged on the other side wall of the second side plate and is used to form a seal with the inner wall of the valve body.
7. A high vacuum gate valve according to claim 6, characterized in that: The first guide groove and the second guide groove have the same structure, both having a shallow portion and a deep portion, and the width of the shallow portion is smaller than the width of the deep portion.
8. A high vacuum gate valve according to claim 6, characterized in that: The elastic component includes: a flat plate connected to the first side plate and spaced apart from the first guide groove; and an arc-shaped plate connected to the second side plate and spaced apart from the second guide groove; the arc-shaped plate is connected to the flat plate, and an elastic space is formed between the arc-shaped plate and the flat plate.
9. A high vacuum gate valve according to claim 6, characterized in that: The leading member comprises: a first connecting piece, one end of which is connected to the first side plate; a second connecting piece, one end of which is connected to the second side plate; and a connecting block connected between the other end of the first connecting piece and the other end of the second connecting piece.
10. A high vacuum gate valve according to claim 3, characterized in that: The connecting rod assembly comprises: two first connecting rods, which are symmetrically arranged and one end of which is movably connected to the connecting seat; And a second connecting rod, one end of which is movably connected to the other end of the first connecting rod, the middle position of which is movably connected to the end cover body, and the other end of which is connected to the isolation assembly.
11. A high vacuum gate valve according to claim 1, characterized in that: The isolation assembly comprises: a support seat, one end of which is connected to the end cover body, and the support seat has a stepped through space; A third sealing ring, connected to the support seat and arranged in the stepped through space; a bellows, arranged in the stepped through space and spaced apart from the third sealing ring; A central axis, one end of which is arranged in the stepped through space, abuts against the bellows, and links the bellows to expand and contract, and the other end of which passes through the stepped through space, is surrounded by the third sealing ring, and is connected to the cylinder body; And two third connecting rods are symmetrically arranged and movably connected between one end of the central shaft and the connecting rod assembly.
12. A high vacuum gate valve according to claim 11, characterized in that: The cylinder body comprises: a first cylinder body, one end of which is connected to the support seat; A fourth sealing ring, arranged between the first cylinder and the support seat; An air seat connected to the other end of the first cylinder; a fifth sealing ring, arranged between the first cylinder and the air seat; A second cylinder, one end of which is connected to the air seat; a sixth sealing ring, arranged between the second cylinder and the air seat; An upper cover connected to the other end of the second cylinder; a seventh sealing ring, arranged between the second cylinder and the upper cover; A first piston is disposed in the first cylinder to divide the first cylinder into a first space and a second space; a second piston, disposed in the second cylinder, dividing the second cylinder into a third space and a fourth space; An inner cylinder, one end of which is plugged into the central axis and connected to the first piston, the middle position of which is inserted into the air seat, and the other end of which is connected to the second piston; an eighth sealing ring, arranged between the middle shaft and the inner cylinder; A ninth sealing ring, arranged between the air seat and the inner cylinder; And a plurality of bolts are used to connect the support seat, the air seat and the upper cover.
13. A high vacuum gate valve according to claim 12, characterized in that: The position regulating member comprises: a third piston, one end of which is slidably connected to the inner cylinder, and the other end of which is arranged in the fourth space to divide the fourth space into a fifth space and a sixth space, and the middle position of the third piston has a stepped inner space; A rectangular tube, arranged in the stepped inner space; a spring, arranged in the stepped inner space and in the rectangular tube; A blocking piece, arranged in the stepped inner space, blocking the top of the rectangular tube; A nut, disposed in the rectangular tube and in contact with the spring; An adjusting bolt, one end of which is passed through the upper cover and the other end of which is threadedly connected to the nut; And a tenth sealing ring is arranged between the upper cover and the adjusting bolt.