Ultra-fast gas valve with switching time less than 100 microseconds and suitable for plasma gun

Abstract

The invention provides an ultra-fast air valve suitable for a plasma gun and with the switching time smaller than 100 microseconds, and relates to the field of ultra-fast air valves of plasma guns. The ultra-fast air valve comprises an ultra-fast air valve base, a belleville spring and a movement assembly. An inner sealing groove, an outer sealing groove and a coil groove are formed in the top of the ultrafast air valve base from inside to outside, an inner sealing ring is arranged in the inner sealing groove, an outer sealing ring is arranged in the outer sealing groove, a coil is arranged in the coil groove, and the two ends of the coil penetrate out of the bottom of the ultrafast air valve base and are used for being connected with a capacitor; an annular gas storage cavity is further formed in the top of the ultra-fast gas valve base and located between the inner sealing groove and the outer sealing groove. The moving assembly is located at the tops of the inner sealing groove, the outer sealing groove, the coil groove and the annular gas storage cavity and used for sealing the annular gas storage cavity; the belleville spring is located on the top of the movement assembly. The switching time of the ultra-fast air valve provided by the invention can be controlled to be less than 100 microseconds, and meanwhile, the air inflow in one switching time can be kept at 1.0-5.0 mg.

Description

Technical Field

[0001] The invention relates to the field of ultrafast gas valves for plasma guns, in particular to an ultrafast gas valve suitable for plasma guns with a switching time of less than 100 microseconds. Background Art

[0002] In the field of plasma jet driven magneto-inertial fusion, a special plasma gun is required to generate a plasma jet, which is then converged to produce a plasma bushing to compress the magnetized plasma target, thereby achieving the conditions for fusion reaction.

[0003] The working principle of the plasma gun is to first generate an initial plasma between the inner and outer electrodes through glow discharge pre-ionization, and then apply a large current between the inner and outer electrodes of the plasma gun to accelerate the initial plasma, thereby achieving the required jet quality, speed, density, temperature and core length.

[0004] Before the plasma gun glow discharge pre-ionization, an initial voltage needs to be applied between the inner and outer electrodes through a capacitor. Before the glow discharge, the voltage is maintained at a fixed value. After the neutral gas (such as argon Ar) is injected between the inner and outer electrodes through an ultrafast gas valve and reaches a certain gas pressure, the gas breakdown discharge condition is just reached, and glow discharge plasma is generated (the discharge current of the capacitor is limited by adding a resistor in the circuit).

[0005] Therefore, the ultrafast gas valve plays a vital role in the glow discharge preionization process. It is not only related to the quality of gas injection, but also affects the duration and uniformity of gas injection. If the gas injection quality is too low, the jet quality is insufficient. If the gas injection time is too long, the gas diffusion length in the electrode is too long, the plasma generated by preionization will also be very long, and the length of the plasma ejected under high current acceleration will also be too long. In addition, it will also affect key indicators such as jet density, velocity, and temperature.

[0006] In order to meet the above requirements on gas injection quality, duration and uniformity, it is necessary to develop a special ultrafast gas valve. Summary of the invention

[0007] In order to solve the high requirements for the quality, duration and uniformity of gas injection in the above-mentioned plasma gun, the present invention provides an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun. The switching time can be controlled within <100 μs, and the air intake volume within one switching time can be maintained at 1.0-5.0 mg.

[0008] The present invention provides an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, comprising an ultrafast gas valve base, a disc spring and a motion component; the top of the ultrafast gas valve base is provided with an inner sealing groove, an outer sealing groove and a coil groove from the inside to the outside, the inner sealing groove is provided with an inner sealing ring, the outer sealing groove is provided with an outer sealing ring, the coil groove is provided with a coil, and both ends of the coil pass through the bottom of the ultrafast gas valve base and are used to be connected with a capacitor; the top of the ultrafast gas valve base is also provided with an annular gas storage cavity, the annular gas storage cavity is located between the inner sealing groove and the outer sealing groove, the bottom of the annular gas storage cavity is provided with an air intake channel connected thereto, and the air intake channel is used to be connected with an external air intake device; the motion component is located at the top of the inner sealing groove, the outer sealing groove, the coil groove and the annular gas storage cavity, and the motion component is used to close the annular gas storage cavity; the disc spring is located at the top of the motion component and is used to reset the motion component; the top of the disc spring is provided with a support member, and the support member is used to be connected with an inner electrode.

[0009] In a possible implementation, the lower outer edge of the disc spring contacts the top of the moving component, and the upper inner edge of the disc spring contacts the bottom of the support member.

[0010] In some feasible embodiments, a pressure gasket is further provided between the disc spring and the support member, and the pressure gasket is used to adjust the initial load of the disc spring; and / or an isolation pressure plate is further provided between the coil slot and the moving component.

[0011] In a feasible implementation manner, a temperature measuring groove is further provided at the bottom of the ultrafast gas valve base, the temperature measuring groove is located below the coil groove, and a temperature sensor is provided in the temperature measuring groove.

[0012] In some feasible embodiments, the switching time of the motion component is less than 100μs; and / or the stroke of the motion component is 0.2-1.5mm, and the air intake volume achieved by the motion component switching once is 1.0-5.0mg; and / or the current instantaneously generated in the coil is 8-12kA, and the repulsive force of the magnetic field instantaneously generated in the coil is greater than 10kN; and / or the stiffness coefficient of the disc spring is greater than 5000N / mm; and / or the yield strength of the disc spring is greater than 1000Mpa; and / or the material of the motion component is any one of a metal alloy, a composite structure between metal alloys, or a composite structure between a metal alloy and a non-metallic alloy; and / or the electrical conductivity of the motion component is 17.7MS / m-20.6MS / m; and / or the outer The diameter of the coil is 90-110 mm, the inner diameter is 70-80 mm, the thickness is 0.5-2.0 mm, and the mass is 20-50 g; and / or, the number of turns of the coil is 2-6 turns, the outer diameter of the coil is 90-110 mm, and the extension length of both ends of the coil is 180-220 mm; and / or, the material of the coil is an enameled copper coil; and / or, the withstand voltage of the coil is greater than 6 kV; and / or, the wire diameter of the coil is 1.0-2.0 mm; and / or, the diameter of the air inlet channel is 4-8 mm, and the number of the air inlet channels is 1-3; and / or, the materials of the inner sealing ring and the outer sealing ring are both fluororubber; and / or, the material of the ultrafast air valve is PEEK; and / or, the diameter of the outer sealing ring is 1-5 mm; and / or, the diameter of the inner sealing ring is 1-3 mm.

[0013] In some feasible embodiments, the thickness of the isolation pressure plate is 0.5-1.5 mm; and / or, the outer diameter of the isolation pressure plate is 90-110 mm; and / or, the material of the isolation pressure plate is fluororubber; and / or, the material of the pressure gasket is metal; and / or, the temperature measuring bath is provided with M5-M7 internal threads; and / or, the tolerance of the connecting wire of the temperature sensor is >6kV; and / or, the temperature sensor is connected to the temperature measuring bath by thermal conductive glue; and / or, the model of the temperature sensor is Pt100 platinum resistor.

[0014] In a feasible implementation manner, a capacitor is further included, wherein the capacitor includes a sub-capacitor and a thyristor connected to each other, the capacitor is located below the ultrafast gas valve base, and the two ends of the coil are respectively connected to the sub-capacitor and the thyristor.

[0015] In some feasible embodiments, the capacitor includes 6 to 10 interconnected capacitors, the capacitance value of each sub-capacitor is 5 to 10 μF, and the capacitance value of the capacitor is 60 to 80 μF; and / or the withstand voltage value of the thyristor is greater than 3 kV, and the maximum withstand current value of the thyristor is greater than 10 kA; and / or the current rise time of the thyristor is less than 20 μs; and / or the number of the air intake slots is 40 to 120.

[0016] The present invention also provides a method for using an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, comprising the following steps:

[0017] Step 1) The coil is energized and generates a magnetic field. The repulsive force of the magnetic field pushes the moving component upward, and the neutral gas flows out of the annular gas storage chamber;

[0018] Step 2) The disc spring presses the moving component downward, and the moving component closes the annular air storage chamber.

[0019] The present invention also provides an application of an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun in a plasma gun.

[0020] The present invention provides an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, which has the following beneficial effects: the repulsive force of the magnetic field generated when the coil in the present invention is energized can push the moving component upward, and the disc spring can press the moving component downward after the moving component is pushed upward. The switching time of the ultrafast gas valve can be controlled within <100 μs, and the air intake within one switching time can be maintained at 1.0 to 5.0 mg. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional view of the overall structure of the first embodiment of the present invention.

[0022] Figure 2 It is a partial structural cross-sectional view of the first embodiment of the present invention.

[0023] Reference numerals

[0024] Ultrafast air valve base 1

[0025] Inner seal ring 11

[0026] Inner seal groove 11.1

[0027] Outer seal ring 12

[0028] External sealing groove 12.1

[0029] Coil 13

[0030] Coil slot 13.1

[0031] Isolation plate 13.2

[0032] Annular air storage chamber 14

[0033] Intake channel 14.1

[0034] Temperature bath 14.2

[0035] Disc spring 2

[0036] Motion Component 3

[0037] Support 4

[0038] Pressure gasket 5

[0039] Temperature sensor 6

[0040] Inner electrode 7

[0041] Mounting slot 71

[0042] Air intake slot 72

[0043] External electrode 8

[0044] Capacitor 9

[0045] Capacitor 91

[0046] Thyristor 92

[0047] Gap channel Gc DETAILED DESCRIPTION

[0048] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without creative work belong to the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0049] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] Furthermore, in the description of the present invention, unless otherwise specified, “plurality” means two or more.

[0051] The embodiment of the present invention provides an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun. Figure 1 and Figure 2 , including an ultrafast air valve base 1, a disc spring 2 and a motion component 3, wherein the motion component 3 can generally be an annular flying disc; the top of the ultrafast air valve base 1 is provided with an inner sealing groove 11.1, an outer sealing groove 12.1 and a coil groove 13.1 from the inside to the outside, which can be understood as starting from the central axis of the ultrafast air valve base 1 and going outward in sequence, the inner sealing groove 11.1, the outer sealing groove 12.1 and the coil groove 13.1 are all annular grooves, the inner sealing groove 11.1 is provided with an inner sealing ring 11, the outer sealing groove 12.1 is provided with an outer sealing ring 12, the coil groove 13.1 is provided with a coil 13, both ends of the coil 13 pass through the bottom of the ultrafast air valve base 1 and are used to be connected to the capacitor 9, and the coil 13 is generally wound by a wire body, so the coil 13 After the two ends are connected to the external capacitor 9, the coil 13 can form a loop; the top of the ultrafast air valve base 1 is also provided with an annular air storage chamber 14, and the annular air storage chamber 14 is located between the inner sealing groove 11.1 and the outer sealing groove 12.1. The bottom of the annular air storage chamber 14 is provided with an air intake channel 14.1 connected thereto, and the air intake channel 14.1 is used to communicate with an external air intake device; the moving component 3 is located at the top of the inner sealing groove 11.1, the outer sealing groove 12.1, the coil groove 13.1 and the annular air storage chamber 14, and the moving component 3 is used to close the annular air storage chamber 14; the disc spring 2 is located at the top of the moving component 3, and is used to reset the moving component 3; the top of the disc spring 2 is provided with a support member 4, and the support member 4 is used to connect with the inner electrode 7.

[0052] The moving component 3 in the present invention has two states. The first state is the state maintained by the moving component 3 when no air is taken in. In this state, the moving component 3 is firmly pressed against the coil 13, the inner sealing ring 11 and the outer sealing ring 12 by the disc spring 2. At the same time, because the inner sealing ring 11 and the outer sealing ring 12 are respectively located on both sides of the annular air storage chamber 14, the moving component 3 can close the top of the annular air storage chamber 14 in this state, so that the neutral gas can only be temporarily retained in the annular air storage chamber 14. Generally speaking, the external air intake device continuously introduces neutral gas into the annular air storage chamber 14 to maintain the high pressure state in the annular air storage chamber 14, so as to facilitate the subsequent outflow of the neutral gas. When the plasma gun is fed with gas by the present invention, the moving component 3 is instantly pushed upward, so that the gas in the annular gas storage chamber 14 can flow out from the top of the annular gas storage chamber 14, pass over the top of the inner sealing ring 11 and the top of the coil 13, and then flow out from the ultrafast gas valve base 1 and flow into the plasma channel between the inner electrode 7 and the outer electrode 8. The force for pushing the moving component 3 upward is provided by the coil 13. After the external capacitor 9 is energized to the coil 13, 8 to 12 kA will be instantly generated in the coil 13. The repulsive force of the magnetic field instantaneously generated in the coil 13 is greater than 10 kN, and the repulsive force of the magnetic field will push the moving component 3 upward by 0.2 to 1.5 mm within a time of less than 50 μs, and the gas retained in the annular air storage chamber 14 will quickly escape from the ultra-fast air valve base 1 at this time, and then the external capacitor 9 stops energizing the coil 13, and the disc spring 2 presses the moving component 3 firmly against the coil 13, the inner sealing ring 11 and the outer sealing ring 12 again, thereby closing the annular air storage chamber 14 again. Such a movement of the moving component 3 constitutes a switch of the ultrafast air valve. The intake amount of neutral gas during one switch time of the ultrafast air valve can reach 1.0-5.0 mg. In addition, the stiffness coefficient of the disc spring 2 is greater than 5000 N / mm, and the yield strength is greater than 1000 MPa. Usually, the disc spring 2 can be made of metal material to ensure that the stiffness coefficient and yield strength meet the standards, so that the disc spring 2 can press the moving component 3 downward within a time of less than 50 μs. The metal is preferably 51CrV4, which has a yield strength of greater than 1000 MPa and excellent performance.

[0053] To sum up, the switching time of the ultrafast air valve should be the sum of the time when the moving component 3 is pushed upward and the time when the moving component 3 is pressed downward. Therefore, the moving component 3 in the ultrafast air valve provided by the present invention can be pushed upward within a time of <50μs and pressed downward within a time of <50μs. The switching time in the ultrafast air valve can be controlled within <100μs, and the air intake volume within one switching time can be maintained at 1.0~5.0mg.

[0054] In some feasible embodiments of the motion component 3, the material of the motion component 3 is any one of a metal alloy, a composite structure between metal alloys, or a composite structure between a metal alloy and a non-metallic alloy. The outer diameter of the motion component 3 is 90-110 mm, the inner diameter is 70-80 mm, the thickness is 0.5-2.0 mm, and the mass is 20-50 g. In a specific embodiment of the motion component 3, in order to meet the requirements of light weight, high conductivity and high strength, the material of the motion component 3 is preferably 7075 aluminum alloy, and is formed by bar cutting, so that the isotropy of the material itself can be better guaranteed. The outer diameter of the motion component 3 is 108 mm, the inner diameter is 72 mm, the thickness is 1.5 mm, and the mass is about 20 g.

[0055] In some feasible embodiments of the coil 13, the number of turns of the coil 13 is 2 to 6, the outer diameter of the coil 13 is 90 to 110 mm, the extension lengths at both ends of the coil 13 are 180 to 220 mm, the withstand voltage of the coil 13 is greater than 6 kV, and the wire diameter of the coil 13 is 1.0 to 2.0 mm. In a specific embodiment of the coil 13, the material of the coil 13 is an enameled copper coil, the withstand voltage of the coil 13 is greater than 6 kV, the wire diameter of the coil 13 is 1.2 mm, the number of turns of the coil 13 is 4, the outer diameter of the coil 13 is about 108 mm, and the coil 13 is wound on a special winding tool, and the extension lengths at both ends of the coil 13 are about 200 mm.

[0056] In some feasible embodiments of the ultrafast gas valve, the diameter of the outer sealing ring 12 is 1-5 mm, the diameter of the inner sealing ring 11 is 1-3 mm, the diameter of the air inlet channel 14.1 is 4-8 mm, and the number of the air inlet channels 14.1 is 1-3. In a specific embodiment of the ultrafast gas valve, the material of the ultrafast gas valve is PEEK, the inner sealing ring 11 and the outer sealing ring 12 are both made of fluororubber, which is widely used in vacuum equipment, the diameter of the outer sealing ring 12 is 4 mm, the diameter of the inner sealing ring 11 is 2 mm, and the diameter of the outer sealing ring 12 is larger than the diameter of the inner sealing ring 11, which can slow down the damage to the sealing ring material during plasma backflow, thereby increasing the service life of the outer sealing ring 12 and the inner sealing ring 11, the diameter of the air inlet channel 14.1 is 6 mm, the number is 2, and the joint adopts M6 thread.

[0057] In the ultrafast gas valve with a switching time of less than 100 microseconds applicable to a plasma gun provided in the embodiment of the present invention, in combination with reference to Figure 1 and Figure 2 , please refer to Figure 2, the lower outer edge of the disc spring 2 is in contact with the top of the moving component 3, and the upper inner edge of the disc spring 2 is in contact with the bottom of the support member 4. It can be understood that the lower outer edge of the disc spring 2 is the outer edge of the disc spring 2, and the upper inner edge of the disc spring 2 is the inner edge of the disc spring 2. The lower outer edge and the upper inner edge of the disc spring 2 are both key parts of load transmission and stress distribution. In the present invention, the lower outer edge of the disc spring 2 is in contact with the top of the moving component 3, and the upper inner edge of the disc spring 2 is in contact with the bottom of the support member 4, which can press the moving component 3 downward within a time of <50μs. In addition, the disc spring 2 is usually designed with a dedicated connection hole for mechanical connection with the support member 4. In a specific embodiment, in combination with reference to Figure 1 and Figure 2 A pressure gasket 5 is also provided between the disc spring 2 and the support member 4. The pressure gasket 5 is used to adjust the initial load of the disc spring 2. It can be understood that the upper inner edge of the disc spring 2 is in contact with the bottom of the support member 4, and the support member 4 is usually fixedly connected to the inner electrode 7. Therefore, by adjusting the thickness of the pressure gasket 5, the initial load of the disc spring 2 can be adjusted. When the thickness of the pressure gasket 5 is large, the initial compression of the disc spring 2 by the pressure gasket 5 is large, and the initial load is large; when the thickness of the pressure gasket 5 is small, the initial compression of the disc spring 2 by the pressure gasket 5 is small, and the initial compression of the disc spring 2 is small, and the initial load is small. By changing the initial compression, the intake volume of the neutral gas and the switching time of the ultra-fast valve can be adjusted. In addition, the material of the pressure gasket 5 is metal, preferably 304 stainless steel. In another specific embodiment, in combination with reference to Figure 1 and Figure 2 , see Figure 2 An isolation plate 13.2 is also provided between the coil slot 13.1 and the moving component 3. The isolation plate 13.2 can, on the one hand, serve as insulation between the coil 13 and the moving component 3, and on the other hand, can serve as a buffer and shock absorber to prevent the moving component 3 from hitting the coil 13 during the resetting process, thereby effectively preventing the coil 13 from being damaged. In some feasible embodiments of the isolation plate 13.2, the thickness of the isolation plate 13.2 is 0.5 to 1.5 mm, and the outer diameter of the isolation plate 13.2 is 90 to 110 mm. In a specific embodiment of the isolation plate 13.2, the thickness of the isolation plate 13.2 is 1 mm, the outer diameter of the isolation plate 13.2 is 108 mm, and the material of the isolation plate 13.2 is fluororubber.

[0058] In the ultrafast gas valve with a switching time of less than 100 microseconds applicable to a plasma gun provided in an embodiment of the present invention, refer to Figure 1A temperature measuring groove 14.2 is also provided at the bottom of the ultrafast gas valve base 1. The temperature measuring groove 14.2 is located below the coil groove 13.1. A temperature sensor 6 is provided in the temperature measuring groove 14.2. It can be understood that the function of the temperature sensor 6 is to monitor the temperature of the ultrafast gas valve base 1 in real time. During the emission process of the plasma gun, a certain amount of heat will be generated on the coil 13 and related components, and a part of the heat will be generated on the inner and outer electrodes 8. Both parts of the heat will be transferred to the ultrafast gas valve base 1 to cause the temperature to rise, so as to understand whether its working state is within the allowable range. In a specific embodiment, the temperature sensor 6 uses a Pt100 platinum resistor as a temperature sensing element, with Class A accuracy, and the head is installed in the temperature measuring tank 14.2 through a special M6-sized threaded plug. The inner wall of the temperature measuring tank 14.2 is designed with an M6-sized internal thread, which is matched with the M6 ​​threaded plug for installation. At the same time, the interior of the temperature measuring tank 14.2 is coated with a thermal conductive gel to ensure good contact between the temperature probe of the temperature sensor 6 and the ultrafast valve base 1 (usually made of PEEK). As an illustration, the platinum resistor connecting wire uses an insulating layer that can withstand more than 6kV to ensure that it is not broken down under high voltage, and the insulating layer can use a PU (polyurethane) sleeve.

[0059] In the ultrafast gas valve with a switching time of less than 100 microseconds applicable to a plasma gun provided in an embodiment of the present invention, refer to Figure 1 , and also includes a capacitor 9, the capacitor 9 includes a sub-capacitor 91 and a thyristor 92 connected to each other, the capacitor 9 is located below the ultrafast valve base 1, and the two ends of the coil 13 are respectively connected to the sub-capacitor 91 and the thyristor 92. It can be understood that the sub-capacitor 91 is used to provide voltage and current, and the thyristor 92 is used to achieve rapid conduction and reach peak current after receiving an external trigger signal, so as to achieve rapid discharge of the capacitor 9. In some feasible embodiments, the capacitor 9 includes 6 to 10 sub-capacitors 91 connected to each other, the capacitance value of the capacitor 9 is 72μF, the capacitance value of each sub-capacitor 91 is 5 to 10μF, the withstand voltage value of the thyristor 92 is greater than 3kV, the maximum withstand current value of the thyristor 92 is greater than 10kA, and the current rise time of the thyristor 92 is less than 20μs. In a specific embodiment, the capacitor 9 includes 8 sub-capacitors 91, the capacitance value of each sub-capacitor 91 is 9μF, and the capacitance value of the capacitor 9 is 72μF.

[0060] The present invention also provides a method for using an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, comprising the following steps:

[0061] Step 1) The coil 13 is energized and generates a magnetic field, the repulsive force of the magnetic field pushes the moving component 3 upward, and the neutral gas flows out of the annular gas storage chamber 14. Further, the capacitor 9 is discharged quickly, the current rising edge time of the thyristor 92 is less than 20μs, and the moving component 3 is pushed upward within a time of less than 50μs.

[0062] Step 2) The disc spring 2 presses the moving component 3 downward, and the moving component 3 closes the annular air storage chamber 14. Further, the moving component 3 is pressed downward within a time of <50 μs.

[0063] The present invention also provides a use of an ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, wherein Figure 1 , can be used as an auxiliary reference Figure 1 and Figure 2 , comprising an inner electrode 7, an outer electrode 8 and an ultrafast gas valve with a switching time of <100μs suitable for a plasma gun, a gap channel Gc is formed between the inner electrode 7 and the outer electrode 8, a mounting groove 71 is provided at the bottom of the inner electrode 7, and the ultrafast gas valve is arranged in the mounting groove 71; the top of the support member 4 is connected to the inner top surface of the gas valve groove, and a plurality of air inlet grooves 72 are provided in the side wall of the inner electrode 7, the air inlet end of the air inlet groove 72 is connected to the mounting groove 71, and the air outlet end of the air inlet groove 72 is connected to the gap channel Gc; the air inlet end of the air inlet groove 72 is aligned with the motion component 3. When the moving component 3 is pushed upward, the air intake groove 72 is connected to the annular air storage chamber 14, and the neutral gas can escape from the annular air storage chamber 14, pass over the top of the outer sealing ring 12 and the top of the coil 13 into the air intake groove 72, and then enter the annular air storage chamber 14 from the air intake groove 72, thereby achieving one-time air intake.

[0064] Embodiment 1

[0065] In this embodiment: the material of the coil 13 is an enameled copper coil 13, the withstand voltage of the coil 13 is greater than 6kV, the wire diameter of the coil 13 is 1.2mm, the number of turns of the coil 13 is 4, the outer diameter of the coil 13 is about 108mm, the extension lengths of both ends of the coil 13 are about 200mm, the instantaneous current generated in the coil 13 is 8-12kA, and the repulsive force of the magnetic field instantaneously generated in the coil 13 is greater than 10kN. The lower outer edge of the disc spring 2 contacts the top of the moving component 3, the upper inner edge of the disc spring 2 contacts the bottom of the support 4, the material of the disc spring 2 is 51CrV4, the stiffness coefficient of the disc spring 2 is greater than 5000N / mm, and the yield strength of the disc spring 2 is greater than 1000Mpa. The material of the moving component 3 is 7075 aluminum alloy, the thickness is 1.5mm, and the mass is about 20g. The capacitor 9 is composed of 8 sub-capacitors 91, each sub-capacitor 91 has a capacitance value of 9μF, the capacitance value of the capacitor 9 is 72μF, the withstand voltage value of the thyristor 92 is greater than 3kV, the maximum withstand current value of the thyristor 92 is greater than 10kA, and the current rise time of the thyristor 92 is less than 20μs. In summary, the switching time of the ultra-fast gas valve provided by the present invention is less than 100μs, and the intake volume within one switching time can be maintained at 1.0-5.0mg.

[0066] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. An ultrafast gas valve with a switching time of less than 100 microseconds suitable for a plasma gun, characterized in that: It comprises an ultra-fast air valve base (1), a disc spring (2) and a motion component (3); The top of the ultrafast air valve base (1) is provided with an inner sealing groove (11.1), an outer sealing groove (12.1) and a coil groove (13.1) from the inside to the outside, the inner sealing groove (11.1) is provided with an inner sealing ring (11), the outer sealing groove (12.1) is provided with an outer sealing ring (12), the coil groove (13.1) is provided with a coil (13), and both ends of the coil (13) pass through the bottom of the ultrafast air valve base (1) and are used to be connected to the capacitor; the top of the ultrafast air valve base (1) is also provided with an annular air storage cavity (14), the annular air storage cavity (14) is located between the inner sealing groove (11.1) and the outer sealing groove (12.1), and the bottom of the annular air storage cavity (14) is provided with an air intake channel (14.1) connected thereto, and the air intake channel (14.1) is used to be connected to an external air intake device; The moving component (3) is located at the top of the inner sealing groove (11.1), the outer sealing groove (12.1), the coil groove (13.1) and the annular air storage cavity (14), and the moving component (3) is used to close the annular air storage cavity (14); the disc spring (2) is located at the top of the moving component (3) and is used to reset the moving component (3); A support member (4) is provided on the top of the disc spring (2), and the support member (4) is used to be connected to the inner electrode.

2. The ultrafast gas valve according to claim 1, characterized in that: The lower outer edge of the disc spring (2) contacts the top of the moving component (3), and the upper inner edge of the disc spring (2) contacts the bottom of the support member (4).

3. The ultrafast gas valve according to claim 1, characterized in that: A pressure gasket (5) is also provided between the disc spring (2) and the support member (4), and the pressure gasket (5) is used to adjust the initial load of the disc spring (2); and / or an isolation pressure plate (13.2) is also provided between the coil slot (13.1) and the moving component (3).

4. The ultrafast gas valve according to claim 3, characterized in that: A temperature measuring groove (61) is also provided at the bottom of the ultrafast gas valve base (1). The temperature measuring groove (61) is located below the coil groove (13.1). A temperature sensor (6) is provided in the temperature measuring groove (61).

5. The ultrafast gas valve according to claim 1, characterized in that: The switching time of the motion component (3) is less than 100 μs; And / or, the stroke of the motion component (3) is 0.2 to 1.5 mm, and the air intake amount achieved by switching the motion component (3) once is 1.0 to 5.0 mg; and / or, the current instantaneously generated in the coil (13) is 8 to 12 kA, and the repulsive force of the magnetic field instantaneously generated in the coil (13) is greater than 10 kN; and / or, the stiffness coefficient of the disc spring (2) is greater than 5000 N / mm; and / or the yield strength of the disc spring (2) is greater than 1000 MPa; And / or, the material of the motion component (3) is any one of a metal alloy, a composite structure of metal alloys, or a composite structure of a metal alloy and a non-metallic alloy; and / or, the conductivity of the motion component (3) is 17.7MS / m to 20.6MS / m; And / or, the outer diameter of the motion component (3) is 90 to 110 mm, the inner diameter is 70 to 80 mm, the thickness is 0.5 to 2.0 mm, and the mass is 20 to 50 g; And / or, the number of turns of the coil (13) is 2 to 6, the outer diameter of the coil (13) is 90 to 110 mm, and the extension lengths of both ends of the coil (13) are 180 to 220 mm; And / or, the material of the coil (13) is an enameled copper coil; And / or, the coil (13) has a withstand voltage of >6 kV; And / or, the wire diameter of the coil (13) is 1.0 to 2.0 mm; And / or, the diameter of the air inlet channel (14.1) is 4 to 8 mm, and the number of the air inlet channels (14.1) is 1 to 3; And / or, the inner sealing ring (11) and the outer sealing ring (12) are both made of fluororubber; and / or, the ultrafast gas valve is made of PEEK; and / or, the diameter of the outer sealing ring (12) is 1 to 5 mm; And / or, the diameter of the inner sealing ring (11) is 1 to 3 mm.

6. The ultrafast gas valve according to claim 4, characterized in that: The thickness of the isolation pressing plate (13.2) is 0.5 to 1.5 mm; And / or, the outer diameter of the isolation pressing plate (13.2) is 90 to 110 mm; And / or, the material of the isolation pressing plate (13.2) is fluororubber; And / or, the pressure gasket (5) is made of metal; And / or, the temperature measuring tank (61) is provided with an internal thread of M5 to M7; And / or, the connection line of the temperature sensor (6) has a tolerance greater than 6 kV; And / or, the temperature sensor (6) and the temperature measuring tank (14.2) are connected via a thermally conductive adhesive; And / or, the model of the temperature sensor (6) is a Pt100 platinum resistor.

7. The ultrafast gas valve according to claim 1, characterized in that: It also comprises a capacitor (9), the capacitor (9) comprising a sub-capacitor (91) and a thyristor (92) connected to each other, the capacitor (9) being located below the ultrafast gas valve base (1), and the two ends of the coil (13) being respectively connected to the sub-capacitor (91) and the thyristor (92).

8. The ultrafast gas valve according to claim 7, characterized in that: The capacitor (9) comprises 6 to 10 interconnected sub-capacitors (91), the capacitance value of each sub-capacitor (91) is 5 to 10 μF, and the capacitance value of the capacitor (9) is 60 to 80 μF; And / or, the withstand voltage value of the thyristor (92) is greater than 3 kV, and the maximum withstand current value of the thyristor (92) is greater than 10 kA; And / or, the current rising edge time of the thyristor (92) is less than 20 μs.

9. A method for using an ultrafast gas valve with a switching time of <100 μs suitable for a plasma gun as claimed in any one of claims 1 to 8, characterized in that: The steps include: Step 1) The coil (13) is energized and generates a magnetic field, the repulsive force of the magnetic field pushes the moving component (3) upward, and the neutral gas flows out of the annular gas storage chamber (14); Step 2) The disc spring (2) presses the moving component (3) downward, and the moving component (3) closes the annular air storage chamber (14).

10. Use of the ultrafast gas valve with a switching time of <100 μs suitable for a plasma gun as claimed in claims 1 to 8 in a plasma gun.

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