Tool clamp for clamping and sintering silicon carbide vertical boat

Abstract

The invention relates to the field of silicon carbide product processing, in particular to a tool clamp for silicon carbide vertical boat clamping sintering, which comprises a tool seat, two U-shaped support plates, a clamping mechanism and a heat conducting mechanism, and the two U-shaped support plates are fixedly mounted on the upper side of the tool seat and are arranged in bilateral symmetry. Through cooperation of the driving assembly and the linkage assembly, an operator only needs to push the handle rod to achieve movement of the limiting block, meanwhile, the linkage assembly is driven by the driving assembly to synchronously drive the blocking plate to rotate, and limiting fixing or releasing of limiting fixing of the silicon carbide vertical boat is completed; compared with a traditional mode that a threaded pressing plate needs to be locked point by point, the clamping steps are greatly simplified, and the efficiency is remarkably improved; the stand columns of the silicon carbide vertical boat are arranged in the middle in the clamping grooves, the shielded area of the silicon carbide vertical boat is effectively reduced, meanwhile, heat flow is guided to the shielded area of the silicon carbide vertical boat in a centralized mode through the first heat gathering piece and the second heat gathering piece, the local temperature difference is effectively reduced, and the sintering uniformity is further improved.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide product processing, in particular to a tooling fixture used for vertical boat-mounted sintering of silicon carbide. Background Art

[0002] Silicon carbide vertical boat is a load-bearing device, such as Figure 8 As shown, it is widely used in the production process of semiconductors, ceramic materials and other fields. The silicon carbide vertical boat obtains excellent heat resistance and structural stability through the sintering process. During the sintering process, the clamping and fixing method of the silicon carbide vertical boat will directly affect the sintering effect of the workpiece.

[0003] At present, the clamping and fixing of the silicon carbide vertical boat mainly adopts a mechanical structure in which a threaded pressure plate and a vertical plate cooperate. Specifically, the operator needs to manually tighten the bolts so that the pressure plate and the vertical plate can clamp the silicon carbide vertical boat together to achieve the positioning and fixing of the silicon carbide vertical boat.

[0004] Although the clamping method of the above-mentioned existing tooling fixture can provide a basic limiting function, it relies on multiple sets of threaded pairs to lock the pressure plate point by point, and cannot achieve single-action linkage control. The clamping steps are cumbersome, resulting in low clamping efficiency, making it difficult to adapt to the rapid operation requirements of mass production, and it is easy to cause loose clamping due to operational errors in tightening the bolts.

[0005] In addition, the above-mentioned existing tooling and fixtures are not designed with a heat conduction optimization solution for the parts of the silicon carbide vertical boat that are blocked by the pressure plate and the vertical plate, resulting in poor contact between the parts of the silicon carbide vertical boat that are blocked by the pressure plate and the vertical plate and the heat source, which in turn causes uneven heat distribution of the silicon carbide vertical boat during sintering, affecting the sintering quality.

[0006] In summary, the traditional threaded pressure plate structure is difficult to meet the process requirements of rapid assembly and disassembly, and there is a problem of affecting heat distribution. Therefore, there is an urgent need for a tooling fixture that integrates rapid clamping and directional heat conduction to improve production efficiency and product sintering consistency. Summary of the invention

[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is: a jig for sintering a vertical boat of silicon carbide, comprising a jig seat and two symmetrically arranged C-shaped support plates fixedly installed on its upper side, the jig also comprising: a clamping mechanism and a heat conduction mechanism; the clamping mechanism comprises a guide shaft, a driving assembly, two rotating rods and a linkage assembly. The guide shaft is movably arranged in the vertical section of the C-shaped support plate, a limit block is fixedly installed on the upper side of the guide shaft, and a clamping groove for the column of the vertical boat to penetrate is provided on the upper side of the vertical section of the C-shaped support plate, the middle part of the horizontal section, and the lower side of the limit block. The two rotating rods are symmetrically arranged on the horizontal section of the C-shaped support plate and are rotatably arranged, and a blocking plate is fixedly installed on the upper end of one of the rotating rods.

[0008] The driving assembly moves the limit block to engage with the vertical section of the U-shaped support plate and fix the corresponding column of the vertical boat, and the driving assembly cooperates with the linkage assembly to rotate and reverse the blocking plate and fix the corresponding column of the vertical boat.

[0009] The heat conduction mechanism comprises a plurality of supporting pins for arranging the upright column in the center of the slot, and a first heat collecting member and a second heat collecting member for concentrating the heat flow into the slot.

[0010] Preferably, the driving assembly includes two track grooves arranged at equal intervals along the circumference of the guide shaft on its outer ring wall, two raised columns sliding in the corresponding track grooves are fixedly installed inside the vertical section of the C-shaped support plate, a pushing tube is provided on the movable sleeve on the lower side of the guide shaft, and a guide groove is arranged on the outer ring wall on the lower side of the guide shaft, and the pushing tube slides in the guide groove through a protrusion fixedly installed inside it.

[0011] Preferably, the track groove is composed of two upper and lower vertical sections staggered at 90 degrees and an arc section connected between the vertical sections, and the guide groove is composed of two upper and lower diametrically opposed annular sections and a vertical section connected between the annular sections. The annular section of the guide groove is coaxial with the guide shaft and the pushing tube, and a handle rod is fixedly installed on the outside of the pushing tube.

[0012] Preferably, a rotation locking rod is rotatably arranged inside the vertical section of the C-shaped support plate, and two symmetrically arranged positioning blocks located above the C-shaped support plate are fixedly installed on the upper side of the rotation locking rod, and a fixed pipe is fixedly installed on the position of the limit block corresponding to the rotation locking rod.

[0013] Preferably, two sliding grooves for sliding the positioning block are provided at equal intervals on the inner side surface of the fixed pipe along its circumferential direction, and the sliding groove is an L-shaped structure with the vertical section at the bottom and the horizontal section at the top.

[0014] Preferably, a connecting support plate is rotatably provided on the outer side of the pushing tube, and the connecting support plate drives the rotation locking rod to rotate through the gear rack transmission structure and the worm gear transmission structure.

[0015] Preferably, the linkage assembly corresponds one-to-one to the rotating rod; the linkage assembly includes a linkage rod that is slidably arranged inside the guide shaft and is rotatably connected to the C-shaped support plate, and crank plates are fixedly installed on the lower outer ring walls of the linkage rod and the corresponding rotating rod, and a connecting rod is hinged between the crank plates at two corresponding positions.

[0016] Preferably, a linkage locking rod is fixedly installed on the upper end of the rotating rod on the rear side, and a locking groove for the linkage locking rod to move is opened on the blocking plate; the locking groove is composed of an arc segment structure and a fan-shaped segment structure, and the linkage locking rod is an L-shaped structure. After the rear rotating rod drives the linkage locking rod to rotate, the horizontal section of the linkage locking rod is blocked in the fan-shaped segment of the locking groove, so that the position of the blocking plate is locked.

[0017] Preferably, the heat conduction mechanism also includes a bushing assembly; the bushing assembly includes a No. 1 lining plate member arranged in a positioning groove on the vertical section of the C-shaped support plate and the limit block, a No. 2 lining plate member is arranged in the positioning groove of the horizontal section of the C-shaped support plate, the No. 1 heat collecting member is fixedly connected to the left and right sides of the No. 1 lining plate member, the No. 2 heat collecting member is fixedly connected to the left and right sides of the No. 2 lining plate member, and a plurality of supporting nails are fixedly installed on the inner sides of the No. 1 lining plate member and the No. 2 lining plate member.

[0018] The beneficial effects of the present invention are as follows: 1. The present invention cooperates with the driving component and the linkage component, and the operator only needs to push the handle rod to realize the movement of the limit block. At the same time, the driving component drives the linkage component to synchronously drive the blocking plate to rotate, thereby completing the limit fixation or release of the limit fixation of the silicon carbide vertical boat. Compared with the traditional threaded pressure plate that needs to be locked point by point, the clamping steps are greatly simplified and the efficiency is significantly improved.

[0019] 2. After the limit block is moved by the driving component of the present invention, the limit block can be automatically locked when the limit block is pressed into place through the cooperation of the locking rod, the locking block and the sliding groove, thereby avoiding manual adjustment errors and ensuring clamping stability. The movement and locking of the limit block are completed continuously, which further simplifies the clamping steps and improves the clamping efficiency.

[0020] 3. With the cooperation of the driving assembly and the linkage assembly, the present invention completes the movement of the front limit block and the blocking plate by moving the front handle rod, and completes the movement of the rear limit block and the locking rod by moving the rear handle rod, so that the linkage locking rod blocks and locks the blocking plate, thereby eliminating the need to lock the blocking plate separately, further simplifying the clamping steps.

[0021] Fourth, the present invention arranges the column of the silicon carbide vertical boat in the center of the positioning groove, effectively reducing the area of ​​the silicon carbide vertical boat being blocked. At the same time, the heat flow is concentratedly guided to the blocked area of ​​the silicon carbide vertical boat through the first heat collecting member and the second heat collecting member, effectively reducing the local temperature difference, further increasing the sintering uniformity, and improving the sintering quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention when clamping a silicon carbide vertical boat.

[0024] Figure 2 It is a structural schematic diagram of the U-shaped support plate, the clamping mechanism and the heat conducting mechanism in the present invention.

[0025] Figure 3 It is a partial cross-sectional view of the U-shaped support plate and the driving assembly in the present invention.

[0026] Figure 4 It is a partial cross-sectional view of the guide shaft and the pushing pipe member in the present invention.

[0027] Figure 5 It is a partial cross-sectional view of the present invention when the rotation locking rod and the fixed pipe are not connected together.

[0028] Figure 6 It is a partial cross-sectional view of the U-shaped support plate, the blocking plate, the rotating rod and the linkage assembly in the present invention.

[0029] Figure 7 It is a structural schematic diagram of a No. 1 heat collecting member, a No. 1 lining member and a supporting nail in the present invention.

[0030] Figure 8 It is a schematic diagram of the structure of a silicon carbide vertical boat.

[0031] In the figure: 1, tooling seat; 2, U-shaped support plate; 3, clamping mechanism; 4, heat conduction mechanism; 31, guide shaft; 32, limit block; 33, drive assembly; 34, rotating rod; 35, blocking plate; 36, linkage assembly; 37, rotating locking rod; 38, connecting support plate; 41, bushing assembly; 42, No. 1 heat collecting member; 43, No. 2 heat collecting member; 331, track groove; 332, raised column; 333, pushing pipe fitting; 334, guide groove; 335, handle rod; 336, limit groove; 361, linkage rod; 362, crank plate; 363, connecting rod member; 364, locking groove; 365, linkage locking rod; 371, blocking block; 372, fixed pipe fitting; 373, sliding groove; 411, No. 1 lining member; 412, supporting nail; 413, No. 2 lining member. DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described in detail below. The embodiments described below are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. If no specific techniques or conditions are specified in the embodiments, the techniques or conditions described in the literature in the art or the product specifications are used.

[0033] See also Figure 1 , Figure 2 and Figure 8 A tooling fixture for clamping and sintering a silicon carbide vertical boat comprises a tooling seat 1, on the upper side of which are fixedly mounted two left-right symmetrically arranged C-shaped support plates 2 for limiting support of the silicon carbide vertical boat, on which are arranged a clamping mechanism 3 for quickly clamping the silicon carbide vertical boat and a heat conduction mechanism 4 for conducting heat to a position of the silicon carbide vertical boat blocked by the C-shaped support plates 2.

[0034] When the silicon carbide vertical boat needs to be sintered, the silicon carbide vertical boat is first placed on the tooling seat 1 so that the columns on the silicon carbide vertical boat are placed on the C-shaped support plate 2. Then the operator quickly and conveniently fixes the silicon carbide vertical boat on the C-shaped support plate 2 through the clamping mechanism 3. Then the operator moves the silicon carbide vertical boat to the inside of the sintering furnace for sintering by moving the tooling seat 1. During sintering, the heat conduction mechanism 4 can concentrate and guide the heat flow to the area of ​​the silicon carbide vertical boat that is blocked by the C-shaped support plate 2, effectively reducing the local temperature difference and improving the sintering quality.

[0035] After sintering is completed, the operator releases the fixation of the silicon carbide vertical boat by reversely operating the clamping mechanism 3, and then clamps the new silicon carbide vertical boat on the fixture again, thereby continuously sintering the silicon carbide vertical boat.

[0036] See also Figure 1 , Figure 2 and Figure 3 The clamping mechanism 3 includes a guide shaft 31 movably arranged in the vertical section of the C-shaped support plate 2, and a limit block 32 located outside the C-shaped support plate 2 is fixedly installed on the upper side of the guide shaft 31. The clamping mechanism 3 also includes a driving component 33 for controlling the movement of the limit block 32. The upper side of the vertical section of the C-shaped support plate 2, the lower side of the limit block 32, and the middle part of the horizontal section of the C-shaped support plate 2 are all provided with a clamping groove for the column of the vertical boat to pass through.

[0037] In the initial state, the upper side surface of the guide shaft 31 is located above the C-shaped support plate 2, so that the guide shaft 31 drives the limit block 32 to be in a position upward and away from the C-shaped support plate 2, and the length direction of the limit block 32 is arranged vertically with the horizontal section of the C-shaped support plate 2 on the horizontal plane, so that the limit block 32 will not block the space above the vertical section of the C-shaped support plate 2. When clamping the silicon carbide vertical boat, the operator places the silicon carbide vertical boat inside the tooling seat 1, and places the three columns of the silicon carbide vertical boat into the corresponding positioning grooves at the same time.

[0038] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 The driving assembly 33 includes two track grooves 331 that are evenly spaced along the circumference of the guide shaft 31 and are arranged on its outer ring wall. Two protruding columns 332 that slide in the corresponding track grooves 331 are fixedly installed inside the vertical section of the U-shaped support plate 2. A pushing pipe 333 is movably sleeved on the lower side of the guide shaft 31. A guide groove 334 is opened on the outer ring wall of the lower side of the guide shaft 31. The pushing pipe 333 slides in the guide groove 334 through a protrusion fixedly installed inside it.

[0039] Continue reading Figure 1 , Figure 2 , Figure 3 and Figure 4The track groove 331 is composed of two upper and lower vertical sections staggered at 90 degrees and an arc section connected between the vertical sections. The guide groove 334 is composed of two upper and lower opposite annular sections and a vertical section connected between the annular sections. The annular section of the guide groove 334 is coaxial with the guide shaft 31 and the pushing tube 333. A handle rod 335 is fixedly installed on the outside of the pushing tube 333.

[0040] In the initial state, the push tube 333 drives the protrusion thereon to be located inside the annular section on the upper side of the guide groove 334, and the protrusion of the push tube 333 is staggered 90 degrees with the vertical section of the guide groove 334. Figure 8 ) are placed in the corresponding positioning slots at the same time, the operator manually moves the front handle rod 335 downward, the front handle rod 335 drives the front pushing tube 333 to move downward, and the front pushing tube 333 drives the guide shaft 31 to move downward synchronously through the protrusion thereon and the ring segment on the upper side of the guide slot 334.

[0041] The guide shaft 31 synchronously drives the limit block 32 thereon to move downward, and at the same time, the guide shaft 31 drives the track groove 331 thereon to move, so that the raised column 332 initially slides in the vertical section on the lower side of the corresponding track groove 331. When the arc section of the track groove 331 slides with the raised column 332, the guide shaft 31 will move downward while rotating ninety degrees, so that the guide shaft 31 drives the limit block 32 to rotate until its length direction is parallel to the horizontal section of the U-shaped support plate 2.

[0042] At this time, the guide shaft 31 drives the vertical section of the guide groove 334 thereon to rotate to correspond to the protrusion of the pushing tube 333, that is, the protrusion of the pushing tube 333 is located at the transition position between the vertical section of the guide groove 334 and the upper annular section. When the pushing tube 333 continues to move downward, the guide shaft 31 moves downward synchronously with the pushing tube 333 under the action of gravity, so that the raised column 332 slides in the vertical section on the lower side of the corresponding track groove 331, and finally the limit block 32 is clamped on the upper side of the corresponding vertical section of the C-shaped support plate 2, and the limit block 32 blocks and limits the column at the corresponding position of the silicon carbide vertical boat.

[0043] See also Figure 1 , Figure 2 and Figure 7The heat conducting mechanism 4 includes a first heat collecting member 42 and a second heat collecting member 43 which are detachably arranged on the U-shaped support plate 2 through a bushing assembly 41, and a support nail 412 for implementing multi-point resistance and limiting of the column of the vertical boat. The first heat collecting member 42 and the second heat collecting member 43 are both used to centrally guide the heat flow. The bushing assembly 41 includes a first lining member 411 and a second lining member 413. The vertical section of the U-shaped support plate 2 and the positioning groove on the limiting block 32 are both provided with a countersunk head. The No. 1 lining plate component 411 is fixedly installed by means of screw connection, and the No. 2 lining plate component 413 is fixedly installed in the positioning groove of the horizontal section of the U-shaped support plate 2 by means of countersunk screw connection. The No. 1 heat collecting component 42 is fixedly connected to the left and right sides of the No. 1 lining plate component 411, and the No. 2 heat collecting component 43 is fixedly connected to the left and right sides of the No. 2 lining plate component 413. A plurality of supporting nails 412 are fixedly installed on the inner sides of the No. 1 lining plate component 411 and the No. 2 lining plate component 413.

[0044] The operator pre-fixes the No. 1 lining plate piece 411 in the positioning groove on the vertical section of the C-shaped support plate 2 and the limit block 32 by means of countersunk screws, and at the same time fixes the No. 2 lining plate piece 413 in the positioning groove on the horizontal section of the C-shaped support plate 2 by means of countersunk screws. When the limit block 32 is clamped on the upper side of the corresponding vertical section of the C-shaped support plate 2, the limit block 32 drives the corresponding supporting pins 412 on the No. 1 lining plate piece 411 to contact and limit the corresponding column of the silicon carbide vertical boat. Similarly, the supporting pins 412 of the corresponding C-shaped support plate 2 also contact and limit the column of the silicon carbide vertical boat.

[0045] At the same time, the heat collecting piece 42 No. 1 on the limit block 32 is spliced ​​with the heat collecting piece 42 No. 1 on the C-shaped support plate 2 to form a funnel-shaped structure. The funnel-shaped structure can concentrate and guide the heat flow to the corresponding positioning groove. Under the interference and limitation of the supporting pin 412 on the column of the silicon carbide vertical boat, the column of the silicon carbide vertical boat is arranged centrally in the positioning groove. There are a lot of gaps between the No. 1 lining piece 411 and the No. 2 lining piece 413 and the corresponding column, so that the heat flow guided into the corresponding positioning groove can cover the blocked area of ​​the silicon carbide vertical boat, effectively reducing the local temperature difference and improving the sintering quality.

[0046] See also Figure 1 , Figure 2 and Figure 6 The clamping mechanism 3 also includes a rotating rod 34 and a linkage assembly 36 rotatably arranged on the horizontal section of the C-shaped support plate 2. The rotating rod 34 and the linkage assembly 36 are arranged symmetrically front to back. The upper end surface of the front rotating rod 34 passes through the horizontal section of the C-shaped support plate 2 and is fixedly installed with a blocking plate 35. The driving assembly 33 rotates the blocking plate 35 through the front linkage assembly 36.

[0047] See also Figure 1 , Figure 2 , Figure 3 and Figure 6 The linkage assembly 36 includes a linkage rod 361 which is slidably arranged inside the guide shaft 31 and is rotatably connected to the U-shaped support plate 2. The linkage rod 361 and the lower outer ring wall of the corresponding rotating rod 34 are fixedly installed with a crank plate 362. The crank plate 362 on the linkage rod 361 and the crank plate 362 on the corresponding rotating rod 34 are arranged parallel to each other and are hinged to each other through a connecting rod 363. The crank plate 362 is located below the pushing tube 333.

[0048] In the initial state, the length direction of the blocking plate 35 is arranged perpendicularly to the horizontal section of the C-shaped support plate 2 on the horizontal plane, so that the columns of the silicon carbide vertical boat can be smoothly placed in the positioning grooves on the horizontal section of the C-shaped support plate 2. When the guide shaft 31 moves downward and starts to rotate, the guide shaft 31 drives the linkage rod 361 to rotate synchronously by ninety degrees. The linkage rod 361 drives the rotating rod 34 to rotate synchronously through the crank plate 362 and the connecting rod 363, so that the rotating rod 34 drives the blocking plate 35 to rotate until it is arranged parallel to the horizontal section of the C-shaped support plate 2, so that the blocking plate 35 blocks and limits the corresponding columns of the silicon carbide vertical boat.

[0049] See also Figure 3 and Figure 5 A rotation locking rod 37 is rotatably arranged inside the vertical section of the C-shaped support plate 2. Two symmetrically arranged positioning blocks 371 located above the C-shaped support plate 2 are fixedly installed on the upper side of the rotation locking rod 37. A fixed pipe fitting 372 is fixedly installed on the position of the limit block 32 corresponding to the rotation locking rod 37.

[0050] See also Figure 2 , Figure 3 and Figure 5 Two sliding grooves 373 for the positioning block 371 to slide are provided on the inner side surface of the fixed pipe 372 at equal intervals along its circumference. The sliding groove 373 is an L-shaped structure with the vertical section at the bottom and the horizontal section at the top. A connecting support plate 38 is provided on the outer side of the pipe 333 to drive the rotation. The connecting support plate 38 drives the rotation locking rod 37 to rotate through the gear rack transmission structure and the worm gear transmission structure.

[0051] The worm gear transmission structure in this embodiment includes a worm wheel fixedly mounted on the lower side of the coaxially rotating locking rod 37, a worm is rotatably arranged inside the U-shaped support plate 2 and meshes with the worm wheel at the corresponding position, and the rack and pinion transmission structure includes a gear fixedly mounted on one side of the worm near the corresponding connecting support plate 38, a rack meshed with the gear is fixedly mounted on the connecting support plate 38, and when the pushing tube 333 is in the initial state, the rack is located above the gear and the gear is not meshed with the rack.

[0052] It should be noted that, in order to facilitate the installation inside the C-shaped support plate 2, the C-shaped support plate 2 adopts an assembled structure and is assembled into a whole by welding.

[0053] When the pipe fitting 333 is pushed downward, the connecting support plate 38 on it will be driven to move downward synchronously. When the limit block 32 rotates to be parallel to the horizontal section of the U-shaped support plate 2, the fixed pipe fitting 372 is coaxial with the corresponding rotation locking rod 37, and at this time, the locking block 371 on the rotation locking rod 37 corresponds to the vertical section of the sliding groove 373 on the fixed pipe fitting 372.

[0054] When the limit block 32 is clamped on the upper side of the corresponding vertical section of the C-shaped support plate 2, the protrusion of the pushing pipe 333 is located at the transition position between the vertical section of the guide groove 334 and the upper annular section. The limit block 32 drives the fixed pipe 372 thereon to be sleeved on the upper side of the corresponding rotation locking rod 37, and at the same time makes the clamping block 371 move to the inside of the vertical section of the corresponding sliding groove 373. At this time, the limit block 32 is blocked by the C-shaped support plate 2 and cannot move downward any further.

[0055] Then, the pushing tube 333 continues to move downward, and the pushing tube 333 drives the protrusion on it to move downward along the vertical section of the guide groove 334 to the annular section on the lower side of the guide groove 334. In this process, the pushing tube 333 drives the rack and gear to mesh and drive the gear to rotate through the connecting support plate 38. The gear drives the worm wheel to rotate through the worm gear, and the worm wheel drives the rotation locking rod 37 to rotate ninety degrees, so that the rotation locking rod 37 drives the locking block 371 thereon to rotate to the inside of the horizontal section of the sliding groove 373, thereby locking the rotation locking rod 37 and the fixed tube 372 into a whole, and then locking the front side limit block 32 on the C-shaped support plate 2.

[0056] See also Figure 2 and Figure 6 The upper end surface of the rear rotating rod 34 passes through the horizontal section of the U-shaped support plate 2 and is fixedly installed with a linkage locking rod 365. A locking groove 364 for the linkage locking rod 365 to move is opened on the blocking plate 35. The locking groove 364 is composed of an arc segment structure and a fan-shaped segment structure. The linkage locking rod 365 is an L-shaped structure. The horizontal section of the linkage locking rod 365 rotates inside the fan-shaped segment of the locking groove 364, thereby blocking and locking the position of the blocking plate 35.

[0057] In the initial state, the horizontal section of the linkage locking rod 365 is arranged horizontally to the left and right. When the blocking plate 35 rotates to be arranged parallel to the horizontal section of the U-shaped support plate 2, the blocking plate 35 drives the locking groove 364 thereon to move to the position of the linkage locking rod 365, so that the linkage locking rod 365 is located in the fan-shaped section of the locking groove 364.

[0058] When the front limit block 32 is locked on the C-shaped support plate 2, the operator manually pulls down the handle rod 335 on the rear side. The principle is the same as above, so that the rotating rod 34 on the rear side drives the linkage locking rod 365 to rotate, so that the horizontal section of the linkage locking rod 365 rotates forward to the front and rear longitudinal arrangement, and the horizontal section of the linkage locking rod 365 is blocked on the fan-shaped section of the locking groove 364, thereby locking the blocking plate 35 on the C-shaped support plate 2.

[0059] See also Figure 1 , Figure 2 and Figure 3 It should be noted that a limit groove 336 is provided on the U-shaped support plate 2 for the handle bar 335 to slide. The limit groove 336 is composed of a vertical section and a horizontal section connected to the lower side of the vertical section for the handle bar 335 to rotate 90 degrees. When the handle bar 335 moves downward to the connection between the horizontal section and the vertical section of the limit groove 336, the operator manually rotates the handle bar 335 to the inside of the horizontal section of the limit groove 336 to limit the upward movement of the handle bar 335. When the handle bar 335 rotates, it drives the protrusion on the push pipe 333 to move along the annular section on the lower side of the guide groove 334. It should be noted that in the initial state, the length direction of the limit block 32 is arranged vertically with the horizontal section of the U-shaped support plate 2 on the horizontal plane. At this time, the handle bar 335 is located on the upper side of the vertical section of the limit groove 336 and is under the control of the operator. In addition, the upper side of the vertical section of the limit groove 336 can also be connected to a horizontal section. In this way, when the limit block 32 is in the initial state, the handle rod 335 can be limited in the upper horizontal section of the limit groove 336 without the need for operator control. Of course, the specific shape of the limit groove 336 can be selected and set according to actual needs.

[0060] Subsequently, the silicon carbide vertical boat is transferred to the interior of the sintering furnace for sintering by moving the tooling seat 1. During sintering, the No. 1 heat collecting component 42 concentrates and guides the heat flow to the position between the No. 1 lining component 411 and the silicon carbide vertical boat column, and the No. 2 heat collecting component 43 concentrates and guides the heat flow to the position between the No. 2 lining component 413 and the silicon carbide vertical boat column, thereby effectively reducing the local temperature difference and improving the sintering quality. After sintering is completed, the tooling seat 1 is moved out of the sintering furnace for cooling. After cooling is completed, the limit block 32 and the blocking plate 35 are moved to the initial position by first moving up the rear side pushing tube 333 and then moving up the front side pushing tube 333, thereby facilitating the replacement of the silicon carbide vertical boat.

[0061] See also Figures 1 to 8When the silicon carbide vertical boat is sintered, the specific working process of the present invention is as follows: the first step; operate the front handle bar 335: the operator places the three columns of the silicon carbide vertical boat in the corresponding positioning grooves at the same time, first moves the front handle bar 335 downward, so that the guide shaft 31 drives the limit block 32 to move downward while rotating ninety degrees, and at the same time, the guide shaft 31 also drives the blocking plate 35 to rotate to be parallel to the horizontal section of the U-shaped support plate 2 through the front rotating rod 34 and the linkage assembly 36, and the blocking plate 35 blocks and limits the corresponding columns of the silicon carbide vertical boat, and the limit block 32 drives the fixed pipe 372 thereon The locking rod 37 is moved to the coaxial position of the corresponding rotation locking rod 37, and then the front handle rod 335 is continued to be moved downward, so that the limit block 32 is clamped on the upper side of the corresponding vertical section of the C-shaped support plate 2, and at the same time, the clamping block 371 is moved to the inside of the vertical section of the corresponding sliding groove 373, and then the front pushing pipe 333 is continued to be moved downward, and the pushing pipe 333 drives the clamping block 371 thereon to rotate to the inside of the horizontal section of the sliding groove 373 through the rotation locking rod 37, thereby locking the rotation locking rod 37 and the fixed pipe 372 into a whole, and then locking the front limit block 32 on the C-shaped support plate 2.

[0062] Step 2: Operate the rear handle bar 335: The operator manually pulls the rear handle bar 335 downwards. The principle is the same as above, so that the rear limit block 32 limits the corresponding column of the silicon carbide vertical boat. At the same time, the rear rotating rod 34 drives the horizontal section of the linkage locking rod 365 to rotate and block on the fan-shaped section of the locking groove 364, thereby locking the blocking plate 35 on the U-shaped support plate 2.

[0063] The third step: the silicon carbide vertical boat is transferred to the interior of the sintering furnace for sintering by moving the tooling seat 1. During sintering, the No. 1 heat collecting component 42 concentrates and guides the heat flow to the position between the No. 1 lining component 411 and the column of the silicon carbide vertical boat, and the No. 2 heat collecting component 43 concentrates and guides the heat flow to the position between the No. 2 lining component 413 and the column of the silicon carbide vertical boat, thereby effectively reducing the local temperature difference.

[0064] Step 4: Move the fixture seat 1 out of the sintering furnace for cooling. After cooling, first move the handle bar 335 on the rear side, then move the handle bar 335 on the front side, so that the limit block 32 and the blocking plate 35 move to the initial position, and then remove the silicon carbide vertical boat.

[0065] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention and they are still covered by the protection scope of the present invention.

Claims

1. A fixture for vertical boat-mounted sintering of silicon carbide, comprising a fixture seat and two symmetrically arranged U-shaped support plates fixedly mounted on its upper side, characterized in that: Also includes: The clamping mechanism comprises a guide shaft, a driving assembly, two rotating rods and a linkage assembly; The guide shaft is movably arranged in the vertical section of the C-shaped support plate, a limit block is fixedly installed on the upper side of the guide shaft, and a clamping groove for the column of the vertical boat to penetrate is opened on the upper side of the vertical section of the C-shaped support plate, the middle part of the horizontal section, and the lower side of the limit block; The two rotating rods are symmetrically arranged front and back and are rotatably arranged on the horizontal section of the U-shaped support plate, and a blocking plate is fixedly installed on the upper end of one of the rotating rods; The driving assembly moves the limit block to engage with the vertical section of the U-shaped support plate and fix the corresponding column of the vertical boat, and the driving assembly cooperates with the linkage assembly to rotate the blocking plate and fix the corresponding column of the vertical boat; The heat conduction mechanism comprises a plurality of supporting pins for arranging the upright column in the center of the slot, and a first heat collecting member and a second heat collecting member for concentrating the heat flow to the slot.

2. A fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: The driving assembly includes two track grooves that are evenly spaced along the circumference of the guide shaft on its outer ring wall. Two raised columns that slide in the corresponding track grooves are fixedly installed inside the vertical section of the U-shaped support plate. A pushing pipe is provided on the movable sleeve on the lower side of the guide shaft. A guide groove is provided on the outer ring wall on the lower side of the guide shaft. The pushing pipe slides in the guide groove through a protrusion fixedly installed inside it.

3. A fixture for vertical boat sintering of silicon carbide according to claim 2, characterized in that: The track groove is composed of two upper and lower vertical sections staggered at 90 degrees and an arc section connected between the vertical sections. The guide groove is composed of two upper and lower opposite annular sections and a vertical section connected between the annular sections. The annular section of the guide groove is coaxial with the guide shaft and the pushing pipe fitting, and a handle rod is fixedly installed on the outside of the pushing pipe fitting.

4. A fixture for vertical boat sintering of silicon carbide according to claim 2, characterized in that: A rotation locking rod is rotatably arranged inside the vertical section of the C-shaped support plate, and two symmetrically arranged positioning blocks located above the C-shaped support plate are fixedly installed on the upper side of the rotation locking rod, and a fixed pipe is fixedly installed on the position of the limit block corresponding to the rotation locking rod.

5. A fixture for vertical boat sintering of silicon carbide according to claim 4, characterized in that: Two sliding grooves for the positioning block to slide are arranged at equal intervals on the inner side surface of the fixed pipe along its circumferential direction, and the sliding groove is an L-shaped structure with the vertical section at the bottom and the horizontal section at the top.

6. A fixture for vertical boat sintering of silicon carbide according to claim 4, characterized in that: The outer side of the push pipe is provided with a connecting support plate for rotation, and the connecting support plate drives the rotation locking rod to rotate through the gear rack transmission structure and the worm gear transmission structure.

7. The fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: The linkage assembly corresponds to the rotating rod one by one; the linkage assembly includes a linkage rod that is slidably arranged inside the guide shaft and is rotatably connected to the C-shaped support plate. The lower outer ring wall of the linkage rod and the corresponding rotating rod is fixedly installed with a crank plate, and a connecting rod is hinged between the crank plates at two corresponding positions.

8. The fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: A linkage locking rod is fixedly mounted on the upper end of the rotating rod at the rear side, and a locking groove for the linkage locking rod to move is provided on the blocking plate.

9. A fixture for vertical boat sintering of silicon carbide according to claim 8, characterized in that: The locking groove is composed of an arc segment structure and a fan-shaped segment structure, and the linkage locking rod is an L-shaped structure. After the rear rotating rod drives the linkage locking rod to rotate, the horizontal section of the linkage locking rod is blocked in the fan-shaped segment of the locking groove, so that the position of the blocking plate is locked.

10. The fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: The heat conduction mechanism also includes a bushing assembly; the bushing assembly includes a No. 1 lining plate member arranged in a positioning groove on the vertical section of the C-shaped support plate and the limit block, a No. 2 lining plate member is arranged in the positioning groove of the horizontal section of the C-shaped support plate, a No. 1 heat collecting member is fixedly connected to the left and right sides of the No. 1 lining plate member, and a No. 2 heat collecting member is fixedly connected to the left and right sides of the No. 2 lining plate member, and a plurality of supporting nails are fixedly installed on the inner sides of the No. 1 lining plate member and the No. 2 lining plate member.

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