Quartz claw detection device

Abstract

The invention relates to the technical field of quartz product processing, and more specifically relates to a quartz claw detection device, and a quartz claw comprises a shaft rod and a plurality of supporting claws arranged on the shaft rod; the detection device comprises a workbench; the concentric shaft clamping assembly is arranged on the workbench and used for clamping a shaft rod which is vertically arranged; the disc is arranged on the upper end face of the supporting claw; and a run-out detection assembly. The shaft rod can rotate on the concentric shaft clamping assembly, so that the bounce detection assembly can detect the bounce value of the upper end face of the disc and the bounce value of the side face of the disc. According to the invention, the perpendicularity between each supporting claw and the rotation axis of the shaft rod and the concentricity of a circle formed by the small holes in each supporting claw and the shaft rod can be detected at the same time through a rotation measurement mode and detection of the bounce value, and errors caused by improper measurement modes in a traditional method are effectively avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz product processing, and more specifically, to a detection device for quartz claw products. Background Art

[0002] With the rapid development of the chip industry, the semiconductor equipment industry has also developed rapidly. As an important component in semiconductor equipment, the demand for quartz products is also growing.

[0003] As a key component in semiconductor epitaxial equipment, the design, manufacturing and testing of quartz claws must meet extremely high precision standards to ensure that the wafer can maintain a relatively stable horizontal state in a complex process environment, which is crucial to ensuring product quality.

[0004] The structure of the quartz claw is mainly composed of two core parts: the shaft part and the support claw part. As the center of support and rotation, the shaft part needs to have excellent mechanical strength and meet precise dimensional tolerances; while the support claw part is responsible for carrying and fixing the wafer, and its design must fully consider the size, shape and weight distribution of the wafer to ensure balanced force and reduce vibration and deviation.

[0005] The processing method of quartz claws is to process the shaft and the support claws separately on the CNC machine tool, and then weld the shaft and the support claws together. After welding, annealing and grinding are required. After processing, the size of the product and the verticality of the support claws need to be repeatedly corrected.

[0006] The qualified inspection of quartz claws is basically completed by using a three-coordinate measuring machine. The size and shape and position tolerance of the quartz claws are measured by touching the surface of the product with a probe. However, it is difficult to detect the verticality of the supporting claws on the quartz claws and the position of the small holes on the supporting claws.

[0007] The Chinese invention patent application with publication number CN117326787A discloses a device and method for correcting the verticality of a quartz three-claw. Paragraph 27 of the specification records that "the detection module 4 is used to detect the verticality of the three supporting claws 11 of the quartz three-claw 1", and paragraph 41 records that "in some embodiments, the detection module 4 includes a micrometer 41 and a mobile end 42; the mobile end 42 is fixedly connected to the micrometer 41; the mobile end 42 is used to adjust the height of the micrometer 41; the micrometer 41 is used to measure the verticality of the three supporting claws 11." Therefore, it can be seen that this technical solution uses a micrometer to detect the supporting claws one by one. Although this method can achieve the verticality of the supporting claws, the efficiency is relatively low. Therefore, it is necessary to optimize this detection method. Summary of the invention

[0008] The main purpose of the present invention is to provide a detection device for quartz claw products to solve the technical problems mentioned in the background technology.

[0009] In order to solve the above technical problems, the present invention proposes a quartz claw detection device, the quartz claw comprises: a shaft and a plurality of supporting claws arranged on the shaft; wherein the detection device comprises:

[0010] Workbench;

[0011] A concentric shaft clamping assembly is arranged on a workbench and is used to clamp a vertically arranged shaft;

[0012] A disc, arranged on the upper end surface of the supporting claw;

[0013] and a runout detection component;

[0014] The shaft can rotate on the concentric shaft clamping assembly, so that the runout detection assembly can detect the runout value of the upper end surface and the side surface of the disk.

[0015] In the above technical solution, further, the beating detection component includes:

[0016] A column, arranged on a workbench;

[0017] The crossbeam is set above the columns;

[0018] A first laser distance measuring sensor is arranged on the column, and is used to measure the distance between it and the side surface of the disk, and send a signal to the control unit;

[0019] A second laser distance measuring sensor is arranged on the crossbeam, and is used to measure the distance between the second laser distance measuring sensor and the upper end surface of the disk, and send a signal to the control unit;

[0020] And a control unit, based on the signals detected by the first laser ranging sensor and the second laser ranging sensor, respectively calculates the difference between the maximum distance and the minimum distance detected by the first laser ranging sensor and the difference between the maximum distance and the minimum distance detected by the second laser ranging sensor.

[0021] In any of the above technical solutions, further, the column is set to slide horizontally on the workbench to adjust the position of the second laser ranging sensor.

[0022] In any of the above technical solutions, further, the jitter detection component also includes:

[0023] A translation slide is arranged on the workbench;

[0024] The column is arranged on a translation slide, and the position of the column is adjusted by controlling the translation slide.

[0025] In any of the above technical solutions, further, the column can be raised and lowered to adjust the height of the first laser ranging sensor and the second laser ranging sensor from the workbench.

[0026] In any of the above technical solutions, further, the column includes:

[0027] A first column is vertically arranged on the workbench;

[0028] A second column is vertically arranged and its lower end is slidably arranged in the first column along the vertical direction;

[0029] and a fastener for adjusting the length of the second column embedded in the first column;

[0030] Wherein, the crossbeam is arranged on the second column.

[0031] In any of the above technical solutions, further, the concentric shaft clamping assembly includes:

[0032] Mounting frame;

[0033] The concentric shaft is a hollow structure and is vertically arranged on the mounting frame;

[0034] The clamping parts have two groups and are respectively arranged at the two ends of the concentric shaft. After the shaft rod is embedded in the concentric shaft, the two groups of clamping parts respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft.

[0035] The concentric shaft can be rotatably arranged on the mounting frame with its axis as the rotation center.

[0036] In any of the above technical solutions, further, both ends of the concentric shaft are provided with tapered grooves, and the diameter of the tapered grooves gradually decreases from the outside to the inside; the clamping part includes:

[0037] A collet having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove;

[0038] The nut has a threaded hole at one end and is threadedly connected to the outer wall of the end of the coaxial shaft, and a tapered hole at the other end and is adapted to the tapered structure of one end of the collet extending out of the coaxial shaft;

[0039] Wherein, both ends of the collet are provided with openings, so that when the collet is squeezed by the nut and the coaxial shaft, the diameter of the hollow chamber on the collet can be reduced to clamp the shaft.

[0040] In any of the above technical solutions, further, the concentric shaft clamping assembly also includes:

[0041] A driving part, used for driving the coaxial shaft to rotate;

[0042] The driving unit includes:

[0043] Motor;

[0044] A main gear, arranged on the output shaft of the motor;

[0045] The driven gear is sleeved on the concentric shaft;

[0046] and a synchronous belt, which is sleeved on the main gear and the driven gear;

[0047] When the motor drives the main gear to rotate, the synchronous belt drives the driven gear to rotate, and then drives the concentric shaft to rotate.

[0048] In any of the above technical solutions, further, a buffer pad is provided on the workbench, and the buffer pad is directly opposite to the concentric axis.

[0049] Beneficial effect: Compared with the existing technology, by means of rotational measurement and by detecting the runout value, the verticality between each supporting claw and the rotation axis of the shaft rod and the concentricity between the circle formed by the small holes on each supporting claw and the shaft rod can be detected at the same time, which effectively avoids the errors caused by improper measurement methods in traditional methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0051] Figure 1 It is a schematic diagram of the structure of the quartz claw;

[0052] Figure 2 yes Figure 1 The enlarged view of point A in the middle;

[0053] Figure 3 It is a three-dimensional structural schematic diagram of the present invention;

[0054] Figure 4 It is a structural schematic diagram of the disc of the present invention;

[0055] Figure 5 yes Figure 4 The enlarged image at B in the middle;

[0056] Figure 6 It is a three-dimensional structural schematic diagram of the concentric shaft clamping assembly of the present invention;

[0057] Figure 7 It is a schematic diagram of the internal structure of the concentric shaft clamping assembly of the present invention;

[0058] Figure 8 It is a schematic diagram of the exploded structure of the coaxial shaft clamping assembly of the present invention.

[0059] The following are the descriptions of the reference numerals:

[0060] 10. Quartz claw; 11. Shaft; 12. Support claw; 13. Small hole; 100. Workbench; 200. Concentric shaft clamping assembly; 210. Mounting frame; 211. Upper flange; 212. Lower flange; 213. Connecting column; 220. Concentric shaft; 230. Clamping part; 231. Collet; 2311. Opening; 2312. Annular groove; 232. Nut; 240. Driving part; 241. Motor; 242. Main gear; 243. Driven gear; 244. Synchronous belt; 300. Disc; 310. Graphite nail; 410. Column; 411. First column; 412. Second column; 413. Fastener; 420. Crossbeam; 430. First laser ranging sensor; 440. Second laser ranging sensor; 450. Translation slide; 500. Buffer pad. DETAILED DESCRIPTION

[0061] Below, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0062] It should be noted that, as shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not specifically refer to the singular, but may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0063] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0064] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0065] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0066] like Figure 1 and Figure 2 As shown, the quartz claw 10 is mainly composed of a cylindrical shaft 11 and a supporting claw 12. Generally, there are three supporting claws 12, which are evenly distributed on the upper end of the shaft 11 along the circumferential direction. The three supporting claws 12 are used to carry and fix the wafer. A small hole 13 is also opened at the upper end of the supporting claw to play a fixing role. In order to quickly and accurately detect whether the three supporting claws 12 have size deviations, this application proposes a quartz claw detection device.

[0067] A quartz claw detection device of the present application is described in detail through the following embodiments.

[0068] Embodiment 1:

[0069] like Figure 1-Figure 8 As shown, in this embodiment, a quartz claw detection device includes: a workbench 100; a concentric shaft clamping assembly 200, which is arranged on the workbench 100 and is used to clamp a vertically arranged shaft; a disc 300, which is arranged on the upper end surface of the supporting claw; and a runout detection assembly;

[0070] The shaft can rotate on the concentric shaft clamping assembly 200 , so that the runout detection assembly can detect the runout value of the upper end surface and the side surface of the disk 300 .

[0071] The verticality of the quartz claw refers to the verticality between the plane formed by the upper end surfaces of the three supporting claws and the axis of the shaft. This verticality determines the stability of the wafer on the quartz claw when it rotates at high speed. If the verticality is not up to standard, the quartz claw needs to be corrected until it is qualified.

[0072] There are disadvantages in the existing direct measurement using a micrometer and a square. The first disadvantage is low efficiency. The second disadvantage is that the micrometer can only measure the verticality of the support claw and the shaft rod, rather than the verticality of the support claw and the axis of the shaft rod, resulting in a large error.

[0073] Based on this, the present application adopts a rotational measurement method, which detects the runout value and can simultaneously detect the perpendicularity between each support claw and the rotation axis of the shaft rod and the concentricity between the circle formed by the small holes on each support claw and the shaft rod; the rotational measurement is essentially to measure the perpendicularity between the support claw and the rotation axis of the shaft rod. For the deviation value between the axis of the shaft rod and the rotation axis of the shaft rod, the present application can control it within a very small range through the concentric shaft clamping assembly 200.

[0074] The verticality detection method of the quartz claw is as follows: first, the shaft is vertically clamped by the concentric shaft clamping assembly 200, and then a standard disc 300 is placed on the supporting claw. Three graphite nails 310 are installed at the bottom of the disc 300. The three graphite nails 310 are respectively inserted into the small holes on the three supporting claws. Then, by rotating the shaft, the shaft can drive the disc 300 to rotate, and then the runout detection assembly is used to detect the runout value of the upper end face and side of the disc 300. According to these two runout differences, the horizontality of the plane formed by the upper end faces of the three supporting claws and the deviation value between the center of the circle formed by the small holes on the three supporting claws and the center of the disc 300 can be measured, and then the verticality of the quartz claw can be obtained.

[0075] In this embodiment, the verticality between the supporting claw and the rotation axis of the shaft rod is directly detected by means of rotation measurement, which effectively avoids the error caused by improper measurement method in the traditional method.

[0076] The automated testing process reduces manual intervention and increases testing speed. In addition, through real-time data collection and rapid analysis and processing, test results can be obtained quickly, providing strong support for subsequent production and quality control.

[0077] Compared with the traditional micrometer and square measurement method, this device not only improves the measurement accuracy and efficiency, but also reduces the material waste and rework costs caused by errors. At the same time, its easy operation and convenient maintenance also reduce labor costs and time costs.

[0078] Embodiment 2:

[0079] This embodiment is a further improvement made on the basis of the first embodiment.

[0080] like Figure 3 As shown, in this embodiment, the bounce detection component includes: a column 410, which is arranged on the workbench 100; a beam 420, which is arranged above the column 410; a first laser ranging sensor 430, which is arranged on the column 410, and is used to measure the distance between it and the side of the disk 300, and send a signal to the control unit; a second laser ranging sensor 440, which is arranged on the beam 420, and is used to measure the distance between it and the upper end surface of the disk 300, and send a signal to the control unit; and a control unit, according to the signals detected by the first laser ranging sensor 430 and the second laser ranging sensor 440, and respectively calculates the difference between the maximum distance detected by the first laser ranging sensor 430 and the minimum distance, and the difference between the maximum distance detected by the second laser ranging sensor 440 and the minimum distance.

[0081] The two laser distance measuring sensors and the control unit enable accurate measurement of the radial and axial runout of the disk 300 during the rotation of the shaft.

[0082] Specifically, after the disk 300 rotates one circle, the jitter value can be obtained by subtracting the minimum value from the maximum value, and this method can directly observe the jitter of the disk 300. If the jitter value of the disk 300 is within the allowable error range, it means that the tested quartz claw meets the requirements, otherwise it does not meet the requirements and needs to be corrected.

[0083] Embodiment three:

[0084] This embodiment is a further improvement made on the basis of the second embodiment.

[0085] like Figure 3 As shown, in this embodiment, the column 410 is horizontally slidably arranged on the workbench 100 to adjust the position of the second laser ranging sensor 440.

[0086] The runout detection assembly further includes: a translation slide 450, which is disposed on the workbench 100;

[0087] The column 410 is disposed on a translation slide 450 , and the position of the column 410 is adjusted by controlling the translation slide 450 .

[0088] By providing the translation slide 450 , the column 410 can move toward or away from the disk 300 , so that the second laser ranging sensor 440 can detect different positions on the disk 300 , thereby further improving the accuracy of the upper surface runout detection of the disk 300 .

[0089] It should be noted that the translation slide can be controlled manually or automatically.

[0090] In this embodiment, the column 410 is optimized to be liftable to adjust the height of the first laser distance measuring sensor 430 and the second laser distance measuring sensor 440 from the workbench 100 .

[0091] By configuring the column 410 as a liftable structure, the entire detection device can detect quartz claws of different heights, thereby expanding its applicability.

[0092] It should be noted that the column 410 includes: a first column 411, which is vertically arranged on the workbench 100; a second column 412, which is vertically arranged and the lower end of which is slidably arranged in the first column 411 along the vertical direction; and a fastener 413, which is used to adjust the length of the second column 412 embedded in the first column 411;

[0093] The crossbeam 420 is disposed on the second column 412 .

[0094] By adjusting the fastener 413 , the second column 412 can be stretched upward or contracted downward on the first column 411 , thereby adjusting the height of the first laser ranging sensor 430 and the second laser ranging sensor 440 .

[0095] Embodiment 4:

[0096] This embodiment is a further improvement made on the basis of the third embodiment.

[0097] like Figure 3 , Figure 6-Figure 8 As shown, in this embodiment, the concentric shaft clamping assembly 200 includes: a mounting frame 210; a concentric shaft 220, which is a hollow structure and is vertically arranged on the mounting frame 210; a clamping portion 230, which has two groups and is respectively arranged at both ends of the concentric shaft 220. After the shaft rod is embedded in the concentric shaft 220, the two groups of clamping portions 230 respectively clamp the parts of the shaft rod located at both ends of the concentric shaft 220;

[0098] The concentric shaft 220 can be rotatably disposed on the mounting frame 210 with its axis as the rotation center.

[0099] First, the shaft of the quartz claw is inserted into the concentric shaft 220; then, the clamping part 230 is operated to clamp the inserted end of the shaft. Since the concentric shaft 220 can rotate freely with its axis as the rotation center, the processing and detection of the quartz claw can be easily realized, which greatly improves the work efficiency and processing accuracy. The application of the concentric shaft clamping assembly 200 further improves the stability and accuracy of the measurement.

[0100] In this embodiment, it should be noted that the mounting frame 210 includes: an upper flange 211; a lower flange 212; and a connecting column 213 for connecting the upper flange 211 and the lower flange 212;

[0101] The upper flange 211 and the lower flange 212 are both provided with bearings in the middle, and the coaxial shaft 220 is rotatably provided on the upper flange 211 and the lower flange 212 through the bearings, and its two ends pass through and extend out of the upper flange 211 and the lower flange 212 respectively.

[0102] The upper flange 211 and the lower flange 212 are the main load-bearing and positioning components of the mounting frame 210. They are located at the top and bottom of the mounting frame 210, respectively, and are tightly connected through the connecting column 213 to form a stable support frame. The bearing is a crucial component of the mounting frame 210, which is installed in the middle of the upper flange 211 and the lower flange 212, respectively, to support the concentric shaft 220 and allow it to rotate freely with the axis as the rotation center.

[0103] By adopting the ingenious combination and precise installation of the upper flange 211, the lower flange 212, the connecting column 213 and the bearing, it can be ensured that the coaxial shaft 220 remains stable, precise and reliable during the rotation process.

[0104] The connecting column 213 is a hexagonal stud, and both ends of the hexagonal stud are connected to the upper flange 211 and the lower flange 212 by screws.

[0105] The design of using hexagonal studs as the connecting columns 213 and connecting the upper flange 211 and the lower flange 212 by screws can not only provide a stable connection and support function, but also facilitate installation, disassembly and maintenance work.

[0106] In this embodiment, conical grooves are provided at both ends of the concentric shaft 220, and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping part 230 includes: a collet 231, which has a hollow chamber for the shaft to pass through, and the outer walls of both ends are conical structures, and the outer wall of one end is adapted to the conical groove, and the end is embedded in the conical groove, and the other end is located outside the conical groove; a nut 232, one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the concentric shaft 220, and the other end hole is a conical hole and is adapted to the conical structure of one end of the collet 231 extending out of the concentric shaft 220;

[0107] Both ends of the collet 231 are provided with openings 2311 , so that when the collet 231 is squeezed by the nut 232 and the coaxial shaft 220 , the diameter of the hollow chamber therein can be reduced to clamp the shaft.

[0108] In this embodiment, through the mutual cooperation of the concentric shaft 220, the tapered groove, the collet 231 and the nut 232, the clamping portion 230 can effectively clamp the shaft rod. This design is not only simple in structure but also easy to operate. The shaft rod can be clamped or loosened by rotating the nut 232, which is very suitable for application scenarios of quartz claw processing and detection.

[0109] Specifically, after the shaft rod is inserted into the coaxial shaft 220, by rotating the nut 232, when the inner wall of the tapered hole on the nut 232 abuts against the tapered surface of the upper end of the collet 231 and an external force is applied, the collet 231 will move into the coaxial shaft 220. During the movement, the interior of the collet 231 gradually shrinks and abuts against the shaft rod, thereby clamping the shaft rod.

[0110] It should be noted that there are multiple openings 2311, which are distributed along the circumferential direction of the collet 231. By providing multiple openings 2311, the outer wall of the collet 231 can be easily deformed after being squeezed by the outside (nut 232) to clamp the shaft.

[0111] It should be noted that the outer wall of the nut 232 is provided with knurling to facilitate the staff to rotate the nut 232.

[0112] It should be noted that there is also an annular groove 2312 arranged radially inward on the outer wall of the collet 231, and the annular groove 2312 is located between the two conical structures. This arrangement enables the collet 231 to clamp the shaft more effectively.

[0113] Embodiment five:

[0114] This embodiment is a further improvement made on the basis of the fourth embodiment.

[0115] like Figure 6 As shown, the concentric shaft clamping assembly 200 further includes: a driving portion 240, for driving the concentric shaft 220 to rotate;

[0116] The driving unit 240 includes: a motor 241; a main gear 242, which is disposed on the output shaft of the motor 241; a driven gear 243, which is sleeved on the concentric shaft 220; and a synchronous belt 244, which is sleeved on the main gear 242 and the driven gear 243;

[0117] When the motor 241 drives the main gear 242 to rotate, the synchronous belt 244 drives the driven gear 243 to rotate, thereby driving the coaxial shaft 220 to rotate.

[0118] In order to realize automatic detection, a driving unit 240 is provided, and the driving unit 240 is utilized to realize the rotation of the concentric shaft 220, thereby facilitating the detection of the laser ranging sensor.

[0119] Specifically, the motor 241 drives the main gear 242 to rotate, and then the driven gear 243 rotates under the action of the synchronous belt 244, thereby causing the coaxial shaft 220 to rotate synchronously.

[0120] Embodiment six:

[0121] This embodiment is a further improvement made on the basis of the fifth embodiment.

[0122] like Figure 3 and Figure 6 As shown, in this embodiment, a buffer pad 500 is further provided on the workbench 100 , and the buffer pad 500 is directly opposite to the concentric axis 220 .

[0123] Since when the shaft is installed on the concentric shaft clamping assembly 200, the shaft will abut against the workbench 100 after passing through the lower end of the concentric shaft 220, a buffer pad 500 is provided for this purpose, and the buffer pad 500 plays a protective role on the bottom of the shaft. The various embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to ordinary technicians in this technical field without departing from the scope and spirit of the various embodiments described. The selection of terms used in this article is intended to best explain the principles of the various embodiments, practical applications or improvements to the technology in the market, or to enable other ordinary technicians in this technical field to understand the various embodiments disclosed herein.

Claims

1. A quartz claw detection device, the quartz claw comprising: A shaft and a plurality of supporting claws arranged on the shaft; characterized in that the detection device comprises: Workbench(100); A coaxial shaft clamping assembly (200), arranged on the workbench (100) and used for clamping the vertically arranged shaft; A disc (300) is arranged on the upper end surface of the supporting claw; and a runout detection component; The shaft can rotate on the coaxial shaft clamping assembly (200), so that the runout detection assembly can detect the runout value of the upper end surface and the runout value of the side surface of the disk (300).

2. The quartz claw detection device according to claim 1, characterized in that: The beating detection component comprises: A column (410) is disposed on the workbench (100); A crossbeam (420) is disposed above the column (410); A first laser distance measuring sensor (430), arranged on the column (410), for measuring the distance between the first laser distance measuring sensor and the side surface of the disk (300), and sending a signal to a control unit; A second laser distance measuring sensor (440) is arranged on the crossbeam (420) and is used to measure the distance between the second laser distance measuring sensor and the upper end surface of the disk (300), and send a signal to a control unit; and a control unit, which calculates, based on the signals detected by the first laser distance measuring sensor (430) and the second laser distance measuring sensor (440), the difference between the maximum distance and the minimum distance detected by the first laser distance measuring sensor (430) and the difference between the maximum distance and the minimum distance detected by the second laser distance measuring sensor (440).

3. The quartz claw detection device according to claim 2, characterized in that: The column (410) is horizontally slidably arranged on the workbench (100) to adjust the position of the second laser distance measuring sensor (440).

4. The quartz claw detection device according to claim 3, characterized in that: The jitter detection component also includes: A translation slide (450) is arranged on the workbench (100); The column (410) is arranged on the translation slide (450), and the position of the column (410) is adjusted by controlling the translation slide (450).

5. The quartz claw detection device according to claim 2, characterized in that: The column (410) can be raised and lowered to adjust the height of the first laser distance measuring sensor (430) and the second laser distance measuring sensor (440) from the workbench (100).

6. The quartz claw detection device according to claim 2, characterized in that: The column (410) comprises: A first column (411) is vertically arranged on the workbench (100); A second column (412) is vertically arranged and its lower end is slidably arranged in the first column (411) along the vertical direction; and a fastener (413) for adjusting the length of the second column (412) embedded in the first column (411); Wherein, the crossbeam (420) is arranged on the second column (412).

7. The quartz claw detection device according to any one of claims 1 to 6, characterized in that: The concentric shaft clamping assembly (200) comprises: A mounting frame (210) is arranged on the workbench (100); A concentric shaft (220) having a hollow structure and vertically disposed on the mounting frame (210); The clamping parts (230) have two groups and are respectively arranged at the two ends of the concentric shaft (220); after the shaft rod is embedded in the concentric shaft (220), the two groups of clamping parts (230) respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft (220); The concentric shaft (220) is rotatably arranged on the mounting frame (210) with its axis as the rotation center.

8. The quartz claw detection device according to claim 7, characterized in that: Conical grooves are provided at both ends of the concentric shaft (220), and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping portion (230) comprises: A collet (231) having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove; A nut (232), one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the coaxial shaft (220), and the other end hole of which is a tapered hole and is adapted to the tapered structure of one end of the collet (231) extending out of the coaxial shaft (220); Wherein, both ends of the collet (231) are provided with openings (2311), so that when the collet (231) is squeezed by the nut (232) and the coaxial shaft (220), the diameter of the hollow chamber thereon can be reduced to clamp the shaft.

9. The quartz claw detection device according to claim 7, characterized in that: The concentric shaft clamping assembly (200) further comprises: A driving unit (240) for driving the coaxial shaft (220) to rotate; Wherein, the driving unit (240) comprises: Motor (241); A main gear (242) is arranged on the output shaft of the motor (241); A driven gear (243) sleeved on the coaxial shaft (220); and a synchronous belt (244) sleeved on the main gear (242) and the driven gear (243); When the motor (241) drives the main gear (242) to rotate, the synchronous belt (244) drives the driven gear (243) to rotate, thereby driving the coaxial shaft (220) to rotate.

10. The quartz claw detection device according to claim 7, characterized in that: A buffer pad (500) is also provided on the workbench (100), and the buffer pad (500) is directly opposite to the concentric axis (220).

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