Double-differential single-shaft gyroscope

Abstract

The invention relates to the technical field of gyroscopes, and discloses a double-differential single-shaft gyroscope, which comprises two single-differential structures, and each single-differential structure comprises two driving mass blocks, two driving mass blocks and two differential mass blocks, the two coupling mass blocks do reciprocating motion along with the driving mass block in the second direction; the two detection assemblies are located between the two coupling mass blocks, and each detection assembly comprises a detection mass block; each steering connecting beam group comprises two first steering elastic beams which are obliquely arranged, one end of each first steering elastic beam is connected with the coupling mass block, and the other end of each first steering elastic beam is connected with the detection mass block; and the four driving mass blocks of the two single differential structures are orthogonally and symmetrically distributed. According to the double-differential single-shaft gyroscope disclosed by the invention, the impact resistance of the gyroscope in the working direction can be improved, meanwhile, the problem of inconsistent detection caused by the fact that the double-coupling mass block is influenced by a machining process is solved, and the detection precision of the gyroscope is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a double-differential single-axis gyroscope. Background Art

[0002] As a key inertial sensor, gyroscopes play a vital role in many fields and are currently widely used in various fields such as aerospace and automotive industries. In actual working environments, gyroscopes will be impacted from all directions, and the existing gyroscopes on the market have poor impact resistance. When impacted, it is very easy to cause the internal structure of the gyroscope to shift and deform, affecting the accuracy and stability of the output signal, and reducing the accuracy and reliability of the gyroscope's angular velocity measurement. In order to improve the overall performance of the gyroscope, mainstream designs mostly use dual detection mass blocks and dual coupling mass block structures. In theory, this structure can improve the performance of the gyroscope to a certain extent. However, in actual applications, due to the level of processing technology, it is difficult for the dual coupling mass blocks to be completely consistent, which leads to different responses of the detection mass blocks to the same input, thereby reducing the detection accuracy, making this gyroscope unable to be used in application scenarios with high requirements for gyroscope performance. Therefore, how to overcome the above-mentioned problems existing in existing gyroscopes has become a technical problem that needs to be solved urgently. Summary of the invention

[0003] Based on the above, the purpose of the present invention is to provide a dual-differential single-axis gyroscope, which can improve the impact resistance of the gyroscope in all directions, while solving the detection inconsistency problem caused by the dual-coupled mass block being affected by the processing technology, thereby improving the detection accuracy of the gyroscope.

[0004] To achieve the above object, the present invention adopts the following technical solutions: A dual-differential single-axis gyroscope defines a first direction, a second direction, and a third direction that are perpendicular to each other, wherein the dual-differential single-axis gyroscope comprises two single differential structures elastically connected along the second direction, each of the single differential structures comprising: Two driving masses, the two driving masses are distributed along the first direction; two coupling mass blocks, each of which is disposed in one of the driving mass blocks and the two are coupled and connected, and when the driving mass block performs reciprocating driving motion along the second direction, the coupling mass block also reciprocates along the second direction; Two detection components, the two detection components are distributed along the second direction and are located between the two coupling mass blocks, each of the detection components includes a detection mass block, each of the detection mass blocks is rigidly connected to the substrate along the first direction and elastically connected along the second direction, and each of the detection mass blocks is connected to the two coupling mass blocks; one of the coupling mass block and the detection mass block is provided with a limiting groove, and the other is provided with a limiting boss matched with the limiting groove, and when the coupling mass block moves a preset displacement relative to the detection mass block along the second direction, the limiting boss abuts against the limiting groove; Two steering connection beam groups, the two steering connection beam groups correspond to the two coupling mass blocks one by one, each of the steering connection beam groups comprises two first steering elastic beams arranged obliquely, one end of each of the first steering elastic beams is connected to the coupling mass block, and the other end is connected to the detection mass block, and the two first steering elastic beams are symmetrically distributed along the first symmetry axis of the first direction; The four driving mass blocks of the two single differential structures are orthogonally symmetrically distributed. When detecting the angular velocity in the third direction, the coupling mass block moves along the first direction due to the Coriolis force along the first direction, and the detection mass block moves along the second direction driven by the steering connecting beam group.

[0005] As a preferred solution of a dual-differential single-axis gyroscope, each of the steering connecting beam groups also includes two inclined second steering elastic beams, one end of each of the second steering elastic beams is fixed on the substrate, and the other end is connected to the coupling mass block, the first steering elastic beam and the second steering elastic beam connected to each of the coupling mass blocks are symmetrically distributed along the second symmetry axis of the second direction, and the two second steering elastic beams of each steering connecting beam group are symmetrically distributed about the first symmetry axis.

[0006] As a preferred solution of a dual-differential single-axis gyroscope, the first steering elastic beam and the second steering elastic beam are both steering beams, the steering beam includes a first steering sub-beam, a second steering sub-beam and a steering connecting beam, the first steering sub-beam and the second steering sub-beam are arranged in parallel directions, the two ends of the steering connecting beam are respectively connected to the same end of the first steering sub-beam and the second steering sub-beam, the first steering sub-beam and the second steering sub-beam are symmetrically distributed with the central axis of the steering connecting beam as the third symmetry axis, the first steering sub-beam is connected to the substrate or the detection mass block, and the second steering sub-beam is connected to the coupling mass block.

[0007] As a preferred solution of a dual-differential single-axis gyroscope, each of the single differential structures also includes a first anchor point and two anti-vibration elastic beams, the first anchor point and the two anti-vibration elastic beams are both located between the two detection mass blocks of a single differential structure, the two anti-vibration elastic beams are located on both sides of the first anchor point along the first direction, each of the anti-vibration elastic beams includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams that can be deformed along the second direction, the central anti-vibration coupling straight beams of the two anti-vibration elastic beams are respectively located on both sides of the first anchor point along the first direction, one end of the central anti-vibration coupling straight beam is connected to the first anchor point, and the other end is simultaneously connected to the two central anti-vibration coupling elastic beams, and each of the central anti-vibration coupling elastic beams is connected to the detection mass block.

[0008] As a preferred solution of a dual-differential single-axis gyroscope, each of the single differential structures also includes a driving connection beam and a second anchor point, the two ends of the driving connection beam are respectively connected to the two driving mass blocks of the single differential structure, the driving connection beam includes a driving connection beam and a driving deformation beam, the driving connection beam can rotate along the third direction around the second anchor point, the driving deformation beam can be deformed along the first direction and its two ends are respectively connected to the driving connection beam and the driving mass block.

[0009] As a preferred solution of a dual differential single-axis gyroscope, the dual differential single-axis gyroscope includes a single differential elastic beam, which can be deformed along the second direction and has one end connected to the driving mass block of one of the single differential structures, and the other end connected to the driving mass block of another single differential structure.

[0010] As a preferred solution of a dual differential single-axis gyroscope, the dual differential single-axis gyroscope also includes a central connecting beam, one end of the central connecting beam is connected to the detection mass block of one of the single differential structures, and the other end of the central connecting beam is connected to the detection mass block of another single differential structure.

[0011] As a preferred solution of a dual-differential single-axis gyroscope, the central connecting beam includes a first central crossbeam, a central longitudinal beam and a second central crossbeam, the first central crossbeam and the second central crossbeam are arranged in parallel directions and both extend along the first direction, the first central crossbeam and the second central crossbeam can be deformed along the second direction, the first central crossbeam is fixed on the detection mass block of one of the single differential structures, the second central crossbeam is fixed on the detection mass block of another of the single differential structures, the central longitudinal beam extends along the second direction and its two ends are respectively connected to the first central crossbeam and the second central beam.

[0012] As a preferred solution for a dual-differential single-axis gyroscope, a line connecting the center of mass of the driving mass block and the center of mass of the coupling mass block of each single differential structure is a center of mass line, the center of mass line extends along the first direction and the two detection mass blocks are symmetrically distributed relative to the center of mass line.

[0013] The beneficial effects of the present invention are: The dual-differential single-axis gyroscope disclosed in the present invention has two steering connecting beam groups that can change the detection direction of the detection mass block. This steering design makes the driving direction and the detection direction of the dual-differential single-axis gyroscope the same, both in the second direction. When the gyroscope is impacted in the first direction, since the detection mass block and the substrate are rigidly connected in the first direction, the displacement of the detection mass block in the first direction is very small, thereby improving the impact resistance of the gyroscope in the first direction without affecting the detection result. When the gyroscope is impacted in the second direction, the design of the limiting groove and the limiting boss limits the movement displacement of the detection mass block and the coupling mass block, thereby The movement displacement of the driving mass block along the second direction is limited, and the impact resistance of the double-differential single-axis gyroscope in the second direction is improved; since each detection mass block is connected to two coupling mass blocks, it is avoided that the detection mass block of each single differential structure is affected by only one coupling mass block, and the consistency of the movement of the two detection mass blocks of each single differential structure is increased, and the detection accuracy and sensitivity of the gyroscope are improved. In addition, the double differential design formed by the two single differential structures can also offset the interference signal during differential output, has strong anti-interference ability, is suitable for high-impact scenarios, and increases the stability of double-differential single-axis gyroscope detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0015] Figure 1 is a schematic diagram of a double-differential single-axis gyroscope provided in a specific embodiment of the present invention; Figure 2 It is a schematic diagram of a driving mass block, a driving electrode and a driving detection electrode of a dual-differential single-axis gyroscope provided in a specific embodiment of the present invention; Figure 3 is a schematic diagram of a single differential elastic beam of a dual differential single-axis gyroscope provided in a specific embodiment of the present invention; Figure 4 is a schematic diagram of a first anchor point and an anti-vibration elastic beam of a dual-differential single-axis gyroscope provided in a specific embodiment of the present invention; Figure 5 yes Figure 1 A local enlarged view at point A; Figure 6 It is a schematic diagram of a first steering elastic beam and a detection assembly of a dual-differential single-axis gyroscope provided in a specific embodiment of the present invention; Figure 7 yes Figure 1 A local enlarged view at point B; Figure 8 is a schematic diagram of the movement of a dual-differential single-axis gyroscope in a driving mode provided by a specific embodiment of the present invention; Fig. 9 It is a schematic diagram of the movement of the dual-differential single-axis gyroscope in the detection mode provided by a specific embodiment of the present invention.

[0016] In the figure: 101, first driving mass block; 102, second driving mass block; 103, third driving mass block; 104, fourth driving mass block; 11, driving mass block; 111, first driving sub-mass block; 112, second driving sub-mass block; 113, first counterweight mass block; 114, second counterweight mass block; 115, connecting mass block; 12, driving electrode; 13, driving detection electrode; 14, driving straight beam; 201, first coupling mass block; 202, second coupling mass block; 203, third coupling mass block; 204, fourth coupling mass block; 21, coupling mass block; 210, limiting groove; 22, coupling connecting straight beam; 301, first detection mass block; 302, second detection mass block; 303, third detection mass block; 304, fourth detection mass block; 31, detection mass block; 311, limiting boss; 32, detection electrode; 33, detection elastic beam; 401, first steering sub-beam; 402, second steering sub-beam; 403, steering connecting beam; 41, first steering elastic beam; 42, second steering elastic beam; 51, first anchor point; 52, second anchor point; 53, third anchor point; 54, fourth anchor point; 6. Anti-vibration elastic beam; 61. Central anti-vibration coupled straight beam; 62. Central anti-vibration coupled elastic beam; 7. Drive the connecting beam; 71. Drive the connecting cross beam; 72. Drive the deforming beam; 73. Drive the connecting straight beam; 8. Single differential elastic beam; 9. Center connecting beam; 91. First center cross beam; 92. Center longitudinal beam; 93. Second center cross beam. DETAILED DESCRIPTION

[0017] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0018] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0019] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] This embodiment provides a dual-differential single-axis gyroscope, such as Figures 1 to 9As shown, a first direction, a second direction and a third direction perpendicular to each other are defined, and the dual-differential single-axis gyroscope includes two single differential structures elastically connected along the second direction, each single differential structure includes two driving masses 11, two coupling masses 21, two detection components and two steering connection beam groups, the two driving masses 11 are distributed along the first direction, each coupling mass 21 is arranged in a driving mass 11 and the two are coupled and connected, when the driving mass 11 performs reciprocating driving motion along the second direction, the coupling mass 21 reciprocates along the second direction. The two detection components are distributed along the second direction and are located between the two coupling masses 21, each detection component includes a detection mass 31, each detection mass 31 is rigidly connected to the substrate along the first direction and elastically connected along the second direction, and each detection mass 31 is connected to the two coupling masses 21 of the single differential structure. The two steering connecting beam groups correspond one-to-one to the two coupling mass blocks 21, and each steering connecting beam group includes two inclined first steering elastic beams 41, one end of each first steering elastic beam 41 is connected to the coupling mass block 21, and the other end is connected to the detection mass block 31, and the two first steering elastic beams 41 are symmetrically distributed along the first symmetry axis of the first direction.

[0021] like Figure 1 As shown, the coupling mass block 21 of this embodiment is provided with a limit groove 210, and the detection mass block 31 is provided with a limit boss 311 that cooperates with the limit groove 210. When the coupling mass block 21 moves a preset displacement relative to the detection mass block 31 along the second direction, the limit boss 311 can abut against the limit groove 210. This limit design can further improve the impact resistance of the dual differential single-axis gyroscope in the second direction. It should be noted that the preset displacement in the present invention is specifically set according to actual needs to ensure that the detection mass block 31 can move a certain displacement along the second direction. In other embodiments, a limit boss 311 can also be set on the coupling mass block 21, and a limit groove 210 corresponding to the limit boss 311 can be set on the detection mass block 31, which is specifically set according to actual needs.

[0022] Specifically, the four driving mass blocks 11 of the two single differential structures of the present embodiment are orthogonally symmetrically distributed. In the driving mode, the driving mass block 11 moves along the second direction, the coupling mass block 21 moves along the second direction with the driving mass block 11, and the detection mass block 31 does not move along the second direction with the coupling mass block 21; in the detection mode, when detecting the angular velocity in the third direction, the coupling mass block 21 is subjected to the Coriolis force along the first direction and moves along the first direction, and the detection mass block 31 is driven by the steering connecting beam group to turn and move along the second direction, so that the detection mass block 31 reciprocates relative to the substrate along the second direction.

[0023] Specifically, Figure 1As shown, the first direction of this embodiment is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. It should be noted that in other embodiments of the present invention, the first direction may also be the Y-axis direction, in which case the second direction is the X-axis direction and the third direction is the Z-axis direction, which is specifically set according to actual needs.

[0024] The dual-differential single-axis gyroscope provided in this embodiment has two steering connecting beam groups that can change the detection direction of the detection mass block 31. This steering design makes the driving direction and the detection direction of the dual-differential single-axis gyroscope the same, both in the second direction. When the gyroscope is impacted in the first direction, since the detection mass block 31 and the substrate are rigidly connected in the first direction, the displacement of the detection mass block 31 in the first direction is very small, thereby improving the impact resistance of the gyroscope in the first direction without affecting the detection result. When the gyroscope is impacted in the second direction, the design of the limiting groove 210 and the limiting boss 311 limits the movement displacement of the detection mass block 31 and the coupling mass block 21. , thereby limiting the movement displacement of the driving mass block 11 along the second direction, and improving the impact resistance of the double-differential single-axis gyroscope in the second direction; because each detection mass block 31 is connected to two coupling mass blocks 21, it avoids that each detection mass block 31 of the single differential structure is affected by only one coupling mass block 21, increases the consistency of the movement of the two detection mass blocks 31 of each single differential structure, and improves the detection accuracy and sensitivity of the gyroscope. In addition, the double differential design formed by the two single differential structures can also offset the interference signal during differential output, has strong anti-interference ability, is suitable for high-impact scenarios, and increases the stability of double-differential single-axis gyroscope detection.

[0025] Furthermore, if Figure 1 As shown, each steering connecting beam group of the present embodiment also includes two inclined second steering elastic beams 42, one end of each second steering elastic beam 42 is fixed on the substrate, and the other end of each second steering elastic beam 42 is connected to the coupling mass block 21, the first steering elastic beam 41 and the second steering elastic beam 42 connected to each coupling mass block 21 are symmetrically distributed along the second symmetry axis of the second direction, and the two second steering elastic beams 42 of each steering connecting beam group are symmetrically distributed about the first symmetry axis.

[0026] Specifically, the two driving mass blocks 11 of each single differential structure have the same mass and a symmetrical structure, the two coupling mass blocks 21 have the same mass and a symmetrical structure, and the two detection mass blocks 31 have the same mass and a symmetrical structure. The dual-differential single-axis gyroscope with this structure can ensure that the Coriolis forces exerted on the two coupling mass blocks 21 have good consistency, thereby ensuring that the two detection mass blocks 31 are ultimately subjected to the same force, ensuring the consistency of detection, and increasing the accuracy of detection.

[0027] like Figure 1As shown, each coupling mass block 21 corresponds to two first steering elastic beams 41 and two second steering elastic beams 42, and the two first steering elastic beams 41 and the two second steering elastic beams 42 are respectively arranged at the four corner positions of the coupling mass block 21. In this embodiment, the angle between the first steering elastic beam 41 and the first direction is 30°, and the angle between the second steering elastic beam 42 and the first direction is also 30°. It should be noted that in other embodiments of the present invention, the angle between the first steering elastic beam 41 and the second steering elastic beam 42 and the first direction is not limited to 30° as defined in this embodiment, and can also be any angle value between 25° and 35°, or other angle values ​​less than 25° or greater than 35°, as long as the first steering elastic beam 41 and the second steering elastic beam 42 can play a steering role, and can be set according to actual needs, and this embodiment does not make specific limitations.

[0028] like Figure 1 As shown, in this embodiment, four coupling connection straight beams 22 are provided on each coupling mass block 21, and the coupling connection straight beams 22 extend along the second direction, and one end of the coupling connection straight beams 22 is connected to the coupling mass block 21, and the other end is connected to the driving mass block 11. The coupling connection straight beams 22 enable the movement of the driving mass block 11 along the Y-axis direction to be synchronously transmitted to the coupling mass block 21, thereby realizing the synchronous movement of the coupling mass block 21 and the driving mass block 11 in the Y-axis direction.

[0029] like Figure 1 and Figure 2 As shown, each driving mass block 11 of the present embodiment is provided with a driving electrode 12 and a driving detection electrode 13. The driving electrode 12 can drive the driving mass block 11 to move along the second direction, and the driving detection electrode 13 can respond to the movement of the driving mass block 11, thereby facilitating the adjustment of the movement of the driving mass block 11 driven by the driving electrode 12, thereby ensuring the stability of the movement of the driving mass block 11 under the driving mode.

[0030] like Figure 1 and Figure 3As shown, the dual differential single-axis gyroscope of this embodiment includes a single differential elastic beam 8, which can be deformed along the second direction and one end of which is connected to a driving mass block 11 of a single differential structure, and the other end of the single differential elastic beam 8 is connected to the driving mass block 11 of another single differential structure. The single differential elastic beam 8 can associate the two driving mass blocks 11 of the two single differential structures to ensure that the two driving mass blocks 11 move synchronously along the second direction. The number of single differential elastic beams 8 in this embodiment is two, and the two driving mass blocks 11 of each single differential structure correspond to the two single differential elastic beams 8 one by one. Each single differential elastic beam 8 is composed of two square frames, which can be deformed along the second direction. When the single differential elastic beam 8 composed of the square frames is deformed along the second direction, the force is balanced and it is not easy to deflect. It should be noted that in other embodiments of the present invention, the structure of the single differential elastic beam 8 is not limited to the limitation of this embodiment, and can also be a serpentine beam or an elastic beam of other structures, which is specifically set according to actual needs.

[0031] like Figure 1 and Figure 4 As shown, each single differential structure of the present embodiment further includes a first anchor point 51 and two anti-vibration elastic beams 6. The first anchor point 51 and the two anti-vibration elastic beams 6 are both located between two detection mass blocks 31 of the same single differential structure. The two anti-vibration elastic beams 6 are located on both sides of the first anchor point 51 along the first direction. Each anti-vibration elastic beam 6 includes a central anti-vibration coupling straight beam 61 extending along the first direction and two central anti-vibration coupling elastic beams 62 capable of deforming along the second direction. The two central anti-vibration coupling straight beams 61 of each single differential structure are respectively located on both sides of the first anchor point 51 along the first direction. One end of the central anti-vibration coupling straight beam 61 is connected to the first anchor point 51, and the other end of the central anti-vibration coupling straight beam 61 is simultaneously connected to the two central anti-vibration coupling elastic beams 62. Each central anti-vibration coupling elastic beam 62 is connected to the detection mass block 31 to associate the two detection mass blocks 31 of each single differential structure. When the dual-differential single-axis gyroscope is impacted, the two detection masses 31 of each single-differential structure move in the same direction, and the central anti-vibration coupling straight beam 61 can suppress the same-direction movement of the two detection masses 31, thereby improving the impact resistance of the dual-differential single-axis gyroscope.

[0032] like Figure 1As shown, each single differential structure of the present embodiment further includes a driving connection beam 7 and a second anchor point 52. The two ends of the driving connection beam 7 are respectively connected to the two driving mass blocks 11 of the same single differential structure. The driving connection beam 7 includes a driving connection beam 71 and a driving deformation beam 72. The driving connection beam 71 can rotate along the third direction around the second anchor point 52, which can not only ensure the consistency of the movement amplitude of the two driving mass blocks 11 of each single differential structure, but also suppress the in-phase movement of the two driving mass blocks 11 of the two single differential structures along the second direction, thereby improving the impact resistance of the dual differential single-axis gyroscope. The driving deformation beam 72 of the present embodiment can be deformed along the first direction and its two ends are respectively connected to the driving connection beam 71 and the driving mass block 11. Specifically, as Figure 1 As shown, each driving connecting beam 7 of the present embodiment includes four driving deformable beams 72, and the two driving deformable beams 72 of each driving connecting beam 7 correspond to one driving mass block 11, that is, each driving mass block 11 corresponds to four driving deformable beams 72, and the four driving deformable beams 72 are respectively arranged at the four corner positions of the driving mass block 11.

[0033] like Figure 1 As shown, the driving connection beam 7 of this embodiment also includes four driving connection straight beams 73, one end of each driving connection straight beam 73 is connected to the second anchor point 52, and the other end is connected to the driving connection cross beam 71, wherein two driving connection straight beams 73 extend along the first direction and are located on both sides of the second anchor point 52 along the first direction, and the other two driving connection straight beams 73 extend along the second direction and are located on both sides of the second anchor point 52 along the second direction. In the driving mode, the two driving mass blocks 11 move synchronously in opposite directions along the second direction, the driving connection cross beam 71 rotates with the center of the second anchor point 52 as the rotation point, and the driving deformation beam 72 and the driving connection straight beam 73 are deformed, further ensuring the consistency of the movement of the two driving mass blocks 11. In addition, this structure of the driving connection beam 7 also makes it impact-resistant.

[0034] like Figure 1 and Figure 7As shown, the dual-differential single-axis gyroscope of this embodiment further includes a third anchor point 53, a fourth anchor point 54, a driving straight beam 14, and a detection elastic beam 33 that can be extended and retracted along the second direction. Each detection mass block 31 corresponds to two detection elastic beams 33 and two third anchor points 53. The detection elastic beam 33 and the central anti-vibration coupling elastic beam 62 of the anti-vibration elastic beam 6 are respectively located on both sides of the detection mass block 31. The two detection elastic beams 33 and the two central anti-vibration coupling elastic beams 62 corresponding to each detection mass block 31 are respectively located at the four corners of the detection mass block 31. One end of each detection elastic beam 33 is fixed on the third anchor point 53, and the other end of each detection elastic beam 33 is connected to the detection mass block 31. Each driving mass block 11 corresponds to two third anchor points 53, two fourth anchor points 54, and four driving straight beams 14. Each driving straight beam 14 corresponds to one third anchor point 53 or one fourth anchor point 54. The two third anchor points 53 and the two fourth anchor points 54 are respectively arranged at the four corners of the coupling mass block 21. One end of each second steering elastic beam 42 is connected to a fourth anchor point 54 to achieve a fixed connection between the second steering elastic beam 42 and the substrate.

[0035] The detection elastic beam 33 of this embodiment has the same structure as the central anti-vibration coupling elastic beam 62 described above. The detection elastic beam 33 includes two detection connection frames arranged along the second direction and connected at one end. The detection elastic beam 33 of this structure can be deformed along the second direction to realize the elastic connection between the detection mass block 31 and the substrate along the second direction, ensuring that the detection mass block 31 can move along the second direction. The detection elastic beam 33 can also realize the rigid connection between the detection mass block 31 and the substrate in the first direction. When the dual differential single-axis gyroscope is subjected to vibration impact in the first direction, the detection elastic beam 33 can ensure that its displacement in the first direction is very small, achieving the anti-vibration effect without affecting the detection result. It should be noted that in other embodiments of the present invention, the detection elastic beam 33 can also include a detection connection frame or at least three detection connection frames arranged along the second direction and connected in sequence, as long as each detection mass block 31 can be rigidly connected to the substrate along the first direction and elastically connected along the second direction, and it can be set according to actual needs, and this embodiment is no longer limited.

[0036] According to the simulation results, as long as the structures, materials and stiffness of the first steering elastic beam 41, the second steering elastic beam 42, the coupling connecting straight beam 22, the detection elastic beam 33 and the anti-vibration elastic beam 6 are reasonably designed, the detection displacement of the detection mass block 31 can be amplified, thereby being greater than the displacement of the coupling mass block 21, further improving the detection sensitivity of the dual differential single-axis gyroscope.

[0037] In this embodiment, the centroid of the driving mass block 11 and the centroid of the coupling mass block 21 of each single differential structure are connected as the centroid line, the centroid line extends along the X-axis direction and the two detection masses 31 are symmetrically distributed relative to the centroid line. Specifically, to ensure that the centroid of the driving mass block 11 meets the above conditions, as Figure 2 As shown, the driving mass block 11 of this embodiment includes a first driving sub-mass block 111, a second driving sub-mass block 112, a first counterweight mass block 113, a second counterweight mass block 114 and a connecting mass block 115. The masses of the first driving sub-mass block 111 and the second driving sub-mass block 112 are equal and are respectively located at two ends of the coupling mass block 21 along the second direction. The first counterweight mass block 113 is located on one side of the first driving sub-mass block 111, and the second counterweight mass block 114 is located on one side of the second driving sub-mass block 112. The connecting mass block 115 is located on the other side of the first driving sub-mass block 111 and the second driving sub-mass block 112 and connects the first driving sub-mass block 111 and the second driving sub-mass block 112. The mass of the connecting mass block 115 is equal to the sum of the masses of the first counterweight mass block 113 and the second counterweight mass block 114. It should be noted that, in other embodiments of the present invention, the structure of the driving mass block 11 is not limited to the above-mentioned limitation of this embodiment, and can also be other structures, as long as the line connecting the center of mass of the driving mass block 11 of each single differential structure and the center of mass of the coupling mass block 21 extends along the X-axis direction.

[0038] like Figure 1 and Figure 5 As shown, the dual-differential single-axis gyroscope of this embodiment further includes a central connecting beam 9, one end of which is connected to a detection mass block 31 of a single differential structure, and the other end of which is connected to another detection mass block 31 of a single differential structure. Specifically, the central connecting beam 9 includes a first central crossbeam 91, a central longitudinal beam 92, and a second central crossbeam 93. The first central crossbeam 91 and the second central crossbeam 93 are arranged in parallel directions and both extend along the first direction. The first central crossbeam 91 and the second central crossbeam 93 can both be deformed along the second direction. The first central crossbeam 91 is fixed on a detection mass block 31 of a single differential structure, and the second central crossbeam 93 is fixed on another detection mass block 31 of a single differential structure. The central longitudinal beam 92 extends along the second direction and its two ends are respectively connected to the first central crossbeam 91 and the second central crossbeam 93, so that the central connecting beam 9 is formed into an I-beam.

[0039] In the detection mode, when the two detection masses 31 of a single differential structure move along the second direction toward each other, the two detection masses 31 of the other single differential structure move along the second direction toward away from each other. At this time, the detection mass 31 where the first center beam 91 is located and the detection mass 31 where the second center beam 93 is located move in the same direction.

[0040] like Figure 1 and Figure 6 As shown, each detection mass block 31 of the present embodiment is provided with a detection electrode 32, and the detection electrode 32 includes a detection positive electrode and a detection negative electrode that are antisymmetrically distributed. This design can effectively suppress the capacitance change introduced by the rotation of the detection mass block 31 and increase the detection sensitivity. The two detection electrodes 32 of the two detection mass blocks 31 of each single differential structure are symmetrically distributed. This arrangement plays a role in suppressing common mode errors and improving the anti-interference ability and detection sensitivity of the gyroscope.

[0041] The first steering elastic beam 41 and the second steering elastic beam 42 of this embodiment are both steering beams. Figure 6 As shown, the steering beam includes a first steering sub-beam 401, a second steering sub-beam 402 and a steering connecting beam 403. The first steering sub-beam 401 and the second steering sub-beam 402 are arranged in parallel directions. The two ends of the steering connecting beam 403 are respectively connected to the same end of the first steering sub-beam 401 and the second steering sub-beam 402. The first steering sub-beam 401 and the second steering sub-beam 402 are symmetrically distributed with the central axis of the steering connecting beam 403 as the third symmetry axis. The first steering sub-beam 401 is connected to the substrate or the detection mass block 31, and the second steering sub-beam 402 is connected to the coupling mass block 21.

[0042] Furthermore, if Figure 6 As shown, the first steering sub-beam 401 and the second steering sub-beam 402 of this embodiment are both square frame beams, the steering connecting beam 403 is a U-shaped connecting beam, and the two ends of the U-shaped connecting beam are respectively connected to the same end of the first steering sub-beam 401 and the second steering sub-beam 402. When the steering beam to which the first steering sub-beam 401 belongs is the first steering elastic beam 41, its other end is connected to the detection mass block 31, and when the steering beam to which the first steering sub-beam 401 belongs is the second steering elastic beam 42, its other end is connected to the substrate; the steering decoupling beam to which the second steering sub-beam 402 belongs, whether it is the first steering elastic beam 41 or the second steering elastic beam 42, its other end is connected to the coupling mass block 21. It should be noted that in other embodiments of the present invention, the structure of the first steering sub-beam 401 and the second steering sub-beam 402 is not limited to the square frame beam design of this embodiment, and can also be a U-shaped beam or an elastic beam of other structures, which is specifically set according to actual needs and is not limited in this embodiment.

[0043] Specifically, Figure 8 and Fig. 9As shown, the four driving mass blocks 11 of the present embodiment are respectively a first driving mass block 101, a second driving mass block 102, a third driving mass block 103 and a fourth driving mass block 104, the four coupling mass blocks 21 are respectively a first coupling mass block 201, a second coupling mass block 202, a third coupling mass block 203 and a fourth coupling mass block 204, the first driving mass block 101 corresponds to the first coupling mass block 201, the second driving mass block 102 corresponds to the second coupling mass block 202, the third driving mass block 103 corresponds to the third coupling mass block 203, the fourth driving mass block 104 corresponds to the fourth coupling mass block 204. 204, the four detection mass blocks 31 are respectively the first detection mass block 301, the second detection mass block 302, the third detection mass block 303 and the fourth detection mass block 304, the first detection mass block 301 is respectively connected to the first coupling mass block 201 and the second coupling mass block 202, the second detection mass block 302 is also simultaneously connected to the first coupling mass block 201 and the second coupling mass block 202, the third detection mass block 303 is respectively connected to the third coupling mass block 203 and the fourth coupling mass block 204, and the fourth detection mass block 304 is also simultaneously connected to the third coupling mass block 203 and the fourth coupling mass block 204.

[0044] Specifically, when the detection mass 31 moves, the capacitance change of the detection positive electrode is opposite to the capacitance change of the detection negative electrode. The arrangement directions of the detection positive electrode and the detection negative electrode on the two detection masses 31 are opposite. Specifically, Figure 1 The left part of the first detection mass block 301 is the detection positive electrode, and the right part is the detection negative electrode. The left part of the second detection mass block 302 is the detection negative electrode, and the right part is the detection positive electrode. This arrangement can further increase the accuracy of detection.

[0045] In the driving mode, the driving electrode 12 drives the corresponding driving mass block 11 to reciprocate along the second direction, and the coupling mass block 21 reciprocates synchronously therewith. Figure 8As shown, when the first driving mass 101 and the third driving mass 103 move in a direction away from each other, the second driving mass 102 and the fourth driving mass 104 move in a direction close to each other, and at the same time, the first coupling mass 201 and the third coupling mass 203 move in a direction away from each other, the second coupling mass 202 and the fourth coupling mass 204 move in a direction close to each other, and the driving connection beam 71 of the driving connection beam 7 rotates, and the rotation directions of the two driving connection beams 71 are opposite. Similarly, when the first driving mass 101 and the third driving mass 103 move in a direction close to each other, the second driving mass 102 and the fourth driving mass 104 move in a direction away from each other, and at the same time, the first coupling mass 201 and the third coupling mass 203 move in a direction close to each other, and the second coupling mass 202 and the fourth coupling mass 204 move in a direction away from each other.

[0046] In the detection mode, when detecting the angular velocity in the third direction, the coupling mass block 21 is subjected to the Coriolis force in the first direction and moves along the first direction, and the detection mass block 31 reciprocates synchronously with the coupling mass block 21 along the second direction. Fig. 9 As shown, when the first coupling mass 201 and the second coupling mass 202 move in the first direction toward a direction away from each other, the third coupling mass 203 and the fourth coupling mass 204 move in the direction toward each other, and at the same time, the first detection mass 301 and the second detection mass 302 move in the direction toward each other, and the third detection mass 303 and the fourth detection mass 304 move in the direction away from each other, and at this time, the movement directions of the second detection mass 302 and the third detection mass 303 are the same. Similarly, when the first coupling mass 201 and the second coupling mass 202 move in the first direction toward a direction toward each other, the third coupling mass 203 and the fourth coupling mass 204 move in the direction away from each other, and at the same time, the first detection mass 301 and the second detection mass 302 move in the direction away from each other, and the third detection mass 303 and the fourth detection mass 304 move in the direction toward each other.

[0047] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A dual-differential single-axis gyroscope, characterized in that: A first direction, a second direction and a third direction which are perpendicular to each other are defined, and the dual-differential single-axis gyroscope includes two single differential structures elastically connected along the second direction, and each of the single differential structures includes: Two driving masses, the two driving masses are distributed along the first direction; two coupling mass blocks, each of which is disposed in one of the driving mass blocks and the two are coupled and connected, and when the driving mass block performs reciprocating driving motion along the second direction, the coupling mass block also reciprocates along the second direction; Two detection components, the two detection components are distributed along the second direction and are located between the two coupling mass blocks, each of the detection components includes a detection mass block, each of the detection mass blocks is rigidly connected to the substrate along the first direction and elastically connected along the second direction, and each of the detection mass blocks is connected to the two coupling mass blocks; one of the coupling mass block and the detection mass block is provided with a limiting groove, and the other is provided with a limiting boss matched with the limiting groove, and when the coupling mass block moves a preset displacement relative to the detection mass block along the second direction, the limiting boss abuts against the limiting groove; Two steering connection beam groups, the two steering connection beam groups correspond to the two coupling mass blocks one by one, each of the steering connection beam groups comprises two first steering elastic beams arranged obliquely, one end of each of the first steering elastic beams is connected to the coupling mass block, and the other end is connected to the detection mass block, and the two first steering elastic beams are symmetrically distributed along the first symmetry axis of the first direction; The four driving mass blocks of the two single differential structures are orthogonally symmetrically distributed. When detecting the angular velocity in the third direction, the coupling mass block moves along the first direction due to the Coriolis force along the first direction, and the detection mass block moves along the second direction driven by the steering connecting beam group.

2. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the steering connecting beam groups also includes two second steering elastic beams that are arranged obliquely, one end of each of the second steering elastic beams is fixed on the substrate, and the other end is connected to the coupling mass block, the first steering elastic beam and the second steering elastic beam connected to each of the coupling mass blocks are symmetrically distributed along the second symmetry axis of the second direction, and the two second steering elastic beams of each steering connecting beam group are symmetrically distributed about the first symmetry axis.

3. The dual differential single-axis gyroscope according to claim 2, characterized in that: The first steering elastic beam and the second steering elastic beam are both steering beams, and the steering beam includes a first steering sub-beam, a second steering sub-beam and a steering connecting beam. The first steering sub-beam and the second steering sub-beam are arranged in parallel directions, and the two ends of the steering connecting beam are respectively connected to the same end of the first steering sub-beam and the second steering sub-beam. The first steering sub-beam and the second steering sub-beam are symmetrically distributed with the central axis of the steering connecting beam as the third symmetry axis. The first steering sub-beam is connected to the substrate or the detection mass block, and the second steering sub-beam is connected to the coupling mass block.

4. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the single differential structures also includes a first anchor point and two anti-vibration elastic beams, the first anchor point and the two anti-vibration elastic beams are both located between the two detection mass blocks of one of the single differential structures, the two anti-vibration elastic beams are located on both sides of the first anchor point along the first direction, each of the anti-vibration elastic beams includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams that can be deformed along the second direction, the central anti-vibration coupling straight beams of the two anti-vibration elastic beams are respectively located on both sides of the first anchor point along the first direction, one end of the central anti-vibration coupling straight beam is connected to the first anchor point, and the other end is simultaneously connected to the two central anti-vibration coupling elastic beams, and each of the central anti-vibration coupling elastic beams is connected to the detection mass block.

5. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the single differential structures also includes a driving connection beam and a second anchor point, and the two ends of the driving connection beam are respectively connected to the two driving mass blocks of the single differential structure. The driving connection beam includes a driving connection beam and a driving deformation beam. The driving connection beam can rotate along the third direction around the second anchor point, and the driving deformation beam can be deformed along the first direction and its two ends are respectively connected to the driving connection beam and the driving mass block.

6. The dual differential single-axis gyroscope according to claim 1, characterized in that: The dual-differential single-axis gyroscope includes a single-differential elastic beam, which can be deformed along the second direction and has one end connected to the driving mass block of one of the single-differential structures and the other end connected to the driving mass block of another of the single-differential structures.

7. The dual-differential single-axis gyroscope according to claim 1, characterized in that: The dual-differential single-axis gyroscope further includes a central connecting beam, one end of which is connected to the detection mass block of one of the single differential structures, and the other end of which is connected to the detection mass block of another single differential structure.

8. The dual-differential single-axis gyroscope according to claim 7, characterized in that: The central connecting beam includes a first central crossbeam, a central longitudinal beam and a second central crossbeam. The first central crossbeam and the second central crossbeam are arranged in parallel directions and both extend along the first direction. The first central crossbeam and the second central crossbeam can be deformed along the second direction. The first central crossbeam is fixed on the detection mass block of one of the single differential structures, and the second central crossbeam is fixed on the detection mass block of another single differential structure. The central longitudinal beam extends along the second direction and its two ends are respectively connected to the first central crossbeam and the second central beam.

9. The dual-differential single-axis gyroscope according to claim 1, characterized in that: A line connecting the center of mass of the driving mass block and the center of mass of the coupling mass block of each single differential structure is a center of mass line, the center of mass line extends along the first direction, and the two detection masses are symmetrically distributed relative to the center of mass line.

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