Tactile sensor and manipulator

Abstract

The invention discloses a touch sensor and a manipulator, and belongs to the field of sensors. The tactile sensor comprises a triboelectric layer, an electrode layer and a piezoresistive layer, the triboelectric layer, the electrode layer and the piezoresistive layer are stacked, and the electrode layer is located between the triboelectric layer and the piezoresistive layer; the electrode layer comprises a matrix layer, a friction electrode, a temperature layer and a piezoresistive electrode; the triboelectric layer, the temperature layer and the piezoresistive electrode are all arranged on the base body layer, the friction electrode faces the triboelectric layer, and the piezoresistive electrode faces the piezoresistive layer; the piezoresistive layer comprises a piezoresistive base body and piezoresistive protrusions arranged on the piezoresistive base body, the piezoresistive protrusions face the electrode layer, the piezoresistive protrusions are used for abutting against the piezoresistive electrodes, and the piezoresistive protrusions are deformable; under the condition that the piezoresistive protrusions make contact with the piezoresistive electrodes, the shapes of the piezoresistive protrusions change, the contact area of the piezoresistive protrusions and the piezoresistive electrodes changes, and the resistance detected by the piezoresistive electrodes changes.

Description

Technical Field

[0001] The present application belongs to the field of sensors, and specifically relates to a tactile sensor and a manipulator. Background Art

[0002] With the rapid development of artificial intelligence and robotics, multimodal tactile perception has become an indispensable part of high-performance robotic systems. In the human tactile system, the skin can perceive and distinguish multiple physical stimuli such as pressure, temperature and material in real time. This multimodal perception ability provides the basis for precise control and complex interaction. In related technologies, tactile sensors are usually set on the manipulators of robotic systems. However, in related technologies, the functions of tactile sensors are single, and it is difficult to achieve synchronous detection of multiple physical parameters. Summary of the invention

[0003] The purpose of the embodiments of the present application is to provide a tactile sensor and a manipulator, which at least solve the problem that the tactile sensor has a single function and is difficult to achieve synchronous detection of multiple physical parameters.

[0004] In a first aspect, an embodiment of the present application provides a tactile sensor, the tactile sensor comprising: a triboelectric layer, an electrode layer, and a piezoresistive layer;

[0005] The triboelectric layer, the electrode layer and the piezoresistive layer are stacked, and the electrode layer is located between the triboelectric layer and the piezoresistive layer;

[0006] The electrode layer includes a substrate layer, a friction electrode, a temperature layer and a piezoresistive electrode; the friction electric layer, the temperature layer and the piezoresistive electrode are all arranged on the substrate layer, the friction electrode faces the friction electric layer, and the piezoresistive electrode faces the piezoresistive layer;

[0007] The piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion disposed on the piezoresistive substrate, the piezoresistive protrusion faces the electrode layer, the piezoresistive protrusion is used to abut against the piezoresistive electrode, and the piezoresistive protrusion is deformable;

[0008] When the piezoresistive protrusion contacts the piezoresistive electrode, the shape of the piezoresistive protrusion changes, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, and the resistance detected by the piezoresistive electrode changes.

[0009] Optionally, the temperature layer includes a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes;

[0010] Along the stacking direction of the friction layer and the electrode layer, the base layer includes a first surface and a second surface facing each other, the first surface faces the friction layer, and the second surface faces the piezoresistive layer;

[0011] The first surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, and the P-type temperature electrodes and the N-type temperature electrodes are arranged alternately. The second surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, and the P-type temperature electrodes and the N-type temperature electrodes are arranged alternately. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the second surface are positioned opposite to and electrically connected to each other, the N-type temperature electrodes on the first surface and the P-type temperature electrodes on the second surface are positioned opposite to and electrically connected to each other, the P-type temperature electrodes on the first surface are electrically connected to the N-type temperature electrodes on the first surface, and the P-type temperature electrodes on the second surface are electrically connected to the N-type temperature electrodes on the second surface.

[0012] Optionally, a surface of the triboelectric layer facing away from the electrode layer is provided with a plurality of friction protrusions.

[0013] Optionally, a conductive layer is provided on the surface of the piezoresistive protrusion, and the conductive layer covers the piezoresistive protrusion;

[0014] And / or, conductive particles are disposed inside the piezoresistive protrusion.

[0015] Optionally, the tactile sensor further comprises an elastic supporting frame;

[0016] The support frame is arranged on the surface of the piezoresistive substrate facing the electrode layer, and the piezoresistive protrusion is located inside the support frame, the thickness of the support frame is less than or equal to the height of the piezoresistive protrusion, the thickness of the support frame is: the distance between the two opposite surfaces of the support frame along the direction of stacking of the triboelectric layer and the electrode layer, and the height of the piezoresistive protrusion is: the distance between one end of the piezoresistive protrusion away from the piezoresistive substrate and the piezoresistive substrate;

[0017] Wherein, the elastic modulus of the support frame is greater than the elastic modulus of the piezoresistive protrusion.

[0018] Optionally, a first lead and a second lead are provided on a surface of the substrate layer facing the triboelectric layer;

[0019] The first lead is electrically connected to the friction electrode, and the second lead is electrically connected to the piezoresistive electrode.

[0020] Optionally, the second lead is electrically connected to the piezoresistive electrode through a via.

[0021] Optionally, along the direction in which the triboelectric layer and the electrode layer are stacked, the projection of the triboelectric electrode on the substrate layer overlaps with the projection of the triboelectric layer on the substrate layer, or the projection of the triboelectric electrode on the substrate layer is located inside the projection of the triboelectric layer on the substrate layer.

[0022] Optionally, the piezoresistive electrode includes a first piezoresistive electrode layer and a second piezoresistive electrode layer, the first piezoresistive electrode layer has a plurality of first protrusions and a plurality of first recesses, the first recesses and the first protrusions are arranged alternately, the second piezoresistive electrode layer has a plurality of second protrusions and a plurality of second recesses, the second recesses and the second protrusions are arranged alternately, the first protrusions are embedded in the second recesses, and the second protrusions are embedded in the first recesses;

[0023] The first piezoresistive electrode layer and the second piezoresistive electrode layer are used for compressing the piezoresistive protrusion.

[0024] In a second aspect, an embodiment of the present application provides a manipulator, comprising the tactile sensor described in any one of the first aspects above.

[0025] In the embodiment of the present application, since the triboelectric layer, the temperature layer and the piezoresistive electrode are all arranged on the base layer, the triboelectric layer faces the triboelectric layer, and the piezoresistive electrode faces the piezoresistive layer, the temperature can be detected through the temperature layer, and the triboelectric layer faces the triboelectric layer, so that once the surface of the triboelectric layer away from the base layer is subjected to pressure and friction, the triboelectric layer and the triboelectric electrode can generate friction charges, and the friction charges can be transmitted to the outside of the sensor and detected, that is, once the surface of the triboelectric layer away from the base layer is subjected to pressure, the triboelectric layer can generate friction charges at the moment of force, so that the tactile sensor can detect transient pressure. In addition, when objects of different materials touch the triboelectric layer, the different materials of the objects cause the size of the friction charges generated by the triboelectric layer to be different, so that the tactile sensor can also detect the material of the object touching the tactile sensor. In addition, the piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion arranged on the piezoresistive substrate. The piezoresistive protrusion faces the electrode layer. The piezoresistive protrusion is used to abut against the piezoresistive electrode, and the piezoresistive protrusion is deformable. Therefore, once the surface of the friction electric layer facing away from the substrate layer is subjected to pressure, after the pressure is transmitted to the substrate layer, the substrate layer can drive the piezoresistive electrode to move, so that the piezoresistive electrode contacts and squeezes the piezoresistive protrusion, and the piezoresistive protrusion changes shape, that is, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, so that the size of the resistance connected to the piezoresistive electrode changes, so that the piezoresistive electrode detects the resistance change, and then the voltage output by the tactile sensor changes. The piezoresistance can be measured by detecting the voltage output by the tactile sensor, and when the friction electric layer is subjected to pressure loading, the output of the tactile sensor will not change with time, so that static pressure measurement can be achieved. That is, in the embodiment of the present application, by providing a friction electric layer, a friction electrode, a base layer, a temperature layer, a piezoresistive electrode and a piezoresistive layer, the tactile sensor can not only detect the temperature through the temperature layer, but also detect the material of the object touching the friction electric layer through the tactile sensor, and detect the transient pressure and static pressure touching the tactile sensor. That is, in the embodiment of the present application, the tactile sensor has diversified functions and can realize the simultaneous detection of multiple physical parameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 One of the exploded views of a tactile sensor provided in an embodiment of the present application is shown;

[0027] Figure 2 A top view of an electrode layer provided in an embodiment of the present application is shown;

[0028] Figure 3 A bottom view showing an electrode layer provided in an embodiment of the present application;

[0029] Figure 4 The second exploded view of a tactile sensor provided in an embodiment of the present application is shown.

[0030] Reference numerals:

[0031] 001: via; 10: triboelectric layer; 101: friction protrusion; 20: electrode layer; 21: substrate layer; 22: friction electrode; 23: temperature layer; 24: piezoresistive electrode; 211: first lead; 212: second lead; 231: P-type temperature electrode; 232: N-type temperature electrode; 241: first piezoresistive electrode layer; 242: second piezoresistive electrode layer; 2411: first protrusion; 2412: first recess; 2421: second protrusion; 2422: second recess; 30: piezoresistive layer; 31: piezoresistive substrate; 32: piezoresistive protrusion; 40: support frame. DETAILED DESCRIPTION

[0032] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0033] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0034] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] like Figures 1 to 4 As shown, the tactile sensor includes: a triboelectric layer 10 , an electrode layer 20 and a piezoresistive layer 30 .

[0036] The triboelectric layer 10, the electrode layer 20 and the piezoresistive layer 30 are stacked, and the electrode layer 20 is located between the triboelectric layer 10 and the piezoresistive layer 30; the electrode layer 20 includes a base layer 21, a triboelectric electrode 22, a temperature layer 23 and a piezoresistive electrode 24; the triboelectric layer 10, the temperature layer 23 and the piezoresistive electrode 24 are all arranged on the base layer 21, the triboelectric electrode 22 faces the triboelectric layer 10, and the piezoresistive electrode 24 faces the piezoresistive layer 30; the piezoresistive layer 30 includes a piezoresistive base 31 and a piezoresistive protrusion 32 arranged on the piezoresistive base 31, the piezoresistive protrusion 32 faces the electrode layer 20, the piezoresistive protrusion 32 is used to abut against the piezoresistive electrode 24, and the piezoresistive protrusion 32 is deformable; when the piezoresistive protrusion 32 contacts the piezoresistive electrode 24, the shape of the piezoresistive protrusion 32 changes, the contact area of ​​the piezoresistive protrusion 32 and the piezoresistive electrode 24 changes, and the resistance detected by the piezoresistive electrode 24 changes.

[0037] In the embodiment of the present application, since the triboelectric layer 10, the temperature layer 23 and the piezoresistive electrode 24 are all arranged on the base layer 21, the triboelectric layer 10 is faced with the triboelectric layer 22, and the piezoresistive electrode 24 is faced with the piezoresistive layer 30, the temperature can be detected through the temperature layer 23, and the triboelectric layer 22 is faced with the triboelectric layer 10, so that once the surface of the triboelectric layer 10 away from the base layer 21 is subjected to pressure and is rubbed, the triboelectric layer 10 and the triboelectric electrode 22 can generate friction charges, and the friction charges can be transmitted to the outside of the sensor and detected, that is, once the surface of the triboelectric layer 10 away from the base layer 21 is subjected to pressure, the triboelectric layer 10 can generate friction charges at the moment of force, so that the tactile sensor can detect transient pressure. In addition, when objects of different materials touch the triboelectric layer 10, the different materials of the objects cause the size of the friction charges generated by the triboelectric layer 10 to be different, so that the tactile sensor can also detect the material of the object touching the tactile sensor. In addition, the piezoresistive layer 30 includes a piezoresistive substrate 31 and a piezoresistive protrusion 32 disposed on the piezoresistive substrate 31. The piezoresistive protrusion 32 faces the electrode layer 20. The piezoresistive protrusion 32 is used to abut against the piezoresistive electrode 24, and the piezoresistive protrusion 32 is deformable. Therefore, once the surface of the triboelectric layer 10 away from the substrate layer 21 is subjected to pressure, after the pressure is transmitted to the substrate layer 21, the substrate layer 21 can drive the piezoresistive electrode 24 to move, so that the piezoresistive electrode 24 contacts with the piezoresistive protrusion 32, squeezing the piezoresistive protrusion 32. 2, the shape of the piezoresistive protrusion 32 will change, that is, the area of ​​contact between the piezoresistive protrusion 32 and the piezoresistive electrode 24 changes, so that the size of the resistance connected to the piezoresistive electrode 24 changes, so that the piezoresistive electrode 24 detects the change in resistance, and then the voltage output by the tactile sensor changes. By detecting the voltage output by the tactile sensor, the piezoresistance can be measured, and when the friction electric layer 10 is subjected to pressure loading, the output of the tactile sensor will not change with time, so that the static pressure can be measured. That is, in the embodiment of the present application, by setting the friction electric layer 10, the friction electrode 22, the base layer 21, the temperature layer 23, the piezoresistive electrode 24 and the piezoresistive layer 30, the tactile sensor can not only detect the temperature through the temperature layer 23, but also detect the material of the object touching the friction electric layer 10 through the tactile sensor, and detect the transient pressure and static pressure touching the tactile sensor, that is, in the embodiment of the present application, the tactile sensor has diversified functions and can realize the synchronous detection of multiple physical parameters.

[0038] It should be noted that the friction electrode 22 is connected to the friction electric layer 10 by bonding, that is, the friction electrode 22 is bonded to the friction electric layer 10 by bonding glue.

[0039] In addition, in the embodiment of the present application, the number of the triboelectric layers 10 may be greater than or equal to 2, for example, the number of the triboelectric layers 10 is 2, for example, the number of the triboelectric layers 10 is 3, and for example, the number of the triboelectric layers 10 is 5. The specific number of the triboelectric layers 10 is not limited in the embodiment of the present application. The number of the triboelectric electrodes 22 is equal to the number of the triboelectric layers 10.

[0040] In addition, by setting the number of triboelectric layers 10 to be greater than or equal to 2, the tactile sensor can effectively improve the accuracy of determining the material of the object when outputting the charge of the triboelectric layer 10 to determine the material of the object touching the triboelectric layer 10. When the number of triboelectric layers is greater than or equal to 2, the materials of different triboelectric layers 10 are different, so that when the object touches the tactile sensor, the charge signals generated by the triboelectric layers 10 of different materials can be combined to verify the material information of the object touching the tactile sensor, thereby improving the accuracy of determining the material of the object touching the tactile sensor.

[0041] In addition, in the embodiment of the present application, after the friction electric layer 10 is bonded to the friction electrode 22, the friction electric layer 10 and the friction electrode 22 are combined into a friction generator, thereby generating different charge signals when contacting and separating with different objects. Therefore, the detection of the charge signal can determine the material of the object in contact with the friction pad layer.

[0042] In addition, in the embodiment of the present application, the material of the piezoresistive protrusion 32 and the piezoresistive substrate 31 can be the same, that is, the piezoresistive protrusion 32 and the piezoresistive substrate 31 are made of the same material. Of course, the material of the piezoresistive protrusion 32 and the piezoresistive substrate 31 can also be different, that is, the piezoresistive protrusion 32 and the piezoresistive substrate 31 are made of different materials. In this case, the piezoresistive protrusion 32 can be connected to the piezoresistive substrate 31 by bonding.

[0043] In addition, in the embodiment of the present application, the number of the piezoresistive protrusions 32 can be set according to actual needs, for example, the number of the piezoresistive protrusions 32 is 10, and for another example, the number of the piezoresistive protrusions 32 is 15. The specific number of the piezoresistive protrusions 32 is not limited in the embodiment of the present application.

[0044] In addition, the shape of the piezoresistive protrusion 32 can be set according to actual needs. For example, the piezoresistive protrusion 32 is conical, and for another example, the piezoresistive protrusion 32 is prism-shaped. The specific shape of the piezoresistive protrusion 32 is not limited in the embodiment of the present application.

[0045] In addition, in some embodiments, the temperature layer 23 may include a plurality of P-type temperature electrodes 231 and a plurality of N-type temperature electrodes 232; along the direction in which the friction layer and the electrode layer 20 are stacked, the base layer 21 includes a first surface and a second surface facing each other, the first surface faces the friction layer, and the second surface faces the piezoresistive layer 30; the first surface is provided with a plurality of P-type temperature electrodes 231 and a plurality of N-type temperature electrodes 232, the P-type temperature electrodes 231 and the N-type temperature electrodes 232 are alternately arranged, and the second surface is provided with a plurality of P-type temperature electrodes 231 and a plurality of N-type temperature electrodes 232. and multiple N-type temperature electrodes 232, P-type temperature electrodes 231 and N-type temperature electrodes 232 are arranged alternately, the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface are positioned opposite and electrically connected, the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 on the second surface are positioned opposite and electrically connected, the P-type temperature electrode 231 on the first surface is electrically connected to the N-type temperature electrode 232 on the first surface, and the P-type temperature electrode 231 on the second surface is electrically connected to the N-type temperature electrode 232 on the second surface. Through such an arrangement, the temperature layer 23 can detect the temperature through the P-type temperature electrode 231 and the N-type temperature electrode 232, and different types of temperature electrodes are arranged on two opposite surfaces of the base layer 21. Compared with the temperature layer 23 in the related art arranged on the same surface, this arrangement of the present application can greatly save the space of the tactile sensor, so that the tactile sensor can increase the output voltage in a limited space.

[0046] It should be noted that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface can be connected through a via 001, that is, a through hole is opened on the base layer 21, and a conductive member or a conductive layer is arranged in the through hole, and the conductive member or the conductive layer is respectively connected to the P-type temperature electrode 231 and the N-type temperature electrode 232, so that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface are connected through the via 001; in addition, the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 on the second surface can be connected through a via 001, that is, a through hole is opened on the base layer 21, and a conductive member or a conductive layer is arranged in the through hole, and the conductive member or the conductive layer is respectively connected to the P-type temperature electrode 231 and the N-type temperature electrode 232, so that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface are connected through the via 001. In addition, the P-type temperature electrode 231 on the first surface can be connected to the N-type temperature electrode 232 on the first surface through a conductive layer, and the P-type temperature electrode 231 on the second surface can be connected to the N-type temperature electrode 232 on the second surface through a conductive layer.

[0047] In addition, in the embodiment of the present application, the P-type temperature electrode 231 and the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 and the N-type temperature electrode 232 on the second surface can be connected in series in sequence, that is, one P-type temperature electrode 231 on the first surface is electrically connected to one N-type temperature electrode 232 on the second surface, the N-type temperature electrode 232 on the second surface is electrically connected to the P-type temperature electrode 231 on the second surface, the P-type temperature electrode 231 on the second surface is electrically connected to the N-type temperature electrode 232 on the first surface, and the N-type temperature electrode 232 on the first surface is electrically connected to another P-type temperature electrode 231 on the first surface. Wherein, when the P-type temperature electrode 231 and the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 and the N-type temperature electrode 232 on the second surface are connected in series in sequence, the P-type temperature electrode 231 and the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 and the N-type temperature electrode 232 on the second surface can be connected in series in sequence.

[0048] In addition, in some embodiments, a surface of the triboelectric layer 10 facing away from the electrode layer 20 is provided with a plurality of friction protrusions 101 .

[0049] Through such a configuration, the multiple friction protrusions 101 can effectively increase the effective contact area of ​​the triboelectric layer 10, thereby effectively increasing the amount of triboelectric charges generated by the triboelectric layer 10, enhancing the strength of the triboelectric charges, and effectively improving the output performance of the triboelectric generator formed by the triboelectric layer 10 and the triboelectric electrode 22. In addition, the presence of the friction protrusions 101 can also cause a higher local electric field strength, thereby improving the separation and transfer efficiency of the triboelectric charges.

[0050] In addition, in the embodiment of the present application, the friction protrusion 101 can be elastic, so that the elastic recovery type of the friction protrusion 101 can be improved, the contact and separation effect of the friction protrusion 101 can be enhanced, the energy loss can be reduced, and the mechanical durability of the tactile sensor can be improved.

[0051] In addition, in the embodiment of the present application, the number of friction protrusions 101 can be set according to actual needs, for example, the number of friction protrusions 101 is 13, and for another example, the number of friction protrusions 101 is 20. The specific number of friction protrusions 101 is not limited in the embodiment of the present application.

[0052] In addition, the shape of the friction protrusion 101 can be set according to actual needs. For example, the friction protrusion 101 is conical, and for another example, the friction protrusion 101 is prism-shaped. The specific shape of the friction protrusion 101 is not limited in the embodiment of the present application.

[0053] In addition, in some embodiments, a conductive layer is provided on the surface of the piezoresistive protrusion 32, and the conductive layer covers the piezoresistive protrusion 32; and / or, conductive particles are provided inside the piezoresistive protrusion 32. By such a configuration, once the piezoresistive electrode 24 contacts the piezoresistive protrusion 32, the piezoresistive electrode 24 can compress the piezoresistive protrusion 32, so that the piezoelectric layer on the piezoresistive protrusion 32 changes with the shape of the piezoresistive protrusion 32, and / or, the conductive particles inside the piezoresistive protrusion 32 change, which helps to change the resistance of the path connected to the piezoresistive electrode, thereby causing the tactile sensor to output different voltages to determine the static pressure. That is, by providing a conductive layer on the surface of the piezoresistive protrusion 32, and the conductive layer covers the piezoresistive protrusion 32; and / or, by providing conductive particles inside the piezoresistive protrusion 32, it is possible to facilitate the tactile sensor to detect static pressure.

[0054] It should be noted that, in the embodiment of the present application, a conductive layer may be provided only on the surface of the piezoresistive protrusion 32, or conductive particles may be provided only inside the piezoresistive protrusion 32. Of course, a conductive layer may be provided on the surface of the piezoresistive protrusion 32, and conductive particles may be provided inside the piezoresistive protrusion 32. This is not limited in the embodiment of the present application.

[0055] In addition, in the embodiment of the present application, a conductive layer may be provided on the surface of the piezoresistive substrate 31, and / or conductive particles may be provided inside the piezoresistive substrate 31. With such a configuration, once the piezoresistive protrusion 32 is over-extended, the piezoresistive electrode 24 may contact the piezoresistive substrate 31, thereby increasing the voltage output by the tactile sensor, helping the tactile sensor to detect a larger static pressure and increasing the detection range of the tactile sensor to detect pressure.

[0056] It should be noted that, in the embodiment of the present application, a conductive layer may be provided only on the surface of the piezoresistive substrate 31, or conductive particles may be provided only inside the piezoresistive substrate 31. Of course, a conductive layer may be provided on the surface of the piezoresistive substrate 31, and conductive particles may be provided inside the piezoresistive substrate 31. The embodiment of the present application does not limit this.

[0057] In addition, in some embodiments, the tactile sensor may further include an elastic support frame 40; the support frame 40 is arranged on the surface of the piezoresistive substrate 31 facing the electrode layer 20, and the piezoresistive protrusion 32 is located inside the support frame 40, the thickness of the support frame 40 is less than or equal to the height of the piezoresistive protrusion 32, the thickness of the support frame 40 is: the distance between the two opposite surfaces of the support frame 40 along the stacking direction of the friction electric layer 10 and the electrode layer 20, the height of the piezoresistive protrusion 32 is: the distance between the end of the piezoresistive protrusion 32 away from the piezoresistive substrate 31 and the piezoresistive substrate 31; wherein, the elastic modulus of the support frame 40 is greater than the elastic modulus of the piezoresistive protrusion 32.

[0058] Since the thickness of the support frame 40 is less than or equal to the height of the piezoresistive protrusion 32, it can be ensured that in the initial state of the touch sensor, once the touch sensor is touched by force, the piezoresistive electrode 24 can contact the piezoresistive protrusion 32, so that the touch sensor can output voltage and detect static pressure, so that the touch sensor can detect relatively small pressure, which helps to increase the detection range of the touch sensor. In addition, the elastic modulus of the support frame 40 is greater than the elastic modulus of the piezoresistive protrusion 32, so that it can be ensured that after the pressure touching the touch sensor disappears, the support frame 40 can rebound quickly, so that the touch sensor has a good recovery response.

[0059] In addition, in the embodiment of the present application, the thickness of the support frame 40 can be adjusted as needed, thereby changing the contact area between the piezoresistive protrusion 32 and the piezoresistive electrode 24 , so that the initial detection value of the tactile sensor is adjusted.

[0060] In addition, in the embodiment of the present application, the thickness of the support frame 40 can be less than the height of the piezoresistive protrusion 32. Through such a configuration, once the tactile sensor is touched, the piezoresistive electrode 24 can contact the piezoresistive protrusion 32, so that the tactile sensor can output data, thereby avoiding the problem that the distance between the piezoresistive protrusion 32 and the piezoresistive electrode 24 is too large, resulting in the tactile sensor not outputting data when being touched, and then causing the tactile sensor to be unable to detect static pressure.

[0061] It should be noted that the support frame 40 can be connected to the surface of the piezoresistive substrate 31 by bonding. Of course, the support frame 40 and the surface of the piezoresistive substrate 31 can also be connected by bonding. The specific manner in which the support frame 40 is set on the surface of the piezoresistive substrate 31 is not limited in the embodiments of the present application.

[0062] In addition, in the embodiment of the present application, when using tactile sensors, multiple tactile sensors can be made to form a sensor array. When the sensor array is then applied to a robot, the support frames 40 in two adjacent tactile sensors can abut against each other, so that the support frames 40 can isolate the two adjacent tactile sensors and avoid the problem that the two adjacent tactile sensors may interfere with each other.

[0063] In addition, in some embodiments, a first lead 211 and a second lead 212 are provided on the surface of the base layer 21 facing the friction electric layer 10 ; the first lead 211 is electrically connected to the friction electrode 22 , and the second lead 212 is electrically connected to the piezoresistive electrode 24 .

[0064] This arrangement is equivalent to arranging leads on the same surface of the base layer 21, which is convenient for subsequent external processing circuits of the tactile sensor and convenient for setting leads, thus avoiding complex and difficult welding, wire bonding and other processes.

[0065] In addition, in the embodiment of the present application, a temperature lead may also be provided on the surface of the base layer 21 facing the triboelectric layer 10 , and the temperature lead is electrically connected to the P-type temperature electrode 231 and / or the N-type temperature electrode 232 .

[0066] In addition, in the embodiment of the present application, the second lead 212 is electrically connected to the piezoresistive electrode 24 through the via 001. This arrangement facilitates the electrical connection of the second lead 212 to the piezoresistive electrode 24, avoiding the need to set up additional circuits to electrically connect the second lead 212 to the piezoresistive electrode 24, thereby helping to reduce the size of the tactile sensor. In addition, the second lead 212 is electrically connected to the piezoresistive electrode 24 through the via 001, which ensures that the first lead 211 and the second lead 212 are located on the same surface.

[0067] It should be noted that a through hole can be opened on the base layer 21 , and a conductive member or a conductive layer can be set in the through hole. The conductive member or the conductive layer can respectively connect the second lead 212 and the piezoresistive electrode 24 , so that the second lead 212 and the piezoresistive electrode 24 are connected through the via 001 .

[0068] In addition, in some embodiments, along the direction in which the triboelectric layer 10 and the electrode layer 20 are stacked, the projection of the triboelectric electrode 22 on the base layer 21 overlaps with the projection of the triboelectric layer 10 on the base layer 21, or the projection of the triboelectric electrode 22 on the base layer 21 is located inside the projection of the triboelectric layer 10 on the base layer 21. Through such a setting, it can be ensured that when the triboelectric layer 10 is touched, the triboelectric layer 10 can moderately contact the triboelectric electrode 22, thereby generating triboelectric charges, which in turn helps to detect the material of the object touching the triboelectric layer 10 through the tactile sensor.

[0069] In addition, in some embodiments, the piezoresistive electrode 24 may include a first piezoresistive electrode layer 241 and a second piezoresistive electrode layer 242, the first piezoresistive electrode layer 241 has a plurality of first protrusions 2411 and a plurality of first recesses 2412, the first recesses 2412 and the first protrusions 2411 are arranged alternately, the second piezoresistive electrode layer 242 has a plurality of second protrusions 2421 and a plurality of second recesses 2422, the second recesses 2422 and the second protrusions 2421 are arranged alternately, the first protrusions 2411 are embedded in the second recesses 2422, and the second protrusions 2421 are embedded in the first recesses 2412; the first piezoresistive electrode layer 241 and the second piezoresistive electrode layer 242 are used to squeeze the piezoresistive protrusion 32. Through such a configuration, the first piezoresistive electrode layer 241 and the second piezoresistive electrode layer 242 form a cross-finger shape, so that when the piezoresistive electrode 24 contacts the piezoresistive protrusion 32, the cross-finger shaped piezoresistive electrode 24 can easily detect different resistances, thereby helping the tactile sensor to detect static pressure.

[0070] An embodiment of the present application provides a manipulator, which includes the tactile sensor in any of the above embodiments.

[0071] It should be noted that the manipulator can be a manipulator on a robot. In addition, the tactile sensor can be attached to the surface of the manipulator.

[0072] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0073] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A tactile sensor, characterized in that: The tactile sensor comprises: a triboelectric layer, an electrode layer and a piezoresistive layer; The triboelectric layer, the electrode layer and the piezoresistive layer are stacked, and the electrode layer is located between the triboelectric layer and the piezoresistive layer; The electrode layer includes a substrate layer, a friction electrode, a temperature layer and a piezoresistive electrode; the friction electric layer, the temperature layer and the piezoresistive electrode are all arranged on the substrate layer, the friction electrode faces the friction electric layer, and the piezoresistive electrode faces the piezoresistive layer; The piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion disposed on the piezoresistive substrate, the piezoresistive protrusion faces the electrode layer, the piezoresistive protrusion is used to abut against the piezoresistive electrode, and the piezoresistive protrusion is deformable; When the piezoresistive protrusion contacts the piezoresistive electrode, the shape of the piezoresistive protrusion changes, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, and the resistance detected by the piezoresistive electrode changes.

2. The tactile sensor according to claim 1, characterized in that: The temperature layer includes a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes; Along the stacking direction of the friction layer and the electrode layer, the base layer includes a first surface and a second surface facing each other, the first surface faces the friction layer, and the second surface faces the piezoresistive layer; The first surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, and the P-type temperature electrodes and the N-type temperature electrodes are arranged alternately. The second surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, and the P-type temperature electrodes and the N-type temperature electrodes are arranged alternately. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the second surface are positioned opposite to and electrically connected to each other, the N-type temperature electrodes on the first surface and the P-type temperature electrodes on the second surface are positioned opposite to and electrically connected to each other, the P-type temperature electrodes on the first surface are electrically connected to the N-type temperature electrodes on the first surface, and the P-type temperature electrodes on the second surface are electrically connected to the N-type temperature electrodes on the second surface.

3. The tactile sensor according to claim 1, characterized in that: A plurality of friction protrusions are arranged on a surface of the triboelectric layer facing away from the electrode layer.

4. The tactile sensor according to claim 1, characterized in that: A conductive layer is provided on the surface of the piezoresistive protrusion, and the conductive layer covers the piezoresistive protrusion; And / or, conductive particles are disposed inside the piezoresistive protrusion.

5. The tactile sensor according to claim 1, characterized in that: The tactile sensor also includes an elastic support frame; The support frame is arranged on the surface of the piezoresistive substrate facing the electrode layer, and the piezoresistive protrusion is located inside the support frame, the thickness of the support frame is less than or equal to the height of the piezoresistive protrusion, the thickness of the support frame is: the distance between the two opposite surfaces of the support frame along the direction of stacking of the triboelectric layer and the electrode layer, and the height of the piezoresistive protrusion is: the distance between one end of the piezoresistive protrusion away from the piezoresistive substrate and the piezoresistive substrate; Wherein, the elastic modulus of the support frame is greater than the elastic modulus of the piezoresistive protrusion.

6. The tactile sensor according to claim 1, characterized in that: A first lead and a second lead are provided on a surface of the substrate layer facing the triboelectric layer; The first lead is electrically connected to the friction electrode, and the second lead is electrically connected to the piezoresistive electrode.

7. The tactile sensor according to claim 6, characterized in that: The second lead is electrically connected to the piezoresistive electrode through a via hole.

8. The tactile sensor according to any one of claims 1 to 7, characterized in that: Along the direction in which the triboelectric layer and the electrode layer are stacked, the projection of the triboelectric electrode on the substrate layer overlaps with the projection of the triboelectric layer on the substrate layer, or the projection of the triboelectric electrode on the substrate layer is located inside the projection of the triboelectric layer on the substrate layer.

9. The tactile sensor according to any one of claims 1 to 7, characterized in that: The piezoresistive electrode comprises a first piezoresistive electrode layer and a second piezoresistive electrode layer, the first piezoresistive electrode layer has a plurality of first protrusions and a plurality of first recesses, the first recesses and the first protrusions are arranged alternately, the second piezoresistive electrode layer has a plurality of second protrusions and a plurality of second recesses, the second recesses and the second protrusions are arranged alternately, the first protrusions are embedded in the second recesses, and the second protrusions are embedded in the first recesses; The first piezoresistive electrode layer and the second piezoresistive electrode layer are used for compressing the piezoresistive protrusion.

10. A robot, characterized in that: The robot comprises the tactile sensor according to any one of claims 1-9.

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