Multi-dimensional force sensor and processing method

Abstract

The invention is suitable for the technical field of sensors, and provides a multi-dimensional force sensor which comprises a first body, a second body, a strain beam and a strain gauge. A containing hole is formed in the first body, and the second body is arranged in the containing hole. The strain beam is at least partially disposed in the gap and is connected between the first body and the second body. The edges of the strain beams extend linearly, the number of the strain beams is four, each strain beam is at least provided with a first patch surface and a second patch surface, and strain gauges are attached to the first patch surfaces and the second patch surfaces respectively. The strain gauges are arranged on the first patch surface and the second patch surface of at least one strain beam, so that the at least one strain beam realizes double-sided patch mounting, and the total number of the strain gauges mounted on all the first patch surfaces and all the second patch surfaces is not less than six, so that the number of the strain gauges is increased; and the detection precision is improved. And meanwhile, the convenience and the efficiency of pasting the strain gauges are also improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of sensors, and in particular relates to a multi-dimensional force sensor and a processing method thereof. Background Art

[0002] A multi-dimensional force sensor is a sensor that can measure forces and torques in multiple directions at the same time. This type of sensor is widely used in robots, material testing, and machine servo control. Taking a six-dimensional force sensor as an example, referring to the Cartesian coordinate system, a six-dimensional force sensor can detect three forces (Fx, Fy, Fz) and three torques (Mx, My, Mz).

[0003] There are multiple measuring beams inside the six-dimensional force sensor, each of which includes four walls: upper, lower, left, and right. The upper wall is opposite to the lower wall, and the left wall is opposite to the right wall. Usually, strain gauges are attached to the upper, lower, left, and right walls of the measuring beam. The deformation of the measuring beam is sensed by each strain gauge, and the strain on the measuring beam is converted into an electrical signal output.

[0004] The force sensor in the related art is limited by the existing structural design, and the operation convenience of attaching the strain gauge to the wall is poor. At the same time, the strain gauge is attached on one side, which has the problem of low detection accuracy. Summary of the invention

[0005] In view of this, the present invention provides a multi-dimensional force sensor and a processing method to solve the problems of poor patch convenience, high difficulty and low detection accuracy.

[0006] To solve the above problems, the technical solution of the present invention is achieved as follows:

[0007] A multi-dimensional force sensor comprises: a first body, with a receiving hole provided inside, the receiving hole passing through the first surface and the second surface of the first body, the first surface and the second surface facing each other; a second body, arranged in the receiving hole, the first body surrounding the outside of the second body, and having a gap between the first body and the second body; a strain beam, arranged in the gap and connected between the first body and the second body, the edge of the strain beam extending in a straight line; four strain beams are arranged, each of the strain beams has at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface; a strain gauge, used to detect the strain of the strain beam, each of the first patch surfaces and each of the second patch surfaces is respectively provided with the strain gauge; wherein, among the four first patch surfaces, the number of strain gauges provided on at least one of the first patch surfaces is not less than two, and the total number of strain gauges provided on the four first patch surfaces is not less than six; among the four second patch surfaces, the number of strain gauges provided on at least one of the second patch surfaces is not less than two, and the total number of strain gauges provided on the four second patch surfaces is not less than six. In some embodiments,

[0008] The embodiment of the present invention further provides a processing method for processing the above-mentioned multi-dimensional force sensor, the processing method comprising:

[0009] 1) Selecting a first body, a second body and a strain beam, disposing the second body in the receiving hole of the first body, and providing a gap between the first body and the second body;

[0010] 2) Arranging a strain beam in the interval and connecting between the first body and the second body; four strain beams are arranged, and the first patch surface of each strain beam having a flat surface faces the same direction as the first surface, and the second patch surface of each strain beam having a flat surface faces the same direction as the second surface;

[0011] 3) Clean each of the first patch surfaces and each of the second patch surfaces, and then attach strain gauges thereto respectively, with at least one strain gauge attached to each patch surface, and the number of strain gauges attached to at least one of the first patch surfaces and at least one of the second patch surfaces is not less than two, and the total number of strain gauges attached to the four first patch surfaces and the four second patch surfaces is not less than six; wherein the attached strain gauges are independent of each other; or the strain gauges are connected as a whole; or at least one strain gauge is independent, and at least two strain gauges are connected as a whole;

[0012] 4) Arranging a circuit board, wherein the circuit board is arranged coplanarly with each of the strain gauges, or is spaced from the plane where each of the strain gauges is located by a preset distance, and fixing the circuit board on the first body and / or the second body;

[0013] 5) Place the first patch surface on any one of the strain beams upward, and then perform lead welding on each of the strain gauges in the first patch surface one by one, so that each of the strain gauges in the first patch surface is electrically connected to the circuit board through the lead wires; then perform lead welding on each of the strain gauges in the first patch surface on another strain beam, so that all of them are electrically connected to the circuit board; and perform the same operation until all of the strain gauges in the first patch surfaces corresponding to the four strain beams are electrically connected to the circuit board;

[0014] 6) Flip the multi-dimensional force sensor so that the second patch surface on any one of the strain beams faces upward, and then perform lead welding on each of the strain gauges in the second patch surface one by one, so that each of the strain gauges in the second patch surface is electrically connected to the circuit board through the lead; then perform lead welding on each of the strain gauges located in the second patch surface on another strain beam so that all of them are electrically connected to the circuit board; this operation is performed until all of the strain gauges in the corresponding second patch surfaces on the four strain beams are electrically connected to the circuit board, and the processing of the multi-dimensional force sensor is completed; wherein, the execution order of step 5 and step 6 can be interchanged.

[0015] A multi-dimensional force sensor and a processing method provided by an embodiment of the present invention include a first body, a second body, a strain beam and a strain gauge. A receiving hole is provided inside the first body, and the receiving hole passes through the first surface and the second surface of the first body, and the first surface and the second surface are two opposite surfaces. The second body is arranged in the receiving hole and a gap is maintained between the second body. The strain beam is at least partially arranged in the gap and connected between the first body and the second body. The edge of the strain beam extends straightly and is provided with four, and each strain beam has at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface, and strain gauges are respectively attached to each first patch surface and each second patch surface. By providing strain gauges on both the first patch surface and the second patch surface of at least one strain beam, at least one strain beam can be double-sidedly attached, and the total number of strain gauges attached to all first patch surfaces and the total number of strain gauges attached to all second patch surfaces are not less than six, thereby increasing the number of strain gauges and improving the detection accuracy. At the same time, the strain gauges on the same strain beam are concentrated on the upper and lower patch surfaces, thereby improving the convenience and efficiency of the installation of each strain gauge. The processing method can quickly realize the processing of the multi-dimensional force sensor 1, which is conducive to improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of a structure in which a first body, a second body and a strain beam are connected according to an embodiment of the present invention;

[0017] Figure 2 is a partial structural schematic diagram of a multi-dimensional force sensor provided by an embodiment of the present invention;

[0018] Figure 3 is a schematic diagram of the six detection channels on the force sensor;

[0019] Figure 4 This is the principle diagram of the Wheatstone bridge;

[0020] Figure 5 is a schematic diagram of a distribution method of strain gauges provided in an embodiment of the present invention on a first patch surface;

[0021] Figure 6 is a schematic diagram of another distribution method of the strain gauge on the first patch surface provided by an embodiment of the present invention;

[0022] Figure 7 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0023] Figure 8 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0024] Fig. 9 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0025] Fig.10 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0026] Fig.11 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0027] Fig.12 is a schematic diagram of another distribution method of the strain gauges provided by an embodiment of the present invention on the first patch surface;

[0028] Fig.13 It is a schematic diagram of the positions of strain gauges of the multi-dimensional force sensor provided by an embodiment of the present invention in the first double-sided patch mode;

[0029] Figure 14a-14f Schematic diagram of the bridges of each channel of the multi-dimensional force sensor provided by an embodiment of the present invention in the first double-sided patch mode;

[0030] Fig.15 is a schematic diagram of the positions of strain gauges of the multi-dimensional force sensor provided by an embodiment of the present invention in the second double-sided patch mode;

[0031] Fig.16 Schematic diagram of the bridges of each channel of the multi-dimensional force sensor provided by an embodiment of the present invention in the second double-sided patch mode;

[0032] Fig.17 1 is a schematic diagram of the bridges of each channel of the multi-dimensional force sensor provided by an embodiment of the present invention in the third double-sided patch mode;

[0033] Fig.18 1 is a schematic diagram of the positions of strain gauges of the multi-dimensional force sensor provided by an embodiment of the present invention in the third double-sided patch mode;

[0034] Fig.19 It is a schematic diagram of each strain gauge provided by an embodiment of the present invention being electrically connected to a circuit board through leads.

[0035] Description of reference numerals:

[0036] 1. Multi-dimensional force sensor; 11. First body; 110. Accommodating hole; 111. First surface; 12. Second body; 13. Strain beam; 131. Patch plane; 14. Strain gauge; 140. Tilt strain gauge; 141. Base; 142. Strain unit; P(Q), symmetry axis; 21. Circuit board; 22. Lead wire. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0038] The various specific technical features described in the specific embodiments can be combined in any suitable manner without contradiction, for example, different embodiments and technical solutions can be formed by combining different specific technical features. In order to avoid unnecessary repetition, various possible combinations of the specific technical features in the present invention will not be described separately.

[0039] In the following description, the terms "first\second\..." are only used to distinguish different objects, and do not mean that the objects have the same or related points. It should be understood that the directions "above", "below", "outside" and "inside" are all directions in normal use, and the directions "left" and "right" refer to the left and right directions shown in the corresponding schematic diagrams, which may or may not be the left and right directions in normal use.

[0040] It should be noted that the terms "comprises", "includes" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element. "Multiple" means greater than or equal to two.

[0041] like Figure 1 and Figure 2 As shown, a multi-dimensional force sensor 1 provided by an embodiment of the present invention can be mainly used to simultaneously measure forces and torques in multiple directions, specifically a force sensor that can simultaneously measure force and torque components in more than two directions. In a Cartesian coordinate system, force and torque can each be decomposed into three components. Therefore, the most complete form of multi-dimensional force is a six-dimensional force / torque sensor, that is, a sensor that can simultaneously measure three force components (Fx, Fy, Fz) and three torque components (Mx, My, Mz).

[0042] like Figure 2 As shown, the multi-dimensional force sensor 1 includes a first body 11, a second body 12, a strain beam 13 and a strain gauge 14. The first body 11 is provided with a receiving hole 110, and the second body 12 is arranged in the receiving hole 110 and is spaced from the second body 12. The strain beam 13 is connected between the first body 11 and the second body 12, so that the first body 11 and the second body 12 are connected as a whole. The strain gauge 14 is used to be attached to the strain beam 13 so as to detect the deformation of the strain beam 13.

[0043] Specifically, the shape of the receiving hole 110 can be any one of a circular, elliptical or polygonal shape, as long as it meets the spacing setting of the second body 12. Of course, the shape of the receiving hole 110 can also match the contour shape of the second body 12.

[0044] The receiving hole 110 passes through the first surface 111 and the second surface 112 of the first body 11 (see Fig.17 b), and the first surface 111 and the second surface 112 are two opposite surfaces. That is, the receiving hole 110 is a straight hole that penetrates the first body 11 in the thickness direction.

[0045] The second body 12 is arranged in the accommodating hole 110, and a gap is maintained between the second body 12. The strain beam 13 is arranged in the gap, and the edge of the strain beam 13 extends in a straight line, forming a straight beam structure, which is convenient for production and manufacturing. The opposite ends of the strain beam 13 are respectively connected between the first body 11 and the second body 12. In this way, the first body 11 and the second body 12 are connected as a whole through the strain beam 13. After the connection, the side of the second body 12 facing the same direction as the first surface 111 can be kept flush with the first surface 111 or not. Similarly, the other side of the second body 12 facing the same direction as the second surface 112 can be kept flush with the first surface 111 or not. It is usually adopted to keep the opposite sides of the second body 12 flush with the first surface 111 and the second surface 112 respectively to improve the consistency of the product shape.

[0046] Typically, the first body 11 is a fixed end, which is used to connect with a component that provides support. The second body 12 is a loading end, which is used to connect with an object to be detected, so as to sense the force carried on the object to be detected, and ultimately manifested in elastic deformation of the strain beam 13. Of course, the first body 11 can also be set as a loading end, and the second body 12 can be set as a fixed end. The setting is flexible and can meet different usage requirements. When the second body 12 is set as the loading end, the strain gauge 14 is usually installed close to the connection between the strain beam 13 and the second body 12. When the first body 11 is set as the loading end, the strain gauge 14 is usually installed close to the connection between the strain beam 13 and the first body 11, so that the sensitivity of the detection can be improved.

[0047] The strain beam 13 connected between the first body 11 and the second body 12 can be completely located in the interval, that is, the first patch surface 131 is lower than the plane where the first surface 111 is located, and the second patch surface is lower than the plane where the second surface 112 is located. Of course, the first patch surface 131 and / or the second patch surface can also protrude from the corresponding surface, or the first patch surface 131 is flush with the plane where the first surface 111 is located, and the second patch surface is flush with the plane where the second surface 112 is located, as long as it can meet the detection requirements. Moreover, the number of strain beams 13 can be set according to the detection requirements of the product, and at least not less than four. Moreover, when the number of strain beams 13 is set to be greater than four, it is not necessary to affix strain gauges 14 on all the strain beams 13 that are set, and corresponding settings can be made according to product design requirements. That is, in the embodiment of the present invention, when four strain beams 13 are provided, all of the four strain beams 13 are used for mounting strain gauges, and when five or more strain beams 13 are provided, four of the strain beams 13 can be used for mounting the strain gauges, and the remaining strain beams 13 do not need to be mounted, which provides better setting flexibility.

[0048] Specifically, the strain gauge 14 is usually made of metal or semiconductor material, has high sensitivity and good elastic properties, and can effectively sense the effects of external forces and torques. A strain gauge 14 is arranged on each strain beam 13, and the number of strain gauges 14 can be set according to the specific detection requirements to be achieved, so that the detection of six measurement channels can be achieved. Specifically, if Figure 3 As shown, according to the Cartesian coordinate system, the six measurement channels are three force components (Fx, Fy, Fz) and three torque components (Mx, My, Mz). The three force components correspond to the forces on the X, Y, and Z axes, respectively. The forces on each axis will cause the strain gauge 14 in the corresponding direction to deform, resulting in a change in resistance. The three torque components correspond to the torque on the X, Y, and Z axes, respectively. The torque will also cause the strain gauge 14 in a specific direction to deform, thereby causing a change in resistance.

[0049] The signal of each measurement channel is detected by the strain gauge 14 attached to the strain beam 13. These strain gauges 14 can sense the resistance change caused by the slight deformation and then convert it into an electrical signal output. Through the signals of these channels, combined with the corresponding mathematical model calculation, the magnitude and direction of the applied force and torque can be determined.

[0050] The "six measurement channels" mentioned above correspond to the six force components of the sensor in three-dimensional space. In this way, the strain gauges 14 on different strain beams 13 are combined according to the detection requirements to form a Wheatstone bridge to detect the change in resistance, and the magnitude of the applied force and torque and the direction of the force are finally determined by obtaining the detection signals on different channels.

[0051] like Figure 2 As shown, in the embodiment of the present invention, four strain beams 13 are provided, and the four strain beams 13 are evenly distributed around the circumference of the second body 12, which at least better ensures the consistency of product detection performance and facilitates installation and use. Of course, in another embodiment, under the premise of meeting the detection requirements, they can also be unevenly distributed.

[0052] Each strain beam 13 has at least one first patch surface 131 facing the same direction as the first surface 111 and one second patch surface 132 facing the same direction as the second surface 112 (see Fig.17b), the first patch surface 131 and the second patch surface 132 are both planes, and strain gauges 14 are respectively attached to each of the first patch surfaces 131 and each of the second patch surfaces 132. Therefore, the force or torque acting on the corresponding strain beam 13 can be detected through the strain gauge 14. The "corresponding strain beam 13" refers to the strain beam 13 to which the strain gauge 14 that currently outputs the detection signal is attached. The principle of the strain gauge 14 outputting the detection signal is as follows: when an external force or torque acts on the strain beam 13, the strain beam 13 will undergo a slight deformation (such as a change in length or cross-sectional area), and this deformation will be transmitted to the strain gauge 14 attached to the strain beam 13. The resistance value of the strain gauge 14 changes with the generation of strain, and this resistance change is converted into a voltage or current signal through a specific circuit. A bridge circuit is constructed inside the sensor, and multiple strain gauges 14 are connected together in a specific way to form a Wheatstone bridge (refer to Figure 4 ). When the resistance value of the strain gauge 14 changes, the equilibrium state of the bridge circuit will be broken, thereby generating an output signal proportional to the mechanical quantity. After being amplified, filtered and digitized by the signal processing circuit, this signal can be read and analyzed by a terminal device such as a computer, and the corresponding force condition can be obtained.

[0053] In the embodiment of the present invention, the surface of the first patch surface 131 and the second patch surface 132 that is used to contact the strain gauge 14 is called the patch surface), and each patch surface is set to be a plane, that is, the surface is a smooth flat surface, all points are on the same plane, and there are no ups and downs or curves. Therefore, when the strain gauge 14 is attached, all points on the side of the strain gauge 14 that is used to bond with the patch plane can basically keep in contact with the patch plane, not only the bonding firmness is good, but also when pasting, compared with the curved patch surface, there is no need to press for a long time, and the strain gauge 14 can rely on its own gravity to keep it completely attached to the patch plane, thereby improving the ease of operation of the patch. In addition, the strain gauge 14 is fully attached to the patch plane, and the strain beam 13 can be formed as a whole, so that the deformation of the strain beam 13 can be sensitively detected, thereby improving the sensitivity of the detection.

[0054] Furthermore, in the embodiment of the present invention, the strain gauges 14 are attached to each strain beam 13 in the following manner: among the four first patch surfaces 131, the number of strain gauges 14 attached to at least one first patch surface 131 is not less than two, and the total number of strain gauges 14 attached to the four first patch surfaces 131 is not less than six; among the four second patch surfaces 132, the number of strain gauges 14 attached to at least one second patch surface 132 is not less than two, and the total number of strain gauges 14 attached to the four second patch surfaces 132 is not less than six. In this way, strain gauges 14 are attached to the first patch surface 131 and the second patch surface of each strain beam 13, and the number of strain gauges 14 attached to at least one first patch surface 131 is greater than two. Similarly, strain gauges 14 are attached to the second patch surface of each strain beam 13, and the number of strain gauges 14 attached to at least one second patch surface 132 is greater than two. In this arrangement, not only are strain gauges 14 attached to the first patch surface 131 and the second patch surface 132 on the same strain beam 13, but at least two strain gauges 14 are used for detection, which improves the sensitivity of detection, compared with the case of single-sided strain. Combined with the strain gauges 14 attached to other strain beams 13, each strain gauge 14 can be combined to achieve detection of different channels, and each detection channel can form a different type of Wheatstone bridge (full bridge, half bridge and 1 / 4 bridge) according to the detection requirements. The various arrangement methods improve the flexibility of the detection function setting of the multi-dimensional force sensor 1, and can meet the use of different detection requirements.

[0055] In the embodiment of the present invention, the strain gauges 14 to be attached to each strain beam 13 are centrally arranged on the first patch surface 131 and the second patch surface 132, and there is no shielding above the first patch surface 131 and the second patch surface, so that when attaching the strain gauges 14, the patching convenience is good and the patching efficiency is improved. At the same time, the lead welding operation can be performed on all the strain gauges 14 on the same patch surface in the same state without a large position adjustment, thereby improving the convenience of lead welding.

[0056] A multi-dimensional force sensor 1 provided in an embodiment of the present invention comprises a first body 11, a second body 12, a strain beam 13 and a strain gauge 14. A receiving hole 110 is provided inside the first body 11, and the receiving hole 110 passes through a first surface 111 and a second surface 112 of the first body 11, and the first surface 111 and the second surface 112 are two opposite surfaces. The second body 12 is arranged in the receiving hole 110, and a gap is maintained between the second body 12. The strain beam 13 is at least partially arranged in the gap and connected between the first body 11 and the second body 12. The edge of the strain beam 13 extends straight and is provided with four, and each strain beam 13 has at least one first patch surface 131 facing the same direction as the first surface 111 and one second patch surface 132 facing the same direction as the second surface 112, and strain gauges 14 are respectively attached to each first patch surface 131 and each second patch surface 132. Usually, at least one strain beam 13 is provided with strain gauges 14 on both the first patch surface 131 and the second patch surface 132, so that at least one strain beam 13 is double-sided patched, and the total number of strain gauges 14 pasted on all first patch surfaces 131 and the total number of strain gauges 14 pasted on all second patch surfaces 132 are not less than six, thereby increasing the number of strain gauges 14 and improving the accuracy of detection. At the same time, the strain gauges 14 on the same strain beam 13 are concentrated on the upper and lower patch surfaces, thereby improving the convenience and efficiency of the installation of each strain gauge 14. Moreover, each patch plane is a flat surface, thereby reducing the difficulty of installing each strain gauge 14, which is conducive to keeping each strain gauge 14 firmly attached and ensuring the stability of product performance.

[0057] In some embodiments, when strain gauges 14 are provided in both the first patch surface 131 and the second patch surface 132 of the same strain beam 13, the manner of attaching the strain gauges 14 on the two patch surfaces may be: the number of strain gauges 14 attached to the two patch surfaces is equal, and the attaching positions are the same; or the number of strain gauges 14 attached to the two patch surfaces is equal, but the attaching positions are at least partially different; or the number and attaching positions of the strain gauges 14 attached to the two patch surfaces are different. In this way, the strain gauges 14 can be arranged symmetrically or asymmetrically in the first patch surface 131 and the second patch surface 132 of the same strain beam 13. Different detection functions and detection sensitivities can be achieved, and the setting flexibility is good, which can meet the use requirements of different situations.

[0058] like Figure 4As shown, the Wheatstone bridge is a circuit device composed of four resistors, which is used to measure the resistance of one of the resistors, provided that the resistance of the other three resistors is known. The basic principle is to determine the value of the unknown resistor by comparing the voltage difference between two circuit branches. When the bridge is in a balanced state, the voltage difference between the two relative joints is zero, at which time the resistance of the unknown resistor can be inferred from the three known resistance values. In the Wheatstone bridge, each resistor (or strain gauge 14) is usually called a bridge arm, so there are four bridge arms.

[0059] In specific applications, the main types of Wheatstone bridges include full bridge, half bridge and quarter bridge. In the full bridge configuration, strain gauges 14 are used in all four bridge arms, and each strain gauge 14 produces the same amplitude of resistance change for the same strain, but the change direction is opposite; in the half bridge configuration, only two bridge arms use strain gauges 14, and the other two are fixed resistors; in the quarter bridge configuration, only one bridge arm uses strain gauges 14, and the other three are fixed resistors. Among the three different types of bridges, the principles of strain detection of full bridge, half bridge and quarter bridge are different in their sensitivity to strain and measurement accuracy. The full bridge configuration provides the highest sensitivity and accuracy, while the quarter bridge configuration provides the lowest sensitivity and accuracy. Therefore, the type of bridge to be combined can be selected according to the actual use requirements, so as to meet different detection requirements and have good setting flexibility.

[0060] The strain gauge 14 is usually fixed on the strain beam 13 by pasting, and in order to realize multi-channel detection, the strain gauge 14 needs to be pasted on the four wall surfaces of each strain beam 13, so that the position of the strain beam 13 or the direction of the patch needs to be adjusted continuously during patching, resulting in cumbersome patching steps and inconvenience, affecting the efficiency of the patch and the operability of the lead welding, and increasing the difficulty of manufacturing the multi-dimensional force sensor 1. Therefore, in the embodiment of the present invention, by concentrating the strain gauges 14 that need to be pasted on each strain beam 13 on the same patch surface, not only can multi-channel detection be realized, but also there is no need to frequently adjust the patch position, so that the convenience and efficiency of the patch are improved, and at the same time, the convenience of lead welding is also improved.

[0061] Specifically, the arrangement position and quantity of each strain gauge 14 can be selected according to the needs of detection, so that it can be used to detect forces in three different directions and moments in three different directions. In this way, a plurality of strain gauges 14 are arranged on each strain beam 13, and the strain gauges 14 at corresponding positions can be selected for combination, thereby realizing a multi-channel detection function. The above "can be used to detect forces in three different directions and moments in three different directions" means that the position and quantity of the strain gauges 14 can be set according to the needs of detection, so as to meet the performance of being able to detect forces in three different directions and moments in three different directions. Not every strain gauge 14 can detect six channels, and in the actual detection process, it is not necessary for each strain gauge 14 to detect six channels at the same time. That is, the multi-dimensional force sensor 1 can have the performance of being able to detect forces in three different directions and moments in three different directions by integrating multiple strain gauges 14 and combining the distribution at different positions, thereby improving the detection function and having good practicality.

[0062] For the convenience of explanation, in some embodiments, the distribution of each strain gauge 14 on the first patch surface 131 and the second patch surface 132 can be set to include any of the following according to different design methods. At the same time, the patches on the first patch surface 131 and the second patch surface 132 are symmetrically distributed as an example, and the arrangement on the first patch surface 131 is used as a reference. Of course, the distribution of each strain gauge 14 can also be other types. The following is just an example for explanation, and does not limit the distribution method. The method that can be set is:

[0063] In the first distribution mode, in the first patch surface 131 and the second patch surface 132 on which a strain gauge 14 is attached, the strain gauge 14 is located at the side of the corresponding patch surface or on the symmetry axis in the width direction of the corresponding patch surface. Specifically, Figure 5 As shown, the strain gauge 14 is arranged on the side of the patch surface, and is usually used to detect the forces in the Fx and Fy directions and the moments in the Mz direction. Figure 6 As shown, the strain gauge 14 is set on the symmetric axis in the width direction of the patch surface, which is usually used to detect the torque in the Mx and My directions and the force in the Fz direction. In this way, it can be adjusted according to the detection needs, and the setting flexibility is good. Combined with the strain gauges 14 set on other patch surfaces, and the same distribution method is used on the other opposite surface, a Wheatstone bridge can be formed, which has a higher detection sensitivity.

[0064] The "symmetric axis in the width direction of the patch surface" mentioned above means that the first patch surface 131 and the second patch surface 132 are usually set as a quadrilateral with unequal length and width and regular shape. Therefore, there is a symmetric axis in the width direction, which is called the symmetric axis in the width direction of the patch surface.

[0065] In the second distribution mode, in the first patch surface 131 and the second patch surface 132 respectively provided with two strain gauges 14, the two strain gauges 14 are respectively located at two opposite sides of the corresponding patch surface, or are arranged side by side on the same side, or are arranged relatively tilted, or are arranged side by side on the symmetry axis in the width direction of the corresponding patch surface. Specifically, Figure 6 As shown, two strain gauges 14 are respectively located on two opposite sides of the patch surface, or two strain gauges 14 are located side by side on the same side. Both types are usually used to detect forces in the Fx and Fy directions and moments in the Mz direction. Figure 7 As shown, by setting the two strain gauges 14 relatively tilted, the ability to detect forces or torques in different directions is achieved. The two strain gauges 14 are set side by side on the symmetry axis corresponding to the width direction of the patch surface, which are usually used to detect the torques in the Mx and My directions and the force in the Fz direction. In this way, the achievable detection functions are further increased, and adjustments can be made according to detection needs, with good setting flexibility. Combined with the strain gauges 14 set on other patch surfaces, a Wheatstone 1 / 4 bridge circuit can be formed, which has good detection sensitivity. Moreover, the two strain gauges 14 can also be set in other ways, such as one on the side and the other on the symmetry axis corresponding to the width direction of the patch surface, and the setting method is flexible and diverse.

[0066] In the third distribution mode, on the first patch surface 131 and the second patch surface 132 respectively provided with three strain gauges 14, each strain gauge 14 is at least distributed in a T-shape or an L-shape on the corresponding patch surface, or is arranged at intervals on the same straight line; specifically, Figure 8 As shown, when the distribution becomes a T-type or an L-type, both types can be used to detect the forces in the Fx and Fy directions and the torque in the Mz direction, as well as the torque in the Mx and My directions and the force in the Fz direction. That is, it has the detection requirements of six channels and the setting is ingenious. When the intervals are set on the same straight line, when they are distributed along the length direction of the patch surface and located on the side of the patch surface, they are usually used to detect the forces in the Fx and Fy directions and the torque in the Mz direction. When the strain gauge 14 whose own axis of symmetry is colinear with the axis of symmetry in the width direction of the patch surface is usually used to detect the torque in the Mx and My directions and the force in the Fz direction. When it is distributed along the width direction of the patch surface and close to the connection between the strain gauge and the second body 1212, it is usually used to detect the forces in the Fx, Fy and Fz directions. The combination of each strain gauge 14 can form a Wheatstone half-bridge or 1 / 4 bridge circuit, which has good detection sensitivity.

[0067] In the fourth distribution mode, on the first patch surface 131 and the second patch surface 132 where four strain gauges 14 are respectively attached, each strain gauge 14 is distributed in a T-shape on the corresponding patch surface, or is arranged at intervals on the same straight line, or is distributed in a quadrilateral. In this distribution mode, Fig. 9 As shown, when forming a T-shaped or spaced shape on the same straight line, the same shape has basically the same detection performance as the third distribution method, which will not be described in detail here. When distributed in a quadrilateral, there are two strain gauges 14 on the two opposite sides of the patch surface. This distribution direction is usually used to detect the forces in the Fx and Fy directions and the torque in the Mz direction. The combination of strain gauges 14 can form a Wheatstone half-bridge or 1 / 4 bridge circuit, which has good detection sensitivity.

[0068] The fifth distribution mode is that on the first patch surface 131 and the second patch surface 132, each of which is provided with at least five strain gauges 14, each strain gauge 14 is distributed on the corresponding patch surface in a T-shape, an L-shape, an I-shape, a quadrilateral, or is arranged at intervals on the same straight line. In the arrangement where at least five strain gauges 14 are provided, as the number of strain gauges 14 increases, when forming a T-shape, an L-shape, an I-shape, a quadrilateral, or is arranged at intervals on the same straight line, the number of strain gauges 14 used as a whole in each shape is increased, and the number of detection channels that can be realized is increased. At the same time, the number of strain gauges 14 that can be combined with each detection channel is also increased, which not only improves the comprehensiveness of the detection performance, but also improves the sensitivity of the detection by combining multiple strain gauges 14 in the same channel.

[0069] It should be explained that the strain gauges 14 are usually selected to detect a certain channel according to their sensitivity to force, so as to improve the sensitivity and accuracy of the detection. For example, when the forces in the Fx and Fy directions and the moments in the Mz direction are applied to the strain beams 13, the sides of the strain beams 13 are the parts with the largest deformation, so the strain gauges 14 arranged on the sides of the patch surface are mainly used to detect the forces in the Fx and Fy directions and the moments in the Mz direction. When the moments in the Mx and My directions and the forces in the Fz direction are applied to the strain beams 13, the deformation at the axis of the strain beams 13 is the largest, so the strain gauges 14 arranged on the symmetry axis in the width direction of the patch surface are mainly used to detect the moments in the Mx and My directions and the forces in the Fz direction. Of course, it can be understood that when the force or moment is applied to the same strain beam 13, the strain gauges 14 at various positions on it can basically detect the deformation of the strain beam 13, but there is a difference in the strength of the detection signal. In consideration of detection accuracy, the strain gauge 14 that generates a stronger signal is usually selected for detection of the corresponding channel. Therefore, there are strain gauges 14 arranged at different positions in the same patch surface for detection of different channels.

[0070] It can be understood that each strain gauge 14 can be regarded as a point, so the strain gauge 14 has its own symmetry axis. Therefore, it can be understood that the specific setting method of setting the symmetry axis of the strain gauge 14 itself to be collinear with the symmetry axis in the width direction of the patch plane is described above.

[0071] In some embodiments, Fig.11 As shown, on the first patch surface 131 and the second patch surface 132, on which at least two strain gauges 14 are respectively attached, each strain gauge 14 is arranged in parallel along the length direction of the corresponding patch surface, and the symmetry axis P of each strain gauge 14 is collinear with the symmetry axis Q in the width direction of the corresponding patch surface. In this way, a plurality of strain gauges 14 are arranged at intervals on the symmetry axis in the width direction of the patch surface, thereby meeting the performance of being able to detect the moment in the Mx and My directions and the force in the Fz direction, and the sensitivity and accuracy of the detection can be improved by combining the detection of a plurality of strain gauges 14.

[0072] In some embodiments, Fig.11 As shown, among the strain gauges 14 arranged in parallel, at least one inclined strain gauge 140 is included, and the angle between the symmetry axis of the inclined strain gauge 140 and the symmetry axis in the width direction of the patch plane 131 is between 0-75 degrees. In this way, the inclined strain gauge 140 can more sensitively detect deformation that is substantially the same as its inclined direction. By adjusting the inclined direction and arrangement position of the inclined strain gauge 140, it can be used for multi-channel detection, thereby improving the flexibility of detection. Specifically, the inclined strain gauge 140 can not only be used for the detection of torque in the Mx or My direction and force in the Fz direction, but also, due to the inclined setting, the distance from the side of the corresponding strain beam 13 is relatively close, so it also has the detection performance of force in the Fx or Fy direction and torque in the Mz direction. Therefore, it can be combined to form a corresponding Wheatstone bridge according to the detection requirements, with ingenious design and good flexibility.

[0073] Specifically, for ease of understanding, Fig.11 As shown, the symmetry axis P of the tilted strain gauge 140 and the symmetry axis in the width direction of the patch surface are Q. The angle between the symmetry axis P and the symmetry axis Q is set between 0-75 degrees. Optionally, the angle between the two can be 15 degrees, or 45 degrees, or 60 degrees, or 75 degrees, and of course, it can also be any other value within the range of 0-75 degrees. Different angles correspond to different detection sensitivities under each channel, so the tilt angle of the tilted strain gauge 140 can be set according to the requirements of the detection channel, and the setting flexibility is good.

[0074] In some embodiments, Fig.11 As shown, two inclined strain gauges 140 are symmetrically arranged relative to the symmetry axis in the width direction of the patch surface. In this way, at least one inclined strain gauge 140 is arranged on both sides of the symmetry axis Q. Moreover, each inclined strain gauge 140 on both sides is inclined in two different directions, so that deformations in different directions can be detected respectively. In this way, with the mutual complementation of the detection functions of each inclined strain gauge 140 on both sides, deformations occurring on both sides in the same detection direction as the inclined strain gauge 140 can basically be detected, further improving the sensitivity and accuracy of the detection.

[0075] In some embodiments, Fig.12 As shown, the strain gauge 14 includes a substrate 141 and a strain unit, and the strain unit is solidified on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface 132, on which at least two strain gauges 14 are respectively attached, each strain unit is independent, and each substrate 141 is not connected. In this arrangement, each strain gauge 14 is a single independent part, so that when attached, the attached position can be adjusted according to different detection requirements, and the arrangement flexibility is good, which can meet different arrangement requirements.

[0076] Specifically, the strain unit is used to change with the deformation of the strain beam 13, and then generate a corresponding detection signal. The strain unit is usually made of a thin wire made of a material such as constantan, nickel-chromium alloy, etc., and then wound into a grid or spiral shape so that it can effectively sense the deformation when subjected to force. The strain unit can be fixedly connected to the surface of the substrate 141 by an adhesive, and the shape of the strain unit supported by the substrate 141 remains basically stable.

[0077] The substrate 141 is usually made of a thin sheet of polyimide material, which has good insulation performance and the ability to transmit strain. In some special applications, ceramic materials are also used as the substrate 141 to provide higher stability and high temperature resistance.

[0078] In some embodiments, Fig.12 As shown, the strain gauge 14 includes a substrate 141 and a strain unit 142, and the strain unit 142 is cured on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface 132, on which at least two strain gauges 14 are respectively attached, each strain unit 142 is independent and fixed on the same substrate 141. In this arrangement, each strain unit 142 is combined with the same substrate 141 to form an integrated strain gauge 14, so that by performing an operation of fixing the substrate 141 on the strain beam 13 once, multiple strain units 142 can be attached. That is, at least multiple strain units 142 can be attached at one time, without the need to attach them one by one, saving the attachment steps of the strain gauge 14, thereby improving the attachment efficiency of the strain gauge 14. Furthermore, the position and firmness of each strain unit 142 fixed on the base 141 have been completed in advance, so when pasting and fixing on the strain beam 13, it is only necessary to ensure the accuracy of the pasting position of the base 141 to achieve accurate pasting of each strain unit 142. At the same time, the consistency of pasting of each strain unit 142 can be ensured, so that each strain unit 142 has a more sensitive detection performance, thereby improving the sensitivity and accuracy of detection of each strain unit 142 pasted on the strain beam 13.

[0079] In some embodiments, Figure 1As shown, the strain gauge 14 includes a substrate 141 and a strain unit 142, and the strain unit 142 is solidified on one side of the substrate 141; wherein, on the first patch surface 131 and the second patch surface 132, on which at least three strain gauges 14 are respectively attached, at least one strain unit 142 is fixed on one substrate 141 alone, and at least two strain units 142 are fixed on another substrate 141 together. This arrangement constitutes a combination of a single strain gauge 14 and an integrated strain gauge 14, which has the advantages of both types and can also improve the flexibility of the arrangement of each strain gauge 14.

[0080] In some embodiments, Figure 1 As shown, the outline shape of the base 141 is set to be rectangular or T-shaped. In this way, when the shape of the base 141 at least satisfies the arrangement of each group of strain units 142. The base 141 of this shape can also be used to preliminarily know the position and shape type of each strain unit 142 when it is necessary to arrange each strain unit 142 into a rectangle or T shape according to the shape of the base 141 itself. At this time, the shape of the base 141 plays a role in guiding the arrangement, which improves the accuracy of the position of each strain unit 142 when arranging and the convenience of arrangement.

[0081] In order to facilitate understanding of the detection principle of the multi-dimensional force sensor 1 provided in the embodiment of the present invention, an example is given in which the same number of strain gauges 14 are symmetrically attached to the first patch surface 131 and the second patch surface 132 on each strain beam 13. Fig.13 As shown, four strain gauges 14 are attached to each patch, and they are all distributed in a T-shaped manner, and each strain gauge 14 attached on the back is marked with RX'. In this way, R11 and R11' indicate that the strain gauges 14 attached on the two opposite patch surfaces are marked with R11 and R11', and the rest is not repeated. Under this distribution method, the principle of detection of each channel is:

[0082] When Fx applies positive force: strain gauges R11, R11', R13 and R13' are compressed, the resistance value of the strain gauge decreases, strain gauges R12, R12', R14 and R14' are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UFx; conversely, when a negative force is applied, the output pressure difference -UFx. In addition, under this arrangement, the bridge that the Fx channel can form is as follows: Fig.14a As shown, some examples are given.

[0083] When Fy applies positive force: strain gauges R21, R21', R23 and R23' are compressed, the resistance value of the strain gauge decreases, strain gauges R22, R22', R24 and R24' are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UFy; conversely, when a negative force is applied, the output pressure difference -UFy. In addition, under this arrangement, the bridge that can be formed by the Fy channel is as follows: Fig.14b As shown, some examples are given.

[0084] When Fz applies positive force: strain gauges R31, R32, R33 and R34 are stretched, the resistance value of the strain gauges increases, strain gauges R31', R32', R33' and R34' are compressed, the resistance value of the strain gauges decreases, and the Wheatstone bridge outputs a pressure difference UFz; conversely, when a negative force is applied, the output pressure difference -UFz. In addition, under this arrangement, the bridge that the Fz channel can form is as follows: Fig.14c As shown, some examples are given.

[0085] When Mx applies a positive torque: strain gauges R41 and R42' are compressed, the resistance of the strain gauges decreases, strain gauges R41' and R42 are stretched, the resistance of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMx; conversely, when a negative force is applied, the output pressure difference -UMx. In addition, under this arrangement, the bridge that can be formed by the Mx channel is as follows: Fig.14d As shown, some examples are given.

[0086] When My applies a positive torque: strain gauges R51 and R52' are compressed, the resistance value of the strain gauge decreases, strain gauges R51' and R52 are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference -UMy. In addition, under this arrangement, the bridge that can be formed by the My channel is as follows: Fig.14e As shown, some examples are given.

[0087] When Mz applies a positive torque: strain gauges R11, R11', R23, R23', R14, R14', R22 and R22' are compressed, the resistance value of the strain gauge decreases, strain gauges R12, R12', R24, R24', R13, R13', R21 and R21' are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference -UMz. In addition, under this arrangement, the bridge that can be formed by the My channel is as follows: Fig.14f As shown, some examples are given.

[0088] In one embodiment, an example is given for explanation that the same number of strain gauges are symmetrically mounted on the first patch surface 131 and the second patch surface 132 of each strain beam 13. Fig.15As shown, six strain gauges are attached to each patch, and they are distributed in a quadrilateral manner. At the same time, each strain gauge attached on the back is marked with RX', such as R11 and R11', which means that the strain gauges attached on the two opposite patches are marked with R11 and R11', and the rest is not repeated. Under this distribution method, the principle of detection of each channel is:

[0089] When Fx applies positive force: strain gauges R11, R11, R13 and R13' are compressed, the resistance value of the strain gauges decreases, strain gauges R12, R12', R14 and R14' are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UFx; conversely, when a negative force is applied, the output pressure difference -UFx.

[0090] When Fy applies positive force: strain gauges R21, R21', R23 and R23' are compressed, the resistance value of the strain gauges decreases, strain gauges R22, R22', R24 and R24' are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UFy; conversely, when a negative force is applied, the output pressure difference is -UFy.

[0091] When Fz applies positive force: strain gauges R31, R32, R33 and R34 are stretched, the resistance value of the strain gauges increases, strain gauges R31', R32', R33' and R34' are compressed, the resistance value of the strain gauges decreases, and the Wheatstone bridge outputs a pressure difference UFz; conversely, when a negative force is applied, the output pressure difference is -UFz.

[0092] When Mx applies a positive torque: strain gauges R41 and R42' are compressed, the resistance value of the strain gauges decreases, strain gauges R41' and R42 are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMx; conversely, when a negative force is applied, the output pressure difference is -UMx.

[0093] When the torque My is applied in the positive direction: the strain gauges R51 and R52' are compressed, the resistance value of the strain gauges decreases, the strain gauges R51' and R52 are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference is -UMy.

[0094] When Mz applies a positive torque: strain gauges R61, R63, R65, R67, R61', R63', R65', R67' are compressed, the resistance value of the strain gauge decreases, strain gauges R62, R64, R66, R68, R62', R64', R66', R68' are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference -UMz. In addition, the bridge composed of each channel is as follows Fig.16As shown, under this setting, each detection channel is a full bridge, so that the multi-dimensional force sensor 1 has a higher detection sensitivity and can better meet the detection requirements.

[0095] It can be understood that the detection principle of the above-mentioned channels is to bridge according to the selection of the largest number of strain gauges. There may also be other forms. The remaining various forms will not be listed one by one. The principles are the same.

[0096] In one embodiment, if Fig.17 As shown, an example is given in which different numbers of strain gauges are attached to the first patch surface 131 and the second patch surface 132 on each strain beam 13 for illustration. Fig.17 As shown in a, six strain gauges are mounted on each first patch surface 131, and are distributed in a quadrilateral manner. Fig.17 As shown in FIG. 1 , each second patch surface 132 is provided with two strain gauges, and they are arranged in parallel on the symmetry axis in the width direction of the corresponding patch surface. At the same time, each strain gauge is provided on the back side and is marked with RX'. For example, R11 and R11' indicate that the strain gauges provided on the two opposite patch surfaces are marked with R11 and R11', and the others are not described in detail. Under this distribution mode, the principle of detection of each channel is as follows:

[0097] When Fx applies positive force: strain gauges R11 and R13 are compressed, the resistance value of the strain gauge decreases, strain gauges R12 and R14 are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UFx; conversely, when a negative force is applied, the output pressure difference is -UFx.

[0098] When Fy applies positive force: strain gauges R21 and R23 are compressed, the resistance value of the strain gauge decreases, strain gauges R22 and R24 are stretched, the resistance value of the strain gauge increases, and the Wheatstone bridge outputs a pressure difference UFy; conversely, when a negative force is applied, the output pressure difference is -UFy.

[0099] When Fz applies positive force: strain gauges R31, R32, R33 and R34 are stretched, the resistance value of the strain gauges increases, strain gauges R31', R32', R33' and R34' are compressed, the resistance value of the strain gauges decreases, and the Wheatstone bridge outputs a pressure difference UFz; conversely, when a negative force is applied, the output pressure difference is -UFz.

[0100] When Mx applies a positive torque: strain gauges R41 and R42' are compressed, the resistance value of the strain gauges decreases, strain gauges R41' and R42 are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMx; conversely, when a negative force is applied, the output pressure difference is -UMx.

[0101] When the torque My is applied in the positive direction: the strain gauges R51 and R52' are compressed, the resistance value of the strain gauges decreases, the strain gauges R51' and R52 are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference is -UMy.

[0102] When Mz applies a positive torque: strain gauges R61, R63, R65 and R67 are compressed, the resistance value of the strain gauges decreases, strain gauges R62, R64, R66 and R68 are stretched, the resistance value of the strain gauges increases, and the Wheatstone bridge outputs a pressure difference UMy; conversely, when a negative force is applied, the output pressure difference -UMz. In addition, the bridge composed of each channel is as follows Fig.18 As shown, under this setting, each detection channel is a full bridge, so that the multi-dimensional force sensor 1 has a higher detection sensitivity and can better meet the detection requirements.

[0103] The embodiment of the present invention further provides a processing method for processing the multi-dimensional force sensor 1 described in any of the above embodiments. The processing method comprises:

[0104] 1) Select a first body 11, a second body 12 and a strain beam 13, and set the second body 12 in the receiving hole 110 of the first body 11, and make a gap between the first body 11 and the second body 12; the position where the second body 1212 is set in the receiving hole 110 can be circumferential, and the interval sizes of each position can be kept equal or unequal.

[0105] 2) The strain beam 13 is arranged in the interval and connected between the first body 11 and the second body 12; four strain beams 13 are arranged, and the first patch surface 131 with a flat surface of each strain beam 13 is oriented in the same direction as the first surface 111, and the second patch surface 132 with a flat surface of each strain beam 13 is oriented in the same direction as the second surface 112. In this way, there are no other parts blocking the first patch surface 131 and the second patch surface 132, which is conducive to the arrangement of the strain gauge 14.

[0106] 3) Clean each first patch surface 131 and each second patch surface 132 to make sure that there is no dust, oil or other impurities on each patch surface. Then, respectively attach strain gauges 14, with at least one strain gauge 14 attached to each patch surface, which can be bonded and fixed by a glue-like adhesive, or the silicon strain gauge is fixed by a glass micro-melting process. Specifically, the patch method is that the number of strain gauges 14 attached to at least one first patch surface 131 and at least one second patch surface 132 is not less than two, and the total number of strain gauges 14 attached to the four first patch surfaces 131 and the four second patch surfaces 132 is not less than six; wherein the attached strain gauges 14 are independent of each other; or the strain gauges 14 are connected as a whole; or at least one strain gauge 14 is independent, and at least two strain gauges 14 are connected as a whole. That is, the strain gauges 14 installed can be completely independent parts, or they can be integrated strain gauges 14 connected as a whole, or they can be a combination of independent strain gauges 14 and integrated strain gauges 14. The selection can be made according to the specific patch requirements, and the patch has good flexibility.

[0107] 4) Arrange the circuit board 21, such as Fig.19 As shown, the circuit board 21 is arranged coplanarly with each strain gauge 14, or is spaced from the plane where each strain gauge 14 is located by a preset distance, which is no greater than 10 mm. The circuit board 21 is fixed to the first body 11 and / or the second body 12 so that the position of the circuit board 2121 can remain stable.

[0108] 5) Place the first patch surface 131 on any strain beam 13 upward, and then weld the lead 22 to each strain gauge 14 in the first patch surface 131 one by one. The welding method can be manual welding or self-welding using a wire welding machine, so that each strain gauge 14 in the first patch surface 131 is electrically connected to the circuit board 21 through the lead 22. Then, weld the lead 22 to each strain gauge 14 in the first patch surface 131 of another strain beam 13, so that all of them are electrically connected to the circuit board 21; this operation is performed until all strain gauges 14 in the corresponding first patch surfaces 131 on the four strain beams 13 are electrically connected to the circuit board 21. Specifically, each strain gauge 14 has two independent pads, and each pad is electrically connected to the corresponding welding position on the circuit board 2121 through the lead 22 to achieve the transmission of the detection signal.

[0109] 6) Flip the multi-dimensional force sensor 1 so that the second patch surface 132 on any strain beam 13 faces upward, and then weld the leads 22 to each strain gauge 14 in the second patch surface 132 one by one. The welding method can be manual welding or self-welding using a wire welding machine, so that each strain gauge 14 in the second patch surface 132 is electrically connected to the circuit board 21 through the leads 22. Then, weld the leads 22 to each strain gauge 14 in the second patch surface 132 of another strain beam 13, so that all of them are electrically connected to the circuit board 21; this operation is carried out until all the strain gauges 14 in the corresponding second patch surfaces 132 on the four strain beams 13 are electrically connected to the circuit board 21, and the processing of the multi-dimensional force sensor 1 is completed;

[0110] The execution order of step 5 and step 6 can be interchanged, that is, the order of welding the lead wires 22 of the strain gauges 14 in each first patch surface 131 and welding the lead wires 22 of the strain gauges 14 in each second patch surface 132 can be interchanged, which is not limited here.

[0111] The processing method provided in the embodiment of the present invention is simple in patching operation because the strain gauges 14 to be attached to each strain beam 13 on the multi-dimensional force sensor 1 are attached to two opposite patch surfaces, and there is no need to change the patch position over a large range, which also improves the efficiency of patching. At the same time, since there is no obstruction above each patch surface, there is no other part obstructing the welding direction, which also improves the convenience of welding operation. The processing method can quickly realize the processing of the multi-dimensional force sensor 1, which is conducive to improving production efficiency.

[0112] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-dimensional force sensor, characterized in that: include: A first body, with a receiving hole formed therein, the receiving hole passing through a first surface and a second surface of the first body, the first surface and the second surface being opposite to each other; The second body is arranged in the receiving hole, the first body surrounds the outer side of the second body and there is a gap between the first body and the second body; A strain beam is arranged in the interval and connected between the first body and the second body, and the edge of the strain beam extends in a straight line; four strain beams are arranged, and each of the strain beams has at least one first patch surface facing the same direction as the first surface and one second patch surface facing the same direction as the second surface; A strain gauge, used for detecting the strain of the strain beam, wherein each of the first patch surfaces and each of the second patch surfaces is respectively provided with the strain gauge; Among them, among the four first patch surfaces, the number of strain gauges affixed on at least one of the first patch surfaces is not less than two, and the total number of strain gauges affixed on the four first patch surfaces is not less than six; among the four second patch surfaces, the number of strain gauges affixed on at least one of the second patch surfaces is not less than two, and the total number of strain gauges affixed on the four second patch surfaces is not less than six.

2. The multi-dimensional force sensor according to claim 1, characterized in that: On the first patch surface and the second patch surface of the same strain beam, the strain gauges provided include any one of the following methods: The strain gauges are installed in equal numbers and at the same locations; or, The strain gauges are installed in equal numbers but at different locations; or The number and location of the strain gauges are different.

3. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauges are distributed on the first patch surface and the second patch surface in any one of the following ways: In the first patch surface and the second patch surface on which one strain gauge is attached, the strain gauge is located on the side of the corresponding patch surface or on the symmetry axis in the width direction of the corresponding patch surface; or, In the first patch surface and the second patch surface on which the two strain gauges are respectively attached, the two strain gauges are respectively located at two opposite sides of the corresponding patch surface, or are located side by side on the same side, or are relatively inclined, or are located side by side on the symmetry axis in the width direction of the corresponding patch surface; or, In the first patch surface and the second patch surface on which the three strain gauges are respectively attached, the strain gauges are at least distributed in a T-shape or an L-shape on the corresponding patch surface, or are arranged at intervals on the same straight line; or, In the first patch surface and the second patch surface on which four strain gauges are respectively attached, the strain gauges are distributed in a T-shape on the corresponding patch surface, or are arranged at intervals on the same straight line, or are distributed in a quadrilateral; or, On the first patch surface and the second patch surface, on which at least five strain gauges are respectively attached, the strain gauges are distributed on the corresponding patch surface in a T-shape, an L-shape, an I-shape, a quadrilateral, or are arranged at intervals on the same straight line.

4. The multi-dimensional force sensor according to claim 1, characterized in that: On the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, each strain gauge is arranged in parallel along the length direction of the corresponding patch surface, and the symmetry axis of each strain gauge is collinear with the symmetry axis of the corresponding patch surface in the width direction.

5. The multi-dimensional force sensor according to claim 4, characterized in that: The strain gauges arranged in parallel include at least one inclined strain gauge, and the angle between the symmetry axis of the inclined strain gauge and the symmetry axis in the width direction of the corresponding patch surface is between 0 and 75 degrees.

6. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, on the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, the strain units are independent of each other, and the substrates are not connected.

7. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, on the first patch surface and the second patch surface on which at least two strain gauges are respectively attached, the strain units are independent of each other and fixed on the same substrate.

8. The multi-dimensional force sensor according to claim 1, characterized in that: The strain gauge includes a substrate and a strain unit, and the strain unit is solidified on one side of the substrate; wherein, on the first patch surface and the second patch surface on which at least three strain gauges are respectively attached, at least one strain unit is individually fixed on one substrate, and at least two strain units are jointly fixed on another substrate.

9. The multi-dimensional force sensor according to claim 7 or 8, characterized in that: The outline shape of the base is set to be rectangular or T-shaped.

10. A processing method for processing a multi-dimensional force sensor as claimed in any one of claims 1 to 9, characterized in that: The processing method comprises: 1) Selecting a first body, a second body and a strain beam, disposing the second body in the receiving hole of the first body, and providing a gap between the first body and the second body; 2) Arranging a strain beam in the interval and connecting between the first body and the second body; four strain beams are arranged, and the first patch surface of each strain beam having a flat surface faces the same direction as the first surface, and the second patch surface of each strain beam having a flat surface faces the same direction as the second surface; 3) Clean each of the first patch surfaces and each of the second patch surfaces, and then attach strain gauges thereto respectively, with at least one strain gauge attached to each patch surface, and the number of strain gauges attached to at least one of the first patch surfaces and at least one of the second patch surfaces is not less than two, and the total number of strain gauges attached to the four first patch surfaces and the four second patch surfaces is not less than six; wherein the attached strain gauges are independent of each other; or the strain gauges are connected as a whole; or at least one strain gauge is independent, and at least two strain gauges are connected as a whole; 4) Arranging a circuit board, wherein the circuit board is arranged coplanarly with each of the strain gauges, or is spaced from the plane where each of the strain gauges is located by a preset distance, and fixing the circuit board on the first body and / or the second body; 5) Place the first patch surface on any one of the strain beams upward, and then perform lead welding on each of the strain gauges in the first patch surface one by one, so that each of the strain gauges in the first patch surface is electrically connected to the circuit board through the lead wires; then perform lead welding on each of the strain gauges in the first patch surface on another strain beam, so that all of them are electrically connected to the circuit board; and perform the same operation until all of the strain gauges in the first patch surfaces corresponding to the four strain beams are electrically connected to the circuit board; 6) Flip the multi-dimensional force sensor so that the second patch surface on any one of the strain beams faces upward, and then perform lead welding on each of the strain gauges in the second patch surface one by one, so that each of the strain gauges in the second patch surface is electrically connected to the circuit board through the lead wires; then perform lead welding on each of the strain gauges in the second patch surface on another strain beam so that all of them are electrically connected to the circuit board; this operation is performed until all of the strain gauges in the corresponding second patch surfaces on the four strain beams are electrically connected to the circuit board, and the processing of the multi-dimensional force sensor is completed; The execution order of step 5 and step 6 can be interchanged.

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