A Reverse Design Method and Related Equipment of Metasurface-Enhanced Micro-LED Based on Fourier Modes

Abstract

The present application discloses a method for inverse design of metasurface-enhanced micro-LEDs based on Fourier modes and related devices, which relates to the field of optoelectronics; the method includes the following steps: modeling the internal optical behavior of the micro-LED based on the vector FMM formula and constructing a loss function; calculating an initial real-valued vector field and an imaginary part vector field, combining the initial real-valued vector field and the imaginary part vector field to form a complex Jones field, and optimizing the complex Jones field to obtain a vector field t; calculating the actual light extraction efficiency, and adjusting the geometric shape and material parameters of the micro-LED based on the error between the actual light extraction efficiency and the preset light extraction efficiency in the loss function; modeling the internal optical behavior of the micro-LED through the vector FMM formula, and combining the minimization of the loss function to significantly improve the light extraction efficiency.

Description

Technical Field

[0001] This application relates to the field of optoelectronics, and particularly to a method for inverse design of metasurface-enhanced micro-LEDs based on Fourier modes and related devices. Background Art

[0002] Microscale light-emitting diodes (micro-LEDs) with lateral dimensions approaching 1 micron are of great significance in various applications including augmented reality displays. In this context, due to the requirement for high brightness (e.g., for outdoor use) and the need to be battery-powered for long periods, high light extraction efficiency (LEE) is crucial. It is desirable to apply methods such as inverse design to obtain LED designs with higher performance; inverse design is a powerful technique that can automatically discover the topology and shape of a design to minimize certain objective functions and is suitable for creating metasurfaces that enhance LED LEE.

[0003] However, the light generated in micro-LEDs is spatially incoherent; spatially incoherent sources (such as spontaneous emission and thermal radiation) are extremely expensive to model by standard methods (requiring many independent simulations), which makes the inverse design of structures including incoherent sources computationally intractable. Summary of the Invention

[0004] To solve the above problems, this application discloses a method for inverse design of metasurface-enhanced micro-LEDs based on Fourier modes. By using the vector FMM formula to model the internal optical behavior of micro-LEDs, it can accurately describe the distribution and propagation characteristics of the electric field at the material interface; combined with the loss function minimization process, it can automatically optimize the geometric shape and material parameters of micro-LEDs, thereby significantly improving the light extraction efficiency (LEE).

[0005] The first technical solution adopted by this application is: to provide a method for inverse design of metasurface-enhanced micro-LEDs based on Fourier modes, including the following steps:

[0006] Model the internal optical behavior of micro-LEDs based on the vector FMM formula and construct a loss function; maximize the light extraction efficiency based on the minimization of the loss function;

[0007] Calculate an initial real-valued vector field based on the Jones direct method, calculate an imaginary part vector field based on polarization characteristics, combine the initial real-valued vector field and the imaginary part vector field to form a complex Jones field, and optimize the complex Jones field to obtain a vector field t;

[0008] Model the non-periodic light source distribution in the micro-LED based on Brillouin zone integration;

[0009] Calculate the actual light extraction efficiency, and adjust the geometry and material parameters of the micro-LED based on the error between the actual light extraction efficiency and the preset light extraction efficiency in the loss function.

[0010] Among them, the modeling of the internal optical behavior of the micro-LED based on the vector FMM formula includes:

[0011] Introduce a local coordinate system to allow Fourier decomposition of the direction-dependent permittivity;

[0012] Optimize the continuity conditions of the tangential and normal components of the electric field displacement field.

[0013] Among them, the loss function is as follows:

[0014] ;

[0015] Among them, is the actual light extraction efficiency, is the preset light extraction efficiency.

[0016] Among them, the vector field t is obtained based on minimizing the loss function:

[0017] ;

[0018] Among them, is the loss function measuring the matching degree between the vector field t and the material parameter , represents the coupling relationship between the vector field t and the gradient of the material parameter , represents the vector field the square of the gradient in the xy-plane, represents the vector field the square of the gradient in the xy-plane;

[0019] ;

[0020] is the geometry of the candidate vector field, and the vector field t that minimizes the loss function is obtained based on .

[0021] Among them, the modeling of the non-periodic light source distribution based on Brillouin zone integration includes:

[0022] Decompose the large unit cell into multiple small unit cells for simulation;

[0023] Perform an average approximation on the simulation results of all small unit cells to eliminate non-physical interference effects.

[0024] Among them, the formula for calculating the optical extraction efficiency is as follows:

[0025] ;

[0026] Among them is the energy emitted by the dipole, is the energy of the dipole emission extracted in the micro-LED.

[0027] Among them, adjusting the geometric shape and material parameters of the micro-LED includes:

[0028] Automatically adjusting the geometric shape and material parameters based on the gradient descent method or genetic algorithm;

[0029] Recalculate the actual optical extraction efficiency after each adjustment and evaluate whether the error decreases.

[0030] Among them, the loss function simultaneously considers the optical extraction efficiency, emission uniformity, and directivity, and constructs a comprehensive loss function based on a weighted method , and the specific formula is as follows:

[0031] ;

[0032] Among them, is the loss function related to the optical extraction efficiency, is the loss function related to the emission uniformity, is the loss function related to the directivity,

[0033] , and are the weight coefficients.

[0034] The second technical solution adopted by this application is: providing an electronic device, the electronic device includes: a memory and a processor coupled to each other, and the processor is used to execute the program instructions stored in the memory to implement the Fourier mode-based super-surface enhanced micro-LED reverse design method as described in any one of the above.

[0035] The third technical solution adopted by this application is: providing a computer-readable storage medium, the computer-readable storage medium stores program data, and the program data can be executed by a processor to implement the Fourier mode-based super-surface enhanced micro-LED reverse design method as described in any one of the above.

[0036] Due to adopting the above technical solutions, this application has the following beneficial effects compared with the prior art:

[0037] 1. Modeling the internal optical behavior of micro-LEDs through the vector FMM formula, and significantly improving the optical extraction efficiency by minimizing the loss function.

[0038] 2. The vector FMM allows the Fourier decomposition of the direction-dependent permittivity and optimizes the continuity conditions of the tangential and normal components of the electric field displacement field; this not only improves the modeling accuracy but also significantly enhances the calculation speed.

[0039] 3. The complex Jones field formed by combining the generated initial real-valued vector field and imaginary part vector field, after optimization, the resulting vector field t lacks discontinuities and zeros, ensuring a more stable local coordinate system for the Fourier basis representation and having the best convergence.

[0040] 4. Through the Brillouin zone integration method, the large unit cell is decomposed into multiple small unit cells for simulation, and the results are averaged and approximated to effectively eliminate non-physical interference effects; this method makes the modeling of complex light source distributions feasible and avoids the computational bottlenecks in traditional methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings. Among them:

[0042] Figure 1 is a schematic flowchart of an embodiment of the Fourier modal-based metasurface-enhanced micro-LED inverse design method provided by the present application;

[0043] Figure 2 is a schematic diagram of calculating the light extraction efficiency by the Jones direct FMM method in an embodiment of the present application;

[0044] Figure 3 is a schematic structural diagram of a computer device in an embodiment of the present application;

[0045] Figure 4 is a schematic structural diagram of a computer-readable storage medium in an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. It can be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Additionally, it should be noted that for the sake of description, only the parts related to the present application are shown in the drawings rather than all the structures. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present application.

[0047] The terms "first", "second", etc. in this application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but also includes unlisted steps or units, or other steps or units inherent to these processes, methods, products or devices.

[0048] Referring to "embodiments" herein means that the specific features, structures or characteristics described in connection with the embodiments can be included in at least one embodiment of this application. The phrase appearing at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0049] Due to problems such as high computational complexity, insufficient modeling tools, difficult optimization, and non-physical interference in traditional micro-LED design methods, it is difficult to effectively utilize inverse design to improve light extraction efficiency; to solve the above problems, this application provides a Fourier-mode-based metasurface-enhanced micro-LED inverse design method, which models the internal optical behavior of micro-LEDs through the vector FMM (Fourier Modal Method) formula, and significantly improves light extraction efficiency by combining loss function minimization; as Figure 1 shown, Figure 1 is a schematic flow chart of an embodiment of the Fourier-mode-based metasurface-enhanced micro-LED inverse design method provided by this application, including the following steps:

[0050] Step S11: Implement the modeling of the internal optical behavior of the micro-LED based on the vector FMM formula and construct a loss function; in the design of the micro-LED, the vector FMM formula is used to model the tangential and normal component displacement fields of the electric field; for example, the micro-LED includes a metasurface structure with a complex interface, and the vector FMM can accurately describe the behavior of the electric field at the interface by introducing a local coordinate system. Compared with the traditional FMM method, the convergence speed of the vector FMM is increased by several times, and the modeling accuracy is higher.

[0051] Maximize the light extraction efficiency based on the minimization of the loss function; the loss function directly quantifies the gap between the actual light extraction efficiency and the target value, making the optimization process always focus on the core goal of improving the light extraction efficiency; the light extraction efficiency of the optimized device can be increased by more than one time, significantly improving the overall performance of the micro-LED.

[0052] Step S12: Calculate the initial real-valued vector field based on the Jones direct method. By directly calculating the polarization characteristics of the electric field, a real-valued vector field represented in the local coordinate system is generated. The generated real-valued vector field has the following characteristics:

[0053] Lack of discontinuity: Compared with the Normal method, the vector field generated by the Jones method is smoother, avoiding numerical errors caused by discontinuities.

[0054] Lack of zeros: There is no zero region in the vector field, thus improving the stability of subsequent calculations.

[0055] Calculate the imaginary part vector field based on the polarization characteristics. According to the polarization characteristics of the internal light source in the micro-LED (such as the polarization direction of dipole radiation), calculate the imaginary part vector field corresponding to the initial real-valued vector field. The imaginary part vector field reflects the phase information of the electric field in the time domain and is an important part of constructing the complex Jones field.

[0056] The initial real-valued vector field and the imaginary part vector field are combined to form a complex Jones field. The complex Jones field can comprehensively describe the spatial distribution and time evolution characteristics of the electric field. The complex Jones field is optimized to obtain the vector field t. The optimized vector field has the following characteristics: lack of discontinuity and zeros, excellent performance in the local coordinate system represented by the Fourier basis, and good convergence.

[0057] The FMM of the Jones method has the best convergence and performs excellently in dealing with complex electromagnetic field problems. The optimized vector field t can quickly converge to the optimal solution, significantly shortening the calculation time. The optimization process of the vector field t fully considers the characteristics of the non-periodic structure in the micro-LED and can accurately describe the optical behavior under complex boundary conditions.

[0058] Step S13: Realize the modeling of the non-periodic light source distribution in the micro-LED based on the Brillouin zone integration. The light sources in the micro-LED are non-periodically distributed, while the traditional FMM method assumes that the light sources and structures are periodic, which may lead to non-physical interference effects (such as false interference fringes or abnormal energy distributions). The method based on the Brillouin zone integration effectively eliminates these interference effects, making the simulation results more realistic and reliable.

[0059] In the reverse design of micro-LEDs, it is necessary to accurately model the light source distribution to optimize the geometric shape and material parameters. The light source distribution model generated by the Brillouin zone integration method can be directly used in the reverse design process to provide reliable input data.

[0060] Step S14: Calculate the actual light extraction efficiency, and adjust the geometry and material parameters of the micro-LED based on the error between the actual light extraction efficiency and the preset light extraction efficiency in the loss function; based on the error feedback mechanism, automatically adjust the geometry and material parameters through an optimization algorithm, avoiding the inefficiency and subjectivity in traditional manual design, and the automated process significantly improves the design efficiency; by continuously evaluating the error and making adjustments, a closed-loop feedback mechanism is formed to ensure the reliability and stability of the final design.

[0061] In summary, the inverse design method of the metasurface-enhanced micro-LED based on the Fourier mode in this embodiment includes the following steps: modeling the internal optical behavior of the micro-LED based on the vector FMM formula and constructing a loss function; maximizing the light extraction efficiency based on the minimization of the loss function; calculating the initial real-valued vector field based on the Jones direct method, calculating the imaginary part vector field based on the polarization characteristics, combining the initial real-valued vector field and the imaginary part vector field to form a complex Jones field, and optimizing the complex Jones field to obtain the vector field t; modeling the non-periodic light source distribution in the micro-LED based on the Brillouin zone integration; calculating the actual light extraction efficiency, and adjusting the geometry and material parameters of the micro-LED based on the error between the actual light extraction efficiency and the preset light extraction efficiency in the loss function; modeling the internal optical behavior of the micro-LED through the vector FMM formula, and combining the minimization of the loss function to significantly improve the light extraction efficiency.

[0062] In one embodiment, modeling the internal optical behavior of the micro-LED based on the vector FMM formula includes:

[0063] Introduce a local coordinate system to allow the Fourier decomposition of the direction-dependent permittivity; in the geometric structure of the micro-LED, introduce a local coordinate system with a unit vector; this local coordinate system is tangent and perpendicular to the material interface; using this local coordinate system, allow the Fourier decomposition of the direction-dependent permittivity (i.e., anisotropic material properties); that is, perform Fourier expansions on the tangential and normal components of the electric field respectively to accurately describe the propagation and distribution characteristics of the electric field in different directions.

[0064] Optimize the continuity conditions of the tangential and normal component displacement fields of the electric field; ensure that the tangential component of the electric field satisfies the boundary conditions at the material interface; ensure that the normal component displacement field of the electric field satisfies the boundary conditions at the material interface.

[0065] By introducing a local coordinate system to allow the Fourier decomposition of the direction-dependent permittivity and optimizing the continuity conditions of the tangential and normal component displacement fields of the electric field, the vector FMM formula realizes the accurate modeling of the internal optical behavior of the micro-LED. This method not only improves the convergence but also enhances the modeling accuracy, adapts to complex boundary conditions, and enhances the calculation efficiency.

[0066] In one embodiment, the loss function is as follows: ; where is the actual light extraction efficiency, is the preset light extraction efficiency; the calculation process of one embodiment is described in detail below:

[0067] Set the target light extraction efficiency = 80%, and the actual light extraction efficiency of the initial design = 40%.

[0068] Use the gradient descent method to adjust the geometry and material parameters of the micro-LED; recalculate the actual light extraction efficiency after adjustment to obtain the second actual light extraction efficiency = 55%, and the loss function value calculated for the second time is 25%.

[0069] Continue iterative optimization. After multiple adjustments, the final actual light extraction efficiency reaches = 78%, and the final loss function value is 2%, ending the optimization.

[0070] In this embodiment, the optimization ends with the final loss function value of 2%, and the convergence threshold is 2%. In other embodiments, the convergence threshold can take other values, and no limitation is imposed thereon; it should be clear that in other embodiments, the number of optimization times can also be used as the criterion for ending the optimization. For example, in one embodiment, the optimization ends after the number of optimization times reaches 10.

[0071] In this embodiment, by defining the loss function , the gap between the actual light extraction efficiency and the target value can be quantified, and based on this, the optimization of the geometry and material parameters of the micro-LED can be guided. This method can not only significantly improve the light extraction efficiency, but also has multiple advantages such as automation, high efficiency, and high reliability, providing strong technical support for the practical application of micro-LEDs.

[0072] In one embodiment, the vector field t is obtained based on minimizing the loss function:

[0073] ;

[0074] where is the loss function measuring the matching degree between the vector field t and the material parameter , represents the coupling relationship between the vector field t and the material parameter gradient , represents the vector field the square of the gradient in the xy-plane, represents the vector field the square of the gradient in the xy-plane;

[0075] ; For the geometry of the candidate vector field, based on obtain the vector field t that minimizes the loss function .

[0076] The following details the steps for selecting the vector field that minimizes the loss function:

[0077] Define an initial candidate vector field , and the candidate vector field can be randomly generated;

[0078] Substitute the candidate vector field and the material parameters into the loss function formula to calculate the current loss function value ;

[0079] Use an optimization algorithm to adjust the candidate vector field , making it gradually approach the optimal solution; in each iteration, update according to the gradient information of the loss function to reduce the loss function value;

[0080] Recalculate the loss function value after each iteration and evaluate whether the convergence condition is met. When the convergence condition is satisfied, the final candidate vector field is the optimal vector field t.

[0081] By minimizing the loss function, ensure that the finally obtained vector field t can accurately reflect the influence of the material parameter distribution on light propagation; represents the coupling relationship between the vector field t and the material parameter gradient , enhancing the ability to describe complex electromagnetic field behaviors; and terms limit the degree of variation of the vector field in the xy-plane, avoiding unreasonable fluctuations.

[0082] In one embodiment, the modeling of the non-periodic light source distribution based on Brillouin zone integration includes:

[0083] Decompose the large unit cell into multiple small unit cells for simulation; decompose the large unit cell containing the non-periodic light source into multiple smaller unit cells (sub-unit cells), and each sub-unit cell contains local light source distribution information; each sub-unit cell can be individually modeled for the electromagnetic field, and the Fourier modal method (FMM) or other numerical methods can be used to calculate the internal electric field distribution; this decomposition method can reduce the computational complexity and retain the main characteristics of the light source distribution.

[0084] Average and approximate the simulation results of all small unit cells to eliminate non-physical interference effects; after completing the simulation of each sub-unit cell, collect the results of all sub-unit cells, and use the Brillouin zone integration method to perform average approximation on these results. The specific steps are as follows:

[0085] Integrate the electric field distributions of all sub-unit cells.

[0086] Eliminate non-physical interference effects through average approximation, and finally generate a global aperiodic light source distribution model.

[0087] Accurate modeling of the aperiodic light source distribution is crucial for the design of micro-LEDs. The Brillouin zone integration method can better capture the spatial distribution characteristics of the light source and avoid errors caused by the periodicity assumption in traditional methods; in the reverse design of micro-LEDs, accurate modeling of the light source distribution is required to optimize the geometric shape and material parameters. The light source distribution model generated based on Brillouin zone integration can be directly used in the reverse design process to provide reliable input data.

[0088] As Figure 2 shown Figure 2 is a schematic diagram of calculating the light extraction efficiency by the Jones direct FMM method in an embodiment of this application.

[0089] In one embodiment, the formula for calculating the light extraction efficiency is as follows: ; where is the energy emitted by the dipole, is the energy of the dipole emission extracted in the micro-LED, is the weight factor, r represents the position of the dipole, p represents the polarization mode, represents the wave vector direction.

[0090] Determine the positions r and characteristics (such as polarization mode p and wave vector direction ) of all dipoles inside the micro-LED. The dipole is the basic unit of the light source in the micro-LED, and its distribution and characteristics determine the overall light extraction efficiency.

[0091] For each dipole, calculate its total emission energy under all polarization modes p and wave vector directions ; use a planar monitor or other measurement tools to record the energy of the dipole emission successfully extracted from the micro-LED .

[0092] According to specific application requirements, assign weight factors to different polarization modes p or directions; for all dipole positions r, polarization modes p, and wave vector directions , the weighted sums of the extracted energy and the total emitted energy are calculated respectively to compute the light extraction efficiency (LEE).

[0093] Taking into account the position, polarization mode, and wave vector direction of the dipole comprehensively, it can evaluate the light extraction efficiency of micro-LEDs comprehensively; the calculated results of the light extraction efficiency can be directly used for the reverse design of micro-LEDs to optimize the geometric shape and material parameters to improve the performance.

[0094] In one embodiment, adjusting the geometric shape and material parameters of the micro-LED includes:

[0095] Automatically adjusting the geometric shape and material parameters based on the gradient descent method or genetic algorithm; the gradient descent method is applicable to continuously differentiable objective functions and updates the parameters by calculating the gradient information of the loss function; the genetic algorithm is applicable to complex non-linear problems and searches for the optimal solution by simulating the natural selection process.

[0096] Recalculate the actual light extraction efficiency after each adjustment and evaluate whether the error decreases; if the error decreases, continue to adjust; if the error does not decrease, try other parameter combinations; if the error meets the convergence condition, stop the optimization; otherwise, continue the iteration.

[0097] In one embodiment, the loss function considers the light extraction efficiency, emission uniformity, and directivity simultaneously and constructs a comprehensive loss function based on a weighted manner , and the specific formula is as follows:

[0098]

[0099] Among them, is the loss function related to the light extraction efficiency, is the loss function related to the emission uniformity, is the loss function related to the directivity, , and are the weight coefficients.

[0100] The weight coefficients , and can be flexibly adjusted according to specific requirements to highlight the importance of certain performance indicators; in one embodiment, is 0.6, is 0.3, is 0.1; it should be clear that the present application does not limit the specific values of the weight coefficients, but the weight coefficients need to meet the normalization condition, that is .

[0101] By constructing a comprehensive loss function and considering the light extraction efficiency, luminescence uniformity, and directivity simultaneously based on a weighted method, multi-objective optimization of micro-LEDs can be achieved. This method not only has flexibility and high precision but also can automatically generate the optimal design scheme, significantly improving the design efficiency and reliability. This technology provides strong support for the design of high-performance micro-LEDs, especially performing excellently in complex multi-objective optimization scenarios.

[0102] For the above embodiments, the present application provides a computer device. Please refer to Figure 3 , Figure 3 which is a schematic structural diagram of an embodiment of the computer device of the present application. The computer device includes a memory and a processor. Among them, the memory and the processor are coupled to each other. The memory stores program data, and the processor is configured to execute the program data to implement the steps of any embodiment of the above-mentioned inverse design method of the Fourier-mode-based metasurface-enhanced micro-LED.

[0103] In this embodiment, the processor can also be referred to as a CPU (Central Processing Unit). The processor may be an integrated circuit chip with signal processing capabilities. The processor can also be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc.

[0104] For the method of the above embodiments, it can be implemented in the form of a computer program. Therefore, the present application proposes a computer-readable storage medium. Please refer to Figure 4 , Figure 4 which is a schematic structural diagram of an embodiment of the computer-readable storage medium of the present application. The computer-readable storage medium stores program data that can be run by the processor, and the program data can be executed by the processor to implement the steps of any embodiment of the above-mentioned inverse design method of the Fourier-mode-based metasurface-enhanced micro-LED.

[0105] The computer-readable storage medium of this embodiment can be a USB flash drive, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk, or an optical disc, etc., which can store program data, or it can also be a server storing the program data. The server can send the stored program data to other devices for running, or it can also run the stored program data by itself.

[0106] In several embodiments provided by the present application, it should be understood that the disclosed methods and devices can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the modules or units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0107] The units described as separate components may or may not be physically separated. The components shown as units may or may not be physical units, that is, they may be located in one place, or they may be distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0108] In addition, each functional unit in various embodiments of the present application can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit. The above integrated units can be implemented in the form of hardware or in the form of software functional units.

[0109] The above is only the embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present application.

Claims

1. A reverse design method of a metasurface-enhanced micro-LED based on Fourier modes, characterized in that It includes the following steps: Based on the vector FMM formula, model the internal optical behavior of the micro-LED and construct a loss function; maximize the light extraction efficiency based on minimizing the loss function; Calculate the initial real-valued vector field based on the Jones direct method, calculate the imaginary part vector field based on the polarization characteristics, combine the initial real-valued vector field and the imaginary part vector field to form a complex Jones field, and optimize the complex Jones field to obtain the vector field t; the imaginary part vector field represents the phase information of the electric field in the time domain; Based on the Brillouin zone integration, model the non-periodic light source distribution in the micro-LED; Calculate the actual light extraction efficiency, and adjust the geometric shape and material parameters of the micro-LED based on the error between the actual light extraction efficiency and the preset light extraction efficiency in the loss function.

2. The inverse design method of the metasurface-enhanced micro-LED based on Fourier modes according to claim 1, characterized in that The modeling of the internal optical behavior of the micro-LED based on the vector FMM formula includes: Introduce a local coordinate system to allow the Fourier decomposition of the direction-dependent permittivity; Optimize the continuity conditions of the tangential and normal component displacement fields of the electric field.

3. The inverse design method of the super-surface enhanced micro-LED based on Fourier modes according to claim 1, wherein The loss function is as follows: L = |LEE1 - LEE0| where LEE1 is the actual light extraction efficiency and LEE0 is the preset light extraction efficiency.

4. The inverse design method of the super-surface enhanced micro-LED based on Fourier modes according to claim 3, characterized in that The vector field t is obtained based on minimizing the loss function: Among them, \(L(t, \varepsilon)\) is a loss function for measuring the matching degree between the vector field \(t\) and the material parameter \(\varepsilon\). represents the coupling relationship between the vector field \(t\) and the gradient of the material parameter ; represents the vector field \(t\) x the square of the gradient in the \(xy\)-plane, represents the vector field \(t\) y the square of the gradient in the \(xy\)-plane; t = argmin L(t * , ε) t * For the geometry of the candidate vector field, obtain the vector field t that minimizes the loss function L(t * , ε) based on t = argmin L(t, ε).

5. The method for inverse design of super-surface enhanced micro-LED based on Fourier modes according to claim 1, wherein The modeling of the non-periodic light source distribution based on the Brillouin zone integration includes: Decompose the large unit cell into multiple small unit cells for simulation; Perform an average approximation on the simulation results of all small unit cells to eliminate non-physical interference effects.

6. The inverse design method of the metasurface-enhanced micro-LED based on Fourier modes according to claim 1, wherein The formula for calculating the light extraction efficiency is as follows: Among them is the energy emitted by the dipole, is the energy of the dipole emission extracted in the micro-LED.

7. The inverse design method of the metasurface-enhanced micro-LED based on Fourier modes according to claim 1, wherein Adjusting the geometric shape and material parameters of the micro-LED includes: Automatically adjust the geometric shape and material parameters based on the gradient descent method or the genetic algorithm; Recalculate the actual light extraction efficiency after each adjustment and evaluate whether the error decreases.

8. The method for inverse design of super-surface enhanced micro-LED based on Fourier modes according to any one of claims 1-7, characterized in that, The loss function simultaneously considers the light extraction efficiency, the emission uniformity, and the directivity, and constructs a comprehensive loss function L1 based on a weighted method. The specific formula is as follows: L1 = w1L LEE + w2L uniformity + w3L directionality Among them, L LEE is a loss function related to the light extraction efficiency, and L uniformity is a loss function related to the emission uniformity, and L directionality is a loss function related to the directivity. w1, w2, and w3 are weight coefficients.

9. An electronic device, characterized in that, The electronic device includes: a memory and a processor coupled to each other, and the processor is configured to execute program instructions stored in the memory to implement the Fourier modal-based metasurface-enhanced micro-LED reverse design method according to any one of claims 1-8.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores program data, and the program data can be executed by a processor to implement the Fourier modal-based metasurface-enhanced micro-LED reverse design method according to any one of claims 1-8.

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