Dual-stator inertial piezoelectric motor

Abstract

The application relates to a double-stator inertial piezoelectric motor, which comprises a base, a sliding table arranged on the base and a stator, the sliding table is arranged along the length direction of the base, and a friction strip is fixed on the side of the sliding table close to the stator; the stator is arranged in mirror symmetry along the left-right direction, two groups of the stator each comprise a flexible hinge mechanism, a piezoelectric stack arranged in the flexible hinge mechanism and a friction foot fixed on the flexible hinge mechanism and in contact with the friction strip. According to the above technical scheme, two symmetrical stators are arranged, the asynchronous stretching and shrinking of the two piezoelectric stacks are utilized, the sliding table moves in two directions with the same speed, thrust and stepping precision, the stepping precision of the sliding table when moving in two directions can be kept consistent, and the stability of the output performance is good.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of piezoelectric motor, in particular to a double-stator inertial piezoelectric motor. BACKGROUND

[0002] The piezoelectric inertial motor belongs to a kind of piezoelectric motor, and the inertial operating principle can be divided into two kinds of friction inertia principle and impact inertia principle, and both have simple structure form. Due to the driving characteristics of the inertial type, it is necessary to overcome the sliding friction, so its speed will be affected to a certain extent.

[0003] For example, Chinese invention CN116345948A discloses a piezoelectric inertial motor based on parallel plate spring transverse motion, which comprises a sliding table, a flexible hinge mechanism, a piezoelectric stack, a friction element, a base, a fixing screw and a pre-pressure adjusting screw. The flexible hinge mechanism is composed of a pair of parallel plate springs and two cross beams as a whole structure. The piezoelectric inertial motor based on the transverse motion of the parallel plate spring has relatively high running speed and extremely low step displacement, and realizes complete decoupling of two-direction displacement. However, the piezoelectric stack has asymmetry in elongation and contraction, and the stator structure is also asymmetric, so the inertial motor with a single stator structure has inconsistent speed, thrust and step accuracy in driving the guide rail in two directions, thereby affecting the consistency of step accuracy when the sliding table moves in two directions, and the stability of output performance is poor. SUMMARY

[0004] The purpose of the present application is to overcome the above-mentioned disadvantages and provide a double-stator inertial piezoelectric motor. The piezoelectric motor is provided with two symmetrical stators, and by utilizing the asynchronous extension and contraction of the two piezoelectric stacks, the sliding table moves in two directions with the same speed, thrust and step accuracy, so that the step accuracy of the sliding table can remain consistent when it moves in two directions, and the stability of output performance is good.

[0005] To achieve the above-mentioned purpose, the present application adopts the following technical scheme: a double-stator inertial piezoelectric motor comprises a base, a sliding table and a stator arranged on the base. The sliding table is arranged along the length direction of the base, and a friction strip is fixed on the side surface of the sliding table close to the stator. The stator is arranged in mirror image symmetry along the left-right direction, and two groups of stators are arranged. Each group of stators comprises a flexible hinge mechanism, a piezoelectric stack arranged in the flexible hinge mechanism, and a friction foot fixed on the flexible hinge mechanism and in contact with the friction strip.

[0006] The flexible hinge mechanism comprises a crossbeam parallel to the sliding direction of the sliding table, one end of the bottom surface of the crossbeam is vertically provided with a mounting block, the bottom of the mounting block is connected with the stator plate through a first flexible hinge, the other end of the bottom surface of the crossbeam is vertically provided with a second flexible hinge, the bottom end of the second flexible hinge is abutted against a first adjusting screw arranged on the base through an elastic member, and the top surface of the crossbeam is provided with a friction foot at the end away from the mounting block; the outer side surface of the mounting block is provided with a first elastic sheet, the first elastic sheet is provided in a cantilevered manner from the connection position of the mounting block and the first flexible hinge to the crossbeam, and the first elastic sheet is abutted against a second adjusting screw arranged on the base; the piezoelectric stack is located below the crossbeam and parallel to the crossbeam, and the two ends of the piezoelectric stack are respectively abutted against the mounting block and the stator plate.

[0007] The stator plate comprises a first plate body and a second plate body, wherein the first plate body is a square plate and is located below the piezoelectric stack, and the second plate body is a right-angle plate and the inner right angle of the second plate body is attached to the upper right corner of the first plate body, the second plate body is located between the piezoelectric stack and the second flexible hinge as a whole, and gaps are left between the second plate body and the crossbeam and the second flexible hinge.

[0008] The end of the first elastic sheet is provided with a first arc-shaped protruding part in the direction of the mounting block, the mounting block is provided with a concave part corresponding to the first arc-shaped protruding part at the corresponding position, the outer side surface of the first elastic sheet is provided with a second arc-shaped protruding part, and the second arc-shaped protruding part is abutted against the second adjusting screw arranged on the base.

[0009] The first flexible hinge is in the shape of a long strip as a whole, the upper end of the first flexible hinge is integrated with the mounting block, the inner side surface of the lower end of the first flexible hinge is integrated with the lower left side of the first plate body, and a gap is left between the upper left side of the first plate body and the first flexible hinge, and the mounting block is provided with a groove corresponding to the piezoelectric stack for positioning;

[0010] The second flexible hinge comprises a first strip part arranged perpendicularly to the crossbeam, the other end of the first strip part is provided with a second strip part arranged perpendicularly to the first strip part, and the second strip part is abutted against the first adjusting screw through an elastic member.

[0011] The elastic member is an elastic column or a compression spring, and the end of the elastic member abutted against the first adjusting screw is provided with an elastic column seat or a spring seat.

[0012] The base is in the shape of a step, the sliding table is arranged on the low step surface of the base, the high step surface of the base is provided with a first sunken groove, the first sunken groove forms a rear side wall parallel to the sliding table, left and right side walls perpendicular to the sliding table, and a groove bottom flush with the low step surface of the base, and two groups of stators are symmetrically arranged on the left and right sides of the first sunken groove;

[0013] The left side wall and the right side wall are respectively provided with a second threaded hole matched with the second adjusting screw, the groove bottom is provided with a support plate for mounting the stator plate, the first plate body of the stator plate is fixed on the support plate through a screw, and the rear side wall is provided with a second sink groove for mounting an elastic member, and the rear side wall of the second sink groove is provided with a first threaded hole matched with the first adjusting screw.

[0014] The outer side of the first flexible hinge is provided with a second elastic sheet, the second elastic sheet is provided in a cantilevered manner from the connection between the first flexible hinge and the stator plate to the cross beam, the outer side of the end of the second elastic sheet is provided with a third arc-shaped protruding part, and the third arc-shaped protruding parts of the two groups of stators are respectively abutted against the left side wall and the right side wall of the first sink groove, and the bottom of the stator plate of the two groups of stators is abutted against the rear side wall of the first sink groove.

[0015] The sliding table is fixed on the base through a sliding table base, the sliding table is in a reverse U-shaped clamping mode on the sliding table base and forms a sliding fit with the sliding table base, and the sliding table base is fixedly connected with the base through a screw.

[0016] The flexible hinge mechanism is an integral structure and is made of spring steel, the friction strips and the sliding table and the friction feet and the cross beam are fixedly connected through adhesion, the friction surface of the friction feet in contact with the friction strips protrudes from the top surface of the cross beam, and the friction feet and the friction strips are made of aluminum oxide.

[0017] The signals received by the piezoelectric stacks in the two groups of stators are sawtooth wave excitation signals with opposite directions and same frequencies.

[0018] The beneficial technical effects of the present application are that:

[0019] 1. The present application is provided with two symmetrical stators, the piezoelectric stacks of the stators and the cross beams connected with the friction feet are arranged in parallel with the sliding direction of the sliding table, the two piezoelectric stacks are excited to perform asynchronous expansion and contraction, the forward and reverse movements of the sliding table are realized, and the movements in the two directions have the same speed, thrust and stepping accuracy, and the stability of the output performance is effectively ensured.

[0020] 2. The two stators of the present application work simultaneously, the friction force is increased, the sliding table is provided with greater thrust, the back-off phenomenon of each step of the motor drive is greatly reduced, and the output force of the motor is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a schematic diagram of the three-dimensional structure of the present application Figure 1 ;

[0022] Figure 2 is a schematic diagram of the three-dimensional structure of the present application Figure 2 ;

[0023] Figure 3 is a top view of the present application;

[0024] Figure 4 is a structural schematic diagram of the stator in the present application;

[0025] Figure 5 is a three-dimensional structural schematic diagram of the flexible hinge mechanism in the present application Figure 1 ;

[0026] Figure 6 is a three-dimensional structural schematic diagram of the flexible hinge mechanism in the present application Figure 2 ;

[0027] Figure 7 is a three-dimensional structural schematic diagram of the base in the present application Figure 1 ;

[0028] Figure 8 is a three-dimensional structural schematic diagram of the base in the present application Figure 2 ;

[0029] Figure 9 is a schematic diagram of the excitation signal and the displacement of the slide;

[0030] Figure 10 is a simulation diagram of the motion of the stator when the slide moves to the left side;

[0031] Figure 11 is a simulation diagram of the motion of the stator when the slide moves to the right side.

[0032] The marks in the above drawings are: base 1, first sink groove 11, rear side wall 111, left side wall 112, right side wall 113, groove bottom 114, second threaded through hole 12, support plate 13, second sink groove 14, first threaded through hole 15, slide 2, slide base 21, stator 3, friction strip 4, flexible hinge mechanism 5, cross beam 51, mounting block 52, groove 521, first flexible hinge 53, stator plate 54, first plate body 541, second plate body 542, second flexible hinge 55, first strip-shaped part 551, second strip-shaped part 552, first elastic sheet 56, first arc-shaped protruding part 561, second arc-shaped protruding part 562, second elastic sheet 57, third arc-shaped protruding part 571, piezoelectric stack 6, friction foot 7, elastic member 8, elastic column seat body 81, first adjusting screw 91, second adjusting screw 92. DETAILED DESCRIPTION

[0033] The present application will be further described below in conjunction with the drawings:

[0034] As Figure 1 , Figure 2 , Figure 3As shown in one kind of double-stator inertial piezoelectric motor, including base 1, the slide 2 and stator 3 set on base 1, slide 2 along the length direction of base 1 setting, and the side of slide 2 close to stator 3 is fixed with friction strip 4. Stator 3 along the left and right direction mirror image symmetry sets two groups, two groups of stator 3 all respectively includes flexible hinge mechanism 5, set in flexible hinge mechanism 5 piezoelectric stack 6 and the friction foot 7 fixed on flexible hinge mechanism 5 and with friction strip 4 contact, as Figure 4 As shown.

[0035] Further, slide 2 is fixed on base 1 through slide base 21, slide 2 is inverted U type card set on slide base 21 and forms sliding fit with slide base 21, slide base 21 is fixedly connected with base 1 through screw.

[0036] The two groups of stators in the embodiment are mirror image, the following structure is described with the left stator of Figure 1 , Figure 2 , Figure 3 As an example. At the same time, in order to facilitate the structure of flexible hinge mechanism 5, Figure 6 The boundary line of each component is shown by dashed line in ,

[0037] Further, as shown in Figure 5 , Figure 6 Flexible hinge mechanism 5 is an integral structure, which is made of spring steel material, including crossbeam 51, crossbeam 51 is parallel to the sliding direction of slide 2, one end of the bottom surface of crossbeam 51 is vertically provided with mounting block 52 downward, the bottom of mounting block 52 is connected with stator plate 54 through first flexible hinge 53, the other end of the bottom surface of crossbeam 51 is vertically provided with second flexible hinge 55 downward, the bottom end of second flexible hinge 55 is abutted with first adjusting screw 91 arranged on base 1 through elastic element 8. By rotating first adjusting screw 91, the pre-pressure of elastic element 8 on second flexible hinge 53 is adjusted by the axial movement of first adjusting screw 91, so as to ensure the good contact between friction foot 7 and friction strip 4. The top surface of crossbeam 51 is provided with friction foot 7 at the end away from mounting block 52.

[0038] The outer side of the mounting block 52 is provided with a first elastic sheet 56, which is suspended from the connection between the mounting block 52 and the first flexible hinge 53 to the direction of the crossbeam 51, and abuts against the second adjusting screw 92 provided on the base 1. Specifically, the end of the first elastic sheet 56 is provided with a first arc-shaped protruding part 561 in the direction of the mounting block 52, and the mounting block 52 is provided with a recess at the corresponding position, which cooperates with the first arc-shaped protruding part 561. The outer side of the first elastic sheet 56 is provided with a second arc-shaped protruding part 562, which abuts against the second adjusting screw 92 provided on the base 1. The piezoelectric stack 6 is located below the crossbeam 51 and parallel to the crossbeam 51, and the two ends of the piezoelectric stack 6 abut against the mounting block 52 and the stator plate 54, respectively.

[0039] In operation, an excitation signal is applied to the piezoelectric stack 6, which drives the crossbeam 51 to move through the expansion and contraction of the piezoelectric stack 6, and the friction foot 7 is used to drive the sliding table 2 to slide. By adjusting the axial position of the second adjusting screw 92, the pre-pressing force of the first elastic sheet 56 can be adjusted, so that the piezoelectric stack 6 is stably clamped between the mounting block 52 and the stator plate 54.

[0040] In this embodiment, the crossbeam 51 and the piezoelectric stack 6 are parallel to the sliding direction of the sliding table 2, which is to provide sufficient contact conditions between the block-shaped friction foot 7 and the block-shaped friction strip 4.

[0041] Further, the stator plate 54 includes a first plate body 541 and a second plate body 542, wherein the first plate body 541 is a square plate, and the first plate body 541 is located below the piezoelectric stack 6. The second plate body 542 is a right-angle plate, and the inner right angle of the second plate body 542 is attached to the upper right corner of the first plate body 541. The second plate body 542 is located between the piezoelectric stack 6 and the second flexible hinge 55 as a whole, and gaps are left between the second plate body 542 and the crossbeam 51 and the second flexible hinge 55. The mounting block 52 is provided with a recess 521 for positioning the piezoelectric stack 6.

[0042] Further, the first flexible hinge 53 is in the shape of a long strip as a whole, the upper end of which is integrated with the mounting block 52, and the inner side of the lower end is integrated with the left lower side of the first plate body 541. A gap is left between the upper left side of the first plate body 541 and the first flexible hinge 53. The width of the gap directly affects the rigidity of the first flexible hinge 53, thereby affecting the movement form of the motor-driven foot.

[0043] Further, the second flexible hinge 55 comprises a first strip 551 arranged perpendicularly to the crossbeam 51, and the other end of the first strip 551 is provided with a second strip 552 arranged perpendicularly to the first strip 551, and the second strip 552 abuts against the first adjusting screw 91 through the elastic member 8. In the embodiment, the first strip 551 is used for transmitting the pre-pressure, and the middle part of the first strip 551 protrudes to both sides, so that the strength of the first strip 551 is greater, and the transmission of the pre-pressure is facilitated.

[0044] Further, the elastic member 8 is an elastic column or a compression spring, and the end of the elastic member 8 abutting against the first adjusting screw 91 is provided with an elastic column seat body 81 or a spring seat.

[0045] Further, as shown in Figure 7 、 Figure 8 , the base 1 is in a stepped shape, the sliding table 2 is arranged on the low step surface of the base 1, the high step surface of the base 1 is provided with a first sunken groove 11, the first sunken groove 11 forms a rear side wall 111 parallel to the sliding table 2, left and right side walls 112 and 113 perpendicular to the sliding table 2, and a groove bottom 114 flush with the low step surface of the base 1, and the two groups of stators 3 are symmetrically installed on the left and right sides of the first sunken groove 11.

[0046] The left and right side walls 112 and 113 are respectively provided with second threaded through holes 12 matched with the second adjusting screws 92, the groove bottom 114 is provided with a support plate 13 for installing the stator plate 54, the first plate body 541 of the stator plate 54 is fixed on the support plate 13 through a screw, the rear side wall 111 is provided with a second sunken groove 14 for installing the elastic member 8, and the rear side wall of the second sunken groove 14 is provided with a first threaded through hole 15 matched with the first adjusting screw 91.

[0047] Further, the outer side of the first flexible hinge 53 is provided with a second elastic sheet 57, the second elastic sheet 57 is arranged in a cantilevered manner from the connection between the first flexible hinge 53 and the stator plate 54 to the crossbeam 51, the outer side of the end of the second elastic sheet 57 is provided with a third arc-shaped protruding part 571, the third arc-shaped protruding parts 571 in the two groups of stators 3 respectively abut against the left and right side walls 112 and 113 of the first sunken groove 11, and the bottom of the stator plate 54 in the two groups of stators 3 abuts against the rear side wall 111 of the first sunken groove 11. The second elastic sheet 57 is arranged to support the stator 3 during assembly, and improve the assembly precision.

[0048] Further, the friction strip 4 and the sliding table 2, and the friction foot 7 and the crossbeam 51 are adhesively fixed, and the friction surface of the friction foot 7 in contact with the friction strip 4 protrudes from the top surface of the crossbeam 51, and the friction foot 7 and the friction strip 4 are both made of aluminum oxide. In the embodiment, the friction strip 4 and the friction foot 7 are both in a block structure.

[0049] Further, the piezoelectric stack 6 in the two groups of stators 3 receives signals of sawtooth wave excitation signals of opposite directions and same frequency.

[0050] The working principle and working process of the present application are as follows:

[0051] During working, the piezoelectric stack 6 of one of the stators 3 is applied with a sawtooth wave excitation signal, while the piezoelectric stack 6 of the other stator 3 is applied with a reverse sawtooth wave excitation signal, and the two piezoelectric stacks 6 apply sawtooth wave excitation signals of same frequency.

[0052] As shown in Figure 9 , Figure 10 , the piezoelectric stack 6 of the left stator 3 is applied with a dotted sawtooth wave excitation signal, so that the piezoelectric stack 6 on the left side is slowly elongated. At the same time, the piezoelectric stack 6 of the right stator 3 is applied with a dash-dot sawtooth wave signal, so that the piezoelectric stack 6 on the right side is slowly shortened. At this time, the two friction feet 7 will make the sliding table 2 move linearly to the left side under the action of static friction.

[0053] When the sawtooth wave excitation signal suddenly changes, the piezoelectric stack 6 of the left stator 3 is rapidly shortened, and the piezoelectric stack 6 of the right stator 3 is quickly elongated. The displacement of the sliding table 2 basically remains unchanged or the reverse displacement is very small under the influence of inertia, and the friction feet 7 change synchronously with the movement state of the piezoelectric stack 6. With the continuous advancement of multiple periods of sawtooth wave excitation signals, the extension and contraction states of the two piezoelectric stacks 6 are opposite, respectively driving the two cross beams 51 to move, and driving the sliding table 2 to produce continuous and stable linear movement to one side by using the friction feet 7.

[0054] As shown in Figure 11 , when the sawtooth wave excitation signals applied to the two piezoelectric stacks 6 are exchanged, the sliding table 2 is driven to move reversely to the other side. Specifically, initially, the piezoelectric stack 6 of the left stator 3 is slowly shortened. At the same time, the piezoelectric stack 6 of the right stator 3 is slowly elongated. At this time, the two friction feet 7 will make the sliding table 2 move linearly to the right side under the action of static friction.

[0055] With the continuous advancement of the period of the sawtooth wave signal, the piezoelectric stack 6 of the left stator 3 is rapidly elongated, and the piezoelectric stack 6 of the right stator is quickly shortened. The displacement of the sliding table 2 basically remains unchanged or the reverse displacement is very small under the influence of inertia, and the friction feet 7 change synchronously with the movement state of the piezoelectric stack 6, so as to make the sliding table 2 produce continuous movement to the right side.

[0056] The above-described embodiments are merely preferred embodiments of the present application, and do not limit the scope of the present application. Without departing from the design spirit of the present application, various modifications and improvements to the technical solutions of the present application made by those skilled in the art shall fall within the protection scope of the present application defined by the claims.

[0057] In the description of the present application, it needs to be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the components or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

Claims

1. A dual-stator inertia piezoelectric motor, comprising a base (1), a slide (2) and a stator (3) arranged on the base (1), characterized in that: The slide (2) is arranged along the length direction of the base (1), and a friction strip (4) is fixed on a side surface of the slide (2) close to the stator (3); the stators (3) are arranged in two groups in a mirror-symmetrical manner along the left and right directions, and the two groups of stators (3) respectively include a flexible hinge mechanism (5), a piezoelectric stack (6) arranged in the flexible hinge mechanism (5), and a friction foot (7) fixed on the flexible hinge mechanism (5) and in contact with the friction strip (4); The flexible hinge mechanism (5) includes a crossbeam (51), the crossbeam (51) is parallel to the sliding direction of the slide (2), one end of the bottom surface of the crossbeam (51) is vertically provided with a mounting block (52), the bottom of the mounting block (52) is connected to the stator plate (54) through a first flexible hinge (53), the other end of the bottom surface of the crossbeam (51) is vertically provided with a second flexible hinge (55), the bottom end of the second flexible hinge (55) is abutted against a first adjusting screw (91) provided on the base (1) through an elastic member (8), and the top surface of the crossbeam (51) is A friction foot (7) is provided at the end away from the mounting block (52); a first elastic sheet (56) is provided on the outer side surface of the mounting block (52), and the first elastic sheet (56) is cantilevered from the connection between the mounting block (52) and the first flexible hinge (53) toward the crossbeam (51), and the first elastic sheet (56) abuts against a second adjustment screw (92) provided on the base (1); the piezoelectric stack (6) is located below the crossbeam (51) and parallel to the crossbeam (51), and the two ends of the piezoelectric stack (6) abut against the mounting block (52) and the stator plate (54) respectively.

2. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The stator plate (54) includes a first plate (541) and a second plate (542), wherein: the first plate (541) is a square plate, and the first plate (541) is located below the piezoelectric stack (6); the second plate (542) is a right-angled plate, and the inner right angle of the second plate (542) fits the upper right right angle of the first plate (541); the second plate (542) is located as a whole between the piezoelectric stack (6) and the second flexible hinge (55), and there is a gap between the second plate (542) and the beam (51) and the second flexible hinge (55); the mounting block (52) is provided with a groove (521) that matches the piezoelectric stack (6) for positioning.

3. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: A first arc-shaped protrusion (561) is provided at the end of the first elastic piece (56) in the direction of the mounting block (52), and a recess is provided at a corresponding position of the mounting block (52) to match the first arc-shaped protrusion (561). A second arc-shaped protrusion (562) is provided on the outer side surface of the first elastic piece (56), and the second arc-shaped protrusion (562) abuts against a second adjustment screw (92) provided on the base (1).

4. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The first flexible hinge (53) is in the shape of a long strip as a whole, with its upper end connected to the mounting block (52) as a whole, and the inner side surface of its lower end connected to the lower left side of the first plate body (541) as a whole, and a gap is left between the upper left side of the first plate body (541) and the first flexible hinge (53); The second flexible hinge (55) comprises a first strip-shaped portion (551) arranged perpendicular to the crossbeam (51); the other end of the first strip-shaped portion (551) is provided with a second strip-shaped portion (552) arranged perpendicular to the first strip-shaped portion (551); the second strip-shaped portion (552) abuts against the first adjusting screw (91) via an elastic member (8).

5. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The elastic member (8) is an elastic column or a compression spring, and an elastic column seat (81) or a spring seat is provided at the end of the elastic member (8) abutting against the first adjusting screw (91).

6. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The base (1) is in a step-like shape, the slide (2) is arranged on the low step surface of the base (1), and a first sinking groove (11) is provided on the high step surface of the base (1). The first sinking groove (11) forms a rear side wall (111) parallel to the slide (2), a left side wall (112) and a right side wall (113) perpendicular to the slide (2), and a groove bottom (114) flush with the low step surface of the base (1). The two groups of stators (3) are symmetrically installed on the left and right sides of the first sinking groove (11). The left side wall (112) and the right side wall (113) are respectively provided with a second threaded through hole (12) that cooperates with the second adjusting screw (92), the groove bottom (114) is provided with a support plate (13) for mounting the stator plate (54), the first plate body (541) of the stator plate (54) is fixed to the support plate (13) by screws, the rear side wall (111) is provided with a second recessed groove (14) for mounting the elastic member (8), and the rear side wall of the second recessed groove (14) is provided with a first threaded through hole (15) that cooperates with the first adjusting screw (91).

7. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: A second elastic sheet (57) is provided on the outer side surface of the first flexible hinge (53). The second elastic sheet (57) is cantilevered from the connection between the first flexible hinge (53) and the stator plate (54) in the direction of the crossbeam (51). A third arc-shaped protrusion (571) is provided on the outer side surface of the end of the second elastic sheet (57). The third arc-shaped protrusion (571) in the two groups of stators (3) respectively abuts against the left side wall (112) and the right side wall (113) of the first sink groove (11). The bottoms of the stator plates (54) in the two groups of stators (3) abut against the rear side wall (111) of the first sink groove (11).

8. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The slide (2) is fixed to the base (1) via a slide base (21); the slide (2) is clamped on the slide base (21) in an inverted U shape and forms a sliding fit with the slide base (21); the slide base (21) is fixed to the base (1) via screws.

9. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The flexible hinge mechanism (5) is an integrated structure made of spring steel. The friction strip (4) and the slide (2), and the friction foot (7) and the crossbeam (51) are all bonded and fixed, and the friction surface of the friction foot (7) and the friction strip (4) in contact is protruding from the top surface of the crossbeam (51). The friction foot (7) and the friction strip (4) are both made of aluminum oxide.

10. The dual-stator inertia piezoelectric motor according to claim 1, characterized in that: The signals received by the piezoelectric stacks (6) in the two groups of stators (3) are sawtooth wave excitation signals with opposite directions and the same frequency.

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