Advanced control APC server and anhydrous hydrogen fluoride preparation device

Abstract

The invention relates to the technical field of gas preparation devices, in particular to an advanced control APC server and an anhydrous hydrogen fluoride preparation device. Comprising an HF / SiF4 generation unit zero-manual server, an HF purification / condensation zero-manual server, a rectification unit zero-manual server, a concentration unit zero-manual server, a filtering unit zero-manual server, a washing system zero-manual server, a circulating water system zero-manual server, a water-containing acid system zero-manual server and a raw material and dilute sulfuric acid system zero-manual server. The system comprises a central tail gas system zero-manual server, a water vapor system zero-manual server, a filter residue treatment zero-manual server, a cooling water system zero-manual server, a finished product tank area zero-manual server and an engineer operation interface. The hydrogen fluoride device control system has the advantages that the problem that an alarm mechanism in an existing hydrogen fluoride device control system is limited is solved through the functions of centralized control, intelligent monitoring, accurate control and the like, production efficiency and product quality are improved, and the hydrogen fluoride device control system has wide application prospects.

Description

Technical Field

[0001] The present invention relates to the field of gas preparation devices, in particular to an advanced control APC server and an anhydrous hydrogen fluoride preparation device. Background Art

[0002] Industrial anhydrous hydrogen fluoride is a widely used chemical product. It is a colorless fuming liquid with a concentration of more than 99% hydrofluoric acid. It is a colorless transparent liquid at low temperatures and is easily gasified under reduced pressure or high temperature. It is mainly used to prepare fluoride salts, halogenated alkanes, fluorine refrigerants, corrode glass, impregnate wood, and electrolyze elemental fluorine. Anhydrous hydrogen fluoride is a highly reactive substance that can react with various substances and is easily soluble in water to produce hydrofluoric acid. High-purity hydrofluoric acid can be used as a strong acid cleaning agent and corrosive agent. It can be used in combination with nitric acid, glacial acetic acid, hydrogen peroxide, and ammonium hydroxide. It is mainly used for cleaning and corroding integrated circuits (ICs) and very large-scale integrated circuits (VLSI) chips. It is one of the key basic chemical materials in the production process of the microelectronics industry. Its purity and cleanliness play a very important role in the yield, electrical properties, and reliability of integrated circuits.

[0003] In the current control system of hydrogen fluoride devices, although basic alarm mechanisms such as buzzer alarms and color flashing prompts are installed, these methods still have limitations in the accuracy and intuitiveness of information transmission. They often cannot immediately and clearly inform operators of the specific alarm type and location, which may delay troubleshooting and emergency response time.

[0004] To this end, the present invention proposes an advanced control APC server and an anhydrous hydrogen fluoride preparation device to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide an advanced control APC server and an anhydrous hydrogen fluoride preparation device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an advanced control APC server, the advanced control APC server comprising: a HF / SiF4 generation unit zero manual server, a HF purification / condensation zero manual server, a distillation unit zero manual server, a concentration unit zero manual server, a filtration unit zero manual server, a washing system zero manual server, a circulating water system zero manual server, a water acid system zero manual server, a raw material and dilute sulfuric acid system zero manual server, a central tail gas system zero manual server, a water vapor system zero manual server, a filter residue treatment zero manual server, a cooling water system zero manual server, and a finished product tank area. Zero manual server and engineer operation interface. The engineer operation interface is electrically connected to the zero manual server of HF / SiF4 generation unit, zero manual server of HF purification / condensation, zero manual server of distillation unit, zero manual server of concentration unit, zero manual server of filtration unit, zero manual server of washing system, zero manual server of circulating water system, zero manual server of aqueous acid system, zero manual server of raw material and dilute sulfuric acid system, zero manual server of central tail gas system, zero manual server of water vapor system, zero manual server of filter residue treatment, zero manual server of cooling water system and zero manual server of finished product tank area. Each server is arranged inside the cabinet;

[0007] The MCU control module is electrically connected to the voice alarm module and the communication transmission module respectively.

[0008] Preferably, the MCU control module is integrated inside the engineer operation interface, the engineer operation interface and the power supply module are electrically connected, and the power supply module provides power for the engineer operation interface, the MCU control module, the voice alarm module and the communication transmission module.

[0009] Preferably, the MCU control module uses a 64-bit ARM MCU as the core processor, the MCU processor module is used to control the sending and receiving of various instructions and the data operation of the detection parameters, the communication transmission module can realize the remote communication transmission function between the server and the rear data platform, and the voice alarm module includes a speaker module, a speaker rotating mechanism and related fixing devices installed on the preparation device and can perform voice broadcasting when each server detects an abnormality.

[0010] Preferably, the HF / SiF4 generation unit zero manual server is electrically connected to the HF / SiF4 generation unit zero manual controller installed on the preparation device, the HF purification / condensation zero manual server is electrically connected to the HF purification / condensation zero manual controller installed on the preparation device, the distillation unit zero manual server is electrically connected to the distillation unit zero manual controller installed on the preparation device, the concentration unit zero manual server is electrically connected to the concentration unit zero manual controller installed on the preparation device, the filtration unit zero manual server is electrically connected to the filtration unit zero manual controller installed on the preparation device, the washing system zero manual server is electrically connected to the washing system zero manual controller installed on the preparation device, and the circulating water system zero manual server is electrically connected to the circulating water system zero manual controller installed on the preparation device.

[0011] Preferably, the zero manual server of the aqueous acid system is electrically connected to the zero manual controller of the aqueous acid system installed on the preparation device, the zero manual server of the raw material and dilute sulfuric acid system is electrically connected to the zero manual controller of the raw material and dilute sulfuric acid system installed on the preparation device, the zero manual server of the central exhaust gas system is electrically connected to the zero manual controller of the central exhaust gas system installed on the preparation device, the zero manual server of the water vapor system is electrically connected to the zero manual controller of the water vapor system installed on the preparation device, the zero manual server of the residue treatment is electrically connected to the zero manual controller of the residue treatment installed on the preparation device, the zero manual server of the cooling water system is electrically connected to the zero manual controller of the cooling water system installed on the preparation device, and the zero manual server of the finished product tank area is electrically connected to the zero manual controller of the finished product tank area installed on the preparation device.

[0012] Preferably, a number of receiving plates are equidistantly arranged inside the cabinet, and the receiving plates divide the interior of the frame into a number of placement cavities. Each server is arranged in the placement cavity. Side plates are fixed on both sides of the receiving plates, and the support plates are in the shape of square plates. Side grooves are equidistantly opened on both sides of the interior of the cabinet. The support plates are embedded in the side grooves and connected to the cabinet by bolts, and the bottom of the receiving plates is evacuated.

[0013] Preferably, a filter layer is fixed at the bottom of the receiving plate, a hygroscopic layer is fixed below the filter layer, a hollow cavity is arranged between the hygroscopic layer and the filter layer, through holes are provided on the surfaces of the side plates on both sides of the receiving plate, a number of through holes are provided, and the through holes are linearly distributed equidistantly on the surface of the side plates, the through holes are communicated with the middle hole cavity, and flow holes are provided on the surface of the receiving plate, a number of flow holes are provided, and the flow holes are distributed in a matrix shape on the surface of the receiving plate.

[0014] Preferably, a cabinet door is rotatably provided on the surface of the cabinet, a base frame is fixed on both sides of the bottom of the cabinet, wing plates are fixed on both sides of the base frame, the cross-section of the wing plate is a right-angled triangle, and evenly distributed heat dissipation holes are opened on one side surface of the cabinet. A pumping pump is provided below the heat dissipation holes, a second support frame is fixed on the outside of the pumping pump, the second support frame is fixed on the surface of the cabinet, and a plurality of pumping pumps are provided.

[0015] Preferably, a first support frame is equidistantly fixed to the other side of the cabinet, a plurality of equidistantly distributed lower support diagonal rods are fixed to the bottom of the first support frame, the lower support diagonal rods are fixedly connected to the cabinet, a liquid storage tank is arranged on the first support frame, a plurality of equidistantly distributed delivery pipes are connected to the liquid storage tank, the delivery pipes pass through the cabinet into the hollow cavity and pass out from the other side of the cabinet, the delivery pipes are connected to the inlet of the pumping pump, the outlet of the pumping pump is connected to the common pipeline, the common pipeline bypasses the back of the cabinet and is connected to the driving pump, the driving pump is arranged on the liquid storage tank, the liquid storage tank stores coolant, a refrigeration component is arranged on the liquid storage tank, the refrigeration component cools the coolant, and the driving pump delivers the refrigerant to each delivery pipe.

[0016] An anhydrous hydrogen fluoride preparation device comprises the advanced control APC server.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention proposes an advanced control APC server and anhydrous hydrogen fluoride preparation device, wherein an engineer operation interface is electrically connected to each zero manual server to realize centralized control; an MCU control module is electrically connected to a voice alarm module and a communication transmission module to realize intelligent monitoring and communication, and remote communication with a rear data platform is realized through the communication transmission module to transmit data in real time; the voice alarm module performs voice broadcasting when an abnormality is detected in the server, thereby improving the accuracy and intuitiveness of the alarm, and through the centralized control and intelligent monitoring of the APC server, accurate control of each link in the anhydrous hydrogen fluoride preparation process is realized, thereby improving production efficiency and product quality, thereby avoiding the problem that in the current hydrogen fluoride device control system, although basic alarm mechanisms such as buzzer sound alarms and color flashing prompts have been equipped, these methods still have limitations in the accuracy and intuitiveness of information transmission, and often cannot immediately and clearly inform the operator of the specific alarm type and occurrence location, thereby possibly delaying the problem of troubleshooting and emergency response time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a flow chart of the server structure of the present invention;

[0020] Figure 2 This is a schematic diagram of the cabinet structure of the present invention;

[0021] Figure 3 It is a side view of the cabinet structure of the present invention;

[0022] Figure 4 This is a schematic diagram of the internal structure of the cabinet of the present invention;

[0023] Figure 5 This is a schematic diagram of the structure of the delivery pipe of the present invention;

[0024] Figure 6 for Figure 5 A magnified view of the structure at center;

[0025] Figure 7 It is a schematic diagram of the flow hole structure of the present invention;

[0026] Figure 8 It is a schematic diagram of the side panel structure of the present invention.

[0027] In the figure: 1. Engineer operation interface; 2. HF / SiF4 generation unit zero manual server; 3. HF purification / condensation zero manual server; 4. Distillation unit zero manual server; 5. Concentration unit zero manual server; 6. Filtration unit zero manual server; 7. Washing system zero manual server; 8. Circulating water system zero manual server; 9. Aqueous acid system zero manual server; 10. Raw material and dilute sulfuric acid system zero manual server; 11. Central exhaust system zero manual server; 12. Water vapor system zero manual server; 13. Filter residue treatment zero manual server; 14. Cooling water system zero manual server; 15. Zero manual server in finished product tank area; 17. MCU control module; 18. Voice alarm module; 19. Communication transmission module; 20. Cabinet; 21. Cabinet door; 22. Heat dissipation hole; 23. Common pipeline; 24. Pumping pump; 25. Base frame; 26. Wing plate; 27. Refrigeration parts; 28. Liquid storage tank; 29. ​​First support frame; 30. Drive pump; 31. Lower support diagonal rod; 32. Placement cavity; 33. Receiver plate; 34. Flow hole; 35. Side groove; 36. Delivery pipe; 38. Second support frame; 39. Side plate; 40. Through hole; 41. Hollow cavity; 42. Moisture absorption layer; 43. Filter layer. DETAILED DESCRIPTION

[0028] In order to make the purpose and technical solution of the present invention clearly and completely described, and the advantages more clearly understood, the embodiments of the present invention are further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, and are not used to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] Example 1: Please refer to Figures 1 to 8The present invention provides a technical solution: an advanced control APC server, the advanced control APC server includes: HF / SiF4 generation unit zero manual server 2, HF purification / condensation zero manual server 3, distillation unit zero manual server 4, concentration unit zero manual server 5, filtration unit zero manual server 6, washing system zero manual server 7, circulating water system zero manual server 8, aqueous acid system zero manual server 9, raw material and dilute sulfuric acid system zero manual server 10, central tail gas system zero manual server 11, water vapor system zero manual server 12, filter residue treatment zero manual server 13, cooling water system zero manual server 14, finished product tank area zero manual server 15 , engineer operation interface 1, engineer operation interface 1 is electrically connected to HF / SiF4 generation unit zero manual server 2, HF purification / condensation zero manual server 3, distillation unit zero manual server 4, concentration unit zero manual server 5, filtration unit zero manual server 6, washing system zero manual server 7, circulating water system zero manual server 8, aqueous acid system zero manual server 9, raw material and dilute sulfuric acid system zero manual server 10, central tail gas system zero manual server 11, water vapor system zero manual server 12, filter residue treatment zero manual server 13, cooling water system zero manual server 14 and finished product tank area zero manual server 15, and each server is arranged inside the cabinet 20;

[0030] MCU control module 17, MCU control module 17 is electrically connected to voice alarm module 18 and communication transmission module 19 respectively, MCU control module 17 is integrated inside engineer operation interface 1, engineer operation interface 1 is electrically connected to power supply module, power supply module provides power for engineer operation interface 1, MCU control module 17, voice alarm module 18 and communication transmission module 19, an anhydrous hydrogen fluoride preparation device, including the advanced control APC server;

[0031] When in use, the engineer operation interface 1 is electrically connected to each zero-manual server to achieve centralized control; the MCU control module 17 is electrically connected to the voice alarm module 18 and the communication transmission module 19 to achieve intelligent monitoring and communication.

[0032] Embodiment 2: Based on Embodiment 1, the MCU control module 17 is composed of a 64-bit ARM MCU as the core processor, the MCU processor module is used for controlling the transmission and reception of various instructions and the data operation of the detection parameters, the communication transmission module 19 can realize the remote communication transmission function between the server and the rear data platform, and the voice alarm module 18 includes a speaker module, a speaker rotating mechanism and related fixing devices installed on the preparation device and can perform voice broadcasting when each server detects an abnormality;

[0033] When using 64-bit ARM MCU is the core processor. This high-performance processor ensures the precise control and reception of various instructions and the efficient data operation of the detection parameters. The MCU control module 17 also integrates the communication transmission module 19, which has the function of realizing remote communication and transmission between the server and the rear data platform. This means that both the on-site operators and the remote monitoring center can obtain the working status and monitoring data of the server in real time, thereby ensuring the comprehensive control of the entire preparation process. The APC server is also equipped with a voice alarm module 18. The voice alarm module 18 is an important equipment component that integrates speech synthesis, broadcasting and control functions. It can send out a voice alarm through a speaker when an abnormality or a specific event is detected, reminding relevant personnel to pay attention and take corresponding measures. Once the controller detects an abnormality or a fault, the controller will feedback to the corresponding server, and the server will feedback to the MCU control module 17. The MCU control module 17 then uses the voice alarm module 18 to send out clear voice alarm information through the speaker to clearly inform the operator of the specific alarm type and location. Such a design greatly improves the accuracy and intuitiveness of information transmission, helps operators to quickly locate problems and take effective countermeasures, thereby ensuring the safety and stability of the preparation process;

[0034] The HF / SiF4 generation unit zero manual server 2 is electrically connected to the HF / SiF4 generation unit zero manual controller installed on the preparation device, the HF purification / condensation zero manual server 3 is electrically connected to the HF purification / condensation zero manual controller installed on the preparation device, the distillation unit zero manual server 4 is electrically connected to the distillation unit zero manual controller installed on the preparation device, the concentration unit zero manual server 5 is electrically connected to the concentration unit zero manual controller installed on the preparation device, the filtration unit zero manual server 6 is electrically connected to the filtration unit zero manual controller installed on the preparation device, the washing system zero manual server 7 is electrically connected to the washing system zero manual controller installed on the preparation device, and the circulating water system zero manual server 8 is electrically connected to the circulating water system zero manual controller installed on the preparation device;

[0035] The water-acid system zero manual server is electrically connected to the water-acid system zero manual controller installed on the preparation device, the raw material and dilute sulfuric acid system zero manual server 10 is electrically connected to the raw material and dilute sulfuric acid system zero manual controller installed on the preparation device, the central tail gas system zero manual server 11 is electrically connected to the central tail gas system zero manual controller installed on the preparation device, the water vapor system zero manual server 12 is electrically connected to the water vapor system zero manual controller installed on the preparation device, the residue treatment zero manual server 13 is electrically connected to the residue treatment zero manual controller installed on the preparation device, the cooling water system zero manual server 14 is electrically connected to the cooling water system zero manual controller installed on the preparation device, and the finished product tank area zero manual server 15 is electrically connected to the finished product tank area zero manual controller installed on the preparation device;

[0036] When in use, the HF / SiF4 generation unit zero manual server 2 is electrically connected to the HF / SiF4 generation unit zero manual controller installed on the preparation device. This connection allows the server to directly receive and send instructions and status information about the HF / SiF4 generation process, ensuring the stability and efficiency of the generation process;

[0037] The HF purification / condensation zero manual server 3 is electrically connected to the HF purification / condensation zero manual controller installed on the preparation device, and can accurately control the HF purification and condensation process, thereby improving the purity and quality of the product;

[0038] The distillation unit zero manual server 4 is electrically connected to the distillation unit zero manual controller installed on the preparation device. This connection ensures accurate control of the distillation process and helps to separate and purify different chemical components;

[0039] The concentration unit zero manual server 5 is electrically connected to the concentration unit zero manual controller installed on the preparation device, and can monitor and control the concentration process to ensure that the concentration of the product reaches the required level;

[0040] The filter unit zero manual server 6 is electrically connected to the filter unit zero manual controller installed on the preparation device, and can monitor the filtering process in real time to prevent impurities from entering the product and ensure the purity of the product;

[0041] Washing system zero manual server 7: electrically connected to the washing system zero manual controller installed on the preparation device, it can accurately control the washing process, remove harmful substances in the product, and improve the safety of the product;

[0042] The circulating water system zero manual server 8 is electrically connected to the circulating water system zero manual controller installed on the preparation device, ensuring the stable operation of the circulating water system and helping to maintain the temperature and pressure conditions of the preparation device;

[0043] At the same time, the zero manual server 9 of the water-acid system, the zero manual server 10 of the raw material and dilute sulfuric acid system, the zero manual server 11 of the central exhaust system, the zero manual server 12 of the water vapor system, the zero manual server 13 of the filter residue treatment and the zero manual server 14 of the cooling water system are also electrically connected to the controllers installed on their respective preparation devices. These connections enable the servers to comprehensively monitor and control each link in the preparation process to ensure the smooth progress of the entire preparation process. When the controller detects an abnormality or failure, it will provide corresponding feedback to the matching server and make accurate broadcast notifications. This electrical connection method ensures that the advanced control APC server can monitor and control each preparation unit in the anhydrous hydrogen fluoride preparation device in real time and accurately, thereby improving the stability and efficiency of the preparation process and ensuring the quality and safety of the product.

[0044] Embodiment 3: On the basis of Embodiment 2, a plurality of receiving plates 33 are equidistantly arranged inside the cabinet 20, and the plurality of receiving plates 33 divide the interior of the frame into a plurality of placement chambers 32, and each server is arranged in the placement chamber 32. Side plates 39 are fixed on both sides of the receiving plates 33, and the support plates are in the shape of square plates. Side grooves 35 are equidistantly opened on both sides of the interior of the cabinet 20, and the support plates are embedded in the side grooves 35 and connected to the cabinet 20 by bolts, and the bottom of the receiving plates 33 is evacuated;

[0045] A filter layer 43 is fixed to the bottom of the receiving plate 33, a moisture absorption layer 42 is fixed below the filter layer 43, a hollow cavity 41 is provided between the moisture absorption layer 42 and the filter layer 43, through holes 40 are provided on the surfaces of the side plates 39 on both sides of the receiving plate 33, a plurality of through holes 40 are provided, and the plurality of through holes 40 are linearly distributed equidistantly on the surface of the side plates 39, and the through holes 40 are communicated with the middle cavity, and a flow hole 34 is provided on the surface of the receiving plate 33, a plurality of flow holes 34 are provided, and the plurality of flow holes 34 are distributed in a matrix shape on the surface of the receiving plate 33;

[0046] When in use, several servers are placed inside the cabinet 20. A large amount of heat is generated during operation, and timely cooling and heat dissipation are required to ensure the smooth operation of the servers. The cabinet 20 is evenly spaced with receiving plates 33, which are divided into multiple placement cavities 32 for placing various servers. The bottom of the receiving plate 33 is evacuated and provided with a filter layer 43 and a moisture absorption layer 42, as well as a hollow cavity 41 and a flow hole 34 for heat dissipation and moisture prevention.

[0047] The cabinet 20 has a cabinet door 21 rotatably arranged on its surface, a bottom frame 25 is fixed on both sides of the bottom of the cabinet 20, wing plates 26 are fixed on both sides of the bottom frame 25, and the cross section of the wing plate 26 is a right triangle. Uniformly distributed heat dissipation holes 22 are opened on one side of the cabinet 20, and a pumping pump 24 is arranged below the heat dissipation holes 22. A second support frame 38 is fixed on the outside of the pumping pump 24, and the second support frame 38 is fixed on the surface of the cabinet 20. There are several pumping pumps 24, and the wing plates 26 can provide lateral support for the bottom frame 25, thereby improving the overall stability of the bottom frame 25 and the cabinet 20.

[0048] A first support frame 29 is fixed equidistantly on the other side of the cabinet 20, and a plurality of equidistantly distributed lower support diagonal rods 31 are fixed to the bottom of the first support frame 29, and the lower support diagonal rods 31 are fixedly connected to the cabinet 20. A liquid storage tank 28 is arranged on the first support frame 29, and a plurality of equidistantly distributed delivery pipes 36 are connected to the liquid storage tank 28, and the delivery pipe 36 penetrates into the cabinet 20, enters into the hollow cavity 41, and passes out from the other side of the cabinet 20, and the delivery pipe 36 is connected to the inlet of the pumping pump 24, and the outlet of the pumping pump 24 is connected to the common pipeline 23, and the common pipeline 23 bypasses from the back of the cabinet 20 and is connected to the drive pump 30, and the drive pump 30 is arranged on the liquid storage tank 28, and the liquid storage tank 28 stores coolant, and a refrigeration component 27 is arranged on the liquid storage tank 28, and the refrigeration component 27 cools the coolant, and the drive pump 30 delivers the coolant to each delivery pipe 36;

[0049] When in use, one side of the cabinet 20 is provided with a heat dissipation hole 22 and a pumping pump 24, and the other side is provided with a coolant circulation system consisting of a liquid storage tank 28, a delivery pipe 36, a driving pump 30 and a refrigeration component 27, so as to realize effective heat dissipation inside the cabinet 20, and the coolant is cooled by the refrigeration component 27, and then the coolant is delivered to each delivery pipe 36 by the driving pump 30. The delivery pipe 36 passes through the hollow cavity 41 until it is connected to the inlet of the pumping pump 24. The delivery pipe 36 carrying the coolant can absorb heat from the server placed on the carrier plate, so as to realize effective heat dissipation. The coolant after absorbing heat is delivered to the pumping pump 24, and the pumping pump 24 delivers it to the common pipeline 23, and finally flows back to the liquid storage tank 28 for re-refrigeration to realize circulation.

[0050] Working principle: In actual use, the engineer operation interface 1 is electrically connected to each zero manual server to realize centralized control; the MCU control module 17 is electrically connected to the voice alarm module 18 and the communication transmission module 19 to realize intelligent monitoring and communication, and realizes remote communication with the rear data platform through the communication transmission module 19 to transmit data in real time; the voice alarm module 18 makes a voice broadcast when the server detects an abnormality, thereby improving the accuracy and intuitiveness of the alarm, and through the centralized control and intelligent monitoring of the APC server, accurate control of each link in the anhydrous hydrogen fluoride preparation process is achieved, thereby improving production efficiency and product quality, thus avoiding: in the current hydrogen fluoride device control system, although it is equipped with basic alarm mechanisms such as buzzer sound alarms and color flashing prompts, these methods still have limitations in the accuracy and intuitiveness of information transmission, and often cannot immediately and clearly inform the operator of the specific alarm type and location, which may delay troubleshooting and emergency response time.

[0051] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An advanced control APC server, characterized in that: The advanced control APC server includes: HF / SiF4 generation unit zero manual server (2), HF purification / condensation zero manual server (3), distillation unit zero manual server (4), concentration unit zero manual server (5), filtration unit zero manual server (6), washing system zero manual server (7), circulating water system zero manual server (8), aqueous acid system zero manual server (9), raw material and dilute sulfuric acid system zero manual server (10), central tail gas system zero manual server (11), water vapor system zero manual server (12), filter residue treatment zero manual server (13), cooling water system zero manual server (14), finished product tank area zero manual server (15), engineer operation interface (1), engineer operation The work interface (1) is electrically connected to the HF / SiF4 generation unit zero manual server (2), the HF purification / condensation zero manual server (3), the distillation unit zero manual server (4), the concentration unit zero manual server (5), the filtration unit zero manual server (6), the washing system zero manual server (7), the circulating water system zero manual server (8), the aqueous acid system zero manual server (9), the raw material and dilute sulfuric acid system zero manual server (10), the central tail gas system zero manual server (11), the water vapor system zero manual server (12), the filter residue treatment zero manual server (13), the cooling water system zero manual server (14) and the finished product tank area zero manual server (15), and each server is arranged inside the cabinet (20); The MCU control module (17) is electrically connected to the voice alarm module (18) and the communication transmission module (19) respectively.

2. The advanced control APC server according to claim 1, characterized in that: The MCU control module (17) is integrated inside the engineer operation interface (1), and the engineer operation interface (1) is electrically connected to the power supply module, which provides power for the engineer operation interface (1), the MCU control module (17), the voice alarm module (18) and the communication transmission module (19).

3. The advanced control APC server according to claim 1, characterized in that: The MCU control module (17) has a 64-bit ARM MCU as a core processor. The MCU processor module is used for controlling the transmission and reception of various instructions and for data operations on detection parameters. The communication transmission module (19) can realize the remote communication transmission function between the server and the rear data platform. The voice alarm module (18) includes a speaker module, a speaker rotation mechanism and related fixing devices installed on the preparation device and can perform voice broadcasting when each server detects an abnormality.

4. The advanced control APC server according to claim 1, characterized in that: The HF / SiF4 generation unit zero manual server (2) is electrically connected to the HF / SiF4 generation unit zero manual controller installed on the preparation device, the HF purification / condensation zero manual server (3) is electrically connected to the HF purification / condensation zero manual controller installed on the preparation device, the distillation unit zero manual server (4) is electrically connected to the distillation unit zero manual controller installed on the preparation device, the concentration unit zero manual server (5) is electrically connected to the concentration unit zero manual controller installed on the preparation device, the filtration unit zero manual server (6) is electrically connected to the filtration unit zero manual controller installed on the preparation device, the washing system zero manual server (7) is electrically connected to the washing system zero manual controller installed on the preparation device, and the circulating water system zero manual server (8) is electrically connected to the circulating water system zero manual controller installed on the preparation device.

5. The advanced control APC server according to claim 1, characterized in that: The aqueous acid system zero manual server (9) is electrically connected to the aqueous acid system zero manual controller installed on the preparation device, the raw material and dilute sulfuric acid system zero manual server (10) is electrically connected to the raw material and dilute sulfuric acid system zero manual controller installed on the preparation device, the central exhaust gas system zero manual server (11) is electrically connected to the central exhaust gas system zero manual controller installed on the preparation device, the water vapor system zero manual server (12) is electrically connected to the water vapor system zero manual controller installed on the preparation device, the residue treatment zero manual server (13) is electrically connected to the residue treatment zero manual controller installed on the preparation device, the cooling water system zero manual server (14) is electrically connected to the cooling water system zero manual controller installed on the preparation device, and the finished product tank area zero manual server (15) is electrically connected to the finished product tank area zero manual controller installed on the preparation device.

6. The advanced control APC server according to claim 1, characterized in that: The cabinet (20) is provided with a plurality of receiving plates (33) at equal intervals inside the cabinet, the receiving plates (33) divide the inside of the frame into a plurality of placement chambers (32), each server is arranged in the placement chamber (32), side plates (39) are fixed on both sides of the receiving plates (33), the support plates are in the shape of square plates, side grooves (35) are provided at equal intervals on both sides of the cabinet (20), the support plates are embedded in the side grooves (35) and connected to the cabinet (20) by bolts, and the bottom of the receiving plates (33) is evacuated.

7. The advanced control APC server according to claim 6, characterized in that: A filter layer (43) is fixed at the bottom of the receiving plate (33), a moisture absorption layer (42) is fixed below the filter layer (43), a hollow cavity (41) is provided between the moisture absorption layer (42) and the filter layer (43), through holes (40) are provided on the surfaces of the side plates (39) on both sides of the receiving plate (33), a plurality of through holes (40) are provided, the plurality of through holes (40) are linearly distributed at equal intervals on the surface of the side plates (39), the through holes (40) are communicated with the hollow cavity, and a flow hole (34) is provided on the surface of the receiving plate (33), a plurality of flow holes (34) are provided, and the plurality of flow holes (34) are distributed in a matrix shape on the surface of the receiving plate (33).

8. The advanced control APC server according to claim 1, characterized in that: The cabinet body (20) is rotatably provided with a cabinet door (21), a bottom frame (25) is fixed on both sides of the bottom of the cabinet body (20), wing plates (26) are fixed on both sides of the bottom frame (25), and the cross section of the wing plate (26) is a right triangle. One side surface of the cabinet body (20) is provided with evenly distributed heat dissipation holes (22), a pumping pump (24) is provided below the heat dissipation holes (22), a second support frame (38) is fixed on the outside of the pumping pump (24), and the second support frame (38) is fixed on the surface of the cabinet body (20). A plurality of pumping pumps (24) are provided.

9. The advanced control APC server according to claim 1, characterized in that: A first support frame (29) is fixed at equal intervals on the other side of the cabinet (20), a plurality of equally spaced lower support diagonal rods (31) are fixed to the bottom of the first support frame (29), the lower support diagonal rods (31) and the cabinet (20) are fixedly connected, a liquid storage tank (28) is arranged on the first support frame (29), a plurality of equally spaced delivery pipes (36) are connected to the liquid storage tank (28), the delivery pipes (36) penetrate into the cabinet (20), enter into the hollow cavity (41) and pass out from the other side of the cabinet (20), The delivery pipe (36) is connected to the inlet of the pumping pump (24), and the outlet of the pumping pump (24) is connected to the common pipeline (23). The common pipeline (23) bypasses the back of the cabinet (20) and is connected to the driving pump (30). The driving pump (30) is arranged on the liquid storage tank (28). The liquid storage tank (28) stores cooling liquid. The liquid storage tank (28) is provided with a refrigeration component (27). The refrigeration component (27) cools the cooling liquid. The driving pump (30) delivers the cooling liquid to each delivery pipe (36).

10. An anhydrous hydrogen fluoride preparation device, characterized in that: It comprises the advanced control APC server as described in any one of claims 1 to 9 above.

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