Anode plate etching device

Abstract

The invention belongs to the technical field of anode plate etching, and particularly relates to an anode plate etching device which comprises a bottom plate, the two ends of the top of the bottom plate are each rotationally connected with a rotating column, a rotating belt is arranged at the position, close to the top end, of the outer side of each rotating column in a transmission mode, and a plurality of hydraulic cylinders are installed at the bottom of each rotating belt. A stroke rod of the hydraulic cylinder is vertically downward and is provided with an adsorption assembly, a coating area, an etching area, a drying area and a placing area are installed at the top of the bottom plate and located at the bottom of the hydraulic cylinder, the coating area, the etching area, the drying area and the placing area are arranged around the rotating belt anticlockwise, the coating area comprises a coating table fixed to the top of the bottom plate, and the coating table is provided with a plurality of grooves; a first mounting groove is formed in the top of the coating table, and a mounting piece is placed in the first mounting groove. According to the method, the multi-depth structure can be accurately realized in a single etching process, the traditional mode that the multi-depth structure can be realized by multiple photoetching and etching steps is changed, and the technological process is greatly simplified.

Description

Technical Field

[0001] The invention belongs to the technical field of anode plate etching, and in particular relates to an anode plate etching device. Background Art

[0002] In the field of modern electronic manufacturing, the requirements for anode plate etching technology are becoming increasingly stringent, and its performance is directly related to the key indicators and market competitiveness of the end products;

[0003] In the field of display technology, some displays, such as Micro OLED displays, have become important competitors in the high-end display market due to their advantages such as high contrast, fast response time and low power consumption. In order to further improve the performance of the display, especially in terms of color gamut and resolution, the use of optically strong microcavity effects has become crucial. This effect requires the formation of pixel areas of different heights on the anode plate of the display to achieve precise control and enhancement of light. However, in the etching process of the anode plate, the existing technology often finds it difficult to accurately control the etching depth of different pixel areas, resulting in the inability to effectively form the required multi-level height structure.

[0004] In the field of semiconductor device manufacturing, silicon capacitors are key components, and their performance directly affects the stability and efficiency of the entire circuit. In order to improve capacitance density, achieve device miniaturization and miniaturization, and ensure the accuracy of capacitance values ​​and product consistency, a deep trench structure with a high aspect ratio is essential. At present, the realization of such a structure usually requires multiple lithography and etching steps, which not only increases manufacturing costs and complexity, but also makes it difficult to ensure the accuracy and consistency of structures at different depths.

[0005] Existing etching technologies, such as dry etching and wet etching, can achieve depth control of materials to a certain extent, but they are usually difficult to meet the demand for precise control of multiple different depths in a single etching step;

[0006] Therefore, developing an anode plate etching device that can accurately control different depths in a single etching step is of great significance for improving the performance of display screens and the capacitance density and consistency of silicon capacitors. Summary of the invention

[0007] The purpose of the present invention is to provide an anode plate etching device that can accurately realize multi-depth structures in a single etching process, which changes the traditional method of requiring multiple photolithography and etching steps to realize multi-depth structures and greatly simplifies the process flow.

[0008] The technical solution adopted by the present invention is as follows:

[0009] An anode plate etching device comprises a bottom plate, both ends of the top of the bottom plate are rotatably connected to a rotating column, a rotating belt is driven at the outer side of the rotating column and near the top, a plurality of hydraulic cylinders are installed at the bottom of the rotating belt, and the travel rods of the hydraulic cylinders are vertically downward and installed with adsorption components;

[0010] A coating area, an etching area, a drying area and a placement area are installed on the top of the bottom plate and at the bottom of the hydraulic cylinder. The coating area, the etching area, the drying area and the placement area are arranged counterclockwise around the rotating belt;

[0011] The coating area includes a coating table fixed on the top of the bottom plate, a first mounting groove is provided on the top of the coating table, a mounting sheet is placed in the first mounting groove, a rotating sheet is rotatably connected to one side of the mounting sheet, an anode sheet body is pasted on the top of the rotating sheet, a fixing frame is fixed on one side of the coating table, a mounting table is fixed on the top of the fixing frame and at one end away from the coating table, a dripping head is installed at the bottom of the mounting table, and a first mounting motor is fixed on the top of the coating table, and the first mounting motor is used to control the rotation of the rotating sheet and the anode sheet body;

[0012] The etching area includes an etching chamber fixed on the top of the bottom plate, and the top of the etching chamber is provided with a second mounting groove corresponding to the mounting sheet;

[0013] The drying area includes a drying table fixed on the top of the bottom plate, a third mounting groove corresponding to the mounting plate is provided on the top of the drying table, a fixing plate is fixed on one side of the drying table, a drying component is rotatably connected in the fixing plate, and the drying component is interference-fitted with the fixing plate;

[0014] The placement area includes a placement table fixed on the top of the bottom plate.

[0015] A push rod motor is fixed to one side of the fixing frame close to the mounting plate, and a spacer is installed on the travel rod of the push rod motor. The spacer is a grid-like structure and is used to partition the photoresist sprayed by the dropper head.

[0016] The output end of the first mounting motor is vertically upward and is located on the top of the coating station and is fixed with a clamping block, and an inclined surface is arranged on the outer side of the clamping block.

[0017] The etching chamber is internally rotatably connected with at least one rotating rod, a rotating stirring shaft is fixed to the top of the second mounting groove, the rotating rod and the rotating stirring shaft are inclined at 45 degrees, and a second mounting motor is installed at the bottom of the etching chamber, and the second mounting motor is installed in the etching chamber.

[0018] The drying component includes a fixed frame rotatably connected to the fixed plate, a fan is installed inside the fixed frame, a filter is installed on one side of the fixed frame, and a heating wire is installed inside the fixed frame and between the fan and the filter.

[0019] The top of the placement table is provided with a fourth mounting groove corresponding to the mounting piece.

[0020] The adsorption component comprises a fixing plate fixed on the stroke rod of the hydraulic cylinder, an electromagnet is installed at the bottom of the fixing plate, and an adsorption plate is fixed at the bottom of the electromagnet.

[0021] A first magnetic block is fixed inside the installation sheet, and second magnetic blocks are fixed in the first installation slot, the second installation slot, the third installation slot and the fourth installation slot. The first magnetic block adsorbs the electromagnet and the second magnetic block.

[0022] The technical effects achieved by the present invention are:

[0023] The present invention divides the anode plate into multiple areas through a spacer, and a different amount of photoresist is dripped into each area. During etching, grooves of multiple depths can be etched out, and a multi-depth structure can be accurately realized in a single etching process, so as to meet the requirements of different heights of red, green and blue pixel areas in the manufacture of some display screens, and the optical strong microcavity effect is fully utilized to effectively improve the color gamut and resolution of the display screen. The invention changes the traditional method of realizing a multi-depth structure by multiple photolithography and etching steps, greatly simplifies the process flow, and in subsequent work, the anode plate can be dried and other operations can be performed, so as to ensure the integrity of the entire anode plate processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the structure of the present invention;

[0025] Figure 2 It is a top view of the whole of the present invention;

[0026] Figure 3 It is a schematic diagram of the structure between the rotating sheet, the spacer and the coating station in the present invention;

[0027] Figure 4 It is a schematic diagram of the structure between the anode sheet body, the rotating sheet and the spacer in the present invention;

[0028] Figure 5 is a cross-sectional view of a coating station in the present invention;

[0029] Figure 6 It is a schematic diagram of the structure between the etching chamber, the second mounting groove and the rotating stirring shaft in the present invention;

[0030] Figure 7is a cross-sectional view of the etching chamber of the present invention;

[0031] Figure 8 It is a schematic diagram of the structure between the drying table, the fixed plate and the fixed frame in the present invention;

[0032] Fig. 9 It is a schematic diagram of the structure between the fan, the heating wire and the filter screen in the present invention;

[0033] Fig.10 It is a schematic diagram of the structure between the placement table and the fourth installation groove in the present invention;

[0034] Fig.11 It is a schematic diagram of the structure among the hydraulic cylinder, the electromagnet and the adsorption sheet in the present invention.

[0035] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0036] 1. Bottom plate; 2. Rotating column; 3. Rotating belt; 4. Hydraulic cylinder; 5. Coating station; 6. Mounting plate; 7. Rotating plate; 8. First mounting slot; 9. Anode plate body; 10. Fixed frame; 11. Mounting station; 12. Drip head; 13. Spacer; 14. Push rod motor; 15. First mounting motor; 16. Block; 17. Inclined surface; 18. Etching chamber; 19. Second mounting slot; 20. Rotating stirring shaft; 21. Second mounting motor; 22. Drying station; 23. Third mounting slot; 24. Fixed plate; 25. Fixed frame; 26. Fan; 27. Heating wire; 28. Filter; 29. ​​Placement station; 30. Fourth mounting slot; 31. Fixed plate; 32. Electromagnet; 33. Adsorption plate; 34. Rotating rod. DETAILED DESCRIPTION

[0037] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

[0038] like Figure 1-Figure 11 As shown, an anode plate etching device comprises a bottom plate 1, both ends of the top of the bottom plate 1 are rotatably connected to a rotating column 2, and a rotating belt 3 is driven at the outer side of the rotating column 2 and near the top. Fig.11, a plurality of hydraulic cylinders 4 are installed at the bottom of the rotating belt 3, and a driving motor is installed at the bottom of the bottom plate 1. The driving motor is used to control the rotation of one of the rotating columns 2, and through the rotation of the rotating column 2, the rotating belt 3 is driven to transmit, and the plurality of hydraulic cylinders 4 are driven to move. The stroke rod of the hydraulic cylinder 4 is vertically downward and an adsorption component is installed. The adsorption component includes a fixing plate 31 fixed on the stroke rod of the hydraulic cylinder 4, an electromagnet 32 ​​is installed at the bottom of the fixing plate 31, and an adsorption plate 33 is fixed at the bottom of the electromagnet 32. The electromagnet 32 ​​can emit magnetism to adsorb the anode sheet body 9 or the subsequent mounting plate 6 thereon, and then through the setting of the mounting plate 6, the mounting plate 6 is tightly attached to the adsorption plate 33;

[0039] A coating area, an etching area, a drying area and a placement area are installed on the top of the bottom plate 1 and at the bottom of the hydraulic cylinder 4. The coating area, the etching area, the drying area and the placement area are arranged counterclockwise around the rotating belt 3.

[0040] See attached Figure 3-Figure 5 The coating area includes a coating table 5 fixed on the top of the bottom plate 1, and a first mounting groove 8 is arranged on the top of the coating table 5. A mounting plate 6 is placed in the first mounting groove 8, and a first magnetic block is installed in the mounting plate 6. A second magnetic block is installed in the first mounting groove 8, so that the mounting plate 6 is in the first mounting groove 8 and can be stably adsorbed in the first mounting groove 8. When the electromagnet 32 ​​adsorbs the mounting plate 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the first mounting groove 8 on the first magnetic block in the mounting plate 6. A groove body for placing a rotating plate 7 is arranged on the coating table 5, and one side of the mounting plate 6 is rotatably connected with a rotating plate The rotating sheet 7 is provided with an anode sheet body 9 on the top of the rotating sheet 7. The anode sheet body 9 can be set on the rotating sheet 7 by bonding, or can be adsorbed on the rotating sheet 7 by magnetic attraction, or can be assembled on the rotating sheet 7 in any other way so that the anode sheet body 9 can be easily disassembled. A fixing frame 10 is fixed on one side of the coating station 5, and a mounting platform 11 is fixed on the top of the fixing frame 10 and at one end away from the coating station 5. A drip head 12 is installed at the bottom of the mounting platform 11, and an adjustable mechanism is installed in the mounting platform 11. The mechanism is used to adjust the position of the drip head 12, which can be in the following manner:

[0041] A horizontal and vertical push rod motor 14 or hydraulic cylinder 4 is installed in the mounting platform 11 to push the drip head 12 to adjust its position, and the mechanism can also be assembled with other adjustments according to the user's own configuration. It only needs to be able to drive the drip head 12 to move, which falls within the protection scope of this application;

[0042] A first mounting motor 15 is fixed on the top of the coating station 5. The first mounting motor 15 is used to control the rotation of the rotating sheet 7 and the anode sheet body 9. Figure 5The output end of the first mounting motor 15 is vertically upward and is located on the top of the coating station 5, and a clamping block 16 is fixed thereon. An inclined surface 17 is arranged on the outer side of the clamping block 16. After the electromagnet 32 ​​adsorbs the mounting piece 6 into the first mounting groove 8, a groove body is arranged at the bottom of the rotating piece 7. The first mounting motor 15 can clamp the rotating piece 7 through the clamping block 16, and the inclined surface 17 is arranged to make it more convenient for the clamping block 16 to enter the groove body on the rotating piece 7 without being stuck. The clamping block 16 can move toward the groove body along the inclined surface 17;

[0043] When the photoresist is dripped, the dripping head 12 can be controlled to drip glue, generally dripping a dozen drops, and then the first installation motor 15 is driven to drive the rotating sheet 7 to rotate, and the anode sheet body 9 is driven to rotate through the rotating sheet 7, so that the photoresist evenly covers the surface of the anode sheet body 9, and after the photoresist is dried and solidified, a mask layer can be formed;

[0044] See attached Figure 4 A push rod motor 14 is fixed to one side of the fixing frame 10 close to the mounting plate 6, and a spacer 13 is installed on the travel rod of the push rod motor 14. The spacer 13 is a grid-like structure and is used to partition the photoresist sprayed by the dropper head 12;

[0045] In the manufacture of the anode sheet body 9, different application scenarios and functional requirements are required. Therefore, a piece of anode sheet body 9 usually needs to be etched to different depths. For example, in the manufacture of Micro OLED display screens, in order to utilize the optical strong microcavity effect to improve the color gamut and resolution of the display screen and make the product reach the high-end market standard, the areas corresponding to the red, green and blue pixels on the anode sheet body 9 need to have different heights, which requires different etching depths to be formed by etching to achieve the difference in pixel heights.

[0046] Another example is the manufacture of anodically bonded silicon capacitors. In order to prepare deep trenches with high aspect ratios on silicon substrates to increase capacitance density, miniaturize and micro-miniaturize devices, and ensure the accuracy of capacitance values ​​and product consistency, it is necessary to precisely control the etching depth. Different etching depths are required for capacitor areas of different specifications or functions.

[0047] Therefore, when it is necessary to drip photoresist on the anode sheet body 9, first start the push rod motor 14 so that the stroke rod of the push rod motor 14 drives the spacer 13 to move, and then the spacer 13 moves to align with the anode sheet body 9. At this time, the drip head 12 drips glue, and the drip head 12 is controlled to drip different amounts of photoresist on each grid on the spacer 13. The anode sheet body 9 is rotated, and the thickness of the photoresist in each grid on the spacer 13 is different. When it is etched in the etching chamber 18, the thinner photoresist area is etched first, and the thicker The etching of the area is slower, and areas of different depths can be etched out at this time. The grid on the spacer 13 can be changed according to the shape and size of the area to be etched, and multiple different spacers 13 can also be set. When a batch of anode sheet bodies 9 needs to be etched, a spacer 13 can be replaced, and an adsorption layer is provided at the bottom of the spacer 13 to adsorb excess photoresist to avoid photoresist accumulation around the side walls of the spacer 13 and the grid of the spacer 13. The adsorption layer can be a sponge or any other material that can be adsorbed.

[0048] After the coating area is finished, the rotating belt 3 rotates and drives the hydraulic cylinder 4 to rotate. The mounting sheet 6 is adsorbed on the adsorption sheet 33 by the electromagnet 32 ​​provided on the hydraulic cylinder 4, so that the hydraulic cylinder 4 drives the mounting sheet 6 and other components to move to the next etching area.

[0049] See attached Figure 6-Figure 7 The etching area includes an etching chamber 18 fixed on the top of the bottom plate 1, and a second mounting groove 19 corresponding to the mounting sheet 6 is arranged on the top of the etching chamber 18. The hydraulic cylinder 4 places the mounting sheet 6 at the position of the second mounting groove 19 on the etching chamber 18. The etching chamber 18 is provided with an etching liquid. First, the etching liquid contacts the photoresist and gradually dissolves the photoresist, and then the anode sheet body 9 is etched to achieve the purpose of etching;

[0050] See attached Figure 7 , the etching chamber 18 is internally rotatably connected with at least one rotating rod 34, a rotating stirring shaft 20 is fixed on the top of the second mounting groove 19, the rotating rod 34 and the rotating stirring shaft 20 are inclined at 45 degrees, a second mounting motor 21 is installed at the bottom of the etching chamber 18, the second mounting motor 21 is installed in the etching chamber 18, and a second magnetic block is also arranged in the second mounting groove 19, so that the mounting sheet 6 in the second mounting groove 19 can be stably adsorbed in the second mounting groove 19, and when the electromagnet 32 ​​adsorbs the mounting sheet 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the second mounting groove 19 on the first magnetic block in the mounting sheet 6;

[0051] When the second installation motor 21 is driven, the rotating rod 34 can be driven to rotate, and the rotating stirring shaft 20 can be driven to rotate, so that the etching liquid can be stirred by the rotating stirring shaft 20. By setting the rotating stirring shaft 20 in an inclined manner, the etching liquid can generate both horizontal and vertical flows during the stirring process, avoiding the occurrence of flow dead angles, so that the etching effect of the etching liquid on the anode sheet body 9 can be better, avoiding the occurrence of etching dead angles;

[0052] After etching is completed, the rotating belt 3 rotates, and drives the hydraulic cylinder 4 to rotate to move the mounting plate 6 and the parts thereon to the next drying area;

[0053] See attached Figure 8-Figure 9 The drying area includes a drying table 22 fixed on the top of the bottom plate 1, and a third mounting groove 23 corresponding to the mounting piece 6 is arranged on the top of the drying table 22. The mounting piece 6 is placed at the position of the third mounting groove 23 through the hydraulic cylinder 4. A second magnetic block is also arranged in the third mounting groove 23 for adsorbing the mounting piece 6. The operator can directly take the mounting piece 6 to separate the mounting piece 6 from the third mounting groove 23, and a groove body corresponding to the rotating piece 7 is arranged on the drying table 22. A fixing plate 24 is fixed on one side of the drying table 22, and a drying component is rotatably connected in the fixing plate 24. The anode sheet body 9 is dried by the drying component to achieve the purpose of drying the anode sheet body 9. The drying component and the fixing plate 24 are interference fit. Through this arrangement, the user can rotate the drying component as needed, thereby changing the drying angle of the drying component.

[0054] See attached Fig. 9 The drying assembly includes a fixed frame 25 rotatably connected to a fixed plate 24, a fan 26 is installed inside the fixed frame 25, a filter 28 is installed on one side of the fixed frame 25, and a heating wire 27 is installed inside the fixed frame 25 and between the fan 26 and the filter 28;

[0055] When drying the anode sheet body 9, the heating wire 27 can be driven first so that the heating wire 27 heats the surrounding air, and the fan 26 can be driven so that the fan 26 can absorb the heated air and blow it to the anode sheet body 9, so that the anode sheet body 9 can be dried quickly. By setting the filter 28, the filter 28 can filter the air. The filter 28 can be detachably mounted on the fixed frame 25, so as to facilitate the cleaning of the filter 28.

[0056] After the drying is completed, the operator disassembles the anode sheet body 9 and proceeds to the next subsequent work, and places the mounting sheet 6 and the rotating sheet 7 in the placement area;

[0057] See attached Fig.10The placement area includes a placement table 29 fixed on the top of the base plate 1. Furthermore, a fourth mounting groove 30 corresponding to the mounting piece 6 is arranged on the top of the placement table 29. Through the arrangement of the fourth mounting groove 30, the fourth mounting groove 30 can place the mounting piece 6 and the rotating piece 7. A second magnetic block is also arranged in the fourth mounting groove 30, so that the mounting piece 6 can be stably adsorbed in the fourth mounting groove 30, and when the electromagnet 32 ​​adsorbs the mounting piece 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the fourth mounting groove 30 on the first magnetic block in the mounting piece 6. A groove body for placing the rotating piece 7 is arranged on the placement table 29.

[0058] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. An anode plate etching device, comprising a bottom plate (1), characterized in that: Both ends of the top of the bottom plate (1) are rotatably connected to a rotating column (2), a rotating belt (3) is driven on the outer side of the rotating column (2) and near the top, a plurality of hydraulic cylinders (4) are installed at the bottom of the rotating belt (3), and the travel rods of the hydraulic cylinders (4) are vertically downward and are installed with adsorption components; A coating area, an etching area, a drying area and a placement area are installed on the top of the bottom plate (1) and at the bottom of the hydraulic cylinder (4), and the coating area, etching area, drying area and placement area are arranged counterclockwise around the rotating belt (3); The coating area comprises a coating platform (5) fixed on the top of the bottom plate (1), a first mounting groove (8) is arranged on the top of the coating platform (5), a mounting plate (6) is placed in the first mounting groove (8), a rotating plate (7) is rotatably connected to one side of the mounting plate (6), an anode plate body (9) is pasted on the top of the rotating plate (7), a fixing frame (10) is fixed on one side of the coating platform (5), a mounting platform (11) is fixed on the top of the fixing frame (10) and at one end away from the coating platform (5), a dripping head (12) is installed on the bottom of the mounting platform (11), a first mounting motor (15) is fixed on the top of the coating platform (5), and the first mounting motor (15) is used to control the rotation of the rotating plate (7) and the anode plate body (9); The etching area comprises an etching chamber (18) fixed on the top of the bottom plate (1), and a second mounting groove (19) corresponding to the mounting plate (6) is provided on the top of the etching chamber (18); The drying area comprises a drying table (22) fixed to the top of the bottom plate (1), a third mounting groove (23) corresponding to the mounting plate (6) is arranged on the top of the drying table (22), a fixing plate (24) is fixed to one side of the drying table (22), a drying component is rotatably connected inside the fixing plate (24), and the drying component is interference-fitted with the fixing plate (24); The placement area includes a placement platform (29) fixed on the top of the bottom plate (1).

2. The anode plate etching device according to claim 1, characterized in that: A push rod motor (14) is fixed to one side of the fixing frame (10) close to the mounting plate (6), and a spacer (13) is installed on the travel rod of the push rod motor (14). The spacer (13) is a grid-like structure and is used to partition the photoresist sprayed by the dropper head (12).

3. The anode plate etching device according to claim 1, characterized in that: The output end of the first mounting motor (15) is vertically upward and is located on the top of the coating station (5), and a clamping block (16) is fixed thereon, and an inclined surface (17) is arranged on the outer side of the clamping block (16).

4. The anode plate etching device according to claim 1, characterized in that: The etching chamber (18) is internally rotatably connected to at least one rotating rod (34); a rotating stirring shaft (20) is fixed to the top of the second mounting groove (19); the rotating rod (34) and the rotating stirring shaft (20) are inclined at 45 degrees; a second mounting motor (21) is installed at the bottom of the etching chamber (18); and the second mounting motor (21) is installed in the etching chamber (18).

5. The anode plate etching device according to claim 1, characterized in that: The drying component comprises a fixed frame (25) rotatably connected to the fixed plate (24), a fan (26) is installed inside the fixed frame (25), a filter (28) is installed on one side of the fixed frame (25), and a heating wire (27) is installed inside the fixed frame (25) and between the fan (26) and the filter (28).

6. The anode plate etching device according to claim 1, characterized in that: The top of the placement platform (29) is provided with a fourth installation groove (30) corresponding to the installation piece (6).

7. The anode plate etching device according to claim 1, characterized in that: The adsorption assembly comprises a fixing plate (31) fixed on the travel rod of the hydraulic cylinder (4), an electromagnet (32) is installed at the bottom of the fixing plate (31), and an adsorption plate (33) is fixed at the bottom of the electromagnet (32).

8. The anode plate etching device according to claim 7, characterized in that: A first magnetic block is fixed inside the mounting plate (6), and second magnetic blocks are fixed inside the first mounting groove (8), the second mounting groove (19), the third mounting groove (23) and the fourth mounting groove (30), and the first magnetic block and the electromagnet (32) and the second magnetic block are mutually attracted.

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