Anode plate etching device

Abstract

The present application belongs to the technical field of anode plate etching, and particularly relates to an anode plate etching device, which comprises a bottom plate, both ends of the top of the bottom plate are rotationally connected with a rotating column, a rotating belt is driven at the position of the outer side of the rotating column and close to the top end, the bottom of the rotating belt is provided with a plurality of hydraulic cylinders, the stroke rods of the hydraulic cylinders are vertically downward and are provided with an adsorption assembly, the top of the bottom plate and at the bottom of the hydraulic cylinders are provided with a coating area, an etching area, a drying area and a placing area, the coating area, the etching area, the drying area and the placing area are arranged in a counterclockwise manner around the rotating belt, the coating area comprises a coating table fixed on the top of the bottom plate, the top of the coating table is provided with a first mounting groove, and the first mounting groove is provided with a mounting piece. The present application can accurately realize multiple depth structures in a single etching process, changes the mode that the traditional multiple photoetching and etching steps can realize multiple depth structures, and greatly simplifies the process flow.

Description

Technical Field

[0001] The invention belongs to the technical field of anode plate etching, and in particular relates to an anode plate etching device. Background Art

[0002] In the field of modern electronic manufacturing, the requirements for anode plate etching technology are becoming increasingly stringent, and its performance is directly related to the key indicators and market competitiveness of the end products;

[0003] In the field of display technology, some displays, such as Micro OLED displays, have become important competitors in the high-end display market due to their advantages such as high contrast, fast response time and low power consumption. To further improve the performance of these displays, especially in terms of color gamut and resolution, the utilization of the optically strong microcavity effect has become crucial. This effect requires the formation of pixel areas of varying heights on the display's anode plate to achieve precise control and enhancement of light. However, existing technologies often have difficulty accurately controlling the etching depth of different pixel areas during the anode plate etching process, resulting in the inability to effectively form the required multi-level height structure.

[0004] In the field of semiconductor device manufacturing, silicon capacitors are key components whose performance directly affects the stability and efficiency of the entire circuit. In order to improve capacitance density, achieve device miniaturization and miniaturization, and ensure the accuracy of capacitance values ​​and product consistency, a deep trench structure with a high aspect ratio is essential. Currently, achieving such a structure usually requires multiple lithography and etching steps, which not only increases manufacturing cost and complexity, but also makes it difficult to ensure the accuracy and consistency of structures at different depths.

[0005] Existing etching technologies, such as dry etching and wet etching, can achieve depth control of materials to a certain extent, but they are generally difficult to meet the demand for precise control of multiple different depths in a single etching step;

[0006] Therefore, developing an anode plate etching device that can precisely control different depths in a single etching step is of great significance for improving the performance of display screens and the capacitance density and consistency of silicon capacitors. Summary of the Invention

[0007] The purpose of the present invention is to provide an anode plate etching device that can accurately realize multi-depth structures in a single etching process. It changes the traditional method of requiring multiple photolithography and etching steps to realize multi-depth structures, and greatly simplifies the process flow.

[0008] The technical solutions adopted by the present invention are as follows:

[0009] An anode plate etching device includes a base plate, both ends of the top of the base plate are rotatably connected to a rotating column, a rotating belt is driven on the outside of the rotating column and near the top, and a plurality of hydraulic cylinders are installed at the bottom of the rotating belt. The travel rods of the hydraulic cylinders are vertically downward and are equipped with adsorption components;

[0010] A coating area, an etching area, a drying area, and a placement area are installed on the top of the bottom plate and at the bottom of the hydraulic cylinder. The coating area, etching area, drying area, and placement area are arranged counterclockwise around the rotating belt.

[0011] The coating area includes a coating table fixed to the top of the bottom plate, a first mounting groove is provided on the top of the coating table, a mounting piece is placed in the first mounting groove, one side of the mounting piece is rotatably connected to a rotating piece, the top of the rotating piece is pasted with an anode sheet body, a fixing frame is fixed to one side of the coating table, the top of the fixing frame and one end away from the coating table is fixed with a mounting table, a dripping head is installed at the bottom of the mounting table, and a first mounting motor is fixed on the top of the coating table, and the first mounting motor is used to control the rotation of the rotating piece and the anode sheet body;

[0012] The etching area includes an etching chamber fixed on the top of the bottom plate, and the top of the etching chamber is provided with a second mounting groove corresponding to the mounting piece;

[0013] The drying area includes a drying table fixed to the top of the bottom plate, a third mounting slot corresponding to the mounting piece is provided on the top of the drying table, a fixing plate is fixed to one side of the drying table, a drying component is rotatably connected in the fixing plate, and the drying component is interference-fitted with the fixing plate;

[0014] The placement area includes a placement platform fixed on the top of the bottom plate.

[0015] A push rod motor is fixed on one side of the fixing frame close to the mounting plate. A spacer is installed on the travel rod of the push rod motor. The spacer is a grid-like structure and is used to divide the photoresist sprayed by the dropper head into different areas.

[0016] The output end of the first mounting motor is vertically upward and is located on the top of the coating station and is fixed with a clamping block, and an outer side of the clamping block is provided with an inclined surface.

[0017] The etching chamber is internally rotatably connected to at least one rotating rod, a rotating stirring shaft is fixed to the top of the second mounting groove, the rotating rod and the rotating stirring shaft are inclined at 45 degrees, and a second mounting motor is installed at the bottom of the etching chamber, and the second mounting motor is installed in the etching chamber.

[0018] The drying component includes a fixed frame rotatably connected to the fixed plate, a fan is installed inside the fixed frame, a filter is installed on one side of the fixed frame, and a heating wire is installed inside the fixed frame and between the fan and the filter.

[0019] The top of the placement platform is provided with a fourth installation groove corresponding to the installation piece.

[0020] The adsorption component includes a fixing plate fixed on the stroke rod of the hydraulic cylinder, an electromagnet is installed at the bottom of the fixing plate, and an adsorption plate is fixed at the bottom of the electromagnet.

[0021] A first magnetic block is fixed inside the mounting plate, and second magnetic blocks are fixed in the first mounting slot, the second mounting slot, the third mounting slot, and the fourth mounting slot. The first magnetic block is attracted to the electromagnet and the second magnetic block.

[0022] The technical effects achieved by the present invention are:

[0023] The present invention divides the anode plate into multiple areas through spacers, drips different amounts of photoresist into each area, and etches out grooves of various depths during etching. The invention can accurately realize multi-depth structures in a single etching process, meeting the requirements of different heights of red, green, and blue pixel areas in some display screen manufacturing, making full use of the optically strong microcavity effect, and effectively improving the color gamut and resolution of the display screen. The invention changes the traditional method of realizing multi-depth structures by requiring multiple photolithography and etching steps, greatly simplifies the process flow, and in subsequent work, the anode plate can be dried and other operations can be performed, ensuring the integrity of the entire anode plate processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the present invention;

[0025] Figure 2 It is a top view of the entire present invention;

[0026] Figure 3 It is a schematic diagram of the structure between the rotating sheet, the spacer and the coating station in the present invention;

[0027] Figure 4 It is a schematic diagram of the structure between the anode sheet body, the rotating sheet and the spacer in the present invention;

[0028] Figure 5 is a cross-sectional view of a coating station in the present invention;

[0029] Figure 6 It is a schematic diagram of the structure between the etching chamber, the second mounting groove and the rotating stirring shaft in the present invention;

[0030] Figure 7is a cross-sectional view of the etching chamber of the present invention;

[0031] Figure 8 It is a structural diagram of the drying table, the fixed plate and the fixed frame in the present invention;

[0032] Figure 9 It is a schematic diagram of the structure between the fan, the heating wire and the filter screen in the present invention;

[0033] Figure 10 It is a schematic diagram of the structure between the placement table and the fourth installation slot in the present invention;

[0034] Figure 11 It is a structural diagram of the hydraulic cylinder, electromagnet and adsorption sheet in the present invention.

[0035] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0036] 1. Bottom plate; 2. Rotating column; 3. Rotating belt; 4. Hydraulic cylinder; 5. Coating station; 6. Mounting plate; 7. Rotating plate; 8. First mounting slot; 9. Anode plate body; 10. Fixed frame; 11. Mounting station; 12. Drip head; 13. Spacer; 14. Push rod motor; 15. First mounting motor; 16. Block; 17. Inclined surface; 18. Etching chamber; 19. Second mounting slot; 20. Rotating stirring shaft; 21. Second mounting motor; 22. Drying station; 23. Third mounting slot; 24. Fixed plate; 25. Fixed frame; 26. Fan; 27. Heating wire; 28. Filter; 29. ​​Placement station; 30. Fourth mounting slot; 31. Fixed plate; 32. Electromagnet; 33. Adsorption plate; 34. Rotating rod. DETAILED DESCRIPTION

[0037] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following examples. It should be understood that the following text is only used to describe one or more specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0038] like Figures 1-11 As shown, an anode plate etching device includes a bottom plate 1, both ends of the top of the bottom plate 1 are rotatably connected to a rotating column 2, and a rotating belt 3 is driven on the outer side of the rotating column 2 and near the top. Figure 11, multiple hydraulic cylinders 4 are installed at the bottom of the rotating belt 3, and a driving motor is installed at the bottom of the bottom plate 1. The driving motor is used to control the rotation of one of the rotating columns 2, and through the rotation of the rotating column 2, the rotating belt 3 is driven to transmit, and the multiple hydraulic cylinders 4 are driven to move. The stroke rod of the hydraulic cylinder 4 is vertically downward and an adsorption component is installed. The adsorption component includes a fixed plate 31 fixed on the stroke rod of the hydraulic cylinder 4, an electromagnet 32 ​​is installed at the bottom of the fixed plate 31, and an adsorption plate 33 is fixed to the bottom of the electromagnet 32. The electromagnet 32 ​​can emit magnetism to adsorb the anode sheet body 9 or the subsequent mounting sheet 6 thereon, and then through the setting of the mounting sheet 6, the mounting sheet 6 is tightly attached to the adsorption sheet 33;

[0039] The top of the bottom plate 1 and the bottom of the hydraulic cylinder 4 are equipped with a coating area, an etching area, a drying area and a placement area. The coating area, the etching area, the drying area and the placement area are arranged counterclockwise around the rotating belt 3.

[0040] Refer to the attached Figure 3-Figure 5 The coating area includes a coating table 5 fixed to the top of the base plate 1, and a first mounting groove 8 is provided on the top of the coating table 5. A mounting piece 6 is placed in the first mounting groove 8, and a first magnetic block is installed in the mounting piece 6. The second magnetic block is installed in the first mounting groove 8, so that the mounting piece 6 is in the first mounting groove 8 and can be stably adsorbed in the first mounting groove 8. When the electromagnet 32 ​​adsorbs the mounting piece 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the first mounting groove 8 on the first magnetic block in the mounting piece 6. A groove body for placing a rotating piece 7 is provided on the coating table 5, and one side of the mounting piece 6 is rotatably connected to a rotating piece The moving piece 7, the top of the rotating piece 7 is pasted with an anode piece body 9, and the anode piece body 9 can be set on the rotating piece 7 by bonding, or can be adsorbed on the rotating piece 7 by magnetic attraction, or can be assembled on the rotating piece 7 by any other method so that the anode piece body 9 can be easily disassembled. A fixing frame 10 is fixed to one side of the coating station 5, and a mounting platform 11 is fixed to the top of the fixing frame 10 and at one end away from the coating station 5. A drip head 12 is installed at the bottom of the mounting platform 11, and an adjustable mechanism is assembled in the mounting platform 11. The mechanism is used to adjust the position of the drip head 12, which can be in the following manner:

[0041] A horizontal and vertical push rod motor 14 or a hydraulic cylinder 4 is assembled in the mounting platform 11 to push the dripping head 12 to adjust its position. The mechanism can also be assembled with other adjustments according to the user's own configuration. It only needs to be able to drive the dripping head 12 to move, which falls within the scope of protection of this application.

[0042] A first mounting motor 15 is fixed on the top of the coating station 5. The first mounting motor 15 is used to control the rotation of the rotating sheet 7 and the anode sheet body 9. Figure 5The output end of the first mounting motor 15 is vertically upward and is located on the top of the coating station 5. A clamping block 16 is fixed thereto. An inclined surface 17 is provided on the outside of the clamping block 16. After the electromagnet 32 ​​adsorbs the mounting piece 6 into the first mounting groove 8, a groove body is provided at the bottom of the rotating piece 7. The first mounting motor 15 can clamp the rotating piece 7 through the clamping block 16. The setting of the inclined surface 17 makes it easier for the clamping block 16 to enter the groove body on the rotating piece 7 without getting stuck. The clamping block 16 can move toward the groove body along the inclined surface 17.

[0043] When the photoresist is being dripped, the dripping head 12 can be controlled to drip glue, generally dripping a dozen drops, and then the first installation motor 15 is driven to drive the rotating piece 7 to rotate, and the rotating piece 7 drives the anode sheet body 9 to rotate, so that the photoresist evenly covers the surface of the anode sheet body 9. After the photoresist is dried and solidified, a mask layer can be formed;

[0044] Refer to the attached Figure 4 A push rod motor 14 is fixed to one side of the fixing frame 10 close to the mounting plate 6, and a spacer 13 is installed on the stroke rod of the push rod motor 14. The spacer 13 is a grid-like structure for partitioning the photoresist sprayed by the dropper head 12;

[0045] In the manufacture of the anode sheet body 9, different etching depths are usually required according to different application scenarios and functional requirements. For example, in the production of Micro OLED displays, in order to utilize the optically strong microcavity effect to improve the color gamut and resolution of the display and make the product meet high-end market standards, the areas corresponding to the red, green, and blue pixels on the anode sheet body 9 need to have different heights. This requires different etching depths to achieve different pixel heights.

[0046] Another example is the manufacture of anodic-bonded silicon capacitors. In order to prepare deep trenches with high aspect ratios on the silicon substrate to increase capacitance density, miniaturize and micro-manufacture the device, and ensure the accuracy of capacitance values ​​and product consistency, it is necessary to precisely control the etching depth. Different etching depths are required for capacitor areas of different specifications or functions.

[0047] Therefore, when it is necessary to drip photoresist on the anode sheet body 9, first start the push rod motor 14 so that the stroke rod of the push rod motor 14 drives the spacer 13 to move, and then the spacer 13 moves to align with the anode sheet body 9. At this time, the dripping head 12 drips glue, and controls the dripping head 12 to drip different amounts of photoresist on each grid on the spacer 13. The anode sheet body 9 is rotated, and the thickness of the photoresist in each grid on the spacer 13 is different. When it is etched in the etching chamber 18, the thinner photoresist area is etched first, and the thicker The etching of the area is slower, and areas of different depths can be etched out at this time. The grid on the spacer 13 can be changed according to the shape and size of the area to be etched. A plurality of different spacers 13 can also be set. When a batch of anode sheet bodies 9 needs to be etched, a spacer 13 can be replaced. An adsorption layer is provided at the bottom of the spacer 13 for adsorbing excess photoresist to avoid accumulation of photoresist around the side walls of the spacer 13 and the grid of the spacer 13. The adsorption layer can be a sponge or any other material that can be adsorbed.

[0048] After the coating area is finished, the rotating belt 3 rotates and drives the hydraulic cylinder 4 to rotate. The electromagnet 32 ​​provided on the hydraulic cylinder 4 adsorbs the mounting plate 6 onto the adsorption plate 33, and the hydraulic cylinder 4 drives the mounting plate 6 and other components to move to the next etching area.

[0049] Refer to the attached Figure 6-Figure 7 The etching area includes an etching chamber 18 fixed to the top of the bottom plate 1. The top of the etching chamber 18 is provided with a second mounting groove 19 corresponding to the mounting piece 6. The hydraulic cylinder 4 places the mounting piece 6 at the position of the second mounting groove 19 on the etching chamber 18. The etching chamber 18 is provided with an etching liquid. First, the etching liquid contacts the photoresist and gradually dissolves the photoresist, and then etches the anode sheet body 9 to achieve the purpose of etching;

[0050] Refer to the attached Figure 7 , the interior of the etching chamber 18 is rotatably connected with at least one rotating rod 34, the top of the second mounting groove 19 is fixed with a rotating stirring shaft 20, the rotating rod 34 and the rotating stirring shaft 20 are inclined at 45 degrees, and a second mounting motor 21 is installed at the bottom of the etching chamber 18, and the second mounting motor 21 is installed in the etching chamber 18. A second magnetic block is also provided in the second mounting groove 19, so that the mounting piece 6 can be stably adsorbed in the second mounting groove 19 in the second mounting groove 19, and when the electromagnet 32 ​​adsorbs the mounting piece 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the second mounting groove 19 on the first magnetic block in the mounting piece 6;

[0051] When the second mounting motor 21 is driven, the rotating rod 34 can be driven to rotate, and the rotating stirring shaft 20 can be driven to rotate, thereby stirring the etching liquid by rotating the stirring shaft 20. By tilting the rotating stirring shaft 20, the etching liquid can generate both horizontal and vertical flows during the stirring process, avoiding the occurrence of flow dead corners, thereby enabling the etching liquid to have a better etching effect on the anode sheet body 9 and avoiding the occurrence of etching dead corners;

[0052] After etching is completed, the rotating belt 3 rotates, and drives the hydraulic cylinder 4 to rotate and move the mounting plate 6 and the mounting plate thereon to the next drying area;

[0053] Refer to the attached Figure 8-Figure 9 The drying area includes a drying table 22 fixed to the top of the bottom plate 1, and a third mounting groove 23 corresponding to the mounting piece 6 is provided on the top of the drying table 22. The mounting piece 6 is placed in the position of the third mounting groove 23 through the hydraulic cylinder 4. A second magnetic block is also provided in the third mounting groove 23 for adsorbing the mounting piece 6. The operator can directly take the mounting piece 6 to separate the mounting piece 6 from the third mounting groove 23, and a groove body corresponding to the rotating piece 7 is provided on the drying table 22. A fixing plate 24 is fixed to one side of the drying table 22, and a drying component is rotatably connected to the fixing plate 24. The anode sheet body 9 is dried by the drying component to achieve the purpose of drying the anode sheet body 9. The drying component is interference fit with the fixing plate 24. Through this arrangement, the user can rotate the drying component as needed, thereby causing the drying component to change its own drying angle;

[0054] Refer to the attached Figure 9 The drying assembly includes a fixed frame 25 rotatably connected to the fixed plate 24, a fan 26 is installed inside the fixed frame 25, a filter 28 is installed on one side of the fixed frame 25, and a heating wire 27 is installed inside the fixed frame 25 and between the fan 26 and the filter 28;

[0055] When drying the anode sheet body 9, the heating wire 27 can be driven first so that the heating wire 27 heats the surrounding air, and the fan 26 can be driven so that the fan 26 can absorb the heated air and blow it to the anode sheet body 9, so that the anode sheet body 9 can be dried quickly. Through the setting of the filter 28, the filter 28 can filter the air. The filter 28 can be detachably mounted on the fixed frame 25, so that the filter 28 is easy to clean.

[0056] After drying is completed, the operator removes the anode sheet body 9 and proceeds to the next subsequent work, and places the mounting sheet 6 and the rotating sheet 7 in the placement area;

[0057] Refer to the attached Figure 10The placement area includes a placement platform 29 fixed to the top of the base plate 1. Furthermore, a fourth mounting groove 30 corresponding to the mounting piece 6 is provided on the top of the placement platform 29. Through the setting of the fourth mounting groove 30, the fourth mounting groove 30 can place the mounting piece 6 and the rotating piece 7. A second magnetic block is also provided in the fourth mounting groove 30, so that the mounting piece 6 can be stably adsorbed in the fourth mounting groove 30, and when the electromagnet 32 ​​adsorbs the mounting piece 6, the adsorption force of the electromagnet 32 ​​is greater than the adsorption force of the second magnetic block in the fourth mounting groove 30 on the first magnetic block in the mounting piece 6. A groove body for placing the rotating piece 7 is provided on the placement platform 29.

[0058] The foregoing is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained herein shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. An anode plate etching device, comprising a bottom plate (1), characterized in that: Both ends of the top of the bottom plate (1) are rotatably connected to a rotating column (2), a rotating belt (3) is driven on the outside of the rotating column (2) and near the top, and a plurality of hydraulic cylinders (4) are installed at the bottom of the rotating belt (3), and the travel rods of the hydraulic cylinders (4) are vertically downward and are installed with adsorption components; A coating area, an etching area, a drying area, and a placement area are installed on the top of the bottom plate (1) and at the bottom of the hydraulic cylinder (4), and the coating area, etching area, drying area, and placement area are arranged counterclockwise around the rotating belt (3); The coating area includes a coating table (5) fixed on the top of the base plate (1), a first mounting groove (8) is provided on the top of the coating table (5), a mounting plate (6) is placed in the first mounting groove (8), one side of the mounting plate (6) is rotatably connected to a rotating plate (7), the top of the rotating plate (7) is pasted with an anode plate body (9), a fixing frame (10) is fixed on one side of the coating table (5), a mounting table (11) is fixed on the top of the fixing frame (10) and at one end away from the coating table (5), a drip head (12) is installed on the bottom of the mounting table (11), and a first mounting motor (15) is fixed on the top of the coating table (5), and the first mounting motor (15) is used to control the rotation of the rotating plate (7) and the anode plate body (9); The etching area includes an etching chamber (18) fixed to the top of the base plate (1), and a second mounting groove (19) corresponding to the mounting plate (6) is provided on the top of the etching chamber (18); The drying area includes a drying table (22) fixed to the top of the bottom plate (1), a third mounting groove (23) corresponding to the mounting plate (6) is provided on the top of the drying table (22), a fixing plate (24) is fixed to one side of the drying table (22), a drying component is rotatably connected in the fixing plate (24), and the drying component is interference-fitted with the fixing plate (24); The placement area includes a placement table (29) fixed on the top of the bottom plate (1); A push rod motor (14) is fixed to one side of the fixing frame (10) close to the mounting plate (6), and a spacer (13) is installed on the travel rod of the push rod motor (14). The spacer (13) is a grid-like structure and is used to partition the photoresist sprayed by the dropper head (12).

2. The anode plate etching device according to claim 1, characterized in that: The output end of the first mounting motor (15) is vertically upward and is located on the top of the coating station (5), and a clamping block (16) is fixed thereto. An inclined surface (17) is provided on the outer side of the clamping block (16).

3. The anode plate etching device according to claim 1, characterized in that: The etching chamber (18) is internally rotatably connected to at least one rotating rod (34), a rotating stirring shaft (20) is fixed to the top of the second mounting groove (19), the rotating rod (34) and the rotating stirring shaft (20) are arranged at an angle of 45 degrees, and a second mounting motor (21) is installed at the bottom of the etching chamber (18), and the second mounting motor (21) is installed in the etching chamber (18).

4. The anode plate etching device according to claim 1, characterized in that: The drying assembly includes a fixed frame (25) rotatably connected to the fixed plate (24), a fan (26) is installed inside the fixed frame (25), a filter (28) is installed on one side of the fixed frame (25), and a heating wire (27) is installed inside the fixed frame (25) and between the fan (26) and the filter (28).

5. The anode plate etching device according to claim 1, characterized in that: A fourth mounting groove (30) corresponding to the mounting piece (6) is provided on the top of the placement platform (29).

6. The anode plate etching device according to claim 5, characterized in that: The adsorption assembly comprises a fixing plate (31) fixed on the stroke rod of the hydraulic cylinder (4), an electromagnet (32) is installed at the bottom of the fixing plate (31), and an adsorption plate (33) is fixed at the bottom of the electromagnet (32).

7. The anode plate etching device according to claim 6, characterized in that: A first magnetic block is fixed inside the mounting plate (6), and second magnetic blocks are fixed in the first mounting slot (8), the second mounting slot (19), the third mounting slot (23), and the fourth mounting slot (30). The first magnetic block, the electromagnet (32), and the second magnetic block are all attracted to each other.

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