Coaxial online observing and blowing device suitable for laser processing machine tool

By designing coaxial online observation and blowing devices on laser processing machine tools, the accuracy and quality problems caused by optical errors and machine tool errors are solved, real-time observation and adjustment of the laser beam focus point is achieved, processing accuracy and quality is improved, and debris discharge efficiency is improved through blowing components.

CN120002175AActive Publication Date: 2025-05-16BEIJING ELECTRIC PROCESSING RES INST CO LTD
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Patent Information

Application Number
CN202510271506.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-08
Publication Date
2025-05-16
Estimated Expiration
2045-03-08

AI Technical Summary

Technical Problem

The existing laser processing machine tools have reduced machining accuracy and quality due to optical errors and machine tool errors.

Method used

A coaxial online observation and blowing device suitable for laser processing machine tools is designed, including an online observation component, a dichroic mirror component, a galvanometer component and a light transmission component. The galvanometer component is coaxially shot into the galvanometer component through the illumination light source and the laser beam to realize real-time observation of the processing focus point of the laser beam on the workpiece, and improve the debris discharge efficiency through the blowing component.

Benefits of technology

By observing and adjusting the focus point of the laser beam in real time, the processing accuracy and quality of the laser processing machine tool can be improved; at the same time, the debris discharge efficiency is improved through coaxial blowing design and processing efficiency is improved.

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Abstract

The invention discloses a coaxial online observing and blowing device suitable for a laser processing machine tool, and relates to the field of laser processing equipment. The coaxial online observation and blowing device suitable for the laser processing machine tool comprises an online observation assembly, and an illumination light source is arranged on the online observation assembly so as to realize real-time observation of a laser beam focus point; the dichroscope assembly is arranged at the bottom of the online observation assembly, a galvanometer assembly is arranged on the side face of the dichroscope assembly, and the side, away from the galvanometer assembly, of the dichroscope assembly is used for being connected with a machine tool laser beam outlet so that the laser beam and the illumination light can coaxially enter the galvanometer assembly; and the light transmission assembly is arranged on the galvanometer assembly so that the laser beam and the illumination light can irradiate the machined workpiece. According to the invention, the processing focus point of the laser beam on the workpiece can be observed in real time, and if deviation occurs or the ablation radius exceeds a threshold value, timely adjustment can be carried out, so that the processing precision and the processing quality of the laser processing machine tool are improved.
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Description

Technical Field

[0001] The present invention relates to the field of laser processing equipment, and in particular to a coaxial online observation and blowing device suitable for laser processing machine tools. Background Art

[0002] Laser processing machine tools are special processing machines that use laser beams to process materials. They use high-intensity laser beams to cut, punch, weld, and perform other operations on materials with high precision and high efficiency.

[0003] Currently, laser processing machines have optical errors during the workpiece processing process. If the quality of the optical path components is poor, such as scratches on the optical lens or poor reflective effect of the reflector, the laser beam will be deflected or the processing focus on the workpiece will be poor, thus affecting the laser processing quality. At the same time, there are machine tool errors. If the mechanical parts of the machine tool become loose or unbalanced after long-term operation, the horizontal movement of the machine tool will cause the laser beam to focus poorly on the workpiece, resulting in errors in laser processing. Therefore, the existing laser processing machine tools have reduced the processing accuracy and processing quality of the laser processing machine tools due to optical errors and machine tool errors. Summary of the Invention In view of the defects existing in the prior art, the technical problem solved by the present invention is: how to improve the processing accuracy and processing quality of laser processing machine tools.

[0004] To achieve the above objectives, the present invention provides a coaxial online observation and air blowing device suitable for laser processing machine tools, comprising: An online observation component is provided with an illumination light source to realize real-time observation of the laser beam focus point; A dichroic mirror assembly is provided at the bottom of the online observation assembly, and a galvanometer assembly is provided on its side. The side of the dichroic mirror assembly away from the galvanometer assembly is used to connect to the laser beam outlet of the machine tool to achieve coaxial injection of the laser beam and the illumination light into the galvanometer assembly; The optical transmission component is arranged on the galvanometer component to enable the laser beam and the illumination light to be irradiated onto the workpiece.

[0005] By adopting the above technical solution, the illumination light source is reflected to the galvanometer assembly through the dichroic mirror assembly, the laser beam is transmitted to the galvanometer assembly through the dichroic mirror assembly, and the laser beam and the illumination light are coaxial. After being reflected by the reflector in the galvanometer assembly, the laser beam is emitted from the optical transmission assembly to the processing workpiece. The reflected light of the processing workpiece passes through the optical transmission assembly, the galvanometer assembly, the dichroic mirror assembly, and finally forms an image in the online observation assembly. The processing focus point of the laser beam on the workpiece can be observed in real time. If deviation occurs or the ablation radius exceeds the threshold, timely adjustment can be made, thereby improving the processing accuracy and processing quality of the laser processing machine tool.

[0006] In one embodiment, the online observation assembly includes a zoom lens and a CCD camera from bottom to top. The zoom lens is provided with a zoom knob, a magnification knob and a light adjustment knob. The zoom lens is detachably connected to the dichroic mirror assembly.

[0007] By adopting the above technical solution, the imaging can be made clearer, and the processing focus of the laser beam on the workpiece and the workpiece morphology during laser processing can be displayed in the computer software.

[0008] In one embodiment, a combined cube frame is provided between the zoom lens and the dichroic mirror assembly, an illumination light source is provided on the side of the combined cube frame, and a beam splitter is provided inside the combined cube frame to reflect the illumination light into the dichroic mirror assembly.

[0009] By adopting the above technical solution, it is easy to provide a good lighting source so that the lighting light is coaxial with the laser beam when irradiating the workpiece; at the same time, this design will not affect the returned light imaging.

[0010] In one embodiment, a coaxial mirror frame is arranged between the combined cube frame and the dichroic mirror assembly, a filter is arranged inside the coaxial mirror frame, and the coaxial mirror frame is arranged on the top of the dichroic mirror assembly through a coaxial bracket to ensure that the illumination light passing through the coaxial mirror frame is perpendicular to the illumination light reflected by the dichroic mirror assembly.

[0011] By adopting the above technical solution, unnecessary spectral components in the illumination light are filtered out, and only light of specific wavelengths is allowed to pass through, thereby improving the imaging effect.

[0012] In one embodiment, the dichroic mirror assembly includes a mirror frame housing, a mirror frame cover, a 45° mirror frame and a dichroic mirror, the mirror frame cover is arranged on the top of the mirror frame housing, and the mirror frame cover is detachably connected to the bottom of the online observation assembly; the 45° mirror frame is fixed to the inside of the mirror frame housing by a fixing member, and the dichroic mirror is arranged on the 45° mirror frame; a galvanometer mirror assembly is provided on one side of the mirror frame housing through a first connecting plate, and a side of the mirror frame housing away from the galvanometer mirror is used to connect to the laser beam outlet of the machine tool through a second connecting plate, and holes are provided on the mirror frame housing, the first connecting plate and the second connecting plate to enable the laser beam and illumination light to enter the galvanometer mirror assembly.

[0013] By adopting the above technical solution, the illumination light can be reflected to the galvanometer assembly through the dichroic mirror, and the laser beam can be transmitted to the galvanometer assembly through the dichroic mirror, while the illumination light and the laser beam are made coaxial.

[0014] In one embodiment, the optical transmission assembly includes an adapter tube, an adapter ring, and a field lens. The adapter tube is threadedly connected to the bottom of the galvanometer assembly, and the field lens is detachably connected to the adapter tube via the adapter ring.

[0015] By adopting the above technical solution, field lenses with different focal lengths can be replaced to meet more laser processing needs, thereby improving the applicability of the coaxial online observation and blowing device.

[0016] In one embodiment, a blowing assembly is provided at the bottom of the adapter cylinder via an adapter ring.

[0017] By adopting the above technical solution, the adapter ring is not only connected to the field lens, but also can be connected to the blowing component to meet the blowing needs of the workpiece during laser processing.

[0018] In one embodiment, the blowing assembly includes a blow cylinder, a blow nozzle and an air pipe joint. The blow cylinder is arranged at the bottom of the adapter cylinder through an adapter ring, and the blow cylinder is sleeved on the periphery of the field lens. The blow nozzle is arranged at the bottom of the blow cylinder, and the air pipe joint is arranged on the blow cylinder to ensure that the gas, laser beam and illumination light all reach the processed workpiece.

[0019] By adopting the above technical solution, gas, laser beam and illumination light are emitted from the air blowing nozzle together, while preventing external light from affecting the laser beam and illumination light.

[0020] In one embodiment, a guide assembly is provided between the blowing tube and the blowing nozzle, and the guide assembly includes a guide plate and a guide cover. The guide cover is provided on the top of the guide plate, and the air pipe joint is connected to the guide groove provided on the guide plate. A light-transmitting hole is provided at the center of the guide plate and the guide cover to enable the laser beam and the illumination light to pass through the guide plate and the guide cover, and the laser beam, the illumination light and the blowing direction are coaxial.

[0021] By adopting the above technical solution, the laser beam, illumination light and blowing direction are made coaxial, which improves the timeliness of the blowing component in discharging the debris generated after laser ablation, thereby improving the efficiency of further downward ablation of the laser, thereby improving the processing efficiency of the laser processing machine tool.

[0022] In one embodiment, a conical chamber is provided inside the blowing nozzle, and the inner wall of the conical chamber is parallel to the diversion direction of the diversion groove.

[0023] By adopting the above technical solution, the effect of the blowing component in discharging debris is further enhanced.

[0024] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The illumination light source is reflected by the dichroic mirror assembly to the galvanometer assembly. The laser beam is transmitted to the galvanometer assembly through the dichroic mirror assembly. The laser beam and the illumination light are coaxial. After being reflected by the reflector in the galvanometer assembly, the laser beam is emitted from the optical transmission assembly to the workpiece. The reflected light of the workpiece passes through the optical transmission assembly, the galvanometer assembly, and the dichroic mirror assembly, and finally forms an image in the online observation assembly. The processing focus point of the laser beam on the workpiece can be observed in real time. If there is a deviation or the ablation radius exceeds the threshold, timely adjustments can be made, thereby improving the processing accuracy and processing quality of the laser processing machine tool; 2. While observing the focus of the laser beam on the workpiece in real time, the online observation component can be used to observe the dynamic changes of the workpiece in real time and make corresponding changes to the processing parameters to improve the processing quality of the laser processing machine tool; 3. Through the design of the air blowing component, the laser beam, illumination light and blowing direction are made coaxial, which improves the timeliness of the air blowing component in discharging the debris generated after laser ablation, thereby increasing the efficiency of further downward ablation of the laser, thereby improving the processing efficiency of the laser processing machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Schematic diagram of the structure of a coaxial online observation and air blowing device applicable to a laser processing machine tool according to an embodiment of the present invention; Figure 2 for Figure 1 Front view of Figure 3 for Figure 2 A partial perspective view of Figure 4 Schematic diagram of the structure of the guide plate according to an embodiment of the present invention.

[0026] In the figure: 1-online observation component, 101-CCD camera, 102-zoom lens, 2-dichroic mirror assembly, 201-mirror frame cover, 202-mirror frame housing, 203-first connecting plate, 204-second connecting plate, 205-45° mirror frame, 206-dichroic mirror, 207-fixing part, 3-galvanometer mirror assembly, 4-light transmission component, 5-illumination light source, 6-combined cubic frame, 7-coaxial mirror frame, 8-air cylinder, 9-air nozzle, 10-trachea joint, 11-guide cover, 12-guide plate, 13-conical chamber, 14-guide groove, 15-guide hole, 16-light transmission hole. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

[0028] The coaxial online observation and blowing device suitable for laser processing machine tools in the embodiment of the present invention is shown in FIG. Figure 1 、 2As shown, a coaxial online observation and air blowing device suitable for a laser processing machine tool includes an online observation component 1, on which an illumination light source 5 is provided to realize real-time observation of the focal point of the laser beam; a dichroic mirror component 2 is provided at the bottom of the online observation component 1, and a galvanometer component 3 is provided on the side of the dichroic mirror component 2, and the side of the dichroic mirror component 2 away from the galvanometer component 3 is used to connect to the laser beam outlet of the machine tool, and the illumination light is reflected to the galvanometer component 3 through the dichroic mirror 206 in the dichroic mirror component 2, and the laser beam is transmitted to the galvanometer component 3 through the dichroic mirror 206 in the dichroic mirror component 2, so that the laser beam and the illumination light are coaxially emitted into the galvanometer component 3; an optical transmission component 4 is provided on the galvanometer component 3, and the laser beam and the illumination light are emitted into the optical transmission component 4 through the reflector in the galvanometer component 3, and are emitted from the optical transmission component 4 to the workpiece to be processed.

[0029] As can be seen, the present invention arranges the online observation assembly 1 on top of the dichroic mirror assembly 2. The illumination light (limiting the wavelength of the light) emitted by the illumination light source 5 is reflected by the dichroic mirror 206 in the dichroic mirror assembly 2 to the galvanometer mirror assembly 3. The machine tool laser beam outlet is arranged on the side of the dichroic mirror assembly 2. The laser beam (limiting the wavelength of the light) is transmitted by the dichroic mirror 206 in the dichroic mirror assembly 2 to the galvanometer mirror assembly 3. The laser beam and the illumination light are coaxial. After being reflected by the reflector in the galvanometer mirror assembly 3, the laser beam is emitted from the optical transmission assembly 4 to the workpiece to be processed. The reflected light of the workpiece then passes through the path of the illumination light, that is, the emission assembly, the galvanometer mirror assembly 3, and the dichroic mirror assembly 2, and is finally imaged by the online observation assembly 1. The processing focus point of the laser beam on the workpiece can be observed in real time. If deviation occurs or the ablation radius (related to the laser beam power, workpiece material, etc.) exceeds a threshold, timely adjustments can be made to prevent the workpiece from being processed by the laser beam with deviation, thereby improving the processing accuracy and processing quality of the laser processing machine tool.

[0030] Preferably, a specific structure of an online observation component 1 is provided: The online observation assembly 1 includes a zoom lens 102 and a CCD camera 101 from bottom to top. The zoom lens 102 is provided with a zoom knob, a magnification knob and a light transmission adjustment knob. The zoom lens 102 is detachably connected to the dichroic mirror assembly 2.

[0031] Specifically, the reflected light of the workpiece is incident on the zoom lens 102 through the optical transmission component 4, the galvanometer component 3, and the dichroic mirror component 2. By adjusting the zoom knob, the magnification knob, and the light transmission adjustment knob of the zoom lens 102, the reflected light can be collected by the CCD camera 101. The CCD camera 101 presents the collected signal in the form of an image on the computer software, thereby observing the processing focus of the laser beam on the workpiece and the workpiece morphology during laser processing in real time.

[0032] Furthermore, a combined cubic frame 6 is provided between the zoom lens 102 and the dichroic mirror assembly 2 , an illumination light source 5 is provided on the side of the combined cubic frame 6 , and a beam splitter is provided inside the combined cubic frame 6 to reflect the illumination light into the dichroic mirror assembly 2 .

[0033] Specifically, the illumination light emitted by the illumination light source 5 is incident on the interior of the combined cubic frame 6. By adjusting the tilt angle of the beam splitter inside the combined cubic frame 6, the illumination light of a preset wavelength is reflected downward, thereby entering the interior of the dichroic mirror assembly 2. Therefore, it is convenient to control the wavelength of the illumination light and the angle of incidence of the dichroic mirror assembly 2 so that the illumination light is coaxial with the laser beam; at the same time, the setting of the illumination light source 5 will not block the reflected light of the processed workpiece from imaging on the online observation assembly 1, and the reflected light will be transmitted to the online observation assembly 1 through the beam splitter.

[0034] Furthermore, a coaxial mirror frame 7 is arranged between the combined cubic frame 6 and the dichroic mirror assembly 2, and a filter is arranged inside the coaxial mirror frame 7. The coaxial mirror frame 7 is set on the top of the dichroic mirror assembly 2 through a coaxial bracket to ensure that the illumination light passing through the coaxial mirror frame 7 is perpendicular to the illumination light reflected by the dichroic mirror assembly 2.

[0035] Specifically, after being reflected by the beam splitter inside the combined cube frame 6, it is further filtered by the filter inside the coaxial mirror frame 7, so as to more accurately control the wavelength of the illumination light; at the same time, the coaxial mirror frame 7 is set on the top of the dichroic mirror assembly 2 through a coaxial bracket to ensure that the illumination light is coaxial with the laser beam after being reflected by the dichroic mirror 206.

[0036] Preferably, a specific structure of a dichroic mirror assembly 2 is provided: The dichroic mirror assembly 2 includes a mirror frame housing 202, a mirror frame cover 201, a 45° mirror frame 205 and a dichroic mirror 206. The mirror frame cover 201 is arranged on the top of the mirror frame housing 202, and the mirror frame cover 201 is detachably connected to the bottom of the online observation assembly 1; the 45° mirror frame 205 is fixed to the inside of the mirror frame housing 202 by a fixing member 207, and the dichroic mirror 206 is arranged on the 45° mirror frame 205; a galvanometer mirror assembly 3 is provided on one side of the mirror frame housing 202 through a first connecting plate 203, and a side of the mirror frame housing 202 away from the galvanometer is used to connect to the laser beam outlet of the machine tool through a second connecting plate 204. Holes are provided on the mirror frame housing 202, the first connecting plate 203 and the second connecting plate 204 to enable the laser beam and illumination light to enter the galvanometer mirror assembly 3.

[0037] Specifically, a frame cover 201 is provided on the top of the frame housing 202, and a 45° frame 205 is placed inside the frame housing 202, and a dichroic mirror 206 is fixed on the 45° frame 205 so that the clamping angle between the dichroic mirror 206 and the bottom surface of the frame housing 202 is 45°, and external light is prevented from passing through the dichroic mirror 206, thereby affecting the normal operation of the coaxial online observation and blowing device; the 45° frame 205 is fixed to the frame housing 202 by a fixing member 207, so as to prevent the movement of the machine tool during the laser processing process from causing the 45° frame 205 to deviate, thereby reducing the quality of the workpiece processing; one side of the frame housing 202 is fixed by a bolt The assembly is fixed with a first connecting plate 203, and the mirror frame housing 202 is connected to the galvanometer assembly 3 through the first connecting plate 203. A second connecting plate 204 is fixed to the side of the mirror frame housing 202 away from the galvanometer through a bolt assembly, and the mirror frame housing 202 is connected to the laser beam outlet of the machine tool through the second connecting plate 204. The laser beam emitted from the laser beam outlet of the machine tool is emitted into the interior of the mirror frame housing 202 through the hole on the second connecting plate 204, transmitted through the dichroic mirror 206, and then emitted into the galvanometer assembly 3 through the hole on the first connecting plate 203. At the same time, the illumination light is reflected by the dichroic mirror 206 and emitted into the galvanometer assembly 3 through the hole on the first connecting plate 203, so as to achieve coaxiality between the illumination light and the laser beam.

[0038] Preferably, a specific structure of an optical transmission component 4 is provided: The optical transmission assembly 4 includes an adapter tube 401 , an adapter ring 402 and a field lens 403 . The adapter tube 401 is threadedly connected to the bottom of the galvanometer assembly 3 , and the field lens 403 is detachably connected to the adapter tube 401 via the adapter ring 402 .

[0039] Specifically, an adapter tube 401 is provided at the bottom of the galvanometer assembly 3, and the adapter tube 401 is threadedly connected to the galvanometer assembly 3 for easy installation and disassembly. According to different laser processing requirements, a field lens 403 with a suitable focal length is selected and installed on the adapter tube 401 through an adapter ring 402, thereby improving the applicability of the coaxial online observation and blowing device.

[0040] Furthermore, a blowing assembly is provided at the bottom of the adapter tube 401 through the adapter ring 402 .

[0041] Specifically, adapter ring 402 is connected not only to field lens 403 but also to an air blowing assembly. Specifically, the connection between adapter ring 402 and field lens 403 forms a first circular ring, and the connection between adapter ring 402 and the air blowing assembly forms a second circular ring. The first and second circular rings are concentric, but the diameter of the first circular ring is smaller than the diameter of the second circular ring, and there must be no spatial conflict between field lens 403 and the air blowing assembly. Therefore, adapter ring 402 is not only connected to field lens 403 but also to the air blowing assembly to meet the air blowing requirements of workpieces during laser processing.

[0042] Preferably, a specific structure of a blowing assembly is provided: The air blowing assembly includes an air blow cylinder 8, an air blow nozzle 9 and an air pipe joint 10. The air blow cylinder 8 is arranged at the bottom of the adapter cylinder 401 through the adapter ring 402, and the air blow cylinder 8 is sleeved on the periphery of the field lens 403. The air blow nozzle 9 is arranged at the bottom of the air blow cylinder 8, and the air pipe joint 10 is arranged on the air blow cylinder 8 to ensure that the gas, laser beam and illumination light all reach the processed workpiece.

[0043] Specifically, the top of the blow tube 8 is connected to the bottom of the adapter tube 401 through the adapter ring 402, and the field lens 403 is located inside the blow tube 8 to avoid spatial conflict between the field lens 403 and the blowing assembly. A blow nozzle 9 is installed at the bottom of the blow tube 8, and several air pipe joints 10 are connected to the blow tube 8 to blow air into the blow tube 8 and blow it out from the blow nozzle 9. At the same time, the laser beam and illumination light focused by the field lens 403 can also be emitted through the outlet of the blow nozzle 9, so that the gas, laser beam and illumination light can all reach the workpiece, and external light is avoided from affecting the laser beam and illumination light.

[0044] Furthermore, a guide assembly is provided between the blow tube 8 and the blow nozzle 9, and the guide assembly includes a guide plate 12 and a guide cover 11. The guide cover 11 is provided on the top of the guide plate 12, and the air pipe joint 10 is connected to the guide groove 14 opened on the guide plate 12. A light-transmitting hole 16 is provided at the center of the guide plate 12 and the guide cover 11 to enable the laser beam and the illumination light to pass through the guide plate 12 and the guide cover 11, and the laser beam, the illumination light and the blowing direction are coaxial.

[0045] Specifically, the guide assembly is a device with a guide plate 12 at the bottom and a guide cover plate 11 at the top, and several layers of guide grooves 14 are opened on the guide plate 12. If the guide grooves 14 are multi-layered, guide holes 15 are opened between adjacent layers. The outermost guide grooves 14 are connected to the air pipe joint 10 to allow the gas to directly enter the guide grooves 14. The gas blown into the guide grooves 14 flows along the trajectory of the guide grooves 14 and is blown downward along the inner wall of the guide grooves 14 (the top of the guide grooves 14 is sealed by the guide cover plate 11). A light-transmitting hole 16 is opened at the center of the guide plate 12 and the guide cover plate 11. The light-transmitting hole 16 cannot be connected to the guide groove 14 to avoid blowing air out from the light-transmitting hole 16, so that the laser beam, illumination light and blowing direction are coaxial, thereby improving the timeliness of the blowing assembly in discharging debris generated after laser ablation, thereby further improving the efficiency of the laser ablation downward, thereby improving the processing efficiency of the laser processing machine.

[0046] Furthermore, a conical chamber 13 is provided inside the blowing nozzle 9 , and the inner wall of the conical chamber 13 is parallel to the diversion direction of the diversion groove 14 .

[0047] Specifically, the gas after being guided by the guide groove 14 is blown into the blowing nozzle 9. In order to further enhance the effect of the blowing component in discharging debris, a conical chamber 13 is provided inside the blowing nozzle 9. The conical chamber 13 has a structure that is wide at the upper part and narrow at the lower part. At the same time, the inner wall of the conical chamber 13 is parallel to the guide direction of the guide groove 14, which reduces the wind resistance and makes the gas blown out from the air outlet of the blowing nozzle 9 more concentrated.

[0048] The working process of the coaxial online observation and blowing device applicable to the laser processing machine tool in the embodiment of the present invention is shown in the figure, which specifically includes: A coaxial online observation and air blowing device was installed on the beam output port of a laser processing machine. The laser light source was turned on, and the emitted 1064nm laser light entered the interior of the mirror frame housing 202 through the hole in the second connecting plate 204, passed through the dichroic mirror 206 (cutoff wavelength 980nm) installed on the 45° mirror frame 205, and entered the galvanometer assembly 3 through the hole in the first connecting plate 203. It was reflected by the two reflectors in the galvanometer assembly 3 and propagated vertically downward. It was focused by the field lens 403 with a focal length of 160mm, passed through the guide cover 11 and the guide plate 12, and finally irradiated the workpiece surface from the circular outlet at the lower end of the air blowing nozzle 9, ablating the workpiece in the laser focus area. During the laser ablation process of a workpiece, the external air pipe connects the air pipe joints 10 on both sides of the air blow tube 8 to send the air flow into the guide plate 12. The air flow passes through the guide grooves 14 and the guide holes 15 in the guide plate 12 and enters the conical chamber 13 of the air blow nozzle 9. Finally, the air is blown vertically to the laser ablation area through the circular outlet at the lower end of the air blow nozzle 9. During laser processing and air blowing, the illumination light source 5 emits white illumination light, which propagates vertically downward through the beam splitter (wavelength 400-700nm) in the combined cubic frame 6. After passing through the filter (wavelength 400-740nm) inside the coaxial mirror frame 7, it is reflected by the dichroic mirror 206 in the 45° mirror frame 205, passes through the hole on the first connecting plate 203, enters the galvanometer assembly 3, and is reflected by the two reflectors in the galvanometer assembly 3 and propagates vertically downward. It is then focused by the field lens 403 with a focal length of 160mm, passes through the guide cover 11 and the guide plate 12, and irradiates the workpiece surface through the circular outlet at the lower end of the air blowing nozzle 9. After being reflected by the workpiece, the illumination light returns along the original path of the above steps, passes directly through the beam splitter in the combined cubic frame 6, and enters the zoom lens 102. It is finally captured by the CCD camera 101, and the workpiece morphology during laser processing and the processing focus point of the laser beam on the workpiece are displayed in the computer software.

[0049] The foregoing is merely a list of specific embodiments of the present application, intended to enable those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the broadest scope consistent with the principles and novel features of the present application.

Claims

1. A coaxial online observation and blowing device suitable for laser processing machine tools, characterized in that: It includes: An online observation component (1), wherein an illumination light source (5) is provided on the online observation component (1) to achieve real-time observation of the focal point of the laser beam; A dichroic mirror assembly (2) is arranged at the bottom of the online observation assembly (1), and a galvanometer assembly (3) is arranged on the side thereof; a side of the dichroic mirror assembly (2) away from the galvanometer assembly (3) is used to connect to the laser beam outlet of the machine tool, so as to achieve the coaxial injection of the laser beam and the illumination light into the galvanometer assembly (3); The optical transmission component (4) is arranged on the galvanometer component (3) to enable the laser beam and the illumination light to be irradiated onto the workpiece to be processed.

2. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 1, characterized in that: The online observation assembly (1) comprises, from bottom to top, a zoom lens (102) and a CCD camera (101); the zoom lens (102) is provided with a zoom knob, a magnification knob and a light transmission adjustment knob; the zoom lens (102) is detachably connected to the dichroic mirror assembly (2).

3. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 2, characterized in that: A combined cubic frame (6) is arranged between the zoom lens (102) and the dichroic mirror assembly (2), an illumination light source (5) is arranged on the side of the combined cubic frame (6), and a beam splitter is arranged inside the combined cubic frame (6) to achieve reflection of the illumination light into the interior of the dichroic mirror assembly (2).

4. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 3, characterized in that: A coaxial mirror frame (7) is arranged between the combined cubic frame (6) and the dichroic mirror assembly (2), a filter is arranged inside the coaxial mirror frame (7), and the coaxial mirror frame (7) is arranged on the top of the dichroic mirror assembly (2) via a coaxial bracket, so that the illumination light passing through the coaxial mirror frame (7) is perpendicular to the illumination light reflected by the dichroic mirror assembly (2).

5. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 1, characterized in that: The dichroic mirror assembly (2) comprises a mirror frame housing (202), a mirror frame cover (201), a 45° mirror frame (205) and a dichroic mirror (206); the mirror frame cover (201) is arranged on the top of the mirror frame housing (202), and the mirror frame cover (201) is detachably connected to the bottom of the online observation assembly (1); the 45° mirror frame (205) is fixed to the inside of the mirror frame housing (202) by a fixing member (207); and the dichroic mirror (206) is fixed to the inside of the mirror frame housing (202) by a fixing member (207). 6) is arranged on a 45° mirror frame (205); a galvanometer assembly (3) is arranged on one side of the mirror frame housing (202) via a first connecting plate (203); a side of the mirror frame housing (202) away from the galvanometer is used to connect to a machine tool laser beam outlet via a second connecting plate (204); holes are provided on the mirror frame housing (202), the first connecting plate (203) and the second connecting plate (204) to enable the laser beam and illumination light to enter the galvanometer assembly (3).

6. The coaxial online observation and blowing device for laser processing machine tools according to claim 1, characterized in that: The optical transmission component (4) comprises an adapter tube (401), an adapter ring (402) and a field lens (403); the adapter tube (401) is threadedly connected to the bottom of the galvanometer component (3); and the field lens (403) is detachably connected to the adapter tube (401) via the adapter ring (402).

7. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 6, characterized in that: The bottom of the adapter cylinder (401) is provided with a blowing assembly via an adapter ring (402).

8. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 7, characterized in that: The air blowing assembly comprises an air blowing cylinder (8), an air blowing nozzle (9) and an air pipe joint (10); the air blowing cylinder (8) is arranged at the bottom of the adapter cylinder (401) via an adapter ring (402), and the air blowing cylinder (8) is sleeved on the periphery of the field lens (403); the air blowing nozzle (9) is arranged at the bottom of the air blowing cylinder (8), and the air pipe joint (10) is arranged on the air blowing cylinder (8), so that the gas, laser beam and illumination light can all reach the processed workpiece.

9. The coaxial online observation and blowing device for laser processing machine tools as claimed in claim 8, characterized in that: A flow guide assembly is provided between the air blowing cylinder (8) and the air blowing nozzle (9), the flow guide assembly comprising a flow guide plate (12) and a flow guide cover plate (11), the flow guide cover plate (11) being provided on the top of the flow guide plate (12), the air pipe joint (10) being in communication with a flow guide groove (14) provided on the flow guide plate (12), and light transmission holes (16) being provided at the centers of the flow guide plate (12) and the flow guide cover plate (11) so as to enable a laser beam and an illumination light to pass through the flow guide plate (12) and the flow guide cover plate (11), and the laser beam, the illumination light and the air blowing direction being coaxial.

10. The coaxial online observation and blowing device for laser processing machine tools according to claim 9, characterized in that: A conical chamber (13) is provided inside the air blowing nozzle (9), and an inner wall of the conical chamber (13) is parallel to the flow guiding direction of the flow guiding groove (14).

Citation Information

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