Powder Coating Reaction Equipment and Powder Coating Method

Abstract

The present invention relates to a powder coating reaction device and a powder coating method, and relates to the technical field of atomic layer deposition. The powder coating reaction device of the present invention includes: a main body, which has a coating cavity therein. An air extraction port for connecting to an air extraction device is provided at the upper part of the coating cavity, a discharge port is provided at the bottom of the coating cavity, and a precursor inlet is provided at the lower part of the coating cavity. The precursor inlet is used to introduce a precursor into the coating cavity and form a precursor spiral; a spiral feeding structure, which is installed above the main body, and the spiral feeding structure is connected to the upper part of the coating cavity. The spiral feeding structure is used to introduce powder into the coating cavity to form a powder spiral. The continuous feeding of powder in the coating process is realized, the efficiency of the coating process is greatly improved, and the powder can be dispersed to ensure the coating quality of the powder.

Description

Technical Field

[0001] The present invention relates to the technical field of atomic layer deposition, and particularly to a powder coating reaction device and a powder coating method. Background Art

[0002] Atomic Layer Deposition (ALD) technology is a method that can deposit substances layer by layer on the surface of a substrate in the form of a single atomic layer. During the atomic layer deposition process, the chemical reaction of the new atomic layer is directly associated with the previous layer, and this method enables each reaction to deposit only one atomic layer. Each cycle of ALD includes two half-reactions, and the chemisorption and surface chemical reactions of each step have obvious self-limiting and complementary characteristics. This self-limiting characteristic is the basis of the atomic layer deposition technology. Repeating this self-limiting reaction continuously forms the required thin film.

[0003] In related technologies, generally, powders are first introduced into the reaction chamber, and at the same time, a precursor is introduced into the reaction chamber. The precursor is used to contact the surface of the powders to achieve a chemical reaction. In order to avoid the powders blocking each other, making the powders unable to contact the precursor, it is necessary to introduce the powders into the reaction chamber in small batches at a time, and continuous deposition cannot be achieved, greatly reducing the efficiency of powder coating. Summary of the Invention

[0004] The present invention provides a powder coating reaction device for continuously introducing powders to improve the efficiency of atomic layer coating of powders.

[0005] In a first aspect, the present invention provides a powder coating reaction device, including: a main body, within which there is a coating chamber. An air extraction port for connecting to an air extraction device is provided at the upper part of the coating chamber, a discharge port is provided at the bottom of the coating chamber, and a precursor inlet is provided at the lower part of the coating chamber. The precursor inlet is used to introduce a precursor into the coating chamber and form a precursor spiral.

[0006] A spiral feeding structure, which is installed above the main body and is connected to the upper part of the coating chamber. The spiral feeding structure is used to introduce powders into the coating chamber to form a powder spiral.

[0007] Wherein, the powder spiral spirally descends under the action of gravity, while the precursor spiral spirally ascends under the air extraction of the air extraction device, so that the powders and the precursor contact in the coating chamber and form a powder coating product.

[0008] In one embodiment, the spiral feeding structure includes a cyclone chamber, the bottom of the cyclone chamber is communicated with the upper part of the coating cavity, the cyclone chamber is communicated with a first carrier gas channel for introducing an inert gas, and the ventilation direction of the first carrier gas channel is along the tangential direction of the cyclone chamber to form the powder spiral.

[0009] In one embodiment, the spiral feeding structure further includes a swirler plate arranged at the bottom outlet of the cyclone chamber, the swirler plate is arranged obliquely downward, and the downward inclination direction of the swirler plate corresponds to the downward direction of the powder spiral.

[0010] In one embodiment, the main body is further provided with a second carrier gas channel, the second carrier gas channel is located below the first carrier gas channel, and the second carrier gas channel is communicated with the coating cavity, and the ventilation direction of the second carrier gas channel is parallel to the ventilation direction of the first carrier gas channel.

[0011] In one embodiment, the ventilation direction of the precursor inlet is along the tangential direction of the coating cavity so that the precursor introduced from the precursor inlet forms the precursor spiral.

[0012] In one embodiment, the coating cavity includes a variable diameter section, the variable diameter section is located between the spiral feeding structure and the precursor inlet, and the inner diameter of the coating cavity at the variable diameter section gradually decreases from bottom to top.

[0013] In one embodiment, the main body is provided with a temperature control device, and the temperature control device is used to adjust the temperature in the coating cavity to the reaction temperature, and the range of the reaction temperature is [150°C, 350°C].

[0014] In one embodiment, the lower part of the coating cavity is communicated with a plurality of precursor inlets with the same height, and each precursor inlet is arranged at intervals along the circumferential direction of the main body.

[0015] In one embodiment, it further includes a storage device and a collection device. The storage device is communicated with the spiral feeding structure to introduce powder into the spiral feeding structure. The collection device is communicated with the bottom of the discharge port of the coating cavity to collect the powder coating product in the coating cavity. At least two main bodies are arranged vertically between the storage device and the collection device. The air extraction device is communicated with the air extraction port of the coating cavity of the highest main body among the plurality of main bodies, and the air extraction port of the coating cavity of the lower main body and the discharge port of the coating cavity of the higher main body among two adjacent main bodies are communicated with each other.

[0016] Second aspect, the present invention also provides a powder coating method, which uses the above-mentioned powder coating reaction equipment, and includes the following steps:

[0017] Turn on the air extraction device communicated with the air extraction port;

[0018] Feed the powder into the spiral feeding structure, and the spiral feeding structure guides the powder into the coating cavity and forms a spiral of powder that descends spirally.

[0019] Feed the precursor into the precursor inlet so that the precursor fed into the coating cavity forms a spiral of precursor that ascends spirally.

[0020] Collect the powder coating product at the discharge port, and the powder coating product is formed by the reaction of the powder spiral and the precursor spiral.

[0021] Compared with the prior art, the advantages of the present invention are that since a spiral feeding structure is installed above the main body, the powder can be fed into the coating cavity to form a powder spiral, and a precursor inlet is provided at the lower part of the coating cavity, and an air extraction port for connecting with an air extraction device is provided at the upper part of the coating cavity. During deposition, the powder spiral with a larger density can spiral down under the action of gravity, while the precursor spiral with a smaller density spirals up under the action of the air extraction device. The ascending precursor spiral and the descending powder spiral intersect in the coating cavity, and the coating reaction of the powder is completed during the falling process of the powder. The continuous feeding of the powder in the coating process is realized, and the efficiency of the coating process is greatly improved.

[0022] Among them, since deposition occurs during the falling process of the powder, before the powder contacts the bottom of the coating cavity, the powder fed first and the powder fed later are always spaced apart in the height direction, avoiding the shielding between the powders and ensuring that the powder can fully contact the precursor. And under the action of the ascending precursor spiral, not only can the falling speed of the powder be slowed down, thereby prolonging the reaction time and ensuring the coating quality of the powder, but also the effect of dispersing the agglomerated bulk powder can be increased by using the precursor spiral, further reducing the shielding between the powders and ensuring the coating quality of the powder.

[0023] At the same time, since the powder forms a descending spiral structure, compared with the powder that falls vertically, the powder that spirally falls travels a longer distance, and the contact area with the ascending precursor spiral increases significantly. Without increasing the height of the reaction equipment, the powder can contact more precursors, ensuring that the coating is completed during the falling process of the powder. Description of the Drawings

[0024] Hereinafter, the present invention will be described in more detail based on embodiments and with reference to the drawings.

[0025] Figure 1 is a three-dimensional structural schematic diagram of the powder coating equipment in the embodiment of the present invention;

[0026] Figure 2 is a three-dimensional structural schematic diagram of the spiral feeding structure in the embodiment of the present invention;

[0027] Figure 3 It is a schematic three - dimensional structure diagram of the main body in the embodiment of the present invention;

[0028] Figure 4 It is a schematic three - dimensional structure diagram of the material storage device in the embodiment of the present invention;

[0029] Figure 5 It is a flow chart of the coating method in the embodiment of the present invention.

[0030] Reference numerals:

[0031] 100, main body;

[0032] 110, coating cavity; 111, air extraction port; 112, discharge port; 113, precursor inlet; 114, second carrier gas channel; 115, reduced - diameter section;

[0033] 120, spiral feeding structure; 121, swirl chamber; 122, first carrier gas channel; 123, swirl plate; 124, feeding pipeline; 125, air extraction pipeline;

[0034] 200, air extraction device; 210, vacuum gauge;

[0035] 300, material storage device;

[0036] 400, material collection device;

[0037] 500, valve. Detailed implementation manners

[0038] The present invention will be further described below in conjunction with the accompanying drawings.

[0039] Refer to Figures 1 to 4 As shown, a powder coating reaction device provided by the present application includes:

[0040] The main body 100 and the spiral feeding structure 120. The spiral feeding structure 120 is installed above the main body 100, and the spiral feeding structure 120 is used to introduce powder into the upper part of the powder coating cavity 110 and form a powder spiral.

[0041] The main body 100 has a coating cavity 110. An air extraction port 111 connected to the air extraction device 200 is provided in the upper part of the coating cavity 110. A discharge port 112 is provided at the bottom of the coating cavity 110. A precursor inlet 113 is provided in the lower part of the coating cavity 110. The precursor inlet 113 is used to introduce the precursor into the coating cavity 110 and form a precursor spiral.

[0042] During use, the powder helix descends spirally under the action of gravity, while the precursor helix ascends spirally under the suction of the suction device 200. The ascending precursor helix and the descending powder helix intersect in the coating cavity 110, enabling the falling powder to fully contact the precursor and realizing the coating reaction between the precursor and the powder.

[0043] Since the powder forms a descending powder helix through the spiral feeding structure 120 when it descends, when the first powder particle introduced into the coating cavity 110 later descends to the first height, the second powder particle introduced into the coating cavity 110 earlier will descend to the second height and be offset relative to the first powder particle in the circumferential direction of the coating cavity 110. That is, the powder will not only be spaced in the vertical direction but also in the circumferential direction, thus preventing the powder introduced later from blocking the powder introduced earlier and enabling the powder introduced earlier and later to contact the precursor helix simultaneously to complete the coating reaction of each powder particle.

[0044] Moreover, it can be understood that for the coating cavity 110 of the same height, the displacement length of the powder falling vertically is H (H is the height of the coating cavity 110), while the displacement length of the powder descending spirally is H + N * C (N is the number of rotation circles of the powder helix, and C is the circumference of the coating cavity 110). Each powder particle can contact a larger number of precursors, thus ensuring that the powder can complete the coating reaction without increasing the height of the coating cavity 110.

[0045] In addition, since the precursor helix ascends under the suction of the suction device 200, when the precursor helix ascends, it can not only contact more powder particles, improve the utilization rate of the precursor, but also reduce the descending speed of the powder helix, extend the reaction time of the powder in the coating cavity 110, improve the coating quality of the powder, and also disperse the agglomerated powder, further enhancing the coating quality of the powder.

[0046] That is to say, since the present application is provided with the spiral feeding structure 120 for forming the powder helix and the precursor inlet 113 for forming the precursor helix, continuous feeding of the powder can be achieved, and the poor coating effect caused by mutual blocking between the powder particles can be avoided. Moreover, the device has a simple structure and low cost.

[0047] In some implementation manners, the spiral feeding structure 120 includes a cyclone bin 121, and the cyclone bin 121 is communicated with a first carrier gas channel 122 for introducing an inert gas. The ventilation direction of the first carrier gas channel 122 is along the tangential direction of the cyclone bin 121 to form a powder helix.

[0048] That is to say, by controlling the direction of the inert gas introduced into the cyclone chamber 121 along the tangential direction of the cyclone chamber 121, when the inert gas drives the powder into the coating cavity 110, the initial direction of the powder is along the tangential direction of the coating cavity 110. Under the restriction of the inner wall of the coating cavity 110, the powder and the inert gas continuously rotate around the axis of the coating cavity 110 and finally form a powder helix.

[0049] Among them, the tangential velocity of the powder helix can be controlled by controlling the flow rate of the inert gas introduced into the first carrier gas channel 122, so as to adjust the number of turns of the helix during the downward movement of the powder helix. For example, if it is desired that the powder helix rotates more turns around the coating cavity 110 and contacts more precursors during the downward movement, the flow rate of the inert gas introduced into the first carrier gas channel 122 can be increased. Conversely, the flow rate of the inert gas introduced into the first carrier gas channel 122 can be decreased.

[0050] It can be understood that the method of forming the powder helix is not limited to introducing the carrier gas tangentially. It is also possible to set a helical downward guide groove on the inner wall of the helical feeding structure 120 and introduce the powder into the guide groove, so that the powder is accelerated under the action of gravity and has a tangential velocity to form a powder helix.

[0051] See Figures 1 to 4 As shown, in some implementation manners, the helical feeding structure 120 further includes a swirl plate 123 disposed at the bottom outlet of the cyclone chamber 121. The swirl plate 123 is inclined downward, and the downward inclination direction of the swirl plate 123 corresponds to the downward movement direction of the powder helix.

[0052] Specifically, when the powder helix descends in a clockwise helix, the swirl plate 123 is set to be gradually inclined downward in the clockwise direction. When the powder helix descends in a counterclockwise helix, the swirl plate 123 needs to be correspondingly set to be gradually inclined downward in the counterclockwise direction. By providing the swirl plate 123 at the bottom outlet of the cyclone chamber 121, it is further ensured that the powder descends along the preset helical direction during the downward movement.

[0053] See Figures 1 to 4 As shown, in some implementation manners, the main body 100 is further provided with a second carrier gas channel 114. The second carrier gas channel 114 is located below the first carrier gas channel 122, and the second carrier gas channel 114 is communicated with the coating cavity 110. The ventilation direction of the second carrier gas channel 114 is parallel to the ventilation direction of the first carrier gas channel 122. That is to say, the inert gas introduced through the second carrier gas channel 114 can further accelerate the powder helix falling from the first carrier gas channel 122 to maintain the tangential velocity of the powder helix.

[0054] See Figures 1 to 4As shown, in some implementations, two second carrier gas channels 114 are provided on the main body 100, and inert gas can be introduced into the coating cavity 110 from different positions, so as to more conveniently control the amount of inert gas introduced and more accurately adjust the spiral speed of the powder spiral. It can be understood that, in some implementations, the number of the second carrier gas channels 114 on the main body 100 can be three, four or more, as long as it can meet the speed adjustment of the powder spiral. Similarly, the cyclone bin 121 of the spiral feeding structure 120 can also communicate with multiple first carrier gas channels 122 to increase the spiral speed of the powder in the cyclone bin 121.

[0055] In some implementations, a speed detection device can be provided above the second carrier gas channel 114 to measure the tangential speed of the powder spiral, and the speed of the inert gas introduced into the second carrier gas channel 114 can be adjusted according to the tangential speed of the powder spiral, so that the tangential speed of the powder spiral reaches a preset speed. Specifically, when the tangential speed of the powder spiral is less than the preset tangential speed, the powder spiral is accelerated by introducing inert gas with a tangential speed greater than the preset tangential speed into the second carrier gas channel 114. When the tangential speed of the powder spiral is greater than the preset tangential speed, the tangential speed of the powder spiral is reduced by introducing inert gas with a tangential speed less than the preset tangential speed into the second carrier gas channel 114.

[0056] It can be understood that the inert gas in the above text is generally nitrogen, and argon and other inert gases can also be selected in some cases. The chemical properties of the inert gas are stable and it will not react with the powder during the process of driving the powder to move.

[0057] See Figures 1 to 4 As shown, in some implementations, the ventilation direction of the precursor inlet 113 is along the tangent of the coating cavity 110, so that the precursor introduced from the precursor inlet 113 forms a precursor spiral. That is to say, by controlling the introduction direction of the precursor to be the tangent of the coating cavity 110, after the precursor is introduced into the coating cavity 110, it will move along the spiral direction and spiral upward under the action of the air extraction device 200.

[0058] See Figures 1 to 4 As shown, in some implementations, the coating cavity includes a variable diameter section 115, the variable diameter section 115 is located between the spiral feeding structure 120 and the precursor inlet 113, and the inner diameter of the coating cavity 110 at the variable diameter section 115 gradually decreases from bottom to top.

[0059] Due to the variable diameter section 115 with a gradually decreasing inner diameter from bottom to top, when the precursor spiral passes through the variable diameter section 115 and spirals upward, the flow area of the gas gradually decreases, while the gas flow rate remains basically unchanged, which will cause the speed of the precursor to gradually increase from bottom to top.

[0060] Correspondingly, since the powder descends in a spiral manner, when the powder spiral passes through the diameter-changing section 115, the powder spiral will come into contact with the precursor with a faster speed first. It can be understood that since the precursor spiral ascends, the faster the speed of the precursor, the more significantly the speed of the powder will be reduced, thereby prolonging the reaction time during the falling process of the powder and enabling the powder to react more fully with the precursor.

[0061] In some implementation manners, the main body 100 is provided with a temperature control device, and the temperature control device is used to adjust the temperature in the coating cavity 110 to the reaction temperature, and the range of the reaction temperature is [150°C, 350°C]. By adjusting the temperature in the coating cavity 110 to the reaction temperature, the reaction temperature required for the coating process can be satisfied, and the poor deposition effect caused by improper temperature can be avoided.

[0062] In some implementation manners, before the powder is introduced into the coating cavity 110, it can also be heated to the reaction temperature first. Specifically, the powder can be stored in the storage device 300, and a temperature control device is arranged in the storage device 300 to keep the temperature of the powder in the storage device 300 stable at the reaction temperature. When the coating reaction needs to be carried out, the powder in the storage device 300 is led to the spiral feeding structure 120, so that the powder with the reaction temperature forms a powder spiral under the action of the spiral feeding structure 120.

[0063] See Figures 1 to 4 As shown, in some implementation manners, a plurality of precursor inlets 113 with the same height are connected to the lower part of the coating cavity 110, and the respective precursor inlets 113 are arranged at intervals along the circumferential direction of the main body 100. That is to say, when introducing the precursor into the coating cavity 110, the precursor can be introduced into the coating cavity 110 by using one of the several precursor inlets 113, or multiple precursor inlets 113 can be used to introduce the precursor into the coating cavity 110 simultaneously.

[0064] In some implementation manners, the powder coating reaction device further includes a storage device 300 and a collecting device 400. The storage device 300 is connected to the spiral feeding structure 120 to introduce powder into the spiral feeding structure 120. The collecting device 400 is connected to the bottom of the discharge port 112 of the coating cavity 110 to collect the powder coating product in the coating cavity 110. At least two main bodies 100 are arranged in the vertical direction between the storage device 300 and the collecting device 400. The air extraction device 200 is connected to the air extraction port 111 of the coating cavity 110 of the highest main body 100 among the multiple main bodies 100, and the air extraction port 111 of the coating cavity 110 of the lower main body 100 adjacent to the two main bodies 100 is connected to the discharge port 112 of the coating cavity 110 of the higher main body 100.

[0065] That is to say, by setting a plurality of vertically connected main bodies 100, multiple coatings of the same powder are realized. During use, different types of precursors can be introduced into the precursor inlets 113 of each main body 100, thereby completing different coating processes. That is to say, after the powder helix is coated with the precursor in the upper coating cavity 110, it will fall to the lower coating cavity 110 under the action of gravity, and under the action of the lower coating cavity 110, the powder helix will achieve secondary coating. The number of coating layers of the powder helix can be controlled by the number of connected coating cavities 110.

[0066] As mentioned above, in some implementation manners, a second carrier gas channel 114 is provided at the upper part of the coating cavity 110. When it is detected that the speed of the powder helix falling in the previous coating cavity 110 is too fast or too slow, the speed of the inert gas introduced through the second carrier gas channel 114 of the lower coating cavity 110 can be controlled to adjust the speed of the powder helix.

[0067] In some implementation manners, the main bodies 100 can also be arranged at intervals, and a storage device 300 is arranged between adjacent main bodies 100. The top of the storage device 300 is connected to the discharge port 112 of the coating cavity 110 of the upper main body 100, and the bottom of the storage device 300 is connected to the spiral feeding structure 120 of the lower main body 100 through a valve 500. By setting the storage device 300, the precursor in the lower layer is prevented from flowing into the upper main body 100, and the powder coating process of the next stage can be carried out.

[0068] See Figures 1 to 4 As shown, in some implementation manners, the air extraction device 200 can be integrated in the storage device 300. The air extraction device 200 can be a vacuum pump, and the gas in the storage device 300 and the coating cavity 110 can be pumped to a vacuum (specifically, it can be pumped to about 0.05 pa) by using the air extraction device 200 before the reaction, so as to avoid impurities that contaminate the powder in the powder coating reaction equipment. A vacuum gauge 210 can also be arranged on the air extraction device 200 to measure the air pressure in the coating cavity 110.

[0069] Among them, in order to prevent the powder in the material storage device 300 or the spiral feeding structure 120 from being directly sucked away by the air extraction device 200 during air extraction, the material storage cavity of the material storage device 300 can be set to be isolated from the air extraction device 200, and an air extraction pipeline 125 isolated from the swirl chamber 121 is formed at the spiral feeding structure 120. The air extraction pipeline 125 is connected to the air extraction device 200 to prevent the air extraction device 200 from sucking away the powder that has not been accelerated during air extraction. In order to enable the powder in the material storage device 300 to be introduced into the spiral feeding structure 120, the spiral feeding structure 120 further includes a feeding pipeline 124 communicating with the swirl chamber 121, and the other end of the feeding pipeline 124 is connected to the material storage device 300, where the valve 500 is used to control the opening and closing of the feeding pipeline 124.

[0070] A filtering device is also provided at the air extraction port 111 of the air extraction device 200 to prevent the powder from being carried out by the air extraction device 200.

[0071] In a second aspect, as shown in Figure 1 、 Figure 3 and Figure 5 This application also provides a powder coating method, which is completed by using the above-mentioned powder coating reaction equipment, and includes the following steps:

[0072] S100: Turn on the air extraction device 200 communicating with the air extraction port 111;

[0073] S200: Feed the powder into the spiral feeding structure 120, and the spiral feeding structure 120 guides the powder into the coating cavity 110 to form a spiral of powder descending in a spiral;

[0074] S300: Feed the precursor into the precursor inlet 113 so that the precursor fed into the coating cavity 110 forms a spiral of precursor ascending in a spiral;

[0075] S400: Collect the powder coating product at the discharge port 112, and the powder coating product is formed by the reaction of the powder spiral and the precursor spiral.

[0076] Among them, steps S100, S200, and S300 can be carried out synchronously to achieve continuous feeding and continuous discharging, and greatly improve the efficiency of the coating process.

[0077] Among them, in step S100, first use the air extraction device 200 to evacuate the coating cavity 110 to 0.05 pa to prevent the powder or the powder coating product from being contaminated by impurities in the coating cavity 110.

[0078] In some implementations, a powder coating reaction device having multiple vertically connected bodies 100 can be adopted. When using such a powder coating reaction device, it is necessary to control different precursors to be introduced into the precursor inlets 113 of two adjacent bodies 100, so that the first body 100 completes the first precursor coating and the second body 100 completes the second coating process. By controlling the number of connected bodies 100, the number of times of precursor coating is controlled, so as to form a powder coating product with a specific coating thickness.

[0079] Although the present invention has been described with reference to the preferred embodiments, various modifications can be made to it and components therein can be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way. The present invention is not limited to the specific embodiments disclosed in the text, but includes all technical solutions falling within the scope of the claims.

Claims

1. A powder coating reaction device, characterized in that, It includes: A main body, within which there is a coating cavity. An air extraction port for connecting to an air extraction device is provided at the upper part of the coating cavity, a discharge port is provided at the bottom of the coating cavity, and a precursor inlet is provided at the lower part of the coating cavity. The precursor inlet is used to introduce a precursor into the coating cavity to form a precursor helix. A spiral feeding structure, which is installed above the main body. The spiral feeding structure is connected to the upper part of the coating cavity and is used to introduce powder into the coating cavity to form a powder helix. Wherein, the powder helix spirally descends under the action of gravity, while the precursor helix spirally ascends under the air extraction of the air extraction device, so that the powder and the precursor come into contact in the coating cavity to form a powder-coated product. The coating cavity includes a variable-diameter section, which is located between the spiral feeding structure and the precursor inlet, and the inner diameter of the coating cavity at the variable-diameter section gradually decreases from bottom to top.

2. The powder coating reaction device according to claim 1, wherein The spiral feeding structure includes a cyclone bin, the bottom of the cyclone bin is connected to the upper part of the coating cavity, and the cyclone bin is connected to a first carrier gas channel for introducing an inert gas. The ventilation direction of the first carrier gas channel is along the tangent of the cyclone bin to form the powder helix.

3. The powder coating reaction device according to claim 2, wherein The spiral feeding structure further includes a cyclone plate arranged at the bottom outlet of the cyclone bin. The cyclone plate is inclined downward, and the downward inclination direction of the cyclone plate corresponds to the downward direction of the powder helix.

4. The powder coating reaction device according to claim 2 or 3, wherein The main body is further provided with a second carrier gas channel, which is located below the first carrier gas channel and is connected to the coating cavity. The ventilation direction of the second carrier gas channel is parallel to the ventilation direction of the first carrier gas channel.

5. The powder coating reaction device according to any one of claims 1-3, wherein The ventilation direction of the precursor inlet is along the tangent of the coating cavity, so that the precursor introduced by the precursor inlet forms the precursor helix.

6. The powder coating reaction device according to any one of claims 1-3, wherein The main body is provided with a temperature control device, which is used to adjust the temperature in the coating cavity to the reaction temperature, and the range of the reaction temperature is [150°C, 350°C].

7. The powder coating reaction device according to any one of claims 1-3, wherein The lower part of the coating cavity is connected to a plurality of precursor inlets with the same height, and each precursor inlet is arranged at intervals along the circumference of the main body.

8. The powder coating reaction device according to any one of claims 1-3, wherein It further includes a material storage device and a material collection device. The material storage device is communicated with the spiral feeding structure to feed powder into the spiral feeding structure. The material collection device is communicated with the bottom of the discharge port of the coating cavity to collect the powder-coated products in the coating cavity. At least two bodies arranged vertically are provided between the material storage device and the material collection device. The air extraction device is communicated with the air extraction port of the coating cavity of the highest body among the multiple bodies, and the air extraction port of the coating cavity of the lower body and the discharge port of the coating cavity of the higher body among two adjacent bodies are communicated with each other.

9. A powder coating method, characterized in that, Using the powder coating reaction equipment according to any one of claims 1-8, it includes the following steps: Turn on the air extraction device communicated with the air extraction port; Feed the powder into the spiral feeding structure, and the spiral feeding structure guides the powder into the coating cavity to form a spiral of powder descending in a spiral shape; Feed the precursor into the precursor inlet so that the precursor fed into the coating cavity forms a spiral of precursor ascending in a spiral shape; Collect the powder-coated products at the discharge port, and the powder-coated products are formed by the reaction of the powder spiral and the precursor spiral.

Images