Vertical fine adjustment device

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and provides a vertical fine adjustment device which comprises a first assembly and a second assembly which are spaced from each other, the first assembly comprises a first magnet part, the second assembly comprises first back iron and a first coil which are arranged in a nested mode, and the first magnet part coaxially sleeves the outer side of the first back iron; the first coil is located between the first magnet part and the first back iron, the first coil and the first magnet part are arranged in a spaced mode and connected to the first back iron, and the magnetizing direction of the first magnet part is the radial direction of the first magnet part. Magnetic levitation force and Lorentz force are generated between the second assembly and the first assembly, the gravity of the vertical micropositioner and the reverse acting force of the reed can be compensated through the magnetic levitation force, and the driving effect on the vertical micropositioner is achieved through the Lorentz force. The resultant force of the magnetic levitation force and the Lorentz force is linearly changed in a large displacement range of the vertical micropositioner, so that the vertical fine adjustment device has the characteristic of constant rigidity, and the heating problem of a voice coil motor in the vertical fine adjustment device is solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a vertical fine-tuning device. Background Art

[0002] In the field of semiconductor manufacturing and testing, the worktable not only needs to complete the device handover between the semiconductor transmission system, but also needs to achieve precise positioning of the semiconductor devices it carries. As the requirements for the yield and accuracy of semiconductor manufacturing and testing continue to increase, the requirements for the worktable's operating speed, acceleration and other working performance are also getting higher and higher. A vertical micro-motion stage is provided in the worktable to achieve precise positioning of semiconductor devices. The vertical micro-motion stage usually adopts a three-point or four-point actuator layout. In order to ensure its vertical output performance, a reed is used as a guide element for vertical motion and to achieve decoupling of pitch and yaw, which can greatly improve the control accuracy of the vertical micro-motion stage. In the worktable of the above structure, in order to improve the control accuracy of the vertical displacement of the vertical micro-motion stage, the actuator must not only provide a vertical driving force for the motion process, but also overcome the gravity of the vertical motion load and the reverse force of the reed.

[0003] At present, the vertical motion of the vertical micro-motion stage is usually realized by a combination of a gravity compensation device and a voice coil motor to improve the control accuracy of the vertical micro-motion stage, wherein the gravity compensation device compensates the mass of the vertical driving load of the vertical micro-motion stage by constant gravity compensation through the principles of air floating or magnetic floating; the voice coil motor is used as a vertical actuator to provide the reaction force of the reed and the driving force of the vertical motion of the vertical micro-motion stage. However, the reaction force of the reed is linearly related to the displacement. In different vertical travel ranges, the reaction force of the reed is different, which will affect the output of the voice coil motor, resulting in increased heating of the voice coil motor, and thus making the control accuracy of the vertical micro-motion stage equipped with the voice coil motor poor. Summary of the invention

[0004] In view of the shortcomings of the prior art described above, the purpose of the present application is to provide a vertical fine-tuning device for realizing the vertical movement of a vertical micro-motion stage, so as to solve the problem in the prior art that the voice coil motor generates increased heat, resulting in poor control accuracy of the vertical micro-motion stage provided with the voice coil motor.

[0005] To achieve the above-mentioned purpose and other related purposes, the present application provides a vertical fine-tuning device, comprising a first component and a second component coaxially and spaced apart from each other, with the axis direction of the first component being the z direction, and the first component and the second component being able to move relative to each other along the z direction; The first component includes a first magnet portion, and the magnetization direction of the first magnet portion is in its radial direction; The second component includes a first back iron and a first coil, the first magnetic part is coaxially sleeved on the outside of the first back iron, the first coil is located between the first magnetic part and the first back iron, the first coil is spaced apart from the first magnetic part and connected to the first back iron.

[0006] Optionally, the first component further includes a central magnet, the first back iron is coaxially sleeved on the outside of the central magnet and spaced apart from the central magnet, and the magnetization direction of the central magnet is its radial direction.

[0007] Optionally, the second component further includes a second back iron, which is coaxially sleeved on the outside of the first magnet part and spaced apart from the first magnet part.

[0008] Optionally, the second component further includes a second coil, the second coil is located between the first magnet portion and the second back iron, the second coil is spaced apart from the first magnet portion, and is connected to the second back iron.

[0009] Optionally, the first magnet portion includes one or more coaxially arranged first magnet mechanisms, and the plurality of first magnet mechanisms are sequentially spaced apart and distributed along the z direction, and the relative positions between the plurality of first magnet mechanisms remain unchanged.

[0010] Optionally, at least one end of at least one of the first magnet mechanisms along the z direction is provided with a first magnet tip, and a thickness of the first magnet tip gradually decreases in a direction away from the first magnet mechanism where the first magnet tip is located.

[0011] Optionally, a first annular groove is provided on an inner side surface and / or an outer side surface of at least one of the first magnet mechanisms, and the first annular groove is located at at least one end of the first magnet mechanism along the z direction.

[0012] Optionally, the first magnet mechanism includes one or more coaxially arranged first magnets, and multiple first magnets are nested in sequence from the inside to the outside along their radial direction. A first intermediate back iron is arranged between two adjacent first magnets, and the first intermediate back iron is respectively connected to two adjacent first magnets, and the magnetization direction of the first magnet is its radial direction.

[0013] Optionally, the first component further includes one or more second magnet parts, the second component further includes one or more third coils, the second magnet parts and the third coils are coaxial and spaced apart from each other, and are alternately nested in sequence along the radial direction; The second magnet portion and the third coil are located between the first magnet portion and the first coil, or are arranged around the outside of the first magnet portion.

[0014] Optionally, the second magnet portion includes one or more coaxially arranged second magnet mechanisms, a plurality of the second magnet mechanisms are sequentially spaced apart and distributed along the z direction, and relative positions between the plurality of the second magnet mechanisms remain unchanged.

[0015] Optionally, at least one end of at least one of the second magnet mechanisms along the z direction is provided with a second magnet tip, and a thickness of the second magnet tip gradually decreases in a direction away from the second magnet mechanism where the second magnet tip is located.

[0016] Optionally, a second annular groove is provided on an inner side surface and / or an outer side surface of at least one of the second magnet mechanisms, and the second annular groove is located at at least one end of the second magnet mechanism along the z direction.

[0017] Optionally, the second magnet mechanism includes a plurality of coaxially arranged second magnets, and the plurality of second magnets are nested in sequence from the inside to the outside along their radial direction, a second intermediate back iron is arranged between two adjacent second magnets, and the second intermediate back iron is respectively connected to two adjacent second magnets, and the magnetization direction of the second magnet is its radial direction.

[0018] Optionally, the second component further includes one or more third back-irons, wherein the third back-irons are nested with the third coils, the third back-irons are connected to the third coils, and are spaced apart from the first magnet portion and the second magnet portion.

[0019] Optionally, the second component also includes one or more fourth coils, the fourth coils are nested with the third back iron, the third back iron is located between the third coil and the fourth coil, the fourth coil is connected to the third back iron, and is spaced apart from the first magnet portion and the second magnet portion.

[0020] As described above, compared with the prior art, the vertical fine-tuning device provided by the present application has at least the following beneficial effects: In the vertical fine-tuning device of the present application, the first magnet portion constitutes the first component of the vertical fine-tuning device, the first back iron and the first coil constitute the second component of the vertical fine-tuning device, the magnetic levitation force generated by the first component on the second component can compensate for the gravity of the vertical fine-motion stage and the elastic force of the reed, and the Lorentz force generated between the first component and the second component can realize the driving effect on the vertical fine-motion stage.

[0021] In the vertical fine-tuning device, the first magnet portion, the first back iron and the first coil can constitute a voice coil motor. Within different vertical travel ranges, the vertical resultant force of the magnetic buoyancy force of the vertical fine-tuning device and the Lorentz force changes linearly within a larger displacement range of the vertical fine-motion stage, so that the vertical fine-tuning device of the present application has a constant stiffness characteristic; by adjusting the equivalent stiffness of the vertical fine-tuning device, the forces applied by the vertical fine-tuning device and the reed on the vertical fine-motion stage can be made to be the same in magnitude but opposite in direction, and the trend of the vertical resultant force jointly applied by the two on the vertical fine-motion stage is a zero stiffness curve, thereby effectively improving the heating problem of the voice coil motor in the vertical fine-tuning device and improving the positioning accuracy of the vertical fine-motion stage.

[0022] Moreover, the vertical fine-tuning device of the present application realizes the function of constant stiffness gravity compensation only through the first magnet part and the first back iron, and realizes the driving function of the constant stiffness vertical fine-tuning device through the first coil, the first magnet part and the first back iron. It has a simple structure and occupies little space.

[0023] To sum up, the vertical fine-tuning device of the present application has the characteristics of low heat generation, low power consumption, simple structure, small space occupation, constant stiffness within the vertical travel range, etc., which realizes precise positioning of the vertical micro-motion stage and improves the overall integration and control accuracy of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 Shown is a schematic structural diagram of a vertical fine-tuning device provided in an embodiment of the present application.

[0026] Figure 2 Display as Figure 1 The force-displacement curve of the vertical fine-tuning device shown.

[0027] Figure 3 Shown is a schematic structural diagram of a vertical fine-tuning device with a second back iron provided in Example 1 of the present application.

[0028] Figure 4 Display as Figure 3 The force-displacement curve of the vertical fine-tuning device shown.

[0029] Figure 5 Shown is a schematic structural diagram of a vertical fine-tuning device with a second coil provided in Example 1 of the present application.

[0030] Figure 6 Display as Figure 5 The force-displacement curve of the vertical fine-tuning device shown.

[0031] Figure 7 Shown is a schematic structural diagram of a vertical fine-tuning device with two first magnet mechanisms provided in Example 1 of the present application.

[0032] Figure 8 Display as Figure 7 The force-displacement curve of the vertical fine-tuning device shown.

[0033] Fig. 9 Shown is a schematic structural diagram of a vertical fine-tuning device with a first intermediate back iron provided in Example 1 of the present application.

[0034] Fig.10 Display as Fig. 9 The magnetic field line diagram inside the vertical fine-tuning device is shown.

[0035] Fig.11 Display as Fig. 9 The force-displacement curve of the vertical fine-tuning device shown.

[0036] Fig.12 Display as Fig. 9 Force-displacement curve diagram of the vertical fine-tuning device after removing one first magnet and the first intermediate back iron.

[0037] Fig.13 Display as Fig.10 The vertical resultant force of the vertical fine-tuning device and the curve diagram of the reverse force and displacement of the spring are shown.

[0038] Fig.14 Shown is a schematic structural diagram of a vertical fine-tuning device provided in Example 2 of the present application.

[0039] Fig.15 Display as Fig.14 The force-displacement curve of the vertical fine-tuning device shown.

[0040] Figures 16 to 19 Shown are structural schematic diagrams of four vertical fine-tuning devices with different structures provided in Example 3 of the present application.

[0041] Fig. 20 Display as Fig.17 The cross-sectional structure diagram of the tip of the first magnet in the vertical fine-tuning device along the axial direction is shown.

[0042] Fig.21 Display as Fig.17 The graph of vertical resultant force and displacement when the side surface of the tip of the first magnet in the vertical fine-tuning device has different angles with the z direction is shown.

[0043] Fig. 22 Display as Fig.17 The thrust constant and displacement curve diagram is shown when the side surface of the first magnet tip in the vertical fine-tuning device has different angles with the z direction.

[0044] Fig.23 Shown is a schematic structural diagram of a vertical fine-tuning device with a first annular groove provided in Example 3 of the present application.

[0045] Figure 24 to Figure 27 Shown are structural schematic diagrams of four vertical fine-tuning devices with different structures provided in Example 4 of the present application.

[0046] Fig.28 Display as Fig.24 The force-displacement curve of the vertical fine-tuning device shown.

[0047] Reference numerals: 10. First component; 101. Central magnet; 11. First magnet part; 111. First magnet mechanism; 1101. First magnet tip; 1102. First annular groove; 1111. First magnet; 112. First intermediate back iron; 12. Second magnet part; 121. Second magnet mechanism; 1201. Second magnet tip; 1202. Second annular groove; 1211. Second magnet; 1212. Second intermediate back iron; 20. Second component; 211. First back iron; 212. Second back iron; 213. Third back iron; 221. First coil; 222. Second coil; 223. Third coil; 224. Fourth coil. DETAILED DESCRIPTION

[0048] In order to make the technical purpose, technical solution and technical effect of the present application clearer, the technical solution in the present application will be clearly and completely described in conjunction with the embodiments below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0049] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the present application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present application, it should be noted that the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the implementation or example are included in at least one implementation or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more implementations or examples in a suitable manner.

[0051] Reference Figure 1 The present application provides a vertical fine-tuning device for realizing vertical movement of a vertical micro-motion stage, comprising a first component 10 and a second component 20 spaced apart from each other, wherein the first component 10 and the second component 20 are coaxially arranged, and the axial direction of the first component 10 is the z direction, and the first component 10 and the second component 20 can move relative to each other along the z direction.

[0052] The first component 10 includes a first magnetic part 11, and the magnetization direction of the first magnetic part 11 is its radial direction. The second component 20 includes a first back iron 211 and a first coil 221. The first magnetic part 11 is coaxially sleeved on the outside of the first back iron 211, and the first coil 221 is located between the first magnetic part 11 and the first back iron 211. The first coil 221 is connected to the first back iron 211 and is spaced apart from the first magnetic part 11. The magnetic field generated by the first magnetic part 11 can exert a magnetic levitation force upward or downward along the z direction on the first back iron 211. Within the travel range of the vertical fine-tuning device, the magnetic levitation force is linearly related to the displacement, so the gravity of the vertical fine-motion stage and the reverse force of the spring can be compensated by the magnetic levitation force. The first magnet part 11 generates a magnetic field in the space around it. When current flows through the first coil 221, the first coil 221 cuts the magnetic field to generate a Lorentz force. The resultant force of the Lorentz force on the first coil 221 is in the z direction, which can achieve a driving effect on the vertical micro-motion stage.

[0053] When in use, the first magnet part 11, the first coil 221 and the first back iron 211 constitute a voice coil motor. In different vertical stroke ranges, the magnetic buoyancy force generated by the vertical fine-tuning device and the vertical resultant force of the Lorentz force have a linear variation relationship within a larger displacement range, so that the vertical fine-tuning device has a constant stiffness characteristic; the reed is arranged between the mover of the vertical fine-tuning device and the external load, and the reverse force of the reed also has a linear relationship with the displacement. By adjusting the equivalent stiffness of the vertical fine-tuning device, the forces applied by the vertical fine-tuning device and the reed on the vertical fine-motion stage can be made equal or substantially equal in magnitude and opposite in direction, that is, the vertical resultant force trend of the two applied to the vertical fine-motion stage is a zero stiffness curve. Therefore, through the vertical fine-tuning device, accurate compensation for the gravity of the vertical fine-tuning stage and the reverse force of the reed can be achieved, and the heating problem of the voice coil motor in the vertical fine-tuning device is effectively improved, and the positioning accuracy of the vertical fine-tuning stage is improved.

[0054] In order to explain the vertical fine-tuning device of the present application in more detail, the technical solution of the present application will be described in combination with specific embodiments below. It should be noted that the technical features and technical solutions in the following embodiments can be used in combination with each other without conflict.

[0055] Embodiment 1

[0056] Reference Figure 1 This embodiment provides a vertical fine-tuning device, including a first component 10 and a second component 20 that are spaced apart from each other. The first component 10 and the second component 20 are coaxially arranged, and the axial direction of the first component 10 is the z direction. The first component 10 and the second component 20 can move relative to each other along the z direction.

[0057] In this embodiment, the first component 10 can be used as a stator, and the second component 20 can be used as a mover. By controlling the second component 20 to move in the z direction, the first component 10 and the second component 20 can move relative to each other in the z direction. Alternatively, the first component 10 can be used as a mover, and the second component 20 can be used as a stator. By controlling the first component 10 to move in the z direction, the first component 10 and the second component 20 can move relative to each other in the z direction.

[0058] The first component 10 includes a first magnet part 11, and the second component 20 includes a first back iron 211 and a first coil 221. The first magnet part 11 is coaxially sleeved on the outside of the first back iron 211, and the first coil 221 is located between the first magnet part 11 and the first back iron 211. The first coil 221 is spaced apart from the first magnet part 11 and connected to the first back iron 211. The first magnet part 11, the first back iron 211 and the first coil 221 can constitute a voice coil motor. The magnetization direction of the first magnet part 11 is its radial direction, and its magnetization direction can be radially from inside to outside, or radially from outside to inside.

[0059] Figure 2 Shows Figure 1 The force-displacement curve of the vertical fine-tuning device shown in FIG. Figure 2 In the figure, the lower solid line is the curve of the magnetic buoyancy and displacement of the vertical fine-tuning device, the upper dotted line is the curve of the vertical resultant force of the magnetic buoyancy and Lorentz force of the vertical fine-tuning device and displacement, and the vertical distance between the upper dotted line and the lower solid line is the Lorentz force of the vertical fine-tuning device at different displacements. According to the simulation calculation results, within the range of -2mm~2mm, the change of the magnetic buoyancy and the vertical resultant force of the magnetic buoyancy and Lorentz force with the displacement is close to linear change. It can be seen that within the vertical travel range, the vertical fine-tuning device has a constant stiffness characteristic. The reed is arranged between the mover and the vertical fine-motion stage. By adjusting the equivalent stiffness of the vertical fine-tuning device, the forces applied by the vertical fine-tuning device and the reed on the vertical fine-motion stage can be made equal in magnitude and opposite in direction, thereby making the trend of the vertical resultant force applied to the vertical fine-motion stage a zero stiffness curve. This improves the compensation accuracy of the gravity of the vertical fine-motion stage and the reverse force of the reed, improves the heating problem of the voice coil motor in the vertical fine-tuning device, and can achieve precise positioning of the vertical fine-motion stage, thereby improving the control accuracy of the vertical fine-motion stage.

[0060] In this embodiment, the first coil 221 can be directly connected to the first back iron 211, or connected to the first back iron 211 through a coil bracket. The first magnet portion 11 constitutes the first component 10, and the first coil 221 and the first back iron 211 constitute the second component 20. The magnetic levitation force generated between the first component 10 and the second component 20 can compensate for the gravity of the vertical fine-motion stage and the reverse force of the spring leaf. The Lorentz force generated between the first component 10 and the second component 20 can realize the driving effect of the vertical fine-tuning device on the vertical fine-motion stage.

[0061] In this embodiment, refer to Figure 3 The second component 20 may further include a second back iron 212, which is sleeved on the outside of the first magnetic part 11. The second back iron 212 is coaxially arranged with the first magnetic part 11 and is spaced apart from the first magnetic part 11, so as to improve the magnetic field distribution and improve the performance in the vertical fine-tuning device. Optionally, the relative position of the second back iron 212 and the first back iron 211 remains unchanged, and the first back iron 211 and the second back iron 212 can be made of high magnetic permeability materials, and can be connected to the first back iron 211 and the second back iron 212 respectively by connecting members, so that the relative position of the first back iron 211 and the second back iron 212 remains unchanged.

[0062] Figure 4 Shows Figure 3 The force-displacement curve of the vertical fine-tuning device shown in FIG. Figure 4In the figure, the position where the center plane of the first component 10 along the perpendicular direction to the z direction coincides with the center plane of the second component 20 along the perpendicular direction to the z direction is the zero point position, and the solid line below is Figure 3 The magnetic buoyancy displacement curve of the vertical fine-tuning device shown in the figure is shown in the figure. The upper dotted line is Figure 3 The vertical resultant force displacement curve of the vertical fine-tuning device shown in the figure, the vertical distance between the upper dotted line and the lower solid line is the Lorentz force of the vertical fine-tuning device at different displacements. According to the simulation calculation results, by providing the second back iron 212, the magnetic field distribution inside the vertical fine-tuning device can be improved, so that the magnetic buoyancy of the vertical fine-tuning device and the curve between the vertical resultant force and the displacement have better linearity, thereby improving the performance of the vertical fine-tuning device.

[0063] Reference Figure 5 The second component 20 may further include a second coil 222, which is located between the first magnetic part 11 and the second back iron 212. The second coil 222 is coaxial with the first magnetic part 11 and is spaced apart from each other, and is connected to the second back iron 212. The second coil 222 may be directly connected to the second back iron 212, or may be connected to the second back iron 212 through a coil support. By providing the second coil 222, the Lorentz force generated between the first component 10 and the second component 20 can be increased, thereby improving the driving performance of the vertical fine-tuning device.

[0064] Figure 6 Shows Figure 5 The force and displacement curve of the vertical fine-tuning device is shown in FIG. Figure 6 In the figure, the position where the center plane of the first component 10 along the perpendicular direction to the z direction coincides with the center plane of the second component 20 along the perpendicular direction to the z direction is the zero point position, and the solid line below is Figure 5 The curve of magnetic buoyancy and displacement of the vertical fine-tuning device shown in the figure, the upper approximately horizontal long dashed line is the curve of Lorentz force and displacement, and the upper inclined short dashed line is the curve of vertical resultant force and displacement. According to the simulation calculation results, the magnetic buoyancy and vertical resultant force of the vertical fine-tuning device are linearly related to the displacement within a large stroke range. By setting the second coil 222, the Lorentz force generated between the first component 10 and the second component 20 can be increased, thereby improving the driving ability of the vertical fine-tuning device.

[0065] In an optional embodiment, the height of the first magnet portion 11 along the z direction is smaller than the height of the first back iron 211 along the z direction, and / or the height of the first magnet portion 11 along the z direction is smaller than the height of the second back iron 212 along the z direction, thereby reserving space for the first magnet portion 11 to move along the z direction, and ensuring the improvement effect on the internal magnetic field of the vertical fine-tuning device, thereby improving the performance of the vertical fine-tuning device.

[0066] In this embodiment, refer to Figure 5 and Figure 7 The first magnet part 11 includes one or more first magnet mechanisms 111, and the multiple first magnet mechanisms 111 are coaxially spaced and distributed in sequence along the z direction, and the relative positions between the multiple first magnet mechanisms 111 remain unchanged. The first magnet part 11 can include one, two, three or more first magnet mechanisms 111, for example. The number of first magnet mechanisms 111 can be specifically set according to the axial space of the vertical fine-tuning device. For example, when the axial space of the vertical fine-tuning device is not large, the first magnet part 11 can include one first magnet mechanism 111. When there is a large space along the axial direction, especially when the radial space is not large, the first magnet part 11 can include two or more first magnet mechanisms 111 spaced along the z direction. Among them, the magnetization direction of one or more first magnet mechanisms 111 is along its radial direction. By designing the first magnet part 11 with a multi-segment distribution structure, the intensity of the magnetic field distributed in the vertical fine-tuning device can be enhanced, thereby making the vertical fine-tuning device have a greater magnetic buoyancy and better driving performance.

[0067] In an optional embodiment, the multiple first magnet mechanisms 111 have the same structural dimensions and are equidistantly spaced in sequence along the z direction. The multiple first magnet mechanisms 111 have the same magnetizing directions and are along the radial direction. The multiple first magnet mechanisms 111 can be connected by brackets or other suitable methods to keep their relative positions unchanged.

[0068] Figure 8 Shows Figure 7 The force-displacement curve of the vertical fine-tuning device shown in FIG. Figure 8 In the figure, the position where the center plane of the first component 10 along the perpendicular direction to the z direction coincides with the center plane of the second component 20 along the perpendicular direction to the z direction is the zero point position, and the solid line below is Figure 7 The curve of magnetic buoyancy and displacement of the vertical fine-tuning device shown in the figure, the upper inclined dotted line is the curve of vertical resultant force and displacement of the vertical fine-tuning device, and the vertical spacing between the upper dotted line and the lower solid line is the Lorentz force of the vertical fine-tuning device at different displacements. According to the simulation calculation results, within a large stroke range, the magnetic buoyancy and vertical resultant force are close to linear changes with the displacement, so that the vertical fine-tuning device has a constant stiffness characteristic, and by setting the second coil 222, the magnetic field strength distributed in the vertical fine-tuning device can be enhanced, so that the vertical fine-tuning device has a larger magnetic buoyancy, and the driving performance of the vertical fine-tuning device is improved.

[0069] In this embodiment, refer to Fig. 9The first magnet mechanism 111 includes one or more coaxially arranged first magnets 1111, and the multiple first magnets 1111 are nested in sequence from the inside to the outside along the radial direction. The magnetization directions of the first magnets 1111 are all along the radial direction, and the magnetization directions of the multiple first magnets 1111 are the same, and the relative positions of the multiple first magnets 1111 remain unchanged. Among them, the first magnet 1111 can be a permanent magnet or other suitable magnetic structure that can generate a magnetic field. For example, the first magnet 1111 is a magnetic steel made of iron, aluminum, nickel, cobalt and other materials.

[0070] Specifically, for example, when the radial space of the vertical fine-tuning device is not large, the first magnet mechanism 111 may include one first magnet 1111. When the vertical fine-tuning device has sufficient radial space, especially when the vertical space of the vertical fine-tuning device is not large, the first magnet mechanism 111 may include two or more coaxially nested first magnets 1111. By providing a plurality of first magnets 1111 nested in sequence along the radial direction, the magnetic field strength distributed in the vertical fine-tuning device can be enhanced within a limited space, thereby enabling the vertical fine-tuning device to have greater magnetic buoyancy and Lorentz force, thereby improving the output thrust and space utilization of the vertical fine-tuning device.

[0071] In an optional embodiment, the first magnet mechanism 111 may also include one or more first intermediate back irons 112, the first intermediate back irons 112 are located between two radially adjacent first magnets 1111, and the first intermediate back irons 112 are respectively connected to the two adjacent first magnets 1111. Optionally, the first intermediate back iron 112 is fixedly connected to the first magnets 1111, for example, by bonding or other suitable means. By providing the first intermediate back iron 112, the magnetic field distribution can be improved, the performance of the vertical fine-tuning device can be improved, and the first component 10 can be formed into a whole, ensuring that the relative positions of the first magnets 1111 remain unchanged. The first intermediate back iron 112 can be made of high magnetic permeability material or other suitable materials.

[0072] Fig.10 Shows Fig. 9 The magnetic field line diagram inside the vertical fine-tuning device is shown in FIG. Fig.10: is a half-section view of the vertical fine-tuning device cut radially from the axis, in which the z-axis is the axis of the vertical fine-tuning device. The main magnetic lines of force in the vertical fine-tuning device flow through the first magnet 1111, the first coil 221, the first back iron 211, the external space, the second back iron 212, the second coil 222, and the first magnet 1111 in sequence to form a closed loop. The first coil 221 and the second coil 222 cut the magnetic field generated by the first magnet 1111, thereby generating a Lorentz force to achieve The driving function of the vertical fine-tuning device is that the upper and lower ends of the first magnet 1111 along the z direction respectively generate vertical magnetic buoyancy forces in opposite directions on the first back iron 211. When the center plane of the first magnet 1111 perpendicular to the z direction coincides with the center plane of the first back iron 211 perpendicular to the z direction, the magnetic buoyancy force on the first back iron 211 is zero. When the distance between the first back iron 211 and the first magnet 1111 deviates from the zero point position, the vertical Lorentz force on the first back iron 211 gradually increases.

[0073] Fig.11 Shows Fig. 9 The force and displacement curve of the vertical fine-tuning device is shown in FIG. Fig.11 The long dashed line with an approximate constant value above is Fig. 9 The curve of the Lorentz force and displacement of the vertical fine-tuning device is shown in Figure 1. The inclined solid line below is Fig. 9 The curve of magnetic buoyancy and displacement of the vertical fine-tuning device is shown in Figure 1. The short dashed line on the top is Fig. 9 The vertical resultant force and displacement curve of the vertical fine-tuning device is shown. Fig. 9 After one first magnet 1111 and the first middle back iron 112 in the vertical fine-tuning device are installed, and the sizes of the remaining first magnet 1111, the second coil 222 and the second back iron 212 are adaptively adjusted, the vertical resultant force and displacement curve of the vertical fine-tuning device obtained at this time is as shown in FIG. Fig.12 According to the simulation results and Fig.11 and Fig.12 It can be seen that by providing multiple first magnets 1111 nested in sequence along the radial direction, the magnetic field strength distributed in the vertical fine-tuning device can be enhanced within a limited space, thereby making the vertical fine-tuning device have greater magnetic buoyancy and Lorentz force, thereby improving the performance of the vertical fine-tuning device.

[0074] Fig.13 Shows Fig. 9 The vertical resultant force of the magnetic levitation force and the Lorentz force of the vertical fine-tuning device and the curve of the reverse force and displacement of the spring are shown. Fig.13In the figure, the short dashed line is the curve of the vertical resultant force and displacement of the vertical fine-tuning device, the long dashed line is the curve of the reverse force and displacement of the reed, and the solid line which is approximately a horizontal line is the curve of the resultant force and displacement of the two. It can be seen that the vertical fine-tuning device of this embodiment has a constant stiffness characteristic within a large stroke range of -3mm~3mm, and the stiffness of the reed is equal or approximately equal to the equivalent stiffness of the vertical resultant force, and the direction is opposite, so that the combined stiffness of the vertical fine-tuning device and the reed approaches zero, which effectively improves the heating problem of the voice coil motor in the vertical fine-tuning device and improves the positioning accuracy of the vertical micro-motion stage.

[0075] To sum up, the vertical fine-tuning device of this embodiment realizes the function of constant stiffness gravity compensation only through the first back iron 211, the first magnet part 11 and the second back iron 212, and can realize the constant stiffness vertical driving function in combination with the first coil 221 and the second coil 222. It has the characteristics of low heat generation, low power consumption, simple structure, small space occupation, constant stiffness within the travel range, etc., and realizes precise positioning of the vertical micro-motion stage, thereby improving the overall integration and control accuracy of the equipment.

[0076] Embodiment 2

[0077] This embodiment provides a vertical fine-tuning device, and the similarities with the first embodiment are not repeated here. The difference is that in the vertical fine-tuning device of this embodiment, the first component 10 also includes a central magnet 101, and the first back iron 211 is sleeved on the outer side of the central magnet 101.

[0078] In this embodiment, refer to Fig.14 The first back iron 211 is a cylindrical structure, and the central magnet 101 is arranged inside the first back iron 211, and is coaxial with the first back iron 211 and spaced apart from each other. The magnetization direction of the central magnet 101 is its radial direction, and the relative position of the central magnet 101 and the first magnet part 11 remains unchanged, for example, by a bracket or other suitable means, so that the relative position of the central magnet 101 and the first magnet part 11 remains unchanged. Optionally, the magnetization direction of the central magnet 101 is the same as the magnetization direction of the first magnet part 11.

[0079] Fig.15 Shows Fig.14 The force and displacement curve of the vertical fine-tuning device is shown in FIG. Fig.15 The lower solid line is Fig.14 The curve of magnetic buoyancy and displacement of the vertical fine-tuning device shown in the figure is shown in the figure. The upper solid line is Fig.14The vertical resultant force and displacement curve of the vertical fine-tuning device is shown. According to the simulation calculation results, by setting the central magnet 101, the intensity of the distributed magnetic field in the vertical fine-tuning device can be increased, so that the vertical fine-tuning device can provide a larger Lorentz force and magnetic buoyancy force, enhance the output thrust of the vertical fine-tuning device, and improve the working performance of the vertical fine-tuning device.

[0080] In an optional embodiment, the central magnet 101 can be a cylindrical structure to facilitate the installation and use of the vertical fine-tuning device. Furthermore, the height of the central magnet 101 and the height of the first magnet portion 11 are both smaller than the height of the first back iron 211. When the first component 10 and the second component 20 move relative to each other along the z direction, the central magnet 101 and the first magnet portion 11 can move between the plane where the top surface and the bottom surface of the first back iron 211 are located, so as to reserve movement space for both and ensure the improvement effect on the internal magnetic field distribution of the vertical fine-tuning device, thereby improving the performance of the vertical fine-tuning device. It should be noted that the central magnet 101 in this embodiment is applicable to any vertical fine-tuning device in Example 1.

[0081] Embodiment 3

[0082] This embodiment provides a vertical fine-tuning device, and the similarities with the first or second embodiment are not repeated here. The difference is that, among the one or more first magnet mechanisms 111, at least one first magnet mechanism 111 is provided with a first magnet tip 1101 at at least one end along the z direction.

[0083] Reference Figures 16 to 19 , the first magnet tip 1101 is located at at least one end of at least one first magnet mechanism 111. Specifically, the first magnet tip 1101 can be arranged at two opposite ends of the first magnet mechanism 111 along the z direction, or at one end of the first magnet mechanism 111 along the z direction. The first magnet tip 1101 can be arranged on one first magnet mechanism 111 in the vertical fine-tuning device, or on multiple first magnet mechanisms 111, or all first magnet mechanisms 111 of the vertical fine-tuning device are provided with the first magnet tip 1101. The first magnet tip 1101 can be obtained by cutting the first magnet mechanism 111 in any vertical fine-tuning device described in Embodiment 1 or Embodiment 2, or can also be obtained by other suitable methods. Optionally, the first magnet tip 1101 is arranged at two opposite ends of the first magnet mechanism 111 of the vertical fine-tuning device along the z direction.

[0084] The first magnet portion 11, for example, includes a first magnet mechanism 111, and a first magnet tip 1101 may be provided at one end of the first magnet mechanism 111 along the z direction, or both ends may be provided with first magnet tips 1101. The first magnet portion 11, for example, may include two first magnet mechanisms 111, and a first magnet tip 1101 may be provided at at least one end of one first magnet mechanism 111 along the z direction, or both first magnet mechanisms 111 may be provided with first magnet tips 1101 at at least one end along the z direction. The first magnet portion 11, for example, may also include three or more first magnet mechanisms 111, and a first magnet tip 1101 may be provided at at least one end of at least one first magnet mechanism 111 along the z direction.

[0085] In an optional embodiment, the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111 where it is located, specifically: the thickness gradually decreases from the end of the first magnet tip 1101 that contacts the first magnet mechanism 111 to the end away from the first magnet mechanism 111. The first magnet mechanism 111 is a gyroid structure, for example, a cylindrical structure, and the first magnet tip 1101 also has a cylindrical structure. In a cross-sectional view of the first magnet tip 1101 along its axial direction, the first magnet tip 1101 can be an arc-shaped tip, or the inner side surface and / or outer side surface of the first magnet tip 1101 are inclined surfaces inclined along its radial direction, so that the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111.

[0086] Further, refer to Figures 16 to 18 The inner side surface and the outer side surface of the first magnet tip 1101 are both inclined surfaces inclined along the radial direction. Specifically, for example, the inner side surface of the first magnet tip 1101 is inclined radially inward, and the outer side surface of the first magnet tip 1101 is inclined radially outward, so that the cross-sectional structure of the first magnet tip 1101 along its axial direction is approximately or is an isosceles trapezoidal structure, so that the thickness of the first magnet tip 1101 gradually decreases in the direction away from the first magnet mechanism 111.

[0087] Further, refer to Fig.19 The inner side surface or the outer side surface of the first magnet tip 1101 is an inclined surface inclined along its radial direction. Specifically, for example, the inner side surface of the first magnet tip 1101 is an inclined surface inclined radially outward, or the outer side surface of the first magnet tip 1101 is an inclined surface inclined radially inward, so that the cross-sectional structure of the first magnet tip 1101 along its axial direction is a right-angled trapezoidal structure, so that the thickness of the first magnet tip 1101 gradually decreases in the direction away from the first magnet mechanism 111.

[0088] In an alternative embodiment, Figure 8In the vertical fine-tuning device shown in the figure, the top of the first magnet mechanism 111 located at the top along the z direction is obtained by subtracting the ring structure of the right-angled triangle cross section from the inner side and the outer side of the ring structure. Fig.17 The vertical fine adjustment device shown. Fig. 20 Shows Fig.17 The cross-sectional structure of the first magnet tip 1101 along the axial direction in the vertical fine-tuning device shown is an isosceles trapezoidal structure, and the angle between the inner side or outer side of the first magnet tip 1101 and the z direction is recorded as the inclination angle α. Fig.21 Shows Fig.17 The vertical resultant force and displacement curve of the magnetic levitation force and Lorentz force of the vertical fine-tuning device shown in FIG. Fig. 22 Shows Fig.17 The thrust constant and displacement curve of the vertical fine-tuning device shown in FIG. 1 is the Lorentz force of the vertical fine-tuning device at unit current input. Fig.21 and Fig. 22 The multiple curves from top to bottom in the figure correspond to the vertical fine-tuning devices with gradually increasing inclination angles α. Based on the simulation calculation results of the vertical fine-tuning devices with the first magnet tips 1101 having different inclination angles, it can be known that for the vertical fine-tuning devices provided with the first magnet tips 1101 having different inclination angles, the thrust constant of the vertical fine-tuning devices has a slight change, that is, the Lorentz force generated by the vertical fine-tuning devices has not sent a significant change, and the first magnet tip 1101 of this embodiment has not affected the driving ability of the vertical fine-tuning devices. It can be seen that the vertical fine-tuning device of this embodiment, by providing the first magnet tip 1101, can reduce the equivalent stiffness of the vertical fine-tuning device without reducing its driving effect, and when the inclination angle α of the first magnet tip 1101 gradually increases, the equivalent stiffness of the vertical fine-tuning device gradually decreases.

[0089] In an optional embodiment, in one or more first magnet mechanisms 111 of the vertical fine-tuning device, a first annular groove 1102 is provided on the inner side surface and / or the outer side surface of at least one first magnet mechanism 111, and the first annular groove 1102 is coaxially arranged with the first magnet mechanism 111 and is located at at least one end of the first magnet mechanism 111 along the z direction. Specifically, the first annular groove 1102 can be provided on the inner side surface or the outer side surface of the first magnet mechanism 111, at at least one end of the first magnet mechanism 111 along the z direction, or the first annular groove 1102 can be provided on the inner side surface and the outer side surface of the first magnet mechanism 111, at at least one end of the first magnet mechanism 111 along the z direction. The specific arrangement of the first annular groove 1102 can refer to the first magnet tip 1101 described above.

[0090] Further, refer to Fig.23The vertical fine-tuning device includes two first magnet mechanisms 111. The first magnet mechanisms 111 are provided with first annular grooves 1102 on the inner and outer sides at opposite ends along the z direction. The first annular grooves 1102 may be V-shaped grooves of annular structure or grooves of other suitable structures. Specifically, the first annular groove 1102 may be, for example, a V-shaped groove of annular structure, and in a cross-sectional view of the first magnet mechanism 111 through its axis, one side of the V-shaped groove is perpendicular to the z direction, so that the V-shaped groove presents a vertical check-mark structure. By providing the first annular groove 1102 in the first magnet mechanism 111, the equivalent stiffness of the vertical fine-tuning device can also be reduced without reducing the driving effect of the vertical fine-tuning device.

[0091] Embodiment 4

[0092] This embodiment provides a vertical fine-tuning device, and the similarities with any of the first to third embodiments are not repeated here. The difference is that in the vertical fine-tuning device of this embodiment, the first component 10 also includes one or more second magnet parts 12, and the second component 20 also includes one or more third coils 223.

[0093] In this embodiment, refer to Fig.24 and Fig.25 , the second magnetic part 12 and the third coil 223 are coaxial and spaced apart from each other, and the second magnetic part 12 and the third coil 223 are alternately nested in the radial direction. The second magnetic part 12 and the third coil 223 can be located between the first magnetic part 11 and the first coil 221, or can be arranged around the outside of the first magnetic part 11; optionally, the second component 20 also includes a second back iron 212 and a second coil 222, and the second magnetic part 12 and the third coil 223 can also be located between the first magnetic part 11 and the second coil 222. The second magnetic part 12 and the first coil 221 and the second coil 222 are spaced apart from each other, and the third coil 223 and the first magnetic part 11 are spaced apart from each other.

[0094] In an alternative embodiment, reference Fig.25 The second magnet portion 12 and the third coil 223 are located between the first magnet portion 11 and the first coil 221, and the second magnet portion 12 and the third coil 223 are nested in sequence from the inside to the outside along the radial direction. The structure formed by the nesting of the second magnet portion 12 and the third coil 223 is recorded as an alternating structure, and the innermost structure of the alternating structure is the second magnet portion 12, and the outermost structure is the third coil 223.

[0095] In an alternative embodiment, reference Fig.24 , Fig.24A half-section view of a vertical fine-tuning device cut radially from the axis is shown, in which the z-axis is the axis of the vertical fine-tuning device, the second magnet portion 12 and the third coil 223 are located between the first magnet portion 11 and the second coil 222, and the third coil 223 and the second magnet portion 12 are nested in sequence from the inside to the outside along the radial direction. In the alternating structure formed by the third coil 223 and the second magnet portion 12, the innermost structure of the alternating structure is the third coil 223, and the outermost structure is the second magnet portion 12.

[0096] In this embodiment, refer to Fig.25 The second magnet portion 12 includes one or more coaxially arranged second magnet mechanisms 121, and the multiple second magnet mechanisms 121 are distributed in sequence along the z direction, and the relative positions of the multiple second magnet mechanisms 121 remain unchanged. The second magnet portion 12 may, for example, include one, two, three or more first magnet mechanisms 121, and the number of second magnet mechanisms 121 can be specifically set according to the axial space of the vertical fine-tuning device.

[0097] In an optional embodiment, the multiple second magnet mechanisms 121 have the same structural dimensions and are equidistantly spaced in sequence along the z direction. The multiple second magnet mechanisms 121 have the same magnetizing directions and are along the radial direction. The multiple second magnet mechanisms 121 can be connected by brackets or other suitable methods to keep their relative positions unchanged.

[0098] In this embodiment, the specific structure, size and arrangement of the second magnet mechanism 121 may refer to any of the first magnet mechanisms 111 in the aforementioned embodiments.

[0099] Reference Fig.25 , Fig.25 A half-section view of a vertical fine-tuning device cut radially from the axis is shown, in which the z-axis is the axis of the vertical fine-tuning device, and the second magnet mechanism 121 includes one or more coaxially arranged second magnets 1211, and the plurality of second magnets 1211 are nested in sequence from the inside to the outside along the radial direction, and the magnetization directions of the second magnets 1211 are all along the radial direction, and the magnetization directions of the plurality of second magnets 1211 are the same, and the relative positions between the plurality of second magnets 1211 remain unchanged. Among them, the second magnet 1211 can be a permanent magnet or other suitable magnet structure capable of generating a magnetic field.

[0100] In an optional embodiment, the second magnet mechanism 121 may further include one or more second intermediate back irons 1212 , wherein the second intermediate back irons 1212 are located between two radially adjacent second magnets 1211 , and the second intermediate back irons 1212 are respectively connected to the two second magnets 1211 adjacent thereto.

[0101] In this embodiment, the specific structural dimensions and arrangement of the second magnet 1211 and the second middle back iron 1212 can refer to any of the first magnet 1111 and the first middle back iron 112 in the aforementioned embodiments.

[0102] In an alternative embodiment, reference Fig.26 , Fig.26 A half-section view of a vertical fine-tuning device cut radially from the axis is shown, in which the z-axis is the axis of the vertical fine-tuning device. Among the one or more second magnet mechanisms 121 of the vertical fine-tuning device, at least one second magnet mechanism 121 is provided with a second magnet tip 1201 at at least one end along the z-direction. Specifically, the second magnet tip 1201 can be provided at two opposite ends of the second magnet mechanism 121 along the z-direction, or at one end of the second magnet mechanism 121 along the z-direction. The second magnet tip 1201 can be provided on one second magnet mechanism 121 in the vertical fine-tuning device, or on multiple second magnet mechanisms 121, or all second magnet mechanisms 121 of the vertical fine-tuning device are provided with the first magnet tip 1201. Optionally, the thickness of the second magnet tip 1201 gradually decreases in the direction away from the second magnet mechanism 121 where it is located.

[0103] In this embodiment, the specific structure size and arrangement of the second magnet tip 1201 can refer to any one of the first magnet tips 1101 in the third embodiment.

[0104] In an alternative embodiment, reference Fig. 27 , Fig. 27 A half-section view of a vertical fine-tuning device cut radially from the axis is shown, in which the z-axis is the axis of the vertical fine-tuning device. Among the one or more second magnet mechanisms 121 of the vertical fine-tuning device, at least one second magnet mechanism 121 is provided with a second annular groove 1202 on the inner side surface and / or outer side surface, and the second annular groove 1202 is located at at least one end of the second magnet mechanism 121 along the z direction. Specifically, the second annular groove 1202 can be provided on the inner side surface or outer side surface of the second magnet mechanism 121, at at least one end of the second magnet mechanism 121 along the z direction, or the second annular groove 1202 can be provided on the inner side surface and outer side surface of the second magnet mechanism 121, at at least one end of the second magnet mechanism 121 along the z direction.

[0105] In this embodiment, the specific structural dimensions and layout of the second annular groove 1202 may refer to any of the first annular grooves 1102 in the third embodiment.

[0106] In an alternative embodiment, reference Fig.26The second component 20 also includes one or more third back irons 213, which are nested with the third coil 223 and connected to the third coil 223. The third back iron 213 is spaced apart from the second magnetic part 12 and the first magnetic part 11. The third coil 223 can be directly connected to the third back iron 213, or can be connected to the third back iron 213 through a coil bracket. The third back iron 213 can be coaxially sleeved on the outside of the third coil 223, or the third back iron 213 can also be coaxially ringed on the inside of the third coil 223. The third back iron 213 can be made of high magnetic permeability material or other suitable materials. By setting the third back iron 213, it is helpful to improve the magnetic field distribution, improve the performance of the vertical fine-tuning device, and facilitate the installation and use of the vertical fine-tuning device.

[0107] In an alternative embodiment, reference Fig. 27 The second component 20 further includes one or more fourth coils 224, which are nested with the third back iron 213. The third back iron 213 is located between the third coil 223 and the fourth coil 224, and is connected to the third coil 223 and the fourth coil 224 respectively. The fourth coil 224 can be directly connected to the third back iron 213 or connected to the third back iron 213 through a coil bracket. The fourth coil 224 is spaced apart from the second magnetic part 12 and the first magnetic part 11.

[0108] Fig.28 Shows Fig.24 The force-displacement curve of the vertical fine-tuning device shown in Fig. Fig.28 , the upper long dashed line is a curve of vertical resultant force and displacement when the first coil 221, the second coil 222 and the third coil 223 are all passed through a current of 500 A, the middle short dashed line is a curve of vertical resultant force and displacement when the first coil 221, the second coil 222 and the third coil 223 are all passed through a current of 0 A, and the lower solid line is a curve of vertical resultant force and displacement when the first coil 221, the second coil 222 and the third coil 223 are all passed through a current of -500 A.

[0109] In this embodiment, by setting the second magnet portion 12, the strength of the magnetic field distributed in the vertical fine-tuning device can be further enhanced, thereby further improving the magnetic levitation force of the vertical fine-tuning device. By setting the third coil 223 and / or the fourth coil 224, the Lorentz force generated between the first component 10 and the second component 20 can be further enhanced, thereby further enhancing the driving ability of the vertical fine-tuning device.

[0110] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify, change or combine the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A vertical fine-tuning device, characterized in that: It comprises a first component (10) and a second component (20) which are coaxial and spaced apart from each other, with the axial direction of the first component (10) being a z direction, and the first component (10) and the second component (20) being able to move relative to each other along the z direction; The first component (10) comprises a first magnetic part (11), and the magnetization direction of the first magnetic part (11) is its radial direction; The second component (20) comprises a first back iron (211) and a first coil (221); the first magnetic portion (11) is coaxially sleeved on the outside of the first back iron (211); the first coil (221) is located between the first magnetic portion (11) and the first back iron (211); the first coil (221) is spaced apart from the first magnetic portion (11) and is connected to the first back iron (211); The second component (20) further comprises a second back iron (212), wherein the second back iron (212) is coaxially sleeved on the outside of the first magnet portion (11) and spaced apart from the first magnet portion (11).

2. The vertical fine-tuning device according to claim 1, characterized in that: The first component (10) further comprises a central magnet (101), the first back iron (211) being coaxially sleeved on the outside of the central magnet (101) and spaced apart from the central magnet (101), and the magnetization direction of the central magnet (101) being its radial direction.

3. The vertical fine-tuning device according to claim 1, characterized in that: The second component (20) further comprises a second coil (222), the second coil (222) being located between the first magnetic part (11) and the second back iron (212), the second coil (222) being spaced apart from the first magnetic part (11) and connected to the second back iron (212).

4. The vertical fine-tuning device according to claim 1, characterized in that: The first magnet part (11) comprises one or more coaxially arranged first magnet mechanisms (111), wherein the plurality of first magnet mechanisms (111) are sequentially spaced and distributed along the z direction, and the relative positions between the plurality of first magnet mechanisms (111) remain unchanged.

5. The vertical fine-tuning device according to claim 4, characterized in that: At least one end of at least one of the first magnet mechanisms (111) along the z direction is provided with a first magnet tip (1101), and the thickness of the first magnet tip (1101) gradually decreases in a direction away from the first magnet mechanism (111) where the first magnet tip is located.

6. The vertical fine-tuning device according to claim 4, characterized in that: A first annular groove (1102) is provided on the inner side surface and / or the outer side surface of at least one of the first magnet mechanisms (111), and the first annular groove (1102) is located at at least one end of the first magnet mechanism (111) along the z direction.

7. The vertical fine-tuning device according to claim 4, characterized in that: The first magnet mechanism (111) comprises one or more coaxially arranged first magnets (1111), wherein the plurality of first magnets (1111) are nested in sequence from the inside to the outside along a radial direction thereof, a first intermediate back iron (112) is arranged between two adjacent first magnets (1111), the first intermediate back iron (112) is respectively connected to two adjacent first magnets (1111), and the magnetization direction of the first magnets (1111) is its radial direction.

8. The vertical fine-tuning device according to claim 1, characterized in that: The first component (10) further comprises one or more second magnet parts (12), the second component (20) further comprises one or more third coils (223), the second magnet parts (12) and the third coils (223) being coaxial and spaced apart from each other and alternately nested in sequence along the radial direction; The second magnet portion (12) and the third coil (223) are located between the first magnet portion (11) and the first coil (221), or are arranged in a ring between the first magnet portion (11) and the second back iron (212).

9. The vertical fine-tuning device according to claim 8, characterized in that: The second magnet part (12) comprises one or more coaxially arranged second magnet mechanisms (121), wherein the plurality of second magnet mechanisms (121) are sequentially spaced and distributed along the z direction, and the relative positions between the plurality of second magnet mechanisms (121) remain unchanged.

10. The vertical fine-tuning device according to claim 9, characterized in that: At least one end of at least one of the second magnet mechanisms (121) along the z direction is provided with a second magnet tip (1201), and the thickness of the second magnet tip (1201) gradually decreases in a direction away from the second magnet mechanism (121) where the second magnet tip (1201) is located.

11. The vertical fine-tuning device according to claim 9, characterized in that: A second annular groove (1202) is provided on the inner side surface and / or the outer side surface of at least one of the second magnet mechanisms (121), and the second annular groove (1202) is located at at least one end of the second magnet mechanism (121) along the z direction.

12. The vertical fine-tuning device according to claim 9, characterized in that: The second magnet mechanism (121) comprises one or more coaxially arranged second magnets (1211), wherein the plurality of second magnets (1211) are nested in sequence from the inside to the outside along the radial direction thereof, a second intermediate back iron (1212) is arranged between two adjacent second magnets (1211), the second intermediate back iron (1212) is respectively connected to two adjacent second magnets (1211), and the magnetization direction of the second magnet (1211) is its radial direction.

13. The vertical fine-tuning device according to claim 8, characterized in that: The second component (20) further comprises one or more third back irons (213), wherein the third back irons (213) are nested with the third coil (223), the third back irons (213) are connected to the third coil (223), and are spaced apart from the first magnet portion (11) and the second magnet portion (12).

14. The vertical fine-tuning device according to claim 13, characterized in that: The second component (20) further comprises one or more fourth coils (224), wherein the fourth coils (224) are nested with the third back iron (213), the third back iron (213) is located between the third coil (223) and the fourth coil (224), the fourth coil (224) is connected to the third back iron (213), and is spaced apart from the first magnet portion (11) and the second magnet portion (12).

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