A vertical fine-tuning device

Abstract

This application belongs to the field of semiconductor manufacturing technology, and provides a vertical fine-tuning device, which includes a first component and a second component spaced apart from each other. The first component includes a first magnet part along a certain direction. The second component includes a first back iron and a first coil nestedly arranged. The first magnet part is coaxially sleeved outside the first back iron. The first coil is located between the first magnet part and the first back iron. The first coil is spaced from the first magnet part and is connected to the first back iron. The magnetization direction of the first magnet part is its radial direction. A magnetic buoyancy force and a Lorentz force are generated between the second component and the first component. Through the magnetic buoyancy force, the compensation for the gravity of the vertical micro-stage and the reverse acting force of the reed can be realized. Through the Lorentz force, the driving effect on the vertical micro-stage is realized. The resultant force of the magnetic buoyancy force and the Lorentz force changes linearly within a relatively large displacement range of the vertical micro-stage, so that the vertical fine-tuning device has a constant stiffness characteristic, and the heating problem of the voice coil motor in the vertical fine-tuning device is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technologies, and particularly to a vertical fine-tuning device. Background Art

[0002] In the fields of semiconductor manufacturing and detection, a workpiece stage not only needs to complete the device handover with a semiconductor transfer system, but also needs to achieve precise positioning of the semiconductor device carried. With the continuous improvement of the requirements for the productivity and precision of semiconductor manufacturing and detection, the requirements for the working performance of the workpiece stage, such as its running speed and acceleration, are also getting higher and higher. A vertical micro-stage is provided in the workpiece stage for achieving precise positioning of the semiconductor device. The vertical micro-stage usually adopts a three-point or four-point actuator layout. To ensure its vertical output performance, a reed is used as the guiding element for vertical movement and to achieve decoupling of pitch and yaw, which can greatly improve the control precision of the vertical micro-stage. In the workpiece stage with the above structure, to improve the control precision of the vertical displacement of the vertical micro-stage, the actuator not only needs to provide a vertical driving force during the movement process, but also needs to overcome the gravity of the vertical movement load and the reverse force of the reed.

[0003] Currently, the realization of the vertical movement of the vertical micro-stage usually adopts a combined scheme of a gravity compensation device and a voice coil motor to improve the control precision of the vertical micro-stage. Among them, the gravity compensation device compensates for the mass of the vertical driving load of the vertical micro-stage in a constant gravity compensation manner based on principles such as air floating or magnetic floating; the voice coil motor serves as a vertical actuator to provide the reverse force of the reed and the driving force for the vertical movement of the vertical micro-stage. However, the reverse force of the reed is linearly related to the displacement. In different vertical stroke ranges, the reverse force of the reed is different, which will affect the output force of the voice coil motor differently, resulting in increased heating of the voice coil motor, and further causing poor control precision of the vertical micro-stage provided with the voice coil motor. Summary of the Invention

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of this application is to provide a vertical fine-tuning device for realizing the vertical movement of a vertical micro-stage, so as to solve the problem in the prior art that the heating of the voice coil motor increases, resulting in poor control precision of the vertical micro-stage provided with the voice coil motor.

[0005] To achieve the above purpose and other related purposes, this application provides a vertical fine-tuning device, including a first component and a second component that are coaxially arranged and spaced apart from each other. Taking the axial direction of the first component as the z direction, the first component and the second component can move relative to each other along the z direction;

[0006] The first component includes a first magnet part, and the magnetization direction of the first magnet part is its radial direction;

[0007] The second component includes a first back iron and a first coil. The first magnet part is coaxially sleeved outside the first back iron. The first coil is located between the first magnet part and the first back iron. The first coil is spaced from the first magnet part and connected to the first back iron.

[0008] Optionally, the first component further includes a central magnet. The first back iron is coaxially sleeved outside the central magnet and spaced from the central magnet. The magnetization direction of the central magnet is its radial direction.

[0009] Optionally, the second component further includes a second back iron. The second back iron is coaxially sleeved outside the first magnet part and spaced from the first magnet part.

[0010] Optionally, the second component further includes a second coil. The second coil is located between the first magnet part and the second back iron. The second coil is spaced from the first magnet part and connected to the second back iron.

[0011] Optionally, the first magnet part includes one or more coaxially arranged first magnet mechanisms. A plurality of the first magnet mechanisms are sequentially spaced apart along the z direction, and the relative positions between the plurality of the first magnet mechanisms remain unchanged.

[0012] Optionally, at least one end of at least one of the first magnet mechanisms in the z direction is provided with a first magnet tip. The thickness of the first magnet tip gradually decreases in a direction away from the first magnet mechanism where it is located.

[0013] Optionally, a first annular groove is provided on the inner side surface and / or the outer side surface of at least one of the first magnet mechanisms. The first annular groove is located at at least one end of the first magnet mechanism in the z direction.

[0014] Optionally, the first magnet mechanism includes one or more coaxially arranged first magnets. A plurality of the first magnets are sequentially nested from the inside to the outside in the radial direction thereof. A first intermediate back iron is provided between two adjacent first magnets. The first intermediate back iron is respectively connected to the two adjacent first magnets. The magnetization direction of the first magnet is its radial direction.

[0015] Optionally, the first component further includes one or more second magnet parts. The second component further includes one or more third coils. The second magnet parts and the third coils are coaxial and spaced from each other, and are sequentially and alternately nested along the radial direction;

[0016] The second magnet parts and the third coils are located between the first magnet part and the first coil, or are arranged around the outside of the first magnet part.

[0017] Optionally, the second magnet part includes one or more second magnet mechanisms arranged coaxially. A plurality of the second magnet mechanisms are sequentially and spaced apart along the z direction, and the relative positions between the plurality of the second magnet mechanisms remain unchanged.

[0018] Optionally, at least one end of at least one of the second magnet mechanisms along the z direction is provided with a second magnet tip, and the thickness of the second magnet tip gradually decreases in a direction away from the second magnet mechanism where it is located.

[0019] Optionally, a second annular groove is provided on the inner side surface and / or the outer side surface of at least one of the second magnet mechanisms, and the second annular groove is located at at least one end of the second magnet mechanism along the z direction.

[0020] Optionally, the second magnet mechanism includes a plurality of second magnets arranged coaxially. The plurality of second magnets are nested with each other in sequence from the inside to the outside in the radial direction thereof. A second intermediate back iron is provided between two adjacent second magnets. The second intermediate back iron is respectively connected to the two adjacent second magnets, and the magnetization direction of the second magnet is its radial direction.

[0021] Optionally, the second component further includes one or more third back irons. The third back irons are nested with the third coils. The third back irons are connected to the third coils and are spaced apart from the first magnet part and the second magnet part.

[0022] Optionally, the second component further includes one or more fourth coils. The fourth coils are nested with the third back irons. The third back irons are located between the third coils and the fourth coils. The fourth coils are connected to the third back irons and are spaced apart from the first magnet part and the second magnet part.

[0023] As described above, compared with the prior art, the vertical fine-tuning device provided by the present application has at least the following beneficial effects:

[0024] In the vertical fine-tuning device of the present application, the first magnet part constitutes the first component of the vertical fine-tuning device, and the first back iron and the first coil constitute the second component of the vertical fine-tuning device. The magnetic buoyancy force generated by the first component on the second component can compensate for the gravity of the vertical micro-stage and the elastic force of the reed, and the Lorentz force generated between the first component and the second component can realize the driving effect on the vertical micro-stage.

[0025] In the vertical fine-tuning device, the first magnet part, the first back iron, and the first coil can form a voice coil motor. In different vertical stroke ranges, the vertical resultant force of the magnetic buoyancy force and the Lorentz force of the vertical fine-tuning device changes linearly within a relatively large displacement range of the vertical micro-stage, enabling the vertical fine-tuning device of the present application to have a constant stiffness characteristic. By adjusting the equivalent stiffness of the vertical fine-tuning device, the forces exerted on the vertical micro-stage by the vertical fine-tuning device and the reed can be made equal in magnitude and opposite in direction. Thus, the vertical resultant force exerted on the vertical micro-stage by the two is a zero-stiffness curve, effectively improving the heat generation problem of the voice coil motor in the vertical fine-tuning device and enhancing the positioning accuracy of the vertical micro-stage.

[0026] Moreover, the vertical fine-tuning device of the present application realizes the function of constant stiffness gravity compensation only through the first magnet part and the first back iron, and realizes the driving function of the vertical fine-tuning device with constant stiffness through the first coil, the first magnet part, and the first back iron. It has a simple structure and occupies a small space.

[0027] In summary, the vertical fine-tuning device of the present application has the characteristics of small heat generation, low power consumption, simple structure, small occupied space, and constant stiffness within the vertical stroke range, achieving precise positioning of the vertical micro-stage and improving the overall integration and control accuracy of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0029] Figure 1 It shows a schematic structural diagram of a vertical fine-tuning device provided by an embodiment of the present application.

[0030] Figure 2 Shown as Figure 1 The force-displacement curve diagram of the vertical fine-tuning device shown.

[0031] Figure 3 It shows a schematic structural diagram of a vertical fine-tuning device with a second back iron provided by Embodiment 1 of the present application.

[0032] Figure 4 Shown as Figure 3 The force-displacement curve diagram of the vertical fine-tuning device shown.

[0033] Figure 5 It shows a schematic structural diagram of a vertical fine-tuning device with a second coil provided by Embodiment 1 of the present application.

[0034] Figure 6 Shown as Figure 5 The force-displacement curve of the vertical fine-tuning device shown in the figure.

[0035] Figure 7 Shown as the schematic structural diagram of a vertical fine-tuning device with two first magnet mechanisms provided in Embodiment 1 of the present application.

[0036] Figure 8 Shown as Figure 7 The force-displacement curve of the vertical fine-tuning device shown in the figure.

[0037] Figure 9 Shown as the schematic structural diagram of a vertical fine-tuning device with a first intermediate back iron provided in Embodiment 1 of the present application.

[0038] Figure 10 Shown as Figure 9 The magnetic field line diagram inside the vertical fine-tuning device shown in the figure.

[0039] Figure 11 Shown as Figure 9 The force-displacement curve of the vertical fine-tuning device shown in the figure.

[0040] Figure 12 Shown as Figure 9 The force-displacement curve of the vertical fine-tuning device after removing one first magnet and the first intermediate back iron.

[0041] Figure 13 Shown as Figure 10 The curve of the vertical resultant force of the vertical fine-tuning device and the reverse acting force of the reed versus displacement shown in the figure.

[0042] Figure 14 Shown as the schematic structural diagram of a vertical fine-tuning device provided in Embodiment 2 of the present application.

[0043] Figure 15 Shown as Figure 14 The force-displacement curve of the vertical fine-tuning device shown in the figure.

[0044] Figures 16 to 19 Shown respectively as the schematic structural diagrams of four different structures of vertical fine-tuning devices provided in Embodiment 3 of the present application.

[0045] Figure 20 Shown as Figure 17 The cross-sectional structure diagram of the tip of the first magnet along the axial direction in the vertical fine-tuning device shown in the figure.

[0046] Figure 21 Shown as Figure 17 The curve of the vertical resultant force versus displacement when the side of the tip of the first magnet in the vertical fine-tuning device has different angles with the z direction shown in the figure.

[0047] Figure 22 Shown as Figure 17 The curve graph of the thrust constant and displacement when the side surface of the first magnet tip in the vertical fine-tuning device shown has different included angles with the z direction.

[0048] Figure 23 Shown as the schematic structural diagram of a vertical fine-tuning device with a first annular groove provided in the third embodiment of the present application.

[0049] Figures 24 to 27 Shown respectively as the schematic structural diagrams of four different structural vertical fine-tuning devices provided in the fourth embodiment of the present application.

[0050] Figure 28 Shown as Figure 24 The force-displacement curve graph of the vertical fine-tuning device shown.

[0051] Schematic illustration of reference numerals:

[0052] 10. First component; 101. Central magnet; 11. First magnet part; 111. First magnet mechanism; 1101. First magnet tip; 1102. First annular groove; 1111. First magnet; 112. First intermediate back iron; 12. Second magnet part; 121. Second magnet mechanism; 1201. Second magnet tip; 1202. Second annular groove; 1211. Second magnet; 1212. Second intermediate back iron; 20. Second component; 211. First back iron; 212. Second back iron; 213. Third back iron; 221. First coil; 222. Second coil; 223. Third coil; 224. Fourth coil. Detailed implementation manners

[0053] To make the technical objectives, technical solutions and technical effects of the present application clearer, the technical solutions in the present application will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Usually, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0054] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the present application to be protected, but only represents the selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0055] In the description of the present application, it should be noted that the descriptions with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples" or "some examples" mean that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0056] Referring to Figure 1 , the present application provides a vertical fine-tuning device for realizing the vertical movement of a vertical micro-stage, which includes a first component 10 and a second component 20 arranged at intervals from each other. The first component 10 and the second component 20 are coaxially arranged. Taking the axial direction of the first component 10 as the z-direction, the first component 10 and the second component 20 can move relative to each other along the z-direction.

[0057] The first component 10 includes a first magnet part 11, and the magnetization direction of the first magnet part 11 is its radial direction. The second component 20 includes a first back iron 211 and a first coil 221. The first magnet part 11 is coaxially sleeved outside the first back iron 211. The first coil 221 is located between the first magnet part 11 and the first back iron 211. The first coil 221 is connected to the first back iron 211 and is arranged at an interval from the first magnet part 11. The magnetic field generated by the first magnet part 11 can apply a magnetic buoyancy force upward or downward along the z-direction to the first back iron 211. Within the stroke range of the vertical fine-tuning device, this magnetic buoyancy force has a linear relationship with the displacement. Therefore, the magnetic buoyancy force can compensate for the gravity of the vertical micro-stage and the reverse acting force of the reed. The first magnet part 11 generates a magnetic field in its surrounding space. When an electric current passes through the first coil 221, the first coil 221 cuts the magnetic field and then generates a Lorentz force. The resultant force direction of the Lorentz force received by the first coil 221 is along the z-direction, and the driving effect on the vertical micro-stage can be realized.

[0058] In use, the first magnet part 11, the first coil 221, and the first back iron 211 form a voice coil motor. Within different vertical stroke ranges, the vertical resultant force of the magnetic buoyancy force and the Lorentz force generated by the vertical fine-tuning device has a linear variation relationship within a relatively large displacement range, enabling the vertical fine-tuning device to have a constant stiffness characteristic. The reed is arranged between the mover of the vertical fine-tuning device and the external load, and the reverse acting force of the reed also has a linear relationship with the displacement. By adjusting the equivalent stiffness of the vertical fine-tuning device, it is possible to make the forces exerted on the vertical micro-stage by the vertical fine-tuning device and the reed the same or substantially the same in magnitude and opposite in direction, that is, the vertical resultant force trend exerted by the two on the vertical micro-stage is a zero-stiffness curve. Therefore, through the vertical fine-tuning device, it is possible to accurately compensate for the gravity of the vertical micro-stage and the reverse acting force of the reed, and effectively improve the heating problem of the voice coil motor in the vertical fine-tuning device, and improve the positioning accuracy of the vertical micro-stage.

[0059] To describe the vertical fine-tuning device of the present application in more detail, the technical solutions in the present application will be described below in conjunction with specific embodiments. It should be noted that, on the premise of not conflicting, the technical features and technical solutions in each embodiment can be combined and used with each other.

[0060] Embodiment 1

[0061] Referring to Figure 1 , this embodiment provides a vertical fine-tuning device, which includes a first component 10 and a second component 20 arranged at intervals from each other. The first component 10 and the second component 20 are coaxially arranged. Taking the axial direction of the first component 10 as the z direction, the first component 10 and the second component 20 can move relative to each other along the z direction.

[0062] In this embodiment, the first component 10 can be used as the stator, and the second component 20 as the mover. By controlling the movement of the second component 20 along the z direction, the first component 10 and the second component 20 can move relative to each other along the z direction. Alternatively, the first component 10 is used as the mover, and the second component 20 as the stator. By controlling the movement of the first component 10 along the z direction, the first component 10 and the second component 20 can move relative to each other along the z direction.

[0063] The first component 10 includes a first magnet part 11, the second component 20 includes a first back iron 211 and a first coil 221. The first magnet part 11 is coaxially sleeved outside the first back iron 211. The first coil 221 is located between the first magnet part 11 and the first back iron 211. The first coil 221 is arranged at intervals from the first magnet part 11 and is connected to the first back iron 211. The first magnet part 11, the first back iron 211, and the first coil 221 can form a voice coil motor. Among them, the magnetization direction of the first magnet part 11 is its radial direction, and its magnetization direction can be from the inside to the outside along the radial direction, or from the outside to the inside along the radial direction.

[0064] Figure 2 shows Figure 1 the force-displacement curve of the vertical fine-tuning device shown, Figure 2 In the figure, the lower solid line is the curve of the magnetic buoyancy force and displacement of the vertical fine-tuning device, and the upper dotted line is the curve of the vertical resultant force of the magnetic buoyancy force and the Lorentz force of the vertical fine-tuning device and displacement. The vertical distance between the upper dotted line and the lower solid line is the Lorentz force of the vertical fine-tuning device at different displacements. According to the simulation calculation results, within the range of -2mm to 2mm stroke, the changes of the magnetic buoyancy force and the vertical resultant force of the magnetic buoyancy force and the Lorentz force with displacement both tend to be linear changes. It can be seen that within the vertical stroke range, the vertical fine-tuning device has the characteristic of constant stiffness. The reed is arranged between the mover and the vertical micro-stage. By adjusting the equivalent stiffness of the vertical fine-tuning device, the forces exerted on the vertical micro-stage by the vertical fine-tuning device and the reed can be made equal in magnitude and opposite in direction, so that the vertical resultant force jointly exerted on the vertical micro-stage tends to be a zero-stiffness curve, thus improving the compensation accuracy for the gravity of the vertical micro-stage and the reverse force of the reed, improving the heating problem of the voice coil motor in the vertical fine-tuning device, and enabling precise positioning of the vertical micro-stage, thereby improving the control accuracy of the vertical micro-stage.

[0065] In this embodiment, the first coil 221 can be directly connected to the first back iron 211 or can be connected to the first back iron 211 through a coil bracket. The first magnet part 11 constitutes the first component 10, and the first coil 221 and the first back iron 211 constitute the second component 20. Through the magnetic buoyancy force generated between the first component 10 and the second component 20, the gravity of the vertical micro-stage and the reverse force of the reed can be compensated. Through the Lorentz force generated between the first component 10 and the second component 20, the driving effect of the vertical fine-tuning device on the vertical micro-stage can be realized.

[0066] In this embodiment, referring to Figure 3 , the second component 20 may further include a second back iron 212. The second back iron 212 is sleeved outside the first magnet part 11. The second back iron 212 is coaxially arranged with the first magnet part 11 and is spaced apart from the first magnet part 11 to improve the magnetic field distribution to improve the performance inside the vertical fine-tuning device. Optionally, the relative positions of the second back iron 212 and the first back iron 211 remain unchanged. The first back iron 211 and the second back iron 212 can be made of high-permeability materials, and connecting members can be used to connect to the first back iron 211 and the second back iron 212 respectively to keep the relative positions of the first back iron 211 and the second back iron 212 unchanged.

[0067] Figure 4 shows Figure 3 the force-displacement curve of the vertical fine-tuning device shown, Figure 4In [the figure], the position where the central plane of the first component 10 perpendicular to the z-direction coincides with the central plane of the second component 20 perpendicular to the z-direction is taken as the zero position, and the solid line below is Figure 3 the magnetic buoyancy displacement curve of the vertical fine-tuning device shown, and the dashed line above is Figure 3 the vertical resultant force displacement curve of the vertical fine-tuning device shown. The vertical distance between the dashed line above and the solid line below is the Lorentz force of the vertical fine-tuning device at different displacements. According to the simulation calculation results, by setting the second back iron 212, the magnetic field distribution inside the vertical fine-tuning device can be improved, so that the curves of the magnetic buoyancy and the vertical resultant force of the vertical fine-tuning device with respect to displacement have better linearity, and the performance of the vertical fine-tuning device is improved.

[0068] Referring to Figure 5 , the second component 20 may further include a second coil 222. The second coil 222 is located between the first magnet part 11 and the second back iron 212. The second coil 222 is coaxial with the first magnet part 11 and is spaced apart from each other, and is connected to the second back iron 212. The second coil 222 may be directly connected to the second back iron 212, or may also be connected to the second back iron 212 through a coil bracket. By setting the second coil 222, the Lorentz force generated between the first component 10 and the second component 20 can be increased, thereby improving the driving performance of the vertical fine-tuning device.

[0069] Figure 6 shows Figure 5 the curve of the force and displacement of the vertical fine-tuning device shown, Figure 6 In [the figure], the position where the central plane of the first component 10 perpendicular to the z-direction coincides with the central plane of the second component 20 perpendicular to the z-direction is taken as the zero position, and the solid line below is Figure 5 the curve of the magnetic buoyancy and displacement of the vertical fine-tuning device shown. The long dashed line approximately horizontal above is the curve of the Lorentz force and displacement, and the short dashed line inclined above is the curve of the vertical resultant force and displacement. According to the simulation calculation results, the magnetic buoyancy and the vertical resultant force of the vertical fine-tuning device are linearly related to the displacement within a large stroke range. By setting the second coil 222, the Lorentz force generated between the first component 10 and the second component 20 can be increased, thereby improving the driving ability of the vertical fine-tuning device.

[0070] In an alternative embodiment, the height of the first magnet part 11 in the z-direction is less than the height of the first back iron 211 in the z-direction, and / or the height of the first magnet part 11 in the z-direction is less than the height of the second back iron 212 in the z-direction, which can reserve space for the movement of the first magnet part 11 in the z-direction, and can ensure the improvement effect on the internal magnetic field of the vertical fine-tuning device, and improve the performance of the vertical fine-tuning device.

[0071] In this embodiment, referring to Figure 5 andFigure 7 , the first magnet part 11 includes one or more first magnet mechanisms 111. The multiple first magnet mechanisms 111 are coaxially and sequentially spaced along the z direction, and the relative positions between the multiple first magnet mechanisms 111 remain unchanged. The first magnet part 11 can include, for example, one, two, three, or more first magnet mechanisms 111. The number of the first magnet mechanisms 111 can be specifically set according to the axial space of the vertical fine-tuning device. For example, when the axial space of the vertical fine-tuning device is not large, the first magnet part 11 can include one first magnet mechanism 111. When there is a large space along the axis, especially when the radial space is not large, the first magnet part 11 can include two or more first magnet mechanisms 111 spaced along the z direction. Among them, the magnetization directions of the one or more first magnet mechanisms 111 are all along their radial directions. Through the structural design of multi-segment distribution of the first magnet part 11, the intensity of the magnetic field distributed in the vertical fine-tuning device can be enhanced, and thus the vertical fine-tuning device has a greater magnetic buoyancy and better driving performance.

[0072] In an alternative embodiment, the structural dimensions between the multiple first magnet mechanisms 111 are the same, and they are sequentially and equally spaced along the z direction. The magnetization directions of the multiple first magnet mechanisms 111 are the same and along the radial direction. The multiple first magnet mechanisms 111 can be connected by brackets or other suitable means to keep their relative positions unchanged.

[0073] Figure 8 shows Figure 7 the force-displacement curve of the vertical fine-tuning device shown in Figure 8 , taking the position where the central plane of the first component 10 perpendicular to the z direction coincides with the central plane of the second component 20 perpendicular to the z direction as the zero position. The solid line below is Figure 7 the curve of the magnetic buoyancy and displacement of the vertical fine-tuning device shown in

[0074] In this embodiment, referring to Figure 9, the first magnet mechanism 111 includes one or more coaxially arranged first magnets 1111. A plurality of first magnets 1111 are nested in sequence from the inside to the outside along their radial direction. The magnetization direction of each first magnet 1111 is along its radial direction, and the magnetization directions of the plurality of first magnets 1111 are the same. The relative positions of the plurality of first magnets 1111 remain unchanged. Among them, the first magnet 1111 can be a permanent magnet or other suitable magnet structures capable of generating a magnetic field. For example, the first magnet 1111 is a magnetic steel made of materials such as iron, aluminum, nickel, and cobalt.

[0075] Specifically, for example, when the radial space of the vertical fine-tuning device is small, the first magnet mechanism 111 can include one first magnet 1111. When the vertical fine-tuning device has sufficient radial space, especially when the vertical space of the vertical fine-tuning device is small, the first magnet mechanism 111 can include two or more coaxially nested first magnets 1111. By arranging a plurality of first magnets 1111 nested in sequence along the radial direction, the magnetic field intensity distributed in the vertical fine-tuning device can be enhanced within a limited space, thereby enabling the vertical fine-tuning device to have a greater magnetic buoyancy and Lorentz force, improving the output thrust of the vertical fine-tuning device and the space utilization rate.

[0076] In an alternative embodiment, the first magnet mechanism 111 may further include one or more first intermediate back irons 112. The first intermediate back irons 112 are located between two adjacent first magnets 1111 along the radial direction, and the first intermediate back irons 112 are respectively connected to the two adjacent first magnets 1111. Optionally, the first intermediate back iron 112 is fixedly connected to the first magnet 1111. For example, they can be fixedly connected by bonding or other suitable methods. By arranging the first intermediate back iron 112, the magnetic field distribution can be improved, the performance of the vertical fine-tuning device can be enhanced, and the first component 10 can be formed into a whole, ensuring that the relative positions of several first magnets 1111 remain unchanged. The first intermediate back iron 112 can be made of a high-permeability material or other suitable materials.

[0077] Figure 10 shows Figure 9 the magnetic field line diagram inside the vertical fine-tuning device shown, Figure 10It is a half-sectional view of a vertical fine-tuning device cut radially along the axis. In the figure, the z-axis is the axis of the vertical fine-tuning device. The main magnetic lines of force in the vertical fine-tuning device sequentially flow through the first magnet 1111, the first coil 221, the first back iron 211, the external space, the second back iron 212, the second coil 222, and the first magnet 1111 to form a closed loop. The first coil 221 and the second coil 222 cut the magnetic field generated by the first magnet 1111, thereby generating Lorentz forces to achieve the driving function of the vertical fine-tuning device. The upper and lower ends of the first magnet 1111 in the z direction respectively generate vertical magnetic buoyancy forces in opposite directions on the first back iron 211. When the central plane of the first magnet 1111 perpendicular to the z direction coincides with the central plane of the first back iron 211 perpendicular to the z direction, the magnetic buoyancy force received by the first back iron 211 is zero. When the distance between the first back iron 211 and the first magnet 1111 deviating from the zero position increases, the vertical Lorentz force received by the first back iron 211 gradually increases.

[0078] Figure 11 shows Figure 9 the curve of the force and displacement of the vertical fine-tuning device shown, Figure 11 in which the long dashed line with an approximately constant value above is Figure 9 the curve of the Lorentz force and displacement of the vertical fine-tuning device shown, and the solid line sloping downward below is Figure 9 the curve of the magnetic buoyancy force and displacement of the vertical fine-tuning device shown, and the short dashed line sloping upward above is Figure 9 the curve of the vertical resultant force and displacement of the vertical fine-tuning device shown. After removing Figure 9 one first magnet 1111 and the first intermediate back iron 112 in the vertical fine-tuning device shown and adaptively adjusting the sizes of the remaining first magnets 1111, the second coils 222, and the second back irons 212, the curve of the vertical resultant force and displacement of the obtained vertical fine-tuning device is as shown in Figure 12 shown. According to the simulation calculation results and Figure 11 and Figure 12 it can be known that by arranging a plurality of first magnets 1111 nested radially in sequence, the magnetic field intensity distributed in the vertical fine-tuning device can be enhanced within a limited space, thereby enabling the vertical fine-tuning device to have greater magnetic buoyancy and Lorentz forces and improving the performance of the vertical fine-tuning device.

[0079] Figure 13 shows Figure 9 the curve of the vertical resultant force of the magnetic buoyancy force and Lorentz force of the vertical fine-tuning device shown and the reverse acting force of the reed and displacement, Figure 13Among them, the short dashed line is the curve of the vertical resultant force and displacement of the vertical fine-tuning device, the long dashed line is the curve of the reverse acting force and displacement of the reed, and the solid line approximately horizontal is the curve of the resultant force and displacement of the two. It can be seen that the vertical fine-tuning device in this embodiment has a constant stiffness characteristic within a large stroke range of -3 mm to 3 mm, and the stiffness of the reed is equal or approximately equal to the equivalent stiffness of the vertical resultant force in magnitude and opposite in direction, so that the combined stiffness of the vertical fine-tuning device and the reed approaches zero, effectively improving the heat generation problem of the voice coil motor in the vertical fine-tuning device and improving the positioning accuracy of the vertical micro-stage.

[0080] In summary, the vertical fine-tuning device of this embodiment realizes the function of constant stiffness gravity compensation only through the first back iron 211, the first magnet part 11 and the second back iron 212, and combines the first coil 221 and the second coil 222 to realize the vertical driving function with constant stiffness. It has the characteristics of small heat generation, low power consumption, simple structure, small occupied space, constant stiffness within the stroke range, etc., and realizes the precise positioning of the vertical micro-stage, improving the overall integration and control accuracy of the equipment.

[0081] Embodiment 2

[0082] This embodiment provides a vertical fine-tuning device. The same parts as those in Embodiment 1 will not be described in detail. The difference is that in the vertical fine-tuning device of this embodiment, the first component 10 further includes a central magnet 101, and the first back iron 211 is sleeved outside the central magnet 101.

[0083] In this embodiment, referring to Figure 14 , the first back iron 211 has a cylindrical structure, the central magnet 101 is arranged around the inner side of the first back iron 211, and is coaxial with the first back iron 211 and spaced apart from each other. The magnetization direction of the central magnet 101 is its radial direction, and the relative position between the central magnet 101 and the first magnet part 11 remains unchanged. For example, it can be achieved by a bracket or other suitable means to keep the relative position between the central magnet 101 and the first magnet part 11 unchanged. Optionally, the magnetization direction of the central magnet 101 is the same as that of the first magnet part 11.

[0084] Figure 15 shows Figure 14 the curve of the force and displacement of the vertical fine-tuning device shown in Figure 15 Among them, the solid line below is Figure 14 the curve of the magnetic buoyancy and displacement of the vertical fine-tuning device shown in Figure 14The curve of the vertical resultant force and displacement of the vertical fine-tuning device shown. According to the simulation calculation results, by setting the central magnet 101, the intensity of the distributed magnetic field in the vertical fine-tuning device can be increased, enabling the vertical fine-tuning device to provide a greater Lorentz force and magnetic buoyancy, enhancing the output thrust of the vertical fine-tuning device, and improving the working performance of the vertical fine-tuning device.

[0085] In an alternative embodiment, the central magnet 101 may be a cylindrical structure for easy installation and use of the vertical fine-tuning device. Further, the height of the central magnet 101 and the height of the first magnet part 11 are both less than the height of the first back iron 211. When the first assembly 10 and the second assembly 20 move relative to each other in the z direction, the central magnet 101 and the first magnet part 11 can move between the plane where the top surface of the first back iron 211 is located and the plane where the bottom surface is located, facilitating reserving a movement space for the two and ensuring the improvement effect on the internal magnetic field distribution of the vertical fine-tuning device, and improving the performance of the vertical fine-tuning device. It should be noted that the central magnet 101 in this embodiment is applicable to any of the vertical fine-tuning devices in Embodiment 1.

[0086] Embodiment 3

[0087] This embodiment provides a vertical fine-tuning device. The same parts as those in Embodiment 1 or Embodiment 2 will not be described in detail. The differences are that in one or more first magnet mechanisms 111, at least one first magnet mechanism 111 is provided with a first magnet tip 1101 at at least one end in the z direction.

[0088] Refer to Figures 16 to 19 , the first magnet tip 1101 is located at at least one end of at least one first magnet mechanism 111. Specifically, the first magnet tip 1101 can be provided at opposite ends of the first magnet mechanism 111 in the z direction, or at one end of the first magnet mechanism 111 in the z direction. The first magnet tip 1101 can be provided on one first magnet mechanism 111 in the vertical fine-tuning device, or on multiple first magnet mechanisms 111, or the first magnet tip 1101 is provided on all the first magnet mechanisms 111 of the vertical fine-tuning device. The first magnet tip 1101 can be obtained by cutting the first magnet mechanism 111 in any of the vertical fine-tuning devices described in Embodiment 1 or Embodiment 2, or can also be obtained by other suitable means. Optionally, the first magnet tip 1101 is provided at opposite ends of the first magnet mechanism 111 in the z direction of the vertical fine-tuning device.

[0089] The first magnet part 11 includes, for example, a first magnet mechanism 111. One end of the first magnet mechanism 111 in the z direction may be provided with a first magnet tip 1101, or both ends may be provided with the first magnet tip 1101. The first magnet part 11 may include, for example, two first magnet mechanisms 111. At least one end of one of the first magnet mechanisms 111 in the z direction is provided with the first magnet tip 1101, or at least one end of both of the first magnet mechanisms 111 in the z direction is provided with the first magnet tip 1101. The first magnet part 11 may also include, for example, three or more first magnet mechanisms 111, and at least one of the first magnet mechanisms 111 is provided with the first magnet tip 1101 at at least one end in the z direction.

[0090] In an alternative embodiment, the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111 to which it belongs. Specifically, from the end where the first magnet tip 1101 contacts the first magnet mechanism 111 to the end away from the first magnet mechanism 111, its thickness gradually decreases. The first magnet mechanism 111 has a toroidal structure and may be, for example, a cylindrical structure. The first magnet tip 1101 also has a cylindrical structure. In the cross-sectional view of the first magnet tip 1101 along its axial direction, the first magnet tip 1101 may be an arc-shaped tip, or the inner side surface and / or the outer side surface of the first magnet tip 1101 is an inclined surface inclined along its radial direction, so that the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111.

[0091] Further, referring to Figures 16 to 18 , both the inner side surface and the outer side surface of the first magnet tip 1101 are inclined surfaces inclined along its radial direction. Specifically, for example, the inner side surface of the first magnet tip 1101 is inclined inward along the radial direction, and the outer side surface of the first magnet tip 1101 is inclined outward along the radial direction, so that the cross-sectional structure of the first magnet tip 1101 along its axial direction is approximately or is an isosceles trapezoid structure, so that the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111.

[0092] Further, referring to Figure 19 , the inner side surface or the outer side surface of the first magnet tip 1101 is an inclined surface inclined along its radial direction. Specifically, for example, the inner side surface of the first magnet tip 1101 is an inclined surface inclined outward along the radial direction, or the outer side surface of the first magnet tip 1101 is an inclined surface inclined inward along the radial direction, so that the cross-sectional structure of the first magnet tip 1101 along its axial direction is a right trapezoid structure, so that the thickness of the first magnet tip 1101 gradually decreases in a direction away from the first magnet mechanism 111.

[0093] In an alternative embodiment, Figure 8In the vertical fine-tuning device shown, at the top end of the first magnet mechanism 111 located above, an annular structure with a right-angled triangle cross-section is subtracted from both its inner side and outer side to obtain Figure 17 the vertical fine-tuning device shown. Figure 20 shows Figure 17 the cross-sectional structure along the axial direction of the first magnet tip 1101 in the vertical fine-tuning device shown. The cross-sectional structure of the first magnet tip 1101 is an isosceles trapezoid structure. The angle between the inner side or outer side of the first magnet tip 1101 and the z-direction is denoted as the inclination angle α. Figure 21 shows Figure 17 the curve of the vertical resultant force of the magnetic buoyancy force and the Lorentz force of the vertical fine-tuning device shown versus displacement, Figure 22 shows Figure 17 the curve of the thrust constant of the vertical fine-tuning device shown versus displacement. The thrust constant is the Lorentz force of the vertical fine-tuning device when a unit current is input. Figure 21 and Figure 22 The multiple curves from top to bottom in correspond to the vertical fine-tuning devices with gradually increasing inclination angles α of the first magnet tip 1101. Based on the simulation calculation results of the vertical fine-tuning devices with the first magnet tip 1101 having different inclination angles, it can be seen that for the vertical fine-tuning devices with the first magnet tip 1101 set with different inclination angles, the thrust constant of the vertical fine-tuning device has a slight change, that is, the Lorentz force generated by the vertical fine-tuning device does not change significantly. The first magnet tip 1101 of this embodiment does not affect the driving ability of the vertical fine-tuning device. It can be seen that the vertical fine-tuning device of this embodiment can reduce the equivalent stiffness of the vertical fine-tuning device without reducing its driving effect by setting the first magnet tip 1101. And when the inclination angle α of the first magnet tip 1101 gradually increases, the equivalent stiffness of the vertical fine-tuning device gradually decreases.

[0094] In an alternative embodiment, in one or more first magnet mechanisms 111 of the vertical fine-tuning device, at least one first annular groove 1102 is provided on the inner side and / or outer side of the first magnet mechanism 111. The first annular groove 1102 is coaxially arranged with the first magnet mechanism 111 and is located at at least one end of the first magnet mechanism 111 along the z-direction. Specifically, the first annular groove 1102 can be opened on the inner side or outer side of the first magnet mechanism 111 at at least one end of the first magnet mechanism 111 along the z-direction, or the first annular groove 1102 can be opened on both the inner side and outer side of the first magnet mechanism 111 at at least one end of the first magnet mechanism 111 along the z-direction. The specific setting method of the first annular groove 1102 can refer to the first magnet tip 1101 described above.

[0095] Furthermore, referring to Figure 23, the vertical fine-tuning device includes two first magnet mechanisms 111. At opposite ends of the first magnet mechanism 111 along the z direction, first annular grooves 1102 are provided on both its inner side and outer side. The first annular grooves 1102 can be V-shaped grooves with an annular structure or grooves with other suitable structures. Specifically, the first annular grooves 1102 can be, for example, V-shaped grooves with an annular structure. And in the cross-sectional view of the first magnet mechanism 111 passing through its axis, one side of the V-shaped groove is perpendicular to the z direction, such that the V-shaped groove has an inverted check mark structure placed vertically. By providing the first annular grooves 1102 in the first magnet mechanism 111, it is also possible to reduce the equivalent stiffness of the vertical fine-tuning device while not reducing the driving effect of the vertical fine-tuning device.

[0096] Embodiment 4

[0097] This embodiment provides a vertical fine-tuning device. The same parts as those in any one of Embodiments 1 to 3 will not be described in detail. The differences are that in the vertical fine-tuning device of this embodiment, the first component 10 further includes one or more second magnet parts 12, and the second component 20 further includes one or more third coils 223.

[0098] In this embodiment, referring to Figure 24 and Figure 25 , the second magnet part 12 and the third coil 223 are coaxial and spaced apart from each other, and the second magnet part 12 and the third coil 223 are alternately nested with each other along the radial direction in sequence. The second magnet part 12 and the third coil 223 can be located between the first magnet part 11 and the first coil 221, or can also be arranged around the outside of the first magnet part 11; optionally, the second component 20 further includes a second back iron 212 and a second coil 222, and the second magnet part 12 and the third coil 223 can also be located between the first magnet part 11 and the second coil 222. The second magnet part 12 is spaced apart from the first coil 221 and the second coil 222, and the third coil 223 is spaced apart from the first magnet part 11.

[0099] In an alternative embodiment, referring to Figure 25 , the second magnet part 12 and the third coil 223 are located between the first magnet part 11 and the first coil 221, and the second magnet part 12 and the third coil 223 are nested with each other in sequence from the inside to the outside along the radial direction. The structure formed by nesting the second magnet part 12 and the third coil 223 is denoted as an alternating structure. The innermost structure of this alternating structure is the second magnet part 12, and the outermost structure is the third coil 223.

[0100] In an alternative embodiment, referring to Figure 24 , Figure 24A semi-sectional view of a vertical fine-tuning device cut radially from the axis is shown. In the figure, the z-axis is the axis of the vertical fine-tuning device. The second magnet part 12 and the third coil 223 are located between the first magnet part 11 and the second coil 222. The third coil 223 and the second magnet part 12 are nested with each other in sequence from the inside to the outside in the radial direction. In the alternating structure formed by the third coil 223 and the second magnet part 12, the innermost structure of the alternating structure is the third coil 223, and the outermost structure is the second magnet part 12.

[0101] In this embodiment, referring to Figure 25 , the second magnet part 12 includes one or more second magnet mechanisms 121 arranged coaxially. The multiple second magnet mechanisms 121 are spaced apart from each other in sequence along the z direction, and the relative positions between the multiple second magnet mechanisms 121 remain unchanged. The second magnet part 12 can include, for example, one, two, three or more first magnet mechanisms 121. The number of the second magnet mechanisms 121 can be specifically set according to the axial space of the vertical fine-tuning device.

[0102] In an alternative embodiment, the structural dimensions between the multiple second magnet mechanisms 121 are the same, and they are equally spaced apart from each other in sequence along the z direction. The magnetization directions of the multiple second magnet mechanisms 121 are the same and along the radial direction. The multiple second magnet mechanisms 121 can be fixed in their relative positions by brackets or other suitable means.

[0103] In this embodiment, the specific structural dimensions and layout methods of the second magnet mechanism 121 can refer to any one of the first magnet mechanisms 111 in the foregoing embodiments.

[0104] Referring to Figure 25 , Figure 25 A semi-sectional view of a vertical fine-tuning device cut radially from the axis is shown. In the figure, the z-axis is the axis of the vertical fine-tuning device. The second magnet mechanism 121 includes one or more second magnets 1211 arranged coaxially. The multiple second magnets 1211 are nested with each other in sequence from the inside to the outside in the radial direction. The magnetization directions of the second magnets 1211 are all along their radial directions, and the magnetization directions of the multiple second magnets 1211 are the same. The relative positions between the multiple second magnets 1211 remain unchanged. Among them, the second magnets 1211 can be permanent magnets or other suitable magnet structures capable of generating magnetic fields.

[0105] In an alternative embodiment, the second magnet mechanism 121 can further include one or more second intermediate back irons 1212. The second intermediate back irons 1212 are located between two adjacent second magnets 1211 in the radial direction, and the second intermediate back irons 1212 are respectively connected to the two adjacent second magnets 1211.

[0106] In this embodiment, the specific structural dimensions and layout of the second magnet 1211 and the second intermediate back iron 1212 can refer to any one of the first magnets 1111 and the first intermediate back iron 112 in the foregoing embodiments.

[0107] In an alternative embodiment, referring to Figure 26 , Figure 26 shows a half-sectional view of a vertical fine-tuning device cut along the radial direction from the axis. In the figure, the z-axis is the axis of the vertical fine-tuning device. In one or more second magnet mechanisms 121 of the vertical fine-tuning device, at least one second magnet mechanism 121 is provided with a second magnet tip 1201 at at least one end along the z direction. Specifically, the second magnet tip 1201 can be provided at opposite ends of the second magnet mechanism 121 along the z direction, or at one end of the second magnet mechanism 121 along the z direction. The second magnet tip 1201 can be provided on one second magnet mechanism 121 in the vertical fine-tuning device, or on multiple second magnet mechanisms 121, or the first magnet tip 1201 is provided on all the second magnet mechanisms 121 of the vertical fine-tuning device. Optionally, the thickness of the second magnet tip 1201 gradually decreases in the direction away from the second magnet mechanism 121 where it is located.

[0108] In this embodiment, the specific structural dimensions and layout of the second magnet tip 1201 can refer to any one of the first magnet tips 1101 in Embodiment 3.

[0109] In an alternative embodiment, referring to Figure 27 , Figure 27 shows a half-sectional view of a vertical fine-tuning device cut along the radial direction from the axis. In the figure, the z-axis is the axis of the vertical fine-tuning device. In one or more second magnet mechanisms 121 of the vertical fine-tuning device, a second annular groove 1202 is provided on at least one of the inner side surface and / or the outer side surface of at least one second magnet mechanism 121. The second annular groove 1202 is located at at least one end of the second magnet mechanism 121 along the z direction. Specifically, the second annular groove 1202 can be opened on the inner side surface or the outer side surface of the second magnet mechanism 121 at at least one end of the second magnet mechanism 121 along the z direction, or the second annular groove 1202 can be opened on both the inner side surface and the outer side surface of the second magnet mechanism 121 at at least one end of the second magnet mechanism 121 along the z direction.

[0110] In this embodiment, the specific structural dimensions and layout of the second annular groove 1202 can refer to any one of the first annular grooves 1102 in Embodiment 3.

[0111] In an alternative embodiment, referring to Figure 26, the second component 20 further includes one or more third back irons 213. The third back irons 213 are nested with the third coils 223 and are connected to the third coils 223. The third back irons 213 are spaced apart from both the second magnet part 12 and the first magnet part 11. The third coils 223 can be directly connected to the third back irons 213 or can be connected to the third back irons 213 through coil brackets. Among them, the third back irons 213 can be coaxially sleeved outside the third coils 223, or the third back irons 213 can also be coaxially arranged inside the third coils 223 in a ring shape. The third back irons 213 can be made of high-permeability materials or other suitable materials. By providing the third back irons 213, it helps to improve the magnetic field distribution, improve the performance of the vertical fine-tuning device, and facilitate the installation and use of the vertical fine-tuning device.

[0112] In an alternative embodiment, referring to Figure 27 , the second component 20 further includes one or more fourth coils 224. The fourth coils 224 are nested with the third back irons 213. The third back irons 213 are located between the third coils 223 and the fourth coils 224 and are respectively connected to the third coils 223 and the fourth coils 224. The fourth coils 224 can be directly connected to the third back irons 213 or can be connected to the third back irons 213 through coil brackets. Among them, the fourth coils 224 are spaced apart from both the second magnet part 12 and the first magnet part 11.

[0113] Figure 28 shows Figure 24 the force-displacement curve of the vertical fine-tuning device shown in Figure 28 . In

[0114] , the upper long dashed line is the curve of the vertical resultant force and displacement when the first coil 221, the second coil 222, and the third coil 223 all conduct a current of 500 A. The middle short dashed line is the curve of the vertical resultant force and displacement when the first coil 221, the second coil 222, and the third coil 223 all conduct a current of 0 A. The lower solid line is the curve of the vertical resultant force and displacement when the first coil 221, the second coil 222, and the third coil 223 all conduct a current of -500 A.

[0115] The above embodiments are only illustrative of the principles and effects of the present application and are not intended to limit the present application. Any person familiar with this technology can modify, change or combine the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present application should still be covered by the claims of the present application.

Claims

1. A vertical fine-tuning device, characterized in that, It includes a first component (10) and a second component (20) that are coaxial and spaced apart from each other. Taking the axial direction of the first component (10) as the z-direction, the first component (10) and the second component (20) can move relative to each other along the z-direction; The first component (10) includes a first magnet part (11), and the magnetization direction of the first magnet part (11) is its radial direction; The second component (20) includes a first back iron (211) and a first coil (221). The first magnet part (11) is coaxially sleeved outside the first back iron (211). The first coil (221) is located between the first magnet part (11) and the first back iron (211). The first coil (221) is spaced apart from the first magnet part (11) and is connected to the first back iron (211); The second component (20) further includes a second back iron (212). The second back iron (212) is coaxially sleeved outside the first magnet part (11) and is spaced apart from the first magnet part (11); The first component (10) further includes one or more second magnet parts (12), and the second component (20) further includes one or more third coils (223). The second magnet parts (12) and the third coils (223) are coaxial and spaced apart from each other, and are alternately nested in sequence along the radial direction; The second magnet parts (12) and the third coils (223) are located between the first magnet part (11) and the first coil (221), or are arranged in a ring between the first magnet part (11) and the second back iron (212).

2. The vertical fine-tuning device according to claim 1, characterized in that, The first component (10) further includes a central magnet (101). The first back iron (211) is coaxially sleeved outside the central magnet (101) and is spaced apart from the central magnet (101). The magnetization direction of the central magnet (101) is its radial direction.

3. The vertical fine-tuning device according to claim 1, characterized in that, The second component (20) further includes a second coil (222). The second coil (222) is located between the first magnet part (11) and the second back iron (212). The second coil (222) is spaced apart from the first magnet part (11) and is connected to the second back iron (212).

4. The vertical fine-tuning device according to claim 1, characterized in that, The first magnet part (11) includes one or more coaxially arranged first magnet mechanisms (111). A plurality of the first magnet mechanisms (111) are sequentially spaced apart along the z-direction, and the relative positions between the plurality of the first magnet mechanisms (111) remain unchanged.

5. The vertical fine-tuning device according to claim 4, characterized in that At least one end of at least one of the first magnet mechanisms (111) in the z-direction is provided with a first magnet tip (1101), and the thickness of the first magnet tip (1101) gradually decreases along the direction away from the first magnet mechanism (111) where it is located.

6. The vertical fine-tuning device according to claim 4, characterized in that At least one of the inner side and / or the outer side of at least one of the first magnet mechanisms (111) is provided with a first annular groove (1102), and the first annular groove (1102) is located at at least one end of the first magnet mechanism (111) in the z-direction.

7. The vertical fine-tuning device according to claim 4, characterized in that, The first magnet mechanism (111) includes one or more coaxially arranged first magnets (1111). A plurality of the first magnets (1111) are nested in sequence from inside to outside along their radial direction. A first intermediate back iron (112) is arranged between two adjacent first magnets (1111). The first intermediate back iron (112) is respectively connected to the two adjacent first magnets (1111). The magnetization direction of the first magnet (1111) is its radial direction.

8. The vertical fine-tuning device according to claim 1, wherein The second magnet part (12) includes one or more coaxially arranged second magnet mechanisms (121). A plurality of the second magnet mechanisms (121) are sequentially spaced along the z direction, and the relative positions between the plurality of second magnet mechanisms (121) remain unchanged.

9. The vertical fine-tuning device according to claim 8, characterized in that, At least one end of at least one of the second magnet mechanisms (121) in the z direction is provided with a second magnet tip (1201). The thickness of the second magnet tip (1201) gradually decreases along the direction away from the second magnet mechanism (121) where it is located.

10. The vertical fine-tuning device according to claim 8, wherein, A second annular groove (1202) is provided on the inner side surface and / or outer side surface of at least one of the second magnet mechanisms (121). The second annular groove (1202) is located at at least one end of the second magnet mechanism (121) in the z direction.

11. The vertical fine-tuning device according to claim 8, wherein The second magnet mechanism (121) includes one or more coaxially arranged second magnets (1211). A plurality of the second magnets (1211) are nested in sequence from inside to outside along their radial direction. A second intermediate back iron (1212) is arranged between two adjacent second magnets (1211). The second intermediate back iron (1212) is respectively connected to the two adjacent second magnets (1211). The magnetization direction of the second magnet (1211) is its radial direction.

12. The vertical fine-tuning device according to claim 1, characterized in that, The second component (20) further includes one or more third back irons (213). The third back irons (213) are nested with the third coils (223). The third back irons (213) are connected to the third coils (223) and are spaced apart from the first magnet part (11) and the second magnet part (12).

13. The vertical fine-tuning device according to claim 12, wherein The second component (20) further includes one or more fourth coils (224). The fourth coils (224) are nested with the third back irons (213). The third back irons (213) are located between the third coils (223) and the fourth coils (224). The fourth coils (224) are connected to the third back irons (213) and are spaced apart from the first magnet part (11) and the second magnet part (12).

Images