High-precision thin film sheet resistance tester and test method

Abstract

The invention relates to the technical field of sheet resistance testing, in particular to a high-precision thin film sheet resistance tester and a testing method.The high-precision thin film sheet resistance tester comprises a sheet resistance tester body and a testing probe electrically connected with the sheet resistance tester body, and a pedestal is integrally formed on the outer ring of the testing probe; the stretching and flattening device comprises a pedestal, a stretching and flattening mechanism is rotatably installed on the pedestal, an elastic reset mechanism is arranged above the pedestal, the elastic reset mechanism and the stretching and flattening mechanism are meshed with each other, the stretching and flattening mechanism comprises a stretching and flattening pressing rod rotatably installed on the pedestal and further comprises a stretching and flattening assembly arranged on the stretching and flattening pressing rod, and the stretching and flattening assembly is arranged on the stretching and flattening pressing rod. According to the thin film sheet resistance tester, the problems that when a traditional thin film sheet resistance tester is used for testing an uneven thin film, the measured sheet resistance value has errors, and the accuracy and reliability of a test result are affected are solved, and the situation that the thin film is damaged due to excessive tearing when the thin film is stretched is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of square resistance testing, and more specifically, to a high-precision thin-film square resistance tester and a testing method. Background Art

[0002] Sheet resistance (i.e., block resistance) is a crucial physical parameter that reflects the conductive properties of thin film materials. Sheet resistance testing is widely used in electronics, optoelectronics, semiconductors and other industries, especially in the fields of thin-film solar cells, touch screens, conductive films, etc. Accurate measurement of sheet resistance is crucial to ensuring product quality and performance.

[0003] During the test process, traditional thin film square resistance testers often face the problem of uneven surface of thin film materials, such as bulges and wrinkles. When the surface of the film is uneven, the contact area and pressure between the test probe and the film will change, resulting in errors in the measured square resistance value, which in turn affects the accuracy and reliability of the test results.

[0004] In addition, existing testing equipment usually uses fixed stretching mechanisms when stretching films. These mechanisms are prone to cause excessive tearing or scratching of the film during the stretching process, especially for thinner film materials. This damage is particularly obvious, which not only affects the accuracy of the test results, but may also cause the film material to be scrapped, increasing production costs. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] In view of the problems existing in the prior art, the present invention provides a high-precision thin film square resistance tester and a testing method to solve the problem mentioned in the background technology that when the traditional thin film square resistance tester tests uneven films, the measured square resistance value has errors, affecting the accuracy and reliability of the test results.

[0007] (II) Technical solution

[0008] To achieve the above object, the present invention provides the following technical solutions: a high-precision thin film square resistance tester, comprising a square resistance tester body, and a test probe electrically connected to the square resistance tester body, wherein the outer ring of the test probe is integrally formed with a pedestal, and a stretching mechanism is rotatably mounted on the pedestal, an elastic reset mechanism is arranged above the pedestal, and the elastic reset mechanism and the stretching mechanism are meshed with each other;

[0009] The stretching mechanism includes a stretching pressure rod rotatably mounted on the pedestal, a stretching assembly arranged on the stretching pressure rod, and a stop gear arranged on the stretching assembly;

[0010] The end of the stretching and pressing rod away from the pedestal is provided with a receiving cavity, and a pressure unlocking mechanism is arranged inside the receiving cavity;

[0011] The anti-rotation gear is arranged in the accommodating cavity, and the anti-rotation gear is engaged and clamped with the pressure unlocking mechanism in an initial state.

[0012] The present invention is further configured such that the stretching assembly comprises a stretching roller rotatably mounted on one end of the stretching pressure rod away from the pedestal, and a rubber pad arranged on the circumferential side wall of the stretching roller;

[0013] The stretching roller is rotatably installed through the rotating shafts at both ends and the stretching pressure rod, and the anti-rotation gear is fixedly connected to the rotating shaft of the stretching roller.

[0014] The present invention is further configured such that the pressure-applying unlocking mechanism comprises a rotation-stopping plate rotatably mounted in the accommodating cavity, and an abutment component disposed on one side of the rotation-stopping plate;

[0015] The abutment assembly abuts against the tooth grooves of the anti-rotation plate and the anti-rotation gear to engage with each other.

[0016] The present invention is further configured such that a guide groove is provided in the accommodating cavity, and the abutment component is slidably installed in the guide groove.

[0017] The present invention is further configured such that the abutment assembly includes a push spring and a slide block arranged in the guide groove, and a push rod arranged on the slide block and abutting against the anti-rotation plate.

[0018] The present invention is further configured such that the elastic reset mechanism includes a reset spring and a drive ring sleeved on the outer circumference of the test probe, and a drive rack arranged on the drive ring.

[0019] The present invention is further configured such that a driving tooth block is provided at one end of the stretching pressure rod close to the pedestal, and the driving tooth block and the driving rack are meshed for transmission.

[0020] The present invention is further configured such that the outer ring thread sleeve of the test probe is connected with a limiting sleeve, and the limiting sleeve and the driving ring are in conflict and match.

[0021] The present invention is further configured such that a support frame is provided on the main body of the square resistance tester, and the support frame and the main body of the square resistance tester are rotatably installed.

[0022] The present invention also provides the following technical solution: a high-precision thin film square resistance testing method, comprising the high-precision thin film square resistance tester, and,

[0023] S1. Place the film to be tested on the testing workbench;

[0024] S2, pressing down the test probe to flatten the film through the flattening component in the flattening mechanism;

[0025] S3, after the film is flattened, the probe of the test probe contacts the film to perform a square resistance test;

[0026] S4. After the test is completed, move the test probe upward so that the stretching component can be retracted under the action of the elastic reset mechanism.

[0027] (III) Beneficial effects

[0028] Compared with the prior art, the present invention provides a high-precision thin film square resistance tester and a test method, which have the following beneficial effects:

[0029] 1. The present invention can automatically adjust the state of the stretching component after the film is stretched, from compression stretching to rolling stretching, through the design of the pressure-applying unlocking mechanism and the stretching component. This method effectively avoids excessive tearing of the film by the stretching component when the test probe continues to be pressed down to perform the square resistance test, thereby protecting the integrity of the film and reducing the damage to the film caused by the test process.

[0030] 2. The present invention abandons the torsion spring structure commonly used in traditional designs, and instead adopts an elastic reset mechanism composed of a reset spring, a drive ring, a drive rack, etc. This design not only simplifies the structure of the equipment, making the assembly and maintenance of the equipment more convenient, but also avoids the problem that the torsion spring is difficult to replace due to the decrease in torque after long-term use. At the same time, the design without a torsion spring also allows the stretching component to fit tightly in the initial state, thereby protecting the test probe, improving the ease of use and reliability of the equipment, and the stretching component that fits in the initial state can have a larger stretching range and wider applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of the overall structure of a high-precision thin film square resistance tester.

[0032] Figure 2 It is a schematic diagram of the initial state structure of the stretching mechanism.

[0033] Figure 3 for Figure 2 Enlarged structural diagram at A in the middle.

[0034] Figure 4 It is a schematic diagram of the cross-sectional structure of the guide groove on the stretching pressure rod.

[0035] Figure 5 for Figure 4 Enlarged structural diagram at B in the middle.

[0036] Figure 6 Schematic diagram of the explosion structure between the elastic reset mechanism and the test probe.

[0037] In the figure: 1. main body of square resistance tester; 101. support frame; 2. test probe; 201. pedestal; 202. limit sleeve; 3. stretching mechanism; 301. stretching pressure rod; 302. anti-rotation gear; 303. accommodating chamber; 304. guide groove; 305. driving gear block; 4. elastic reset mechanism; 401. reset spring; 402. driving ring; 403. driving rack; 5. stretching assembly; 501. stretching roller; 502. rubber pad; 6. pressure unlocking mechanism; 601. anti-rotation plate; 7. resistance assembly; 701. push spring; 702. slider; 703. push rod. DETAILED DESCRIPTION

[0038] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0039] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0040] In the present invention, unless otherwise specified, the directions used, such as "up" and "down", usually refer to the directions shown in the drawings, or to the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.

[0041] For examples, see Figure 1 - Figure 6 A high-precision thin film square resistance tester and a test method, comprising a square resistance tester body 1, and a test probe 2 electrically connected to the square resistance tester body 1, the outer ring of the test probe 2 is integrally formed with a pedestal 201, and a stretching mechanism 3 is rotatably mounted on the pedestal 201, an elastic reset mechanism 4 is arranged above the pedestal 201, and the elastic reset mechanism 4 and the stretching mechanism 3 are meshed with each other;

[0042] The stretching mechanism 3 includes a stretching pressure rod 301 rotatably mounted on the pedestal 201, a stretching assembly 5 disposed on the stretching pressure rod 301, and a stop gear 302 disposed on the stretching assembly 5;

[0043] An accommodating cavity 303 is formed at one end of the stretching and pressing rod 301 away from the pedestal 201, and a pressure unlocking mechanism 6 is disposed inside the accommodating cavity 303;

[0044] The stop gear 302 is disposed in the accommodating cavity 303 , and the stop gear 302 is engaged with the pressure unlocking mechanism 6 in an initial state.

[0045] The test probe 2 is used to press down the laminated film so that the probe on the test probe 2 can test the square resistance of the film. However, when the film is uneven such as bulging or wrinkling, the thickness of the film due to wrinkles and folds will be different when the current test probe 2 is moved down for testing, which will result in errors in the measured square resistance. In order to improve the results of the square resistance test, the present invention is provided with a stretching mechanism 3 rotatably mounted on both sides of the pedestal 201. The stretching pressure rods 301 of the stretching mechanism 3 are provided with two groups. The flattening assembly 5 is rotatably mounted on the side wall of the pedestal 201, and the flattening assembly 5 is rotatably mounted on the end of the flattening pressure rod 301 away from the pedestal 201. In addition, the two sets of flattening pressure rods 301 are moved closer to each other under the action of the elastic reset mechanism 4, so that the flattening assembly 5 on the flattening pressure rod 301 in the initial state is fitted and located under the probe of the test probe 2, so as to protect the probe. At the same time, the flattening assembly 5 that is fitted together has a wider flattening range when flattening the film.

[0046] The rotational connection relationship between the stretching component 5 and the stretching pressure rod 301 requires additional explanation here, which is as follows: when there is no sufficient external force on the stretching component 5, the stop gear 302 on the stretching component 5 and the pressure unlocking mechanism 6 are engaged, so that the stretching component 5 and the stretching pressure rod 301 cannot rotate in the expansion direction, but can rotate toward the axis direction of the test probe 2, that is, the stretching component 5 is a one-way rotatable setting when there is no sufficient external force.

[0047] In this state, when the elastic reset mechanism 4 and the test probe 2 are pressed down to push the two sets of stretching pressure rods 301 to expand outward, the force required by the stretching component 5 to stretch the film is extremely small, and it is unable to drive the anti-rotation gear 302 to push open the meshing connection of the pressure unlocking mechanism 6 through the reaction force, so that when the stretching pressure rod 301 expands outward, the stretching component 5 and the stretching pressure rod 301 cannot rotate. Therefore, the stretching component 5 presses the film, and as the two sets of stretching pressure rods 301 expand outward, the film is pulled in opposite directions to achieve film stretching.

[0048] However, due to the different degrees of unevenness of the films, after the non-rotating stretching component 5 stretches the film, the probe of the test probe 2 does not yet contact the film, and thus the square resistance of the film cannot be tested. At this time, it is necessary to continue to move the test probe 2 downward so that the two sets of stretching pressure rods 301 continue to expand until the probe of the test probe 2 contacts the film and the square resistance test can be performed. However, continued downward movement will cause the stretching component 5 to tear the film excessively through the friction force of compression, and slide on the film due to the friction force. At this time, for some thinner films, the tearing force and the sliding friction will cause damage to the film.

[0049] In order to solve such a problem, the pressure-applying unlocking mechanism 6 designed in the present invention pushes the stop gear 302 and the pressure-applying unlocking mechanism 6 to separate under the application of external force, thereby allowing the stretching component 5 and the stretching pressure rod 301 to rotate. Then, after the stretching component 5 initially stretches the film, the test probe 2 continues to move downward, causing the two sets of stretching pressure rods 301 to continue to expand. At this time, the tearing force exerted on the film by the stretching component 5 is transformed into a reaction force, and the reaction force is greater than the external force required for the pressure-applying unlocking mechanism 6 to unlock, thereby pushing the stop gear 302, causing the pressure-applying unlocking mechanism 6 and the stop gear 302 to separate, thereby allowing the stretching component 5 and the stretching pressure rod 301 to rotate, thereby causing the stretching component 5 to be in a rolling state during the subsequent downward pressure expansion and stretching, thereby reducing damage to the film. It should be noted that the external force that separates the pressure-applying unlocking mechanism 6 and the stop gear 302 is less than the tearing force that damages the film.

[0050] It should be further explained that the unidirectional rotation of the stretching component 5 without sufficient external force is to enable the test probe 2 to move up and retract after the square resistance test of the film is completed. At this time, if the stretching component 5 cannot rotate, then as the two groups of figure-eight stretching pressure bars 301 rotate and approach each other, the film will be driven to move synchronously toward the center position through the stretching component 5, thereby causing more wrinkles to appear on the stretched film, especially if the test film is flat, after the test is completed, the folding of the film will be damaged. Therefore, when the two groups of figure-eight stretching pressure bars 301 rotate and approach each other, the unidirectional rotation setting allows the stretching component 5 to roll forward, thereby avoiding folding and damage to the film.

[0051] Specifically, when performing a square resistance test on an uneven film, two flattening components 5 that are bonded together are pressed onto the film. At this time, the elastic reset mechanism 4 is first pressed down to push the flattening pressure rods 301 that are close to each other to rotate and expand to an eight-shaped shape on both sides, and then the two groups of flattening pressure rods 301 can be driven to expand to both sides by pressing down the test probe 2, so that the uneven film can be flattened by the flattening component 5 pressed on the film. Whether it is the elastic reset mechanism 4 or the test probe 2 that is pressed down, it can drive the two groups of flattening pressure rods 301 to expand to both sides, and then the film can be flattened by the flattening component 5. After the film is stretched flat, if the probe of the test probe 2 can also be properly tested, Regular testing, normal testing is sufficient. When the film is stretched flat, the probe of the test probe 2 cannot perform normal testing. Continue to move the test probe 2 downward so that the stretching pressure rod 301 continues to expand, thereby driving the stretching component 5 to move on the film. However, the stretching component 5 will generate a tearing force on the film when it moves again after the film is stretched flat. The reaction force of the tearing force drives the stop gear 302 on the stretching component 5 to push the pressure unlocking mechanism 6, so that the stop gear 302 and the pressure unlocking mechanism 6 are separated from each other, thereby realizing the rotation and advancement of the stretching component 5, thereby avoiding damage to the film caused by the tearing force, thereby realizing that the test probe 2 can perform high-precision square resistance testing on the film. The stretching component 5 includes a stretching roller 501 rotatably mounted on the end of the stretching pressure rod 301 away from the pedestal 201, and a rubber pad 502 arranged on the circumferential side wall of the stretching roller 501;

[0052] The stretching roller 501 is rotatably installed through the rotating shafts at both ends and the stretching pressure rod 301, and the anti-rotation gear 302 is fixedly connected to the rotating shaft of the stretching roller 501.

[0053] By setting the rubber pad 502, after the stretching roller 501 presses the film and moves with the expansion of the stretching pressure rod 301, it can drive the film to be stretched in the opposite direction. At the same time, the friction force of the rubber pad 502 can prevent the film from shrinking after being stretched, causing bulging and affecting the stretching effect of the film, resulting in inaccurate square resistance test data.

[0054] The pressure unlocking mechanism 6 includes a stop plate 601 rotatably mounted in the accommodating cavity 303, and a resisting component 7 disposed on one side of the stop plate 601;

[0055] The abutment assembly 7 abuts against the tooth grooves of the anti-rotation plate 601 and the anti-rotation gear 302 to engage with each other.

[0056] The resistance component 7 is arranged on the side of the forward direction of the anti-rotation plate 601, and its forward direction refers to the direction in which the flattening component 5 is stretched and moved forward. It is mainly used to resist the anti-rotation plate 601 when the flattening component 5 is stretched and moved forward, so that the anti-rotation plate 601 cannot rotate in the forward direction, so that when the flattening component 5 initially stretches the film, the flattening roller 501 does not rotate, and the wrinkled film is pulled in two directions through the rubber pad 502 to achieve stretching.

[0057] After flattening, when the probe of the test probe 2 cannot perform square resistance test on the film, as the flattening pressure rod 301 continues to move downward and expand, the reaction force of the friction between the rubber pad 502 on the flattening roller 501 and the film drives the stop gear 302 to push the stop plate 601, and the stop plate 601 rotates to push the resistance component 7 to move. When the stop plate 601 rotates and disengages from the stop gear 302, the flattening roller 501 rotates to the spacing of the tooth groove forward, avoiding excessive tearing of the film and causing damage to the film. A guide groove 304 is provided in the accommodating cavity 303, and the resistance component 7 is slidably installed in the guide groove 304.

[0058] The abutment assembly 7 includes a push spring 701 and a slider 702 disposed in the guide groove 304 , and a push rod 703 disposed on the slider 702 and abutting against the anti-rotation plate 601 .

[0059] The guide groove 304 is opened at the bottom of the accommodating cavity 303, and is an arc groove opened with the rotation axis of the anti-rotation plate 601 as the center. In the initial state, the push spring 701 pushes the slider 702 to move to one end of the guide groove 304, thereby driving the push rod 703 to push the tooth groove of the anti-rotation plate 601 and the anti-rotation gear 302 to engage.

[0060] The elastic reset mechanism 4 includes a reset spring 401 and a drive ring 402 sleeved on the outer circumference of the test probe 2 , and a drive rack 403 arranged on the drive ring 402 .

[0061] A driving gear block 305 is disposed at one end of the stretching and pressing rod 301 close to the pedestal 201 , and the driving gear block 305 is meshed with the driving rack 403 for transmission.

[0062] One end of the reset spring 401 contacts the top of the pedestal 201, and the other end contacts the drive ring 402. Two drive racks 403 are symmetrically arranged and are both welded to the edge of the drive ring 402. The symmetrical drive racks 403 and the stretching and pressing rods 301 are meshed and driven, wherein the drive racks 403 are double-sided racks. There is a spacing between the two stretching and pressing rods 301, and the spacing is used for the plugging of the drive racks 403. Through the plugging of the drive racks 403, the synchronous expansion and contraction of the two stretching and pressing rods 301 are achieved. The outer ring of the test probe 2 is threadedly sleeved with a limit sleeve 202, and the limit sleeve 202 and the drive ring 402 are in contact and matched.

[0063] The limit sleeve 202 and the test probe 2 are connected by threads, so that when the elastic reset ability of the reset spring 401 is insufficient after long-term use, the limit sleeve 202 can be disassembled, and then the drive ring 402 and the reset spring 401 can be removed in turn and quickly replaced.

[0064] There are three reasons why a torsion spring is not used directly for the stretching pressure rod 301:

[0065] 1. Inconvenient disassembly. The torsion spring is generally arranged inside the rotating shaft, and its structure is relatively small. When the torque of the torsion spring decreases, it is difficult to replace the torsion spring without professional maintenance personnel. The present invention is connected to the test probe 2 through the reset spring 401, and then the two stretching pressure rods 301 are driven to rotate and reset through the drive ring 402 and the drive rack 403. The structure is simple and convenient, and the assembly is also relatively simple. During the later maintenance, it can be replaced without professional maintenance personnel.

[0066] Second, the setting of the torsion spring makes it impossible for the two stretching components 5 to fit together to protect the test probe 2. If a torsion spring is used and the two stretching components 5 fit together to protect the test probe 2, then when in use, it is necessary to manually pry the two fitted stretching components 5 apart, and then press down to make the stretching components 5 stretch the film. However, in this case, the operation becomes meaningless, because manually prying apart the two fitted stretching components 5 is not as good as manually stretching the film. If the stretching components 5 do not need to be manually pried apart, the two stretching components 5 cannot fit together. In summary, the design of the torsion spring either makes the equipment difficult to use, or the stretching components 5 cannot protect the test probe 2.

[0067] 3. The wrinkle degree of the stretched film has a low applicable range. Through the design of the torsion spring, in order to facilitate the use of the equipment, the protection of the test probe 2 will be abandoned, that is, the initial state of the stretching pressure rod 301 is an eight-shaped shape, and the expansion of the eight-shaped stretching pressure rod 301 and the expansion of the stretching pressure rod 301 that is bonded together can be seen. The expansion range of the stretching pressure rod 301 that is bonded together is wider, so that it can be used for films with large wrinkles. The torsion spring is used to make the stretching pressure rod 301 in an eight-shaped design, and its expansion range is small. When the wrinkle degree of the film is large, the film is still not flat after expanding to the bottom.

[0068] A support frame 101 is provided on the main body 1 of the square resistance tester, and the support frame 101 and the main body 1 of the square resistance tester are rotatably installed.

[0069] The support frame 101 is rotatably mounted on the main body 1 of the square resistance tester, so that the device can be supported at different angles when in use, thereby making it more convenient to measure and view data.

[0070] S1. Place the film to be tested on the testing workbench;

[0071] S2, pressing down the test probe 2, and stretching the film through the stretching component 5 in the stretching mechanism 3;

[0072] S3, after the film is flattened, the probe of the test probe 2 contacts the film to perform a square resistance test;

[0073] S4, after the test is completed, the test probe 2 is moved upward, so that the stretching component 5 is retracted under the action of the elastic reset mechanism 4.

[0074] In all the schemes mentioned above, the connection between two parts can be selected according to actual conditions by welding, bolt and nut matching connection, bolt or screw connection or other well-known connection methods, which are not described one by one here. In the above, welding is preferred for all fixed connections. Although the embodiments of the present invention have been shown and described, it can be understood by ordinary technicians in this field that various changes, modifications, substitutions and deformations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A high-precision thin-film square resistance tester, comprising a square resistance tester body (1), and a test probe (2) electrically connected to the square resistance tester body (1), wherein: The outer ring of the test probe (2) is integrally formed with a pedestal (201), and a flattening mechanism (3) is rotatably mounted on the pedestal (201), an elastic reset mechanism (4) is arranged above the pedestal (201), and the elastic reset mechanism (4) and the flattening mechanism (3) are meshed with each other; The stretching mechanism (3) comprises a stretching pressure rod (301) rotatably mounted on the pedestal (201), a stretching assembly (5) arranged on the stretching pressure rod (301), and a stop gear (302) arranged on the stretching assembly (5); An accommodating cavity (303) is provided at one end of the stretching and pressing rod (301) away from the pedestal (201), and a pressure-applying unlocking mechanism (6) is provided inside the accommodating cavity (303); The stop gear (302) is arranged in the accommodating cavity (303), and in an initial state, the stop gear (302) is meshed and engaged with the pressure-applying unlocking mechanism (6).

2. A high-precision thin film square resistance tester according to claim 1, characterized in that: The stretching assembly (5) comprises a stretching roller (501) rotatably mounted on an end of the stretching pressure rod (301) away from the pedestal (201), and a rubber pad (502) arranged on a circumferential side wall of the stretching roller (501); The stretching roller (501) is rotatably mounted via rotating shafts at both ends and the stretching pressure rod (301), and the anti-rotation gear (302) is fixedly connected to the rotating shaft of the stretching roller (501).

3. A high-precision thin film square resistance tester according to claim 2, characterized in that: The pressure-applying unlocking mechanism (6) comprises a rotation-stopping plate (601) rotatably mounted in the accommodating cavity (303), and a resisting component (7) arranged on one side of the rotation-stopping plate (601); The abutment assembly (7) abuts against and pushes the anti-rotation plate (601) and the tooth groove of the anti-rotation gear (302) to engage.

4. A high-precision thin film square resistance tester according to claim 3, characterized in that: A guide groove (304) is provided in the accommodating cavity (303), and the abutment component (7) is slidably mounted in the guide groove (304).

5. A high-precision thin film square resistance tester according to claim 4, characterized in that: The abutment assembly (7) comprises a push spring (701) and a slider (702) arranged in the guide groove (304), and a push rod (703) arranged on the slider (702) and abutting against the anti-rotation plate (601).

6. A high-precision thin film square resistance tester according to claim 5, characterized in that: The elastic reset mechanism (4) comprises a reset spring (401) sleeved on the outer circumference of the test probe (2) and a drive ring (402), and a drive rack (403) arranged on the drive ring (402).

7. The high-precision thin film square resistance tester according to claim 6, characterized in that: A driving tooth block (305) is provided at one end of the stretching and pressing rod (301) close to the pedestal (201), and the driving tooth block (305) and the driving rack (403) are meshed for transmission.

8. The high-precision thin film square resistance tester according to claim 7, characterized in that: The outer ring of the test probe (2) is threadedly sleeved with a limit sleeve (202), and the limit sleeve (202) and the drive ring (402) are in abutment with each other and match each other.

9. A high-precision thin film square resistance tester according to claim 8, characterized in that: A support frame (101) is provided on the main body (1) of the square resistance tester, and the support frame (101) and the main body (1) of the square resistance tester are rotatably mounted.

10. A high-precision thin film square resistance test method, characterized in that: A high-precision thin film square resistance tester comprising any one of claims 1 to 9, and S1. Place the film to be tested on the testing workbench; S2, pressing down the test probe (2) to flatten the film through the flattening component (5) in the flattening mechanism (3); S3, after the film is flattened, the probe of the test probe (2) contacts the film to perform a square resistance test; S4. After the test is completed, the test probe (2) is moved upward, so that the stretching component (5) is retracted under the action of the elastic reset mechanism (4).

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