Lens module and test probe card

Abstract

The invention relates to the technical field of CIS chip testing, in particular to a lens module and a test probe card. The lens module comprises a substrate, wherein the substrate is provided with a plurality of openings which are distributed at intervals and extend in a penetrating manner; the plurality of objective lenses are respectively mounted in the plurality of openings in a one-to-one correspondence manner through position adjusting mechanisms; the position adjusting mechanism comprises a plurality of vertical adjusting mechanisms and a plurality of horizontal adjusting mechanisms, and each objective lens can adjust the vertical distance or included angle between the objective lens and a corresponding object to be measured through the vertical adjusting mechanism of the position adjusting mechanism and adjust the horizontal position of the objective lens through the horizontal adjusting mechanism of the position adjusting mechanism; wherein the focal length of each objective lens is adjusted through a vertical adjusting mechanism of the position adjusting mechanism and a horizontal adjusting mechanism of the position adjusting mechanism. According to the lens module, the focal length can be independently adjusted, so that the objective lens is accurately focused, and an optical signal can be aligned to a to-be-measured part of the CIS chip.

Description

Technical Field

[0001] The present invention relates to the technical field of CIS chip testing, and in particular to a lens module and a testing probe card. Background Art

[0002] The test probe card has a probe card body and multiple lens modules installed on the probe card body. The probe card body can emit light signals. The emitted light signals are irradiated onto the CIS chip through the lens modules, and then the CIS chip transmits the light signals to the test machine for analysis.

[0003] However, there are manufacturing tolerances between the probe card body and the lens module, which causes the lens module to deviate from the preset installation position. In addition, the CIS chip may also deviate from the position to be tested, which in turn causes inaccurate focusing of the lens module and makes it impossible for the optical signal to be aligned with the part to be tested on the CIS chip. Summary of the invention

[0004] The purpose of the present invention is to overcome the problem of inaccurate focusing of the lens module existing in the prior art.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a lens module on one hand, which includes: a substrate, which is provided with a plurality of openings that are spaced apart and extend through; and a plurality of objective lenses, which are respectively installed in the plurality of openings in a one-to-one correspondence through position adjustment mechanisms; the position adjustment mechanism includes a plurality of vertical adjustment mechanisms and a plurality of horizontal adjustment mechanisms, each of the objective lenses can adjust its vertical distance or angle with the corresponding object to be measured through the vertical adjustment mechanism of the position adjustment mechanism and can adjust its horizontal position through the horizontal adjustment mechanism of the position adjustment mechanism; wherein, each objective lens adjusts its focal length through the vertical adjustment mechanism of the position adjustment mechanism and the horizontal adjustment mechanism of the position adjustment mechanism.

[0006] In some embodiments, a fixing seat is installed in the opening, a light hole is provided in the middle of the fixing seat for light to pass through, the fixing seat is installed in the opening through multiple horizontal adjustment mechanisms, and the objective lens is installed on the fixing seat through multiple vertical adjustment mechanisms.

[0007] In some embodiments, the fixing seat is provided with a plurality of positioning holes spaced circumferentially around the light-through hole, and the objective lens is provided with a plurality of first locking holes spaced circumferentially around the light-through hole, and the plurality of first locking holes correspond one-to-one to the plurality of positioning holes; a plurality of vertical adjustment mechanisms are inserted one-to-one into the plurality of mutually corresponding positioning holes and first locking holes, and the vertical adjustment mechanisms can adjust the vertical distance or angle of the objective lens relative to the fixing seat.

[0008] In some embodiments, the number of the vertical adjustment mechanisms is three or more; correspondingly, the number of the first locking holes and the positioning holes is three or more.

[0009] In some embodiments, the vertical adjustment mechanism is a vertical adjustment bolt, and the vertical adjustment bolt is threadedly connected to the corresponding first locking hole.

[0010] In some embodiments, an elastic member is disposed between the fixing seat and the objective lens, and the elastic member can provide a force to move the fixing seat and the objective lens away from each other.

[0011] In some embodiments, the objective lens is provided with a plurality of accommodating holes which are circumferentially spaced around the light-transmitting hole; there are a plurality of elastic members, and the plurality of elastic members are installed in the plurality of accommodating holes in a one-to-one correspondence, one end of the elastic member contacts the bottom of the accommodating hole, and the other end of the elastic member contacts the bottom of the fixing seat.

[0012] In some embodiments, a positioning member is provided at the bottom of the elastic member, and the elastic member contacts the bottom of the accommodating hole through the positioning member.

[0013] In some embodiments, the bottom of the receiving hole is conical, arc-shaped or trapezoidal.

[0014] In some embodiments, a support platform distributed around the objective lens is provided in the opening, and the fixing seat is installed on the top surface of the support platform through a plurality of horizontal adjustment mechanisms.

[0015] In some embodiments, the support table is provided with a plurality of second locking holes spaced circumferentially around the objective lens; the fixed seat is provided with a plurality of horizontal adjustment holes spaced circumferentially around the objective lens, the plurality of horizontal adjustment holes respectively correspond one-to-one to the plurality of second locking holes, and the aperture of the horizontal adjustment hole is larger than the aperture of the second locking hole; a plurality of horizontal adjustment mechanisms are inserted one-to-one into the plurality of mutually corresponding horizontal adjustment holes and second locking holes, and the horizontal adjustment mechanism is configured to be able to press the fixed seat against the top surface of the support table or allow the fixed seat to move on the top surface of the support table.

[0016] In some embodiments, the horizontal adjustment mechanism is a horizontal adjustment bolt, and the horizontal adjustment bolt is threadedly connected to the corresponding second locking hole.

[0017] The present invention also provides a test probe card, which includes a probe card body and the lens module of the above embodiment, wherein the lens module is installed at the bottom of the probe card body.

[0018] The above technical solution of the present invention has the following beneficial effects:

[0019] The objective lens is installed in the opening of the substrate through a position adjustment mechanism. The objective lens can adjust its vertical distance or angle with the corresponding object to be measured through the vertical adjustment mechanism of the position adjustment mechanism, and the objective lens can also adjust its horizontal position through the horizontal adjustment mechanism of the position adjustment mechanism, so that the focal length of the objective lens is adjusted, and then the objective lens is accurately focused, so that the light signal can be aligned with the part to be measured of the CIS chip. Therefore, the lens module of the present invention can adjust the focal length independently to make the objective lens focus accurately, that is, the lens module of the present invention can achieve accurate focus by adjusting the focal length, so that the light signal can be aligned with the part to be measured of the CIS chip. In particular, for a probe card with multiple objective lens modules of the present invention, all objective lens modules can perform separate and independent focal length adjustments, so that all objective lenses of the probe card can be accurately focused respectively; without the need to move the position of the probe card body as in the prior art, and adjust multiple objective lens modules as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a top view schematic diagram of a lens module in one embodiment of the present invention;

[0021] Figure 2 is a schematic diagram of a vertical adjustment mechanism and a horizontal adjustment mechanism in one embodiment of the present invention;

[0022] Figure 3 is a schematic diagram of a vertical adjustment mechanism and a horizontal adjustment mechanism in another embodiment of the present invention;

[0023] Figure 4 is a schematic diagram of the installation of the second elastic sleeve in one embodiment of the present invention;

[0024] Figure 5 is a schematic diagram of the assembly of an elastic member in one embodiment of the present invention;

[0025] Figure 6 is a schematic top view of a fixing base in one embodiment of the present invention;

[0026] Figure 7 1 is a schematic top view of an objective lens in one embodiment of the present invention.

[0027] Description of Reference Numerals

[0028] 1. Base plate; 11. Opening; 12. Support platform; 13. Second locking hole; 14. Second elastic sleeve;

[0029] 2. objective lens; 21. first locking hole; 22. receiving hole;

[0030] 3. Vertical adjustment mechanism; 31. Vertical adjustment bolt; 32. Elastic member; 33. Positioning member;

[0031] 4. Horizontal adjustment mechanism; 41. Horizontal adjustment bolt;

[0032] 5. Fixed seat; 51. Light-through hole; 52. Positioning hole; 53. Horizontal adjustment hole; 54. First accommodating groove; 55. First elastic sleeve; 56. Second accommodating groove. DETAILED DESCRIPTION

[0033] The features and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present invention, rather than to limit the present invention. For those skilled in the art, the present invention can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by illustrating examples of the present invention.

[0034] like Figures 1 to 5 As shown, the present invention provides a lens module, which includes a substrate 1 and a plurality of objective lenses 2. The substrate 1 is provided with a plurality of openings 11 which are spaced apart and extend through. The plurality of objective lenses 2 are respectively installed in the plurality of openings 11 in a one-to-one correspondence through a position adjustment mechanism; the position adjustment mechanism includes a plurality of vertical adjustment mechanisms 3 and a plurality of horizontal adjustment mechanisms 4, and each of the objective lenses 2 can adjust its vertical distance or angle with the corresponding object to be measured through the vertical adjustment mechanism 3 of the position adjustment mechanism and can adjust its horizontal position through the horizontal adjustment mechanism 4 of the position adjustment mechanism. Among them, each objective lens 2 adjusts its focal length through the vertical adjustment mechanism 3 of the position adjustment mechanism and the horizontal adjustment mechanism 4 of the position adjustment mechanism; that is, the focal length of the objective lens 2 on the part to be measured is adjusted by the position adjustment mechanism.

[0035] Specifically, the objective lens 2 is installed in the opening 11 of the substrate 1 through a position adjustment mechanism, and the objective lens 2 can adjust its vertical distance or angle with the corresponding object to be measured through the vertical adjustment mechanism 3 of the position adjustment mechanism, and the objective lens 2 can also adjust its horizontal position through the horizontal adjustment mechanism 4 of the position adjustment mechanism, so that the focal length of the objective lens 2 is adjusted, and then the objective lens 2 is accurately focused, so that the light signal can be aligned with the part to be measured of the CIS chip. Therefore, the lens module of the present invention can independently achieve focal length adjustment, so that the objective lens 2 is accurately focused, that is, the lens module of the present invention can achieve accurate focus by adjusting the focal length, so that the light signal can be aligned with the part to be measured of the CIS chip. In particular, for a probe card having multiple objective lens modules of the present invention, all objective lens modules can be individually and independently adjusted in focal length, so that all objective lenses 2 of the probe card can be accurately focused respectively; without the need to adjust the position of the probe card body as in the prior art, and adjust multiple objective lens modules as a whole. Therefore, the technical solution of the present invention fully solves the tolerance problem of a single objective lens module or a single CIS chip to be measured.

[0036] like Figures 2 to 5 As shown, in some embodiments of the present invention, a fixing seat 5 is installed in the opening 11, a light hole 51 for light to pass through is provided in the middle of the fixing seat 5, the fixing seat 5 is installed in the opening 11 through a plurality of horizontal adjustment mechanisms 4, and the objective lens 2 is installed on the fixing seat 5 through a plurality of vertical adjustment mechanisms 3.

[0037] Specifically, the horizontal position of the fixing seat 5 can be adjusted by adjusting the horizontal adjustment mechanism 4. Since the objective lens 2 is mounted on the fixing seat 5, the horizontal position of the objective lens 2 can be adjusted accordingly. In addition, the vertical distance or angle of the objective lens 2 relative to the fixing seat 5 can be adjusted by adjusting the vertical adjustment mechanism 3, so that the focal length of the objective lens 2 can be adjusted. By providing the fixing seat 5, it is convenient to cooperate with the horizontal adjustment mechanism 4 and the vertical adjustment mechanism 3, so as to facilitate the adjustment of the focal length of the objective lens 2.

[0038] like Figure 2 , Figure 3 and Figure 6 As shown, in some embodiments of the present invention, the fixing seat 5 is provided with a plurality of positioning holes 52 which are circumferentially spaced around the light-through hole 51, and the objective lens 2 is provided with a plurality of first locking holes 21 which are circumferentially spaced around the light-through hole 51, and the plurality of first locking holes 21 correspond one-to-one to the plurality of positioning holes 52; a plurality of vertical adjustment mechanisms 3 are inserted one-to-one into the plurality of mutually corresponding positioning holes 52 and first locking holes 21, and the vertical adjustment mechanisms 3 can adjust the vertical distance or angle of the objective lens 2 relative to the fixing seat 5.

[0039] Specifically, the positioning hole 52 extends through the fixing seat 5 in the thickness direction, the first locking hole 21 extends from the top surface of the objective lens 2 to the bottom surface thereof, and the axes of the first locking hole 21 and the positioning hole 52 coincide. When the vertical adjustment mechanism 3 is inserted into the first locking hole 21 and the positioning hole 52, a part of the vertical adjustment mechanism 3 is connected to the fixing seat 5, and a part of the vertical adjustment mechanism 3 is connected to the objective lens 2, so the objective lens 2 can be connected to the fixing seat 5 through the vertical adjustment mechanism 3. Moreover, by adjusting the vertical adjustment mechanism 3, the vertical distance or angle of the objective lens 2 relative to the fixing seat 5 can be adjusted, and then the vertical distance or angle relative to the corresponding object to be measured can be adjusted.

[0040] The vertical adjustment mechanism 3 can adjust the focal length of the objective lens 2 in a variety of configurations, which are not limited in the present invention. Figure 2 As shown, a first elastic sleeve 55 is provided in the positioning hole 52, the outer wall of the first elastic sleeve 55 is fixedly connected to the hole wall of the positioning hole 52, the first elastic sleeve 55 is sleeved on the outside of the vertical adjustment mechanism 3, and the bottom of the vertical adjustment mechanism 3 is fixedly connected to the objective lens 2. In a natural state, the inner diameter of the first elastic sleeve 55 is smaller than the cross-sectional size of the vertical adjustment mechanism 3, so that the first elastic sleeve 55 can clamp and position the vertical adjustment mechanism 3. When an appropriate external force is applied to the vertical adjustment mechanism 3, the vertical adjustment mechanism 3 can overcome the clamping force of the first elastic sleeve 55 and move appropriately downward or upward along the first elastic sleeve 55 to adjust the vertical distance or angle of the objective lens 2 relative to the fixing seat 5; when the external force is cancelled, the first elastic sleeve 55 clamps and positions the vertical adjustment mechanism 3, thereby fixing the focal length of the objective lens 2. In this embodiment, the vertical adjustment mechanism 3 can be a pin.

[0041] In some embodiments, the number of the vertical adjustment mechanisms 3 is three or more; accordingly, the number of the first locking holes 21 and the positioning holes 52 is three or more. When three vertical adjustment mechanisms 3 are provided, the objective lens 2 can be adjusted in more angle dimensions, achieving a better technical effect in focusing.

[0042] like Figure 3 As shown, in some embodiments of the present invention, the vertical adjustment mechanism 3 is a vertical adjustment bolt 31 , and the vertical adjustment bolt 31 is threadedly connected to the corresponding first locking hole 21 .

[0043] Specifically, an external thread is provided on the hole wall of the first locking hole 21. By rotating the vertical adjustment bolt 31 in the forward direction, the length of the vertical adjustment bolt 31 extending into the first locking hole 21 increases, the objective lens 2 can be displaced toward the fixing seat 5, and the angle or vertical distance between the objective lens 2 and the fixing seat 5 decreases. By rotating the vertical adjustment bolt 31 in the reverse direction, the length of the vertical adjustment bolt 31 extending into the first locking hole 21 decreases, the objective lens 2 can be displaced away from the fixing seat 5, and the angle or vertical distance between the objective lens 2 and the fixing seat 5 increases. In addition, the use of threaded connection can improve the adjustment accuracy, for example, to achieve small-amplitude fine-tuning of the objective lens 2.

[0044] In some embodiments, Figure 2 and Figure 3 As shown, a plurality of first receiving grooves 54 are provided on the top of the fixing seat 5, and the plurality of first receiving grooves 54 are connected to the plurality of positioning holes 52 in a one-to-one correspondence. The diameter of the first receiving groove 54 is larger than the diameter of the positioning hole 52, and the head of the vertical adjustment bolt 31 can be accommodated in the first receiving groove 54.

[0045] In some embodiments, Figure 7 As shown, there are three vertical adjustment bolts 31, three first locking holes 21 and three positioning holes 52. Projected in the thickness direction of the fixing base 5, the connecting line of the centers of the three first locking holes 21, the connecting line of the centers of the three positioning holes 52, and the connecting line of the axes of the three vertical adjustment bolts 31 are all equilateral triangles.

[0046] like Figure 4 and Figure 5 As shown, in some embodiments of the present invention, an elastic member 32 is provided between the fixing seat 5 and the objective lens 2, and the elastic member 32 can provide a force to move the fixing seat 5 and the objective lens 2 away from each other.

[0047] Specifically, the elastic member 32 can provide a force to move the fixing seat 5 and the objective lens 2 away from each other, so that the objective lens 2 is positioned and fixed, and further the focal length of the objective lens 2 is fixed. The elastic member 32 can be a component with good elasticity such as a spring, elastic sponge or elastic rubber.

[0048] like Figure 4 , Figure 5 and Figure 7 As shown, in some embodiments of the present invention, the objective lens 2 is provided with a plurality of accommodating holes 22 circumferentially distributed around the light-transmitting hole 51; the number of elastic members 32 is multiple, and the multiple elastic members 32 are installed in the multiple accommodating holes 22 one by one, one end of the elastic member 32 contacts the bottom of the accommodating hole 22, and the other end of the elastic member 32 contacts the bottom of the fixing seat 5.

[0049] Specifically, the accommodating hole 22 extends from the top surface of the objective lens 2 to the bottom surface thereof. The accommodating hole 22 is provided on the objective lens 2. On the one hand, it is convenient to receive and hide the elastic member 32 to prevent the distance between the fixing seat 5 and the objective lens 2 from increasing due to the provision of the elastic member 32; on the other hand, it is convenient to use the elastic member 32 with a larger volume or length, so as to increase the force between the fixing seat 5 and the objective lens 2 to move away from each other, thereby forming a good fixation for the objective lens 2.

[0050] like Figure 4 and Figure 5 As shown, in some embodiments of the present invention, a positioning member 33 is provided at the bottom of the elastic member 32 , and the elastic member 32 contacts the bottom of the receiving hole 22 through the positioning member 33 .

[0051] Specifically, by providing the positioning member 33 , good contact can be formed between the elastic member 32 and the bottom of the accommodating hole 22 , so that the elastic member 32 can stably apply force to the fixing seat 5 and the objective lens 2 .

[0052] In some embodiments, the elastic member 32 is a helical spring or a hollow rubber rod, etc. In some embodiments, the positioning member 33 is a spherical, hemispherical, ellipsoidal or cylindrical member.

[0053] In some embodiments of the present invention, the bottom of the receiving hole 22 is conical, arc-shaped or trapezoidal, so that good contact is further formed between the bottom of the receiving hole 22 and the positioning member 33 .

[0054] like Figures 2 to 5 As shown, in some embodiments of the present invention, a support platform 12 distributed around the objective lens 2 is provided in the opening 11 , and the fixing seat 5 is installed on the top surface of the support platform 12 through a plurality of horizontal adjustment mechanisms 4 .

[0055] Specifically, the support platform 12 is annular, the outer side of the support platform 12 is fixedly connected to the peripheral wall of the opening 11, and the inner side of the support platform 12 surrounds the objective lens 2. The bottom surface of the support platform 12 is flush with the bottom surface of the substrate 1, and the top surface of the support platform 12 is located between the bottom surface of the substrate 1 and the top surface of the substrate 1. The support platform 12 and the substrate 1 can be integrally formed. The support platform 12 can support the fixed seat 5, so that the fixed seat 5 can be adjusted by the horizontal adjustment mechanism 4.

[0056] like Figures 2 to 5As shown, in some embodiments of the present invention, the support platform 12 is provided with a plurality of second locking holes 13 circumferentially spaced around the objective lens 2; the fixed seat 5 is provided with a plurality of horizontal adjustment holes 53 circumferentially spaced around the objective lens 2, the plurality of horizontal adjustment holes 53 respectively correspond to the plurality of second locking holes 13 one by one, and the aperture of the horizontal adjustment hole 53 is larger than the aperture of the second locking hole 13; a plurality of horizontal adjustment mechanisms 4 are inserted one by one into the plurality of mutually corresponding horizontal adjustment holes 53 and the second locking holes 13, and the horizontal adjustment mechanism 4 is configured to be able to press the fixed seat 5 against the top surface of the support platform 12 or allow the fixed seat 5 to move on the top surface of the support platform 12.

[0057] Specifically, the second locking hole 13 extends from the top surface of the support platform 12 to the bottom surface thereof, the horizontal adjustment hole 53 extends through the fixing seat 5 in the thickness direction, and the horizontal adjustment mechanism 4 is inserted into the second locking hole 13 and the horizontal adjustment hole 53. When the horizontal adjustment mechanism 4 allows the fixing seat 5 to move on the top surface of the support platform 12, the position of the fixing seat 5 on the support platform 12 is adjusted so that the fixing seat 5 drives the objective lens 2 to the target position; then the horizontal adjustment mechanism 4 is adjusted so that the fixing seat 5 is pressed against the top surface of the support platform 12 by the horizontal adjustment mechanism 4 so that the horizontal position of the objective lens 2 is fixed.

[0058] The horizontal adjustment mechanism 4 can adjust the horizontal position of the objective lens 2 in a variety of configurations, which are not limited in the present invention. Figure 4 As shown, a second elastic sleeve 14 is provided in the second lock hole 13, and the outer wall of the second elastic sleeve 14 is fixedly connected to the hole wall of the second lock hole 13, and the second elastic sleeve 14 is sleeved on the outside of the horizontal adjustment mechanism 4. In a natural state, the inner diameter of the second elastic sleeve 14 is smaller than the cross-sectional size of the horizontal adjustment mechanism 4, so that the second elastic sleeve 14 can clamp the horizontal adjustment mechanism 4. When the horizontal adjustment mechanism 4 is separated from the second elastic sleeve 14 in the second lock hole 13, there is a gap between the horizontal adjustment mechanism 4 and the hole wall of the horizontal adjustment hole 53, so that the fixed seat 5 can move on the top surface of the support platform 12; then the horizontal adjustment mechanism 4 is inserted into the second elastic sleeve 14 in the second lock hole 13, so that the second elastic sleeve 14 clamps and positions the horizontal adjustment mechanism 4, and the horizontal adjustment mechanism 4 presses the fixed seat 5 against the top surface of the support platform 12, so that the horizontal position of the fixed seat 5 and the objective lens 2 is fixed, thereby adjusting the focal length of the objective lens 2. In this embodiment, the horizontal adjustment mechanism 4 can be a pin.

[0059] like Figure 3 and Figure 5 As shown, in some embodiments of the present invention, the horizontal adjustment mechanism 4 is a horizontal adjustment bolt 41 , and the horizontal adjustment bolt 41 is threadedly connected to the corresponding second locking hole 13 .

[0060] Specifically, an external thread is provided on the hole wall of the second locking hole 13. The horizontal adjustment bolt 41 is rotated in the reverse direction to make the head of the horizontal adjustment bolt 41 away from the fixing seat 5. Since the hole diameter of the horizontal adjustment hole 53 is larger than the hole diameter of the second locking hole 13, there is a gap between the horizontal adjustment bolt 41 and the hole wall of the horizontal adjustment hole 53, thereby allowing the fixing seat 5 to move on the top surface of the support platform 12. When the fixing seat 5 moves to the target position, the horizontal adjustment bolt 41 is rotated forward to make the head of the horizontal adjustment bolt 41 press against the fixing seat 5, so that the fixing seat 5 is positioned and fixed.

[0061] In some embodiments, Figures 2 to 5 As shown, a plurality of second accommodating grooves 56 are provided on the top of the fixing seat 5 , and all the second accommodating grooves 56 correspond to all the horizontal adjustment holes 53 one by one. The second accommodating grooves 56 can accommodate the heads of the horizontal adjustment bolts 41 .

[0062] In some embodiments, the number of the horizontal adjustment mechanisms 4, the number of the horizontal adjustment holes 53, and the number of the second locking holes 13 are two or more. Figure 4 As shown, the number of horizontal adjustment mechanisms 4, the number of horizontal adjustment holes 53 and the number of second lock holes 13 are all two; and projected in the thickness direction of the fixing seat 5, the centers of the two horizontal adjustment holes 53 are located on a straight line of a certain diameter of the light-transmitting hole 51.

[0063] The present invention also provides a test probe card, which includes a probe card body and the lens module of the above embodiment, wherein the lens module is installed at the bottom of the probe card body.

[0064] Specifically, the test probe card adopts the lens module of the above embodiment, so the test probe card can also achieve the above beneficial effects.

[0065] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. The above are only preferred implementation methods of the present invention. It should be pointed out that due to the limitations of textual expression, there are objectively infinite specific structures. For ordinary technicians in this technical field, without departing from the principles of the present invention, they can make several improvements, modifications or changes, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the concept and technical solution of the present invention to other occasions without improvement, should be regarded as the protection scope of the present invention.

Claims

1. A lens module, characterized in that: include: A substrate (1), wherein the substrate (1) is provided with a plurality of openings (11) which are spaced apart and extend through the substrate; as well as A plurality of objective lenses (2), wherein the plurality of objective lenses (2) are respectively installed in the plurality of openings (11) in a one-to-one correspondence via a position adjustment mechanism; The position adjustment mechanism comprises a plurality of vertical adjustment mechanisms (3) and a plurality of horizontal adjustment mechanisms (4); each of the objective lenses (2) can adjust its vertical distance or angle with a corresponding object to be measured through the vertical adjustment mechanism (3) of the position adjustment mechanism, and can adjust its horizontal position through the horizontal adjustment mechanism (4) of the position adjustment mechanism; wherein each of the objective lenses (2) can adjust its focal length through the vertical adjustment mechanism (3) of the position adjustment mechanism and the horizontal adjustment mechanism (4) of the position adjustment mechanism.

2. The lens module according to claim 1, characterized in that: A fixing seat (5) is installed in the opening (11), a light hole (51) is provided in the middle of the fixing seat (5) for light to pass through, the fixing seat (5) is installed in the opening (11) via a plurality of the horizontal adjustment mechanisms (4), and the objective lens (2) is installed on the fixing seat (5) via a plurality of the vertical adjustment mechanisms (3).

3. The lens module according to claim 2, characterized in that: The fixing seat (5) is provided with a plurality of positioning holes (52) which are spaced apart and circumferentially distributed around the light-through hole (51); the objective lens (2) is provided with a plurality of first locking holes (21) which are spaced apart and circumferentially distributed around the light-through hole (51); the plurality of first locking holes (21) correspond one-to-one to the plurality of positioning holes (52); the plurality of vertical adjustment mechanisms (3) are inserted one-to-one into the plurality of mutually corresponding positioning holes (52) and the first locking holes (21); the vertical adjustment mechanisms (3) are capable of adjusting the vertical distance or angle of the objective lens (2) relative to the fixing seat (5).

4. The lens module according to claim 3, characterized in that: The number of the vertical adjustment mechanisms (3) is three or more; correspondingly, the number of the first locking holes (21) and the positioning holes (52) is three or more.

5. The lens module according to claim 3, characterized in that: The vertical adjustment mechanism (3) is a vertical adjustment bolt (31), and the vertical adjustment bolt (31) is threadedly connected to the corresponding first locking hole (21).

6. The lens module according to claim 3, characterized in that: An elastic member (32) is provided between the fixing seat (5) and the objective lens (2), and the elastic member (32) can provide a force that causes the fixing seat (5) and the objective lens (2) to move away from each other.

7. The lens module according to claim 6, characterized in that: The objective lens (2) is provided with a plurality of accommodating holes (22) which are spaced and distributed circumferentially around the light-through hole (51); the number of the elastic members (32) is plural, and the plurality of elastic members (32) are installed in the plurality of accommodating holes (22) in a one-to-one correspondence, one end of the elastic member (32) contacts the bottom of the accommodating hole (22), and the other end of the elastic member (32) contacts the bottom of the fixing seat (5).

8. The lens module according to claim 7, characterized in that: A positioning piece (33) is provided at the bottom of the elastic piece (32), and the elastic piece (32) is in contact with the bottom of the accommodating hole (22) through the positioning piece (33).

9. The lens module according to claim 7 or 8, characterized in that: The bottom of the accommodating hole (22) is conical, arc-shaped or trapezoidal.

10. The lens module according to claim 2, characterized in that: A support platform (12) distributed around the objective lens (2) is provided in the opening (11), and the fixing seat (5) is mounted on the top surface of the support platform (12) via a plurality of horizontal adjustment mechanisms (4).

11. The lens module according to claim 10, characterized in that: The support platform (12) is provided with a plurality of second locking holes (13) which are spaced apart and distributed circumferentially around the objective lens (2); The fixing seat (5) is provided with a plurality of horizontal adjustment holes (53) which are spaced apart and circumferentially distributed around the objective lens (2); the plurality of horizontal adjustment holes (53) correspond to the plurality of second locking holes (13) one by one, respectively, and the aperture of the horizontal adjustment hole (53) is larger than the aperture of the second locking hole (13); The plurality of horizontal adjustment mechanisms (4) are inserted into the plurality of mutually corresponding horizontal adjustment holes (53) and the second locking holes (13) in a one-to-one correspondence, and the horizontal adjustment mechanisms (4) are configured to be able to press the fixing seat (5) against the top surface of the support platform (12) or allow the fixing seat (5) to move on the top surface of the support platform (12).

12. The lens module according to claim 11, characterized in that: The horizontal adjustment mechanism (4) is a horizontal adjustment bolt (41), and the horizontal adjustment bolt (41) is threadedly connected to the corresponding second locking hole (13).

13. A test probe card, characterized in that: It comprises a probe card body and a lens module as described in any one of claims 1 to 12, wherein the lens module is installed at the bottom of the probe card body.

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