Temperature control device and temperature control method for compensating and controlling temperature by using Peltier

Abstract

The invention provides a temperature control device and method for temperature control through Peltier compensation, the temperature control device for temperature control through Peltier compensation comprises a machine table, a refrigerating system, a temperature control system and a Peltier module, the machine table has a target temperature during working, the refrigerating system and the temperature control system can conduct heat exchange, and the Peltier module is arranged on the machine table; according to the method, the refrigerating system provides cold energy for the temperature control system, the temperature control system reaches the set temperature, the set temperature is higher than the target temperature, the set temperature is higher than the limiting temperature of the refrigerating system, the Peltier module can transmit the cold energy of the temperature control system to the machine table, and the Peltier module can compensate the set temperature; therefore, the machine can reach the target temperature. The temperature control device for compensating and controlling the temperature by using the Peltier is high in stability, and can expand the temperature zone of a refrigerating system.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature control equipment, and in particular to a temperature control device and a temperature control method utilizing Peltier compensation temperature control. Background Art

[0002] With the continuous development of semiconductor manufacturing technology, the requirements for the stability and temperature control range of temperature control devices are getting higher and higher, especially in the low temperature direction. Traditional refrigeration systems mainly include single-stage refrigeration systems and cascade refrigeration systems. Although these two systems can cover different temperature zones, they have significant limitations under extreme working conditions. The single-stage refrigeration system is suitable for temperature zones of -40°C and above, with a simple structure and low cost. However, when the system operates at a temperature close to its limit (such as -40°C), the suction pressure is too low, or even operates under negative pressure, resulting in harsh working conditions and poor system stability. At the same time, its efficiency drops significantly at extremely low temperatures, and it is impossible to continue to expand the temperature zone downward; the cascade refrigeration system consists of two or more refrigeration cycles in different temperature zones, suitable for temperatures below -40°C to -70°C (two-stage cascade) or even lower (three-stage cascade), and can provide stable cooling output within a lower temperature range, but its limit temperature is also limited by the characteristics of the refrigerant and is difficult to further reduce. In addition, the cascade system requires multiple sets of compressors, which increases energy consumption and complexity, which is not conducive to energy saving and large-scale application. Therefore, the existing refrigeration system has poor stability under extreme working conditions, and cannot effectively expand the temperature range due to the physical properties of the refrigerant. Summary of the invention

[0003] The present invention provides a temperature control device using Peltier compensation temperature control, which is used to solve the defects of the prior art that the refrigeration system has poor stability under extreme working conditions and cannot expand the temperature range, improves the stability of the refrigeration system under extreme working conditions, and can expand the temperature.

[0004] The embodiment of the present invention discloses a temperature control device using Peltier compensation temperature control, comprising: A machine platform, wherein the machine platform has a target temperature when in operation; A refrigeration system and a temperature control system, wherein the refrigeration system and the temperature control system are capable of performing heat exchange, so that the refrigeration system provides cooling capacity for the temperature control system, so that the temperature control system reaches a set temperature, the set temperature is higher than the target temperature, and the set temperature is higher than the limit temperature of the refrigeration system; A Peltier module, wherein the Peltier module can transfer the cooling capacity of the temperature control system to the machine, and the Peltier module can compensate for the set temperature so that the machine reaches the target temperature.

[0005] In some embodiments, the temperature control system includes a first pipeline, the Peltier module includes a first end and a second end, the first end is electrically connected to the second end, the first end performs heat exchange with the machine, and the second end performs heat exchange with the medium in the first pipeline.

[0006] In some embodiments, the temperature control device using Peltier compensation temperature control includes a heat exchanger, which has a first channel and a second channel that are independent of each other and can perform heat exchange, the first channel is connected to the refrigeration system, and the second channel is connected to the temperature control system, so that the refrigeration system and the temperature control system can perform heat exchange.

[0007] In some embodiments, the temperature control system includes a water tank, an inlet end of the water tank is connected to the first pipeline, and an outlet end of the water tank is connected to the second channel.

[0008] In some embodiments, the temperature control system includes a water pump and a second pipeline, the inlet end of the water pump is connected to the outlet end of the water tank through the second pipeline, and the outlet end of the water pump is connected to the second channel.

[0009] In some embodiments, the temperature control system further includes a third pipeline, and the outlet end of the water pump is connected to the second channel through the third pipeline.

[0010] In some embodiments, the first pipeline includes a first sub-pipeline and a second sub-pipeline, one end of the first sub-pipeline is connected to the second channel, the other end of the first sub-pipeline is connected to one end of the second sub-pipeline at the Peltier module, and the other end of the second sub-pipeline is connected to the inlet end of the water tank.

[0011] In some embodiments, a flow sensor, a pressure sensor and a first temperature sensor are provided on the first sub-pipeline; A second temperature sensor is provided on the second sub-pipeline; A third temperature sensor is disposed on the first end.

[0012] In some embodiments, the refrigeration system is a single-stage refrigeration system or a cascade refrigeration system.

[0013] An embodiment of the present invention discloses a temperature control method, comprising: Control the refrigeration system to reach T0 so that the temperature control system reaches the set temperature T0; A Peltier module is used to perform heat exchange between the temperature control system and the machine, and the Peltier module is used to compensate the set temperature T0 to the target temperature Tset, wherein T0 is higher than Tset.

[0014] In the temperature control device using Peltier compensation temperature control of the embodiment of the present invention, when the temperature required by the machine is the limit temperature of the refrigeration system or slightly higher than the limit temperature of the refrigeration system, there is no need to operate the refrigeration system to the limit working condition. The temperature of the refrigeration system can be compensated by using the Peltier module, thereby reaching the target temperature required by the machine by gradually cooling the temperature, avoiding the refrigeration system from running for a long time under the limit working condition, thereby affecting the stability and service life of the temperature control device using Peltier compensation temperature control. In addition, even if the limit temperature of the refrigeration system cannot meet the needs of the machine, the Peltier module can also be used as a supplementary means to reduce the temperature to a lower level, thereby expanding the temperature range of the temperature control device using Peltier compensation temperature control. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a structural schematic diagram of a temperature control device using Peltier compensation temperature control provided by the present invention.

[0017] Figure 2 It is a schematic diagram of the Peltier module and machine provided by the present invention.

[0018] Reference numerals: 1. Machine; 2. Refrigeration system; 3. Temperature control system; 31. First pipeline; 311. First sub-pipeline; 312. Second sub-pipeline; 32. Water tank; 33. Water pump; 34. Second pipeline; 35. Third pipeline; 4. Peltier module; 41. First end; 42. Second end; 43. Power supply unit; 5. Heat exchanger; 51. First channel; 52. Second channel; 6. Flow sensor; 7. Pressure sensor; 8. First temperature sensor; 9. Second temperature sensor; 10. Third temperature sensor. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] like Figure 1 to Figure 2As shown, the temperature control device using Peltier compensation temperature control according to the embodiment of the present invention comprises a machine 1, a refrigeration system 2, a temperature control system 3 and a Peltier module 4. The machine 1 has a target temperature when working.

[0021] The refrigeration system 2 and the temperature control system 3 can perform heat exchange so that the refrigeration system 2 provides cooling for the temperature control system 3 so that the temperature control system 3 reaches a set temperature, which is higher than the target temperature and higher than the limit temperature of the refrigeration system 2 .

[0022] The Peltier module 4 can transfer the cooling capacity of the temperature control system 3 to the machine 1 , and the Peltier module 4 can compensate for the set temperature so that the machine 1 reaches the target temperature.

[0023] For example, in the temperature control device using Peltier compensation temperature control in the embodiment of the present invention, the target temperature, the set temperature and the limit temperature are all below zero. The machine 1 is a machine that needs to maintain a constant temperature, such as an etching device.

[0024] The refrigeration system 2 and the temperature control system 3 can perform effective heat exchange, so that the cooling capacity provided by the refrigeration system 2 can help the temperature control system 3 reach a set temperature, and this set temperature is set to be slightly higher than the target temperature required by the machine 1.

[0025] The Peltier module 4 is not only responsible for transferring the cooling capacity of the temperature control system 3 to the machine 1, but also can accurately adjust the cooling capacity transferred to the machine 1 through its unique temperature compensation function, thereby compensating for the difference between the set temperature and the target temperature, and ultimately ensuring that the machine 1 can stably operate at its required target temperature.

[0026] For example, the target temperature of the machine 1 is -40 degrees, the refrigeration system 2 is used to set the temperature of the temperature control system 3 to -35 degrees, and then the Peltier module 4 is used to further cool the machine 1 to -40 degrees.

[0027] In the temperature control device using Peltier compensation temperature control in the embodiment of the present invention, if the Peltier module 4 is not provided, when the refrigeration system 2 is in an extreme working condition, for example, the extreme working condition of the refrigeration system 2 is -40 degrees, if the target temperature of the machine 1 is -40 degrees, the refrigeration system 2 needs to be maintained at -40 degrees, which causes the refrigeration system 2 to operate under high load, which is not conducive to the stable operation of the refrigeration system 2. If the Peltier module 4 is added, when the target temperature of the machine 1 is -40 or close to -40 degrees, the refrigeration system 2 is set to -35 degrees, and the temperature control system 3 is maintained at -35 degrees after heat exchange with the refrigeration system 2, and then the Peltier module 4 is used to further cool down to -40 degrees, so as to exchange heat with the machine 1, thereby, the refrigeration system 2 does not need to be maintained at the extreme temperature, thereby reducing the load of the refrigeration system 2. Moreover, the use of the Peltier module 4 makes it unnecessary for the refrigeration system 2 to operate at the extreme temperature all the time, reducing unnecessary energy consumption.

[0028] In addition, when the target temperature of the machine 1 is lower than the limit temperature of the refrigeration system 2, the target temperature of the machine 1 cannot be reached by only using the refrigeration system 2. However, the Peltier module 4 can further reduce the temperature based on the limit temperature of the refrigeration system 2, thereby maintaining the temperature of the machine 1 at the target temperature. For example, the target temperature of the machine 1 is -45 degrees, and the limit temperature of the refrigeration system 2 is -40 degrees. When the refrigeration system 2 is set to -40 degrees, the Peltier module 4 can further reduce the temperature and maintain the temperature of the machine 1 at -45 degrees.

[0029] In the temperature control device using Peltier compensation temperature control of the embodiment of the present invention, when the temperature required by the machine 1 is the limit temperature of the refrigeration system 2 or slightly higher than the limit temperature of the refrigeration system 2, there is no need to operate the refrigeration system 2 to the limit working condition. The temperature of the refrigeration system 2 can be compensated by using the Peltier module 4, so as to reach the target temperature required by the machine 1 by gradually cooling the temperature, and avoid the refrigeration system 2 running for a long time under the limit working condition, thereby affecting the stability and service life of the temperature control device using Peltier compensation temperature control. In addition, even if the limit temperature of the refrigeration system 2 cannot meet the needs of the machine 1, the Peltier module 4 can also be used as a supplementary means to reduce the temperature to a lower level, thereby expanding the temperature range of the temperature control device using Peltier compensation temperature control.

[0030] Therefore, the temperature control device using Peltier compensation temperature control in the embodiment of the present invention has high stability and can expand the temperature range of the refrigeration system.

[0031] In some embodiments, Figure 1 and Figure 2As shown, the temperature control system 3 includes a first pipeline 31, and the Peltier module 4 includes a first end 41 and a second end 42, the first end 41 is electrically connected to the second end 42, the first end 41 performs heat exchange with the machine 1, and the second end 42 performs heat exchange with the medium in the first pipeline 31.

[0032] The first end 41 is a heat absorbing end, and the second end 42 is a heat releasing end. The second end 42 of the Peltier module 4 performs heat exchange with the medium in the first pipeline 31, ensuring that the cold energy obtained from the refrigeration system 2 can be transmitted to the second end 42 of the Peltier module 4 through the medium in the first pipeline 31, and then transmitted to the machine 1 through the first end 41. This design not only ensures the effective transmission and distribution of cold energy, but also enables the Peltier module 4 to be flexibly adjusted under different temperature requirements, ensuring that the machine 1 always operates stably at its set target temperature.

[0033] Optionally, the Peltier module 4 further includes a power supply unit 43 , and the power supply unit 43 is used to supply power to the Peltier module 4 .

[0034] In some embodiments, Figure 1 As shown, the temperature control device using Peltier compensation temperature control includes a heat exchanger 5, which has a first channel 51 and a second channel 52 that are independent of each other and can perform heat exchange. The first channel 51 is connected to the refrigeration system 2, and the second channel 52 is connected to the temperature control system 3, so that the refrigeration system 2 and the temperature control system 3 can perform heat exchange.

[0035] For example, the first channel 51 is connected to the refrigeration system 2, ensuring that the cold provided by the refrigeration system 2 can be smoothly transferred to the inside of the heat exchanger 5; and the second channel 52 is connected to the temperature control system 3, so that the temperature control system 3 can receive the cold from the heat exchanger 5, thereby realizing effective heat exchange between the refrigeration system 2 and the temperature control system 3. This structure not only ensures the efficient transfer of cold, but also avoids direct mixing between the two channels by physically separating the two channels, thereby ensuring the stability and efficiency of the system. At the same time, this design allows the refrigeration system 2 to provide the required cold to the temperature control system 3 without direct contact with it, further enhancing the flexibility and reliability of the system, ensuring that during the entire temperature control process, the refrigeration system 2 and the temperature control system 3 can each maintain their optimal working state, thereby providing accurate and stable temperature control for the machine 1.

[0036] In some embodiments, Figure 1 As shown, the temperature control system 3 includes a water tank 32 , an inlet end of the water tank 32 is connected to the first pipeline 31 , and an outlet end of the water tank 32 is connected to the second channel 52 .

[0037] For example, the inlet end of the water tank 32 is connected to the first pipeline 31, ensuring that the medium in the first pipeline 31 can enter the water tank 32 for temporary storage after passing through the machine 1; at the same time, the outlet end of the water tank 32 is connected to the second channel 52 of the heat exchanger 5, so that the cooling medium in the water tank 32 can be transported to the second channel 52 of the heat exchanger 5, thereby performing heat exchange with the refrigeration system 2. In this process, the medium in the temperature control system 3 absorbs heat and heats up at the machine 1 before entering the water tank 32, and then cools down and returns to the set temperature when passing through the second channel 52.

[0038] In some embodiments, Figure 1 As shown, the temperature control system 3 includes a water pump 33 and a second pipeline 34 , the inlet end of the water pump 33 is connected to the outlet end of the water tank 32 through the second pipeline 34 , and the outlet end of the water pump 33 is connected to the second channel 52 .

[0039] For example, the inlet end of the water pump 33 is connected to the outlet end of the water tank 32 through the second pipeline 34, and the outlet end of the water pump 33 is directly connected to the second channel 52 of the heat exchanger 5, ensuring that the medium flowing out of the water tank 32 can be smoothly extracted by the water pump 33 and transported to the second channel 52 of the heat exchanger 5, and then effectively heat exchanged with the refrigeration system 2. Therefore, the temperature control device using Peltier compensation temperature control in the embodiment of the present invention uses the water pump 33 to ensure the smooth flow of the medium in the temperature control system 3.

[0040] In some embodiments, Figure 1 As shown, the temperature control system 3 includes a third pipeline 35 , and the outlet end of the water pump 33 is connected to the second channel 52 through the third pipeline 35 .

[0041] For example, the outlet end of the water pump 33 is connected to the second channel 52 of the heat exchanger 5 through the third pipeline 35, ensuring that the cooling medium pressurized by the water pump 33 can efficiently and stably enter the second channel 52 of the heat exchanger 5 and perform effective heat exchange with the refrigeration system 2.

[0042] In some embodiments, Figure 1 As shown, the first pipeline 31 includes a first sub-pipeline 311 and a second sub-pipeline 312, one end of the first sub-pipeline 311 is connected to the second channel 52, the other end of the first sub-pipeline 311 is connected to one end of the second sub-pipeline 312 at the Peltier module 4, and the other end of the second sub-pipeline 312 is connected to the inlet end of the water tank 32.

[0043] For example, the first pipeline 31 includes a first sub-pipeline 311 and a second sub-pipeline 312, wherein one end of the first sub-pipeline 311 is connected to the second channel 52 of the heat exchanger 5, ensuring that the cooling medium cooled after heat exchange in the heat exchanger 5 can smoothly enter the first sub-pipeline 311; the other end of the first sub-pipeline 311 is connected to one end of the second sub-pipeline 312 at the Peltier module 4, so that the cooling medium can transfer the cold to the Peltier module 4.

[0044] The other end of the second sub-pipeline 312 is connected to the inlet end of the water tank 32, so that the medium after passing through the Peltier module 4 can smoothly flow into the water tank 32 for temporary storage, ready for the next cycle.

[0045] This design not only realizes the efficient transfer of the medium between different components, but also ensures that the medium can accurately meet the temperature requirements of the machine 1 through the precise temperature control function of the Peltier module 4, thereby improving the stability and accuracy of the entire temperature control system 3, ensuring that the machine 1 can operate under the optimal temperature conditions, and improving production efficiency and product quality.

[0046] In some embodiments, Figure 1 As shown, a flow sensor 6 , a pressure sensor 7 and a first temperature sensor 8 are provided on the first sub-pipeline 311 .

[0047] The second sub-pipeline 312 is provided with a second temperature sensor 9 .

[0048] The third temperature sensor 10 is disposed on the first end 41 .

[0049] like Figure 1 As shown, the first sub-pipeline 311 is provided with a flow sensor 6, a pressure sensor 7 and a first temperature sensor 8, which are used to monitor the flow, pressure and temperature of the cooling medium passing through the pipeline in real time. The flow sensor 6 can ensure that the cooling medium flows at an appropriate speed to avoid unstable temperature control due to insufficient or excessive flow; the pressure sensor 7 can detect the pressure change in the first sub-pipeline 311, and timely discover and prevent possible blockage or leakage problems; the first temperature sensor 8 is located on the first sub-pipeline 311, and is used to monitor the temperature of the medium flowing out of the second channel 52 of the heat exchanger 5 to ensure that it has reached the set temperature.

[0050] A second temperature sensor 9 is disposed on the second sub-pipeline 312 for monitoring the temperature of the medium that is about to enter the water tank 32 after passing through the Peltier module 4 .

[0051] In addition, a third temperature sensor 10 is provided on the first end 41 of the Peltier module 4, which is used to directly monitor the temperature of the cooling medium that performs heat exchange with the machine 1. The provision of this sensor enables the system to obtain the actual temperature data of the machine 1 in real time, ensuring that the Peltier module 4 can accurately adjust the output power as needed, thereby achieving precise control of the temperature of the machine 1.

[0052] The temperature control device using Peltier compensation temperature control in the embodiment of the present invention, by setting a flow sensor 6, a pressure sensor 7, a first temperature sensor 8, a second temperature sensor 9 and a third temperature sensor 10, enables the temperature control device using Peltier compensation temperature control to achieve efficient cold transfer and distribution, and maintain a high degree of stability and response speed, thereby ensuring that the machine 1 always operates at the target temperature, thereby improving production efficiency and product quality.

[0053] In some embodiments, Figure 1 As shown, the refrigeration system 2 is a single-stage refrigeration system 2 or a cascade refrigeration system 2. The refrigeration system 2 is a single-stage refrigeration system 2, a two-stage cascade refrigeration system 2, or a three-stage cascade refrigeration system 2.

[0054] For example, the limit temperature of a common single-stage system is -40 degrees. In the temperature range of -40 degrees and above, a single-stage refrigeration system 2 is used to achieve refrigeration.

[0055] The limit temperature of a common two-stage cascade refrigeration system 2 is -70 degrees. In the temperature range from below -40 degrees to -70 degrees, the two-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0056] The limit temperature of a common three-stage cascade system is -120 degrees. In the temperature range from below -70 degrees to -120 degrees, a three-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0057] The temperature control device using Peltier compensation temperature control in the embodiment of the present invention can select the most suitable refrigeration system 2 according to the specific temperature requirements of the machine 1, ensuring stable and accurate temperature control in any temperature zone.

[0058] The temperature control method of the embodiment of the present invention includes: Control the refrigeration system 2 to reach T0 so that the temperature control system 3 reaches the set temperature T0; The Peltier module 4 is used to perform heat exchange between the temperature control system 3 and the machine 1 , and the Peltier module 4 is used to compensate the set temperature T0 to the target temperature Tset, wherein T0 is higher than Tset.

[0059] For example, the refrigeration system 2 runs to T0, which is higher than the target temperature of the machine 1, and then the Peltier module 4 is used to further cool the machine 1 so that the target temperature Tset is reached. This design uses the Peltier module 4 for fine-tuning, reduces the requirements for the refrigeration system 2, and improves the stability and energy efficiency of the system. It can also prevent the refrigeration system 2 from running under extreme conditions and reduce the load of the refrigeration system 2.

[0060] In some other embodiments, the temperature control method includes: It is determined whether the absolute value a of the difference between the target temperature Tset of the machine 1 and the limit temperature Tmax of the refrigeration system 2 is within a preset range.

[0061] If it is within the preset range, the refrigeration system 2 is controlled to reach T0 so that the temperature control system 3 reaches the set temperature T0, where T0=Tmax+a.

[0062] The Peltier module 4 is used to perform heat exchange between the temperature control system 3 and the machine 1 , and the Peltier module 4 is used to compensate the set temperature T0 to the target temperature Tset, wherein T0 is higher than Tset.

[0063] Determine whether a is within a preset range, such as 1 to 5. This preset range can be adjusted according to specific application requirements. If a is within the preset range, it means that the target temperature of the machine 1 is close to the limit temperature of the refrigeration system 2. At this time, the refrigeration system 2 is controlled to run to T0, and T0 is a degree higher than Tset. Then, the Peltier device is used to further compensate to Tset, thereby preventing the refrigeration system 2 from running at the limit temperature and reducing the load of the refrigeration system 2.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control device using Peltier compensation temperature control, characterized in that: include: A machine platform, wherein the machine platform has a target temperature when in operation; A refrigeration system and a temperature control system, wherein the refrigeration system and the temperature control system are capable of performing heat exchange, so that the refrigeration system provides cooling capacity for the temperature control system, so that the temperature control system reaches a set temperature, the set temperature is higher than the target temperature, and the set temperature is higher than the limit temperature of the refrigeration system; A Peltier module, wherein the Peltier module can transfer the cooling capacity of the temperature control system to the machine, and the Peltier module can compensate for the set temperature so that the machine reaches the target temperature.

2. The temperature control device using Peltier compensation temperature control according to claim 1, characterized in that: The temperature control system includes a first pipeline, and the Peltier module includes a first end and a second end, the first end is electrically connected to the second end, the first end performs heat exchange with the machine, and the second end performs heat exchange with a medium in the first pipeline.

3. The temperature control device using Peltier compensation temperature control according to claim 2, characterized in that: The temperature control device using Peltier compensation temperature control includes a heat exchanger, which has a first channel and a second channel that are independent of each other and can perform heat exchange. The first channel is connected to the refrigeration system, and the second channel is connected to the temperature control system, so that the refrigeration system and the temperature control system can perform heat exchange.

4. The temperature control device using Peltier compensation temperature control according to claim 3, characterized in that: The temperature control system comprises a water tank, an inlet end of the water tank is communicated with the first pipeline, and an outlet end of the water tank is communicated with the second channel.

5. The temperature control device using Peltier compensation temperature control according to claim 4, characterized in that: The temperature control system includes a water pump and a second pipeline. The inlet end of the water pump is connected to the outlet end of the water tank through the second pipeline, and the outlet end of the water pump is connected to the second channel.

6. The temperature control device using Peltier compensation temperature control according to claim 5, characterized in that: The temperature control system further includes a third pipeline, and the outlet end of the water pump is connected to the second channel through the third pipeline.

7. The temperature control device using Peltier compensation temperature control according to claim 6, characterized in that: The first pipeline includes a first sub-pipeline and a second sub-pipeline, one end of the first sub-pipeline is connected to the second channel, the other end of the first sub-pipeline is connected to one end of the second sub-pipeline at the Peltier module, and the other end of the second sub-pipeline is connected to the inlet end of the water tank.

8. The temperature control device using Peltier compensation temperature control according to claim 7, characterized in that: The first sub-pipeline is provided with a flow sensor, a pressure sensor and a first temperature sensor; A second temperature sensor is provided on the second sub-pipeline; A third temperature sensor is disposed on the first end.

9. The temperature control device using Peltier compensation temperature control according to claim 1, characterized in that: The refrigeration system is a single-stage refrigeration system or a cascade refrigeration system.

10. A temperature control method using the temperature control device using Peltier compensation temperature control according to any one of claims 1 to 9, characterized in that: include: Control the refrigeration system to reach T0 so that the temperature control system reaches the set temperature T0; A Peltier module is used to perform heat exchange between the temperature control system and the machine, and the Peltier module is used to compensate the set temperature T0 to the target temperature Tset, wherein T0 is higher than Tset.

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