Temperature control device and temperature control method for compensating and controlling temperature by using Peltier

Abstract

The invention provides a temperature control device using Peltier compensation temperature control, the temperature control device comprises a machine table, a refrigeration system, a temperature control system and a Peltier module, the machine table has a target temperature during working, the temperature control system comprises a main path, a first branch and a second branch, the refrigeration system can perform heat exchange with the main path, so that the refrigeration system cools the main path, and the Peltier module is connected with the first branch and the second branch. The input end of the main circuit is communicated with the output end of the first branch circuit and the output end of the second branch circuit, the output end of the main circuit is communicated with the input end of the first branch circuit and the input end of the second branch circuit, and the first branch circuit and the second branch circuit can conduct heat exchange through the Peltier module. The first branch can exchange heat with the machine table, so that the first branch can cool the machine table to a target temperature. The temperature control device provided by the embodiment of the invention is high in stability, and can expand the temperature zone of the refrigeration system.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature control equipment, and in particular to a temperature control device and a temperature control method utilizing Peltier compensation temperature control. Background Art

[0002] With the advancement of semiconductor manufacturing technology, the requirements for the stability and temperature control range of temperature control devices are increasing, especially in the low-temperature direction. Although the single-stage system is suitable for temperatures above -40°C, has a simple structure and low cost, the suction pressure is too low or even negative pressure occurs when it approaches its limit temperature, resulting in poor operating conditions, a significant decrease in system stability, and a sharp drop in efficiency at extremely low temperatures, making it impossible to continue to expand to lower temperatures. Although the cascade system can cover a temperature range of -70°C or even lower and provide a relatively stable cooling output, its limit temperature is still limited by the physical properties of the refrigerant, making it difficult to further cool down. At the same time, the need for multiple sets of compressors increases energy consumption and system complexity, which is not conducive to energy saving and large-scale application. Therefore, under extreme conditions, the stability of traditional single-stage and cascade refrigeration systems is poor and it is difficult to effectively expand the temperature range. Summary of the invention

[0003] The present invention provides a temperature control device using Peltier compensation temperature control, which is used to solve the defects of the prior art that the stability of the refrigeration system under extreme working conditions is poor and it is difficult to effectively expand the temperature range, improve the stability of the refrigeration system under extreme working conditions, and expand the temperature range of the refrigeration system.

[0004] The present invention provides a temperature control device using Peltier compensation temperature control, comprising: A machine platform, wherein the machine platform has a target temperature when in operation; A refrigeration system and a temperature control system, wherein the temperature control system comprises a main circuit, a first branch circuit and a second branch circuit, and the refrigeration system is capable of performing heat exchange with the main circuit so that the refrigeration system cools the main circuit so that the main circuit reaches a set temperature, and the set temperature is higher than the target temperature; The input end of the main circuit is connected to both the output end of the first branch and the output end of the second branch, and the output end of the main circuit is connected to both the input end of the first branch and the input end of the second branch; a Peltier module, through which the first branch and the second branch can perform heat exchange, so that the second branch cools the first branch, thereby making the first branch reach the target temperature; The first branch can perform heat exchange with the machine, so that the first branch can cool the machine to the target temperature.

[0005] In some embodiments, the Peltier module includes a first end and a second end, the first end is electrically connected to the second end, the first end can perform heat exchange with the first branch, and the second end can perform heat exchange with the second branch.

[0006] In some embodiments, the temperature control device using Peltier compensation temperature control includes a heat exchanger, which has a first channel and a second channel that are independent of each other and can perform heat exchange, the first channel is connected to the refrigeration system, and the second channel is connected to the main road, so that the refrigeration system and the main road can perform heat exchange.

[0007] In some embodiments, the first branch includes a first sub-branch and a second sub-branch, the first sub-branch is disposed adjacent to an input end of the first branch, and the first sub-branch and the second sub-branch are connected at the machine; The first sub-branch is provided with a pressure sensor and a first flow sensor.

[0008] In some embodiments, a first temperature sensor is provided on the first sub-branch; A second temperature sensor is provided on the second sub-branch; A third temperature sensor is disposed on the main path and is disposed at the outlet of the second channel.

[0009] In some embodiments, a control valve is disposed on the first branch, and the control valve is disposed adjacent to an input end of the first branch.

[0010] In some embodiments, a second flow sensor and a one-way valve are disposed on the second branch, and the one-way valve is disposed adjacent to an output end of the second branch relative to the second flow sensor.

[0011] In some embodiments, the temperature control system includes a water tank, which is disposed on the first branch and adjacent to an output end of the first branch.

[0012] In some embodiments, the temperature control system includes a water pump, which is disposed on the main road and adjacent to an input end of the main road.

[0013] In the temperature control device using Peltier compensation temperature control of the embodiment of the present invention, when the temperature required by the machine is the limit temperature of the refrigeration system or slightly higher than the limit temperature of the refrigeration system, there is no need to operate the refrigeration system to the limit working condition. The temperature of the refrigeration system can be compensated by using the Peltier module, thereby reaching the target temperature required by the machine by gradually cooling the temperature, avoiding the refrigeration system from running for a long time under the limit working condition, thereby affecting the stability and service life of the temperature control device using Peltier compensation temperature control. In addition, even if the limit temperature of the refrigeration system cannot meet the needs of the machine, the Peltier module can also be used as a supplementary means to reduce the temperature to a lower level, thereby expanding the temperature range of the temperature control device using Peltier compensation temperature control.

[0014] An embodiment of the present invention discloses a temperature control method, comprising: Control the refrigeration system to reach T0 so that the temperature of the medium in the main circuit reaches the set temperature T0; The Peltier module is used to perform heat exchange between the first branch and the second branch, so as to compensate the temperature of the medium in the first branch to the target temperature Tset of the machine, wherein T0 is higher than Tset. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic diagram of a temperature control device using Peltier compensation temperature control provided by the present invention.

[0017] Reference numerals: 1. Machine; 2. Refrigeration system; 3. Temperature control system; 31. Main circuit; 311. First branch; 3110. Control valve; 3111. First sub-branch; 3112. Second sub-branch; 312. Second branch; 4. Peltier module; 41. Power supply unit; 5. Heat exchanger; 51. First channel; 52. Second channel; 6. Pressure sensor; 7. First flow sensor; 8. First temperature sensor; 9. Second temperature sensor; 10. Third temperature sensor; 11. Second flow sensor; 12. One-way valve; 13. Water tank; 14. Water pump. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] An embodiment of the present invention discloses a temperature control device using Peltier compensation for temperature control. The temperature control device using Peltier compensation for temperature control includes a machine 1, a refrigeration system 2, a temperature control system 3 and a Peltier module 4.

[0020] The machine 1 has a target temperature when in operation.

[0021] The temperature control system 3 includes a main circuit 31, a first branch circuit 311 and a second branch circuit 312. The refrigeration system 2 can perform heat exchange with the main circuit 31 so that the refrigeration system 2 cools the main circuit 31 so that the main circuit 31 reaches a set temperature, which is higher than the target temperature.

[0022] The input end of the main circuit 31 is connected to both the output end of the first branch 311 and the output end of the second branch 312 , and the output end of the main circuit 31 is connected to both the input end of the first branch 311 and the input end of the second branch 312 .

[0023] The first branch 311 and the second branch 312 can perform heat exchange through the Peltier module 4, so that the second branch 312 cools down the first branch 311, thereby making the first branch 311 reach the target temperature.

[0024] The first branch 311 can perform heat exchange with the machine 1 , so that the first branch 311 can cool the machine 1 to a target temperature.

[0025] In the temperature control device using Peltier compensation temperature control in the embodiment of the present invention, the target temperature, the set temperature and the limit temperature are all below zero degrees.

[0026] Effective heat exchange can be performed between the refrigeration system 2 and the main circuit 31 of the temperature control system 3, so that the cooling capacity provided by the refrigeration system 2 can help the main circuit 31 reach a set temperature, which is set to be slightly higher than the target temperature required by the machine 1.

[0027] The medium in the main circuit 31 of the temperature control system 3 is divided into the first branch circuit 311 and the second branch circuit 312. A Peltier module 4 is provided between the first branch 311 and the second branch 312. By utilizing the Peltier module 4, the first branch 311 is cooled down and the second branch 312 is heated up. The medium in the first branch 311 is reduced from the set temperature to the target temperature. Then, the first branch 311 flows through the machine 1 and exchanges heat with the machine 1, thereby cooling the machine 1 to the target temperature.

[0028] The Peltier module 4 can accurately adjust the cooling amount delivered to the machine 1 through its unique temperature compensation function, thereby compensating for the difference between the set temperature and the target temperature, and ultimately ensuring that the machine 1 can stably operate at its required target temperature.

[0029] For example, the target temperature of machine 1 is -40 degrees. The refrigeration system 2 is used to set the temperature of the main line to -35 degrees, and then the Peltier module 4 is used to further cool the machine 1 to -40 degrees.

[0030] In the temperature control device using Peltier compensation temperature control in the embodiment of the present invention, if the Peltier module 4 is not provided, when the refrigeration system 2 is in an extreme working condition, for example, the extreme working condition of the refrigeration system 2 is -40 degrees, if the target temperature of the machine 1 is -40 degrees, the refrigeration system 2 needs to be maintained at -40 degrees, which causes the refrigeration system 2 to operate under high load, which is not conducive to the stable operation of the refrigeration system 2. If the Peltier module 4 is added, when the target temperature of the machine 1 is -40 or close to -40 degrees, the refrigeration system 2 is set to -35 degrees, and the main path 31 is maintained at -35 degrees after heat exchange with the refrigeration system 2, and then the temperature of the first branch 311 passing through the machine 1 is further cooled to -40 degrees by the Peltier module 4, so as to exchange heat with the machine 1, thereby, the refrigeration system 2 does not need to be maintained at the extreme temperature, thereby reducing the load of the refrigeration system 2. Moreover, the use of the Peltier module 4 makes it unnecessary for the refrigeration system 2 to operate at the extreme temperature all the time, reducing unnecessary energy consumption.

[0031] In addition, when the target temperature of the machine 1 is lower than the limit temperature of the refrigeration system 2, the target temperature of the machine 1 cannot be reached by only using the refrigeration system 2. However, the Peltier module 4 can further reduce the temperature based on the limit temperature of the refrigeration system 2, thereby maintaining the temperature of the machine 1 at the target temperature. For example, the target temperature of the machine 1 is -45 degrees, and the limit temperature of the refrigeration system 2 is -40 degrees. When the refrigeration system 2 is set to -40 degrees, the Peltier module 4 can further reduce the temperature of the first branch 311 to -45 degrees, thereby maintaining the temperature of the machine 1 at -45 degrees.

[0032] In the temperature control device using Peltier compensation temperature control of the embodiment of the present invention, when the temperature required by the machine 1 is the limit temperature of the refrigeration system 2 or slightly higher than the limit temperature of the refrigeration system 2, there is no need to operate the refrigeration system 2 to the limit working condition. The temperature of the refrigeration system 2 can be compensated by using the Peltier module 4, so as to reach the target temperature required by the machine 1 by gradually cooling the temperature, and avoid the refrigeration system 2 running for a long time under the limit working condition, thereby affecting the stability and service life of the temperature control device using Peltier compensation temperature control. In addition, even if the limit temperature of the refrigeration system 2 cannot meet the needs of the machine 1, the Peltier module 4 can also be used as a supplementary means to reduce the temperature to a lower level, thereby expanding the temperature range of the temperature control device using Peltier compensation temperature control.

[0033] Therefore, the temperature control device using Peltier compensation temperature control in the embodiment of the present invention has high stability and can expand the temperature range of the refrigeration system 2.

[0034] In some embodiments, the Peltier module 4 includes a first end and a second end, the first end is electrically connected to the second end, the first end can perform heat exchange with the first branch 311 , and the second end can perform heat exchange with the second branch 312 .

[0035] like Figure 1 As shown, the first end of the Peltier module 4 is a heat absorbing end, so as to cool the first branch 311 after heat exchange with the medium in the first branch 311; the second end of the Peltier module 4 is a heat releasing end, so as to heat the second branch 312 after heat exchange with the medium in the second branch 312.

[0036] Thus, the first pipeline and the second pipeline can perform heat exchange, and the temperature of the first branch 311 can be further adjusted under the action of the Peltier module 4, thereby ensuring that the temperature of the medium in the first branch 311 remains near the target temperature, thereby ensuring that the machine 1 always operates stably at its set target temperature.

[0037] Optionally, the Peltier module 4 further includes a power supply unit 41 , and the power supply unit 41 is used to supply power to the Peltier module 4 .

[0038] In some embodiments, the temperature control device using Peltier compensation temperature control includes a heat exchanger 5, which has a first channel 51 and a second channel 52 that are independent of each other and can perform heat exchange. The first channel 51 is connected to the refrigeration system 2, and the second channel 52 is connected to the main path 31, so that the refrigeration system 2 and the main path 31 can perform heat exchange.

[0039] For example, the first channel 51 is connected to the refrigeration system 2, ensuring that the cold energy provided by the refrigeration system 2 can be smoothly transferred to the inside of the heat exchanger 5; and the second channel 52 is connected to the main path 31, so that the main path 31 can receive the cold energy from the heat exchanger 5, thereby realizing heat exchange between the refrigeration system 2 and the main path 31. This structure not only ensures the efficient transfer of cold energy, but also avoids direct mixing between the two channels by physically separating the two channels, thereby ensuring the stability and efficiency of the system. At the same time, this design allows the refrigeration system 2 to provide the required cold energy to the main path 31 without directly contacting it, further enhancing the flexibility and reliability of the system, ensuring that during the entire temperature control process, the refrigeration system 2 and the temperature control system 3 can each maintain their optimal working state, thereby providing accurate and stable temperature control for the machine 1.

[0040] In some embodiments, the first branch 311 includes a first sub-branch 3111 and a second sub-branch 3112. The first sub-branch 3111 is arranged adjacent to the input end of the first branch 311. The first sub-branch 3111 and the second sub-branch 3112 are connected at the machine 1. The first sub-branch 3111 is provided with a pressure sensor 6 and a first flow sensor 7.

[0041] For example, Figure 1 As shown, the first sub-branch 3111 is arranged upstream of the second sub-branch 3112, and a pressure sensor 6 and a first flow sensor 7 are arranged on the first sub-branch 3111. The pressure sensor 6 is used to monitor the fluid pressure in the first sub-branch 3111. This helps to detect abnormal conditions in the first sub-branch 3111, such as blockage or leakage, and ensure that the medium flows through the machine 1 at a set pressure. The first flow sensor 7 is used to measure the fluid flow through the first sub-branch 3111.

[0042] The temperature control device using Peltier compensation temperature control in the embodiment of the present invention uses the data of the pressure sensor 6 and the first flow sensor 7 to ensure that the medium flows through the machine 1 at the set pressure and flow rate, thereby ensuring that the machine 1 can be effectively cooled to the target temperature.

[0043] In some embodiments, a first temperature sensor 8 is provided on the first sub-branch 3111 , a second temperature sensor 9 is provided on the second sub-branch 3112 , a third temperature sensor 10 is provided on the main path 31 , and the third temperature sensor 10 is provided at the outlet of the second channel 52 .

[0044] For example, Figure 1 As shown, in some embodiments, a first temperature sensor 8 is provided on the first sub-branch 3111 to monitor the temperature of the medium before entering the machine 1 to ensure that the medium reaches the target temperature.

[0045] The second sub-branch 3112 is provided with a second temperature sensor 9 to detect the temperature of the medium after heat exchange in the machine 1, so as to evaluate the cooling effect and adjust the system parameters as needed.

[0046] At the same time, a third temperature sensor 10 is also configured on the main path 31, and this third temperature sensor 10 is arranged at the outlet of the second channel 52, for monitoring the temperature of the medium flowing out of the heat exchanger 5 to ensure that the medium temperature of the main path 31 reaches the set temperature.

[0047] The temperature control device using Peltier compensation temperature control in the embodiment of the present invention can achieve comprehensive monitoring and precise control of the temperature of the medium in the temperature control system 3 through the first temperature sensor 8, the second temperature sensor 9 and the third temperature sensor distributed at different positions, and can timely adjust the parameters of the medium, such as flow rate, pressure or temperature, so as to timely optimize the cooling performance of the temperature control system 3 and improve the reliability and energy efficiency of the temperature control device using Peltier compensation temperature control.

[0048] In some embodiments, a control valve 3110 is disposed on the first branch 311 , and the control valve 3110 is disposed adjacent to an input end of the first branch 311 .

[0049] For example, Figure 1 As shown, the control valve 3110 is arranged near the input end of the first branch 311, so that the flow of the medium entering the first branch 311 can be accurately adjusted to ensure that the medium in the first branch 311 reaches the set flow and pressure conditions before heat exchange with the machine 1, thereby optimizing the cooling effect; by adjusting the opening of the control valve 3110, the operator can dynamically control the flow of the fluid according to actual needs, which not only helps to maintain the stable operation of the system, but also responds to different cooling requirements, especially in the face of load changes or temperature fluctuations, providing more flexible and efficient flow management; in addition, the control valve 3110 is located close to the input end, so that it can play a role when the fluid just enters the first branch 311, avoiding temperature loss or pressure drop caused by unnecessary retention of the fluid in the pipeline, further improving the response speed and control accuracy of the entire temperature control system 3, and ensuring that the machine 1 can always work efficiently within the set target temperature range.

[0050] In some embodiments, a second flow sensor 11 and a one-way valve 12 are disposed on the second branch 312 , and the one-way valve 12 is disposed at an output end of the second branch 312 relative to the second flow sensor 11 and adjacent to the output end of the second branch 312 .

[0051] For example, Figure 1 As shown, the one-way valve 12 is arranged at the output end of the second branch 312 adjacent to the second flow sensor 11 . In other words, the one-way valve 12 is arranged downstream of the second flow sensor 11 .

[0052] Therefore, the one-way valve 12 is used to ensure that the fluid can only flow in one direction, thereby preventing the occurrence of backflow, thereby maintaining the stability and safety of the temperature control system 3.

[0053] The second flow sensor 11 is used to measure the fluid flow through the second branch 312 to provide real-time monitoring data, so that the temperature control device using Peltier compensation temperature control can dynamically adjust relevant parameters according to actual needs to optimize cooling efficiency.

[0054] In some embodiments, the temperature control system 3 includes a water tank 13 , which is disposed on the first branch 311 and adjacent to an output end of the first branch 311 .

[0055] For example, Figure 1 As shown, the water tank 13 is arranged on the first branch 311 and adjacent to the output end of the first branch 311. The medium in the first branch 311 exchanges heat with the machine 1 and flows into the water tank 13. The presence of the water tank 13 can effectively alleviate the system instability caused by flow fluctuations or temperature changes. By storing a certain amount of coolant, it can provide additional fluid supply during peak demand and store excess fluid during low demand periods, thereby balancing the system load.

[0056] In some embodiments, the temperature control system 3 includes a water pump 14 , which is disposed on the main path 31 and adjacent to an input end of the main path 31 .

[0057] For example, Figure 1 As shown, the water pump 14 is arranged on the main path 31 and is arranged near the input end of the main path 31. The water pump 14 can ensure that the medium enters the entire temperature control system 3 at a stable and controllable speed, and ensure that the fluid smoothly passes through the main path 31, the first branch 311 and the second branch 312, as well as various heat exchange points, such as the Peltier module 4 and the machine 1, to achieve efficient heat transfer.

[0058] In other embodiments, the refrigeration system 2 is a single-stage refrigeration system 2 or a cascade refrigeration system 2. The refrigeration system 2 is a single-stage refrigeration system 2, a two-stage cascade refrigeration system 2, or a three-stage cascade refrigeration system 2.

[0059] For example, the limit temperature of a conventional single-stage system is -40 degrees. In the temperature range of -40 degrees and above, a single-stage refrigeration system 2 is used to achieve refrigeration.

[0060] The limit temperature of the conventional two-stage cascade refrigeration system 2 is -70 degrees. In the temperature range from below -40 degrees to -70 degrees, the two-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0061] The limit temperature of a conventional three-stage cascade system is -120 degrees. In the temperature range from below -70 degrees to -120 degrees, a three-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0062] The temperature control device using Peltier compensation temperature control in the embodiment of the present invention can select the most suitable refrigeration system 2 according to the specific temperature requirements of the machine 1, ensuring stable and accurate temperature control in any temperature zone.

[0063] An embodiment of the present invention discloses a temperature control method, which includes: The refrigeration system 2 is controlled to reach T0 so that the temperature of the medium in the main path 31 reaches the set temperature T0.

[0064] The Peltier module 4 is used to perform heat exchange between the first branch 311 and the second branch 312 to compensate the temperature of the medium in the first branch 311 to the target temperature Tset of the machine 1 , wherein T0 is higher than Tset.

[0065] For example, Figure 1 As shown, the refrigeration system 2 runs to T0 so that the medium in the main circuit 31 reaches T0, and T0 is higher than the target temperature Tset of the machine 1, and then the Peltier module 4 is used to further cool the first branch 311 so that the machine 1 reaches the target temperature Tset. This design is fine-tuned by the Peltier module 4, which reduces the requirements for the refrigeration system 2 and improves the stability and energy efficiency of the system. It can also prevent the refrigeration system 2 from operating under extreme conditions and reduce the load of the refrigeration system 2.

[0066] In some embodiments, the temperature control method includes: It is determined whether the absolute value a of the difference between the target temperature Tset of the machine 1 and the limit temperature Tmax of the refrigeration system 2 is within a preset range.

[0067] If it is within the preset range, the refrigeration system 2 is controlled to reach T0 so that the main circuit 31 of the temperature control system 3 reaches the set temperature T0, wherein T0=Tmax+a.

[0068] The Peltier module 4 is used to perform heat exchange between the first branch 311 and the second branch 312 , and the Peltier module 4 is used to compensate the medium in the first branch 311 from the set temperature T0 to the target temperature Tset, wherein T0 is higher than Tset.

[0069] It is determined whether a is within a preset range, for example, 1 to 5. This preset range can be adjusted according to specific application requirements. If a is within the preset range, it means that the target temperature of the machine 1 is close to the limit temperature of the refrigeration system 2. At this time, the refrigeration system 2 is controlled to run to T0, and T0 is a degree higher than Tset. Then, the first branch 311 is further compensated to Tset by using a Peltier device, so as to avoid the refrigeration system 2 from running at the limit temperature and reduce the load of the refrigeration system 2.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control device using Peltier compensation temperature control, characterized in that: include: A machine platform, wherein the machine platform has a target temperature when in operation; A refrigeration system and a temperature control system, wherein the temperature control system comprises a main circuit, a first branch circuit and a second branch circuit, and the refrigeration system is capable of performing heat exchange with the main circuit so that the refrigeration system cools the main circuit so that the main circuit reaches a set temperature, and the set temperature is higher than the target temperature; The input end of the main circuit is connected to both the output end of the first branch and the output end of the second branch, and the output end of the main circuit is connected to both the input end of the first branch and the input end of the second branch; a Peltier module, through which the first branch and the second branch can perform heat exchange, so that the second branch cools the first branch, thereby making the first branch reach the target temperature; The first branch can perform heat exchange with the machine, so that the first branch can cool the machine to the target temperature.

2. The temperature control device using Peltier compensation temperature control according to claim 1, characterized in that: The Peltier module includes a first end and a second end, the first end is electrically connected to the second end, the first end can perform heat exchange with the first branch, and the second end can perform heat exchange with the second branch.

3. The temperature control device using Peltier compensation temperature control according to claim 1, characterized in that: The temperature control device using Peltier compensation temperature control includes a heat exchanger, which has a first channel and a second channel that are independent of each other and can perform heat exchange, the first channel is connected to the refrigeration system, and the second channel is connected to the main road, so that the refrigeration system and the main road can perform heat exchange.

4. The temperature control device using Peltier compensation temperature control according to claim 3, characterized in that: The first branch includes a first sub-branch and a second sub-branch, the first sub-branch is arranged adjacent to an input end of the first branch, and the first sub-branch and the second sub-branch are connected at the machine; The first sub-branch is provided with a pressure sensor and a first flow sensor.

5. The temperature control device using Peltier compensation temperature control according to claim 4, characterized in that: A first temperature sensor is provided on the first sub-branch; A second temperature sensor is provided on the second sub-branch; A third temperature sensor is disposed on the main path and is disposed at an outlet of the second channel.

6. The temperature control device using Peltier compensation temperature control according to claim 1, characterized in that: A control valve is provided on the first branch, and the control valve is arranged adjacent to the input end of the first branch.

7. The temperature control device using Peltier compensation temperature control according to any one of claims 1 to 6, characterized in that: A second flow sensor and a one-way valve are provided on the second branch, and the one-way valve is arranged adjacent to the output end of the second branch relative to the second flow sensor.

8. The temperature control device using Peltier compensation temperature control according to any one of claims 1 to 6, characterized in that: The temperature control system includes a water tank, which is arranged on the first branch and adjacent to the output end of the first branch.

9. The temperature control device using Peltier compensation temperature control according to any one of claims 1 to 6, characterized in that: The temperature control system comprises a water pump, which is arranged on the main road and adjacent to the input end of the main road.

10. A temperature control method using the temperature control device using Peltier compensation temperature control according to any one of claims 1 to 9, characterized in that: include: Control the refrigeration system to reach T0 so that the temperature of the medium in the main circuit reaches the set temperature T0; The Peltier module is used to perform heat exchange between the first branch and the second branch, so as to compensate the temperature of the medium in the first branch to the target temperature Tset of the machine, wherein T0 is higher than Tset.

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