A temperature control device and method for compensating temperature control by using a peltier

By introducing a Peltier module for temperature compensation into the refrigeration system, the stability and temperature range expansion issues of the refrigeration system under extreme operating conditions are solved, achieving efficient and stable temperature control and reducing energy consumption.

CN120010579BActive Publication Date: 2026-05-01BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING JINGYI AUTOMATION EQUIP CO LTD
Filing Date
2024-12-25
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Existing refrigeration systems have poor stability under extreme operating conditions and are difficult to effectively expand the temperature range. Traditional single-stage and cascade systems are inefficient and energy-intensive at low temperatures, and cannot meet the requirements of semiconductor manufacturing processes for temperature control stability and temperature range expansion.

Method used

Temperature compensation is achieved by using Peltier modules. Through heat exchange between the main circuit, the first branch circuit, and the second branch circuit, heat exchange is carried out between the first and second branches using Peltier modules to achieve gradual cooling, ensuring that the machine reaches the target temperature and avoiding the refrigeration system from operating under extreme conditions for a long time.

Benefits of technology

It improves the stability of the refrigeration system under extreme conditions, expands the temperature range, reduces energy consumption, and ensures stable operation of the machine at the target temperature.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides a temperature control device for compensating temperature control by using a Peltier device, which comprises a machine table, a refrigeration system, a temperature control system and a Peltier module. The machine table has a target temperature when working. The temperature control system comprises a main path, a first branch path and a second branch path. The refrigeration system can exchange heat with the main path so as to cool the main path and make the main path reach a set temperature. The input end of the main path is communicated with the output end of the first branch path and the output end of the second branch path. The output end of the main path is communicated with the input end of the first branch path and the input end of the second branch path. The first branch path and the second branch path can exchange heat through the Peltier module so as to cool the first branch path by the second branch path. The first branch path can exchange heat with the machine table so as to cool the machine table to the target temperature. The temperature control device has high stability and can expand the temperature range of the refrigeration system.
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Description

A temperature control device and method utilizing Peltier compensation for temperature control Technical Field

[0001] This invention relates to the field of temperature control equipment technology, and in particular to a temperature control device and method that utilizes Peltier compensation for temperature control. Background Technology

[0002] With advancements in semiconductor manufacturing processes, the requirements for the stability and temperature control range of temperature control devices are increasing, especially in the low-temperature domain. While single-stage systems are suitable for temperatures above -40°C, have a simple structure, and are low in cost, their suction pressure becomes too low or even negative near their extreme temperatures, leading to harsh operating conditions, a significant decrease in system stability, and a sharp drop in efficiency at extremely low temperatures, making it impossible to extend to even lower temperatures. Although cascade systems can cover temperatures down to -70°C or even lower and provide relatively stable cooling output, their extreme temperatures are still limited by the physical properties of the refrigerant, making it difficult to cool further. At the same time, the need for multiple compressors increases energy consumption and system complexity, hindering energy conservation and large-scale applications. Therefore, under extreme operating conditions, traditional single-stage and cascade refrigeration systems have poor stability and are difficult to effectively extend their temperature range. Summary of the Invention

[0003] This invention provides a temperature control device that utilizes Peltier compensation to address the shortcomings of existing technologies, such as poor stability of refrigeration systems under extreme conditions and difficulty in effectively expanding the temperature range. This improves the stability of refrigeration systems under extreme conditions and expands the temperature range of the refrigeration system.

[0004] This invention provides a temperature control device using Peltier compensation for temperature control, comprising:

[0005] The machine tool has a target temperature when it is in operation;

[0006] A refrigeration system and a temperature control system, wherein the temperature control system includes a main circuit, a first branch circuit and a second branch circuit, and the refrigeration system is capable of heat exchange with the main circuit so that the refrigeration system cools the main circuit, thereby enabling the main circuit to reach a set temperature, wherein the set temperature is higher than the target temperature;

[0007] The input terminal of the main path is connected to the output terminals of both the first branch path and the second branch path, and the output terminal of the main path is connected to the input terminals of both the first branch path and the second branch path.

[0008] The Peltier module allows the first branch and the second branch to exchange heat through the Peltier module, so that the second branch cools the first branch, thereby enabling the first branch to reach the target temperature.

[0009] The first branch can exchange heat with the machine tool so that the first branch can cool the machine tool to the target temperature.

[0010] In some embodiments, the Peltier module includes a first end and a second end, the first end being electrically connected to the second end, the first end being capable of heat exchange with the first branch, and the second end being capable of heat exchange with the second branch.

[0011] In some embodiments, the temperature control device using Peltier compensation includes a heat exchanger having a first channel and a second channel that are independent of each other and capable of heat exchange. The first channel is connected to the refrigeration system, and the second channel is connected to the main circuit, so that the refrigeration system can exchange heat with the main circuit.

[0012] In some embodiments, the first branch includes a first sub-branch and a second sub-branch, the first sub-branch being disposed adjacent to the input end of the first branch, and the first sub-branch and the second sub-branch being connected at the machine tool;

[0013] A pressure sensor and a first flow sensor are provided on the first sub-branch.

[0014] In some embodiments, a first temperature sensor is provided on the first sub-branch;

[0015] A second temperature sensor is installed on the second sub-branch;

[0016] A third temperature sensor is installed on the main road, and the third temperature sensor is located at the exit of the second channel.

[0017] In some embodiments, a control valve is provided on the first branch, and the control valve is located adjacent to the input end of the first branch.

[0018] In some embodiments, a second flow sensor and a one-way valve are provided on the second branch, and the one-way valve is disposed relative to the second flow sensor near the output end of the second branch.

[0019] In some embodiments, the temperature control system includes a water tank located on the first branch and adjacent to the output end of the first branch.

[0020] In some embodiments, the temperature control system includes a water pump located on the main road and adjacent to the input of the main road.

[0021] The temperature control device utilizing Peltier compensation in this invention, when the required temperature of the machine is at or slightly above the limit temperature of the refrigeration system, does not require the refrigeration system to operate at its extreme conditions. The Peltier module compensates for the temperature of the refrigeration system, achieving the target temperature of the machine through gradual cooling. This avoids prolonged operation of the refrigeration system under extreme conditions, which would affect the stability and lifespan of the temperature control device. Furthermore, even if the limit temperature of the refrigeration system cannot meet the machine's requirements, the Peltier module can be used as a supplementary means to lower the temperature to an even lower level, thereby expanding the temperature range of the temperature control device.

[0022] An embodiment of the present invention discloses a temperature control method, comprising:

[0023] Control the refrigeration system to reach T0 so that the temperature of the medium in the main circuit reaches the set temperature T0;

[0024] A Peltier module is used to perform heat exchange between the first branch and the second branch to compensate the temperature of the medium in the first branch to the target temperature Tset of the machine, where T0 is higher than Tset. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 is a schematic diagram of the temperature control device using Peltier compensation temperature control provided by the present invention.

[0027] Figure label:

[0028] 1. Machine base; 2. Refrigeration system; 3. Temperature control system; 31. Main circuit; 311. First branch circuit; 3110. Control valve; 3111. First sub-branch circuit; 3112. Second sub-branch circuit; 312. Second branch circuit; 4. Peltier module; 41. Power supply unit; 5. Heat exchanger; 51. First channel; 52. Second channel; 6. Pressure sensor; 7. First flow sensor; 8. First temperature sensor; 9. Second temperature sensor; 10. Third temperature sensor; 11. Second flow sensor; 12. Check valve; 13. Water tank; 14. Water pump. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0030] An embodiment of the present invention discloses a temperature control device that utilizes Peltier compensation for temperature control. The temperature control device that utilizes Peltier compensation for temperature control includes a machine base 1, a refrigeration system 2, a temperature control system 3, and a Peltier module 4.

[0031] Machine 1 has a target temperature when it is working.

[0032] The temperature control system 3 includes a main circuit 31, a first branch circuit 311 and a second branch circuit 312. The refrigeration system 2 can exchange heat with the main circuit 31 so that the refrigeration system 2 can cool down the main circuit 31, thereby making the main circuit 31 reach a set temperature, which is higher than the target temperature.

[0033] The input terminal of the main path 31 is connected to the output terminal of the first branch 311 and the output terminal of the second branch 312, and the output terminal of the main path 31 is connected to the input terminal of the first branch 311 and the input terminal of the second branch 312.

[0034] The first branch 311 and the second branch 312 can exchange heat through the Peltier module 4, so that the second branch 312 can cool the first branch 311, thereby enabling the first branch 311 to reach the target temperature.

[0035] The first branch 311 can exchange heat with the machine tool 1 so that the first branch 311 can cool the machine tool 1 to the target temperature.

[0036] In the temperature control device using Peltier compensation for temperature control in this embodiment of the invention, the target temperature, set temperature, and limit temperature are all below zero degrees.

[0037] Effective heat exchange is possible between the main circuit 31 of the refrigeration system 2 and the temperature control system 3, so that the cooling capacity provided by the refrigeration system 2 can help the main circuit 31 reach the set temperature, which is set slightly higher than the target temperature required by the machine 1.

[0038] The medium in the main circuit 31 of the temperature control system 3 is split and enters the first branch circuit 311 and the second branch circuit 312.

[0039] A Peltier module 4 is provided between the first branch 311 and the second branch 312. Using the Peltier module 4, the first branch 311 is cooled down and the second branch 312 is heated up. The medium in the first branch 311 is cooled down from the set temperature to the target temperature. Then, the first branch 311 flows through the machine 1 and exchanges heat with the machine 1, thereby cooling the machine 1 to the target temperature.

[0040] The Peltier module 4, through its unique temperature compensation function, can precisely adjust the cooling capacity transferred to the machine 1, thereby compensating for the difference between the set temperature and the target temperature, and ultimately ensuring that the machine 1 can operate stably at its required target temperature.

[0041] For example, if the target temperature of machine 1 is -40 degrees, the cooling system 2 is used to bring the set temperature of the main circuit to -35 degrees, and then the Peltier module 4 is used to further cool it down so that machine 1 reaches -40 degrees.

[0042] The temperature control device utilizing Peltier compensation in this embodiment of the invention, without the Peltier module 4, requires the refrigeration system 2 to maintain its operating temperature at -40 degrees Celsius when the refrigeration system 2 is under extreme conditions, for example, -40 degrees Celsius. This results in the refrigeration system 2 operating under high load, which is detrimental to its stable operation. With the addition of the Peltier module 4, when the target temperature of the machine 1 is -40 degrees Celsius or close to -40 degrees Celsius, the refrigeration system 2 is set to -35 degrees Celsius. After heat exchange with the main circuit 31, it remains at -35 degrees Celsius. Then, the Peltier module 4 further cools the temperature of the first branch circuit 311 passing through the machine 1 to -40 degrees Celsius, thus facilitating heat exchange with the machine 1. Therefore, the refrigeration system 2 does not need to be maintained at its extreme temperature, reducing its load. Furthermore, the use of the Peltier module 4 prevents the refrigeration system 2 from continuously operating at its extreme temperature, reducing unnecessary energy consumption.

[0043] Furthermore, when the target temperature of machine 1 is lower than the limit temperature of cooling system 2, cooling system 2 alone cannot achieve the target temperature of machine 1. However, using Peltier module 4 can further cool the machine beyond the limit temperature of cooling system 2, thereby maintaining the temperature of machine 1 at the target temperature. For example, if the target temperature of machine 1 is -45 degrees Celsius and the limit temperature of cooling system 2 is -40 degrees Celsius, when cooling system 2 is set to -40 degrees Celsius, Peltier module 4 can further cool the first branch 311 to -45 degrees Celsius, thereby maintaining the temperature of machine 1 at -45 degrees Celsius.

[0044] The temperature control device utilizing Peltier compensation in this invention, when the required temperature of the machine tool 1 is the limit temperature of the refrigeration system 2 or slightly higher, does not require the refrigeration system 2 to operate at its extreme condition. The Peltier module 4 can compensate for the temperature of the refrigeration system 2, thereby achieving the target temperature of the machine tool 1 through a gradual cooling process. This avoids the refrigeration system 2 operating at its extreme condition for extended periods, which would affect the stability and lifespan of the temperature control device. Furthermore, even if the limit temperature of the refrigeration system 2 cannot meet the requirements of the machine tool 1, the Peltier module 4 can be used as a supplementary means to lower the temperature to an even lower level, thereby expanding the temperature range of the temperature control device utilizing Peltier compensation.

[0045] Therefore, the temperature control device using Peltier compensation for temperature control in this embodiment of the invention has high stability and can expand the temperature range of the refrigeration system 2.

[0046] In some embodiments, the Peltier module 4 includes a first end and a second end, the first end being electrically connected to the second end, the first end being capable of heat exchange with the first branch 311, and the second end being capable of heat exchange with the second branch 312.

[0047] As shown in Figure 1, the first end of the Peltier module 4 is the heat absorption end, which exchanges heat with the medium in the first branch 311 to cool down the first branch 311; the second end of the Peltier module 4 is the heat release end, which exchanges heat with the medium in the second branch 312 to heat up the second branch 312.

[0048] Thus, the first and second pipelines can exchange heat, and under the action of the Peltier module 4, the temperature of the first branch 311 can be further adjusted, thereby ensuring that the temperature of the medium in the first branch 311 is kept near the target temperature, and thus ensuring that the machine 1 always operates stably at its set target temperature.

[0049] Optionally, the Peltier module 4 also includes a power supply unit 41, which supplies power to the Peltier module 4.

[0050] In some embodiments, the temperature control device using Peltier compensation includes a heat exchanger 5, which has a first channel 51 and a second channel 52 that are independent of each other and capable of heat exchange. The first channel 51 is connected to the refrigeration system 2, and the second channel 52 is connected to the main circuit 31 so that the refrigeration system 2 and the main circuit 31 can exchange heat.

[0051] For example, the first channel 51 is connected to the refrigeration system 2, ensuring that the cooling capacity provided by the refrigeration system 2 can be smoothly transferred to the heat exchanger 5; while the second channel 52 is connected to the main circuit 31, enabling the main circuit 31 to receive the cooling capacity from the heat exchanger 5, thereby realizing heat exchange between the refrigeration system 2 and the main circuit 31. This structure not only ensures efficient cooling capacity transfer, but also avoids direct mixing between the two by physically separating the two channels, ensuring the stability and efficiency of the system. At the same time, this design allows the refrigeration system 2 to provide the required cooling capacity to the main circuit 31 without directly contacting it, further enhancing the flexibility and reliability of the system. It ensures that the refrigeration system 2 and the temperature control system 3 can each maintain their optimal working state throughout the temperature control process, thereby providing accurate and stable temperature control for the machine 1.

[0052] In some embodiments, the first branch 311 includes a first sub-branch 3111 and a second sub-branch 3112. The first sub-branch 3111 is disposed adjacent to the input end of the first branch 311. The first sub-branch 3111 and the second sub-branch 3112 are connected at the machine 1. A pressure sensor 6 and a first flow sensor 7 are disposed on the first sub-branch 3111.

[0053] For example, as shown in Figure 1, the first sub-branch 3111 is located upstream of the second sub-branch 3112. A pressure sensor 6 and a first flow sensor 7 are installed on the first sub-branch 3111. The pressure sensor 6 monitors the fluid pressure within the first sub-branch 3111. This helps detect abnormalities in the first sub-branch 3111, such as blockages or leaks, and ensures that the medium flows through the machine 1 at a set pressure. The first flow sensor 7 measures the fluid flow rate through the first sub-branch 3111.

[0054] The temperature control device using Peltier compensation temperature control in this embodiment of the invention uses data from pressure sensor 6 and first flow sensor 7 to ensure that the medium flows through machine 1 at a set pressure and flow rate, thereby ensuring that machine 1 can be effectively cooled to the target temperature.

[0055] In some embodiments, a first temperature sensor 8 is provided on the first sub-branch 3111, a second temperature sensor 9 is provided on the second sub-branch 3112, and a third temperature sensor 10 is provided on the main road 31. The third temperature sensor 10 is located at the outlet of the second channel 52.

[0056] For example, as shown in Figure 1, in some embodiments, a first temperature sensor 8 is provided on the first sub-branch 3111 to monitor the temperature of the medium before it enters the machine 1, so as to ensure that it reaches the target temperature.

[0057] The second sub-branch 3112 is equipped with a second temperature sensor 9 to detect the temperature of the medium after heat exchange through the machine 1, thereby evaluating the cooling effect and adjusting the system parameters as needed.

[0058] At the same time, a third temperature sensor 10 is also installed on the main channel 31, and this third temperature sensor 10 is located at the outlet of the second channel 52 to monitor the temperature of the medium flowing out of the heat exchanger 5, so as to ensure that the medium temperature of the main channel 31 reaches the set temperature.

[0059] The temperature control device utilizing Peltier compensation temperature control in this embodiment of the invention, through the first temperature sensor 8, the second temperature sensor 9, and the third temperature sensor distributed at different locations, can achieve comprehensive monitoring and precise control of the temperature of the medium within the temperature control system 3. This allows for timely adjustment of the medium's parameters, such as flow rate, pressure, or temperature, thereby optimizing the cooling performance of the temperature control system 3 and improving the reliability and energy efficiency of the temperature control device utilizing Peltier compensation temperature control.

[0060] In some embodiments, a control valve 3110 is provided on the first branch 311, and the control valve 3110 is disposed adjacent to the input end of the first branch 311.

[0061] For example, as shown in Figure 1, the control valve 3110 is positioned near the input end of the first branch 311. This allows for precise regulation of the flow rate of the medium entering the first branch 311, ensuring that the medium in the first branch 311 reaches the set flow rate and pressure conditions before exchanging heat with the machine tool 1, thereby optimizing the cooling effect. By adjusting the opening of the control valve 3110, the operator can dynamically control the fluid flow according to actual needs. This not only helps maintain the stable operation of the system but also responds to different cooling requirements, especially providing more flexible and efficient flow management when facing load changes or temperature fluctuations. Furthermore, the position of the control valve 3110 near the input end allows it to function as soon as the fluid enters the first branch 311, avoiding temperature loss or pressure drop caused by unnecessary fluid retention in the pipe. This further improves the response speed and control accuracy of the entire temperature control system 3, ensuring that the machine tool 1 can always operate efficiently within the set target temperature range.

[0062] In some embodiments, a second flow sensor 11 and a one-way valve 12 are provided on the second branch 312, and the one-way valve 12 is disposed relative to the second flow sensor 11 near the output end of the second branch 312.

[0063] For example, as shown in Figure 1, the one-way valve 12 is disposed relative to the output end of the second branch 312 adjacent to the second flow sensor 11. In other words, the one-way valve 12 is disposed downstream of the second flow sensor 11.

[0064] Therefore, the one-way valve 12 ensures that the fluid can only flow in one direction, preventing backflow and thus maintaining the stability and safety of the temperature control system 3.

[0065] The second flow sensor 11 is used to measure the fluid flow rate through the second branch 312 in order to provide real-time monitoring data, so that the temperature control device using Peltier compensation temperature control can dynamically adjust relevant parameters according to actual needs and optimize cooling efficiency.

[0066] In some embodiments, the temperature control system 3 includes a water tank 13, which is disposed on the first branch 311 and adjacent to the output end of the first branch 311.

[0067] For example, as shown in Figure 1, the water tank 13 is located on the first branch 311 and adjacent to the output end of the first branch 311. The medium in the first branch 311 flows into the water tank 13 after exchanging heat with the machine 1. The presence of the water tank 13 can effectively alleviate system instability caused by flow fluctuations or temperature changes. By storing a certain amount of coolant, it can provide additional fluid supply during peak demand periods and store excess fluid during periods of low demand, thereby balancing the system load.

[0068] In some embodiments, the temperature control system 3 includes a water pump 14, which is located on the main line 31 and adjacent to the input of the main line 31.

[0069] For example, as shown in Figure 1, the water pump 14 is installed on the main road 31 and is located near the input end of the main road 31. The water pump 14 can ensure that the medium enters the entire temperature control system 3 at a stable and controllable speed, and ensure that the fluid passes smoothly through the main road 31, the first branch road 311 and the second branch road 312, as well as various heat exchange points, such as the Peltier module 4 and the machine 1, to achieve efficient heat transfer.

[0070] In other embodiments, the refrigeration system 2 is a single-stage refrigeration system 2 or a cascade refrigeration system 2. The refrigeration system 2 can be a single-stage refrigeration system 2, a two-stage cascade refrigeration system 2, or a three-stage cascade refrigeration system 2.

[0071] For example, the extreme temperature of a conventional single-stage system is -40 degrees Celsius. In the temperature range of -40 degrees Celsius and above, a single-stage refrigeration system 2 is used to achieve refrigeration.

[0072] The conventional two-stage cascade refrigeration system 2 has a maximum temperature of -70 degrees Celsius. In the temperature range from -40 degrees Celsius to -70 degrees Celsius, the two-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0073] The conventional three-stage cascade system has a limit temperature of -120 degrees Celsius. In the temperature range from -70 degrees Celsius to -120 degrees Celsius, a three-stage cascade refrigeration system 2 is used to achieve refrigeration.

[0074] The temperature control device using Peltier compensation in this embodiment of the invention can select the most suitable refrigeration system 2 according to the specific temperature requirements of the machine 1, ensuring stable and accurate temperature control in any temperature range.

[0075] An embodiment of the present invention discloses a temperature control method, the temperature control method comprising:

[0076] Control the refrigeration system 2 to reach T0 so that the temperature of the medium in the main circuit 31 reaches the set temperature T0.

[0077] The Peltier module 4 is used to perform heat exchange between the first branch 311 and the second branch 312 to compensate the temperature of the medium in the first branch 311 to the target temperature Tset of the machine 1, where T0 is higher than Tset.

[0078] For example, as shown in Figure 1, the refrigeration system 2 operates at temperature T0 so that the medium in the main circuit 31 reaches T0, and T0 is higher than the target temperature Tset of the machine tool 1. Then, the Peltier module 4 is used to further cool the first branch circuit 311, so that the machine tool 1 reaches the target temperature Tset. This design, through fine-tuning by the Peltier module 4, reduces the requirements on the refrigeration system 2 and improves the system's stability and energy efficiency. Furthermore, it avoids the refrigeration system 2 operating under extreme conditions, reducing the load on the refrigeration system 2.

[0079] In some embodiments, the temperature control method includes:

[0080] Determine whether the absolute value 'a' of the difference between the target temperature Tset of machine 1 and the limit temperature Tmax of refrigeration system 2 is within the preset range.

[0081] If it is within the preset range, the refrigeration system 2 is controlled to reach T0 so that the main circuit 31 of the temperature control system 3 reaches the set temperature T0, where T0 = Tmax + a.

[0082] The Peltier module 4 is used to perform heat exchange between the first branch 311 and the second branch 312, and the Peltier module 4 is used to compensate the medium in the first branch 311 from the set temperature T0 to the target temperature Tset, where T0 is higher than Tset.

[0083] Determine if 'a' is within a preset range, such as 1 to 5. This preset range can be adjusted according to specific application requirements. If 'a' is within the preset range, it indicates that the target temperature of machine 1 is close to the limit temperature of refrigeration system 2. At this time, control refrigeration system 2 to run at T0, where T0 is 'a' degrees higher than Tset. Then, use a Peltier device to further compensate the first branch 311 to Tset, thereby preventing refrigeration system 2 from operating at the limit temperature and reducing the load on refrigeration system 2.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control device utilizing Peltier compensation for temperature control, characterized in that, include: The machine tool has a target temperature when it is in operation; A refrigeration system and a temperature control system are included. The temperature control system includes a main circuit, a first branch circuit, and a second branch circuit. The refrigeration system can exchange heat with the main circuit to cool it down, thereby bringing the main circuit to a set temperature higher than the target temperature. The input of the main circuit is connected to the output of both the first and second branches, and the output of the main circuit is connected to the input of both the first and second branches. A Peltier module is included, allowing the first and second branches to exchange heat, so that the second branch cools the first branch, bringing the first branch to the target temperature. The first branch can exchange heat with the machine tool to cool it down to the target temperature. The refrigeration system is controlled to reach T0 so that the temperature of the medium in the main circuit reaches the set temperature T0. The Peltier module is used in the... Heat exchange occurs between the first branch and the second branch to compensate the temperature of the medium in the first branch to the target temperature Tset of the machine, where T0 is higher than Tset. The temperature control device using Peltier compensation includes a heat exchanger with a first channel and a second channel that are independent of each other and capable of heat exchange. The first channel is connected to the refrigeration system, and the second channel is connected to the main line so that the refrigeration system can exchange heat with the main line. The first branch includes a first sub-branch and a second sub-branch. The first sub-branch is located near the input end of the first branch, and the first sub-branch and the second sub-branch are connected at the machine. A pressure sensor and a first flow sensor are provided on the first sub-branch. A first temperature sensor is provided on the first sub-branch. A second temperature sensor is provided on the second sub-branch. A third temperature sensor is provided on the main line, and the third temperature sensor is located at the outlet of the second channel.

2. The temperature control device using Peltier compensation for temperature control according to claim 1, characterized in that, The Peltier module includes a first end and a second end, the first end and the second end are electrically connected, the first end can exchange heat with the first branch, and the second end can exchange heat with the second branch.

3. The temperature control device using Peltier compensation for temperature control according to claim 1, characterized in that, A control valve is provided on the first branch, and the control valve is located near the input end of the first branch.

4. The temperature control device using Peltier compensation for temperature control according to any one of claims 1-3, characterized in that, The second branch is equipped with a second flow sensor and a one-way valve, with the one-way valve positioned relative to the second flow sensor near the output end of the second branch.

5. The temperature control device using Peltier compensation for temperature control according to any one of claims 1-3, characterized in that, The temperature control system includes a water tank, which is located on the first branch and adjacent to the output end of the first branch.

6. The temperature control device using Peltier compensation for temperature control according to any one of claims 1-3, characterized in that, The temperature control system includes a water pump, which is located on the main road and adjacent to the input end of the main road.

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