Loading device compatible with multiple size cassettes

Abstract

The application relates to the technical field of semiconductors, and particularly relates to a loading device compatible with multiple-size wafer boxes, which mainly solves the technical problems of time-consuming and labor-consuming adjustment of an existing wafer box loading device and accidents caused by easy misselection of sizes. The loading device comprises a mounting seat, a loading assembly and a detection assembly. The loading assembly comprises a loading table and a positioning structure. The positioning structure comprises a positioning strip plate and positioning pieces. The positioning strip plate is provided with multiple clamping grooves. The positioning pieces are provided in multiple types. Each type of the positioning pieces comprises two positioning groups. Each positioning group is composed of at least one positioning block. The detection assembly comprises a presence sensor and a size indicator lamp. When the specification of the loaded wafer box is replaced, the positioning blocks do not need to be adjusted, and the loading efficiency is higher. The detection personnel can be reminded of the real-time wafer size loaded, so that the probability of misselection of other sizes by the detection personnel can be effectively reduced, and the accident rate can be reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more particularly to a loading device compatible with multi-size wafer cassettes. Background Technology

[0002] During wafer inspection, a manual person places the wafer cassette containing the wafer into the loading device of the inspection equipment, and then the loading device docks with the inspection equipment to perform the inspection. For example... Figure 1 As shown, the wafer box 100 is composed of a top plate 101, two side plates 102 and a bottom plate 103. Multiple sets of support teeth are vertically spaced on the opposite surfaces of the two side plates 102. The top plate 101 is connected between the tops of the two side plates 102, and the bottom plate 103 is connected between the bottoms of the two side plates 102. The lower surface of the bottom plate 103 is provided with a protrusion 104 for positioning.

[0003] Different wafer sizes require different wafer cassette specifications. Currently, there are six standard wafer cassette sizes: 2-inch, 3-inch, 4-inch, 5-inch, 6-inch, and 8-inch. Different wafer cassette sizes require different loading ports. Therefore, to save equipment costs, the loading ports of the loading device are generally designed to be movable, meaning they can be adjusted to accommodate different wafer cassette sizes.

[0004] However, this loading device still has the following drawbacks: First, when loading wafer cassettes of various sizes, the mechanism on the loading device needs to be repeatedly adjusted to match the corresponding wafer cassette size, which is time-consuming and labor-intensive; second, because it can load wafer cassettes of different sizes, inspectors are very likely to mistakenly select other sizes during testing, leading to accidents. Therefore, there is an urgent need for a loading device that can overcome the above-mentioned drawbacks. Summary of the Invention

[0005] To overcome the technical defects of existing wafer cassette loading devices, such as time-consuming and labor-intensive adjustment and the risk of accidents caused by incorrect size selection, this invention provides a loading device compatible with multi-size wafer cassettes.

[0006] The loading device compatible with multi-size wafer cassettes provided by the present invention includes:

[0007] The mounting base has an L-shaped structure and consists of a horizontal plate and a vertical plate, with an operation window provided in the vertical plate;

[0008] The loading assembly includes a platform and a positioning structure. The platform is fixed to a horizontal plate and is horizontally arranged and positioned at the bottom of the operation window. The positioning structure is located on the upper surface of the platform and includes a positioning strip and positioning elements. The positioning strip is horizontally arranged and its length direction is perpendicular to the vertical plate. The positioning strip has multiple slots spaced apart along its length direction. Each slot is arranged along the width direction of the positioning strip and is used to engage the protrusions of the wafer cassette. The positioning elements are of multiple types and correspond one-to-one with the slots. Each type of positioning element includes two positioning groups symmetrically distributed on both sides of the width direction of the positioning strip. Each positioning group consists of at least one positioning block. The positioning block is fixed to the platform and is used to abut against the bottom inner wall or bottom outer wall of the wafer cassette.

[0009] The detection component has multiple sets, each corresponding to a slot. The detection component includes an in-situ sensor and a size indicator light. The in-situ sensor is a press-type sensor and is located in the corresponding slot. The size indicator light is located on the vertical plate and is communicatively connected to the corresponding in-situ sensor so that it lights up when the in-situ sensor is pressed.

[0010] Optionally, the card slots are provided with six slots for respectively holding 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch wafer cells, the positioning components are provided with six types, and the detection components are provided with six groups.

[0011] Optionally, the position of the positioning block on the platform can be adjusted along the width direction of the positioning strip.

[0012] Optionally, the stage is supported on the horizontal plate by leveling screws.

[0013] Optionally, the upper surface of the stage is also provided with a foolproof structure, which is used to support the wafer cassette when it is misaligned so that the protrusion disengages from the corresponding slot.

[0014] Optionally, the relative positions of the multiple slots ensure that the end of the wafer cassette near the vertical plate is aligned and adjacent to the operation window when different sizes of wafer cassettes are loaded. The operation window is provided with a tab sensor for detecting the wafer sliding out of the wafer cassette. The vertical plate is also provided with a tab indicator light, which is communicatively connected to the tab sensor so that it lights up when the tab sensor detects the wafer sliding out.

[0015] Optionally, the bottom surface of the vertical plate opposite to the horizontal plate is provided with an interface for connecting other devices.

[0016] Optionally, the loading device further includes an outer protective assembly, which includes:

[0017] A flip cover, hinged to the vertical plate, the flip cover having a protective state that covers the horizontal plate and surrounds the platform, and a clearance state that detaches from the horizontal plate and exposes the platform.

[0018] A cover lock is provided between the flip cover and the horizontal plate and is activated when the flip cover is in the protected state;

[0019] A lock indicator light is located on the vertical plate and is communicatively connected to the cover lock to illuminate when the cover lock is activated.

[0020] Optionally, the loading device further includes an inner protective assembly, the inner protective assembly comprising:

[0021] A safety door is installed on the vertical plate opposite to the horizontal plate and is driven to rise and fall vertically. The safety door has a closed state that blocks the operation window and an open state that avoids the operation window.

[0022] The technical solution provided by this invention has the following advantages compared with the prior art:

[0023] 1) The loading device for multi-size wafer cassettes provided by the present invention has a slot and a positioning block on the platform. The slot can limit the wafer cassette to the front and back, and the positioning block can limit the wafer cassette to the left and right. The two work together to achieve clamping and positioning of the wafer cassette on the platform, ensuring the loading of the wafer cassette firmly.

[0024] 2) The loading device for multi-size wafer cassettes provided by the present invention has multiple types of slots and positioning blocks to enable loading of wafer cassettes of different specifications. Furthermore, different groups of positioning blocks do not interfere with each other. When changing the specifications of the loaded wafer cassette, there is no need to adjust the positioning blocks, resulting in higher loading efficiency.

[0025] 3) The multi-size wafer cassette loading device provided by this invention has a pressing presence sensor in the slot. When a wafer cassette of a certain size is loaded, the protrusion of the wafer cassette will press the corresponding presence sensor and control the corresponding size indicator light to light up, so as to remind the inspector of the real-time wafer size loaded, thereby effectively reducing the probability of the inspector mistakenly selecting other sizes, and thus reducing the accident rate. In addition, when the wafer cassette is placed at an angle, the protrusion will disengage from the slot and will not be able to press the corresponding presence sensor, and the size indicator light will not light up, so it can remind the staff that the wafer cassette is in an angled state, thus indirectly preventing the wafer cassette from being placed at an angle. Attached Figure Description

[0026] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This diagram illustrates the structure of a wafer cell in the prior art.

[0029] Figure 2 This is a schematic diagram of the loading device at a first angle in an embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram of the loading device from a second angle in an embodiment of the present invention;

[0031] Figure 4 This is a schematic diagram of the structure of the mounting base in an embodiment of the present invention;

[0032] Figure 5 This is a schematic diagram of the structure of the platform in an embodiment of the present invention;

[0033] Figure 6 A schematic diagram showing the loading state of a 3-inch wafer cassette in an embodiment of the present invention;

[0034] Figure 7 A schematic diagram showing the loading state of a 4-inch wafer cassette in an embodiment of the present invention;

[0035] Figure 8 This is a schematic diagram showing the loading state of an 8-inch wafer cassette in an embodiment of the present invention.

[0036] In the picture:

[0037] 1. Mounting base; 11. Horizontal plate; 12. Vertical plate; 121. Operation window; 13. Convex sensor; 14. Convex indicator light; 15. Interface; 16. Horizontal plate; 17. Vertical plate; 18. Connecting frame; 2. Loading assembly; 21. Platform; 211. Mounting slot; 22. Positioning structure; 221. Positioning strip; 222. Positioning block; 223. Slot; 224. Mounting strip; 225. Block body; 23. Leveling screw; 24. Foolproof structure; 3. Detection assembly; 31. In-place sensor; 32. Size indicator light; 4. Outer protection assembly; 41. Flip cover; 42. Cover lock; 43. Lock indicator light; 5. Inner protection assembly; 51. Safety door; 52. Cylinder;

[0038] 100. Wafer box; 101. Top plate; 102. Side plate; 103. Bottom plate; 104. Raised strip. Detailed Implementation

[0039] To better understand the above-mentioned objectives, features, and advantages of the present invention, the solutions of the present invention will be further described below. It should be noted that, unless otherwise specified, the embodiments of the present invention and the features thereof can be combined with each other.

[0040] It should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances.

[0041] Many specific details are set forth in the following description in order to provide a full understanding of the invention, but the invention may also be practiced in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the invention, and not all embodiments.

[0042] The following is combined Figures 2 to 8 Specific embodiments of the present invention will be described in detail below.

[0043] This embodiment provides a loading device compatible with multi-size wafer cassettes, including a mounting base 1, a loading assembly 2, and a detection assembly 3.

[0044] The mounting base 1 has an L-shaped structure and consists of a horizontal plate 11 and a vertical plate 12. The vertical plate 12 has an operation window 121.

[0045] It should be noted that the operation window 121 is mainly used to detect the entry and exit of the robot arm of the equipment to interact with the wafer in the wafer box 100.

[0046] Specifically, the mounting base 1 includes a horizontal plate 16, a vertical plate 17, and a connecting frame 18. The connecting frame 18 is an L-shaped frame with its two sides respectively attached to the horizontal plate 16 and the vertical plate 17. The horizontal plate 16 and the vertical plate 17 are fixedly connected by the connecting frame 18. The horizontal plate 16 and one side of the connecting frame 18 form a horizontal plate 11, and the vertical plate 17 and the other side of the connecting frame 18 form a vertical plate 12.

[0047] Specifically, in this embodiment, an interface 15 for connecting other devices is provided on the bottom of the vertical plate 12 away from the horizontal plate 11, including but not limited to an air circuit interface for connecting the cylinder 52 and an IO interface for connecting the detection device.

[0048] The loading assembly 2 includes a platform 21 and a positioning structure 22. The platform 21 is fixed on the horizontal plate 11. The platform 21 is horizontally arranged and is set at the bottom of the operation window 121. The positioning structure 22 is located on the upper surface of the platform 21. The positioning structure 22 includes a positioning strip 221 and positioning elements. The surface of the positioning strip 221 is horizontally arranged and its length direction is perpendicular to the vertical plate 12. The positioning strip 221 has multiple slots 223 distributed at intervals along its length direction. Each slot 223 is arranged along the width direction of the positioning strip 221 and is used to engage the protrusions 104 of the wafer cassette 100. The positioning elements are of various types and correspond one-to-one with the slots 223. Each type of positioning element includes two positioning groups symmetrically distributed on both sides of the width direction of the positioning strip 221. Each positioning group consists of at least one positioning block 222. The positioning block 222 is fixed on the platform 21 and is used to abut against the bottom inner wall or bottom outer wall of the wafer cassette 100.

[0049] It should be noted that the slot 223 and the positioning block 222 cooperate to clamp and position the wafer cassette 100. Unlike the loading device with a movable loading port in the prior art, this loading device is equipped with multiple sets of slots 223 and positioning blocks 222. The multiple sets of slots 223 and positioning blocks 222 do not interfere with each other. When the specifications of the wafer cassette 100 being loaded change, the wafer cassette 100 can be directly installed in the corresponding slot 223 and positioning block 222, which eliminates the step of adjusting the upper mechanism of the existing loading device and improves loading efficiency.

[0050] Specifically, in this embodiment, the card slot 223 has six slots for respectively holding 2-inch, 3-inch, 4-inch, 5-inch, 6-inch, and 8-inch wafer cassettes 100, with six types of positioning components and six sets of detection components 3. The loading device of this embodiment can accommodate wafer cassettes 100 of six sizes: 2-inch, 3-inch, 4-inch, 5-inch, 6-inch, and 8-inch. In other embodiments, the design can be adapted to specific situations. For example, if only 2-inch, 3-inch, and 5-inch wafer cassettes 100 need to be loaded, then the card slot 223 can have three slots for respectively holding 2-inch, 3-inch, and 5-inch wafer cassettes 100, with three types of positioning components and three sets of detection components 3.

[0051] Specifically, in this embodiment, the position of the positioning block 222 on the stage 21 can be adjusted along the width direction of the positioning strip 221. Since not all wafer cassettes 100 processed by wafer foundries are standard, this embodiment makes the positioning block 222 adjustable to accommodate a small number of non-standard wafer cassettes 100. More specifically, a strip-shaped mounting groove 211 can be formed on the stage 21. The length direction of the mounting groove 211 is consistent with the width direction of the positioning strip 221. The positioning block 222 includes a mounting strip 224 and a block body 225. The mounting strip 224 is slidably connected in the mounting groove 211 and has a strip-shaped hole. The mounting strip 224 is pressed and fixed by a screw that passes through the strip-shaped hole and is screwed to the bottom of the mounting groove 211. The block body 225 is fixed on the mounting strip 224. The position of the block body 225 can be adjusted by adjusting the position of the screw relative to the strip-shaped hole.

[0052] Specifically, in this embodiment, the platform 21 is supported on the horizontal plate 11 by leveling screws 23. During initial installation and use, the platform is adjusted to a horizontal state using the leveling screws 23. More specifically, at least three leveling screws are required to ensure the accuracy of the horizontal adjustment.

[0053] Specifically, in this embodiment, each positioning group of the 2-inch to 4-inch wafer cassette 100 includes two positioning blocks 222, and each positioning group of the 5-inch, 6-inch and 8-inch wafer cassette 100 includes one positioning block 222. The following is a detailed description of the contact position and distribution of the positioning blocks 222 in each positioning group: For the 2-inch wafer cassette 100, both positioning blocks 222 are used to abut against the bottom inner wall of the wafer cassette 100 and are located at the end and middle of the positioning strip 221 near the vertical plate 12, respectively; for the 3-inch wafer cassette 100, both positioning blocks 222 are used to abut against the bottom inner wall of the wafer cassette 100 and are located in the middle of the positioning strip 221; for the 4-inch wafer cassette 100, one positioning block 222 is used to abut against the bottom inner wall of the wafer cassette 100, and the other positioning block 222 is used to abut against the bottom outer wall of the wafer cassette 100, with the two positioning blocks 222 located at both ends of the positioning strip 221; for the 5-inch, 6-inch, and 8-inch wafer cassettes 100, the positioning blocks 222 are all used to abut against the bottom inner wall of the wafer cassette 100 and are all located on the side of the positioning strip 221 away from the vertical plate 12.

[0054] Furthermore, this embodiment also provides a foolproof structure 24 on the upper surface of the stage 21. The foolproof structure 24 is used to support the wafer cassette 100 when it is misaligned, so that the protrusion 104 disengages from the corresponding slot 223. In use, if the wafer cassette 100 is misaligned, it will be supported on the foolproof structure 24, causing the protrusion 104 of the wafer cassette 100 to disengage from the corresponding slot 223. At this time, no position sensor 31 is pressed, and no size indicator light 32 is lit, so as to remind the operator that the wafer cassette 100 is in an abnormal placement state, thus indirectly preventing the wafer cassette 100 from being misaligned. Specifically, the foolproof structure 24 in this embodiment includes two stop bars, both of which are parallel to the vertical plate 12 and are respectively located between the two positioning groups of the 6-inch wafer cassette 100 and the two positioning groups of the 8-inch wafer cassette 100, to prevent the 6-inch wafer cassette 100 and the 8-inch wafer cassette 100 from being misaligned. Because the positioning groups of the 2-inch to 5-inch wafer cassette 100 are located in a relatively dense structure, when the wafer cassette 100 is misaligned, it will be supported on other structures to play a foolproof role. Therefore, this embodiment only has a foolproof design for the 6-inch and 8-inch wafer cassette 100.

[0055] Furthermore, the relative positions of the multiple slots 223 in this embodiment ensure that the ends of wafer cassettes 100 of different specifications are aligned near the vertical plate 12 and adjacent to the operation window 121 when they are loaded. The operation window 121 is provided with a tab sensor 13 for detecting wafers sliding out of the wafer cassette 100. The vertical plate 12 is also provided with a tab indicator light 14, which is communicatively connected to the tab sensor 13 so that it lights up when the tab sensor 13 detects that a wafer has slid out. During operation, if a wafer slides out of the wafer cassette 100 into the operation window 121 and forms a tab, the tab sensor 13 will detect the tab signal and control the tab indicator light 14 to light up to remind the operator to make adjustments.

[0056] The detection component 3 has multiple sets, each corresponding to a slot 223. The detection component 3 includes a position sensor 31 and a size indicator light 32. The position sensor 31 is a press-type sensor located within the corresponding slot 223. The size indicator light 32 is located on the vertical plate 12 and is communicatively connected to the corresponding position sensor 31, illuminating when the position sensor 31 is pressed. During operation, the wafer cassette 100 is manually placed in the corresponding slot 223 and positioning block 222. The protrusion 104 of the wafer cassette 100 presses against the position sensor 31, which then controls the corresponding size indicator light 32 to illuminate, reminding the inspector of the currently loaded wafer size. This effectively reduces the probability of the inspector mistakenly selecting other sizes, thereby decreasing the accident rate.

[0057] In addition, the loading device in this embodiment also includes an outer protective assembly 4, which includes a flip cover 41, a cover lock 42, and a lock indicator light 43. The flip cover 41 is hinged to the vertical plate 12 and has a protective state in which it covers the horizontal plate 11 and surrounds the stage 21, and a clearance state in which it is detached from the horizontal plate 11 and exposes the stage 21. The cover lock 42 is located between the flip cover 41 and the horizontal plate 11 and is used to activate when the flip cover 41 is in the protective state. The lock indicator light 43 is located on the vertical plate 12 and is communicatively connected to the cover lock 42 so that it lights up when the cover lock 42 is activated. After the wafer cassette 100 is manually placed on the stage 21 and clamped and positioned, the flip cover 41 is controlled to rotate to the protective state to prevent personnel injury accidents caused by the robot arm of the testing equipment reaching into the wafer cassette 100 during operation.

[0058] Furthermore, the loading device in this embodiment also includes an inner protective assembly 5, which includes a safety door 51. The safety door 51 is installed on the surface of the vertical plate 12 opposite to the horizontal plate 11 and is driven to move vertically up and down. The safety door 51 has a closed state that blocks the operation window 121 and an open state that avoids the operation window 121. The safety door 51 is in the closed state when the wafer cassette 100 is manually placed to prevent personnel injury accidents caused by reaching their hands into the inside of the testing equipment through the operation window 121.

[0059] Specifically, in this embodiment, the safety door 51 is connected to a cylinder 52 that drives it to rise and fall, and the cylinder 52 drives the safety door 51 to rise and fall vertically.

[0060] It should be noted that this embodiment ensures through program design that when the safety door 51 is in the open state, the flip cover 41 cannot switch to the avoidance state, and when the flip cover 41 is in the avoidance state, the safety door 51 cannot switch to the open state. That is, the safety door 51 and the flip cover 41 can only be opened on one side, which plays a role in safety protection.

[0061] The operation of the multi-size wafer cassette loading device in this embodiment is as follows:

[0062] S1. Control the flip cover 41 to switch to the avoidance state, and manually place the wafer box 100 containing the wafer into the corresponding slot 223 and positioning block 222 of the stage 21 for clamping and positioning.

[0063] S2. If the corresponding size indicator light 32 is lit, it means that the placement is accurate; if the size indicator light 32 is not lit, it means that the placement is tilted or off-center. The staff will check and reposition until the corresponding size indicator light 32 is lit.

[0064] S3. Control the flip cover 41 to switch to the protective state, and the lock indicator light 43 will light up;

[0065] S4. Control the safety door 51 to switch to the open state, and the robotic arm of the detection equipment performs detection operations through the operation window 121.

[0066] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the present invention. Although detailed descriptions have been provided with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments, and they should all be covered within the protection scope of the claims.

Claims

1. A loading device compatible with multi-size wafer cassettes, characterized in that, The utility model relates to a wafer box loading device, including: Mounting seat (1), it is L shape structure and is composed of horizontal plate (11) and vertical plate (12), the vertical plate (12) is equipped with operation window (121), Loading assembly (2), it includes stage (21) and positioning structure (22), the stage (21) is fixed on the horizontal plate (11), the stage (21) is horizontally arranged and is provided with the bottom end corresponding to the operation window (121), the positioning structure (22) is located on the upper surface of the stage (21), the positioning structure (22) includes positioning strip board (221) and positioning piece, the board face of the positioning strip board (221) is horizontally arranged and the length direction is perpendicular to the vertical plate (12), a plurality of clamping grooves (223) are spaced apart along the length direction of the positioning strip board (221), each clamping groove (223) is arranged along the width direction of the positioning strip board (221) and is used to clamp the convex strip (104) of wafer box (100), the positioning piece is provided with multiple and corresponds to the clamping groove (223) one by one, each type of positioning piece includes two positioning groups that are symmetrically distributed on both sides in the width direction of the positioning strip board (221), each positioning group is composed of at least one positioning block (222), the positioning block (222) is fixed on the stage (21) and is used to abut the bottom inner wall or bottom outer wall of wafer box (100), Detection assembly (3) is provided with multiple groups and corresponds to the clamping groove (223) one by one, the detection assembly (3) includes in-place sensor (31) and size indicating lamp (32), the in-place sensor (31) is pressed and is arranged in the corresponding clamping groove (223), the size indicating lamp (32) is arranged on the vertical plate (12) and is connected with the corresponding in-place sensor (31) communication to be bright when the in-place sensor (31) is pressed, The clamping groove (223) is provided with six to clamp 2 inches, 3 inches, 4 inches, 5 inches, 6 inches and 8 inches wafer box (100) respectively, the positioning piece is provided with six types correspondingly, the detection assembly (3) is provided with six groups correspondingly, The upper surface of the stage (21) is further provided with fool-proof structure (24), the fool-proof structure (24) is used to prop up the wafer box (100) when the wafer box (100) is placed to make the convex strip (104) separate from the corresponding clamping groove (223), the fool-proof structure (24) includes two blocking rods, two blocking rods are parallel to the vertical plate (12) and are arranged between the two positioning groups of 6 inch wafer box (100) and the two positioning groups of 8 inch wafer box (100) respectively to prevent 6 inch wafer box (100) and 8 inch wafer box (100) from being placed.

2. The multi-size compatible front opening unified pod loading device of claim 1, wherein, The position of the positioning block (222) on the stage (21) can be adjusted along the width direction of the positioning strip board (221).

3. The multi-size compatible front opening unified pod loading device of claim 1, wherein, The stage (21) is supported on the horizontal plate (11) by leveling screw (23).

4. The multi-size compatible front opening unified pod loading device of claim 1, wherein, The relative positions of the plurality of card slots (223) ensure that different specifications of wafer boxes (100) are aligned close to one end of the vertical plate (12) when loaded and abut the operation window (121), the operation window (121) is provided with a tab sensor (13) for detecting the wafer sliding out of the wafer box (100), the vertical plate (12) is also provided with a tab indicator light (14), the tab indicator light (14) is in communication connection with the tab sensor (13) to light up when the tab sensor (13) detects that the wafer slides out.

5. The multi-size compatible front opening unified pod loading device of claim 1, wherein, The bottom of the plate surface of the vertical plate (12) away from the horizontal plate (11) is provided with an interface (15) for connecting other equipment.

6. The multi-size compatible front opening unified pod loading device of any one of claims 1 to 5, wherein, Further comprising an outer protection assembly (4), the outer protection assembly (4) comprises: a flip cover (41) hinged on the vertical plate (12), the flip cover (41) has a protection state of covering the horizontal plate (11) and surrounding the carrier (21) and an avoidance state of being separated from the horizontal plate (11) and exposing the carrier (21); a cover lock (42) provided between the flip cover (41) and the horizontal plate (11) and used to activate when the flip cover (41) is in the protection state; a lock indicator light (43) provided on the vertical plate (12) and in communication connection with the cover lock (42) to light up when the cover lock (42) is activated.

7. The multi-size compatible front opening unified pod loading device of any one of claims 1 to 5, wherein, Further comprising an inner protection assembly (5), the inner protection assembly (5) comprises: a safety door (51) mounted on the plate surface of the vertical plate (12) away from the horizontal plate (11) and driven to be vertically lifted and lowered, the safety door (51) has a closed state of shielding the operation window (121) and an open state of avoiding the operation window (121).

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