Acid corrosion machine auxiliary device capable of reducing consumption of mixed acid and control method of acid corrosion machine auxiliary device
By designing the auxiliary devices of the acid corrosion machine, including the medicine liquid tank, corrosion cage, swing arm and reuse components, the problems of splashing and ineffective loss of the Chinese medicine liquid in the silicon wafer acid corrosion machine are solved, and the effect of reducing mixed acid consumption and reducing costs and increasing efficiency is achieved.
Patent Information
- Application Number
- CN202510136831.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-07
- Publication Date
- 2025-05-16
AI Technical Summary
During the swing of the existing silicon wafer acid corrosion machine on the corrosion cage, the liquid splashes and ineffective loss, resulting in excessive acid consumption.
An acid corrosion machine auxiliary device is designed, including a liquid tank, a corrosion cage, a swing arm, a swing motor, a collection tank and a reuse assembly. The belt or chain is driven by the up and down swinging and rotation of the swing arm to roll the corrosion cage. The splashed medicine liquid is recycled by the collection tank and is recycled into the medicine liquid tank through the reuse unit's recycle pump and liquid extraction tube.
It effectively reduces the loss rate of corrosion liquid, reduces the consumption of mixed acid, achieves the purpose of reducing costs and increasing efficiency, and solves the problem of splashing out the liquid by swinging up and down the corrosion cage.
Smart Images
Figure CN120015659A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of silicon wafer etching equipment, and in particular to an acid etching machine auxiliary device for reducing mixed acid consumption and a control method thereof. Background Art
[0002] In the semiconductor silicon wafer process, a chemical etching process is required to eliminate the damaged layer caused by mechanical processing such as slicing and grinding. In the semiconductor industry, acid etching is a very important process in the silicon wafer processing. Acid etching equipment uses corrosive agents to cause electrochemical reactions with the ground and cleaned silicon wafers to achieve the purpose of etching away the damaged layer on the surface of the silicon wafer or chemically thinning the silicon wafer, and by controlling the corrosion conditions, the surface and geometric parameters of the silicon wafer meet certain standards to meet the customer's requirements.
[0003] The current method of etching silicon wafers to remove mechanical damage layers mainly uses an acid etching process, with a nitric acid + hydrofluoric acid system. Nitric acid oxidizes silicon into silicon dioxide, and then silicon dioxide reacts with hydrofluoric acid to remove the damaged layer. The most commonly used tank acid etching machine consumes a huge amount of mixed acid solution for each operation, most of which is ineffectively lost due to the splashing of the solution caused by the robot arm bringing it in and out of the etching cage. Summary of the invention
[0004] The present invention mainly solves the deficiencies in the prior art and provides an acid etching machine auxiliary device and a control method thereof for reducing mixed acid consumption. The device has the advantages of compact structure and good operation stability, and solves the problem of the corrosion cage swinging up and down and splashing the liquid. The speed of corrosion liquid loss is effectively reduced, achieving the effect of effectively reducing costs and increasing efficiency.
[0005] The above technical problems of the present invention are mainly solved by the following technical solutions: An acid etching machine auxiliary device for reducing mixed acid consumption comprises a liquid medicine tank, a corrosion cage that moves relative to the liquid medicine tank is arranged on the liquid medicine tank, swing arms that drive the corrosion cage to rotate are arranged at both ends of the corrosion cage, a swing motor is arranged at the lower side of one swing arm, collecting tanks are arranged on both sides of the liquid medicine tank, a recycling component is arranged between the collecting tank and the liquid medicine tank, a liquid extraction pipe is arranged between the recycling component and the lower part of the collecting tank, and a liquid return pipe is arranged between the recycling component and the upper part of the liquid medicine tank. The collecting tank is located away from the movement track of the manipulator.
[0006] Preferably, a rotary drive motor is provided at the lower side of the swing arm on the other side, and a pulley or sprocket is provided in the swing arm and is spline-limitedly plugged with the rotary drive motor, and the rotary drive motor drives the belt or chain to make the corrosion cage roll. In addition to the up and down movement of the corrosion cage for acid corrosion, the corrosion cage also performs rolling acid corrosion, so that the silicon wafer in the corrosion cage is fully in contact with the corrosion liquid.
[0007] Preferably, the recycling assembly comprises a recycling pump body, and a circulating liquid return pump threadedly sleeved and fixed to the liquid return pipe is provided on the upper portion of the recycling pump body.
[0008] Preferably, a filter cartridge tank is provided at the lower part of the reuse pump body, and a liquid extraction connection joint is provided at the lower part of the filter cartridge tank, which penetrates the reuse pump body and is threadedly sleeved and fixed to the liquid extraction pipe.
[0009] The return pump body, circulating liquid return pump, liquid return pipe, liquid extraction pipe, filter element tank and liquid extraction connection joints are all made of acid-resistant materials.
[0010] A control method for an acid etching machine auxiliary device includes the following steps: Step 1: Place the silicon wafer into the corrosion cage, and use the swing motor to drive the swing arm to rotate the corrosion cage into the chemical solution tank.
[0011] Step 2: The corrosion cage is cleaned by swinging up and down in the chemical solution tank through the swing arm.
[0012] Step 3: The liquid medicine splashed out during the swinging process is recovered by the collecting tank, and the liquid medicine is reused through the pipeline connecting the collecting tank and the liquid medicine tank.
[0013] Preferably, the liquid medicine in the collection tank is recycled into the liquid medicine tank through a circulating liquid return pump in a recycling assembly, a liquid extraction pipe, and a liquid return pipe.
[0014] Preferably, a filter cartridge is installed at the lower part of the reuse pump body to filter the reused liquid medicine. The lower part of the filter cartridge is connected to the liquid extraction pipe through a liquid extraction connection joint. The liquid medicine filtered by the filter cartridge is then transported to the liquid return pipe through a circulating liquid return pump.
[0015] The present invention can achieve the following effects: The present invention provides an acid etching machine auxiliary device for reducing mixed acid consumption and a control method thereof. Compared with the prior art, the device has the advantages of compact structure and good operation stability, and solves the problem of the corrosion cage swinging up and down and splashing the liquid. The device effectively reduces the speed of corrosion liquid loss, achieving the effect of effectively reducing costs and increasing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a front view structural schematic diagram of the present invention.
[0017] Figure 2It is a schematic diagram of the top structure of the present invention.
[0018] Figure 3 It is a structural cross-sectional view of the recycling component of the present invention.
[0019] In the figure: swing arm 1, corrosion cage 2, liquid tank 3, swing motor 4, collecting tank 5, recycling component 6, liquid extraction pipe 7, liquid return pipe 8, rotary drive motor 9, recycling pump body 10, circulating liquid return pump 11, filter element tank 12, liquid extraction connection joint 13. DETAILED DESCRIPTION
[0020] The technical solution of the invention is further specifically described below through embodiments and in conjunction with the accompanying drawings.
[0021] Example: Figure 1 , Figure 2 and Figure 3 As shown, an acid etching machine auxiliary device for reducing mixed acid consumption includes a liquid medicine tank 3, a corrosion cage 2 that moves relative to the liquid medicine tank 3 is provided on the liquid medicine tank 3, swing arms 1 that drive the corrosion cage 2 to rotate are provided at both ends of the corrosion cage 2, a swing motor 4 is provided at the lower side of the swing arm 1 on one side, and a rotary drive motor 9 is provided at the lower side of the swing arm 1 on the other side, and a pulley or sprocket that is spline-limited and plugged with the rotary drive motor 9 is provided in the swing arm 1, and the rotary drive motor 9 drives the belt or chain to make the corrosion cage 2 roll. Collection tanks 5 are provided on both sides of the liquid medicine tank 3, and recycling components 6 are provided between the collection tank 5 and the liquid medicine tank 3, a liquid extraction pipe 7 is provided between the recycling component 6 and the lower part of the collection tank 5, and a liquid return pipe 8 is provided between the recycling component 6 and the upper part of the liquid medicine tank 3.
[0022] The recycling assembly 6 includes a recycling pump body 10, and a circulating liquid return pump 11 is provided on the upper part of the recycling pump body 10 and is threadedly sleeved and fixed with the liquid return pipe 8. A filter cartridge 12 is provided on the lower part of the recycling pump body 10, and a liquid extraction connection joint 13 is provided on the lower part of the filter cartridge 12 and penetrates the recycling pump body 10 and is threadedly sleeved and fixed with the liquid extraction pipe 7.
[0023] A control method for an acid etching machine auxiliary device comprises the following steps: Step 1: Place the silicon wafer into the corrosion cage 2, and drive the swing arm 1 through the swing motor 4 to rotate the corrosion cage 2 into the chemical solution tank 3.
[0024] Step 2: The corrosion cage 2 is swung up and down in the chemical solution tank 3 by the swing arm 1 for cleaning.
[0025] Step 3: The liquid medicine splashed out during the swinging process is recovered by the collecting tank 5, and the liquid medicine is reused through the pipeline connecting the collecting tank 5 and the liquid medicine tank 3.
[0026] The liquid medicine in the collection tank 5 is recycled into the liquid medicine tank 3 through the circulating liquid return pump 11 in the recycling assembly 6, the liquid extraction pipe 7 and the liquid return pipe 8. The filter cartridge 12 is installed at the lower part of the recycling pump body 10 to filter the recycled liquid medicine. The lower part of the filter cartridge 12 is connected to the liquid extraction pipe 7 through the liquid extraction connection joint 13. The liquid medicine filtered by the filter cartridge 12 is then transported to the liquid return pipe 8 through the circulating liquid return pump 11.
[0027] In summary, the acid etching machine auxiliary device for reducing mixed acid consumption and the control method thereof have the advantages of compact structure and good operation stability, and solve the problem of the corrosion cage swinging up and down and splashing the liquid. It effectively reduces the speed of corrosion liquid loss and achieves the effect of effectively reducing costs and increasing efficiency.
[0028] The above description is only a specific embodiment of the present invention, but the structural features of the present invention are not limited thereto. Any changes or modifications made by any technician in the field of the present invention are included in the patent scope of the present invention.
Claims
1. An acid etching machine auxiliary device for reducing mixed acid consumption, characterized in that: The invention comprises a liquid medicine tank (3), wherein a corrosion cage (2) is provided on the liquid medicine tank (3) and moves relative to the liquid medicine tank (3), swing arms (1) are provided at both ends of the corrosion cage (2) to drive the corrosion cage (2) to rotate, and a swing motor (4) is provided on the lower side of one swing arm (1), collecting tanks (5) are provided on both sides of the liquid medicine tank (3), a recycling component (6) is provided between the collecting tank (5) and the liquid medicine tank (3), a liquid extraction pipe (7) is provided between the recycling component (6) and the lower part of the collecting tank (5), and a liquid return pipe (8) is provided between the recycling component (6) and the upper part of the liquid medicine tank (3).
2. The acid etching machine auxiliary device for reducing mixed acid consumption according to claim 1, characterized in that: A rotary drive motor (9) is provided at the lower side of the swing arm (1) on the other side. A pulley or sprocket is provided inside the swing arm (1) and is spline-type limitedly plugged with the rotary drive motor (9). The rotary drive motor (9) drives the belt or chain to cause the corrosion cage (2) to roll.
3. The acid etching machine auxiliary device for reducing mixed acid consumption according to claim 2, characterized in that: The recycling assembly (6) comprises a recycling pump body (10), and a circulating liquid return pump (11) is provided on the upper part of the recycling pump body (10) and is threadedly sleeved and fixed to the liquid return pipe (8).
4. The acid etching machine auxiliary device for reducing mixed acid consumption according to claim 3 is characterized in that: A filter cartridge tank (12) is provided at the lower portion of the reuse pump body (10), and a liquid extraction connection joint (13) is provided at the lower portion of the filter cartridge tank (12) and penetrates through the reuse pump body (10) and is threadedly sleeved and fixed to the liquid extraction pipe (7).
5. A control method for the acid etching machine auxiliary device according to claim 4, characterized in that The steps are as follows: Step 1: placing the silicon wafer into the etching cage (2), and driving the swing arm (1) via the swing motor (4) to rotate the etching cage (2) into the chemical solution tank (3); Step 2: The corrosion cage (2) is swung up and down in the liquid medicine tank (3) by the swing arm (1) for cleaning; Step 3: The liquid medicine splashed out during the swinging process is recovered by the collecting tank (5), and the liquid medicine is reused through a pipeline connecting the collecting tank (5) and the liquid medicine tank (3).
6. The control method of the acid etching machine auxiliary device according to claim 5, characterized in that: The liquid medicine in the collection tank (5) is recycled into the liquid medicine tank (3) through the liquid return pipe (8) and the liquid suction pipe (7) via the liquid return pipe (11) in the recycling assembly (6).
7. The control method of the acid etching machine auxiliary device according to claim 5, characterized in that: A filter cartridge (12) is installed at the lower part of the recycling pump body (10) to filter the recycled liquid medicine. The lower part of the filter cartridge (12) is connected to the liquid extraction pipe (7) via a liquid extraction connection joint (13). The liquid medicine filtered by the filter cartridge (12) is then transported to the liquid return pipe (8) via a circulating liquid return pump (11).