Wafer processing task generation method and system based on compatible communication protocol, and wafer processing control system

Abstract

The embodiment of the invention discloses a wafer processing task generation method and system based on a compatible communication protocol and a wafer processing control system, and the method comprises the steps: initializing an SECS / GEM protocol stack, and obtaining an E39 top object of wafer processing equipment; the method comprises the following steps of: acquiring a LoadPort Manager object of a loading port manager, and creating an E87Load Port object; the method comprises the following steps of: obtaining a MaterialTrackingManager object and a Chamber Carrier Location object, and endowing the MaterialTrackingManager object with a unique identifier; the method comprises the following steps of: creating a Transfer Module object, and creating a CarrierLocation attribute according to the Transfer Module object and the CarrierLocation attribute; according to an E87Load Port object, setting an E87Load Port attribute corresponding to the Transfer Module, and according to the E87Load Port object, setting a Transfer Module corresponding to the Transfer Module; registering E90 position data through a preset registration method when the system is started and initialized; and creating a Job Create page, and entering the page type according to the selection of the user. According to the method, SECS / GEM and GEM300 protocol standards can be compatible, the most suitable communication standard can be flexibly selected according to the actual situation, the operations of Load Lock and shuttle are more unified and simplified, and the compatibility and efficiency of the system are improved.

Description

Technical Field

[0001] The present invention relates to the field of wafer processing control technology, and in particular to a wafer processing task generation method and system based on a compatible communication protocol, and a wafer processing control system. Background Art

[0002] In wafer processing equipment, such as CVD 6 / 8-inch machines, Load Lock and shuttle components are important equipment components. Load Lock components are used to ensure that wafers can smoothly and effectively transition from atmospheric environment to high vacuum environment, while preventing contamination and maintaining the cleanliness of the vacuum chamber. The shuttle component (transmission system) cooperates with the Load Lock component to ensure efficient and safe transmission of wafers to the high vacuum process environment. The specific cooperation between the two is as follows:

[0003] 1. Wafer loading: First, the shuttle assembly is responsible for switching the two Cassette boxes on the shuttle assembly so that only one Cassette box (box containing wafers, the same below) can face the entrance of the Load Lock, and the Cassette box facing the door of the Load Lock is sent to the entrance of the Load Lock assembly through an automated transport track or a robotic arm. In this process, precise positioning and gentle handling of the shuttle assembly are crucial to avoid wafer damage and contamination.

[0004] 2. Pressure regulation: Once the Cassette is placed in the Load Lock assembly, the system closes the entrance door and begins the vacuum pumping process, quickly reducing the pressure in the Load Lock assembly from atmospheric pressure to a high vacuum state that matches the next process chamber. This process helps reduce the entry of external contaminants into the clean vacuum environment while ensuring that the wafer surface is not damaged by sudden pressure changes.

[0005] 3. Wafer transfer: When the Load Lock component reaches the set vacuum level, the exit door on the other side opens, and the Robot in the transfer chamber transfers the wafer in the specified slot of the Cassette of the Load Lock component to the next process chamber, such as deposition, etching or measurement equipment. This transfer process is usually automated and precisely controlled to maintain the integrity of the vacuum environment.

[0006] 4. Reverse process: After completing the process steps, the Robot in the transfer chamber will send the wafer from the process chamber back to the slot where the wafer is taken out of the Cassette box in the Load Lock. The Load Lock component is then inflated to restore to atmospheric pressure, and the Cassette is sent back to its original position on the Shuttle by the Load Lock Robot and sent back to the FOUP or other subsequent processing areas.

[0007] 5. Continuous operation: In order to maintain the efficient operation of the production line, some advanced Load Lock components are designed with a dual-chamber or multi-chamber structure, so that while pressure is adjusted on one side, wafers can be loaded or unloaded on the other side, ensuring seamless connection and high throughput of the production process.

[0008] Therefore, it can be seen that how to ensure the close cooperation between the shuttle component and the Load Lock component is an indispensable part of modern semiconductor automated production. Only when the two work in effective coordination can the wafer be smoothly transitioned between different pressure environments, thereby ensuring the high efficiency and high quality of the semiconductor manufacturing process.

[0009] However, at present, the existing control technology needs to configure two independent equipment communication standard protocols, such as SECS / GEM standard and GEM300 standard, in the coordinated control process of the load lock and shuttle components of the CVD 6 / 8-inch machine to adapt to different wafer processing tasks. This has caused the following problems:

[0010] 1. The operation process is complicated during the task generation process and will significantly increase the complexity of the system (because two different communication protocol stacks and logical processing flows need to be maintained);

[0011] 2. There is a problem of low efficiency in the task generation process. The same device supporting two sets of standards will consume more computing resources, which will affect the overall performance of the device, and the additional communication processing steps will increase the response time of the system;

[0012] 3. There is a high error rate in the task generation process, and the interoperability and data consistency between the two standards are difficult to guarantee, which leads to compatibility issues;

[0013] 4. Other ancillary issues, such as difficulties in maintenance and debugging, complex user interface, and difficulty in use, also bring certain difficulties to technical personnel. They need to be familiar with two sets of standards at the same time, which increases the cost of training and support; and cannot meet the needs of automated production lines. Summary of the invention

[0014] Based on this, in order to solve the deficiencies of the above-mentioned prior art, a wafer processing task generation method based on a compatible communication protocol is proposed.

[0015] A method for generating wafer processing tasks based on a compatible communication protocol, characterized by comprising:

[0016] S1. Initialize the SECS / GEM protocol stack and obtain the E39 top-level object of the wafer processing equipment;

[0017] S2, from the E39 top-level object, obtain the load port manager LoadPortManager object,

[0018] S3. Create an E87 Load Port object with a unique identifier for each Cassette corresponding to the Load Lock component according to the LoadPortManager object;

[0019] S4. Obtain the MaterialTrackingManager object from the E39 top-level object, create a new Chamber Carrier Location object based on the MaterialTrackingManager object, and assign it a unique identifier;

[0020] S5. Create a Transit Module object and set the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array consisting of the LoadLocation of the E87 Load Port object and the Chamber Carrier Location object;

[0021] S6. Set the E87LoadPorts property corresponding to the Transit Module according to the E87 Load Port object;

[0022] S7, registering E90 location data through a preset registration method when the system is started and initialized, wherein the E90 location data is used to determine the LoadPort and Carrier Location information required for the task generation process according to the CarrierLocations attribute and the E87LoadPorts attribute;

[0023] S8. Create a Job Create page, and generate a corresponding operation interface based on steps S1-S7 according to the page type selected by the user; the page types include SECS / GEM standard Job Create page and GEM300 standard Job Create page.

[0024] Optionally, in one of the embodiments, the specific implementation steps of S1: initializing the SECS / GEM protocol stack and obtaining the E39 object of the wafer processing equipment include:

[0025] S11, initialize the SECS / GEM protocol stack and create a SECS / GEM client instance, wherein the SECS / GEM client instance is used to communicate with the wafer processing equipment;

[0026] S12. Obtain the E39 top-level object corresponding to the wafer processing equipment through the SECS / GEM client instance, wherein the E39 top-level object defines all SECS / GEM functional objects related to the wafer processing equipment.

[0027] Optionally, in one embodiment, the number of E87 Load Port objects in S3 is determined according to the number of carrier Cassettes, and each E87 Load Port object corresponds to a carrier Cassette individually.

[0028] Optionally, in one embodiment, the specific implementation steps of creating a Transit Module object and setting the CarrierLocations attribute of the Transit Module in S5 include:

[0029] S51, creating a Transit Module object, wherein the Transit Module object is used to manage the Carrier Location and the E87 Load Port object to which it belongs;

[0030] S52, obtain the LoadLocation and Chamber Carrier Location objects of the E87 Load Port object and form an array;

[0031] S53. The obtained array is set as the CarrierLocations property of the Transit Module, thereby completing the initialization of the Transit Module object so that it includes all the Carrier Locations related to it.

[0032] Optionally, in one of the embodiments, the registration method preset in S7 is to create an instance through a pre-packaged DLL file of the Transit Module class, and the instance is used to set relevant properties of the Transit Module, and the relevant properties of the Transit Module include CarrierLocations property and E87LoadPorts property.

[0033] Optionally, in one embodiment, the specific implementation steps of creating a Job Create page in S8 and generating a corresponding operation interface based on steps S1-S7 according to the page type selected by the user include:

[0034] S81, creating a SECS / GEM standard Job Create page, that is, creating a SECSGEMJobCreatePage class, and receiving recipe parameters of the processing task through the on_load_and_create_job_click method based on the SECSGEMJobCreatePage class;

[0035] S82, creating a GEM300 standard Job Create page, that is, creating a GEM300JobCreatePage class, based on the GEM300JobCreatePage class, receiving the cassette parameters of the processing task through the on_load_click method, and receiving the recipe parameters of the processing task through the on_create_job_click method;

[0036] S83. Create a UI layer, which is used to provide services for users to configure and select to use the SECS / GEM standard Job Create page or the GEM300 standard Job Create page.

[0037] In addition, a task generation system for wafer processing control system based on compatible communication protocol is proposed.

[0038] A task generation system for a wafer processing control system based on a compatible communication protocol, comprising:

[0039] Initialization unit, which is used to initialize the SECS / GEM protocol stack and obtain the E39 top-level object of the wafer processing equipment;

[0040] The first data processing unit is used to obtain a load port manager LoadPortManager object from the E39 top-level object.

[0041] A second data processing unit, which is used to create an E87 Load Port object with a unique identifier for a carrier Cassette corresponding to the Load Lock component according to the load port manager LoadPortManager object;

[0042] A third data processing unit, which is used to obtain a MaterialTrackingManager object from the E39 top-level object, create a new Chamber Carrier Location object according to the MaterialTrackingManager object, and assign it a unique identifier;

[0043] A fourth data processing unit, which is used to create a Transit Module object and set the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array consisting of the LoadLocation of the E87 Load Port object and the Chamber Carrier Location object;

[0044] A fifth data processing unit, which is used to set the E87LoadPorts property corresponding to the Transit Module according to the E87 Load Port object;

[0045] A location data registration unit, which is used to register E90 location data through a preset registration method when the system is started and initialized, and the E90 location data is used to determine the Load Port and Carrier Location information required for the task generation process according to the CarrierLocations attribute and the E87LoadPorts attribute;

[0046] The page generation display is used to create a Job Create page, and generates a corresponding operation interface based on steps S1-S7 according to the page type selected by the user; the page types include SECS / GEM standard Job Create page and GEM300 standard Job Create page.

[0047] In addition, a wafer processing control system loaded with the aforementioned task generation system for the wafer processing control system based on the compatible communication protocol is also proposed.

[0048] In addition, a computer-readable storage medium is also proposed, comprising computer instructions. When the computer instructions are executed on a computer, the computer is enabled to execute the method.

[0049] Implementing the embodiments of the present invention will have the following beneficial effects:

[0050] 1. The task generation mechanism designed by the present invention is compatible with SECS / GEM and GEM300 protocol standards, and can seamlessly interact with control systems in different manufacturing environments, whether it is a traditional SECS / GEM environment or the latest GEM300 environment, and allows the factory to switch protocols. The equipment provider does not need to modify the code to update the system, but only needs to change the system settings to switch, without having to replace all equipment immediately. The most appropriate communication standard can be flexibly selected according to actual conditions, thereby optimizing production scheduling and resource allocation resources, and ensuring the continuity and stability of production;

[0051] 2. The present invention provides a unified interface for users, so that devices under different standards can work together in the same network, that is, the operations of Load Lock and shuttle are more unified and simplified, and the compatibility and efficiency of the system are improved;

[0052] 3. Users can operate devices under different standards through the same interface, reducing learning costs and improving operating efficiency.

[0053] 4. The present invention can greatly improve the convenience and efficiency of later client repair and maintenance, such as simplifying the maintenance process and cost: for maintenance personnel, they can adapt to different communication standards through simple system setting adjustments without changing the core code of the system, thereby simplifying the maintenance process and improving work efficiency. For example, by avoiding frequent hardware replacement and complex software development work, users can save a lot of costs in maintenance and support; in addition, this flexibility also helps to extend the service life of the equipment and further reduce long-term operating costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0055] in:

[0056] Figure 1 It is a flowchart of the implementation steps of the present invention;

[0057] Figure 2 A flowchart of the steps of the Job Create and Job End process corresponding to the embodiment of the present invention;

[0058] Figure 3 A flowchart of steps corresponding to the LoadOperation process of the embodiment of the present invention;

[0059] Figure 4 A flowchart of the steps corresponding to the Create Job process of the embodiment of the present invention;

[0060] Figure 5 A flowchart of the steps corresponding to the Unload Operation process of the embodiment of the present invention;

[0061] Figure 6 This is a flowchart of the steps corresponding to the Recreate Carrier process of the embodiment of the present invention. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0063] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art of the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. It is understood that the terms "first", "second", etc. used in the present invention can be used to describe various elements in this article, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element. For example, without departing from the scope of the present application, the first element can be referred to as the second element, and similarly, the second element can be the first element. Both the first element and the second element are elements, but they are not the same element.

[0064] In the semiconductor manufacturing industry, a batch of wafers undergoes a series of predetermined semiconductor manufacturing process steps to produce a specific type of integrated circuit (IC) or other semiconductor devices. This usually involves an effective Job create functional module to ensure that the entire Job creation process is under strict and standardized process control, thereby ensuring the high quality and production efficiency of semiconductor devices.

[0065] At present, in wafer processing equipment, such as CVD 6 / 8-inch machines, two types of communication standards are generally involved to cope with different processing task needs, wherein the communication standards mentioned include SECS / GEM and GEM300 standards. SECS / GEM standard is a universal wafer processing equipment communication standard, applicable to wafers of various sizes (such as 150mm, 200mm, etc.) and various types of semiconductor processing equipment, covering the basic needs of equipment communication and control; GEM300 standard is a standard specially formulated for 300mm wafer processing equipment, which covers all the functions of SECS / GEM and expands its own specific functions (on the basis of SECS / GEM, multiple protocols such as E39, E87, E90 are added), supports higher automation requirements and complex 300mm wafer manufacturing processes, and supports the complex manufacturing process requirements of 300mm wafer manufacturing process with highly precise control;

[0066] However, in existing processing control systems, two independent communication standards are often required to meet processing requirements. The main reasons are:

[0067] When creating a job in SECS / GEM standard: After blindly selecting a recipe (in the absence of specific Slot Map Data, select a recipe and then create a job - Create Job), then create a job and start the job. This means that the user can start preparing the job without knowing the wafer layout in the specific carrier (wafer box). In this case, the processing equipment processes the wafer according to the default settings or other preset parameters until the specific Slot Map Data is provided. This method can start preparation work faster without waiting for complete carrier information.

[0068] Here, Recipe refers to the detailed specifications (process recipe) for each step of processing performed on the wafer (or wafer) during the semiconductor manufacturing process, that is, it contains all the key steps and parameters that must be followed to produce a specific semiconductor device.

[0069] GEM300 standard Create Job: requires accurate Slot Map Data (carrier slot map data) before Create Job. After confirming Slot Map Data, users can select one or more recipes (one wafer is bound to one recipe, and two wafers can select two different recipes), and then Create Job and start the operation to ensure that the equipment processes the wafers in the correct order and configuration to avoid errors caused by incomplete information.

[0070] Accurate Slot Map Data means that before creating a job, the device needs to determine the status and location information of the wafer in each slot according to the Slot Map Data.

[0071] At the same time, the Create Job process involves important equipment components including Load Lock components and shuttle components. The Load Lock component is used to ensure that the wafer can smoothly and effectively transition from the atmospheric environment to the high vacuum environment while preventing contamination and maintaining the cleanliness of the vacuum chamber, while the shuttle component (transmission system) cooperates with the Load Lock component to ensure efficient and safe transmission of the wafer to the high vacuum process environment. Therefore, an innovative solution is urgently needed to optimize and simplify the above process, so that the control system can be compatible with SECS / GEM and GEM300 standards, so that the Create Job process can effectively coordinate the work of Load Lock and shuttle, thereby meeting the needs of automated production lines.

[0072] In view of this purpose, in this embodiment, a wafer processing task generation method based on a compatible communication protocol is proposed. Figure 1As shown, the method includes S1, initializing the SECS / GEM protocol stack and obtaining the E39 object of the wafer processing equipment; S2, obtaining the load port manager LoadPortManager object from the E39 top-level object; S3, creating an E87 Load Port object with a unique identifier for the carrier Cassette corresponding to the Load Lock component according to the load port manager LoadPortManager object; S4, obtaining the MaterialTrackingManager object from the E39 top-level object and creating a new Chamber Carrier Location object according to the MaterialTrackingManager object, and assigning it a unique identifier; S5, creating a Transit Module object and setting the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array composed of the LoadLocation of the E87 Load Port object and the Chamber Carrier Location object; S6, setting the Transit according to the E87 Load Port object Module corresponding to the E87LoadPorts property; S7, when the system is started and initialized, register the E90 location data through the preset registration method, and the E90 location data is used to determine the Load Port and Carrier Location information required for the task generation process according to the CarrierLocations property and the E87LoadPorts property; S8, create a Job Create page, and according to the page type selected by the user, generate a corresponding operation interface based on steps S1-S7; the page types include SECS / GEM standard Job Create page and GEM300 standard Job Create page.

[0073] Based on the above design scheme, it can be seen that the design point of this application is to adapt and modify based on the SECS / GEM client, that is, the protocol stack, that is, first define the Load Lock and shuttle as a Transit Module, and register the E90 location data (Material Location) in the Transit Module. At this time, this Load Lock is regarded as a standard Load Port, and the E87 part is responsible for the location registration of the Load Port carrier; and on this basis, according to the task requirements, the Job Create function process is split into 2 sub-processes, namely Load Operation and Create Job Operation, thereby completing the generation and control process of the wafer processing task.

[0074] In some specific embodiments, the specific implementation steps of S1: initializing the SECS / GEM protocol stack and obtaining the E39 object of the wafer processing equipment include:

[0075] S11, initializing the SECS / GEM protocol stack (i.e., SECS / GEM client) and creating a SECS / GEM client instance, wherein the SECS / GEM client instance is used to communicate with the wafer processing equipment;

[0076] S12. Obtain the E39 top-level object corresponding to the wafer processing equipment through the SECS / GEM client instance, and the E39 top-level object defines all SECS / GEM functional objects related to the wafer processing equipment; in the SECS / GEM client, there is usually a top-level object or interface for organizing and managing various communications with the wafer processing equipment, and accessing various functions and services provided by the SECS / GEM protocol stack through this top-level object.

[0077] In some specific embodiments, the specific implementation steps of S2: obtaining the load port manager LoadPortManager object from the E39 top-level object include:

[0078] S21, obtaining a load port manager LoadPortManager object from the E39 top-level object;

[0079] S22. Query the number and numbering information of existing Load Port objects in the LoadPortManager object; the purpose of setting S2 is to ensure that these objects have unique identifiers before creating new E87 Load Port objects, so as to avoid repeated naming or numbering. At the same time, determining the number of existing Load Port objects can help the system better manage resources to ensure that the processing capacity of the SECS / GEM client is not exceeded.

[0080] In some specific embodiments, S3: according to the load port manager LoadPortManager object, create E87Load Port objects with unique identifiers for the carrier Cassettes corresponding to the Load Lock components respectively. The E87Load Port objects refer to the E87LoadPort objects defined based on the SEMI E39 standard, which are used for information communication between the SECS / GEM client and the factory control system. These objects usually represent physical Load Ports (loading ports) and manage operations related to these Load Ports through the SECS / GEM protocol, such as managing the location information of the wafer carrier Cassette on the Load Port and communicating with the factory control system through the SECS / GEM protocol to report the status and location information of the Load Port. Ensure that each Load Lock has an independent Load Port to manage different operations and give them unique identifiers. The purpose of this is to ensure that the E87Load Port objects created for each Load Lock (corresponding carrier Cassette) are unique and consistent throughout the system. This design is very important for equipment management and process control.

[0081] Based on the above design, the specific implementation steps include: assuming that the number of carrier Cassettes is 2, namely carrier Cassette1 and carrier Cassette2, a new E87 Load Port object is created for each carrier Cassette using the LoadPortManager object, so that each Load Lock is configured with a corresponding E87Load Port object, wherein the E87Load Port objects in this example include e87LP1 and e87LP2, so that e87LP1 manages the corresponding operations on carrier Cassette1, and e87LP2 manages the corresponding operations on carrier Cassette2.

[0082] In some specific embodiments, S4: obtains the MaterialTrackingManager object from the E39 top-level object and creates a new Chamber Carrier Location object based on the MaterialTrackingManager object, and assigns it a unique identifier; the MaterialTrackingManager object here is responsible for managing the location information of the wafer, that is, the Material here refers to the wafer. In view of the need to achieve compatibility with the GEM300 standard in the SECS / GEM protocol stack, the ChamberCarrier Location should be closely linked to the CarrierLocations attribute of the Transit Module. It is necessary to define an object Chamber Carrier Location for tracking the position of the carrier in the chamber. Its function is that when the carrier moves from outside the Loadlock chamber (Load position of Loadlock) to the LoadLock chamber for processing, the ChamberCarrier Location can record the specific position of the carrier in the chamber, and at the same time obtain the corresponding CarrierLocations attribute (an array) in the Transit Module to store all relevant Carrier Location information.

[0083] In some specific embodiments, the specific implementation steps of S5: creating a Transit Module object and setting the CarrierLocations attribute of the TransitModule to include all relevant Carrier Locations include:

[0084] S51, creating a Transit Module object, wherein the Transit Module object is used to manage the Carrier Location and the E87 Load Port object to which it belongs;

[0085] S52, obtain the LoadLocation and Chamber Carrier Location objects of the E87 Load Port object and form an array; refer to the aforementioned content, the E87 Load Port object includes e87LP1 and e87LP2, and since e87LP1 and e87LP2 are Load Port objects of the Load Lock, and each Load Port object has a Load Location attribute to indicate the location of the carrier on the Load Port, the Load Location attribute in the E87 Load Port object can form an array with the Chamber Carrier Location attribute of the Chamber Carrier Location object, and this array contains all related Carrier Locations;

[0086] S53, setting the obtained array as the CarrierLocations property of the Transit Module, thereby completing the initialization of the Transit Module object, so that it contains all the Carrier Locations related to it. That is, since the CarrierLocations property is an array, it is used to store all the related Carrier Location information; by setting the CarrierLocations property of the Transit Module, the system can uniformly manage the location information of all carriers, whether they are on the Load Lock or in the chamber.

[0087] In some specific embodiments, the specific implementation steps of S6: setting the E87LoadPorts attribute corresponding to the Transit Module according to the E87 Load Port object so that it includes all related E87 Load Port objects (ensuring that the system can uniformly manage the information of all Load Ports and can quickly locate and operate these Load Ports when needed) include:

[0088] S61, e87LP1 and e87LP2 in the E87 Load Port object are combined into an array. Since two E87 Load Port objects are required, e87LP1 and e87LP2 are combined into an array.

[0089] S62, set the array in S61 to the E87LoadPorts property corresponding to the Transit Module, so that the system can uniformly manage these Load Ports, i.e., all related E87 Load Port objects. The coordination mechanism constructed by S4-S6 enables the Transit Module defined in this application to uniformly manage the information of all Load Ports and CarrierLocations, ensuring that the system can efficiently track and manage the location and status of the wafer.

[0090] In some specific embodiments, the registration method preset in S7 is to create an instance through a pre-packaged DLL file of the TransitModule class, and the instance is used to set the relevant properties of the Transit Module, and the relevant properties of the Transit Module include the CarrierLocations property and the E87LoadPorts property. That is, the relevant timing of registering E90 is that the system uses the packaged DLL file of the Transit Module class, and when the system is initialized, the DLL file is called to register the E90 location data, so as to realize the registration of the E90 location data when the system is started, thereby ensuring that when the system is started, all relevant Load Port and Carrier Location information are correctly registered, so that the system can correctly track and manage the location and status of the wafer to effectively manage the movement trajectory of the wafer, thereby ensuring the design purpose of smooth operation of the production process.

[0091] In some specific embodiments, the specific steps of creating a Job Create page in S8 and generating a corresponding operation interface based on steps S1-S7 according to the page type selected by the user include the following steps:

[0092] S81. Create a SECS / GEM standard Job Create page, that is, create a SECSGEMJobCreatePage class, and receive the recipe parameters of the processing task through the on_load_and_create_job_click method based on the SECSGEMJobCreatePage class; preferably, the SECS / GEM standard Job Create page can be designed as a page without a separate Load button, and only a LoadAndCreateJob button is provided. After blindly selecting the recipe, the LoadAndCreateJob button is clicked, and in the back-end program, the Load Operation is first called, and the Create Job Operation is automatically called after confirming that the Load Operation is successfully executed, and the job is started after the Create Job Operation is successfully executed; then the specific SECS / GEM standard Job Create page creation process is to first create a SECSGEMJobCreatePage class, and in the SECSGEMJobCreatePage class, the recipe parameters are received by using an on_load_and_create_job_click method, and the on_load_and_create_job_click method first calls the preset Load Operation method, and determines whether the Load Operation call is successful. If yes, the Create Job Operation method is continued to be called, and after confirming that the Create Job Operation is successful, the job is started.

[0093] S82, create a GEM300 standard Job Create page, that is, create a GEM300JobCreatePage class, based on the GEM300JobCreatePage class, receive the cassette parameters of the processing task through the on_load_click method, and receive the recipe parameters of the processing task through the on_create_job_click method; preferably, the GEM300 standard JobCreate page can be designed as a page with a Load button and a Create Job button, select the Cassette to be operated and click the Load button, call the Load Operation in the back-end program, after the Load Operation is successfully executed, the Job Create page will display the Slot Map Data, after selecting the Recipe according to the Slot Map Data, click the Create Job button, call the Create Job Operation in the back-end program, and start the operation after the Create Job Operation is successfully executed, then the specific GEM300 standard Job Create page creation process is to create a GEM300JobCreatePage class, in the GEM300JobCreatePage class, first receive the cassette parameters through the on_load_click method, the on_load_click method is to first call the Load Operation method, and obtain Slot Map Data after confirming that LoadOperation is successful. Secondly, receive the recipe parameter through the on_create_job_click method. The on_create_job_click method first calls the Create Job Operation method and starts the job after confirming that CreateJob Operation is successful.

[0094] S83. Create a UI layer, which is used to provide services for users to configure and choose to use the SECS / GEM standard Job Create page or the GEM300 standard Job Create page. Creating the UI layer means first creating a JobCreateUI class, and in the constructor of the JobCreateUI class, according to the passed standard parameters (standard), choose to initialize SECSGEMJobCreatePage or GEM300JobCreatePage, and at the same time display the page selected by the user through a preset show_page method, so as to generate corresponding operations according to the code logic expressed in steps S1-S7.

[0095] Through the above process, the user can place the wafer on the Load Lock and initiate a loading request through the user interface to determine whether to use the SECS / GEM standard Job Create page or the GEM300 standard Job Create page; the SECS / GEM standard Job Create page starts the original program in the system. If it is the GEM300 standard Job Create page, the system sends the E90 command to the Transit Module through the SECS / GEM protocol to register the location information of the wafer; the Transit Module confirms that the wafer has been loaded and returns a confirmation message. The system updates the status of the wafer, indicating that the wafer is ready for the next operation. At the same time, the system records the status update in the database and notifies the user interface.

[0096] Based on the same inventive concept, the present invention also proposes a task generation system for a wafer processing control system based on a compatible communication protocol, comprising:

[0097] Initialization unit, which is used to initialize the SECS / GEM protocol stack and obtain the E39 top-level object of the wafer processing equipment;

[0098] The first data processing unit is used to obtain a load port manager LoadPortManager object from the E39 top-level object.

[0099] A second data processing unit, which is used to create an E87 Load Port object with a unique identifier for a carrier Cassette corresponding to the Load Lock component according to the load port manager LoadPortManager object;

[0100] A third data processing unit, which is used to obtain a MaterialTrackingManager object from the E39 top-level object, create a new Chamber Carrier Location object according to the MaterialTrackingManager object, and assign it a unique identifier;

[0101] A fourth data processing unit, which is used to create a Transit Module object and set the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array consisting of the LoadLocation of the E87 Load Port object and the Chamber Carrier Location object;

[0102] A fifth data processing unit, which is used to set the E87LoadPorts property corresponding to the Transit Module according to the E87 Load Port object;

[0103] A location data registration unit, which is used to register E90 location data through a preset registration method when the system is started and initialized, and the E90 location data is used to determine the Load Port and Carrier Location information required for the task generation process according to the CarrierLocations attribute and the E87LoadPorts attribute;

[0104] The page generation display is used to create a Job Create page, and generates a corresponding operation interface based on steps S1-S7 according to the page type selected by the user; the page types include SECS / GEM standard Job Create page and GEM300 standard Job Create page.

[0105] In addition, a wafer processing control system loaded with the aforementioned task generation system for the wafer processing control system based on the compatible communication protocol is also proposed.

[0106] Based on the same inventive concept, the present invention also proposes a computer-readable storage medium, comprising computer instructions, and when the computer instructions are executed on a computer, the computer executes the method described.

[0107] At the same time, based on the above design scheme and design principle, the applicant loaded the aforementioned program system based on the compatible communication protocol to generate task code into the wafer processing control system to verify the wafer processing equipment (i.e., the CVD 6 / 8-inch machine based on the company's independent design), and the application was good. The control process involved is as follows: (1) Job Create and Job End process, the user sets the protocol standard through the system (the Job Create page of the system configuration), such as Figure 2 As shown,

[0108] S1. If you select SECS / GEM protocol and start; S11. Complete the system Initialize (Initialize of each functional module of the machine is completed); S12. On the Job Creation page 1. Enter Carrier ID 2. Select the wafer recipe. 3. Click the Load&&Create button; S13. Execute LoadOperation and determine whether it is successful; if successful, execute S14CreateJobOperation; if failed, Abort and prompt the user; S14. Execute Create Job Operation and determine whether it is successful; if successful, execute S15; if failed, Abort and prompt the user; S15. Perform the process, if the process is not completed, an alarm will be issued and Abort will be prompted to the user; S16. After the process is completed, execute UnLoadOperation and determine whether it is successful; if successful, end the current Cassette process Job; if failed, Abort and prompt the user;

[0109] S2. If GEM300 protocol is selected and started; S21. Initialize the system (Initialize of each functional module of the machine is completed); S22. On the Job Creation page 1. Enter Carrier ID 2. Click the Load button; S23. Execute LoadOperation and determine whether it is successful; if successful, execute on the Job Creation page 1. Select the wafer recipe. 2. Click the Create Job button; if failed, Abort and prompt the user; S24. Execute Create Job Operation and determine whether it is successful; if successful, execute S25; if failed, Abort and prompt the user; S25. Carry out the process, if the process is not completed, an alarm will be issued and Abort will be prompted to the user; S26. After the process is completed, execute UnLoadOperation and determine whether it is successful; if successful, end the current Cassette process Job; if failed, Abort and prompt the user;

[0110] (2) LoadOperation process:

[0111] like Figure 3 As shown, start;

[0112] T1. Check if there is already a cassette in the chamber; if yes, Abort and prompt the user; otherwise, execute T2. Check if there is a carrier in the specified cassette position; T2. Check if there is a carrier in the specified cassette position; if yes, execute T3; otherwise, Abort and prompt the user; T3. Check if the carrier to be loaded has read the carrier ID; if yes, execute T4; otherwise, execute Tbort and prompt the user; T4. Check if a carrier object has been created in the specified cassette position; if yes, execute T41; otherwise, execute T5; T41. Determine if the ID of the created carrier object is consistent with the currently specified CID; otherwise, execute Tbort and prompt the user; if yes, execute T6; T5. If the carrier is successfully created based on the passed CID and parameters, execute T8; if it fails, Abort and prompt the user; T6. Determine if the ID Status of the created carrier object is correct; if yes, execute T7; otherwise, Abort and prompt the user; T7. Update the carrier object based on the passed parameters and execute T8; T8. Determine if the CID (Carrier lD) verification; if yes, execute T9 otherwise execute T81; T81, wait for manual confirmation from the factory, if yes, execute T9 otherwise Abort and prompt the user; T9, start to vent the LoadLock cavity to the atmosphere and execute T10; T10, determine whether the current Cassette has reached the LoadLock Load position, if yes, execute T11 otherwise execute T101.

[0113] (3) Create Job process:

[0114] like Figure 4 As shown, start; R1, check whether the LoadLock Chamber has a Carrier Obj; if yes, execute R2; otherwise, Abort and prompt the user; R2, check whether the Wafer in the Cassette has been associated with the PRJob, if yes, Abort and prompt the user; otherwise, execute R3; R3, process the parameters passed in by the front-end UI, convert them into the parameter format required for Create Job and start CreateJob; R4, CreatePRJobs and determine whether to execute R5; otherwise, Abort and prompt the user; R5, Create control job, if successful, Create JobOperation is completed, otherwise Abort and prompt the user.

[0115] (4) Unload Operation process:

[0116] like Figure 5 As shown, Y1, start and check whether there is already a Cassette in the chamber, if yes, execute Y2, otherwise Abort and prompt the user; Y2, check whether there is a Carrier at the specified Cassette position, if yes, Abort and prompt the user; otherwise execute Y3; Y3 starts to vent the LoadLock chamber to the atmosphere and determines whether it is successful, if yes, execute Y4, otherwise Abort and prompt the user; Y4, open the LoadLock Door and determine whether it is successful, if yes, execute Y5, otherwise Abort and prompt the user; Y5, move the Carrier from the LoadLock Chamber position to the Cassette position and determine whether it is successful, if yes, execute Y6, otherwise Abort and prompt the user;

[0117] Y6. Update E90 Carrier location data. Y7. Close LoadLock Door and determine whether it is successful. If so, UnloadOperation is completed. Otherwise, Abort and prompt the user.

[0118] (5) Recreate Carrier process:

[0119] like Figure 6 As shown, U1 starts and checks whether Carrier exists according to the parameters passed by the front-end UI. If yes, execute U2. Otherwise, Abort and prompt the user. U2 checks whether ACCESSMODE is correct. If yes, execute U3. Otherwise, Abort and prompt the user. U3 calls E87 CarrierRecreateService to RecreateCarrier. RecreateCarrier is completed.

[0120] Implementing the embodiments of the present invention will have the following beneficial effects:

[0121] The present invention is compatible with SECS / GEM and GEM300 protocol standards and can flexibly select the most suitable communication standard according to actual conditions, and makes the operations of Load Lock and shuttle more unified and simplified, thereby improving the compatibility and efficiency of the system.

[0122] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A wafer processing task generation method based on a compatible communication protocol, characterized in that: include: S1. Initialize the SECS / GEM protocol stack and obtain the E39 top-level object of the wafer processing equipment; S2, from the E39 top-level object, obtain the load port manager LoadPortManager object, S3. Create an E87 Load Port object with a unique identifier for each Cassette corresponding to the Load Lock component according to the LoadPortManager object; S4. Obtain the MaterialTrackingManager object from the E39 top-level object, create a new Chamber Carrier Location object based on the MaterialTrackingManager object, and assign it a unique identifier; S5. Create a Transit Module object and set the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array consisting of the LoadLocation of the E87 Load Port object and the ChamberCarrier Location object; S6. According to the E87 Load Port object, set the E87LoadPorts property corresponding to the Transit Module; S7, registering E90 location data through a preset registration method when the system is started and initialized, wherein the E90 location data is used to determine the Load Port and Carrier Location information required for the task generation process according to the CarrierLocations attribute and the E87LoadPorts attribute; S8. Create a Job Create page, and generate a corresponding operation interface based on steps S1-S7 according to the page type selected by the user; the page types include SECS / GEM standard Job Create page and GEM300 standard JobCreate page.

2. The method for generating wafer processing tasks based on a compatible communication protocol according to claim 1, characterized in that: The specific implementation steps of creating a Transit Module object and setting the CarrierLocations attribute of the Transit Module in S5 include: S51, creating a Transit Module object, wherein the Transit Module object is used to manage the Carrier Location and the E87 Load Port object to which it belongs; S52, obtain the E87 Load Port object and the Chamber Carrier Location object and form an array; S53. The obtained array is set as the CarrierLocations property of the Transit Module, thereby completing the initialization of the Transit Module object so that it includes all the Carrier Locations related to it.

3. The method for generating wafer processing tasks based on a compatible communication protocol according to claim 1, characterized in that: The number of E87 Load Port objects in S3 is determined according to the number of carrier Cassettes, and each E87 Load Port object corresponds to a carrier Cassette separately.

4. The method for generating wafer processing tasks based on a compatible communication protocol according to claim 1, characterized in that: The registration method preset in S7 is to create an instance through the DLL file of the pre-packaged Transit Module class, and the instance is used to set the relevant properties of the Transit Module. The relevant properties of the Transit Module include the CarrierLocations property and the E87LoadPorts property.

5. The method for generating wafer processing tasks based on a compatible communication protocol according to claim 1, characterized in that: The specific implementation steps of creating a Job Create page in S8 and generating a corresponding operation interface based on steps S1-S7 according to the page type selected by the user include: S81, creating a SECS / GEM standard Job Create page, that is, creating a SECSGEMJobCreatePage class, and receiving recipe parameters of the processing task through the on_load_and_create_job_click method based on the SECSGEMJobCreatePage class; S82, creating a GEM300 standard Job Create page, that is, creating a GEM300JobCreatePage class, based on the GEM300JobCreatePage class, receiving the cassette parameters of the processing task through the on_load_click method, and receiving the recipe parameters of the processing task through the on_create_job_click method; S83. Create a UI layer, which is used to provide services for users to configure and select to use the SECS / GEM standard Job Create page or the GEM300 standard Job Create page.

6. The method for generating wafer processing tasks based on a compatible communication protocol according to claim 1, characterized in that: The specific implementation steps of S1: initializing the SECS / GEM protocol stack and obtaining the E39 object of the wafer processing equipment include: S11, initialize the SECS / GEM protocol stack and create a SECS / GEM client instance, wherein the SECS / GEM client instance is used to communicate with the wafer processing equipment; S12. Obtain the E39 top-level object corresponding to the wafer processing equipment through the SECS / GEM client instance, wherein the E39 top-level object defines all SECS / GEM functional objects related to the wafer processing equipment.

7. A task generation system according to any one of claims 1 to 6, characterized in that include: Initialization unit, which is used to initialize the SECS / GEM protocol stack and obtain the E39 top-level object of the wafer processing equipment; The first data processing unit is used to obtain a load port manager LoadPortManager object from the E39 top-level object. A second data processing unit, which is used to create an E87 Load Port object with a unique identifier for a carrier Cassette corresponding to the LoadLock component according to the load port manager LoadPortManager object; A third data processing unit, which is used to obtain a MaterialTrackingManager object from the E39 top-level object, create a new Chamber Carrier Location object according to the MaterialTrackingManager object, and assign it a unique identifier; A fourth data processing unit, which is used to create a Transit Module object and set the CarrierLocations attribute of the Transit Module, wherein the CarrierLocations attribute is an array consisting of the LoadLocation of the E87 Load Port object and the Chamber Carrier Location object; A fifth data processing unit, which is used to set the E87LoadPorts property corresponding to the Transit Module according to the E87 Load Port object; A location data registration unit, which is used to register E90 location data through a preset registration method when the system is started and initialized, and the E90 location data is used to determine the Load Port and Carrier Location information required for the task generation process according to the CarrierLocations attribute and the E87LoadPorts attribute; The page generation display is used to create a Job Create page, and generates a corresponding operation interface based on steps S1-S7 according to the page type selected by the user; the page types include SECS / GEM standard Job Create page and GEM300 standard Job Create page.

8. A wafer processing control system, loaded with the task generation system as claimed in claim 7.

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