Covering mechanism and industrial equipment

Abstract

The invention provides a covering mechanism and industrial equipment, and relates to the technical field of precision manufacturing. The covering mechanism comprises a cover body, a supporting body, a cavity, a sealing piece, a first rotating shaft and a second rotating shaft. The cover body is rotatably connected with the supporting body through the second rotating shaft and can rotate around the second rotating shaft relative to the supporting body. The supporting body is rotatably connected with the cavity through the first rotating shaft, and the supporting body is used for supporting the cover body and allowing the cover body to rotate around the first rotating shaft relative to the cavity along with the supporting body. The sealing piece is arranged at the opening of the cavity and used for being matched with the cover body to form sealing. Wherein the gravity center of the cover body is located on the side, away from the first rotating shaft, of the second rotating shaft, and in the process that the supporting body rotates around the first rotating shaft in the first direction and drives the cover body to cover the cavity, the cover body rotates around the second rotating shaft in the first direction, so that extrusion to the sealing piece is reduced in the process that the cover body covers the cavity. The extrusion of the cover body on the sealing piece is effectively reduced, and the sealing reliability is improved.

Description

Technical Field

[0001] The present application relates to the field of precision manufacturing technology, and in particular to a covering mechanism and industrial equipment. Background Art

[0002] In the prior art, the cover mechanism is widely used in various occasions that require sealing, such as containers, equipment boxes, electronic equipment housings, etc. The traditional cover mechanism usually includes basic components such as a cover body, a support body, a cavity, and a seal. Among these components, the cover body is used to close the opening of the cavity, and the support body plays the role of connecting the cover body and the cavity, and allows the cover body to rotate relative to the cavity to achieve the function of opening and closing. The seal is arranged at the opening of the cavity and fits tightly with the cover body to ensure the sealing of the cavity.

[0003] Since the cover rotates around the axis during the closing process, one side of the cover will preferentially squeeze part of the seal when the cover closes the cavity. This squeezing not only easily damages the seal and reduces its sealing reliability, but may also cause unnecessary wear to the cover and the cavity, shortening their service life. Summary of the invention

[0004] The present application provides a covering mechanism and industrial equipment. The covering mechanism provided by the present application can reduce the compression of the cover body on the sealing member arranged at the opening of the cavity, which is beneficial to improve the sealing performance of the covering mechanism and prolong the service life of the covering mechanism.

[0005] In the first aspect, an embodiment of the present application provides a covering mechanism, including a cover body, a support body, a cavity, a seal, a first rotating shaft and a second rotating shaft; the cover body is rotatably connected to the support body through the second rotating shaft, and the cover body can rotate around the second rotating shaft relative to the support body; the support body is rotatably connected to the cavity through the first rotating shaft, and the support body is used to support the cover body and allow the cover body to rotate around the first rotating shaft relative to the cavity with the support body; the seal is arranged at the opening of the cavity, and is used to cooperate with the cover body to form a seal; wherein the center of gravity of the cover body is located on a side of the second rotating shaft away from the first rotating shaft, and in the process of the support body rotating around the first rotating shaft along the first direction to drive the cover body to cover the cavity, the cover body rotates around the second rotating shaft along the first direction, so as to reduce the squeezing of the seal on the cover body during the process of covering the cavity.

[0006] When the cover body rotates around the first rotating axis to cover the cavity, since the center of gravity of the cover body is located on the side of the second rotating axis away from the first rotating axis, the cover body and the support body can be connected by the second rotating axis and have freedom. The cover body can automatically rotate in the same direction around the second rotating axis under the action of gravity, thereby effectively reducing the extrusion of the cover body on the seal, improving the reliability and service life of the seal, thereby improving the sealing of the covering mechanism and increasing the service life of the covering mechanism.

[0007] In a possible implementation manner, the distance between the center of gravity of the cover body and the second rotation axis is in the range of (0 mm, 30 mm].

[0008] By limiting the distance between the center of gravity of the cover body and the second rotating axis within the range of (0mm, 30mm], the rotation of the cover body around the second rotating axis can be accurately controlled, so that the cover body can be fine-tuned and rotated at an appropriate angle and speed during the closing process, thereby forming a close fit with the seal without causing excessive extrusion or wear to the seal.

[0009] In a possible implementation, the support body is provided with a first limiting portion and a second limiting portion, the first limiting portion and the second limiting portion are respectively arranged on both sides of the second rotating shaft, and the first limiting portion and the second limiting portion are used to limit the cover body.

[0010] Since the first limit portion and the second limit portion are respectively located on both sides of the second rotating shaft, when the cover body rotates around the second rotating shaft, the first limit portion and the second limit portion can respectively play a limiting role on both sides of the second rotating shaft to prevent the cover body from excessive rotation or deviating from the predetermined trajectory, thereby improving the stability of the cover body rotation.

[0011] In a possible embodiment, the cover body is fixedly provided with a first limit member and a second limit member, the first limit member is movably arranged on the first limit portion, and the second limit member is movably arranged on the second limit portion, and when the cover body rotates around the second rotating axis, the cover body drives the first limit member and the second limit member to move in opposite directions.

[0012] The first limit member is movably arranged on the first limit part, and the second limit member is movably arranged on the second limit part. When the cover body rotates around the second rotating axis, the first limit member and the second limit member can move in the first limit part and the second limit part respectively and move in opposite directions. Such movement in opposite directions not only provides stable support and guidance for the rotation of the cover body, but also ensures that the cover body will not deviate from the predetermined trajectory or produce excessive shaking during the rotation process.

[0013] In a possible embodiment, the first limit member is arranged at the first limit portion along the axial direction of the second rotating shaft, and the second limit member is arranged at the second limit portion along the axial direction of the second rotating shaft. During the rotation of the cover body around the second rotating shaft, the first limit member and the second limit member move along the second direction, wherein the second direction is perpendicular to the axial direction of the second rotating shaft.

[0014] The first limit piece is arranged in the first limit part along the axial direction of the second rotating shaft, and the second limit piece is arranged in the second limit part along the axial direction of the second rotating shaft. In the process of the cover body rotating around the second rotating shaft, due to the fixed connection between the limit piece and the cover body and the restraining effect of the limit piece on the limit piece by the limit part, the first limit piece and the second limit piece move along the second direction, thereby preventing the cover body from rotating too much around the second rotating shaft and squeezing the sealing member, thereby affecting the sealing and reliability of the cover.

[0015] In a possible implementation manner, the second limiting portion is closer to the first rotation axis than the first limiting portion, and the first limiting portion is higher than the second limiting portion in the second direction.

[0016] Since the second limiting portion is closer to the first rotating shaft and the first limiting portion is higher than the second limiting portion in the axial direction of the second rotating shaft, this layout enables the first limiting member and the second limiting member to contact the corresponding limiting portions at different positions during the rotation of the cover body, thereby achieving more precise limiting control. This differentiated limiting setting helps to ensure that the cover body can stop stably when it rotates to a specific position, thereby achieving precise limiting of the rotation of the cover body and enhancing the stability of the structure.

[0017] In a possible implementation, a limiting center of the first limiting portion is located above the axis of the second rotating shaft in the second direction, and a limiting center of the second limiting portion is located below the axis of the second rotating shaft in the second direction.

[0018] The limiting center of the first limiting part is located on the upper side of the axis of the second rotating shaft, while the limiting center of the second limiting part is located on the lower side of the axis of the second rotating shaft. This upper and lower symmetrical and offset limiting structure provides a stable rotation support for the cover body, further enhances the stability of the cover body during rotation, and prevents the cover body from being offset or tilted due to vibration or external force interference.

[0019] In a possible implementation, the limiting center of the first limiting portion has a second distance from the axis of the second rotating shaft in the second direction, and the limiting center of the second limiting portion has a third distance from the axis of the second rotating shaft in the second direction, wherein the second distance is equal to the third distance.

[0020] Since the limit centers of the first limit part and the second limit part are at equal distances from the axis of the second rotating shaft in the second direction, when the cover body rotates to cover the cavity, the first limit part contacts the first limit part to limit the cover body from continuing to rotate, while the second limit part can contact the second limit part to limit the cover body from continuing to rotate, which helps to achieve more precise rotation control and ensure that the cover body can stably stop at a predetermined position.

[0021] In one possible embodiment, the size of the first limiting portion in the second direction is equal to the sum of the movable distance of the first limiting member in the second direction and the size of the first limiting member in the second direction; or / and, the size of the second limiting portion in the second direction is equal to the sum of the movable distance of the second limiting member in the second direction and the size of the second limiting member in the second direction.

[0022] By limiting the movable distance of the cover body to be less than or equal to the difference between the size of the first limit portion (or the second limit portion) in the second direction and the size of the first limit member (or the second limit member) in the second direction, the cover body can maintain a stable state of movement during rotation, ensuring that the cover body will not deviate from the preset rotation trajectory due to excessive floating during rotation.

[0023] In a possible implementation manner, the first limiting portion and the second limiting portion are both waist holes, and when the cover body rotates around the second rotation axis, the first limiting member and the second limiting member move along the long axis direction of the waist hole.

[0024] The waist hole is characterized in that the major axis and the minor axis of the hole are not equal, forming an ellipse or an ellipse-like shape. When the first stopper and the second stopper move with the rotation of the cover body, they can move smoothly and stably along the hole wall of the waist hole. Since the shape of the waist hole limits the movement trajectory of the stopper, it can only move along a specific path, ensuring the stability of the stopper during the movement process and improving the accuracy of the limit.

[0025] In a possible embodiment, the first limit member is arranged at the first limit portion along the second direction, and the second limit member is arranged at the second limit portion along the second direction. During the rotation of the cover body around the second rotating axis, the first limit member and the second limit member move along the second direction, and the second direction is perpendicular to the axial direction of the second rotating axis.

[0026] During the rotation of the cover body around the second rotation axis, due to the fixed connection between the stopper and the cover body and the restraining effect of the stopper on the stopper, the first stopper and the second stopper move in opposite directions respectively. Since the stopper moves in the second direction, it can effectively resist the lateral force or deviation that may be generated by the cover body during the rotation process, thereby maintaining the stable rotation of the cover body.

[0027] In a possible implementation, the second limiting portion is closer to the first rotation axis than the first limiting portion, the first limiting portion has a first limiting position in the second direction, the second limiting portion has a second limiting position in the second direction, and the first limiting position is higher than the second limiting position in the second direction.

[0028] Since the second limiting portion is closer to the first rotation axis than the first limiting portion, this arrangement enables the first limiting member to contact the first limiting position more quickly when the cover body rotates around the second rotation axis. In this way, the first limiting portion can limit the rotation of the cover body earlier and prevent it from over-rotating or deviating from the predetermined trajectory.

[0029] In a possible implementation manner, the first limit position and the second limit position are located on the same side of the axis of the second rotating shaft in the second direction.

[0030] Because when the cover body rotates around the second rotating axis to cover the cavity, the first limit piece approaches the first limit position along the second direction, and the second limit piece moves away from the second limit position along the second direction, such a setting can avoid that the size of the part in the second direction where the first limit part is slidably connected to the first limit piece and the size of the part in the second direction where the second limit part is slidably connected to the second limit piece are too different, which is beneficial to improving the structural stability and reliability of the support body and extending the working life of the support body.

[0031] In a possible implementation manner, the first limiting portion and the second limiting portion are both step holes, and when the cover body rotates around the second rotation axis, the first limiting member and the second limiting member move along the inner wall of the step hole.

[0032] During the rotation of the cover body, the first limit member and the second limit member move along the inner wall of the step hole. This movement method can prevent the instability of the cover body caused by shaking or offset of the limit member, and helps to maintain the smooth rotation of the cover body. At the same time, by controlling the size and shape of the step hole, a precise moving path is provided for the limit member, and the moving distance and position of the first limit member and the second limit member can be accurately controlled, thereby improving the accuracy of the limit.

[0033] In a possible implementation manner, there is a gap between the support body and the cover body, and the gap is used to provide a first rotation space when the cover body rotates around the second rotation axis.

[0034] The gap design between the support body and the cover body ensures that the cover body has enough space when rotating around the second rotation axis, avoids rotation obstruction or jamming due to insufficient space, and ensures the smoothness of the cover body rotation.

[0035] In a possible implementation manner, the support body is provided with a first yielding portion, the first yielding portion is used to provide a second rotation space for the cover body; and / or the cover body is provided with a second yielding portion, the second yielding portion is used to provide a third rotation space for the cover body.

[0036] The arrangement of the first and second clearance parts provides additional space for the rotation of the cover. During the rotation process, the clearance parts can effectively avoid direct contact between the support body and the cover body, thereby reducing friction and wear and extending the service life of the covering mechanism. By combining the design of the gap and the clearance part, it is possible to ensure that the cover body and the support body maintain an appropriate distance, both in the initial rotation stage of the cover body and at the maximum rotation angle, avoiding damage caused by excessive squeezing or stretching, so that the covering mechanism can adapt to a wider range of usage scenarios and more frequent operations, thereby improving its overall service life and reliability.

[0037] In a second aspect, an embodiment of the present application further provides an industrial device, comprising: a covering mechanism as described in any one of the first aspects.

[0038] Since the support body rotates around the first rotating axis along the first direction, driving the cover body to cover the cavity, since the center of gravity of the cover body is located on the side of the second rotating axis away from the first rotating axis, the cover body can naturally rotate around the second rotating axis along the first direction. This rotation action not only helps the cover body to cover the cavity smoothly, but also reduces the extrusion of the seal during the covering process, thereby extending the service life of the seal and improving the sealing performance of the industrial equipment. Therefore, the industrial equipment adopts the covering mechanism described in any one of the first aspects, which not only improves the overall stability and reliability of the equipment, but also reduces maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0040] Figure 1 It is a structural block diagram of an industrial device provided in an embodiment of the present application;

[0041] Figure 2 yes Figure 1 The three-dimensional structural schematic diagram of the covering mechanism of the industrial equipment shown is in a first open state;

[0042] Figure 3 yes Figure 2 A schematic diagram of the three-dimensional structure of the covering mechanism shown in the closed state;

[0043] Figure 4 yes Figure 3 A schematic diagram of a three-dimensional structure explosion of the covering mechanism shown;

[0044] Figure 5 yes Figure 3 The illustrated schematic diagram of a portion of the structure of the covering mechanism in a first open state cut along line VI-VI;

[0045] Figure 6 yes Figure 3 The partial structural schematic diagram of the covering mechanism shown is cut along line VI-VI;

[0046] Figure 7 yes Figure 5 An enlarged view of part VI I of the covering mechanism shown;

[0047] Figure 8 yes Figure 6 An enlarged view of part VIII of the covering mechanism shown;

[0048] Fig. 9 yes Figure 3 The illustrated schematic diagram of a portion of the structure of the covering mechanism in the second open state cut along line VI-VI;

[0049] Fig.10 yes Figure 3 A top view of the covering mechanism shown;

[0050] Fig.11 is a schematic diagram of a three-dimensional structure of another covering mechanism provided by an embodiment of the present application in a third open state;

[0051] Fig.12 yes Fig.11 A schematic diagram of the three-dimensional structure of the covering mechanism shown in the closed state;

[0052] Fig.13 yes Fig.12 A schematic diagram of a three-dimensional structure explosion of the covering mechanism shown;

[0053] Fig.14 yes Fig.12 The structure schematic diagram of the covering mechanism shown is in the third open state cut along the line XV-XV;

[0054] Fig.15 yes Fig.12 The structural schematic diagram of the covering mechanism shown is cut along line XV-XV;

[0055] Fig.16 yes Fig.14 An enlarged view of part XVI of the covering mechanism shown;

[0056] Fig.17 yes Fig.15 An enlarged view of part XVI I of the covering mechanism shown.

[0057] Description of reference numerals:

[0058] 10-cover body;

[0059] 11-second matching hole; 12-first stopper; 13-second stopper; 14-third mounting hole; 15-fourth mounting hole; 16-first connecting portion; 17-second connecting portion; 18-second yielding portion; 19a-first mounting member; 19b-second mounting member; 19c-third mounting member; 101-first rotation space; 102-second rotation space; 103-third rotation space;

[0060] O1-center of gravity;

[0061] 20- support body;

[0062] 21-rotating arm; 22-first limiting portion; 23-second limiting portion; 24-connecting arm; 25-first yielding portion;

[0063] 21a-first rotating arm; 21b-second rotating arm;

[0064] 211 - first mounting hole; 212 - second mounting hole; 213 - first matching portion; 214 - second matching portion;

[0065] 221-first hole wall; 222-second hole wall; 223-first limit center; 224-first installation center; 225-first limit position; 226-first section; 227-second section; 228-third section;

[0066] 231-third hole wall; 232-fourth hole wall; 233-second limit center; 234-second installation center; 235-second limit position; 236-fourth section; 237-fifth section; 238-sixth section;

[0067] 30- cavity;

[0068] 31-first matching hole; 32-accommodating cavity; 33-opening; 34-through port; 35-matching piece; 36-first mounting portion; 37-second mounting portion;

[0069] 40-seal;

[0070] 50- first rotating shaft;

[0071] O2-first axis;

[0072] 60- second rotating shaft;

[0073] O3-second axis;

[0074] 70-spring assembly;

[0075] 71-first spring; 72-second spring;

[0076] 80-driving member;

[0077] W1-first direction; W2-matching direction; W3-second direction;

[0078] d1-first distance; d2-second distance; d3-third distance;

[0079] L1-first size; L2-first movable distance; L3-second size; L4-third size; L5-second movable distance; L6-fourth size. DETAILED DESCRIPTION

[0080] In order to enable those skilled in the art to better understand the technical solution of the present invention, a covering mechanism and industrial equipment provided by the present application are described in detail below in conjunction with the accompanying drawings.

[0081] In the existing covering mechanism, the cover is fixedly connected to the support, the support is rotatably connected to the cavity, and the cover can rotate with the support relative to the cavity to cover the cavity. However, in the process of the cover rotating with the support relative to the cavity to cover the cavity, the cover will squeeze the sealing member provided at the cavity opening, causing the sealing member to be damaged, thereby causing the sealing between the cavity and the cover to fail.

[0082] In view of the above problems, the embodiments of the present application provide a covering mechanism for industrial equipment, which improves the connection between the cover and the support to solve the problem that the cover squeezes the seal and causes the seal to be damaged during the process of the cover rotating with the support relative to the cavity to cover the cavity. Specific descriptions are given below in combination with various embodiments.

[0083] See also Figure 1 , Figure 2 and Figure 3 , Figure 1 It is a structural block diagram of an industrial device 1000 provided in an embodiment of the present application. Figure 2 yes Figure 1 The illustrated schematic diagram is a three-dimensional structural diagram of a covering mechanism 100 of an industrial device 1000 in a first open state. Figure 3 yes Figure 2 The illustrated schematic diagram is a three-dimensional structural diagram of the covering mechanism 100 in a closed state.

[0084] like Figure 1 , Figure 2 and Figure 3As shown, illustratively, the industrial equipment 1000 is a semiconductor equipment. Specifically, the industrial equipment 1000 is a semiconductor pre-cleaning device. The industrial equipment 1000 is used to accommodate wafers to clean the wafers, so as to facilitate the subsequent processing of the wafers to make chips. The industrial equipment 1000 includes a capping mechanism 100, a gas supply device 200 and an exhaust device 300, and the capping mechanism 100 is used to accommodate the wafers. The gas supply device 200 is used to output clean gas to the capping mechanism 100 to etch the wafers, so that the oxides (such as silicon dioxide) on the surface of the wafers are removed, and the wafers are cleaned. The wafers will generate waste gas during the cleaning process. The exhaust device 300 is used to extract the waste gas in the capping mechanism 100. Exemplarily, the clean gas can be a gas that can react with oxides to etch, including but not limited to carbon tetrafluoride, octafluoropropane or trifluoromethane. Among them, the capping mechanism 100 can be relatively opened and closed to an open state and a closed state. In the open state, the wafer to be cleaned can be loaded into the covering mechanism 100, and the cleaned wafer can also be taken out from the covering mechanism 100. In the closed state, the wafer to be cleaned is accommodated in the covering mechanism 100 and is in a sealed environment, and the gas supply device 200 can output clean gas to the covering mechanism 100 to clean the wafer. The exhaust device 300 can extract the exhaust gas in the covering mechanism 100. In some other embodiments, the covering mechanism 100 can also be applied to mobile phones, for example, the covering mechanism 100 is a battery compartment of the mobile phone, and the covering mechanism 100 is used to accommodate the battery. The covering mechanism 100 can also be applied to refrigerators, for example, the covering mechanism 100 is a box device of the refrigerator, and the refrigerator realizes the accommodation function through the covering mechanism 100. The covering mechanism 100 can also be applied to other devices with an accommodation function.

[0085] See also Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 and Fig.10 , and combined with Figure 1 , Figure 2 and Figure 3 , Figure 4 yes Figure 3 The three-dimensional structural exploded schematic diagram of the covering mechanism 100 is shown. Figure 5 yes Figure 3 The illustrated diagram is a partial structural diagram of the covering mechanism 100 in a first open state cut along line VI-VI. Figure 6 yes Figure 3 The shown schematic diagram is a partial structural diagram of the covering mechanism 100 cut along line VI-VI. Figure 7 yes Figure 5 An enlarged view of part VI I of the covering mechanism 100 is shown. Figure 8 yes Figure 6An enlarged view of portion VIII of the covering mechanism 100 is shown. Fig. 9 yes Figure 3 The shown diagram is a partial structural diagram of the covering mechanism 100 in the second open state cut along the line VI-VI. Fig.10 yes Figure 3 FIG. 1 is a top view of the cover mechanism 100 shown in FIG. Figure 2 In the embodiment shown, the open state includes a first open state and a second open state. The first open state refers to Figure 2 The cover body 10 in the illustrated covering mechanism 100 does not cover the cavity 30, is spaced apart from the sealing member 40, and does not rotate relative to the support body 20. The second open state refers to Figure 2 In the covering mechanism 100 shown, the cover body 10 does not cover the cavity 30 and is in a state of beginning to contact with the sealing member 40 .

[0086] like Figure 2 , Figure 3 and Figure 4 As shown, the covering mechanism 100 includes a cover body 10, a support body 20, a cavity 30, a sealing member 40, a first rotating shaft 50 and a second rotating shaft 60. For the convenience of description, the present application defines three mutually perpendicular directions as the X-axis direction, the Y-axis direction and the Z-axis direction in sequence. In this embodiment, the X-axis direction is the length direction of the cavity 30, the Y-axis direction is the width direction of the cavity 30, and the Z-axis direction is the height direction of the cavity 30. In some other embodiments, the X-axis direction may also be the width direction of the cavity 30 or the height direction of the cavity 30, the Y-axis direction may also be the length direction or the height direction of the cavity 30, and the Z-axis direction may also be the length direction of the cavity 30 or the width direction of the cavity 30. Among them, the axial direction of the first rotating shaft 50, the axial direction of the second rotating shaft 60 and the Y-axis direction are parallel to each other. The parallelism of the first rotating shaft 50 and the second rotating shaft 60 can be completely parallel, or a small deviation can be allowed. For example, the angle between the first rotating shaft 50 and the second rotating shaft 60 can be 170°, 175°, 185° or 190°, etc.

[0087] The cover body 10 is rotatably connected to the support body 20 through the second rotating shaft 60, and the cover body 10 can rotate around the second rotating shaft 60 relative to the support body 20. The support body 20 is rotatably connected to the cavity 30 through the first rotating shaft 50, and the support body 20 is used to support the cover body 10 and allow the cover body 10 to rotate around the first rotating shaft 50 relative to the cavity 30 with the support body 20. Specifically, the support body 20 includes a rotating arm 21. In the Y-axis direction, the rotating arm 21 is located on one side of the cavity 30, and the rotating arm 21 and the cavity 30 are stacked. The rotating arm 21 is provided with a first mounting hole 211 that penetrates the rotating arm 21 along the Y-axis direction, and the cavity 30 is provided with a first matching hole 31 that penetrates along the Y-axis direction. The first rotating shaft 50 is penetrated in the first mounting hole 211 and the first matching hole 31, and the first rotating shaft 50 is fixedly connected to the first mounting hole 211 and rotatably connected to the first matching hole 31, and the rotating arm 21 is rotatably connected to the cavity 30 through the first rotating shaft 50. In some other embodiments, the first rotating shaft 50 may also be rotatably connected to the first mounting hole 211 and fixedly connected (or rotatably connected) to the first matching hole 31 .

[0088] In the Y-axis direction, the cover body 10 is partially stacked with the rotating arm 21. The rotating arm 21 is also provided with a second mounting hole 212 that penetrates the rotating arm 21 along the Y-axis direction, and the cover body 10 is provided with a second matching hole 11 that extends along the Y-axis direction. The second rotating shaft 60 is passed through the second mounting hole 212 and the second matching hole 11, and the second rotating shaft 60 is fixedly connected to the second mounting hole 212 and rotatably connected to the second matching hole 11, and the cover body 10 is rotatably connected to the rotating arm 21 through the second rotating shaft 60. In some other embodiments, the second rotating shaft 60 can also be rotatably connected to the second mounting hole 212 and fixedly connected (or rotatably connected) to the second mounting hole 212. Among them, in the X-axis direction, the second rotating shaft 60 is located on one side of the first rotating shaft 50.

[0089] The cavity 30 includes a receiving cavity 32 and an opening 33, and also includes a plurality of through openings 34. The receiving cavity 32 is used to receive a wafer. In the Z-axis direction, the opening 33 is located on one side of the receiving cavity 32 and communicates with the receiving cavity 32. The plurality of through openings 34 are all communicated with the receiving cavity 32. In the X-axis direction, the first rotating shaft 50 is located on one side of the opening 33 of the cavity 30. The second rotating shaft 60 is located on one side of the first rotating shaft 50 close to the opening 33 of the cavity 30. Among them, the gas delivery device 200 (such as Figure 1As shown in the figure, the support body 20 is connected to a through port 34, and the exhaust device 300 is connected to another through port 34. Clean gas can be delivered from the gas delivery device 200 to the receiving chamber 32 to clean the wafer. The exhaust device 300 can extract the exhaust gas in the receiving chamber 32. The sealing member 40 is arranged at the opening 33 of the cavity 30, and is used to cooperate with the cover body 10 to form a seal. Among them, the sealing member 40 is embedded in one side of the cavity 30 in the Z-axis direction and surrounds the opening 33 of the cavity 30. The sealing member 40 is partially exposed to the outside of the cavity 30. The rotating arm 21 (i.e., the support body 20) can rotate around the first rotating shaft 50, driving the cover body 10 to rotate with the support body 20 relative to the cavity 30 around the first rotating shaft 50, so that the covering mechanism 100 switches between the first open state (i.e., the open state) and the closed state.

[0090] like Figure 2 , Figure 5 and Figure 6 As shown, the rotating arm 21 (i.e., the support body 20) can rotate around the first rotating shaft 50, driving the cover body 10 to rotate relative to the cavity 30, so that the covering mechanism 100 switches between the first open state and the closed state. Specifically, in the closed state, the rotating arm 21 (i.e., the support body 20) rotates around the first rotating shaft 50 in the opposite direction of the first direction W1, driving the cover body 10 away from the cavity 30, so that the covering mechanism 100 switches from the closed state to the first open state, at which time the cover body 10 and the cavity 30 are tilted, and the opening 33 of the cavity 30 is exposed to the outside. The cover body 10 and the sealing member 40 are spaced apart; in the first open state, the rotating arm 21 (i.e., the support body 20) rotates around the first rotating shaft 50 in the first direction W1, driving the cover body 10 to cover the cavity 30, so that the covering mechanism 100 switches from the first open state to the closed state, at which time the cover body 10 covers the cavity 30 and is stacked with the cavity 30. The cover 10 completely covers the opening 33 of the cavity 30 and the seal 40, and the cover 10 and the seal 40 are in contact or pressed to seal the receiving cavity 32. The first direction W1 is perpendicular to the Y-axis direction (ie, the axial direction of the second rotating shaft 60).

[0091] like Figure 2 , Figure 3 and Figure 4 As shown, in Figure 2 , Figure 3 and Figure 4In the illustrated embodiment, the number of the rotating arms 21 is multiple, and the multiple rotating arms 21 include a first rotating arm 21a and a second rotating arm 21b. In the Y-axis direction, the first rotating arm 21a and the second rotating arm 21b are arranged on both sides of the cavity 30, and the cover body 10 is arranged between the first rotating arm 21a and the second rotating arm 21b. In some embodiments, the first rotating arm 21a and the second rotating arm 21b are arranged in parallel. The first rotating arm 21a and the second rotating arm 21b are rotatably connected to the cavity 30 through a first rotating shaft 50 respectively. The cover body 10 is rotatably connected to the first rotating arm 21a and the second rotating arm 21b through a second rotating shaft 60 respectively. In some other embodiments, the number of the first rotating shaft 50 may also be one. The first rotating shaft 50 is sequentially provided through the first mounting hole 211 of the first rotating arm 21a, the first mounting hole 211 of the cavity 30 and the second rotating arm 21b, and the first rotating arm 21a and the second rotating arm 21b are rotatably connected to the cavity 30 through one first rotating shaft 50. The number of the second rotating shaft 60 may also be one. The second rotating shaft 60 is sequentially provided through the second mounting hole 212 of the first rotating arm 21a, the second mounting hole 212 of the cover body 10 and the second rotating arm 21b, and the first rotating arm 21a and the second rotating arm 21b are rotatably connected to the cover body 10 through one second rotating shaft 60. Since the first rotating arm 21a and the second rotating arm 21b are arranged on both sides of the cavity 30 in the Y-axis direction, the cover body 10 is arranged on the first rotating arm 21a and the second rotating arm 21b; in the process of the cover body 10 covering the cavity 30 around the first rotating axis 50, the first rotating arm 21a and the second rotating arm 21b limit the cover body 10 in the Y-axis direction to improve the stability and reliability of the rotation of the cover body 10.

[0092] like Figure 5 , Figure 7 and Figure 8As shown, the center of gravity O1 of the cover body 10 is located on the side of the second rotating shaft 60 away from the first rotating shaft 50. Specifically, in the mating direction W2, the center of gravity O1 of the cover body 10 is located on the side of the axis of the second rotating shaft 60 (i.e., the second axis O3) away from the axis of the first rotating shaft 50 (i.e., the first axis O2), that is, the distance between the center of gravity O1 of the cover body 10 and the first axis O2 is equal to the distance between the center of gravity O1 of the cover body 10 and the second axis O3 plus the distance between the first axis O2 and the second axis O3. In the process of the rotating arm 21 (i.e., the support body 20) rotating around the first rotating shaft 50 along the first direction W1 to drive the cover body 10 to cover the cavity 30 (i.e., the process of the covering mechanism 100 switching from the first open state to the closed state), the cover body 10 rotates around the second rotating shaft 60 along the first direction W1, so that the cover body 10 reduces the compression of the sealing member 40 in the process of covering the cavity 30. The cover 10 rotates around the second rotating shaft 60 along the first direction W1, so that the cover 10 reduces the extrusion of the seal 40 during the process of covering the cavity 30, which can refer to reducing the extrusion force between the seal 40 and the cover 10; or it can refer to making the seal 40 and the cover 10 only contact without the existence of extrusion force. The matching direction W2 is perpendicular to the axial direction of the second rotating shaft 60 and perpendicular to the width direction of the rotating arm 21, and the matching direction W2 is the length direction of the rotating arm 21.

[0093] In the covering mechanism 100 provided in the embodiment of the present application, when the cover 10 rotates around the first rotating shaft 50 to cover the cavity 30, since the center of gravity O1 of the cover 10 is located on the side of the second rotating shaft 60 away from the first rotating shaft 50, the cover 10 and the support 20 can be connected by the second rotating shaft 60 and have a degree of freedom. The cover 10 will automatically rotate in the same direction around the second rotating shaft 60 under the action of gravity, thereby effectively reducing the compression of the seal 40 by the cover 10, improving the reliability and service life of the seal 40, and thus improving the reliability of the seal. In addition, the friction between the cover 10 and the cavity 30 can be reduced, which is conducive to reducing the wear of the cover 10 and the cavity 30.

[0094] Since the support body 20 rotates around the first rotation axis 50 along the first direction W1, driving the cover body 10 to cover the cavity 30, since the center of gravity O1 of the cover body 10 is located on the side of the second rotation axis 60 away from the first rotation axis 50, the cover body 10 can naturally rotate around the second rotation axis 60 along the first direction W1. This rotation action not only helps the cover body 10 to cover the cavity 30 smoothly, but also significantly reduces the squeezing of the sealing member 40 during the covering process, thereby extending the service life of the sealing member 40 and improving the industrial equipment 1000 (such as Figure 1 Therefore, the industrial equipment 1000 not only improves the overall stability and reliability of the equipment, but also reduces the maintenance cost through the covering mechanism 100 provided by the embodiment of the present application.

[0095] like Figure 5 , Figure 6 and Fig. 9 As shown, the cover body 10 rotates around the second rotating shaft 60 along the first direction W1, which can reduce the compression of the seal 40 by the cover body 10 during the process of covering the cavity 30. Specifically, in the process of switching the covering mechanism 100 from the first open state to the closed state, the covering mechanism 100 also has a second open state. In the second open state, the cover body 10, the cavity 30 and the seal 40 are all tilted, and the opening 33 of the cavity 30 is exposed to the outside. The end of the cover body 10 close to the first rotating shaft 50 contacts the seal 40. In the process of switching the covering mechanism 100 from the first open state to the second open state, the cover body 10 rotates along the first direction W1 around the first rotating shaft 50 with the support body 20 until the end of the cover body 10 close to the first rotating shaft 50 contacts the seal 40. In this process, the cover body 10 does not rotate around the second rotating shaft 60 relative to the support body 20. During the process of switching the covering mechanism 100 from the second open state to the closed state, the cover body 10 continues to rotate along the first direction W1 around the first rotating axis 50 with the support body 20 until the cover body 10 covers the cavity 30; during this process, the end of the cover body 10 close to the first rotating axis 50 first contacts the seal 40, and at the same time, the cover body 10 rotates around the second rotating axis 60 along the first direction W1 under the action of its own gravity, and the angle between the cover body 10 and the seal 40 gradually decreases until the cover body 10 and the seal 40 are stacked, and the extrusion force between the end of the cover body 10 close to the first rotating axis 50 and the seal 40 is reduced, so that during the process of the cover body 10 covering the cavity 30, the extrusion of the seal 40 can be reduced.

[0096] In some other embodiments, the cover body 10 rotates around the second rotation axis 60 in the first direction W1, so that the sealing member 40 and the cover body 10 are only in contact without extrusion force during the process of the cover body 10 covering the cavity 30. Specifically, when the covering mechanism 100 switches from the second open state to the closed state, the cover body 10 rotates along the first rotation axis 50 along the first direction W1 with the support body 20, and the cover body 10 rotates along the second rotation axis 60 along the first direction W1 under the action of its own gravity and is spaced from the sealing member 40; the cover body 10 continues to rotate along the first rotation axis 50 along the first direction W1 with the support body 20 until the cover body 10 and the sealing member 40 are in parallel contact.

[0097] In some other embodiments, the cover body 10 rotates around the second rotation axis 60 in the first direction W1, and the sealing member 40 and the cover body 10 may not contact each other during the process of the cover body 10 covering the cavity 30, so there is no extrusion. Specifically, during the process of the covering mechanism 100 switching from the first open state to the closed state, the cover body 10 rotates along the first rotation axis 50 along the first direction W1 with the support body 20, and the cover body 10 rotates around the second rotation axis 60 in the first direction W1 under the action of its own gravity, and the cover body 10 does not contact the sealing member 40 until the cover body 10 and the sealing member 40 are in parallel contact.

[0098] In some embodiments, the distance between the center of gravity O1 of the cover body 10 and the second rotating shaft 60 (i.e., the first distance d1) is in the range of (0 mm, 30 mm]. Specifically, the first distance d1 refers to the distance between the center of gravity O1 of the cover body 10 and the second axis O3 in the mating direction W2. It can be understood that the first distance d1 is greater than 0 mm and less than or equal to 30 mm. By limiting the distance between the center of gravity O1 of the cover body 10 and the second rotating shaft 60 (i.e., the first distance d1) within the range of (0 mm, 30 mm], the rotation of the cover body 10 around the second rotating shaft 60 can be precisely controlled, so that the cover body 10 can be fine-tuned and rotated at an appropriate angle and speed during the covering process, thereby forming a close fit with the seal 40 without causing excessive extrusion or wear. In some other embodiments, the first distance d1 may also be greater than 30 mm.

[0099] like Figure 3 , Figure 7 and Figure 8 As shown, in some embodiments, the support body 20 is provided with a first limiting portion 22 and a second limiting portion 23, and the first limiting portion 22 and the second limiting portion 23 are respectively arranged on both sides of the second rotating shaft 60, and the first limiting portion 22 and the second limiting portion 23 are used to limit the cover body 10. In the X direction, the first limiting portion 22 and the second limiting portion 23 are respectively arranged on both sides of the second rotating shaft 60. The first limiting portion 22 and the second limiting portion 23 are respectively located on both sides of the second rotating shaft 60. When the cover body 10 rotates around the second rotating shaft 60, the first limiting portion 22 and the second limiting portion 23 can respectively play a limiting role on both sides of the second rotating shaft 60, preventing the cover body 10 from excessively rotating or deviating from the predetermined trajectory, thereby improving the stability of the rotation of the cover body 10. In some other embodiments, in the second direction W3, the first limiting portion 22 and the second limiting portion 23 can also be arranged on both sides of the second rotating shaft 60. The second direction W3 is perpendicular to the X direction and the axial direction of the second rotating shaft 60 (i.e., the Y-axis direction).

[0100] Furthermore, the cover body 10 is fixedly provided with a first stopper 12 and a second stopper 13, wherein the first stopper 12 is movably disposed on the first stopper portion 22, and the second stopper 13 is movably disposed on the second stopper portion 23. When the cover body 10 rotates around the second rotation axis 60, the cover body 10 drives the first stopper 12 and the second stopper 13 to move in opposite directions. The first stopper 12 is movably disposed on the first stopper portion 22, and the second stopper 13 is movably disposed on the second stopper portion 23. When the cover body 10 rotates around the second rotation axis 60, the first stopper 12 and the second stopper 13 can move in the first stopper portion 22 and the second stopper portion 23, respectively, and move in opposite directions. Such movement in opposite directions not only provides stable support and guidance for the rotation of the cover body 10, but also ensures that the cover body 10 will not deviate from a predetermined trajectory or produce excessive shaking during the rotation process.

[0101] exist Figure 3 , Figure 7 and Figure 8 In the illustrated embodiment, the first limiting portion 22 and the second limiting portion 23 are both arranged on the rotating arm 21 (i.e., the supporting body 20) along the Y-axis direction. Specifically, the first limiting portion 22 and the second limiting portion 23 are both waist holes. The cross-sectional shape of the waist hole is a runway shape. The short axis direction of the waist hole is parallel to the matching direction W2. The long axis direction of the waist hole is different from the second direction W3. In some other embodiments, the cross-sectional shape of the waist hole can also be an arc, in which case the long axis direction of the waist hole is parallel to the second direction W3. The first limiting portion 22 and the second limiting portion 23 both penetrate the rotating arm 21 along the Y-axis direction. Among them, the second limiting portion 23 is closer to the first rotating shaft 50 than the first limiting portion 22. Specifically, in the matching direction W2, the second limiting portion 23 is closer to the first rotating shaft 50 than the first limiting portion 22. Among them, in the matching direction W2, the distance between the first limiting portion 22 and the second axis O3 is equal to the distance between the second limiting portion 23 and the second axis O3. The major axis size of the first limiting portion 22 is equal to the major axis size of the second limiting portion 23, and the minor axis size of the first limiting portion 22 is equal to the minor axis size of the second limiting portion 23. In this way, it is easy to manufacture, and it is beneficial to improve the force uniformity of the rotating arm 21 and improve the structural stability. In some other embodiments, in the matching direction W2, the distance between the first limiting portion 22 and the second axis O3 and the distance between the second limiting portion 23 and the second axis O3 may not be equal. The major axis size of the first limiting portion 22 and the major axis size of the second limiting portion 23 may not be equal, and the minor axis size of the first limiting portion 22 and the minor axis size of the second limiting portion 23 may not be equal.

[0102] exist Figure 3 , Figure 7 and Figure 8In the illustrated embodiment, the first position-limiting portion 22 includes a first hole wall 221 and a second hole wall 222. In the second direction W3, the first hole wall 221 and the second hole wall 222 are arranged opposite to each other. The first hole wall 221 faces the cavity 30, and the second hole wall 222 faces away from the cavity 30. The first hole wall 221 and the second hole wall 222 may be arc-shaped walls. The second position-limiting portion 23 includes a third hole wall 231 and a fourth hole wall 232. In the second direction W3, the third hole wall 231 and the fourth hole wall 232 are arranged opposite to each other. The third hole wall 231 faces the cavity 30, and the fourth hole wall 232 faces away from the cavity 30. The third hole wall 231 and the fourth hole wall 232 may be arc-shaped walls.

[0103] In the Y-axis direction, the first limiter 12 and the second limiter 13 are both fixedly connected to the side of the cover body 10 facing the rotating arm 21. The first limiter 12 is arranged on the first limiter 22 along the Y-axis direction (i.e., the axial direction of the second rotating shaft 60). Specifically, the first limiter 12 is penetrated in the first limiter 22 along the Y-axis direction and is slidably connected to the first limiter 22. The second limiter 13 is arranged on the second limiter 23 along the Y-axis direction (i.e., the axial direction of the second rotating shaft 60). Specifically, the second limiter 13 is penetrated in the second limiter 23 along the Y-axis direction and is slidably connected to the second limiter 23. Among them, the cover body 10 can be provided with a third mounting hole 14 and a fourth mounting hole 15 arranged along the Y axis, the first stopper 12 is sequentially arranged in the first stopper 22 and the third mounting hole 14 and is detachably connected to the third mounting hole 14 (for example, threaded connection, snap connection or magnetic connection), and the second stopper 13 is sequentially arranged in the second stopper 23 and the fourth mounting hole 15 and is detachably connected to the fourth mounting hole 15 (for example, threaded connection, snap connection or magnetic connection). Thus, the first stopper 12 and the second stopper 13 are both fixedly connected to the side of the cover body 10 facing the rotating arm 21. And the first stopper 12 can be arranged in the first stopper 22 along the Y axis direction and is slidably connected to the first stopper 22, and the second stopper 13 can be arranged in the second stopper 23 along the Y axis direction and is slidably connected to the second stopper 23. In this way, the assembly of the cover body 10 and the rotating arm 21 (i.e., the support body 20) is facilitated, which is conducive to reducing the difficulty of assembly. In some other embodiments, the first limiting member 12 and the second limiting member 13 may also be protrusions disposed on the cover body 10 , and the two are respectively disposed in the first limiting portion 22 and the second limiting portion 23 .

[0104] Exemplarily, the first stopper 12 and the second stopper 13 can be made of metal materials including but not limited to aluminum alloy, copper or steel, or can be made of other rigid materials such as polycarbonate or ceramic. The first stopper 12 and the second stopper 13 are screws. In some other embodiments, the first stopper 12 and the second stopper 13 can also be cylinders, rectangular cylinders or other polygonal cylinders. In the Y-axis direction, the size of the first stopper 12 and the size of the second stopper 13 can be equal or unequal.

[0105] exist Figure 3 , Figure 7 and Figure 8 In the illustrated embodiment, in the first open state, the first limiting member 12 abuts against the first hole wall 221 of the first limiting portion 22. The second limiting member 13 abuts against the fourth hole wall 232 of the second limiting portion 23. In the closed state, the first limiting member 12 abuts against the second hole wall 222 of the first limiting portion 22. The second limiting member 13 abuts against the third hole wall 231 of the second limiting portion 23.

[0106] During the process of the cover body 10 rotating around the second rotating shaft 60, the first stopper 12 and the second stopper 13 move along the second direction W3 (i.e., the long axis direction of the waist hole). Specifically, during the process of the cover body 10 rotating around the second rotating shaft 60 along the first direction W1 to cover the cavity 30, the first stopper 12 approaches the second hole wall 222 of the first stopper 22 from the first hole wall 221 of the first stopper 22 along the second direction W3, and the first stopper 12 approaches the cavity 30 relative to the rotating arm 21 (i.e., the support body 20) along the second direction W3; the second stopper 13 approaches the third hole wall 231 of the second stopper 23 from the fourth hole wall 232 of the second stopper 23 along the second direction W3, and the second stopper 13 moves away from the cavity 30 relative to the rotating arm 21 (i.e., the support body 20) along the second direction W3.

[0107] The first limit member 12 is arranged in the first limit part 22 along the axial direction of the second rotating shaft 60 (i.e., the Y-axis direction), and the second limit member 13 is arranged in the second limit part 23 along the axial direction of the second rotating shaft 60 (i.e., the Y-axis direction). During the rotation of the cover body 10 around the second rotating shaft 60, due to the fixed connection between the limit member (the first limit member 12 or the second limit member 13) and the cover body 10 and the restraining effect of the limit member (the first limit member 22 or the second limit member 23) on the limit member, the first limit member 12 and the second limit member 13 move along the second direction W3, thereby preventing the cover body 10 from rotating too much around the second rotating shaft 60 and squeezing the sealing member 40, thereby affecting the sealing and reliability of the cover.

[0108] The waist hole is characterized in that the major axis and the minor axis of the hole are not equal, forming an ellipse or an ellipse-like shape, and when the first stopper 12 and the second stopper 13 move with the rotation of the cover body 10, they can move smoothly and stably along the hole wall of the waist hole. Since the shape of the waist hole limits the moving track of the stopper (the first stopper 12 or the second stopper 13), it can only move along a specific path, ensuring the stability of the stopper during the movement process and improving the accuracy of the limit.

[0109] In some other embodiments, the first limiting portion 22 and the second limiting portion 23 may not be waist holes, for example, the first hole wall 221 of the first limiting portion 22 may be a plane wall, and the fourth hole wall 232 of the second limiting portion 23 may be a plane wall. The first limiting portion 22 and the second limiting portion 23 may also be rectangular through holes or polygonal through holes.

[0110] In some other embodiments, in the closed state, the first limiting member 12 may also be spaced from the second hole wall 222 of the first limiting portion 22. The second limiting member 13 is spaced from the third hole wall 231 of the second limiting portion 23. In some other embodiments, in the closed state, the first limiting member 12 may also abut or contact the second hole wall 222 of the first limiting portion 22. The second limiting member 13 is spaced from the third hole wall 231 of the second limiting portion 23. In some other embodiments, in the closed state, the first limiting member 12 may also be spaced from the second hole wall 222 of the first limiting portion 22. The second limiting member 13 is in contact or abutment with the third hole wall 231 of the second limiting portion 23.

[0111] like Figure 6 , Figure 7 and Figure 8 As shown, in some embodiments, the first limiting portion 22 is higher than the second limiting portion 23 in the second direction W3. Specifically, part of the first limiting portion 22 is higher than the second limiting portion 23 in the second direction W3, and part of the first limiting portion 22 is located on the side of the second limiting portion 23 away from the cavity 30 in the second direction W3. Specifically, in the second direction W3, part of the first hole wall 221 is located on the side of the third hole wall 231 away from the cavity 30, and part of the fourth hole wall 232 is located on the side of the second hole wall 222 close to the cavity 30. Thus, part of the first limiting portion 22 is higher than the second limiting portion 23 in the second direction W3. In some other embodiments, in the second direction W3, the first hole wall 221 and the second hole wall 222 may also be all located on the side of the third hole wall 231 away from the cavity 30, and the first limiting portion 22 may be all located on the side of the second limiting portion 23 away from the cavity 30 in the second direction W3.

[0112] The first limiting portion 22 and the second limiting portion 23 both have a limiting center and an installation center, wherein the first limiting portion 22 has a first limiting center 223 and a first installation center 224, and the second limiting portion 23 has a second limiting center 233 and a second installation center 234. The wall surface of the first hole wall 221, the wall surface of the second hole wall 222, the wall surface of the third hole wall 231, and the wall surface of the fourth hole wall 232 are all arc-shaped surfaces, the first limiting center 223 is the center of the wall surface of the second hole wall 222, and the first installation center 224 is the center of the wall surface of the first hole wall 221. The second limiting center 233 is the center of the wall surface of the third hole wall 231, and the second installation center 234 is the center of the wall surface of the fourth hole wall 232. In the second direction W3, the first installation center 224 is located on the side of the second limiting center 233 away from the cavity 30.

[0113] Since the second limiting portion 23 is closer to the first rotation axis 50, and the first limiting portion 22 is higher than the second limiting portion 23 in the second direction W3, this layout enables the first limiting member 12 and the second limiting member 13 to contact the corresponding limiting portion (the first limiting portion 22 or the second limiting portion 23) at different positions during the rotation of the cover body 10, thereby achieving more precise limiting control. This differentiated limiting setting helps to ensure that the cover body 10 can stop stably when it rotates to a specific position, thereby achieving precise limiting of the rotation of the cover body 10 and enhancing the stability of the structure.

[0114] In some embodiments, the limiting center of the first limiting portion 22 (i.e., the first limiting center 223) is located on the upper side of the axis of the second rotating shaft 60 (i.e., the second axis O3) in the second direction W3, and the limiting center of the second limiting portion 23 (i.e., the second limiting center 233) is located on the lower side of the axis of the second rotating shaft 60 (i.e., the second axis O3) in the second direction W3. Specifically, in the second direction W3, the first limiting center 223 is located on the side of the second axis O3 away from the cavity 30 in the second direction W3, and the second limiting center 233 is located on the side of the second axis O3 close to the cavity 30 in the second direction W3. The limiting center of the first limiting portion 22 (i.e., the first limiting center 223) is located on the upper side of the axis of the second rotating shaft 60 (i.e., the second axis O3), while the limiting center of the second limiting portion 23 (i.e., the second limiting center 233) is located on the lower side of the axis of the second rotating shaft 60 (i.e., the second axis O3). This upper and lower symmetrical and offset limiting structure provides a stable rotation support for the cover body 10, further enhances the stability of the cover body 10 during the rotation process, and prevents the cover body 10 from being offset or tilted due to vibration or external force interference.

[0115] In some embodiments, the limiting center of the first limiting portion 22 (i.e., the first limiting center 223) and the axis center of the second rotating shaft 60 (i.e., the second axis center O3) have a second distance d2 in the second direction W3, and the limiting center of the second limiting portion 23 (i.e., the second limiting center 233) and the axis center of the second rotating shaft 60 (i.e., the second axis center O3) have a third distance d3 in the second direction W3, wherein the second distance d2 is equal to the third distance d3. Since the limiting center of the first limiting portion 22 (i.e., the first limiting center 223) and the limiting center of the second limiting portion 23 (i.e., the second limiting center 233) are at an equal distance from the axis of the second rotating shaft 60 (i.e., the second axis O3) in the second direction W3, when the cover body 10 rotates to cover the cavity 30, the first limiting member 12 contacts the first limiting portion 22 (specifically, the second hole wall 222 of the first limiting portion 22) to limit the cover body 10 from continuing to rotate, while the second limiting member 13 can contact the second limiting portion 23 (specifically, the third hole wall 231 of the second limiting portion 23) to limit the cover body 10 from continuing to rotate, which helps to achieve more precise rotation control and ensure that the cover body 10 can stably stop at a predetermined position.

[0116] In some embodiments, the size of the first limiting portion 22 in the second direction W3 (i.e., the first size L1) is equal to the sum of the movable distance of the first limiting member 12 in the second direction W3 (i.e., the first movable distance L2) and the size of the first limiting member 12 in the second direction W3 (i.e., the second size L3); or / and, the size of the second limiting portion 23 in the second direction W3 (i.e., the third size L4) is equal to the sum of the movable distance of the second limiting member 13 in the second direction W3 (i.e., the second movable distance L5) and the size of the second limiting member 13 in the second direction W3 (i.e., the fourth size L6). Figure 6 , Figure 7 and Figure 8 In the illustrated embodiment, the first dimension L1 is equal to the sum of the first movable distance L2 and the second dimension L3. The third dimension L4 is equal to the sum of the second movable distance L5 and the fourth dimension L6. The second dimension L3 refers to the dimension of the portion of the first stopper 12 located in the first stopper 22 in the second direction W3. The fourth dimension L6 refers to the dimension of the portion of the second stopper 13 located in the second stopper 23 in the second direction W3. Among them, the portion of the first stopper 12 located in the first stopper 22 and the portion of the second stopper 13 located in the second stopper 23 are both cylindrical, and the radial dimensions of the two are equal. By limiting the movable distance of the cover body 10 to be less than or equal to the difference between the dimension of the first stopper 22 (or the second stopper 23) in the second direction W3 and the dimension of the first stopper 12 (or the second stopper 13) in the second direction W3, the cover body 10 can maintain a stable motion state during the rotation process, ensuring that the cover body 10 will not deviate from the preset rotation trajectory due to excessive floating during rotation.

[0117] In some other embodiments, the radial dimensions of the portion of the first limiting member 12 located in the first limiting portion 22 and the portion of the second limiting member 13 located in the second limiting portion 23 may not be equal. The portion of the first limiting member 12 located in the first limiting portion 22 and the portion of the second limiting member 13 located in the second limiting portion 23 may also be rectangular cylinders or other special-shaped bodies.

[0118] like Figure 3 , Figure 4 and Fig.10 As shown, in some embodiments, the support body 20 further includes a connecting arm 24. The connecting arm 24 is disposed between the first rotating arm 21a and the second rotating arm 21b. In the matching direction W2, the connecting arm 24 is located on the side of the first limiting portion 22 away from the first rotating shaft 50. The design of the connecting arm 24 ensures that the first rotating arm 21a and the second rotating arm 21b form a stable structure, which is conducive to improving the structural stability and reliability of the support body 20, and ensures that the first rotating arm 21a and the second rotating arm 21b can rotate synchronously around the first rotating shaft 50 relative to the cavity 30, which is convenient for controlling the rotation angle of the first rotating arm 21a and the second rotating arm 21b. Moreover, the connecting arm 24 can limit the position of the first rotating arm 21a and the second rotating arm 21b in the Y-axis direction, which is conducive to improving the stability of the first rotating arm 21a and the second rotating arm 21b rotating relative to the cavity 30 around the first rotating shaft 50, and is conducive to improving the stability of the cover body 10 rotating around the first rotating shaft 50.

[0119] In some embodiments, there is a gap between the support body 20 and the cover body 10, and the gap is used to provide a first rotation space 101 when the cover body 10 rotates around the second rotation axis 60. Specifically, the cover body 10 includes a first connection portion 16 and a second connection portion 17. In the height direction of the cover body 10, the second connection portion 17 is arranged on the side of the first connection portion 16 away from the cavity 30. The first connection portion 16 and the rotating arm 21 (i.e., the support body 20) are rotatably connected through the second rotation axis 60. Among them, the connecting arm 24 is located on the side of the first connection portion 16 close to the second connection portion 17, and is located on the side of the second connection portion 17 away from the first rotation axis 50. In the Y-axis direction, there is a gap between the first connection portion 16 and the rotating arm 21. The gap design between the support body 20 and the cover body 10 ensures that the cover body 10 has enough space when rotating around the second rotation axis 60, avoids the rotation obstruction or jamming phenomenon caused by insufficient space, and ensures the smoothness of the rotation of the cover body 10.

[0120] In some embodiments, the support body 20 is provided with a first paving portion 25, and the first paving portion 25 is used to provide a second rotation space 102 for the cover body 10; or / and, the cover body 10 is provided with a second paving portion 18, and the second paving portion 18 is used to provide a third rotation space 103 for the cover body 10. Figure 3 , Figure 4 and Fig.10In the illustrated embodiment, the first easing portion 25 and the second easing portion 18 are both through holes. The first easing portion 25 is disposed on the side of the connecting arm 24 facing the first connecting portion 16 and penetrates the connecting arm 24 along the X direction. The second easing portion 18 is disposed on the side of the second connecting portion 17 facing the connecting arm 24 and penetrates the second connecting portion 17 along the thickness direction of the cover body 10. In some other embodiments, the first easing portion 25 and the second easing portion 18 may also be easing grooves.

[0121] The first and second clearance portions 25 and 18 provide additional space for the rotation of the cover 10. During the rotation, the clearance portions can effectively avoid direct contact between the support 20 and the cover 10, thereby reducing friction and wear and extending the service life of the closing mechanism 100.

[0122] In some embodiments, there is a gap between the support body 20 and the cover body 10, and the support body 20 is provided with a first clearance portion 25 and / or the cover body 10 is provided with a second clearance portion 18. By combining the design of the gap and the clearance portion, whether in the initial rotation stage of the cover body 10 or at the maximum rotation angle, it is ensured that the cover body 10 and the support body 20 maintain an appropriate distance, avoiding damage caused by excessive squeezing or stretching, so that the closing mechanism 100 can adapt to a wider range of usage scenarios and more frequent operations, thereby improving its overall service life and reliability.

[0123] like Figure 2 , Figure 3 and Figure 4As shown, in some embodiments, the covering mechanism 100 further includes a spring assembly 70, which is rotatably connected to the cavity 30 and can rotate relative to the cavity 30 around the Y-axis direction, and is fixedly connected to the support body 20. The spring assembly 70 is used to buffer the support body 20 during the process of the cover body 10 covering the cavity 30. Specifically, the cavity 30 is provided with a matching piece 35. The matching piece 35 is arranged on the side of the cavity 30 facing the rotating arm 21. In the direction of gravity, the matching piece 35 is located below the first rotating shaft 50 and is spaced from the first rotating shaft 50. The direction of gravity is parallel to the Z-axis direction. A first matching portion 213 and a second matching portion 214 are provided on the side of the rotating arm 21 facing away from the cover body 10. The first matching portion 213 and the second matching portion 214 are located between the second limiting portion 23 and the first rotating shaft 50. Among them, the first matching portion 213 is closer to the first rotating shaft 50 than the second matching portion 214. The spring assembly 70 includes a first spring 71 and a second spring 72. The first spring 71 is rotatably connected to the fitting 35 and can rotate relative to the fitting 35 around the Y-axis direction, and is fixedly connected to the first fitting portion 213. The second spring 72 is rotatably connected to the fitting 35 and can rotate relative to the fitting 35 around the Y-axis direction, and is fixedly connected to the second fitting portion 214. The second spring 72 is located on a side of the first spring 71 away from the first rotating shaft 50 and is spaced apart from the first spring 71.

[0124] In the process of the cover body 10 covering the cavity 30, the spring assembly 70 (the first spring 71 and the second spring 72) rotates along the first direction W1 with the support body 20, and the spring assembly 70 (the first spring 71 and the second spring 72) is gradually compressed, and the compression amount of the spring assembly 70 (the first spring 71 and the second spring 72) gradually increases. Since the spring assembly 70 is gradually compressed in the process of the cover body 10 covering the cavity 30, the spring assembly 70 can apply elastic force to the rotating arm 21 (support body 20), and the elastic force applied by the spring assembly 70 to the rotating arm 21 (support body 20) can offset the gravity of the rotating arm 21 (support body 20). This is conducive to reducing the driving force for driving the rotating arm 21 (support body 20) to rotate relative to the cavity 30, saving labor in operation, and facilitating the rotation of the rotating arm 21 (support body 20) relative to the cavity 30.

[0125] See also Fig.11 , Fig.12 , Fig.13 , Fig.14 , Fig.15 , Fig.16 and Fig.17 , and combined with Figure 2 , Fig.11 It is a schematic diagram of the three-dimensional structure of another covering mechanism 100 provided in an embodiment of the present application in a third open state. Fig.12 yes Fig.11 The illustrated schematic diagram is a three-dimensional structural diagram of the covering mechanism 100 in a closed state. Fig.13 yes Fig.12 The illustrated schematic diagram is a three-dimensional structural exploded view of the closing mechanism 100 at another angle.

[0126] Fig.14 yes Fig.12 The structure diagram of the covering mechanism 100 shown is a schematic diagram of the structure cut along line XV-XV in the third opening state. Fig.15 yes Fig.12 The structure diagram of the covering mechanism 100 shown is a schematic diagram after being cut along the line XV-XV. Fig.16 yes Fig.14 An enlarged view of part XVI of the covering mechanism 100 is shown. Fig.17 yes Fig.15 FIG. 1 is an enlarged view of part XVIII of the capping mechanism 100. Fig.11 In the embodiment shown, the open state is the third open state. The third open state refers to Fig.11 The cover body 10 in the covering mechanism 100 shown does not cover the cavity 30 , is spaced apart from the sealing member 40 , and is not rotated relative to the support body 20 .

[0127] like Figure 2 , Fig.11 and Fig.12 As shown, Fig.11 and Fig.12 The embodiment shown and Figure 2 The structures of the embodiments shown are similar, and the difference between the two lies in that the way in which the support body 20 and the cavity body 30 are rotatably connected through the first rotating shaft 50 is different; the way in which the cover body 10 and the support body 20 are rotatably connected through the second rotating shaft 60 is different; the settings of the first limiting portion 22 and the second limiting portion 23 are different, and correspondingly, the matching relationship between the first limiting member 12 and the first limiting portion 22 is different, and the matching relationship between the second limiting member 13 and the second limiting portion 23 is different; the position of the connecting arm 24 of the support body 20 is different; and the spring assembly 70 can be omitted.

[0128] like Fig.11 , Fig.12 and Fig.13 As shown, in Fig.11 , Fig.12 and Fig.13In the illustrated embodiment, the support body 20 is rotatably connected to the cavity 30 via a first rotating shaft 50. Specifically, the cavity 30 includes a first mounting portion 36 and a second mounting portion 37. In the X-axis direction, the first mounting portion 36 and the second mounting portion 37 are located on one side of the sealing member 40. In the Y-axis direction, the first mounting portion 36 and the second mounting portion 37 are located on both sides of the sealing member 40. The end of the first rotating arm 21a of the support body 20 is stacked on the side of the first mounting portion 36 facing the second mounting portion 37, and the end of the second rotating arm 21b of the support body 20 is stacked on the side of the second mounting portion 37 facing the first mounting portion 36. The first rotating shaft 50 is sequentially penetrated through the first mounting portion 36, the first rotating arm 21a, the second rotating arm 21b and the second mounting portion 37. The first rotating arm 21a and the second rotating arm 21b are rotatably connected to the cavity 30 via a first rotating shaft 50. There are various ways to rotatably connect the support body 20 and the cavity 30 through the first rotating shaft 50. A suitable way can be selected according to the needs, and the structure is simple and easy to design. In some other embodiments, the end of the first rotating arm 21a of the support body 20 can also be stacked on the side of the first mounting portion 36 facing away from the second mounting portion 37, and the end of the second rotating arm 21b of the support body 20 can be stacked on the side of the second mounting portion 37 facing away from the first mounting portion 36.

[0129] exist Fig.11 , Fig.12 and Fig.13 In the illustrated embodiment, in the second direction W3, a first mounting member 19a is provided on a side of the cover body 10 away from the cavity 30. The first mounting member 19a is rotatably connected to the rotating arm 21 (i.e., the support body 20) through the second rotating shaft 60. Specifically, in the Y-axis direction, the first mounting member 19a is located between the first rotating arm 21a and the second rotating arm 21b. The second matching hole 11 of the cover body 10 penetrates the first mounting member 19a along the Y-axis direction, and the rotating arm 21 is provided with a second mounting hole 212 that penetrates the rotating arm 21 along the Y-axis direction. The second rotating shaft 60 is penetrated in the second matching hole 11 and the second mounting hole 212, and the rotating arm 21 is rotatably connected to the first mounting member 19a through the second rotating shaft 60. There are various ways to rotatably connect the cover body 10 and the support body 20 through the second rotating shaft 60, and a suitable way can be selected according to needs, with a simple structure and convenient design. Moreover, it is beneficial to reduce the size of the capping mechanism 100 in the Y-axis direction, and it is beneficial to improve the space utilization rate of the capping mechanism 100. In some other embodiments, the first mounting member 19a may also be located on a side of the first rotating arm 21a facing away from the second rotating arm 21b, or may also be located on a side of the second rotating arm 21b facing away from the first rotating arm 21a.

[0130] like Fig.14 , Fig.15 and Fig.16 As shown, in Fig.14 , Fig.15 and Fig.16 In the illustrated embodiment, the first limiting portion 22 and the second limiting portion 23 are both arranged on the rotating arm 21 (i.e., the supporting body 20) along the second direction W3. In the matching direction W2, the second limiting portion 23 and the first limiting portion 22 are arranged on both sides of the second rotating shaft 60, and the second limiting portion 23 is closer to the first rotating shaft 50 than the first limiting portion 22. Specifically, the first limiting portion 22 and the second limiting portion 23 are both step holes, and the first limiting portion 22 and the second limiting portion 23 both penetrate the rotating arm 21 along the second direction W3. Among them, the matching direction W2 is perpendicular to the axial direction of the second rotating shaft 60 and perpendicular to the width direction of the rotating arm 21, and the matching direction W2 is the length direction of the rotating arm 21.

[0131] The first limiting portion 22 has a first limiting position 225 in the second direction W3, and the second limiting portion 23 has a second limiting position 235 in the second direction W3. Specifically, the first limiting portion 22 includes a first section 226, a second section 227, and a third section 228 that are sequentially connected in the second direction W3. The apertures of the first section 226, the second section 227, and the third section 228 decrease in sequence, and the first limiting position 225 is located on the step surface between the first section 226 and the second section 227, and the step surface between the first section 226 and the second section 227 faces away from the cavity 30. The second limiting portion 23 includes a fourth section 236, a fifth section 237, and a sixth section 238 that are sequentially connected in the second direction W3. The apertures of the fourth section 236 , the fifth section 237 and the sixth section 238 decrease in sequence. The second limiting position 235 is located on the step surface between the fourth section 236 and the fifth section 237 , and the step surface between the fourth section 236 and the fifth section 237 faces away from the cavity 30 .

[0132] like Fig.14 , Fig.16 and Fig.17 As shown, in Fig.14 , Fig.16 and Fig.17In the illustrated embodiment, the first stopper 12 and the second stopper 13 are fixedly arranged on the cover body 10, the first stopper 12 is arranged on the first stopper 22 along the second direction W3, and the second stopper 13 is arranged on the second stopper 23 along the second direction W3. When the cover body 10 rotates around the second rotating shaft 60, the first stopper 12 and the second stopper 13 move along the second direction W3. Specifically, the cover body 10 is provided with a second mounting member 19b and a third mounting member 19c on the side away from the cavity 30. In the mating direction W2, the second mounting member 19b and the third mounting member 19c are located on both sides of the second rotating shaft 60, and the third mounting member 19c is closer to the first rotating shaft 50 than the second mounting member 19b. The third mounting hole 14 of the cover body 10 penetrates the second mounting member 19b along the Y-axis direction, and the fourth mounting hole 15 of the cover body 10 penetrates the third mounting member 19c along the Y-axis direction. The first stopper 12 is slidably connected to the first stopper 22 along the second direction W3 and is detachably inserted into the third mounting hole 14. The second stopper 13 is slidably connected to the second stopper 23 along the second direction W3 and is detachably inserted into the fourth mounting hole 15. In this way, the cover body 10 and the rotating arm 21 (i.e., the support body 20) are easily assembled, which is conducive to reducing the assembly difficulty and processing cost.

[0133] During the rotation of the cover 10 around the second rotation axis 60, due to the fixed connection between the stopper (the first stopper 12 or the second stopper 13) and the cover 10 and the restraining effect of the stopper (the first stopper 22 or the second stopper 23) on the stopper, the first stopper 12 and the second stopper 13 move in opposite directions respectively. Since the stopper moves along the second direction W3, it can effectively resist the lateral force or deviation that may be generated by the cover 10 during the rotation process, thereby maintaining the stable rotation of the cover 10.

[0134] When the cover 10 is in the third open state, in the second direction W3, the first stopper 12 is spaced apart from the first stopper position 225 of the first stopper portion 22, and the second stopper 13 is in contact with or abuts against the second stopper position 235 of the second stopper portion 23. When the cover 10 is in the closed state, in the second direction W3, the first stopper 12 is in contact with or abuts against the first stopper position 225 of the first stopper portion 22, and the second stopper 13 is spaced apart from the second stopper position 235 of the second stopper portion 23.

[0135] During the rotation of the cover body 10 around the second rotating shaft 60, the first stopper 12 and the second stopper 13 move along the second direction W3 (i.e., the inner wall of the step hole). Specifically, during the rotation of the cover body 10 around the second rotating shaft 60, the first stopper 12 moves along the inner wall of the first section 226, and the second stopper 13 moves along the inner wall of the fourth section 236. In particular, during the rotation of the cover body 10 around the second rotating shaft 60 to cover the cavity 30, the first stopper 12 moves along the second direction W3 close to the cavity 30, and the first stopper 12 moves along the second direction W3 toward the first stopper position 225; the second stopper 13 moves along the second direction W3 away from the cavity 30, and the second stopper 13 moves away from the second stopper position 235 along the second direction W3.

[0136] During the rotation of the cover body 10, the first limit member 12 and the second limit member 13 move along the inner wall of the step hole. This movement method can prevent the instability of the cover body 10 caused by the shaking or deviation of the limit member (the first limit member 12 or the second limit member 13), which helps to maintain the smooth rotation of the cover body 10. At the same time, by controlling the size and shape of the step hole, a precise moving path is provided for the limit member, and the moving distance and position of the first limit member 12 and the second limit member 13 can be accurately controlled, thereby improving the accuracy of the limit.

[0137] The first limit position 225 is higher than the second limit position 235 in the second direction W3. Specifically, in the second direction W3, the first limit position 225 is farther away from the cavity 30 than the second limit position 235. Since the second limit portion 23 is closer to the first rotation axis 50 than the first limit portion 22, this arrangement enables the first limit member 12 to contact the first limit position 225 faster when the cover body 10 rotates around the second rotation axis 60. In this way, the first limit portion 22 can limit the rotation of the cover body 10 earlier to prevent it from over-rotating or deviating from the predetermined trajectory. In some other embodiments, the first limit position 225 can also be flush with the second limit position 235 in the second direction W3.

[0138] exist Fig.14 , Fig.16 and Fig.17In the illustrated embodiment, the first limiting position 225 and the second limiting position 235 are located on the same side of the axis (i.e., the second axis O3) of the second rotating shaft 60 in the second direction W3. Since when the cover 10 rotates around the second rotating shaft 60 to cover the cavity 30, the first limiting member 12 approaches the first limiting position 225 along the second direction W3, and the second limiting member 13 moves away from the second limiting position 235 along the second direction W3, such a setting can avoid the size of the part (i.e., the first section 226) of the first limiting portion 22 and the first limiting member 12 being slidably connected in the second direction W3, and the size of the part (i.e., the fourth section 236) of the second limiting portion 23 and the second limiting member 13 being slidably connected in the second direction W3 being too different, which is conducive to improving the structural stability and reliability of the rotating arm 21 (i.e., the supporting body 20), and is conducive to extending the service life of the rotating arm 21 (i.e., the supporting body 20).

[0139] Specifically, the first limiting position 225 and the second limiting position 235 are located on the side of the second axis O3 facing away from the cavity 30 in the second direction W3. In this way, it is helpful to reduce the size of the part (i.e., the first section 226) of the first limiting portion 22 and the first limiting member 12 in sliding connection in the second direction W3, and it is helpful to reduce the size of the part (i.e., the fourth section 236) of the second limiting portion 23 and the second limiting member 13 in sliding connection in the second direction W3, thereby improving the structural strength of the rotating arm 21 (i.e., the supporting body 20). In some other embodiments, the first limiting position 225 and the second limiting position 235 may also be located on the side of the second axis O3 facing the cavity 30 in the second direction W3.

[0140] like Fig.11 , Fig.12 and Fig.13 As shown, in Fig.11 , Fig.12 and Fig.13 In the illustrated embodiment, the covering mechanism 100 further includes a driving member 80, which is fixedly stacked on a side of the second mounting portion 37 facing away from the first mounting portion 36 and is rotatably connected to the first rotating shaft 50. The driving member 80 is used to drive the first rotating shaft 50 to rotate, so that the cover body 10 rotates around the first rotating shaft 50 to cover the cavity 30. The driving member 80 can be used to electrically control the covering mechanism 100, so that the angle of rotation of the cover body 10 around the first rotating shaft 50 can be more accurately controlled, and it is beneficial to improve the stability of the cover body 10 rotating around the first rotating shaft 50. The connecting arm 24 is arranged between the first rotating arm 21a and the second rotating arm 21b and is located on a side of the second rotating shaft 60 close to the first rotating shaft 50. In the second direction W3, the connecting arm 24 is located on a side of the cover body 10 facing away from the cavity 30.

[0141] The above preferred embodiments further illustrate the purpose, technical solutions and advantages of the present invention in detail. It should be understood that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of this application.

Claims

1. A covering mechanism, characterized in that: It includes a cover body, a support body, a cavity, a sealing member, a first rotating shaft and a second rotating shaft; The cover body is rotatably connected to the support body via the second rotating shaft, and the cover body can rotate around the second rotating shaft relative to the support body; The support body is rotatably connected to the cavity through the first rotating shaft, and the support body is used to support the cover body and allow the cover body to rotate around the first rotating shaft relative to the cavity along with the support body; The sealing member is arranged at the opening of the cavity and is used to cooperate with the cover body to form a seal; Among them, the center of gravity of the cover body is located on the side of the second rotating shaft away from the first rotating shaft. When the support body rotates around the first rotating shaft along the first direction to drive the cover body to cover the cavity, the cover body rotates around the second rotating shaft along the first direction to reduce the squeezing of the seal when the cover body covers the cavity.

2. The capping mechanism according to claim 1, characterized in that: The distance between the center of gravity of the cover body and the second rotation axis is in the range of (0mm, 30mm].

3. The capping mechanism according to claim 1 or 2, characterized in that: The support body is provided with a first limiting portion and a second limiting portion, the first limiting portion and the second limiting portion are respectively arranged on both sides of the second rotating shaft, and the first limiting portion and the second limiting portion are used to limit the cover body.

4. The capping mechanism according to claim 3, characterized in that: The cover body is fixedly provided with a first limit member and a second limit member, the first limit member is movably arranged on the first limit portion, and the second limit member is movably arranged on the second limit portion. During the rotation of the cover body around the second rotating axis, the cover body drives the first limit member and the second limit member to move in opposite directions.

5. The capping mechanism according to claim 4, characterized in that: The first limiting member is arranged at the first limiting portion along the axial direction of the second rotating shaft, and the second limiting member is arranged at the second limiting portion along the axial direction of the second rotating shaft. During the rotation of the cover body around the second rotating shaft, the first limiting member and the second limiting member move along the second direction, wherein the second direction is perpendicular to the axial direction of the second rotating shaft.

6. The capping mechanism according to claim 5, characterized in that: The second limiting portion is closer to the first rotation axis than the first limiting portion, and the first limiting portion is higher than the second limiting portion in the second direction.

7. The capping mechanism according to claim 6, characterized in that: The limiting center of the first limiting portion is located above the axis of the second rotating shaft in the second direction, and the limiting center of the second limiting portion is located below the axis of the second rotating shaft in the second direction.

8. The capping mechanism according to claim 7, characterized in that: A limiting center of the first limiting portion and an axis center of the second rotating shaft have a second distance in the second direction, and a limiting center of the second limiting portion and an axis center of the second rotating shaft have a third distance in the second direction, wherein the second distance is equal to the third distance.

9. The capping mechanism according to any one of claims 5 to 8, characterized in that: The size of the first limiting portion in the second direction is equal to the sum of the movable distance of the first limiting member in the second direction and the size of the first limiting member in the second direction; or / and, the size of the second limiting portion in the second direction is equal to the sum of the movable distance of the second limiting member in the second direction and the size of the second limiting member in the second direction.

10. The capping mechanism according to any one of claims 4 to 9, characterized in that: The first limiting portion and the second limiting portion are both waist holes. When the cover body rotates around the second rotating shaft, the first limiting member and the second limiting member move along the long axis direction of the waist hole.

11. The capping mechanism according to claim 4, characterized in that: The first limiting member is arranged at the first limiting portion along the second direction, and the second limiting member is arranged at the second limiting portion along the second direction. During the rotation of the cover body around the second rotating axis, the first limiting member and the second limiting member move along the second direction, and the second direction is perpendicular to the axial direction of the second rotating axis.

12. The capping mechanism according to claim 11, characterized in that: The second limiting portion is closer to the first rotating shaft than the first limiting portion, the first limiting portion has a first limiting position in the second direction, the second limiting portion has a second limiting position in the second direction, and the first limiting position is higher than the second limiting position in the second direction.

13. The capping mechanism according to claim 12, characterized in that: The first limiting position and the second limiting position are located on the same side of the axis of the second rotating shaft in the second direction.

14. The capping mechanism according to any one of claims 11 to 13, characterized in that: The first limiting portion and the second limiting portion are both step holes. During the rotation of the cover body around the second rotation axis, the first limiting member and the second limiting member move along the inner wall of the step hole.

15. The capping mechanism according to any one of claims 1 to 14, characterized in that: There is a gap between the support body and the cover body, and the gap is used to provide a first rotation space when the cover body rotates around the second rotation axis; Or / and, the support body is provided with a first paving portion, and the first paving portion is used to provide a second rotation space for the cover body; Or / and, the cover body is provided with a second paving portion, and the second paving portion is used to provide a third rotation space for the cover body.

16. An industrial device, characterized in that: include: A closing mechanism as claimed in any one of claims 1 to 15.

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