Substrate processing apparatus and substrate processing method

Abstract

The present disclosure provides a substrate processing apparatus and a substrate processing method for controlling an internal temperature of a process tube in a substrate processing process. The substrate processing apparatus includes: a process tube configured to provide a process space in which a processing process for a plurality of substrates stacked in multiple stages is performed; the heater is arranged outside the process pipe to heat the process pipe; an internal temperature measuring member provided inside the process pipe to measure an internal temperature of the process pipe; an external temperature measuring member disposed at least partially between the process tube and the heater to measure an external temperature of the process tube; and a controller configured to control an output of the heater using the internal temperature of the process tube measured in the internal temperature measuring section and the external temperature of the process tube measured in the external temperature measuring section.

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus and a substrate processing method, and more particularly, to a substrate processing apparatus and a substrate processing method for controlling an internal temperature of a process tube in a process of processing a substrate. Background Art

[0002] A substrate processing apparatus is an apparatus that deposits reaction particles contained in a process gas onto a substrate using a chemical vapor deposition (CVD) method or an atomic layer deposition (ALD) method after placing the substrate in a process space. The substrate processing apparatus is classified into a single-wafer type that can perform a processing process on one substrate and a batch type that can perform a processing process on a plurality of substrates.

[0003] Generally, a batch-type substrate processing apparatus can perform a processing process by accommodating the plurality of substrates in a vertical process tube in multiple stages. Additionally, the batch-type substrate processing apparatus can perform the processing process on the plurality of substrates while heating the process tube using an external heater.

[0004] Here, the internal temperature of the process tube in which the substrate is processed (the temperature in the process space) affects diffusion, deposition, and other heat treatments. Requirements for high-quality temperature control may include a high temperature ramp rate (or high ramp rate) with good temperature uniformity during temperature increase (or ramp), fast temperature stabilization with little (or no) temperature overshoot, a small normal-state temperature error band, and a short downtime for tuning controller parameters.

[0005] In the related art, proportional-integral-derivative (PID) controllers have been used to implement single-loop control, but it may not be possible to achieve the required temperature control performance using single-loop control.

[0006] Recently, proportional-integral-derivative (PID) controllers with cascaded or nested control loops have been used for improved temperature control, but traditional methods have practical limitations related to complexity and computational requirements.

[0007] [Prior art documents]

[0008] [Patent documents]

[0009] Korean Patent No. 10-0359734 Summary of the Invention

[0010] The present disclosure provides a substrate processing apparatus and a substrate processing method for effectively controlling the internal temperature of a process tube by controlling the output of a heater in a substrate processing process.

[0011] According to an exemplary embodiment, a substrate processing apparatus includes: a process tube configured to provide a process space in which a processing process for a plurality of substrates stacked in multiple stages is performed; a heater disposed outside the process tube to heat the process tube; an internal temperature measuring component disposed inside the process tube to measure the internal temperature of the process tube; an external temperature measuring component at least partially disposed between the process tube and the heater to measure the external temperature of the process tube; and a controller configured to control the output of the heater using the internal temperature of the process tube measured by the internal temperature measuring component and the external temperature of the process tube measured by the external temperature measuring component, wherein the controller includes: a preliminary output value calculating component configured to calculate a preliminary output value of the heater using the measured internal temperature of the process tube; and a correction determination component configured to determine whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube.

[0012] The controller may further include an output value correction component configured to correct the preliminary output value of the heater according to the determination of the correction determination component.

[0013] The correction determination component may include: a temperature band setting component configured to set a general control temperature band and a correction temperature band, in the general control temperature band, the preliminary output value of the heater is used without correction, and in the correction temperature band, the preliminary output value of the heater is corrected and used; and an external temperature band determination component configured to determine which of the general control temperature band and the correction temperature band the measured external temperature of the process tube corresponds to.

[0014] The correction temperature band may include: a decay temperature band, which is a temperature band greater than the general control temperature band; and a boost temperature band, which is a temperature band less than the general control temperature band, wherein the output value correction component is configured to: in the decay temperature band, correct the preliminary output value of the heater by multiplying the preliminary output value of the heater by a decay coefficient that is inversely proportional to the temperature increase range relative to the upper limit of the general control temperature band, and in the boost temperature band, correct the preliminary output value of the heater by adding a boost value that is proportional to the temperature decrease range relative to the lower limit of the general control temperature band to the preliminary output value of the heater.

[0015] The heater may be configured to heat the process tube to maintain it at a standby temperature, and then maintain the process temperature during the processing operation after raising the temperature of the process tube from the standby temperature to the process temperature, and for each of the standby temperature section, the temperature increase section, and the process temperature section, the general control temperature band and the correction temperature band may have different temperature ranges.

[0016] The preliminary output value calculation component may be configured to perform a proportional-integral-derivative (PID) calculation using the measured internal temperature of the process tube.

[0017] According to another exemplary embodiment, a substrate processing method includes: heating a process tube using a heater disposed outside the process tube; using an internal temperature measurement component to measure the internal temperature of the process tube; using an external temperature measurement component to measure the external temperature of the process tube; and controlling the output of the heater using the measured internal temperature of the process tube and the measured external temperature of the process tube, wherein controlling the output of the heater includes: calculating a preliminary output value of the heater using the measured internal temperature of the process tube; and determining whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube.

[0018] Controlling the output of the heater may further include correcting the preliminary output value of the heater when it is determined that the preliminary output value of the heater is to be corrected.

[0019] The substrate processing method may further include: setting a general control temperature band in which the preliminary output value of the heater is used without correction; and setting a correction temperature band in which the preliminary output value of the heater is corrected and used, wherein determining whether to correct the preliminary output value of the heater may include determining which of the general control temperature band and the correction temperature band the measured external temperature of the process tube corresponds to.

[0020] Setting the correction temperature zone may include: setting a decay temperature zone, which is a temperature zone greater than the general control temperature zone; and setting a strengthening temperature zone, which is a temperature zone less than the general control temperature zone. Wherein, correcting the preliminary output value of the heater may include: when the measured external temperature of the process tube corresponds to the decay temperature zone, correcting the preliminary output value of the heater by multiplying the decay coefficient inversely proportional to the temperature increase range relative to the upper limit of the general control temperature zone by the preliminary output value of the heater; and when the measured external temperature of the process tube corresponds to the strengthening temperature zone, correcting the preliminary output value of the heater by adding a strengthening value proportional to the temperature decrease range relative to the lower limit of the general control temperature zone to the preliminary output value of the heater.

[0021] Heating the process tube may include: heating and maintaining the process tube at a standby temperature; raising the temperature of the process tube from the standby temperature to a process temperature; and maintaining the process temperature during the substrate processing process. Wherein, for each of the processes of heating and maintaining the process tube, raising the temperature of the process tube, and maintaining the process temperature, the general control temperature zone and the correction temperature zone may have different temperature ranges.

[0022] Calculating the preliminary output value of the heater may include performing a proportional-integral-derivative (PID) calculation using the measured internal temperature of the process tube. Description of the Drawings

[0023] Reading the following description in conjunction with the drawings will enable a more detailed understanding of the exemplary embodiments. In the drawings:

[0024] Figure 1 is a schematic cross-sectional view of a substrate processing apparatus according to an exemplary embodiment.

[0025] Figure 2 is a conceptual diagram for explaining a controller according to an exemplary embodiment.

[0026] Figure 3 is a conceptual diagram for explaining a general control temperature zone, a decay temperature zone, and a strengthening temperature zone according to an exemplary embodiment.

[0027] Figure 4 is a flowchart showing a substrate processing method according to another exemplary embodiment. Detailed Description of the Invention

[0028] Hereinafter, specific embodiments will be described in more detail with reference to the accompanying drawings. However, the present disclosure may be implemented in different forms and should not be construed as limited to the embodiments set forth herein. Instead, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of this disclosure to those skilled in the art. In the description, the same elements are denoted by the same reference numerals. In the drawings, the dimensions of layers and regions are exaggerated for clarity of illustration. The same reference numerals always refer to the same elements.

[0029] Figure 1 is a schematic cross-sectional view of a substrate processing apparatus according to an exemplary embodiment.

[0030] Referring to Figure 1 , a substrate processing apparatus 100 according to an exemplary embodiment may include: a process tube 110 that provides a process space in which a processing process is performed on a plurality of substrates 10 stacked in multiple stages; a heater 120 disposed outside the process tube 110 to heat the process tube 110; an internal temperature measuring component 131 disposed inside the process tube 110 to measure the internal temperature of the process tube 110; an external temperature measuring component 132 disposed at least partially between the process tube 110 and the heater 120 to measure the external temperature of the process tube 110; and a controller 140 that controls the output of the heater 120 using the internal temperature of the process tube 110 measured by the internal temperature measuring component 131 and the external temperature of the process tube 110 measured by the external temperature measuring component 132.

[0031] The process tube 110 may provide a process space in which a processing process is performed on the plurality of substrates 10 stacked in multiple stages, and may accommodate the plurality of substrates 10 in the process space to perform a processing process. For example, the process tube 110 may be made of a heat-resistant material (such as quartz or ceramic), have a cylindrical shape with a closed upper portion and an open lower portion, and may extend in a vertical direction to accommodate a substrate boat in which the plurality of substrates 10 are stacked in the longitudinal direction (or extending direction) of the process tube 110 in the process space, and thus, an actual processing process (such as a deposition process) may be performed. Here, the substrate boat may be configured to support the substrates 10 such as wafers, and may be configured such that the plurality of substrates 10 are loaded in the longitudinal direction (i.e., the upward and downward directions) of the process tube 110, and a plurality of unit processing spaces may be defined in the substrate boat in which the plurality of substrates 10 are respectively processed.

[0032] The heater 120 can heat the process tube 110 and can be disposed outside the process tube 110 to transfer (or supply) thermal energy to the process tube 110. For example, the heater 120 can include a plurality of heaters disposed to surround the process tube 110 at different heights to selectively heat each zone of the process space at different heights, thereby heating the process space. In the case of a vertical batch type substrate processing apparatus 100 that processes the plurality of substrates 10 simultaneously, the length of the process tube 110 can reach several meters (m), such that a large number of substrates 10 can be placed. Therefore, in order to precisely control the temperature of the process space inside the process tube 110, the process space can be divided into a plurality of zones and the plurality of heaters can be used to selectively heat the process space.

[0033] The internal temperature measurement component 131 can be disposed inside the process tube 110 to measure the internal temperature of the process tube 110 (i.e., the temperature of the process space). For example, the internal temperature measurement component 131 can include a temperature distribution thermocouple TC, which is disposed to extend along the inner wall of the process tube 110 that vertically extends in a rod shape, thereby measuring the internal temperature of the process tube 110 in zones at different heights. The internal temperature measurement component 131 can be supported on a flange and connected to the outside through the flange, and the flange supports the process tube 110 at the lower part of the process tube 110. The thermocouple TC can be coupled to one end of different types of metal wiring to provide a contact point, and since an electromotive force is generated when the two ends of the thermocouple TC are maintained at different temperatures, the temperature of the contact point can be determined by measuring the electromotive force while maintaining one end at a constant temperature and the other end at various temperatures.

[0034] In addition, the internal temperature measurement component 131 can be vertically inserted into the process space inside the process tube 110, and the thermocouples can be provided in a plurality and be disposed to correspond to the height of each zone of the processing process, thereby measuring the temperature at the height of each zone. Here, the controller 140 can individually control the output (or heat generation amount) of each of the plurality of heaters based on the temperature at the height of each zone measured by each of the plurality of thermocouples. Here, the internal temperature measurement component 131 can be disposed as close as possible to the substrate 10 to be processed.

[0035] The external temperature measurement component 132 can be at least partially disposed between the process tube 110 and the heater 120 to measure the external temperature of the process tube 110 within the heater 120 (i.e., the temperature of the space between the heater and the process tube). Here, the external temperature measurement component 132 can monitor the temperature generated by the heat of the heating element of the heater 120 (e.g., each of the plurality of heaters) by measuring (or reading) the external temperature of the process tube 110, and can play an important role as a reference temperature at the time when the heater 120 reaches a thermal stable state and can also be used as feedback temperature information regarding the heat transfer state during the temperature rise. For example, the external temperature measurement component 132 can include a strip spike thermocouple TC. Thus, the external temperature measurement component 132 can be inserted externally through the heater 120 such that one end of the external temperature measurement component 132 is disposed in the space between the process tube 110 and the heater 120 (e.g., around the process tube or within a distance of about 5 mm to about 20 mm from the process tube) to measure the temperature of the space between the process tube 110 and the heater 120 (or around the process tube) (i.e., the external temperature of the process tube). The spike thermocouples TC can be provided in multiple numbers and are provided corresponding to the height at each zone of the process space.

[0036] Here, the internal temperature measurement component 131 and the external temperature measurement component 132 can be separated from each other by the process tube 110 made of quartz material, and thus, the internal temperature measurement component 131 and the external temperature measurement component 132 generally may not have the same temperature, and due to the heat loss and heat transfer delay caused by the process tube 110, the temperatures of the internal temperature measurement component 131 and the external temperature measurement component 132 can also be different in the stable state (or thermal equilibrium state).

[0037] The controller 140 can control (or adjust) the output of the heater 120 by using the internal temperature of the process tube 110 measured by the internal temperature measurement component 131 and the external temperature of the process tube 110 measured by the external temperature measurement component 132. Thus, the measured internal temperature of the process tube 110 can be used to calculate the preliminary output value of the heater 120 to quickly adjust the internal temperature of the process tube 110 to the target temperature (or set temperature), the measured external temperature of the process tube 110 can be used to determine (judge) whether to correct the preliminary output value of the heater 120, and / or determine (judge) the correction ratio of the preliminary output value of the heater 120. Depending on whether the measured external temperature of the process tube 110 is used to correct the preliminary output value of the heater 120, the preliminary output value of the heater 120 can be used as it is for the output of the heater 120, or the preliminary output value of the heater 120 can be corrected for the output of the heater 120, thereby controlling the output of the heater 120.

[0038] Figure 2 is a conceptual diagram for explaining a controller according to an exemplary embodiment.

[0039] Referring to Figure 2 , the controller 140 may include: a preliminary output value calculation component 141 that calculates a preliminary output value of the heater 120 using the measured internal temperature of the process tube 110; and a correction determination component 142 that determines whether to correct the preliminary output value of the heater 120 based on the measured external temperature of the process tube 110. The preliminary output value calculation component 141 may calculate (or compute) a preliminary output value of the heater 120 using the measured internal temperature of the process tube 110, and may calculate a preliminary output value of the heater 120 that can match the internal temperature of the process tube 110 with a target temperature. Only the measured internal temperature of the process tube 110 may be calculated and thus computed, and therefore, the preliminary output value of the heater 120 may be quickly calculated, and the output of the heater 120 may be quickly calculated (or determined) using a single-loop operation. In addition, since the measured internal temperature of the process tube 110 represents the temperature closest to the substrate 10, the output of the heater 120 may be controlled by the preliminary output value of the heater 120 calculated (or computed) using the internal temperature, and therefore, an accurate process temperature may be provided to the substrate 10, and the process film quality may be uniform.

[0040] Here, the preliminary output value calculation component 141 may perform a proportional-integral-differential (PID) operation using the measured internal temperature of the process tube 110. The preliminary output value calculation component 141 may perform a proportional-integral-differential (PID) operation such that the measured internal temperature of the process tube 110 matches the target temperature. The controller 140 may perform proportional-integral-differential (PID) control using the preliminary output value of the heater 120 that has undergone proportional-integral-differential (PID) operation, and may adjust the output of the heater 120 according to the control of the controller 140.

[0041] For example, the preliminary output value calculation component 141 may include a differential module, an integral operation module, and a proportional operation module. The differential module may calculate the differential operation of the difference using a differential constant (k d ) value. The differential constant (k d ) value is calculated as the difference between the target temperature and the measured internal temperature of the process tube 110, and may determine the rate of change of the difference.

[0042] The integral operation module may calculate an integral constant (k i ) as the difference between the target temperature and the measured internal temperature of the process tube 110 to perform addition. Here, the output of the differential module may also be used as an input for calculating the integral operation of the integral operation module.

[0043] The proportional operation module can calculate the proportional operation using the difference between the target temperature and the measured internal temperature of the process tube 110 and the proportional constant (k p ) calculated based on the output of the differential module and the output of the integral operation module.

[0044] The correction determination component 142 can determine whether to correct the preliminary output value of the heater 120 based on the measured external temperature of the process tube 110 to prevent the output of the heater 120 from exceeding the maximum value and prevent the internal temperature of the process tube 110 from dropping below a specific temperature.

[0045] Similar to the prior art, if the temperature inside the process tube 110 is controlled only by the internal temperature of the process tube 110 measured by the internal temperature measurement component 131, the positions of the heater 120 and the internal temperature measurement component 131 may be (relatively) far from each other, and since heat must move through the internal structure of the process tube 110, a delay in heat transfer may occur, and thus, the difference between the internal temperature and the external temperature of the process tube 110 may increase. Specifically, when the substrate 10 is loaded in a non-steady state where the same temperature is maintained, or when temperature increase and decrease are implemented, the difference between the internal temperature and the external temperature of the process tube 110 may become (even more) severe. In this case, the by-product film accumulated inside the process tube 110 through the previously implemented process may be peeled off, resulting in the generation of particles around the substrate 10. In addition to these limitations, a temperature difference may also occur between the core inside the heater 120 and the outside of the heater 120, causing a rapid temperature difference, and materials with different thermal expansion coefficients may be spaced apart from each other, accelerating the secular change rate of the components (or accessories) constituting the substrate processing apparatus 100, and ultimately reducing the lifespan.

[0046] Therefore, the substrate processing apparatus 100 according to the present disclosure can calculate a preliminary output value of the heater 120 by using the measured internal temperature of the process tube 110, quickly determine (or generate) the output of the heater 120 through single-loop operation, and correct the preliminary output value of the heater 120 when determined to be corrected in the following manner: judge whether to correct the preliminary output value of the heater 120 according to the measured external temperature of the process tube 110 to maintain the difference between the internal temperature and the external temperature of the process tube 110 within a specific level while preventing and / or suppressing the rapid output of the heater 120. Therefore, the output of the heater 120 can be quickly determined, and the increase of by-products in the process tube 110 can be prevented and / or suppressed, and the generation of particles due to the increase can be prevented and / or suppressed. The increase of by-products occurs due to the difference between the internal temperature and the external temperature of the process tube 110 caused by the rapid output of the heater 120.

[0047] That is, based on the control using the internal temperature of the process tube 110 measured by the internal temperature measuring component 131, the guiding function through the external temperature of the process tube 110 can be synchronously implemented to prevent overtemperature and / or undertemperature of the external temperature of the process tube 110, shorten the parameter setting time of the heater 120 as much as when only controlling using the internal temperature of the process tube 110, and maintain the temperature control accuracy as much as in the case of cascade dual-loop control. Therefore, the substrate processing apparatus 100 according to the present disclosure can have the same effect as the output control of the heater 120 using cascade dual-loop operation even with single-loop operation using the internal temperature of the process tube 110.

[0048] In addition, the difference between the internal temperature and the external temperature of the process tube 110 can be maintained at a level where the medium- and long-term change rate does not increase, thereby preventing and / or suppressing the reduction of the life of each component of the substrate processing apparatus 100 due to the rapid medium- and long-term change rate.

[0049] In addition, the controller 140 may further include an output value correction component 143, and the output value correction component 143 corrects the preliminary output value of the heater 120 according to the judgment of the correction judgment component 142. The output value correction component 143 can correct the preliminary output value of the heater 120 based on the judgment of the correction judgment component 142 and can correct the preliminary output value of the heater 120 only when determining the correction of the preliminary output value of the heater 120. Therefore, the output value correction component 143 can obtain (or calculate) the (final) output value of the heater 120, and transmit an output signal according to the (final) output value of the heater 120 to the heater 120 to control the output of the heater 120.

[0050] Here, the preliminary output value of the heater 120 and the (final) output value of the heater 120 can be expressed as a percentage and as a ratio between 0 and the maximum output of the heater 120, and thus can be a ratio (%) of the maximum output of the heater 120. For example, if the output value is 100%, it can be the maximum output of the heater 120, and if the output value is 0%, the output of the heater 120 can be 0 (or off).

[0051] Figure 3 is a conceptual diagram for explaining the concepts of a general control temperature zone, a decay temperature zone, and a strengthening temperature zone according to an exemplary embodiment.

[0052] Referring to Figure 3 , the correction determination component 142 may include: a temperature zone setting component that sets the general control temperature zone and the correction temperature zone, in the general control temperature zone, the preliminary output value of the heater is used without correction, and in the correction temperature zone, the preliminary output value of the heater is corrected and used; and an external temperature zone determination component that determines which temperature zone among the general control temperature zone and the correction temperature zone the measured external temperature of the process pipe 110 corresponds to. The temperature zone setting component may set the general control temperature zone and the correction temperature zone. In the general control temperature zone, the preliminary output value of the heater 120 is used without correcting the preliminary output value of the heater 120, and in the correction temperature zone, the preliminary output value of the heater 120 is used by correcting the preliminary output value of the heater 120. Here, in the general control temperature zone, the preliminary output value of the heater 120 can be used as the output of the heater 120 without correction, and in the correction temperature zone, the preliminary output value of the heater 120 (the corrected output value of the heater) can be corrected and used as the output of the heater 120.

[0053] For example, the general control temperature zone can be a temperature zone that is neither too high nor too low, can be a temperature zone within a predetermined range (or error range) above and below the set temperature (or target temperature) for each hour (or for a time point), and can be a temperature (range) in a thermally stable state. In addition, the correction temperature zone can be a temperature zone that is too high or too low, can be a temperature zone above or below a predetermined temperature range above and below the set temperature, and can be a thermally unstable temperature (range). Therefore, in the general control temperature zone, even if the preliminary output value of the heater 120 is used as the output of the heater 120 without correction, the external temperature of the process pipe 110 may not overheat due to high output, and the internal temperature of the process pipe 110 may not drop below a specific temperature.

[0054] The external temperature zone determination component can determine which temperature zone among the general control temperature zone and the correction temperature zone the measured external temperature of the process pipe 110 corresponds to. Therefore, when the measured external temperature of the process pipe 110 corresponds to the general control temperature zone, it can be determined that there is no correction for the preliminary output value of the heater 120, and when the measured external temperature of the process pipe 110 corresponds to the correction temperature zone, it can be determined that there is a correction for the preliminary output value of the heater 120.

[0055] The correction temperature zone can include a decay temperature zone and a boost temperature zone. The decay temperature zone is a temperature zone higher than the general control temperature zone, and the boost temperature zone is a temperature zone lower than the general control temperature zone. The decay temperature zone can be a high-temperature zone higher than the general control temperature zone. When the measured external temperature of the process pipe 110 corresponds to the decay temperature zone, the preliminary output value of the heater 120 can be corrected so that the external temperature of the process pipe 110 does not overheat due to the high output of the heater 120, and the preliminary output value of the heater 120 can also be corrected by decaying to a value smaller than the preliminary output value of the heater 120.

[0056] The boost temperature zone can be a low-temperature zone lower than the general control temperature zone. When the measured external temperature of the process pipe 110 corresponds to the boost temperature zone, the preliminary output value of the heater 120 can be corrected so that the internal temperature of the process pipe 110 does not drop below a specific temperature, and the preliminary output value of the heater 120 can also be corrected by boosting to a value higher than the preliminary output value of the heater 120.

[0057] Here, in the attenuation temperature zone, the output value correction unit 143 can correct the preliminary output value of the heater 120 by multiplying the preliminary output value of the heater 120 by an attenuation coefficient that is inversely proportional to the temperature increase range relative to the upper limit of the general control temperature zone. And in the intensification temperature zone, the preliminary output value of the heater 120 can be corrected by adding an intensification value that is proportional to the temperature decrease range relative to the lower limit of the general control temperature zone to the preliminary output value of the heater 120. In the attenuation temperature zone, the output value correction unit 143 can attenuate the preliminary output value of the heater 120 and correct the preliminary output value of the heater 120 so that the external temperature of the process tube 110 is not overheated due to the high output of the heater 120. And the output value correction unit 143 can multiply the preliminary output value of the heater 120 by an attenuation coefficient that is inversely proportional to the temperature increase range for the upper limit of the general control temperature zone to correct the preliminary output value of the heater 120 to a lower value. For example, the output value correction unit 143 can correct the preliminary output value of the heater 120 so that the (final) output value of the heater 120 gradually decreases as the external temperature of the process tube 110 becomes higher than the upper limit of the general control temperature zone. And at the lower limit of the attenuation temperature zone (as the boundary with the general control temperature zone (upper limit)), the preliminary output value of the heater 120 can be multiplied by 1 as the attenuation coefficient, and at the upper limit of the attenuation temperature zone, the preliminary output value of the heater 120 can be multiplied by 0 as the attenuation coefficient. That is to say, as the temperature difference between the upper limit of the general control temperature zone and the external temperature of the process tube 110 increases between the lower limit and the upper limit of the attenuation temperature zone, an attenuation coefficient that gradually decreases in reverse within the range of 0 to 1 can be multiplied by the preliminary output value of the heater 120. And at the intermediate temperature between the lower limit and the upper limit of the attenuation temperature zone, the preliminary output value of the heater 120 can be multiplied by 0.5 as the attenuation coefficient.

[0058] In the enhanced temperature zone, the output value correction component 143 can enhance and correct the preliminary output value of the heater 120 so that the internal temperature of the process tube 110 does not drop below a specific temperature, and the output value correction component 143 can add an enhancement value proportional to the temperature increase range with respect to the lower limit of the general control temperature zone to the preliminary output value of the heater 120 to correct the preliminary output value of the heater 120 to be higher. For example, the output value correction component 143 can correct the preliminary output value of the heater 120 so that the (final) output value of the heater 120 gradually increases as the external temperature of the process tube 110 becomes lower than the lower limit of the general control temperature zone, and at the upper limit of the enhanced temperature zone (as the boundary with the lower limit of the general control temperature zone), an enhancement value of approximately 0% of the preliminary output value of the heater 120 can be added to the preliminary output value of the heater 120, and at the lower limit of the enhanced temperature zone, an enhancement value of approximately 50% to approximately 100% (e.g., approximately 50%) of the preliminary output value of the heater 120 can be added to the preliminary output value of the heater 120. That is, as the temperature difference between the lower limit of the general control temperature zone and the external temperature of the process tube 110 increases between the upper and lower limits of the enhanced temperature zone, an enhancement value that gradually increases proportionally in the range of approximately 0% to approximately 50% (∼100%) can be added to the preliminary output value of the heater 120, and at the intermediate temperature between the upper and lower limits of the enhanced temperature zone, an enhancement value of approximately 25% (to approximately 50%) of the preliminary output value of the heater 120 obtained by halving the enhancement value according to the enhancement value of approximately 50% to approximately 100% of the lower limit of the enhanced temperature zone can be added to the preliminary output value of the heater 120.

[0059] The temperature zone setting component can set (or specify) the upper limit of the attenuation temperature zone as the desired temperature at which the external temperature of the desired process tube 110 no longer rises, and when the temperature exceeds the upper limit of the attenuation temperature zone, the output value correction component 143 can cause the (final) output value of the heater 120 to converge to approximately 0%, thereby reducing the external temperature of the process tube 110 to the attenuation temperature zone. For example, the (final) output value of the heater 120 can be approximately 0% or a predetermined constant (a value close to approximately 0%).

[0060] In addition, the output value correction unit 143 can limit the preliminary output value of the heater 120 calculated by proportional-integral-derivative (PID) within the attenuation temperature range so that the (final) output value of the heater 120 can be within a certain guide value. Specifically, the level of attenuation can be selected to be linear or exponential within the attenuation temperature band, and when the attenuation level exceeds the upper limit of the attenuation temperature band, it converges to approximately 0%, and thus, the external temperature of the process tube 110 can be reduced again, and in fact, the output of the heater 120 can be maintained at a constant level. For example, when the level of attenuation is linear, the (final) output value of the heater 120 can be obtained by the linear attenuation equation: the preliminary output value of the heater 120 × (1 - B / A) (where A is the width of the attenuation temperature band (the upper limit - the lower limit of the attenuation temperature band), and B is the difference between the measured external temperature of the process tube 110 and the lower limit of the attenuation temperature band (or the upper limit of the general control temperature band)), and when the level of attenuation is exponential, the (final) output value of the heater 120 can be obtained by the exponential attenuation equation: the preliminary output value of the heater 120 × e -m(1-B / A) (where A and B are the same as in the linear attenuation equation, and m is the exponential attenuation gain).

[0061] If the attenuation temperature band is too narrow, the output of the heater 120 can change rapidly, and thus, the temperature control inside the process tube 110 may become unstable, for example, the heater 120 will turn on / off frequently. For this reason, it is desirable to set the attenuation temperature band mainly to about 20°C to 50°C (range), and as the control value of the internal temperature of the process tube 110 increases, the attenuation temperature band can also move (or increase) as a whole higher (or move upward), and thus, the temperature increase process can be clearly implemented.

[0062] In the general control temperature band between the attenuation temperature band and the strengthening temperature band, the preliminary output value of the heater 120 can be used as the (final) output value of the heater 120 as it is, similar to the control that only uses the internal temperature of the process tube 110 without any correction through the output value correction unit 143. In this case, its function can be exactly the same as the case of being controlled only by the internal temperature of the process tube 110. That is to say, the (final) output value of the heater 120 can be the preliminary output value of the heater 120 and can be the same as the preliminary output value of the heater 120.

[0063] In addition, the enhanced temperature zone may correspond to a situation where the external temperature of the process tube 110 drops beyond the error range (or general control temperature zone) of the set temperature, and may correspond to a situation where the temperature drops from the process temperature to the standby temperature after normal processing is completed. When the external temperature of the process tube 110 is within the enhanced temperature range, the output value correction component 143 can prevent the external temperature of the process tube 110 from dropping by strengthening the output of the heater 120 according to the level of the drop in the external temperature of the process tube 110. Each of the enhanced temperature zones can be set independently of the attenuation temperature zone and each of the enhanced temperature zones may not be used. For example, the (final) output value of the heater 120 can be obtained by the following equation: the preliminary output value of the heater 120 + K*D / C (where C is the width of the enhanced temperature zone (the upper limit - lower limit of the enhanced temperature zone), D is the difference between the upper limit of the enhanced temperature zone (or the lower limit of the general control temperature zone) and the measured external temperature of the process tube 110, and K is the enhancement gain).

[0064] In the case where the enhanced temperature zone is used, even without implementing proportional-integral-derivative (PID) control through the enhanced temperature zone, the external temperature of the process tube 110 can be prevented from dropping. Therefore, in a situation where the internal temperature of the process tube 110 is maintained above a specific temperature under any circumstances, even in the case of operational errors such as a person (or worker) operating the equipment (i.e., substrate processing equipment) omitting parameters, the internal temperature of the process tube 110 can be prevented from dropping below the specific temperature.

[0065] In addition, the output value correction component 143 can output the highest (final) output value of the heater 120 to be used in the enhanced temperature zone when the external temperature of the process tube 110 is less than the enhanced temperature zone, thereby strengthening the external temperature of the process tube 110. Here, in order to prevent overheating due to high output, the highest (final) output value of the heater 120 to be used in the enhanced temperature zone (or the (final) output value of the heater at the lower limit of the enhanced temperature zone) can be set and used. For example, the (final) output value of the heater 120 can be obtained by the formula: the preliminary output value of the heater 120 + K (where K is the enhancement gain).

[0066] When the output of the heater 120 is controlled only by the internal temperature of the process tube 110, it may not be possible to prepare for over-temperature and excessive drop in the external temperature of the process tube 110. Also, due to the large difference between the set temperature and the measured internal temperature of the process tube 110 in the decay temperature band and the enhancement temperature band, the output of the heater 120 may become suddenly high or low, and the external temperature of the process tube 110 may increase rapidly, and there may be a delay in increasing the internal temperature of the process tube 110. Therefore, a limitation may occur where the difference between the external temperature and the internal temperature of the process tube 110 increases.

[0067] In addition, in order to prepare for over-temperature and excessive drop in the external temperature of the process tube 110, cascade dual-loop control has been used in the related art. However, in the case of cascade dual-loop control, even within the general control temperature range, the operation using the measured external temperature of the process tube 110 may be included in the control loop (internally), and therefore, it may be difficult to be accurately controlled, and it may take a lot of time to determine (or set) the output (parameters) of the appropriate heater 120. Additionally, since cascade dual-loop control must always perform a secondary proportional-integral-derivative (PID) operation on the value calculated after a preliminary proportional-integral-derivative (PID) operation using the internal temperature of the process tube 110, the determination (or calculation) of the output of the heater 120 may be not only complex but also require a very long time.

[0068] Furthermore, in cascade dual-loop control, if the value calculated in the preliminary proportional-integral-derivative (PID) operation may fluctuate significantly, the secondary proportional-integral-derivative (PID) operation performed in the subsequent order may also fluctuate significantly. Therefore, the parameters will be adjusted to select a slow and / or small-response-range control, and the range (band) of the temperature where the external temperature of the process tube 110 exists must be determined by presetting the change range of the external temperature of the process tube 110, and the calculated value obtained thereafter must be matched again as the output. Therefore, it may take a very long time to find the appropriate (final) output value of the heater 120 in a trial-and-error manner, and the value must be determined based on the experience of a skilled system expert or a thermal expert. Additionally, even if the appropriate (final) output value of the heater 120 is determined through the complex process as described above, it may not be possible to measure (or read) the internal temperature of the process tube 110 due to the characteristics of dual-loop control, and it may not be possible to immediately generate the required amount of heat (since it only matches the external temperature of the process tube 110). Therefore, it may not be possible to perform temperature control as accurate as the case of controlling the output of the heater 120 only using the internal temperature of the process tube 110 within the general control temperature range.

[0069] However, the substrate processing apparatus 100 according to the present disclosure can determine which temperature zone among the general control temperature zone and the correction temperature zone the measured external temperature of the process tube 110 corresponds to through an external temperature zone determining component, so as to attenuate and / or strengthen the external temperature and correct the external temperature. Thereby, while enabling accurate temperature control within the general control temperature range, the maximum and / or minimum changes in the external temperature of the process tube 110 are suppressed, and in the case of rapid temperature change, the external temperature of the process tube 110 can be made to exist within a certain guiding value. Therefore, the internal temperature of the process tube 110 can be controlled to suppress rapid thermal changes, and high-difficulty temperature control can be implemented for processes sensitive to particles inside the process tube 110.

[0070] The direct target of raising the temperature through the heater 120 can be the circular dome-shaped process tube 110, and there may be a significant heat transfer delay before the internal temperature of the process tube 110 rises. When the temperature rises from the standby temperature (e.g., about 300 °C to about 500 °C) to the process temperature (e.g., about 550 °C to about 710 °C), the temperature rise rate per minute can be determined by the operator's experience in the process determination, and generally, a temperature rise rate within about 530 °C / min to about 30 °C / min can be selected.

[0071] Since the time required for the entire process is also determined by the temperature rise rate, the fastest temperature rise rate must be selected, but it must be possible to perform several consecutive film formation processes. This is mainly expected to operate continuously 24 hours a day, 365 days a year.

[0072] However, if too large a speed is selected such that the temperature difference between the internal temperature and the external temperature of the process tube 110 is about 100 °C to 200 °C, microcracks may appear on the surface of the process tube 110 made of quartz material due to repeated temperature operations, or the separation of the by-product film remaining on the inside (or inner surface) of the process tube 110 due to the previously performed film formation process may be accelerated. Due to these undesirable effects, not only can the particles on the substrate 10 increase when a new process is implemented, but also the lifespan of the process tube 110 made of quartz material is shortened. This may be particularly problematic when growing insulating films such as silicon oxide films or silicon nitride films.

[0073] If the temperature increase process is analyzed in detail, the maximum output can be generated immediately after the temperature increase process (step) of increasing the temperature from the standby temperature to the process temperature. This is done by applying a large heat supply within a short time period such that the heater 120, which maintains the temperature at a very low power by reaching the steady state of the standby temperature, increases the internal temperature of the process tube 110 at a desired rate. In this case, the gap between the external temperature and the internal temperature of the process tube 110 may become the largest, and in the present disclosure, the temperature control performed at this vulnerable moment may be softened.

[0074] Here, the heater 120 can heat the process tube 110 to maintain the process tube 110 at the standby temperature (or preparation temperature), then increase the temperature of the process tube from the standby temperature to the process temperature, and then maintain the process temperature during the processing operation. For each of the standby temperature section, the temperature increase section, and the process temperature section, the general control temperature band and the correction temperature band may have different temperature ranges. The heater 120 can heat the process tube 110 and can also heat the process tube 110 by dividing the section (or time) into a standby temperature section, a temperature increase section, and a process temperature section. For example, the heater 120 can maintain the internal temperature of the process tube 110 at the standby temperature, then increase the internal temperature of the process tube 110 from the standby temperature to the process temperature, and maintain the process temperature during the processing operation, and can also increase the internal temperature of the process tube 110 from a standby temperature of about 300 °C to about 500 °C to a process temperature of about 550 °C to about 710 °C, and increase the internal temperature of the process tube 110 at a temperature increase rate of about 5 °C / minute to about 30 °C / minute.

[0075] Here, for each of the standby temperature section, the temperature increase section, and the process temperature section, the general control temperature band and the correction temperature band may have different temperature ranges, and since the set temperature (or the desired internal temperature of the process tube) can be changed for each section, the general control temperature band (the temperature range of the general control temperature band) can be changed. The general control temperature band is the temperature band within a predetermined range above and below the set temperature, and as the general control temperature band changes, the correction temperature band (the temperature range of the correction temperature band) outside the general control temperature band can also be changed. Therefore, throughout the standby temperature section, the temperature increase section, and the process temperature section, the internal temperature of the process tube 110 can be smoothly controlled (or adjusted) without a large gap between the external temperature and the internal temperature of the process tube 110.

[0076] The substrate processing apparatus 100 of the present disclosure may further include an upper temperature measuring component 133 for measuring the temperature of the upper end of the process tube 110. The upper temperature measuring component 133 may be at least partially disposed between the upper end of the process tube 110 and the upper inner surface of the heater 120 to measure the temperature of the upper end of the process tube 110 and the temperature of the space between the upper inner surface of the heater 120 and the upper end of the process tube 110. Here, the upper temperature measuring component 133 may monitor the temperature generated by the heat of the upper end of the process tube 110 by measuring (or reading) the temperature of the upper part of the process tube 110 by the heating element of the heater 120, and may play an important role as a reference temperature at the time when the heater 120 reaches a thermal stable state, and may also be used as feedback temperature information regarding the heat transfer state during temperature rise. For example, the upper temperature measuring component 133 may include a rod-shaped spike thermocouple TC, similar to the external temperature measuring component 132, and may be inserted through the outside of the upper end (or upper part) of the heater 120, so that one end of the upper temperature measuring component 133 is disposed in the space between the upper end of the process tube 110 and the upper inner surface of the heater 120 (for example, within a distance of about 5 mm to about 20 mm from the upper end of the process tube), and may measure the temperature of the space between the upper end of the process tube 110 and the upper inner surface of the heater 120 (i.e., the temperature of the upper end of the process tube).

[0077] In addition, the substrate processing apparatus 100 of the present disclosure may further include an over-temperature detection component (not shown) for detecting over-temperature of the process tube 110. The over-temperature detection component (not shown) may be installed at the same height as the external temperature measuring component 132, and may measure (or read) the temperature at a position similar to that of the external temperature measuring component 132, and detect the over-temperature of the process tube 110 through a circuit separate from the external temperature measuring component 132 to prevent the process tube 110 from being damaged due to over-temperature of the process tube 110. For example, the over-temperature detection component (not shown) may use an over-temperature detection sensor, and when the temperature of the over-temperature detection sensor exceeds a threshold temperature (or a set temperature), the output (or heat generation amount) of the heater 120 may be reduced or turned off.

[0078] Figure 4 is a flowchart showing a substrate processing method according to another exemplary embodiment.

[0079] Referring to Figure 4 , the substrate processing method according to another embodiment of the present disclosure will be described in more detail. However, the details overlapping with those described above for the substrate processing apparatus according to the embodiment of the present disclosure will be omitted.

[0080] A substrate processing method according to another embodiment of the present disclosure may include: a process (S100) of heating a process tube using a heater provided outside the process tube; a process (S200) of measuring the internal temperature of the process tube using an internal temperature measurement component; a process (S300) of measuring the external temperature of the process tube using an external temperature measurement component; and a process (S400) of controlling the output of the heater using the measured internal temperature of the process tube and the external temperature of the process tube.

[0081] First, the process tube is heated (S100) by a heater provided outside the process tube. The heater may be provided outside the process tube to heat the process tube and transfer (or supply) thermal energy to the process tube. For example, the heater may include a plurality of heaters arranged to surround the process tube at different heights to selectively heat regions of the process space within the process tube at different heights, thereby heating the process space.

[0082] Next, the internal temperature of the process tube is measured (S200) using an internal temperature measurement component. The internal temperature measurement component may be provided inside the process tube to measure the internal temperature of the process tube (i.e., the temperature of the process space). For example, the internal temperature measurement component may include a temperature profile thermocouple TC, which is arranged to extend along the inner wall of the process tube extending vertically in a rod shape, thereby measuring the internal temperature of the process tube in regions having different heights. The internal temperature measurement component may be supported on a flange and connected to the outside through the flange, and the flange supports the process tube at the lower part of the process tube.

[0083] In addition, the external temperature of the process tube is measured (S300) using an external temperature measurement component. The external temperature measurement component may be at least partially provided between the process tube 110 and the heater to measure the external temperature of the process tube within the heater (i.e., the temperature of the space between the heater and the process tube). Here, the external temperature measurement component may monitor the temperature generated by the heating element of the heater (e.g., each of the plurality of heaters) by measuring (or reading) the external temperature of the process tube, and may play an important role as a reference temperature at the time when the heater reaches a thermal steady state, and may also be used as feedback temperature information regarding the heat transfer state during temperature rise. For example, the external temperature measurement component may include a strip spike thermocouple TC. Therefore, the external temperature measurement component may be inserted externally through the heater such that one end of the external temperature measurement component is disposed in the space between the process tube and the heater (e.g., around the process tube or within a distance of about 5 mm to about 20 mm from the process tube) to measure the temperature of the space between the process tube 110 and the heater (or around the process tube) (i.e., the external temperature of the process tube).

[0084] Next, the output of the heater is controlled using the measured internal temperature of the process tube and the measured external temperature of the process tube (S400). The controller 140 can control (or adjust) the output of the heater using the internal temperature of the process tube measured by the internal temperature measuring component and the external temperature of the process tube. Therefore, the measured internal temperature of the process tube can be used to calculate the preliminary output value of the heater to quickly adjust the internal temperature of the process tube to the target temperature (or set temperature), and the measured external temperature of the process tube can be used to determine (judge) whether to correct the preliminary output value of the heater and / or the correction ratio of the preliminary output value of the heater. Depending on whether the measured external temperature of the process tube is used to correct the preliminary output value of the heater, the preliminary output value of the heater can be used as it is for the output of the heater, or the preliminary output value of the heater can be corrected and used for the output of the heater to control the output of the heater.

[0085] Here, the process of controlling the output of the heater (S400) may include: a process (S410) of calculating the preliminary output value of the heater using the measured internal temperature of the process tube; and a process (S420) of judging whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube.

[0086] The preliminary output value of the heater can be calculated using the measured internal temperature of the process tube (S410). The internal temperature of the process tube measured by the preliminary output value calculation component can be used to calculate (or compute) the preliminary output value of the heater, and the preliminary output value of the heater that matches the internal temperature of the process tube with the target temperature can be calculated. Only the measured internal temperature of the process tube can be computed for the calculation. Therefore, the preliminary output value of the heater can be quickly computed, and the output of the heater can be quickly calculated (or determined) through single-loop operation. In addition, since the measured internal temperature of the process tube represents the temperature closest to the substrate, the output of the heater can be controlled by the preliminary output value of the heater calculated (or computed) using the internal temperature. Therefore, an accurate process temperature can be provided to the substrate, and the quality of the process film can be uniform.

[0087] Here, the process of calculating the preliminary output value of the heater (S410) may include a process (S411) of performing a proportional-integral-differential (PID) operation using the measured internal temperature of the process tube.

[0088] The measured internal temperature of the process tube can be used to perform a proportional-integral-derivative (PID) operation (S411). The preliminary output value operation component can perform a proportional-integral-derivative (PID) operation such that the measured internal temperature of the process tube is matched with the target temperature by using the measured internal temperature of the process tube, and the controller can perform proportional-integral-derivative (PID) control by using the preliminary output value of the heater that has undergone the proportional-integral-derivative (PID) operation, and the output of the heater can be adjusted according to the control of the controller.

[0089] In addition, it is determined whether to correct the preliminary output value of the heater according to the measured external temperature of the process tube (S420). The correction determination component can determine whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube to prevent the output of the heater from exceeding the maximum value and prevent the internal temperature of the process tube from dropping below a specific temperature.

[0090] The process (S400) of controlling the output of the heater may further include a process (S430) of correcting the preliminary output value of the heater when it is determined that the preliminary output value of the heater will be corrected.

[0091] When it is determined that the preliminary output value of the heater needs to be corrected, the preliminary output value of the heater can be corrected (S430). The output value correction component can correct the preliminary output value of the heater according to the determination of the correction determination component, and when the correction of the preliminary output value of the heater is determined, the preliminary output value of the heater can be corrected. Therefore, the output value correction component can obtain (or calculate) the (final) output value of the heater and transmit an output signal according to the (final) output value of the heater to the heater to control the output of the heater.

[0092] The substrate processing method according to the present disclosure may further include: a process (S350) of setting a general control temperature range in which the preliminary output value of the heater is used without correction; and a process (S360) of setting a correction temperature range in which the preliminary output value of the heater is corrected and used.

[0093] The general control temperature range can be set. In the general control temperature range, the preliminary output value (S350) of the heater is used without correction. The general control temperature range can be set by the temperature range setting component. In the general control temperature range, the preliminary output value of the heater is used without correcting the preliminary output value of the heater. Here, in the general control temperature range, the preliminary output value of the heater can be used as the output of the heater without correction. For example, the general control temperature range can be a temperature range that is neither too high nor too low, can be a temperature range within a predetermined range (or error range) above and below the set temperature (or target temperature) except for the set temperature (or target temperature) for each hour (or at a time point), and can be a temperature (range) in a thermally stable state.

[0094] In addition, the correction temperature range can be set. In the correction temperature range, the preliminary output value of the heater is corrected and used (S360). The temperature range setting component can also set the correction temperature range. In the correction temperature range, the preliminary output value of the heater is used by correcting the preliminary output value of the heater. Here, in the correction temperature range, the preliminary output value of the heater can be corrected and the (corrected output value of the heater) can be used as the output of the heater. For example, the correction temperature range can be a temperature range that is too high or too low, can be a temperature range above or below a predetermined temperature range above and below the set temperature, and can be a thermally unstable temperature (range).

[0095] In addition, the process (S420) of determining whether to correct the preliminary output value of the heater can include a process (S421) of determining which of the general control temperature range and the correction temperature range the measured external temperature of the process tube corresponds to.

[0096] It can be determined which of the general control temperature range and the correction temperature range the measured external temperature of the process tube corresponds to (S421). The external temperature range determination component can determine which of the general control temperature range and the correction temperature range the measured external temperature of the process tube corresponds to. Therefore, when the measured external temperature of the process tube corresponds to the general control temperature range, it can be determined that there is no correction of the preliminary output value of the heater, and when the measured external temperature of the process tube corresponds to the correction temperature range, it can be determined that the preliminary output value of the heater is corrected.

[0097] The process (S360) of setting the correction temperature range can include: a process (S361) of setting the attenuation temperature range, which is a temperature range greater than the general control temperature range; and a process (S362) of setting the strengthening temperature range, which is a temperature range less than the general control temperature range.

[0098] An attenuation temperature band can be set. The attenuation temperature band is a high-temperature band higher than the general control temperature band (S361). The temperature band setting component can set the attenuation temperature band while setting the correction temperature band. The attenuation temperature band is a high-temperature band larger than the general control temperature band. Here, the attenuation temperature band can be a high-temperature band higher than the general control temperature band. And when the measured external temperature of the process pipe corresponds to the attenuation temperature band, the preliminary output value of the heater can be corrected so that the external temperature of the process pipe does not overheat due to the high output of the heater, and the correction can also be made by attenuating to a value smaller than the preliminary output value of the heater.

[0099] In addition, a strengthening temperature band can be set. The strengthening temperature band is a low-temperature band lower than the general control temperature band (S362). The temperature band setting component can set the strengthening temperature band while setting the correction temperature band. The strengthening temperature band is a temperature band lower than the general control temperature band. Here, the strengthening temperature band can be a low-temperature band lower than the general control temperature band. And when the measured external temperature of the process pipe corresponds to the strengthening temperature band, the preliminary output value of the heater can be corrected so that the internal temperature of the process pipe does not drop below a specific temperature, and the correction can also be made by strengthening to a value higher than the preliminary output value of the heater.

[0100] Here, the process (S430) of correcting the preliminary output value of the heater may include: a process (S431) of correcting the preliminary output value of the heater by multiplying the preliminary output value of the heater by an attenuation coefficient inversely proportional to the temperature rise range with respect to the upper limit of the general control temperature band when the measured external temperature of the process pipe corresponds to the attenuation temperature band; and a process (S432) of correcting the preliminary output value of the heater by adding a strengthening value proportional to the temperature drop range with respect to the lower limit of the general control temperature band to the preliminary output value of the heater when the measured external temperature of the process pipe corresponds to the strengthening temperature band.

[0101] If the measured external temperature of the process tube corresponds to the attenuation temperature band, a decay coefficient inversely proportional to the temperature rise range with respect to the upper limit of the general control temperature band may be multiplied by the preliminary output value of the heater to correct the preliminary output value of the heater (S431). In the attenuation temperature band, the output value correction component may correct the preliminary output value of the heater by multiplying the preliminary output value of the heater by a decay coefficient inversely proportional to the temperature rise range with respect to the upper limit of the general control temperature band. When the measured external temperature of the process tube corresponds to the attenuation temperature band, the output value correction component may attenuate the preliminary output value of the heater and correct the preliminary output value of the heater so that the external temperature of the process tube does not overheat due to the high output of the heater, and the output value correction component may multiply the preliminary output value of the heater by a decay coefficient inversely proportional to the temperature rise range with respect to the upper limit of the general control temperature band to correct the preliminary output value of the heater to be lower. For example, the output value correction component may correct the preliminary output value of the heater such that the (final) output value of the heater gradually decreases as the external temperature of the process tube becomes higher than the upper limit of the general control temperature band, and at the lower limit of the attenuation temperature band (as the boundary with the upper limit of the general control temperature band), the preliminary output value of the heater may be multiplied by 1 as the decay coefficient, and at the upper limit of the attenuation temperature band, the preliminary output value of the heater may be multiplied by 0 as the decay coefficient. That is, as the temperature difference between the upper limit of the general control temperature band and the external temperature of the process tube increases between the lower limit and the upper limit of the attenuation temperature band, a decay coefficient that gradually decreases in reverse within the range of 0 to 1 may be multiplied by the preliminary output value of the heater 120.

[0102] In addition, when the measured external temperature of the process tube corresponds to the enhanced temperature band, an enhancement value proportional to the temperature drop range relative to the lower limit of the general control temperature band may be added to the preliminary output value of the heater to correct the preliminary output value of the heater (S432). In the enhanced temperature band, the output value correction component may correct the preliminary output value of the heater by adding an enhancement value proportional to the temperature drop range relative to the lower limit of the general control temperature band to the preliminary output value of the heater. When the measured external temperature of the process tube corresponds to the enhanced temperature band, the output value correction component may enhance and correct the preliminary output value of the heater such that the internal temperature of the process tube does not drop below a specific temperature, and the output value correction component may add an enhancement value proportional to the temperature rise range relative to the lower limit of the general control temperature band to the preliminary output value of the heater to correct the preliminary output value of the heater to a higher value. For example, the output value correction component may correct the preliminary output value of the heater such that the (final) output value of the heater gradually increases as the external temperature of the process tube becomes lower than the lower limit of the general control temperature band, and at the upper limit of the enhanced temperature band (as the boundary with the lower limit of the general control temperature band), an enhancement value of approximately 0% of the preliminary output value of the heater may be added to the preliminary output value of the heater, and at the lower limit of the enhanced temperature band, an enhancement value of approximately 50% to approximately 100% (e.g., approximately 50%) of the preliminary output value of the heater may be added to the preliminary output value of the heater. That is, as the temperature difference between the lower limit of the general control temperature band and the external temperature of the process tube increases between the upper and lower limits of the enhanced temperature band, an enhancement value that gradually increases proportionally in the range of approximately 0% to approximately 50% (~100%) may be added to the preliminary output value of the heater.

[0103] The process (S100) of heating the process tube may include: a process (S110) of heating and maintaining the process tube at a standby temperature; a process (S120) of raising the temperature of the process tube from the standby temperature to the process temperature; and a process (S130) of maintaining the process temperature during the substrate processing process.

[0104] The process tube may be heated and maintained at a standby temperature (or preparation temperature) (S110). The heater may heat the process tube to maintain the internal temperature of the process tube at the standby temperature.

[0105] Then, the temperature of the process tube may be raised from the standby temperature to the process temperature (S120). The heater may heat the process tube to raise the internal temperature of the process tube from the standby temperature to the process temperature. For example, the internal temperature of the process tube may be raised from a standby temperature of approximately 300°C to approximately 500°C to a process temperature of approximately 550°C to approximately 710°C, and the internal temperature of the process tube may be raised at a temperature rise rate of approximately 5°C / minute to approximately 30°C / minute.

[0106] In addition, the process temperature may be maintained during the substrate processing step (S130). The heater may heat the process tube during the substrate processing step to maintain the internal temperature of the process tube at the process temperature.

[0107] Here, for each of the steps of heating and maintaining the process tube (S110), raising the temperature of the process tube (S120), and maintaining the process temperature (S130), the general control temperature band and the correction temperature band may have different temperature ranges. In the steps of heating and maintaining the process tube (S110), raising the temperature of the process tube (S120), and maintaining the process temperature (S130), the temperature range may be different for each step, and since the set temperature (or the desired internal temperature of the process tube) may change for each section, the general control temperature band (the temperature range of the general control temperature band) may be changed. The general control temperature band is a temperature band within a predetermined range above or below the set temperature, and as the general control temperature band changes, the correction temperature band (the temperature range of the correction temperature band) outside the general control temperature band may also be changed. Therefore, in all of the steps of heating and maintaining the process tube (S110), raising the temperature of the process tube (S120), and maintaining the process temperature (S130), the gap between the internal temperature and the external temperature of the process tube may not be large, and the internal temperature of the process tube may be stably controlled (or adjusted).

[0108] When each component of the substrate processing apparatus is made of a material having a different coefficient of thermal expansion, a large difference between the internal temperature and the external temperature of the process tube may accelerate the long-term change rate of each component, and thus reduce the life of each component. However, according to the substrate processing method of the present disclosure, the life of each component can be prevented from being reduced due to a rapid long-term change rate by maintaining the difference between the internal temperature and the external temperature of the process tube at a level at which the long-term change rate is not accelerated.

[0109] As described above, in the present disclosure, the measured internal temperature of the process tube can be used to calculate a preliminary output value of the heater to quickly determine the output of the heater through a single-loop operation. Additionally, when it is determined to perform correction by judging whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube, the preliminary output value of the heater can be corrected to maintain the internal temperature and the external temperature of the process tube within a specific level while preventing a sharp change in the output of the heater. Therefore, the output of the heater can be quickly determined, and an increase in by-products in the process tube and the generation of particles due to the increase can be prevented. The increase in by-products occurs due to the difference between the internal temperature and the external temperature of the process tube caused by the rapid output of the heater. That is to say, even a single-loop operation using the internal temperature of the process tube may have the same effect as controlling the output of the heater using a cascaded dual-loop operation. Additionally, in the present disclosure, the difference between the internal temperature and the external temperature of the process tube can be maintained at a level where the medium- and long-term change rate does not increase, so as to prevent the reduction of the lifespan of each component due to a rapid medium- and long-term change rate.

[0110] According to an exemplary embodiment of the substrate processing apparatus, the measured internal temperature of the process tube can be used to calculate a preliminary output value of the heater to quickly determine (or calculate) the output of the heater through a single-loop operation. Additionally, when it is determined to perform correction by judging whether to correct the preliminary output value of the heater based on the measured external temperature of the process tube, the preliminary output value of the heater can be corrected to maintain the internal temperature and the external temperature of the process tube within a specific level while preventing and / or suppressing a sharp change in the output of the heater. Therefore, the output of the heater can be quickly determined, and an increase in by-products in the process tube and the generation of particles due to the increase can be prevented and / or suppressed. The increase in by-products occurs due to the difference between the internal temperature and the external temperature of the process tube caused by the rapid output of the heater. That is to say, even a single-loop operation using the internal temperature of the process tube may have the same effect as controlling the output of the heater using a cascaded dual-loop operation.

[0111] When the corresponding components of the substrate processing apparatus are made of materials with different coefficients of thermal expansion, due to the large difference between the internal temperature and the external temperature of the process tube, the medium- and long-term change rate of each component may be accelerated, thereby reducing the lifespan of each component. However, in the substrate processing method according to the present disclosure, the difference between the internal temperature and the external temperature of the process tube can be maintained at a level where the medium- and long-term change rate does not increase, so as to prevent and / or suppress the reduction of the lifespan of each component due to a rapid medium- and long-term change rate.

[0112] Although the embodiments have been described with reference to their multiple exemplary embodiments, the embodiments are not limited to the foregoing embodiments, and thus, it should be understood that those skilled in the art can design many other modifications and embodiments that will fall within the spirit and scope of the principles of the present disclosure. Therefore, the true scope of protection of the present disclosure will be determined by the technical scope of the appended claims.

Claims

1. A substrate processing device, characterized in that: include: a process tube configured to provide a process space in which a treatment process for a plurality of substrates stacked in multiple stages is performed; A heater, disposed outside the process tube to heat the process tube; An internal temperature measuring component, disposed inside the process pipe to measure the internal temperature of the process pipe; an external temperature measuring component disposed at least partially between the process tube and the heater to measure an external temperature of the process tube; as well as a controller configured to control an output of the heater using the internal temperature of the process tube measured in the internal temperature measuring component and the external temperature of the process tube measured in the external temperature measuring component, The controller comprises: a preliminary output value calculation unit configured to calculate a preliminary output value of the heater using the measured internal temperature of the process pipe; as well as A correction determination component is configured to determine whether to correct the preliminary output value of the heater based on the measured external temperature of the process pipe. 2 . The substrate processing apparatus according to claim 1 , wherein the controller further comprises an output value correction section configured to correct the preliminary output value of the heater according to the judgment of the correction judgment section.

3. The substrate processing apparatus according to claim 2, wherein the correction judgment component comprises: a temperature zone setting unit configured to set a general control temperature zone in which the preliminary output value of the heater is used without correction and a correction temperature zone in which the preliminary output value of the heater is corrected and used; and The external temperature zone determination component is configured to determine which temperature zone of the general control temperature zone and the correction temperature zone the measured external temperature of the process pipe corresponds to.

4. The substrate processing apparatus according to claim 3, wherein the correction temperature zone comprises: an attenuation temperature zone, the attenuation temperature zone being a temperature zone greater than the general control temperature zone; as well as A strengthening temperature zone, wherein the strengthening temperature zone is a temperature zone lower than the general control temperature zone, The output value correction component is configured as follows: in the attenuation temperature band, correcting the preliminary output value of the heater by multiplying the preliminary output value of the heater by an attenuation coefficient inversely proportional to a temperature increase range relative to an upper limit of the general control temperature band, and In the enhanced temperature zone, the preliminary output value of the heater is corrected by adding an enhanced value proportional to a temperature drop range relative to a lower limit of the general control temperature zone to the preliminary output value of the heater.

5. The substrate processing apparatus according to claim 3, wherein the heater is configured to heat the process tube to be maintained at a standby temperature, and then maintain the process temperature during the processing process after increasing the temperature of the process tube from the standby temperature to a process temperature, and For each of the standby temperature section, the temperature increase section, and the process temperature section, the general control temperature zone and the correction temperature zone have different temperature ranges. 6 . The substrate processing apparatus according to claim 1 , wherein the preliminary output value operation section is configured to perform a proportional-integral-differential operation using the measured internal temperature of the process tube.

7. A substrate processing method, characterized in that: include: Heating the process tube by using a heater disposed outside the process tube; Measuring the internal temperature of the process tube using an internal temperature measuring component; Measuring the external temperature of the process pipe using an external temperature measuring component; as well as controlling the output of the heater using the measured internal temperature of the process tube and the measured external temperature of the process tube, Wherein the controlling the output of the heater comprises: calculating a preliminary output value of the heater using the measured internal temperature of the process tube; as well as Whether the preliminary output value of the heater is to be corrected is determined according to the measured external temperature of the process pipe. 8 . The substrate processing method according to claim 7 , wherein controlling the output of the heater further comprises correcting the preliminary output value of the heater when it is determined that the preliminary output value of the heater is to be corrected.

9. The substrate processing method according to claim 8, further comprising: setting a general control temperature band in which the preliminary output value of the heater is used without correction; as well as setting a correction temperature band in which the preliminary output value of the heater is corrected and used, The determining whether to correct the preliminary output value of the heater includes determining which temperature zone of the general control temperature zone and the correction temperature zone the measured external temperature of the process pipe corresponds to.

10. The substrate processing method according to claim 9, wherein setting the correction temperature zone comprises: Setting an attenuation temperature band, wherein the attenuation temperature band is a temperature band greater than the general control temperature band; as well as A strengthened temperature zone is set, wherein the strengthened temperature zone is a temperature zone lower than the general control temperature zone. The correcting of the preliminary output value of the heater comprises: when the measured external temperature of the process pipe corresponds to the attenuation temperature band, correcting the preliminary output value of the heater by multiplying the preliminary output value of the heater by an attenuation coefficient inversely proportional to a temperature increase range relative to an upper limit of the general control temperature band; as well as When the measured external temperature of the process pipe corresponds to the enhanced temperature band, the preliminary output value of the heater is corrected by adding an enhanced value proportional to the temperature drop range relative to the lower limit of the general control temperature band to the preliminary output value of the heater.

11. The substrate processing method according to claim 9, wherein heating the process tube comprises: heating and maintaining the process tube at a standby temperature; increasing the temperature of the process tube from the standby temperature to a process temperature; as well as maintaining the process temperature during the substrate handling process, For each of the processes of heating and maintaining the process tube, increasing the temperature of the process tube, and maintaining the process temperature, the general control temperature zone and the correction temperature zone have different temperature ranges.

12. The substrate processing method according to claim 7, wherein operating the preliminary output value of the heater comprises performing a proportional-integral-derivative operation using the measured internal temperature of the process tube.

Images