Coating equipment, control method and device thereof and storage medium

Abstract

The invention relates to the technical field of semiconductor preparation, and discloses coating equipment which comprises a reel mechanism used for unwinding and winding a base material; the detection mechanism is arranged on the reel mechanism; the movement speed of the base material on one side of the unwinding side and the winding side and the tension of the base material on the other side of the unwinding side and the winding side can be detected; the film coating mechanism comprises a film coating roller and is used for being arranged on a moving path of the base material so that the base material can be subjected to film coating; the control mechanism is used for controlling the unwinding speed or the winding speed of the reel mechanism on one side for detecting the moving speed of the base material and the rotating speed of the coating roller according to the detected speed value; and controlling the unwinding torque or the winding torque of the reel mechanism on one side for detecting the tension of the base material and the rotating torque of the coating roller according to the detected tension value. Therefore, the moving speed and the tension stability of the base material can be improved, so that the conditions of wrinkling, breaking and the like of the base material are reduced. The invention further discloses a control method and device of the coating equipment and a storage medium.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, for example, to a coating device and a control method, device, and storage medium thereof. Background Art

[0002] With the development of semiconductor technology, flexible substrate films are increasingly being used. Conductive thin films and other semiconductor devices are prepared by magnetron sputtering or evaporation. Among them, in the coating equipment, most of the related technologies use winding coating equipment, which can not only ensure the coating quality of flexible substrates, but also has high production efficiency.

[0003] In a roll-to-roll coating device, the moving speed of the flexible substrate will affect the thickness of the coating, and its tension will also affect the uniformity of the coating, etc. Therefore, it is necessary to control the moving speed and tension of the flexible substrate. Here, the transmission control of the flexible substrate is generally carried out through speed difference control or tension control, such as adjusting the rotation speed of the unwinding end and the winding end according to the diameter of the unwinding end and the winding end to change the moving speed of the flexible substrate; for example, adjusting the position or diameter of the tension wheel between the unwinding end and the winding end, and setting a corresponding partition mechanism to adjust the tension of the flexible substrate.

[0004] In the process of implementing the embodiments of the present disclosure, it is found that there are at least the following problems in the related art: When the flexible substrate is controlled by speed difference control, it is still necessary to monitor the tension of the flexible substrate as the diameters of the unwinding end and the winding end change. Generally, the winding tension and the unwinding tension are adjusted and isolated by the friction between the partition mechanism and the flexible substrate. However, in a vacuum environment, the friction of the partition mechanism is greatly reduced or even fails, causing the partition mechanism to lose its function. This may cause the speed or tension of the flexible substrate on the unwinding end and the winding end to be unstable, thereby causing wrinkles, breaks, etc. on the flexible substrate.

[0005] It should be noted that the information disclosed in the above background technology section is only used to enhance the understanding of the background of the present application, and therefore may include information that does not constitute the prior art known to ordinary technicians in the field. Summary of the invention

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] The embodiments of the present disclosure provide a coating device and a control method, device, and storage medium thereof, which can further improve the moving speed and tension stability of the flexible substrate, thereby reducing wrinkles, fractures, etc. on the flexible substrate.

[0008] In some embodiments, the coating device includes a reel mechanism, a detection mechanism, a coating mechanism, and a control mechanism. The reel mechanism is used to unwind and rewind the substrate; the detection mechanism is arranged on the reel mechanism; it can detect the moving speed of the substrate on one side of the unwinding side and the rewinding side, and the tension of the substrate on the other side of the unwinding side and the rewinding side; the coating mechanism includes a coating roller, which is arranged on the moving path of the substrate so that the substrate can be coated; the control mechanism controls the unwinding speed or the rewinding speed of the reel mechanism on the side of the moving speed of the substrate and the rotation speed of the coating roller according to the detected speed value; and controls the unwinding torque or the rewinding torque of the reel mechanism on the side of the tension of the substrate and the rotation torque of the coating roller according to the detected tension value.

[0009] In some embodiments, the control mechanism controls the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the winding speed of the reel mechanism and the rotation speed of the coating roller according to the detected speed value; the control mechanism can also control the unwinding torque of the reel mechanism and the rotation torque of the coating roller, or the winding torque of the reel mechanism and the rotation torque of the coating roller according to the detected tension value.

[0010] In some embodiments, the reel mechanism includes an unwinding roller and a winding roller. The unwinding roller is used to release the substrate, wherein the substrate is pre-wound on the unwinding roller; and the winding roller is used to wind up the substrate.

[0011] In some embodiments, the detection mechanism includes a speed detection roller and a tension detection roller. The speed detection roller is disposed on the reel mechanism and is used to detect the speed value of the substrate on one side of the unwinding side and the rewinding side; the tension detection roller is disposed on the reel mechanism and is used to detect the tension value of the substrate on the other side of the unwinding side and the rewinding side.

[0012] In some embodiments, when a speed detection roller is provided on the unwinding roller side, a tension detection roller is provided on the winding roller side; when a tension detection roller is provided on the unwinding roller side, a speed detection roller is provided on the winding roller side.

[0013] In some embodiments, the linear speed of the unwinding roller is lower than the linear speed of the coating roller, and the linear speed of the coating roller is lower than the linear speed of the winding roller.

[0014] In some embodiments, the torque of the unwinding roller is smaller than the rotational torque of the coating roller, and the rotational torque of the coating roller is smaller than the torque of the winding roller.

[0015] In some embodiments, the ratio of the linear speed of the unwinding roller to the linear speed of the coating roller ranges from 1:1.00001 to 1:1.1; or, the ratio of the linear speed of the coating roller to the linear speed of the winding roller ranges from 1:1.00001 to 1:1.1.

[0016] In some embodiments, the ratio of the linear speed of the unwinding roller to the linear speed of the coating roller ranges from 1:1.0001 to 1:1.001; or, the ratio of the linear speed of the coating roller to the linear speed of the winding roller ranges from 1:1.0001 to 1:1.001.

[0017] In some embodiments, the diameters of the unwinding roller and the winding roller are both smaller than the diameter of the coating roller.

[0018] In some embodiments, the coating mechanism further includes: a coating assembly, disposed on one side of the coating roller; wherein, when the substrate moves, the non-coated surface of the substrate contacts the coating roller and the coated surface of the substrate faces the coating assembly.

[0019] In some embodiments, the coating equipment also includes: a reversing mechanism, arranged on the side of the reel mechanism and / or the coating roller, for contacting the non-coated surface of the substrate so that the non-coated surface of the substrate contacts the coating roller and the coated surface of the substrate faces the coating component.

[0020] In some embodiments, the coating device further includes: a guiding mechanism disposed on the coating roller to ensure that the substrate is in stable contact with the coating roller.

[0021] In some embodiments, the coating equipment further comprises a clean room and a coating chamber. The clean room, the reel mechanism is arranged in the clean room; the coating chamber, the coating mechanism is arranged in the coating chamber; wherein the clean room and the coating chamber are vacuum-isolated from each other by a gate valve assembly.

[0022] The present disclosure also provides a control method for a coating device, including: Acquire the speed value of the substrate on the unwinding side and the tension value of the substrate on the winding side, or the tension value of the substrate on the unwinding side and the speed value of the substrate on the winding side within a set period; Controlling the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the winding speed of the reel mechanism and the rotation speed of the coating roller according to the acquired speed value; The winding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value, or the unwinding torque of the reel mechanism and the rotation torque of the coating roller are controlled.

[0023] In some embodiments, controlling the unwinding speed of the reel mechanism and the rotation speed of the coating roller according to the acquired speed value includes: In V b <V b1 In the case of increasing the unwinding speed V of the reel mechanism u and / or increase the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; In V b >Vb2 In the case of, reduce the unwinding speed V of the reel mechanism u and / or reduce the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; Among them, V b is the speed value of the substrate on the unwinding side, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 It is the preset maximum speed value of the substrate on the unwinding side.

[0024] In some embodiments, the speed of the substrate on the unwinding side satisfies V b1 ≤V b ≤V b2 After that, it also includes: Get the unwinding speed V of the reel mechanism u and the rotation speed V of the coating roller p , and calculate the rotation speed V of the coating roller p The unwinding speed V of the reel mechanism u The first speed difference V △1 ; In V △1 <V △min1 In the case of, reduce the unwinding speed V of the reel mechanism u Or increase the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; In V △1 >V △max1 In the case of increasing the unwinding speed V of the reel mechanism u Or reduce the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; Among them, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference.

[0025] In some embodiments, controlling the winding speed of the reel mechanism and the rotation speed of the coating roller according to the acquired speed value includes: In V r <V r1 In the case of increasing the winding speed V of the reel mechanism R and / or increase the rotation speed V of the coating roller p , so that V r1 ≤Vr ≤V r2 ; In V r >V r2 In the case of, reduce the winding speed V of the reel mechanism R and / or reduce the rotation speed V of the coating roller p , so that V r1 ≤V r ≤V r2 ; Among them, V r is the speed value of the substrate on the winding side, V r1 V is the preset minimum speed value of the substrate on the winding side; r2 It is the preset maximum speed value of the substrate on the winding side.

[0026] In some embodiments, the velocity of the substrate on the take-up side satisfies V r1 ≤V r ≤V r2 After that, it also includes: Get the reeling speed V of the reel mechanism R and the rotation speed V of the coating roller p , and calculate the winding speed V of the reel mechanism R The rotation speed V of the coating roller p The second speed difference V △2 ; In V △2 <V △min2 In the case of increasing the winding speed V of the reel mechanism R Or reduce the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; In V △2 >V △max2 In the case of, reduce the winding speed V of the reel mechanism R Or increase the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; Among them, V △min2 is the minimum value of the preset second speed difference, V △max2 is the maximum value of the preset second speed difference.

[0027] In some embodiments, controlling the unwinding torque of the reel mechanism and the rotation torque of the coating roller according to the obtained tension value includes: In N 1 <N min1 In the case of, reduce the unwinding torque N of the reel mechanismu Or increase the rotation torque N of the coating roller p , so that N min1 ≤N 1 ≤N max1 ; In N 1 >N max1 In the case of increasing the unwinding torque N of the reel mechanism u Or reduce the rotation torque N of the coating roller p , so that N min1 ≤N 1 ≤N max1 ; Among them, N 1 is the tension value of the substrate on the unwinding side, N min1 is the preset minimum unwinding tension, N max1 It is the preset maximum value of unwinding tension.

[0028] In some embodiments, controlling the winding torque of the reel mechanism and the rotation torque of the coating roller according to the obtained tension value includes: In N 2 <N min2 In the case of increasing the winding torque N of the reel mechanism R Or reduce the rotation torque N of the coating roller p , so that N min2 ≤N 2 ≤N max2 ; In N 2 >N max2 In the case of reducing the winding torque N of the reel mechanism R Or increase the rotation torque N of the coating roller p , so that N min2 ≤N 2 ≤N max2 ; Among them, N 2 is the tension value of the substrate on the winding side, N min2 is the preset minimum winding tension, N max2 It is the preset maximum winding tension.

[0029] In some embodiments, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller ranges from 1:1.00001 to 1:1.1; or, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism ranges from 1:1.00001 to 1:1.1.

[0030] In some embodiments, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller ranges from 1:1.0001 to 1:1.001; or, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism ranges from 1:1.0001 to 1:1.001.

[0031] The present disclosure also provides a control method for a coating device, including: Get the speed value V of the substrate on the unwinding side within the set cycle b and the tension value of the substrate on the winding side N 1 ; In V b <V b1 or V b >V b2 In the case of , the rotation speed of the coating roller is adjusted so that the speed value V of the substrate on the unwinding side b Meet V b1 ≤V b ≤V b2 ; Obtain the rotation speed of the coating roller and the unwinding speed of the reel mechanism, and calculate the first speed difference V between the rotation speed of the coating roller and the unwinding speed of the reel mechanism △1 ; By adjusting the unwinding speed of the reel mechanism, the first speed difference satisfies V △min1 ≤V △1 ≤V △max1 ; Among them, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 is the preset maximum speed of the substrate on the unwinding side, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference; In N 1 <N min1 or N 1 >N max1 In the case of adjusting the winding torque N of the reel mechanism u , so that the tension value of the substrate on the winding side is N 1 Satisfy N min1 ≤N 1 ≤N max1 ; Among them, N min1 is the preset minimum tension value, N max1 It is the preset maximum tension value.

[0032] An embodiment of the present disclosure also provides a control device for a coating device, comprising a processor and a memory storing program instructions, wherein the processor is configured to execute a control method for the coating device as described in the above-mentioned embodiment when running the program instructions.

[0033] The present disclosure also provides a coating device, including: Coating equipment body; The control device of the coating equipment as described in the above embodiments is installed on the coating equipment body.

[0034] The embodiments of the present disclosure further provide a computer-readable storage medium storing program instructions, which, when executed, are used to enable a computer to execute the control method of the coating equipment as described in the aforementioned embodiments.

[0035] The coating equipment and control method, device, and storage medium provided by the embodiments of the present disclosure can achieve the following technical effects: The substrate can be unwound and rewound by the reel mechanism, and the detection mechanism can detect the moving speed of the substrate on one side of the unwound side and the rewinding side, and the tension of the substrate on the other side of the unwound side and the rewinding side. In this way, when the coating roller of the coating mechanism coats the substrate, the control mechanism controls the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the rewinding speed of the reel mechanism and the rotation speed of the coating roller according to the detected speed value. A speed difference can be made between the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or a speed difference can be made between the rewinding speed of the reel mechanism and the rotation speed of the coating roller, thereby providing a certain tension for the substrate and preventing the substrate from being scratched.

[0036] On this basis, since the diameters of the two reels of the reel mechanism change during the process of unwinding and rewinding the substrate, the control mechanism also controls the unwinding torque of the reel mechanism and the rotational torque of the coating roller, or the rewinding torque of the reel mechanism and the rotational torque of the coating roller according to the detected tension value, so as to reduce the situation where the tension is too large or too small due to the change in diameter, forcing the film layer performance to decay. In summary, the coating equipment provided by the embodiment of the present disclosure can achieve stable coating speed and stable film layer tension during the coating process, thereby ensuring uniform coating.

[0037] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] One or more embodiments are exemplarily described by corresponding drawings, which do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements, and the drawings do not constitute a scale limitation, and wherein: Figure 1is a schematic structural diagram of a coating device provided by an embodiment of the present disclosure; Figure 2 is a schematic structural diagram of another coating device provided by an embodiment of the present disclosure; Figure 3 is a schematic structural diagram of another coating device provided by an embodiment of the present disclosure; Figure 4 is a schematic structural diagram of another coating device provided by an embodiment of the present disclosure; Figure 5 is a schematic diagram of a control method for a coating device provided by an embodiment of the present disclosure; Figure 6 is a schematic diagram of another control method for coating equipment provided by an embodiment of the present disclosure; Figure 7 is a schematic diagram of another control method for coating equipment provided by an embodiment of the present disclosure; Figure 8 is a schematic diagram of another control method for coating equipment provided by an embodiment of the present disclosure; Fig. 9 It is a schematic diagram of a control device for a coating device provided in an embodiment of the present disclosure.

[0039] Reference numerals: 100: base material; 10: reel mechanism; 11: unwinding roller; 12: winding roller; 20: detection mechanism; 21: speed detection roller; 22: tension detection roller; 30: coating mechanism; 31: coating roller; 32: coating assembly; 41: first reversing roller; 42: second reversing roller; 51: first guide roller; 52: second guide roller; 60: Clean room; 70: Coating room; 900: processor; 901: memory; 902: communication interface; 903: bus. DETAILED DESCRIPTION

[0040] In order to be able to understand the features and technical contents of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The attached drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0041] The terms "first", "second", etc. in the specification and claims of the embodiments of the present disclosure and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged where appropriate, so that the embodiments of the embodiments of the present disclosure described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0042] In the embodiments of the present disclosure, the terms "upper", "lower", "inside", "middle", "outside", "front", "back" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. These terms are mainly intended to better describe the embodiments of the present disclosure and their embodiments, and are not intended to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction. Moreover, in addition to being used to indicate directions or positional relationships, some of the above terms may also be used to indicate other meanings. For example, the term "upper" may also be used to indicate a certain dependency or connection relationship in certain circumstances. For those of ordinary skill in the art, the specific meanings of these terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0043] In addition, the terms "disposed", "connected", and "fixed" should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0044] Unless otherwise stated, the term "plurality" means two or more.

[0045] In the embodiment of the present disclosure, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B indicates: A or B.

[0046] The term "and / or" is a description of the association relationship between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or, A and B.

[0047] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure may be combined with each other.

[0048] At present, in the roll-to-roll coating equipment, the moving speed and tension of the flexible substrate need to be strictly controlled. Among them, the moving speed of the flexible substrate will affect its coating thickness, and its tension will also affect the uniformity of the coating. Specifically, if the tension is too small, the flexible substrate may be uneven, resulting in scratches, etc. Excessive tension may cause cracks in the coating.

[0049] In the related art, if only speed is used for control, as the winding diameter gradually increases, it is still necessary to monitor the tension parameters to ensure that the tension is stable. Therefore, the feedback of speed and tension cannot be directly used as a control standard. Among them, as the winding diameter increases, the tension gradually decreases, and the unwinding tension is constant. A partition mechanism is added between the winding side and the unwinding side to separate the winding tension from the unwinding tension, such as a pressure roller tension partition structure. However, when using a pressure roller tension partition structure, a pressure roller needs to be set on the front side of the coating, and the front pressure roller will reduce the quality of the coating.

[0050] Combination Figure 1 and Figure 2 As shown, the embodiment of the present disclosure provides a coating device, including a reel mechanism 10, a detection mechanism 20, a coating mechanism 30 and a control mechanism (not shown). The reel mechanism 10 is used to unwind and rewind the substrate 100; the detection mechanism 20 is arranged on the reel mechanism 10; it can detect the moving speed of the substrate 100 on one side of the unwinding side and the rewinding side, and the tension of the substrate 100 on the other side of the unwinding side and the rewinding side; the coating mechanism 30 includes a coating roller 31, which is used to be arranged on the moving path of the substrate 100 to coat the substrate 100; the control mechanism controls the unwinding speed or rewinding speed of the reel mechanism 10 on the side of the moving speed of the substrate 100 and the rotation speed of the coating roller 31 according to the detected speed value; and controls the unwinding torque or rewinding torque of the reel mechanism 10 on the side of the tension of the substrate 100 and the rotation torque of the coating roller 31 according to the detected tension value.

[0051] With the coating device provided by the embodiment of the present disclosure, the substrate 100 can be unwound and rewound by the reel mechanism 10, and the detection mechanism 20 can detect the moving speed of the substrate 100 on one side of the unwound side and the rewinding side, and the tension of the substrate 100 on the other side of the unwound side and the rewinding side. In this way, when the coating mechanism 30 coats the substrate 100, the control mechanism controls the unwinding speed of the reel mechanism 10 and the rotation speed of the coating roller 31, or the rewinding speed of the reel mechanism 10 and the rotation speed of the coating roller 31 according to the detected speed value. A speed difference can be made between the unwinding speed of the reel mechanism 10 and the rotation speed of the coating roller 31, or a speed difference can be made between the rewinding speed of the reel mechanism 10 and the rotation speed of the coating roller 31, thereby providing a certain tension for the substrate 100 and preventing the substrate 100 from being scratched.

[0052] On this basis, since the diameters of the two reels of the reel mechanism 10 will change during the process of unwinding and rewinding the substrate 100, the control mechanism also controls the unwinding torque of the reel mechanism 10 and the rotational torque of the coating roller 31, or the rewinding torque of the reel mechanism 10 and the rotational torque of the coating roller 31 according to the detected tension value, so as to reduce the situation where the tension is too large or too small due to the change in diameter, forcing the film layer performance to decay. In summary, the coating device provided by the embodiment of the present disclosure can achieve stable coating speed and stable film layer tension during the coating process, thereby ensuring uniform coating.

[0053] In the embodiment of the present disclosure, the substrate 100 is a flexible substrate, and the substrate 100 is unwound and rewound by the reel mechanism 10. Figure 3 As shown, in some embodiments, the reel mechanism 10 includes a reel 11 and a reel 12. The reel 11 is used to release the substrate 100, wherein the substrate 100 is pre-wound on the reel 11; and the reel 12 is used to reel the substrate 100.

[0054] In the embodiment of the present disclosure, the first side of the substrate 100 is fixedly disposed on the unwinding roller 11, and the substrate 100 is pre-wound on the unwinding roller 11, and the second side of the substrate 100 is fixedly disposed on the winding roller 12. In this way, when the unwinding roller 11 rotates, the substrate 100 can be separated from the unwinding roller 11, and when the winding roller 12 rotates, the substrate 100 can be wound on the winding roller 12.

[0055] In the disclosed embodiment, the coating roller 31 of the coating mechanism 30 is disposed on the moving path of the substrate 100. Thus, the substrate 100 is released from the unwinding roller 11 and is wound on the winding roller 12 after passing through the coating roller 31.

[0056] In the embodiment of the present disclosure, the unwinding roller 11 can detect the moving speed of the substrate 100 during the process of releasing the substrate 100. Here, the detection mechanism 20 is provided on the reel mechanism 10, and can detect the moving speed of the substrate 100 on one side of the unwinding side and the rewinding side, and the tension of the substrate 100 on the other side of the unwinding side and the rewinding side.

[0057] Specific, combined Figure 3 As shown, the detection mechanism 20 includes a speed detection roller 21 and a tension detection roller 22. The speed detection roller 21 is provided on the reel mechanism 10 to detect the speed value of the substrate 100 on one side of the unwinding side and the rewinding side; the tension detection roller 22 is provided on the reel mechanism 10 to detect the tension value of the substrate 100 on the other side of the unwinding side and the rewinding side. In this way, the speed detection roller 21 and the tension detection roller 22 can detect the speed value and the tension value of the corresponding position.

[0058] In some embodiments, when a speed detection roller 21 is provided on the side of the unwinding roller 11, a tension detection roller 22 is provided on the side of the winding roller 12; when a tension detection roller 22 is provided on the side of the unwinding roller 11, a speed detection roller 21 is provided on the side of the winding roller 12. Here, the positions of the speed detection roller 21 and the tension detection roller 22 are not limited. Optionally, the speed detection roller 21 is located between the unwinding roller 11 and the coating roller 31, and the tension detection roller 22 is located between the winding roller 12 and the coating roller 31. Optionally, the tension detection roller 22 is located between the unwinding roller 11 and the coating roller 31, and the speed detection roller 21 is located between the winding roller 12 and the coating roller 31.

[0059] In the disclosed embodiment, to prevent the speed detection roller 21 and the tension detection roller 22 from contaminating the coated surface of the substrate 100 , the detection surface of the speed detection roller 21 and the detection surface of the tension detection roller 22 are in contact with the non-coated surface of the substrate 100 , respectively.

[0060] In the embodiment of the present disclosure, since the non-coated surface of the substrate 100 is in contact with the detection surface of the speed detection roller 21, the speed detection roller 21 is driven to rotate during the movement of the substrate 100. The movement speed of the substrate 100 can be obtained by the rotation speed of the speed detection roller 21. Here, in order to prevent sliding friction between the substrate 100 and the speed detection roller 21, the friction force of the detection surface of the speed detection roller 21 can be appropriately increased.

[0061] In the disclosed embodiment, since the non-coated surface of the substrate 100 contacts the detection surface of the tension detection roller 22 , the tension detection roller 22 is squeezed during the movement of the substrate 100 , and the tension of the substrate 100 is obtained by the pressure exerted on the tension detection roller 22 .

[0062] In order to ensure the coating effect on the unwinding side, in some embodiments, the linear speed of the unwinding roller 11 is less than the linear speed of the coating roller 31. In this way, on the unwinding side, the speed difference between the linear speed of the unwinding roller 11 and the linear speed of the coating roller 31 can not only provide a certain tension for the substrate 100, but also ensure that the substrate 100 maintains a certain moving speed, thereby reducing the possibility of scratching the substrate 100 on the unwinding side and improving the coating effect.

[0063] In some embodiments, the ratio of the linear speed of the unwinding roller 11 to the linear speed of the coating roller 31 ranges from 1:1.00001 to 1:1.1, that is, it can be selected from 1:1.00001 to 1:1.1 to prevent the substrate 100 from moving too fast or too slow, and to prevent the tension from being too large or too small.

[0064] Optionally, the ratio of the linear speed of the unwinding roller 11 to the linear speed of the coating roller 31 can be 1:1.00001, 1:1.00002, 1:1.00004, 1:1.00006, 1:1.00008, 1:1.0001, 1:1.0002, 1:1.0004, 1:1.0006, 1:1.0008, 1:1.001, 1:1.002, 1:1.004, 1:1.006, 1:1.008, 1:1.01, 1:1.02, 1:1.04, 1:1.06, 1:1.08, 1:1.1, etc., and no specific limitation is made here.

[0065] In some specific embodiments, the ratio of the linear speed of the unwinding roller 11 to the linear speed of the coating roller 31 ranges from 1:1.0001 to 1:1.001. That is, it can be selected from 1:1.0001 to 1:1.001. No specific limitation is made here.

[0066] In some specific applications, the ratio of the linear speed of the unwinding roller 11 to the linear speed of the coating roller 31 ranges from 1:1.0005 to 1:1.0002.

[0067] Furthermore, in some embodiments, the rotation torque of the coating roller 31 is less than the torque of the winding roller 12. In this way, on the winding side, by increasing the torque of the winding roller 12, the film layer can obtain a stable tension to avoid the film layer performance degradation caused by tension problems. Here, the torque of the servo motor of the winding roller 12 and the torque of the servo motor of the winding roller 12 can be adjusted.

[0068] To ensure the coating effect on the winding side, in some embodiments, the linear speed of the coating roller 31 is less than the linear speed of the winding roller 12. On the winding side, the speed difference between the linear speed of the winding roller 12 and the linear speed of the coating roller 31 can not only provide a certain tension for the substrate 100, but also ensure that the substrate 100 maintains a certain moving speed, thereby reducing the possibility of scratching the substrate 100 on the winding side and improving the coating effect.

[0069] In some embodiments, the ratio of the linear speed of the coating roller 31 to the linear speed of the winding roller 12 is in the range of 1:1.00001 to 1:1.1, that is, it can be selected from 1:1.00001 to 1:1.1 to prevent the substrate 100 from moving too fast or too slow, and to prevent the tension from being too large or too small.

[0070] Optionally, the ratio of the linear speed of the coating roller 31 to the linear speed of the winding roller 12 can be 1:1.00001, 1:1.00002, 1:1.00004, 1:1.00006, 1:1.00008, 1:1.0001, 1:1.0002, 1:1.0004, 1:1.0006, 1:1.0008, 1:1.001, 1:1.002, 1:1.004, 1:1.006, 1:1.008, 1:1.01, 1:1.02, 1:1.04, 1:1.06, 1:1.08, 1:1.1, etc., and no specific limitation is made here.

[0071] In some specific embodiments, the ratio of the linear speed of the coating roller 31 to the linear speed of the winding roller 12 is in the range of 1:1.0001 to 1:1.001, that is, it can be selected from 1:1.0001 to 1:1.001. No specific limitation is made here.

[0072] In some specific applications, the ratio of the linear speed of the coating roller 31 to the linear speed of the winding roller 12 ranges from 1:1.0005 to 1:1.0002.

[0073] Further, in some embodiments, the unwinding torque of the unwinding roller 11 is less than the rotational torque of the coating roller 31. In this way, on the unwinding side, by increasing the rotational torque of the coating roller 31, the film layer can obtain a stable tension to avoid the film layer performance degradation caused by tension problems. Here, the torque of the servo motor of the unwinding roller 11 and the torque of the servo motor of the coating roller 31 can be adjusted.

[0074] In the embodiment of the present disclosure, the speed difference is set, which is equivalent to increasing the contact pressure between the substrate 100 and the coating roller 31, thereby increasing the friction force, thereby playing a role in isolating the tension on the unwinding side and the tension on the winding side.

[0075] In some embodiments, the diameters of the unwinding roller 11 and the winding roller 12 are both smaller than the diameter of the coating roller 31. Here, when the diameters of the unwinding roller 11 and the winding roller 12 are different from the diameter of the coating roller 31, the linear speed is adjusted by adjusting the angular speed.

[0076] Here, the linear velocity is calculated according to the following formula: V = WR; Among them, V is the linear velocity, W is the angular velocity, and R is the radius.

[0077] In this way, by adjusting the angular velocity of the unwinding roller 11 , the winding roller 12 and / or the coating roller 31 , the corresponding linear velocity can be changed.

[0078] In the disclosed embodiment, the coating mechanism 30 includes a coating roller 31, which is used to be arranged on the moving path of the substrate 100 so that the substrate 100 can be coated. Here, after the substrate 100 passes through the coating roller 31, the coating roller 31 can support the substrate 100, thereby facilitating the coating mechanism 30 to coat the substrate 100.

[0079] Combination Figure 3 As shown, in some embodiments, the coating mechanism 30 also includes a coating component 32, and the coating component 32 is arranged on one side of the coating roller 31; wherein, when the substrate 100 moves, the non-coated surface of the substrate 100 contacts the coating roller 31, and the coated surface of the substrate 100 faces the coating component 32.

[0080] In the disclosed embodiment, the coating assembly 32 includes a gas delivery device, a spray device, a plasma source device or an evaporation source device, etc. After the coating roller 31 contacts the substrate 100, it can prop up the contacted substrate 100 so that the coating surface of the substrate 100 faces the coating assembly 32, which is convenient for coating.

[0081] In some embodiments, the control mechanism controls the unwinding speed of the reel mechanism 10 and the rotation speed of the coating roller 31, or the winding speed of the reel mechanism 10 and the rotation speed of the coating roller 31 according to the detected speed value; the control mechanism can also control the unwinding torque of the reel mechanism 10 and the rotation torque of the coating roller 31, or the winding torque of the reel mechanism 10 and the rotation torque of the coating roller 31 according to the detected tension value.

[0082] In the embodiments of the present disclosure, the control mechanism refers to a control module formed by introducing a microprocessor, sensor technology, and network communication technology into the coating equipment. The control mechanism has the characteristics of intelligent control, intelligent perception, and intelligent application. The operation process of the coating equipment often relies on the application and processing of modern technologies such as the Internet of Things, the Internet, and electronic chips. For example, the coating equipment can be connected to electronic devices to enable users to remotely control and manage the coating equipment.

[0083] In the embodiment disclosed herein, with a speed detection roller 21 provided on the unwinding roller 11 side and a tension detection roller 22 provided on the winding roller 12 side, the control mechanism controls the unwinding speed of the unwinding roller 11 and the rotation speed of the coating roller 31 according to the detected speed value, and controls the winding torque of the winding roller 12 and the rotation torque of the coating roller 31 according to the detected tension value.

[0084] In the disclosed embodiment, when a tension detection roller 22 is provided on the side of the unwinding roller 11 and a speed detection roller 21 is provided on the side of the winding roller 12, the control mechanism controls the winding speed of the winding roller 12 and the rotation speed of the coating roller 31 according to the detected speed value, and controls the unwinding torque of the unwinding roller 11 and the rotation torque of the coating roller 31 according to the detected tension value.

[0085] Combination Figure 3 As shown, in some embodiments, the coating device also includes a reversing mechanism, which is arranged on the side of the reel mechanism 10 and / or the side of the coating roller 31, and is used to contact the non-coated surface of the substrate 100, so that the non-coated surface of the substrate 100 contacts the coating roller 31 and the coated surface of the substrate 100 faces the coating component 32.

[0086] In the disclosed embodiment, the reversing mechanism can change the moving path of the substrate 100, so that the coated surface of the substrate 100 is always facing the coating component 32 side, and other components are in contact with the non-coated surface of the substrate 100. Here, the reversing mechanism can be arranged on the side of the unwinding roller 11 of the reel mechanism 10. Alternatively, the reversing mechanism is arranged on the side of the winding roller 12 of the reel mechanism 10, or on the side of the coating roller 31. The moving path of the substrate 100 is changed by the reversing mechanism, so that the positions of the unwinding roller 11, the winding roller 12 and the coating roller 31 can be flexibly set while ensuring that the coated surface of the substrate 100 faces the coating component 32. Here, the reversing mechanism may include a plurality of reversing rollers, and the specific number thereof may be increased or decreased according to the actual scenario. It is not limited here.

[0087] In some optional embodiments, the reversing mechanism includes two reversing rollers, namely a first reversing roller 41 and a second reversing roller 42. The first reversing roller 41 is located on one side of the unwinding roller 11, and the speed detection roller 21 is located between the first reversing roller 41 and the coating roller 31. The second reversing roller 42 is located on one side of the winding roller 12, and the tension detection roller 22 is located between the second reversing roller 42 and the coating roller 31. In this way, by setting up two reversing rollers, it can be ensured that other components are in contact with the non-coated surface of the substrate 100, and the coated surface of the substrate 100 is always facing the coating component 32 side.

[0088] Combination Figure 3 As shown, in some embodiments, the coating device further includes: a guiding mechanism, which is disposed on the coating roller 31 to enable the substrate 100 to stably contact the coating roller 31 .

[0089] In the embodiment of the present disclosure, the guide mechanism can play a guiding role, enabling the substrate 100 to easily contact the coating roller 31, ensuring that the coating roller 31 can play a supporting role. At the same time, the coating area of ​​the substrate 100 can be further increased.

[0090] In some optional embodiments, the guide mechanism includes two guide rollers, namely a first guide roller 51 and a second guide roller 52. The first guide roller 51 is located between the speed detection roller 21 and the coating roller 31. The second guide roller 52 is located between the tension detection roller 22 and the coating roller 31. In this way, by setting the two guide rollers, the first guide roller 51 can ensure that the substrate 100 is stably in contact with the coating roller 31, and the second guide roller 52 can ensure that the substrate 100 is stably wound on the winding roller 12.

[0091] Combination Figure 4 As shown, in some embodiments, the coating device further includes a clean room 60 and a coating room 70. In the clean room 60, the reel mechanism 10 is disposed in the clean room 60; in the coating room 70, the coating mechanism 30 is disposed in the coating room 70; wherein the clean room 60 and the coating room 70 are vacuum-isolated from each other by a gate valve assembly.

[0092] In the disclosed embodiment, the unwinding roller 11 and the winding roller 12 are arranged in the clean room 60. The coating roller 31 and the coating assembly 32 are arranged in the coating chamber 70. In this way, it is possible to prevent the substrate 100 from adhering to some impurities such as dust and particles during the entire coating process. In order to facilitate observation, the side walls of the clean room 60 and the coating chamber 70 can be provided with a plurality of observation windows.

[0093] In the embodiment of the present disclosure, an independent clean room 60 and coating room 70 are provided, which can also prevent the film generated during the coating process from falling to the unwinding side or the winding side. In order to facilitate the movement of the substrate 100, an opening for the substrate 100 to enter and exit is provided on the side wall between the clean room 60 and the coating room 70.

[0094] In the disclosed embodiment, the clean room 60 and the coating room 70 are respectively provided with a plurality of mounting structures, so that the unwinding roller 11, the winding roller 12, the coating roller 31 and the coating assembly 32 can be conveniently installed in the corresponding spaces.

[0095] In the embodiment of the present disclosure, the clean room 60 and the coating room 70 may be vacuum chambers.

[0096] Combination Figure 5 As shown, the embodiment of the present disclosure also provides a control method for a coating device, comprising: S501, obtaining a speed value of the substrate on the unwinding side and a tension value of the substrate on the winding side, or a tension value of the substrate on the unwinding side and a speed value of the substrate on the winding side within a set period; S5021, controlling the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the winding speed of the reel mechanism and the rotation speed of the coating roller according to the acquired speed value; S5022. Control the winding torque of the reel mechanism and the rotation torque of the coating roller according to the obtained tension value, or control the unwinding torque of the reel mechanism and the rotation torque of the coating roller.

[0097] In the embodiment of the present disclosure, the setting cycle refers to obtaining the speed value of the unwinding side substrate and the tension value of the winding side substrate, or the tension value of the unwinding side substrate and the speed value of the winding side substrate at a set acquisition frequency within a set time length. For example, if the setting time length is 30 minutes, when obtaining the speed value of the unwinding side substrate or the speed value of the winding side substrate, it can be obtained once at an interval of 1 minute, 2 minutes, 3 minutes or 5 minutes. When obtaining the tension value of the winding side substrate or the tension value of the unwinding side substrate, it can be obtained once at an interval of 10 seconds, 20 seconds, 30 seconds or 35 seconds.

[0098] In the embodiment of the present disclosure, the speed value of the substrate on the unwinding side or the speed value of the substrate on the winding side may be a speed value of the substrate moving speed directly detected by a corresponding speed detection roller. For example, a speed detection roller is provided on the unwinding side, or a speed detection roller is provided on the winding side, and the speed value detected by the speed detection roller is obtained by the controller.

[0099] In the embodiment of the present disclosure, the tension value of the substrate on the unwinding side or the tension value of the substrate on the winding side may be a tension value obtained by directly detecting the tension of the substrate through a corresponding tension detection roller. For example, a tension detection roller is provided on the unwinding side, or a tension detection roller is provided on the winding side, and the tension value detected by the tension detection roller is obtained through a controller.

[0100] In the embodiment of the present disclosure, the unwinding speed of the reel mechanism and the rotation speed of the coating roller are controlled according to the acquired speed value, so that the speed value of the substrate on the unwinding side can be effectively adjusted so that it can move stably, thereby ensuring the coating effect. Here, it specifically includes: In V b <V b1 In the case of increasing the unwinding speed V of the reel mechanism u and / or increase the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; In V b >V b2 In the case of, reduce the unwinding speed V of the reel mechanism u and / or reduce the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; Among them, V b is the speed value of the substrate on the unwinding side, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 It is the preset maximum speed value of the substrate on the unwinding side.

[0101] In the embodiment of the present disclosure, when the speed value of the unwinding side substrate is less than the preset minimum speed value of the unwinding side substrate, it indicates that the moving speed of the unwinding side substrate is too slow, and the thickness of the coating may increase. Therefore, the unwinding speed of the reel mechanism can be increased, or the rotation speed of the coating roller can be increased, or the unwinding speed of the reel mechanism and the rotation speed of the coating roller can be increased at the same time (the linear speed of the coating roller's rotation speed is always greater than the unwinding linear speed of the reel mechanism). In this way, the moving speed of the unwinding side substrate can be effectively increased so that its speed value satisfies V b1 ≤V b ≤V b2 , thereby improving the uniformity of the coating.

[0102] In the disclosed embodiment, when the speed value of the unwinding side substrate is greater than the preset maximum speed value of the unwinding side substrate, it indicates that the moving speed of the unwinding side substrate is too fast, and some areas of the substrate may not be coated and the tension of the substrate is too large. Therefore, the unwinding speed of the reel mechanism can be reduced, or the rotation speed of the coating roller can be reduced, or the unwinding speed of the reel mechanism and the rotation speed of the coating roller can be reduced at the same time (the linear speed of the coating roller's rotation speed is always greater than the unwinding linear speed of the reel mechanism). In this way, the moving speed of the unwinding side substrate can be effectively reduced so that its speed value satisfies V b1 ≤V b ≤V b2 , thereby preventing unstable substrate tension and improving the uniformity of coating.

[0103] Combination Figure 6 As shown, the embodiment of the present disclosure also provides a control method for a coating device, in which the speed value of the substrate on the unwinding side satisfies V b1 ≤V b ≤V b2 After that, it also includes: S601, obtaining the unwinding speed V of the reel mechanism u and the rotation speed V of the coating roller p , and calculate the rotation speed V of the coating roller p The unwinding speed V of the reel mechanism u The first speed difference V △1 ; S6021, in V △1 <V △min1 In the case of, reduce the unwinding speed V of the reel mechanism u Or increase the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; S6022, in V △1 >V △max1In the case of increasing the unwinding speed V of the reel mechanism u Or reduce the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; Among them, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference.

[0104] In the embodiment of the present disclosure, when the speed value of the substrate is adjusted to V b1 ≤V b ≤V b2 Finally, it is necessary to adjust the unwinding speed V of the reel mechanism. u and the rotation speed V of the coating roller p In this way, the speed value of the substrate can be guaranteed to be always stable. Here, the unwinding speed V of the reel mechanism u The preset unwinding speed threshold needs to be met, and the rotation speed V of the coating roller p A preset rotation speed threshold needs to be met.

[0105] Among them, if the unwinding speed V of the reel mechanism u If the preset unwinding speed threshold is not met, it needs to be adjusted to the preset minimum unwinding speed threshold or the maximum unwinding speed threshold; if the rotation speed V of the coating roller is p If the preset rotation speed threshold is not met, it needs to be adjusted to the minimum value of the preset rotation speed threshold or the maximum value of the rotation speed threshold; in this way, the unwinding speed V of the reel mechanism is u and / or the rotation speed V of the coating roller p There is room for adjustment to readjust the substrate speed value to V b1 ≤V b ≤V b2 This prevents the reel mechanism or coating roller from running too fast or too slow, which could damage the substrate.

[0106] In the embodiment of the present disclosure, if the unwinding speed V of the reel mechanism is u Meet the preset unwinding speed threshold and the rotation speed V of the coating roller p Meet the preset rotation speed threshold and calculate the rotation speed V of the coating roller p The unwinding speed V of the reel mechanism u The first speed difference V △1 , thereby determining the first speed difference V △1 Whether the preset first speed difference is met.

[0107] Here, if the first speed difference V △1If the value is smaller than the preset minimum value of the first speed difference, it indicates that the speed difference between the two is close. At this time, the tension of the substrate film layer may be changed, affecting the coating effect. Therefore, it is necessary to reduce the unwinding speed V of the reel mechanism. u Or increase the rotation speed V of the coating roller p , so that the speed difference between them becomes larger. That is, V △min1 ≤V △1 ≤V △max1 , so that the speed of the substrate and the tension of the film layer are stable, and the coating effect is improved.

[0108] Furthermore, if the first speed difference V △1 The maximum value of the speed difference greater than the preset first speed difference indicates that the speed difference between the two is large. In this case, the substrate may be damaged. Therefore, it is necessary to increase the unwinding speed V of the reel mechanism. u Or reduce the rotation speed V of the coating roller p , so that the speed difference between them becomes smaller. That is, V △min1 ≤V △1 ≤V △max1 , so that the speed of the substrate and the tension of the film layer are stable, and the coating effect is improved.

[0109] In the disclosed embodiment, the reeling speed of the reel mechanism and the rotation speed of the coating roller are controlled according to the acquired speed value, so that the speed value of the substrate on the reeling side can be effectively adjusted so that it can move stably, thereby ensuring the coating effect. Here, it specifically includes: In V r <V r1 In the case of increasing the winding speed V of the reel mechanism R and / or increase the rotation speed V of the coating roller p , so that V r1 ≤V r ≤V r2 ; In V r >V r2 In the case of, reduce the winding speed V of the reel mechanism R and / or reduce the rotation speed V of the coating roller p , so that V r1 ≤V r ≤V r2 ; Among them, V r is the speed value of the substrate on the winding side, V r1 V is the preset minimum speed value of the substrate on the winding side; r2 It is the preset maximum speed value of the substrate on the winding side.

[0110] In the disclosed embodiment, when the speed value of the winding side substrate is less than the preset minimum speed value of the winding side substrate, it indicates that the moving speed of the winding side substrate is too slow, and the thickness of the coating may increase. Therefore, the winding speed of the reel mechanism can be increased, or the rotation speed of the coating roller can be increased, or the winding speed of the reel mechanism and the rotation speed of the coating roller can be increased at the same time (the winding linear speed of the reel mechanism is always greater than the linear speed of the rotation speed of the coating roller). In this way, the moving speed of the winding side substrate can be effectively increased so that its speed value satisfies V r1 ≤V r ≤V r2 , thereby improving the uniformity of the coating.

[0111] In the disclosed embodiment, when the speed value of the winding side substrate is greater than the preset maximum speed value of the winding side substrate, it indicates that the moving speed of the winding side substrate is too fast, and some areas of the substrate may not be coated and the tension of the substrate is too large. Therefore, the winding speed of the reel mechanism can be reduced, or the rotation speed of the coating roller can be reduced, or the winding speed of the reel mechanism and the rotation speed of the coating roller can be reduced at the same time (the winding linear speed of the reel mechanism is always greater than the linear speed of the rotation speed of the coating roller). In this way, the moving speed of the winding side substrate can be effectively reduced so that its speed value satisfies V r1 ≤V r ≤V r2 , thereby preventing unstable substrate tension and improving the uniformity of coating.

[0112] Combination Figure 7 As shown, the embodiment of the present disclosure also provides a control method for a coating device, in which the speed value of the substrate on the winding side satisfies V r1 ≤V r ≤V r2 After that, it also includes: S701, obtaining the winding speed V of the reel mechanism R and the rotation speed V of the coating roller p , and calculate the winding speed V of the reel mechanism R The rotation speed V of the coating roller p The second speed difference V △2 ; S7021, in V △2 <V △min2 In the case of increasing the winding speed V of the reel mechanism R Or reduce the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; S7022, in V △2 >V △max2 In the case of, reduce the winding speed V of the reel mechanismR Or increase the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; Among them, V △min2 is the minimum value of the preset second speed difference, V △max2 is the maximum value of the preset second speed difference.

[0113] In the embodiment of the present disclosure, when the speed value of the substrate is adjusted to V r1 ≤V r ≤V r2 Finally, it is necessary to adjust the reel mechanism's reeling speed V R and the rotation speed V of the coating roller p In this way, the speed value of the substrate can be guaranteed to be always stable. Here, the winding speed V of the reel mechanism R The preset winding speed threshold needs to be met, and the rotation speed V of the coating roller p The preset rotation speed threshold is met.

[0114] Among them, if the winding speed V of the reel mechanism R If the preset winding speed threshold is not met, it needs to be adjusted to the preset minimum winding speed threshold or the maximum winding speed threshold; if the rotation speed V of the coating roller is p If the preset rotation speed threshold is not met, it needs to be adjusted to the minimum value of the preset rotation speed threshold or the maximum value of the rotation speed threshold; in this way, the winding speed V of the reel mechanism is R and / or the rotation speed V of the coating roller p There is room for adjustment to readjust the substrate speed value to V r1 ≤V r ≤V r2 , thereby preventing the reel mechanism or coating roller from running too fast or too slow, causing damage to the substrate.

[0115] In the embodiment of the present disclosure, if the winding speed V of the reel mechanism is R Meet the preset winding speed threshold and the rotation speed V of the coating roller p Satisfy the preset rotation speed threshold and calculate the winding speed V of the reel mechanism R The rotation speed V of the coating roller p The second speed difference V △2 , thereby determining the second speed difference V △2 Whether the preset second speed difference is met. Here, if the second speed difference V △2If the value is smaller than the preset minimum value of the second speed difference, it indicates that the speed difference between the two is close. At this time, the tension of the substrate film layer may be changed, affecting the coating effect. Therefore, it is necessary to increase the winding speed V of the reel mechanism. R Or reduce the rotation speed V of the coating roller p , so that the speed difference between them becomes larger. That is, V △min2 ≤V △2 ≤V △max2 , so that the speed of the substrate and the tension of the film layer are stable, and the coating effect is improved.

[0116] Furthermore, if the second speed difference V △2 The maximum value of the second speed difference is greater than the preset value, indicating that the speed difference between the two is large. In this case, the substrate may be damaged. Therefore, it is necessary to reduce the winding speed V of the reel mechanism. R Or increase the rotation speed V of the coating roller p , so that the speed difference between them becomes smaller. That is, V △min2 ≤V △2 ≤V △max2 , so that the speed of the substrate and the tension of the film layer are stable, and the coating effect is improved.

[0117] In some embodiments, the unwinding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value, so that the tension of the substrate on the unwinding side can be effectively adjusted to stabilize the tension, thereby ensuring the coating effect. Here, it specifically includes: In N 1 <N min1 In the case of, reduce the unwinding torque N of the reel mechanism u Or increase the rotation torque N of the coating roller p , so that N min1 ≤N 1 ≤N max1 ; In N 1 >N max1 In the case of increasing the unwinding torque N of the reel mechanism u Or reduce the rotation torque N of the coating roller p , so that N min1 ≤N 1 ≤N max1 ; Among them, N 1 is the tension value of the substrate on the unwinding side, N min1 is the preset minimum unwinding tension, N max1 It is the preset maximum value of unwinding tension.

[0118] In the embodiment of the present disclosure, when the tension value of the substrate on the unwinding side is less than the preset minimum unwinding tension value, it indicates that the tension of the substrate on the unwinding side is too small, causing wrinkles, stacking, etc. Therefore, the unwinding torque of the reel mechanism can be reduced, or the rotation torque of the coating roller can be increased. In this way, the tension of the substrate on the unwinding side can be effectively increased so that its tension value meets N min1 ≤N 1 ≤N max1 , thereby improving the performance of the film.

[0119] In the embodiment of the present disclosure, when the tension value of the substrate on the unwinding side is greater than the preset maximum unwinding tension value, it indicates that the tension of the substrate on the unwinding side is too large, causing the film performance to decay. Therefore, the unwinding torque of the reel mechanism can be increased, or the rotation torque of the coating roller can be reduced. In this way, the tension of the substrate on the unwinding side can be effectively reduced, so that its tension value meets N min1 ≤N 1 ≤N max1 , thereby improving the performance of the film.

[0120] In some embodiments, the winding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value. In this way, the tension of the substrate on the winding side can be effectively adjusted to make the tension stable, thereby ensuring the coating effect. Here, it specifically includes: In N 2 <N min2 In the case of increasing the winding torque N of the reel mechanism R Or reduce the rotation torque N of the coating roller p , so that N min2 ≤N 2 ≤N max2 ; In N 2 >N max2 In the case of reducing the winding torque N of the reel mechanism R Or increase the rotation torque N of the coating roller p , so that N min2 ≤N 2 ≤N max2 ; Among them, N 2 is the tension value of the substrate on the winding side, N min2 is the preset minimum winding tension, N max2 It is the preset maximum value of winding tension.

[0121] In the disclosed embodiment, when the tension value of the winding side substrate is less than the preset minimum winding tension value, it indicates that the tension of the winding side substrate is too small, causing wrinkles, stacking, etc. Therefore, the winding torque of the reel mechanism can be increased, or the rotation torque of the coating roller can be reduced. In this way, the tension of the winding side substrate can be effectively increased so that its tension value meets Nmin2 ≤N 2 ≤N max2 , thereby improving the performance of the film.

[0122] In the embodiment of the present disclosure, when the tension value of the winding side substrate is greater than the preset maximum winding tension value, it indicates that the tension of the winding side substrate is too large, causing the film performance to decay. Therefore, the winding torque of the reel mechanism can be reduced, or the rotation torque of the coating roller can be increased. In this way, the tension of the winding side substrate can be effectively reduced so that its tension value meets N min2 ≤N 2 ≤N max2 , thereby improving the performance of the film.

[0123] In some embodiments, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller is in the range of 1:1.00001 to 1:1.1, that is, it can be selected from 1:1.00001 to 1:1.1 to prevent the substrate from moving too fast or too slow, and to prevent the tension from being too large or too small.

[0124] Optionally, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller can be 1:1.00001, 1:1.00002, 1:1.00004, 1:1.00006, 1:1.00008, 1:1.0001, 1:1.0002, 1:1.0004, 1:1.0006, 1:1.0008, 1:1.001, 1:1.002, 1:1.004, 1:1.006, 1:1.008, 1:1.01, 1:1.02, 1:1.04, 1:1.06, 1:1.08, 1:1.1, etc., without specific limitation here.

[0125] In some specific embodiments, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller is in the range of 1:1.0001 to 1:1.001. That is, it can be selected from 1:1.0001 to 1:1.001. No specific limitation is made here.

[0126] In some specific applications, the ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller is in a range of 1:1.0005 to 1:1.0002.

[0127] In some embodiments, the ratio of the linear speed of the coating roller to the linear speed of the winding mechanism is in the range of 1:1.00001 to 1:1.1, that is, it can be selected from 1:1.00001 to 1:1.1 to prevent the substrate from moving too fast or too slow, and to prevent the tension from being too large or too small.

[0128] Optionally, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism can be 1:1.00001, 1:1.00002, 1:1.00004, 1:1.00006, 1:1.00008, 1:1.0001, 1:1.0002, 1:1.0004, 1:1.0006, 1:1.0008, 1:1.001, 1:1.002, 1:1.004, 1:1.006, 1:1.008, 1:1.01, 1:1.02, 1:1.04, 1:1.06, 1:1.08, 1:1.1, etc., without specific limitation here.

[0129] In some specific embodiments, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism is in the range of 1:1.0001 to 1:1.001. That is, it can be selected from 1:1.0001 to 1:1.001. No specific limitation is made here.

[0130] In some specific applications, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism ranges from 1:1.0005 to 1:1.0002.

[0131] Combination Figure 8 As shown, the embodiment of the present disclosure also provides a control method for a coating device, comprising: S801, obtaining the speed value V of the substrate on the unwinding side within the set period b and the tension value of the substrate on the winding side N 1 ; S8021, in V b <V b1 or V b >V b2 In the case of , the rotation speed of the coating roller is adjusted so that the speed value V of the substrate on the unwinding side b Meet V b1 ≤V b ≤V b2 ; S8022, obtaining the rotation speed of the coating roller and the unwinding speed of the reel mechanism, and calculating the first speed difference V between the rotation speed of the coating roller and the unwinding speed of the reel mechanism △1 ; S8023, by adjusting the unwinding speed of the reel mechanism, so that the first speed difference satisfies V △min1 ≤V △1 ≤V △max1 ; Among them, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 is the preset maximum speed of the substrate on the unwinding side, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference; S803, in N 1 <N min1 or N 1 >N max1 In the case of adjusting the winding torque N of the reel mechanism u , so that the tension value of the substrate on the winding side is N 1 Satisfy N min1 ≤N 1 ≤N max1 ; Among them, N min1 is the preset minimum tension value, N max1 It is the preset maximum tension value.

[0132] In the embodiment of the present disclosure, in the large-scale winding coating equipment, a speed difference is set between the unwinding roller and the coating roller, which can provide tension and prevent the substrate from being scratched; the speed difference is used on the unwinding side and the tension value is used on the winding side for control, thereby achieving stable coating speed, stable film layer tension, and uniform coating. It can also prevent the problem of film layer attenuation in the late stage of coating due to the gradual increase of the reel on the winding side during the coating process.

[0133] Combination Fig. 9 As shown, an embodiment of the present disclosure provides a control device for a coating device, including a processor (processor) 900 and a memory (memory) 901. Optionally, the control device of the coating device may also include a communication interface (Communication Interface) 902 and a bus 903. Among them, the processor 900, the communication interface 902, and the memory 901 can communicate with each other through the bus 903. The communication interface 902 can be used for information transmission. The processor 900 can call the logic instructions in the memory 901 to execute the control method of the coating device of the above embodiment.

[0134] In addition, the logic instructions in the memory 901 described above may be implemented in the form of software functional units and when sold or used as independent products, may be stored in a computer-readable storage medium.

[0135] The memory 901 is a computer-readable storage medium that can be used to store software programs and computer executable programs, such as program instructions / modules corresponding to the method in the embodiment of the present disclosure. The processor 100 executes functional applications and data processing by running the program instructions / modules stored in the memory 901, that is, realizing the control method of the coating device in the above embodiment.

[0136] The memory 901 may include a program storage area and a data storage area, wherein the program storage area may store an operating system and an application required for at least one function; the data storage area may store data created according to the use of the terminal device, etc. In addition, the memory 901 may include a high-speed random access memory and may also include a non-volatile memory.

[0137] The disclosed embodiments further provide a coating device, comprising: a coating device body; and a control device for the coating device as described in the aforementioned embodiments, installed on the coating device body.

[0138] In the disclosed embodiment, the control device of the coating device is installed on the coating device body. The installation relationship described here is not limited to placement inside the product body, but also includes installation connections with other components of the coating device, including but not limited to physical connection, electrical connection or signal transmission connection, etc. It can be understood by those skilled in the art that the control device of the coating device can be adapted to a feasible coating device body, thereby realizing other feasible embodiments.

[0139] The embodiments of the present disclosure further provide a computer-readable storage medium storing program instructions, which, when executed, are used to enable a computer to execute the control method of the coating equipment as described in the aforementioned embodiments.

[0140] The technical solution of the embodiment of the present disclosure can be embodied in the form of a software product, which is stored in a storage medium and includes one or more instructions for enabling a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in the embodiment of the present disclosure. The aforementioned storage medium may be a non-transient storage medium, such as: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a disk or an optical disk, and other media that can store program codes.

[0141] The above description and the accompanying drawings fully illustrate the embodiments of the present disclosure so that those skilled in the art can practice them. Other embodiments may include structural, logical, electrical, process and other changes. The embodiments represent only possible changes. Unless explicitly required, separate components and functions are optional, and the order of operations may vary. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. Moreover, the words used in this application are only used to describe the embodiments and are not used to limit the claims. As used in the description of the embodiments and the claims, unless the context clearly indicates, the singular forms of "a", "an" and "the" are intended to include plural forms as well. Similarly, the term "and / or" as used in this application refers to any and all possible combinations of one or more associated listings. In addition, when used in this application, the term "comprise" and its variations "comprises" and / or comprising refer to the presence of stated features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or groups thereof. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the presence of other identical elements in the process, method or device including the elements. In this article, each embodiment may focus on the differences from other embodiments, and the same and similar parts between the embodiments may refer to each other. For the methods, products, etc. disclosed in the embodiments, if they correspond to the method part disclosed in the embodiments, then the relevant parts can refer to the description of the method part.

[0142] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software may depend on the specific application and design constraints of the technical solution. The technicians may use different methods for each specific application to implement the described functions, but such implementations should not be considered to exceed the scope of the embodiments of the present disclosure. The technicians may clearly understand that, for the convenience and simplicity of description, the specific working processes of the systems, devices and units described above may refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here.

[0143] In the embodiments disclosed herein, the disclosed methods and products (including but not limited to devices, equipment, etc.) can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units can be only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between each other shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms. The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to implement this embodiment. In addition, each functional unit in the embodiment of the present disclosure may be integrated in a processing unit, or each unit may exist physically separately, or two or more units may be integrated in one unit.

[0144] The flowchart and block diagram in the accompanying drawings show the possible architecture, function and operation of the system, method and computer program product according to the embodiment of the present disclosure. In this regard, each box in the flowchart or block diagram can represent a module, a program segment or a part of the code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. In some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, which can depend on the functions involved. In the description corresponding to the flowchart and the block diagram in the accompanying drawings, the operations or steps corresponding to different boxes can also occur in a different order from the order disclosed in the description, and sometimes there is no specific order between different operations or steps. For example, two consecutive operations or steps can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, which can depend on the functions involved. Each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, may be implemented by a dedicated hardware-based system that performs the specified functions or actions, or may be implemented by a combination of dedicated hardware and computer instructions.

Claims

1. A coating device, characterized in that: include: A reel mechanism for unwinding and rewinding the substrate; A detection mechanism is arranged on the reel mechanism; It can detect the moving speed of the substrate on one side of the unwinding side and the winding side, and the tension of the substrate on the other side of the unwinding side and the winding side; The coating mechanism includes a coating roller, which is used to be arranged on the moving path of the substrate so that the substrate can be coated; The control mechanism controls the unwinding speed or rewinding speed of the reel mechanism on the side detecting the moving speed of the substrate, and the rotation speed of the coating roller according to the detected speed value; and controls the unwinding torque or rewinding torque of the reel mechanism on the side detecting the tension of the substrate, and the rotation torque of the coating roller according to the detected tension value.

2. The coating device according to claim 1, characterized in that: The control mechanism controls the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the winding speed of the reel mechanism and the rotation speed of the coating roller according to the detected speed value; the control mechanism can also control the unwinding torque of the reel mechanism and the rotation torque of the coating roller, or the winding torque of the reel mechanism and the rotation torque of the coating roller according to the detected tension value.

3. The coating device according to claim 1, characterized in that: The reel mechanism includes: an unwinding roller, for releasing the substrate, wherein the substrate is pre-wound on the unwinding roller; A winding roller, used for winding the substrate; Testing agencies include: A speed detection roller is provided on the reel mechanism and is used to detect the speed value of the substrate on one of the unwinding side and the rewinding side; The tension detection roller is arranged on the reel mechanism and is used to detect the tension value of the substrate on the unwinding side and the other side of the rewinding side.

4. The coating device according to claim 3, characterized in that: When a speed detection roller is provided on the unwinding roller side, a tension detection roller is provided on the winding roller side; when a tension detection roller is provided on the unwinding roller side, a speed detection roller is provided on the winding roller side.

5. The coating device according to claim 3 or 4, characterized in that: The linear speed of the unwinding roller is lower than the linear speed of the coating roller, and the linear speed of the coating roller is lower than the linear speed of the winding roller.

6. The coating device according to claim 3 or 4, characterized in that: The unwinding torque of the unwinding roller is smaller than the rotational torque of the coating roller, and the rotational torque of the coating roller is smaller than the winding torque of the winding roller.

7. The coating device according to claim 3 or 4, characterized in that: The ratio of the linear speed of the unwinding roller to the linear speed of the coating roller ranges from 1:1.00001 to 1:1.1; or, the ratio of the linear speed of the coating roller to the linear speed of the winding roller ranges from 1:1.00001 to 1:1.

1.

8. The coating device according to claim 7, characterized in that: The ratio of the linear speed of the unwinding roller to the linear speed of the coating roller ranges from 1:1.0001 to 1:1.001; or, the ratio of the linear speed of the coating roller to the linear speed of the winding roller ranges from 1:1.0001 to 1:1.

001.

9. The coating device according to claim 3 or 4, characterized in that: The diameters of the unwinding roller and the winding roller are both smaller than the diameter of the coating roller.

10. The coating device according to any one of claims 1 to 4, characterized in that: The coating mechanism also includes: The coating assembly is arranged on one side of the coating roller; wherein, when the substrate moves, the non-coating surface of the substrate contacts the coating roller and the coating surface of the substrate faces the coating assembly.

11. The coating device according to claim 10, characterized in that: Also includes: The reversing mechanism is arranged on the side of the reel mechanism and / or the coating roller, and is used to contact the non-coated surface of the substrate so that the non-coated surface of the substrate contacts the coating roller and the coated surface of the substrate faces the coating assembly.

12. The coating device according to any one of claims 1 to 4, characterized in that: Also includes: The guide mechanism is arranged on the coating roller to ensure that the substrate contacts the coating roller stably.

13. The coating device according to any one of claims 1 to 4, characterized in that: Also includes: Clean room, the reel mechanism is arranged in the clean room; A coating room, wherein the coating mechanism is arranged in the coating room; The clean room and the coating room are vacuum isolated from each other by a gate valve assembly.

14. A control method for coating equipment, characterized in that: include: Acquire the speed value of the substrate on the unwinding side and the tension value of the substrate on the winding side, or the tension value of the substrate on the unwinding side and the speed value of the substrate on the winding side within a set period; Controlling the unwinding speed of the reel mechanism and the rotation speed of the coating roller, or the winding speed of the reel mechanism and the rotation speed of the coating roller according to the acquired speed value; The winding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value, or the unwinding torque of the reel mechanism and the rotation torque of the coating roller are controlled.

15. The control method of the coating equipment according to claim 14, characterized in that: The unwinding speed of the reel mechanism and the rotation speed of the coating roller are controlled according to the acquired speed value, including: In V b <V b1 In the case of increasing the unwinding speed V of the reel mechanism u and / or increase the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; In V b >V b2 In the case of, reduce the unwinding speed V of the reel mechanism u and / or reduce the rotation speed V of the coating roller p , so that V b1 ≤V b ≤V b2 ; Among them, V b is the speed value of the substrate on the unwinding side, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 It is the preset maximum speed value of the substrate on the unwinding side.

16. The control method of the coating equipment according to claim 15, characterized in that: The speed of the substrate on the unwinding side meets V b1 ≤V b ≤V b2 After that, it also includes: Get the unwinding speed V of the reel mechanism u and the rotation speed V of the coating roller p , and calculate the rotation speed V of the coating roller p The unwinding speed V of the reel mechanism u The first speed difference V △1 ; In V △1 <V △min1 In the case of, reduce the unwinding speed V of the reel mechanism u Or increase the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; In V △1 >V △max1 In the case of increasing the unwinding speed V of the reel mechanism u Or reduce the rotation speed V of the coating roller p , so that V △min1 ≤V △1 ≤V △max1 ; Among them, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference.

17. The control method of the coating equipment according to claim 14, characterized in that: The reeling speed of the reel mechanism and the rotation speed of the coating roller are controlled according to the acquired speed value, including: In V r <V r1 In the case of increasing the winding speed V of the reel mechanism R and / or increase the rotation speed V of the coating roller p , so that V r1 ≤V r ≤V r2 ; In V r >V r2 In the case of, reduce the winding speed V of the reel mechanism R and / or reduce the rotation speed V of the coating roller p , so that V r1 ≤V r ≤V r2 ; Among them, V r is the speed value of the winding side substrate, Vr1 is the preset minimum speed value of the winding side substrate; V r2 It is the preset maximum speed value of the substrate on the winding side.

18. The control method of the coating equipment according to claim 17, characterized in that: The speed of the substrate on the winding side meets V r1 ≤V r ≤V r2 After that, it also includes: Get the reeling speed V of the reel mechanism R and the rotation speed V of the coating roller p , and calculate the winding speed V of the reel mechanism R The rotation speed V of the coating roller p The second speed difference V △2 ; In V △2 <V △min2 In the case of increasing the winding speed V of the reel mechanism R Or reduce the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; In V △2 >V △max2 In the case of, reduce the winding speed V of the reel mechanism R Or increase the rotation speed V of the coating roller p , so that V △min2 ≤V △2 ≤V △max2 ; Among them, V △min2 is the minimum value of the preset second speed difference, V △max2 is the maximum value of the preset second speed difference.

19. The control method of the coating equipment according to any one of claims 14 to 18, characterized in that: The unwinding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value, including: When N1<N min1 In the case of, reduce the unwinding torque N of the reel mechanism u Or increase the rotation torque N of the coating roller p , so that N min1 ≤N1≤N max1 ; When N1>N max1 In the case of increasing the unwinding torque N of the reel mechanism u Or reduce the rotation torque N of the coating roller p , so that N min1 ≤N1≤N max1 ; Where N1 is the tension value of the substrate on the unwinding side, N min1 is the preset minimum unwinding tension, N max1 It is the preset maximum value of unwinding tension.

20. The control method of the coating equipment according to any one of claims 14 to 18, characterized in that: The winding torque of the reel mechanism and the rotation torque of the coating roller are controlled according to the obtained tension value, including: When N2<N min2 In the case of increasing the winding torque N of the reel mechanism R Or reduce the rotation torque N of the coating roller p , so that N min2 ≤N2≤N max2 ; When N2>N max2 In the case of reducing the winding torque N of the reel mechanism R Or increase the rotation torque N of the coating roller p , so that N min2 ≤N2≤N max2 ; Where N2 is the tension value of the substrate on the winding side, N min2 is the preset minimum winding tension, N max2 It is the preset maximum winding tension.

21. The control method of the coating equipment according to any one of claims 14 to 18, characterized in that: The ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller is in the range of 1:1.00001 to 1:1.1; or, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism is in the range of 1:1.00001 to 1:1.

1.

22. The control method of the coating equipment according to claim 21, characterized in that: The ratio of the unwinding linear speed of the reel mechanism to the linear speed of the coating roller is in the range of 1:1.0001 to 1:1.001; or, the ratio of the linear speed of the coating roller to the winding linear speed of the reel mechanism is in the range of 1:1.0001 to 1:1.

001.

23. A control method for coating equipment, characterized in that: include: Get the speed value V of the substrate on the unwinding side within the set cycle b and the tension value N1 of the substrate on the winding side; In V b <V b1 or V b >V b2 In the case of , the rotation speed of the coating roller is adjusted so that the speed value V of the substrate on the unwinding side b Meet V b1 ≤V b ≤V b2 ; Obtain the rotation speed of the coating roller and the unwinding speed of the reel mechanism, and calculate the first speed difference V between the rotation speed of the coating roller and the unwinding speed of the reel mechanism △1 ; By adjusting the unwinding speed of the reel mechanism, the first speed difference satisfies V △min1 ≤V △1 ≤V △max1 ; Among them, V b1 V is the preset minimum speed value of the substrate on the unwinding side; b2 is the preset maximum speed of the substrate on the unwinding side, V △min1 is the minimum value of the preset first speed difference, V △max1 is the maximum value of the preset first speed difference; When N1<N min1 or N1>N max1 In the case of adjusting the winding torque N of the reel mechanism u , so that the tension value N1 of the substrate on the winding side satisfies N min1 ≤N1≤N max1 ; Among them, N min1 is the preset minimum tension value, N max1 It is the preset maximum tension value.

24. A control device for a coating device, comprising a processor and a memory storing program instructions, characterized in that: The processor is configured to execute the control method of the coating equipment as described in any one of claims 14 to 22, or the control method of the coating equipment as described in claim 23 when running the program instructions.

25. A coating device, characterized in that: include: Coating equipment body; The control device of the coating equipment as described in claim 24 is installed on the coating equipment body.

26. A computer-readable storage medium storing program instructions, characterized in that: When the program instructions are executed, the computer is used to execute the control method of the coating equipment as described in any one of claims 14 to 22, or the control method of the coating equipment as described in claim 23.

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