Piping and equipment

Abstract

The utility model provides a pipeline and equipment, relates to equipment pipeline cleaning technical field, and the pipeline includes: medium pipeline, cleaning pipeline and first stop device, the cleaning pipeline includes first cleaning inlet pipe, cleaning outlet pipe and second cleaning inlet pipe, one end of first cleaning inlet pipe is connected on medium outlet pipe, one end of second cleaning inlet pipe is connected on medium inlet pipe, the other end of first cleaning inlet pipe and the other end of second cleaning inlet pipe are all cleaning medium entrance, and first stop device distributes on medium inlet pipe, medium outlet pipe and cleaning outlet pipe, is used for cutting off medium inlet pipe, medium outlet pipe and cleaning outlet pipe in the state that first cleaning inlet pipe and second cleaning inlet pipe pass into medium to functional device, the utility model changes the path of cleaning medium flow through pipeline design, thereby can bidirectional cleaning to the functional device of needing to wash, improves the flow and cleaning efficiency of cleaning medium.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of equipment pipeline cleaning, and in particular to a pipeline and equipment. BACKGROUND

[0002] In the gas transmission process of semiconductor equipment, etc., including gas box, precursor box and downstream transmission pipeline, etc., the residual gas in the transmission pipeline reacts with each other or with the pipe wall, which will produce a certain amount of particulate matter. The semiconductor equipment will periodically clean the transmission pipeline with a large flow of cleaning gas during the process gap. The flow and feeding mode of the cleaning gas will affect the frequency and time of pipeline cleaning, thereby affecting the production efficiency of the semiconductor equipment.

[0003] The existing cleaning method is to set a cleaning pipeline to clean the pipeline by inputting cleaning gas. The cleaning gas is discharged through the pipeline and device to be cleaned, and the gas flow and flow rate are limited, and the overall pipeline cleaning efficiency is not high. SUMMARY

[0004] The present application provides a pipeline and equipment, which can improve the cleaning pressure, increase the discharge pressure difference, and improve the cleaning efficiency and cleaning effect by entering the cleaning medium in both directions.

[0005] In a first aspect, the present application provides a pipeline, comprising:

[0006] A medium pipeline comprising a medium inlet pipe and a medium outlet pipe, and a functional device connected between the medium inlet pipe and the medium outlet pipe;

[0007] A cleaning pipeline comprising a first cleaning inlet pipe, a cleaning outlet pipe and a second cleaning inlet pipe, one end of the first cleaning inlet pipe being connected to the medium outlet pipe, one end of the second cleaning inlet pipe being connected to the medium inlet pipe, the other end of the first cleaning inlet pipe and the other end of the second cleaning inlet pipe both being a cleaning medium inlet, the first cleaning inlet pipe, the second cleaning inlet pipe, the medium inlet pipe and the medium outlet pipe being connected to form a cleaning passage, and the cleaning outlet pipe being connected to the cleaning passage;

[0008] A first stop device distributed on the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe, for stopping the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe when the first cleaning inlet pipe and the second cleaning inlet pipe are used to input the medium into the functional device.

[0009] The cleaning medium can enter the functional device from both sides of the functional device in the pipeline, bidirectional cleaning of the functional device can be performed, and the two-side entry can more quickly increase the pressure in the functional device. The pipeline is designed to change the path of the cleaning medium flow, so that bidirectional cleaning of the functional device to be cleaned can be performed, the flow of the cleaning medium is increased, and the cleaning efficiency is improved.

[0010] After the cleaning medium enters the cleaning from two directions of the functional device and reaches a certain pressure difference, the cleaning outlet is opened and is in a flow-through state, the pressure of the cleaning medium filled near the functional device is greater than the pressure at the cleaning medium outlet, under the action of the pressure difference, the cleaning gas flows into the cleaning outlet, and is finally discharged from the cleaning medium outlet. Moreover, the bidirectional blowing of the cleaning medium makes the pressure of the cleaning medium in the functional device relatively large, the pressure difference between the cleaning medium in the functional device and the pressure at the cleaning medium outlet is large, the outflow speed of the cleaning medium from the functional device to the cleaning medium outlet is increased, the washing capacity of the cleaning medium to the inner wall of the functional device and the medium pipeline is stronger, the cleaning efficiency is improved, and the cleaning effect is also improved.

[0011] In a possible implementation, the pipeline further includes a second cutoff device, which is located on the first cleaning inlet pipe and / or the second cleaning inlet pipe and used to cut off the first cleaning inlet pipe and the second cleaning inlet pipe. The second medium device can control the flow-through of the medium pipeline, and the two pipe end openings of the pipeline are opened when the pipeline conveys the process medium and are cut off when the pipeline is cleaned.

[0012] In a possible implementation, one end of the second cleaning inlet pipe and the medium inlet pipe are connected through a first three-way valve, the first three-way valve includes a first cutoff valve port directly connected with the second cleaning inlet pipe, and the second cutoff device includes the first cutoff valve port. The first three-way valve is used as a three-way connection between the second cleaning inlet pipe and the medium inlet pipe, and simultaneously functions as the cutoff control of the second cleaning inlet pipe.

[0013] In a possible implementation, one end of the first cleaning inlet pipe and the medium outlet pipe are connected through a second three-way valve, the second three-way valve includes a second cutoff valve port directly connected with the second cleaning inlet pipe, and the second cutoff device includes the second cutoff valve port. The second three-way valve is used as a three-way connection between the first cleaning inlet pipe and the medium outlet pipe, and simultaneously functions as the cutoff control of the first cleaning inlet pipe.

[0014] In a possible implementation, one end of the cleaning outlet pipe and the medium outlet pipe are connected through a third three-way valve, the third three-way valve includes a third cutoff valve port directly connected with the cleaning outlet pipe, and the first cutoff device includes the third cutoff valve port. The third three-way valve is used as a three-way connection between the cleaning outlet pipe and the medium outlet pipe, and simultaneously functions as the cutoff control of the cleaning outlet pipe.

[0015] In a possible implementation, the first cutoff device comprises a first cutoff valve located on the medium inlet pipe; and / or, a second cutoff valve located on the medium outlet pipe. The first cutoff valve and the second cutoff valve can respectively cut off the medium inlet pipe and the medium outlet pipe to prevent the cleaning medium from entering the front end and the rear end of the pipeline during the cleaning operation.

[0016] In a possible implementation, the medium inlet ends of the first cleaning inlet pipe and the second cleaning inlet pipe are connected into one cleaning medium inlet. Only one cleaning medium input device can be provided to supply cleaning medium to multiple cleaning inlet pipes.

[0017] In a possible implementation, the pipeline comprises multiple medium pipelines, each of which comprises the medium inlet pipe, the functional device and the medium outlet pipe connected in series. Multiple medium pipelines can transport multiple process media, improving the efficiency and diversity of medium transportation.

[0018] In a possible implementation, the pipeline comprises multiple medium inlet pipes and multiple process medium inlets located at one end of the medium inlet pipes, and the second cleaning inlet pipe has multiple interfaces connected to the multiple medium inlet pipes one by one, for supplying medium to each of the medium inlet pipes. The second cleaning inlet pipe can be used to supply cleaning medium to multiple medium inlet pipes.

[0019] In a possible implementation, the pipeline comprises multiple medium outlet pipes, and the first cleaning inlet pipe has multiple first cleaning inlet pipes connected to the multiple medium outlet pipes at one end, for supplying medium to each of the medium outlet pipes.

[0020] In a possible implementation, the multiple medium outlet pipes are divided into first medium outlet pipes and second medium outlet pipes, the medium outlet end of the second medium outlet pipe is connected to the first medium outlet pipe, and the process medium outlet of the multiple medium pipelines is the medium outlet end of the first medium outlet pipe.

[0021] The first medium outlet pipe has multiple first medium outlet pipes, and the cleaning outlet pipe comprises multiple cleaning sub-outlet pipes, one end of the multiple cleaning sub-outlet pipes and the cleaning passage formed by the multiple first medium outlet pipes are connected in communication. Each cleaning sub-outlet pipe corresponds to the cleaning passage formed by the first medium outlet pipe, and the cleaning medium in each cleaning passage has been discharged.

[0022] In a possible implementation, the first medium outlet pipe has multiple first medium outlet pipes, and the first cleaning inlet pipe has multiple first cleaning inlet pipes, the multiple first cleaning inlet pipes and the multiple first medium outlet pipes are connected one by one, to supply cleaning medium to the functional device on one side of each first medium outlet pipe.

[0023] In a possible implementation, the pipeline further comprises a negative pressure device, and the negative pressure device is connected to one end of the medium outlet of the cleaning outlet pipe. The negative pressure device can draw the cleaning medium in the cleaning outlet pipe when the first stop device on the cleaning outlet pipe is closed.

[0024] In a possible implementation, a one-way valve is arranged on the first cleaning inlet pipe and / or the second cleaning inlet pipe. The one-way valve controls the cleaning medium to flow from the cleaning medium inlet to the medium inlet pipe and the medium outlet pipe, and prevents backflow.

[0025] In a possible implementation, a filter is arranged on the first cleaning inlet pipe and / or the second cleaning inlet pipe. The filter is arranged on one side of the one-way valve. The filter can filter the cleaning medium in the cleaning inlet pipe, and prevent impurities from polluting the functional device and the corresponding pipeline.

[0026] In a possible implementation, a pressure gauge and a pressure regulating valve are arranged on the first cleaning inlet pipe and / or the second cleaning inlet pipe. The pressure gauge and the pressure regulating valve are arranged on one side of the medium inlet of the one-way valve, and the pressure regulating valve is arranged on one side of the medium inlet of the pressure gauge. The pressure gauge is used to display the pressure value of the cleaning medium in the cleaning inlet pipe. The pressure regulating valve is used to adjust the pressure value of the cleaning medium in the cleaning inlet pipe, so that the cleaning inlet pipe does not enter the pipeline where the functional device is located under a high pressure, and the cleaning medium does not damage the functional device due to a large impact on the functional device.

[0027] In a second aspect, the present application provides a device comprising a distribution chamber and the pipeline described in any one of the above aspects. One end of the medium inlet of the pipeline is connected to the distribution chamber. The device in this embodiment and the pipeline in the above embodiments have similar beneficial effects. Details are not described herein. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 FIG. 1 is a schematic diagram of the flow of process medium in the pipeline provided by the embodiments of the present application;

[0029] Figure 2 FIG. 3 is a schematic diagram of the flow of cleaning medium in the pipeline provided by the embodiments of the present application;

[0030] Figure 3 FIG. 5 is a schematic diagram of the flow of cleaning medium in the pipeline provided by the embodiments of the present application;

[0031] Figure 4 FIG. 7 is a schematic diagram of the connection of multiple medium pipelines provided by the embodiments of the present application; Figure 1

[0032] Figure 5 FIG. 9 is a schematic diagram of the connection of multiple medium pipelines provided by the embodiments of the present application; Figure 2 ​​

[0033] Figure 6 is a connection diagram of multiple media lines provided by the embodiment of the present application Figure 3 ;

[0034] Figure 7 is a connection diagram of multiple media lines provided by the embodiment of the present application Figure 4 ;

[0035] Figure 8 is a connection diagram of multiple media lines provided by the embodiment of the present application Figure 5 ;

[0036] Figure 9 is a connection diagram of multiple media lines provided by the embodiment of the present application Figure 6 ;

[0037] Figure 10 is a schematic diagram of a negative pressure device provided by the embodiment of the present application

[0038] Figure 11 is a schematic diagram of a pressure stabilizing valve, a one-way valve, a pressure gauge and a pressure regulating valve provided by the embodiment of the present application

[0039] Figure 12 is a schematic diagram of a device provided by the embodiment of the present application

[0040] Explanation of reference signs:

[0041] 100 - media line; 110 - media inlet line; 120 - media outlet line; 121 - first media outlet line; 122 - second media outlet line; 130 - functional device

[0042] 110a - process medium inlet; 120a - process medium outlet; 120b - collection point

[0043] 200 - cleaning line; 210 - first cleaning inlet line; 213 - one-way valve; 214 - filter; 215 - pressure gauge; 216 - pressure regulating valve; 217 - hand valve; 220 - cleaning outlet line; 221 - first cleaning sub-outlet line; 222 - second cleaning sub-outlet line; 230 - second cleaning inlet line

[0044] 210a - cleaning medium inlet; 220a - cleaning medium outlet

[0045] 300 - first three-way valve; 310 - first shut-off valve port; 320 - first valve port; 330 - second valve port

[0046] 400 - second three-way valve; 410 - second shut-off valve port; 420 - third valve port; 430 - fourth valve port

[0047] 500 - third three-way valve; 510 - third shut-off valve port; 520 - fifth valve port; 530 - sixth valve port;

[0048] 600 - first shut-off valve;

[0049] 700 - second shut-off valve; 710 - third shut-off valve;

[0050] 800 - negative pressure device;

[0051] 900 - distribution chamber; 910 - distribution cavity. DETAILED DESCRIPTION

[0052] The embodiments of the present application will be described below with reference to the accompanying drawings.

[0053] For the convenience of understanding, the English abbreviations and related technical terms involved in the embodiments of the present application will be explained and described below.

[0054] It should be clear that the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0055] The terms used in the embodiments of the present application are only for the purpose of describing the specific embodiments, and are not intended to limit the present application. The singular forms "a", "an" and "the" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0056] It should be understood that the term "and / or" used herein only describes the same field of associated objects, which means that there can be three relationships, for example, A and / or B can represent: A exists alone, A and B exist together, and B exists alone. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0057] Depending on the context, the word "if" as used herein can be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting". Similarly, depending on the context, the phrase "if it is determined" or "if (a stated condition or event) is detected" can be interpreted as "when it is determined" or "in response to determining" or "when (a stated condition or event) is detected" or "in response to detecting (a stated condition or event)".

[0058] It should be understood that "first", "second", etc. used in the present application are only for the purpose of distinguishing the description, and cannot be understood as indicating or implying relative importance, nor can it be understood as indicating or implying order.

[0059] In the description of the present application, the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0060] As used herein, "in the range of", unless otherwise indicated or limited, includes both ends of the range by default, for example, in the range of 1 to 5, including both 1 and 5.

[0061] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixed connection, it can also be detachable connection, it can also be in contact connection or integral connection; for those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0062] The present application provides a pipeline, referring to Figure 1 , Figure 1 A schematic diagram of a pipeline in the present application is shown. The pipeline includes a medium pipeline 100 and a cleaning pipeline 200. Among them, the medium pipeline 100 includes a medium inlet pipe 110 and a medium outlet pipe 120, and the medium inlet pipe 110 and the medium outlet pipe 120 are connected to the functional device 130.

[0063] In an embodiment, the functional device 130 can be a device with certain functions in the process reaction process, such as gas mass flow meter, liquid mass flow meter, diaphragm valve or pressure sensor, etc.

[0064] Referring to Figure 1 , Figure 1 The solid black arrow in the figure indicates the flow direction of the process medium participating in the reaction in the pipeline in the present application. The process medium can be gas, liquid, gas-liquid mixture, gas-solid mixture, liquid-solid mixture or gas-liquid-solid mixture, etc., which is subject to the actual situation of the reaction. Process medium refers to the medium that needs to flow in the pipeline in the process, which can be a reaction medium.

[0065] The end of the medium inlet pipe 110 can be a process medium inlet 110a of the pipe, and the process medium enters the medium inlet pipe 110 from the process medium inlet 110a, passes through the functional device 130, and finally passes through the medium outlet pipe 120, and is discharged from the process medium outlet 120a at the end of the medium outlet pipe 120. It should be noted that the rear end of the medium outlet pipe 120 can also be connected to other pipes or reaction devices.

[0066] The pipe described in the present application can also include a pipe connected to the front end of the process medium inlet 110a and / or a pipe connected to the rear end of the process medium outlet 120a, both of which are within the scope of the pipe defined in the present application.

[0067] The cleaning pipe 200 includes a first cleaning inlet pipe 210, a cleaning outlet pipe 220, and a second cleaning inlet pipe 230. The end of the second cleaning inlet pipe 230 can be connected to the first cleaning inlet pipe 210, specifically through a tee pipe. Alternatively, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are two separate cleaning inlet pipes, and each has a cleaning medium inlet 210a. The present application takes the end of the second cleaning inlet pipe 230 connected to the first cleaning inlet pipe 210 as an example, and the medium inlet ends of the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are combined into a cleaning medium inlet 210a. The end of the first cleaning inlet pipe 210 can be the cleaning medium inlet 210a, the end of the cleaning outlet pipe 220 can be the cleaning medium outlet 220a, and the cleaning medium can enter the cleaning pipe 200 from the cleaning medium inlet 210a and be discharged from the cleaning medium outlet 220a.

[0068] Referring to Figure 2 As shown, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can enter the medium pipe in which the functional device 130 is located from both sides of the functional device 130. The first cleaning inlet pipe 210, the second cleaning inlet pipe 230, the medium inlet pipe 110, and the medium outlet pipe 120 are connected to form a cleaning passage. The cleaning passage refers to the part of the pipe filled with cleaning medium after the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are filled with cleaning medium. The end of the cleaning outlet pipe 220 is connected to the cleaning passage, and the other end of the cleaning outlet pipe 220 is the cleaning medium outlet 220a, so that when the pressure of the cleaning medium in the cleaning passage reaches a certain pressure, the cleaning medium in the cleaning passage is discharged. The present application takes the cleaning outlet pipe 220 connected to the medium outlet pipe 120 as an example for description.

[0069] The pipeline in the application is also provided with first stop devices, which are distributed on the medium inlet pipe 110, the medium outlet pipe 120 and the cleaning outlet pipe 220. Among them, the first stop device distributed on the medium inlet pipe 110 is located on the side of the process medium inlet 110a of the connection point of the second cleaning inlet pipe 230 and the medium inlet pipe 110; the first stop device distributed on the medium outlet pipe 120 is located on the side of the process medium outlet 120a of the connection point of the cleaning outlet pipe 220 and the medium outlet pipe 120; and the first stop device distributed on the cleaning outlet pipe 220 can be located at any position of the cleaning outlet pipe 220, including the end of the cleaning outlet pipe 220 connected with the medium outlet pipe 120.

[0070] When the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are connected with the cleaning medium, the first stop devices cut off the medium inlet pipe 110, the medium outlet pipe 120 and the cleaning outlet pipe 220, at this time, the cleaning channel is gradually connected with the cleaning medium, and the pressure of the cleaning medium inside the cleaning channel gradually increases. When the pressure of the cleaning medium gradually increases, the first stop device on the cleaning outlet pipe 220 can be opened, and the cleaning outlet pipe 220 is in a flow-through state to discharge the cleaning medium in the cleaning channel.

[0071] The cleaning medium can enter the functional device 130 from both sides of the functional device 130 in the pipeline, and the functional device 130 can be bidirectionally cleaned, and the bilateral entry can more quickly increase the pressure in the functional device 130. The application changes the path of the cleaning medium flow by pipeline design, so that the functional device 130 to be cleaned can be bidirectionally cleaned, and the flow and cleaning efficiency of the cleaning medium are improved.

[0072] After the cleaning medium enters the cleaning from two directions of the functional device 130 and reaches a certain pressure difference, the cleaning outlet pipe 220 is opened and in a flow-through state, the pressure of the cleaning medium near the functional device 130 is greater than the pressure at the cleaning medium outlet 220a, under the action of the pressure difference, the cleaning gas flows into the cleaning outlet pipe 220, and is finally discharged from the cleaning medium outlet 220a. Moreover, the bidirectional blowing of the cleaning medium makes the pressure of the cleaning medium in the functional device 130 relatively large, the pressure difference between the cleaning medium in the functional device 130 and the pressure at the cleaning medium outlet 220a is large, the outflow speed of the cleaning medium from the functional device 130 to the cleaning medium outlet 220a is improved, the cleaning medium has stronger washing capacity for the inner wall of the functional device 130 and the medium pipeline 100, the cleaning efficiency is improved, and the cleaning effect is also improved.

[0073] In some possible embodiments, a second stop device is further arranged on the pipeline. The second stop device can be arranged on the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230. When the cleaning operation ends, the second stop device can stop the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230, and the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 stop supplying the cleaning medium to the functional device 130. At this time, the first stop device located on the cleaning outlet pipe 220 can remain in the stop state, and the first stop device located on the medium inlet pipe 110 and the medium outlet pipe 120 can be closed to be in the flow-through state. The cleaning operation ends, the medium pipeline 100 is connected, and the process medium can be input to the rear-end equipment.

[0074] In an embodiment, the second stop device can be arranged only on the first cleaning inlet pipe 210. The second stop device is arranged on the first cleaning inlet pipe 210 between the cleaning medium inlet 210a and the second cleaning inlet pipe 230. After the second stop device is opened, the cleaning medium cannot enter the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 in the rear section.

[0075] In an embodiment, referring to FIG. 1, Figures 1-3 As shown in FIG. 1, a first three-way valve 300 is further arranged on the pipeline. The first three-way valve 300 is connected to the medium inlet pipe 110, and the second cleaning inlet pipe 230 is connected to the medium inlet pipe 110 through the first three-way valve 300. The first three-way valve 300 can include three valve ports, i.e., a first valve port 320, a second valve port 330, and a first stop valve port 310. The first three-way valve 300 is connected to the medium inlet pipe 110 through the first valve port 320 and the second valve port 330. When the first valve port 320 and the second valve port 330 connected to the medium inlet pipe 110 are in the connected state, the process medium can pass through the first three-way valve 300 and flow through the medium inlet pipe 110.

[0076] The first stop valve port 310 is connected to the end of the second cleaning inlet pipe 230 for connecting to the medium inlet pipe 110. The first stop valve port 310 can be in the stop state when the medium does not need to flow through, and can be switched to the flow-through state when the medium needs to flow through.

[0077] In the embodiment, the first valve port 320 and the second valve port 330 of the first three-way valve 300, which are other than the first stop valve port 310, can be always-open valve ports. The always-open valve ports always remain in the flow-through state and can not have the stop function.

[0078] The second stop device located on the second cleaning inlet pipe 230 can include the first stop valve port 310, which can stop the second cleaning inlet pipe 230 when the cleaning operation ends, and the second cleaning inlet pipe 230 stops supplying the cleaning medium to the medium inlet pipe.

[0079] Alternatively, the first valve port 320 can be a valve port with a shut-off function, and the shut-off functions of the first valve port 320 and the first shut-off valve port 310 can be independently controlled. The first shut-off device located on the medium inlet pipe 110 can include the first valve port 320 with a shut-off function.

[0080] In an embodiment, referring to Figures 1-3 As shown, a second three-way valve 400 is further provided on the pipeline, and the second three-way valve 400 is communicated on the medium outlet pipe 120. Similar to the first three-way valve 300, the second three-way valve 400 can include three valve ports, which are a third valve port 420, a fourth valve port 430, and a second shut-off valve port 410. The second three-way valve 400 is communicated on the medium outlet pipe 120 through the third valve port 420 and the fourth valve port 430. When the third valve port 420 and the fourth valve port 430 that communicate the medium outlet pipe 120 are both in a communication state, the medium can pass through the second three-way valve 400 and flow in the medium outlet pipe 120.

[0081] Among the three valve ports of the second three-way valve 400, one is the second shut-off valve port 410, and the second shut-off valve port 410 is communicated with one end of the first cleaning inlet pipe 210. Specifically, the second shut-off valve port 410 is communicated with the end of the first cleaning inlet pipe 210 that is used to be connected with the medium outlet pipe 120. Among them, the second shut-off valve port 410 can be in a shut-off state when the medium does not need to flow, and can be switched to a flow state when the medium needs to flow.

[0082] In the embodiment, among the third valve port 420 and the fourth valve port 430 of the second three-way valve 400 other than the second shut-off valve port 410, the third valve port 420 and the fourth valve port 430 can both be always-open valve ports that always maintain a flow state and can not have a shut-off function.

[0083] In an embodiment, referring to Figures 1-3 As shown, a third three-way valve 500 is further provided on the pipeline, and the third three-way valve 500 is communicated on the medium outlet pipe 120 and located on the side of the second three-way valve 400 away from the functional device 130. Similar to the first three-way valve 300 and the second three-way valve 400, the third three-way valve 500 can include three valve ports, which are a fifth valve port 520, a sixth valve port 530, and a third shut-off valve port 510. The third three-way valve 500 is communicated on the medium outlet pipe 120 through the fifth valve port 520 and the sixth valve port 530. When the fifth valve port 520 and the sixth valve port 530 that communicate the medium outlet pipe 120 are both in a communication state, the medium can pass through the second three-way valve 400 and flow in the medium outlet pipe 120.

[0084] Among the three valve ports of the third three-way valve 500, one of them can be a third stop valve port 510, which is communicated with one end of the cleaning out pipe 220; specifically, the third stop valve port 510 is connected with the one end of the cleaning out pipe 220 for connecting the medium out pipe 120. Among them, the third stop valve port 510 can be in a stop state when the medium is not needed to flow, and can be switched to a flow state when the medium is needed to flow.

[0085] In this embodiment, among the two valve ports of the third three-way valve 500 other than the third stop valve port 510, the fifth valve port 520 and the sixth valve port 530 can be always-open valve ports, which always maintain a flow state and can not have a stop function.

[0086] Alternatively, the sixth valve port 530 can be a valve port with a stop function, and the stop functions of the sixth valve port 530 and the third stop valve port 510 can be independently controlled. The first stop device located on the medium out pipe 120 can include the sixth valve port 530 with a stop function.

[0087] In an embodiment, a first stop valve 600 is further provided on the pipeline, the first stop valve 600 is arranged on the medium in pipe 110, and the first stop valve 600 is located on the side of the first three-way valve 300 away from the functional device 130. The process medium needs to pass through the first stop valve 600 first, and then sequentially enter the first three-way valve 300 and the functional device 130.

[0088] The first stop valve 600 has a stop function, and can be in a stop state when the medium is not needed to flow, and can be switched to a flow state when the medium is needed to flow. The first stop device located on the medium in pipe 110 can be the first stop valve 600, and the first stop valve 600 is located on the side of the second cleaning in pipe 230 facing the process medium inlet 110a.

[0089] In an embodiment, a second stop valve 700 is further provided on the pipeline, the second stop valve 700 is arranged on the medium out pipe 120, and the second stop valve 700 is located on the side of the third three-way valve 500 away from the functional device 130. The process medium flowing out from the process medium functional device 130, the second three-way valve 400 and the third three-way valve 500 needs to pass through the second stop valve 700 before being discharged from the process medium outlet 120a of the medium out pipe 120.

[0090] The second stop valve 700 has a stop function, and can be in a stop state when the medium is not needed to flow, and can be switched to a flow state when the medium is needed to flow. The second stop device located on the medium out pipe 120 can be the second stop valve 700, and the second stop valve 700 is located on the side of the third three-way valve 500 facing the process medium outlet 120a.

[0091] The pipeline described in the present application, when the process medium flows to carry out the corresponding reaction, referring to Figure 1 As shown in the figure, the first stop valve port 310, the second stop valve port 410 and the third stop valve port 510 can all be in the closed state, the first valve port 320, the second valve port 330, the third valve port 420, the fourth valve port 430, the fifth valve port 520 and the sixth valve port 530 can all be in the flow state, the first stop valve 600 and the second stop valve 700 are both in the flow state, and the cleaning medium inlet 210a does not flow into the cleaning medium; The process medium can enter the medium inlet pipe 110 from the process medium inlet 110a, and flow through the first stop valve 600, the first three-way valve 300, the functional device 130, the second three-way valve 400, the third three-way valve 500 and the second stop valve 700 in turn, and finally flow out of the medium outlet pipe 120 from the process medium outlet 120a.

[0092] It should be noted that in all the corresponding drawings of the present application, when the valve port of the valve is a blank triangle, it means that the valve port is in the flow state. When the valve port of the valve is a black filled triangle, it means that the valve port is in the closed state.

[0093] When the functional device 130 needs to be cleaned, referring to Figure 2 As shown in the figure, stop the process medium from entering from the process medium inlet 110a, close the first stop valve 600, and the first stop valve 600 stops the process medium from entering the functional device 130. The first valve port 320, the second valve port 330, the third valve port 420 and the fourth valve port 430 can be in the flow state, the first stop valve port 310 and the second stop valve port 410 can be in the flow state, and the third stop valve port 510 can be in the closed state. The cleaning medium can enter the first cleaning inlet pipe 210 from the cleaning medium inlet 210a and be divided at the second cleaning inlet pipe 230; a part of the cleaning medium can enter the first stop valve port 310 from the second cleaning inlet pipe 230 and enter the functional device 130 through the second valve port 330; a part of the cleaning medium can enter the second stop valve port 410 from the first cleaning inlet pipe 210 and enter the functional device 130 through the fourth valve port 430. The cleaning medium can enter the functional device 130 from both sides of the functional device 130 in the pipeline, and the functional device 130 can be bidirectionally cleaned, and the two-sided entry can faster improve the pressure in the functional device 130. The present application changes the path of the cleaning medium flow by pipeline design, so that the functional device 130 to be cleaned can be bidirectionally cleaned, and the flow and cleaning efficiency of the cleaning medium can be improved.

[0094] After the cleaning medium enters from both directions of the functional device 130 for cleaning and reaches a certain pressure, referring to Figure 3As shown, the first valve port 320, the second valve port 330, the third valve port 420 and the fourth valve port 430 can be in a flow state, the first stop valve port 310 and the second stop valve port 410 can be in a flow state, the third stop valve port 510 can be in a flow state, the pressure of the cleaning medium near the filling function device 130 is greater than the pressure at the cleaning medium outlet 220a, under the action of the pressure difference, the cleaning gas flows into the cleaning medium outlet 220, and is finally discharged by the cleaning medium outlet 220a. And, the bidirectional blowing of the cleaning medium makes the pressure of the cleaning medium in the function device 130 relatively large, the pressure difference between the pressure of the cleaning medium in the function device 130 and the pressure at the cleaning medium outlet 220a is large, the outflow speed of the cleaning medium from the function device 130 to the cleaning medium outlet 220a is improved, the cleaning ability of the cleaning medium to the inner wall of the function device 130 and the medium pipeline 100 is stronger, and the cleaning efficiency and the cleaning effect are improved.

[0095] In an embodiment, the inlet and outlet of the cleaning medium can be reciprocated multiple times to clean the function device 130 more thoroughly.

[0096] It should be noted that the function device 130 described in the embodiment can be a separate single device or a plurality of devices connected in series.

[0097] In a possible implementation, referring to Figure 4 As shown, the pipeline can include a plurality of medium pipelines 100, each of which includes a medium inlet pipe 110, a function device 130 and a medium outlet pipe 120 connected in communication.

[0098] Among them, referring to Figure 4 As shown, the embodiment takes three medium pipelines 100 as an example, and the three medium pipelines 100 have three medium inlet pipes 110, each of which has a process medium inlet 110a to form the pipeline structure of the three process medium inlets 110a in the embodiment, as shown. Figure 4

[0099] The process medium flowing into the three process medium inlets 110a can be different, so that three kinds of process medium can flow in at the same time. Alternatively, the three process medium inlets 110a can also flow in the same process medium.

[0100] In the embodiment, a first stop valve 600 is arranged on each of the three medium inlet pipes 110 to control whether the medium flows in each of the medium inlet pipes 110.

[0101] ​​In this embodiment, the second cleaning inlet pipe 230 is further divided into 3 ports, which are respectively connected to the first shut-off valve port 310 of the first three-way valve 300 provided on the 3 media inlet pipes 110. The cleaning medium can enter the corresponding media inlet pipe 110 through the second cleaning inlet pipe 230.

[0102] In one embodiment, see [reference] Figure 5 As shown, in the multiple media pipelines 100, this embodiment takes 3 media pipelines 100 as an example. One end of the 3 media inlet pipes 110 can be converged into a process media inlet 110a to form a pipeline with only 1 process media inlet 110a.

[0103] In this embodiment, it can be as follows: Figure 5 As shown, each of the three medium inlet pipes 110 is equipped with a first shut-off valve 600. The first shut-off valve 600 on each medium inlet pipe 110 controls whether the medium flows through its respective medium inlet pipe 110.

[0104] In one embodiment, see [reference] Figure 6 As shown, a first shut-off valve 600 can be installed on the pipeline where the three medium inlet pipes 110 converge, so as to simultaneously control whether the medium flows in the three medium inlet pipes 110.

[0105] In one embodiment, see [reference] Figure 4 and Figure 5 As shown, the three media pipelines 100 have three media outlet pipes 120. The three media outlet pipes 120 converge to the process media outlet 120a of one of the media outlet pipes 120, and the process media in the three media outlet pipes 120 can be discharged from the process media outlet 120a.

[0106] See Figure 4 As shown, the three medium outlet pipes 120 can be divided into a first medium outlet pipe 121 and a second medium outlet pipe 122, with one end of the second medium outlet pipe 122 connected to the first medium outlet pipe 121. Specifically, the process medium outlet 120a of the medium pipeline 100 is the medium outlet end of the first medium outlet pipe 121. The two second medium outlet pipes 122 converge into the first medium outlet pipe 121, and the process medium can be discharged through the process medium outlet 120a of the first medium outlet pipe 121.

[0107] In this embodiment, a second shut-off valve 700 can be installed on the medium outlet pipe 120 between the convergence point 120b of the first medium outlet pipe 121 and the second medium outlet pipe 122. One second shut-off valve 700 can simultaneously control whether the medium in the three medium outlet pipes 120 flows out from the process medium outlet 120a.

[0108] In this embodiment, see Figure 4As shown, the convergence point 120b of the first medium outlet pipe 121 and the second medium outlet pipe 122 can be located on the pipeline between the functional device 130 and the second three-way valve 400. Alternatively, referring to Figure 5 As shown, the convergence point 120b can be located on the pipeline between the second three-way valve 400 and the third three-way valve 500. Alternatively, referring to Figure 6 As shown, the convergence point 120b can be located on the pipeline between the third three-way valve 500 and the second stop valve 700.

[0109] The third valve port 420 and the fourth valve port 430 of the second three-way valve 400 are both in a normally open state, and the fifth valve port 520 and the sixth valve port 530 of the third three-way valve 500 are both in a normally open state. The specific location of the convergence point 120b can be not limited when the convergence point 120b is kept between the functional device 130 and the second stop valve 700.

[0110] For example, referring to Figure 7 As shown, two second medium outlet pipes 122 converge into the first medium outlet pipe 121, and the three medium outlet pipes 120 can have two convergence points 120b. The convergence point 120b of the second medium outlet pipe 122 corresponding to the leftmost functional device 130 and the first medium outlet pipe 121 corresponding to the rightmost functional device 130 is located on the pipeline between the third three-way valve 500 and the second stop valve 700, and the convergence point 120b of the second medium outlet pipe 122 corresponding to the middle functional device 130 and the first medium outlet pipe 121 corresponding to the rightmost functional device 130 is located on the pipeline between the second three-way valve 400 and the third three-way valve 500.

[0111] Alternatively, the positions of the two convergence points 120b can be interchanged. The two convergence points 120b can be arranged on the pipeline between the functional device 130 and the second three-way valve 400, on the pipeline between the second three-way valve 400 and the third three-way valve 500, and on the pipeline between the third three-way valve 500 and the second stop valve 700.

[0112] In some embodiments, referring to Figure 8 As shown, the pipeline has a plurality of medium inlet pipes 110, for example Figure 8 As shown, the three medium inlet pipes 110, the three medium outlet pipes 120 converge into the process medium outlet 120a of one of the medium outlet pipes 120, and the process medium in the three medium outlet pipes 120 can be discharged from one process medium outlet 120a.

[0113] A second shut-off valve 700 can be installed on the media outlet 120 between the process medium outlet 120a and the confluence point 120b of the three media outlet pipes 120. This second shut-off valve 700 simultaneously controls whether the media in the three media outlet pipes 120 flows out of the process medium outlet 120a. When the second shut-off valve 700 is closed and the third shut-off valve port 510 of the third three-way valve 500 is open, the clean media in the three media outlet pipes 120 can be discharged from the media outlet pipes 120.

[0114] In one embodiment, each of the three media outlet pipes 120 is equipped with a third shut-off valve 710. Each third shut-off valve 710 can independently control whether the media flows through each media outlet pipe 120, thereby better controlling the flow of process media and cleaning media within each media outlet pipe 120. Different functional devices 130 can be cleaned with different cleaning media. The third shut-off valves 710 can prevent crosstalk between different cleaning media in multiple functional devices 130, causing secondary contamination. For example, some functional devices 130 require corrosion-resistant cleaning media, while others require oxidizing cleaning media. Oxidizing cleaning media cannot enter functional devices 130 that require corrosion resistance.

[0115] In one embodiment, a second three-way valve 400 and a third three-way valve 500 are connected to the first medium outlet pipe 121. The second shut-off valve port 410 of the second three-way valve 400 can be connected to one end of the first cleaning inlet pipe 210. The third shut-off valve port 510 of the third three-way valve 500 can be connected to one end of the cleaning outlet pipe 220.

[0116] In some possible implementations, see [reference] Figure 9 As shown, the pipeline may include multiple media pipelines 100, each of which includes a media inlet pipe 110, a functional device 130, and a media outlet pipe 120 that are connected to each other.

[0117] Among them, see Figure 9 As shown, this embodiment uses three media pipelines 100 as an example. Each of the three media pipelines 100 has three media inlet pipes 110, and each media inlet pipe 110 has a process media inlet 110a, forming the configuration described in this embodiment. Figure 4 The pipeline structure of the three process medium inlets 110a is shown.

[0118] The process media flowing into the three process media inlets 110a can all be different, allowing three different process media to flow in simultaneously. Alternatively, the same process media can flow into the three process media inlets 110a.

[0119] In this embodiment, each of the three medium inlet pipes 110 is provided with a first shut-off valve 600 to control whether medium flows in each medium inlet pipe 110.

[0120] In the embodiment, the medium outlet pipe 120 has multiple, and the embodiment takes three medium outlet pipes 120 as an example. The three medium outlet pipes 120 can be divided into a first medium outlet pipe 121 and a second medium outlet pipe 122. One end of the second medium outlet pipe 122 is communicated to the first medium outlet pipe 121. Specifically, the process medium outlet 120a of the medium pipeline 100 is the medium outlet end of the first medium outlet pipe 121. The two second medium outlet pipes 122 converge to the first medium outlet pipe 121, and the process medium can be discharged through the process medium outlet 120a of the first medium outlet pipe 121.

[0121] In the embodiment, the second cleaning inlet pipe 230 is further divided into three interfaces to be communicated with the first stop valve port 310 of the first three-way valve 300 arranged on the three medium inlet pipes 110, respectively. The cleaning medium can enter the corresponding medium inlet pipe 110 through the second cleaning inlet pipe 230.

[0122] In the embodiment, the first medium outlet pipe 121 has two, and the medium outlet end of the second medium outlet pipe 122 is connected to one of the first medium outlet pipes 121. The two first medium outlet pipes 121 have two process medium outlets 120a, so that the pipeline has two process medium outlets. The pipeline described in the application can transport reaction medium for two reaction walls in a semiconductor device.

[0123] In the embodiment, the number of the first cleaning inlet pipe 210 can be the same as the number of the first medium outlet pipe 121. The first cleaning inlet pipe 210 can have two, and the medium outlet end of the two first cleaning inlet pipes 210 is connected to the two first medium outlet pipes 121, respectively. In the embodiment, the two first medium outlet pipes 121 can be communicated only through the cleaning pipeline 200. As shown in Figure 9 The left and right first medium outlet pipes 121 are communicated through the first cleaning inlet pipe 210, the second cleaning inlet pipe 230 and the cleaning outlet pipe 220, and the two first cleaning inlet pipes 210 respectively introduce cleaning medium into the two first medium outlet pipes 121.

[0124] In an embodiment, the medium inlet end of the multiple first cleaning inlet pipes 210 can converge into a pipeline, so that the cleaning pipeline 200 has only one cleaning medium inlet 210a, and only one cleaning medium input device can be provided to provide cleaning medium for the multiple first cleaning inlet pipes 210.

[0125] In an embodiment, as shown in Figure 9 The cleaning outlet pipe 220 can include multiple cleaning sub-outlet pipes, and one end of the multiple cleaning sub-outlet pipes is communicated with the cleaning passage formed by the multiple first medium outlet pipes 121.

[0126] For example, in this embodiment, the cleaning outlet pipe 220 may include a first cleaning sub-outlet pipe 221 and a second cleaning sub-outlet pipe 222. One end of the first cleaning sub-outlet pipe 221 is connected to the cleaning passage formed by a portion of the first medium outlet pipe 121. In this embodiment, one end of the first cleaning sub-outlet pipe 221 is connected to the third shut-off valve port 510 provided on the left side of the first cleaning sub-outlet pipe 221. One end of the second cleaning sub-outlet pipe 222 is connected to the cleaning passage formed by the remaining portion of the first medium outlet pipe 121. In this embodiment, one end of the second cleaning sub-outlet pipe 222 is connected to the third shut-off valve port 510 provided on the right side of the first cleaning sub-outlet pipe 221.

[0127] In one embodiment, the multiple cleaning sub-outlets can be multiple independent pipelines, each of which can have a cleaning medium outlet 220a, so that there are multiple cleaning medium outlets 220a in the pipeline, and the negative pressure of the multiple cleaning medium outlets 220a is lower, so as to improve the discharge rate of the cleaning medium.

[0128] In one embodiment, see [reference] Figure 9 As shown, the first cleaning sub-outlet pipe 221 and the second cleaning sub-outlet pipe 222 converge at one end toward the cleaning medium outlet 220a to form a pipeline. The end of the first cleaning sub-outlet pipe 221 toward the cleaning medium outlet 220a can be connected to the second cleaning sub-outlet pipe 222. The cleaning medium outlet 220a of the entire pipeline is the medium outlet of the second cleaning sub-outlet pipe 222.

[0129] In some possible implementations, see [reference] Figure 10 As shown, the pipeline also includes a negative pressure device 800, which is connected to one end of the medium outlet of the clean outlet pipe 220. Specifically, the negative pressure device 800 is connected to the clean medium outlet 220a of the clean outlet pipe 220, and the negative pressure device 800 can extract the clean medium in the clean outlet pipe 220 when the first shut-off device on the clean outlet pipe 220 is closed.

[0130] The negative pressure device 800 is a device that can reduce the pressure inside the clean outlet pipe 220, such as a negative pressure pump.

[0131] In some possible implementations, a check valve is provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe. When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipelines, a check valve is provided on both the first cleaning inlet pipe and the second cleaning inlet pipe. The check valve controls the cleaning medium in the cleaning inlet pipe to flow only from the cleaning medium inlet to the medium inlet pipe and the medium outlet pipe, preventing backflow.

[0132] See Figure 11As shown, in the embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are connected into one section towards the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 is connected to the middle of the first cleaning inlet pipe 210. In the embodiment, only the first cleaning inlet pipe 210 is provided with the one-way valve 213, which is located between the cleaning medium inlet 210a and the second cleaning inlet pipe 230. The one-way valve 213 can control the cleaning medium to flow from the cleaning medium inlet 210a to the medium inlet pipe 110 and the medium outlet pipe 120, and prevent backflow.

[0133] In some possible embodiments, the first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a filter, which is located on one side of the one-way valve.

[0134] When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipes, the first cleaning inlet pipe and the second cleaning inlet pipe are both provided with filters, which are used to filter the cleaning medium in the cleaning inlet pipe and prevent impurities from polluting the functional device and the corresponding pipe.

[0135] Referring to Figure 11 As shown, in the embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are connected into one section towards the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 is connected to the middle of the first cleaning inlet pipe 210. In the embodiment, only the first cleaning inlet pipe 210 is provided with the filter 214, which is located on one side of the one-way valve 213 and is located between the cleaning medium inlet 210a and the second cleaning inlet pipe 230 together with the one-way valve 213. The filter 214 can filter the cleaning medium entering the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230. Specifically, the filter 214 can be located on the part of the first cleaning inlet pipe 210 between the one-way valve 213 and the second cleaning inlet pipe 230.

[0136] In some possible embodiments, the first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a pressure gauge and a pressure regulating valve, which are located on the medium inlet side of the one-way valve, and the pressure regulating valve is located on the medium inlet side of the pressure gauge.

[0137] When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipes, the first cleaning inlet pipe and the second cleaning inlet pipe are both provided with a pressure gauge and a pressure regulating valve. The pressure gauge is used to display the pressure value of the cleaning medium in the cleaning inlet pipe, and the pressure regulating valve is used to adjust the pressure value of the cleaning medium in the cleaning inlet pipe, so as to prevent the cleaning inlet pipe from entering the pipe where the functional device is located under a higher pressure, and prevent the cleaning medium from damaging the functional device due to a larger impact on the functional device.

[0138] Referring to Figure 11As shown, in the embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are connected into one section towards the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 is connected to the middle of the first cleaning inlet pipe 210. In the embodiment, the pressure gauge 215 and the pressure regulating valve 216 can be arranged on the first cleaning inlet pipe 210, and both of them are located on the medium inlet side of the one-way valve 213, and the pressure regulating valve 216 is located on the medium inlet side of the pressure gauge 215. The pressure of the cleaning medium in the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can be adjusted simultaneously by the pressure gauge 215 and the pressure regulating valve 216.

[0139] In some possible embodiments, a hand valve is arranged on the first cleaning inlet pipe and / or the second cleaning inlet pipe, and the hand valve can be located on the medium inlet side of the pressure regulating valve.

[0140] When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipes, a hand valve is arranged on each of the first cleaning inlet pipe and the second cleaning inlet pipe, and the cleaning pipe can be cut off by the hand valve when the cleaning pipe is maintained or shut down.

[0141] Referring to Figure 11 As shown, in the embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are connected into one section towards the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 is connected to the middle of the first cleaning inlet pipe 210. In the embodiment, the pressure gauge 215 and the pressure regulating valve 216 can be arranged on the first cleaning inlet pipe 210, and both of them are located on the medium inlet side of the one-way valve 213, and the pressure regulating valve 216 is located on the medium inlet side of the pressure gauge 215. The pressure of the cleaning medium in the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can be adjusted simultaneously by the pressure gauge 215 and the pressure regulating valve 216.

[0142] The application also provides a device, referring to Figure 12 As shown, the device has a distribution chamber 900, the distribution chamber 900 has a distribution cavity 910, the distribution cavity 910 is connected with the process medium inlet 110a of the pipe, and the process medium distributed by the distribution chamber 900 enters the pipe through the process medium inlet 110a and is then transported to other devices.

[0143] In the application, the device can be a semiconductor or other related precision device. The distribution chamber 900 can be a gas distribution box in a semiconductor related device.

[0144] In an embodiment, a precursor box is further connected between the gas distribution box and the process medium inlet 110a, and the precursor box is used to realize vaporization and distribution of a precursor.

[0145] The above examples are only used to illustrate the technical solutions of the present application, but not limit the same; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that the technical solutions recorded in the foregoing examples can be modified, or some technical features can be replaced by equivalent ones; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A pipe, characterized in that The pipe system comprises: a medium pipe, comprising a medium inlet pipe and a medium outlet pipe, and a functional device connected between the medium inlet pipe and the medium outlet pipe; a cleaning pipe, comprising a first cleaning inlet pipe, a cleaning outlet pipe and a second cleaning inlet pipe, one end of the first cleaning inlet pipe being connected to the medium outlet pipe, one end of the second cleaning inlet pipe being connected to the medium inlet pipe, the other end of the first cleaning inlet pipe and the other end of the second cleaning inlet pipe being cleaning medium inlets, the first cleaning inlet pipe, the second cleaning inlet pipe, the medium inlet pipe and the medium outlet pipe being connected to form a cleaning passage, the cleaning outlet pipe being connected to the cleaning passage; a first stop device, distributed on the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe, for stopping the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe when the first cleaning inlet pipe and the second cleaning inlet pipe are used to supply medium to the functional device; the pipe system comprises a plurality of medium pipes, each of which comprises the medium inlet pipe, the functional device and the medium outlet pipe connected in series; the pipe system comprises a plurality of medium inlet pipes and a plurality of process medium inlets located at one end of the medium inlet pipes, the second cleaning inlet pipe having a plurality of interfaces, the plurality of interfaces being connected to the plurality of medium inlet pipes one by one, for supplying medium to each of the medium inlet pipes.

2. The tubing of claim 1, wherein, the pipe system further comprises a second stop device, the second stop device being located on the first cleaning inlet pipe and / or the second cleaning inlet pipe, for stopping the first cleaning inlet pipe and the second cleaning inlet pipe.

3. The tubing of claim 2, wherein, one end of the second cleaning inlet pipe and the medium inlet pipe are connected through a first three-way valve, the first three-way valve comprising a first stop valve port directly connected to the second cleaning inlet pipe, the second stop device comprising the first stop valve port.

4. The pipe according to claim 2 or 3, characterized in that one end of the first cleaning inlet pipe and the medium outlet pipe are connected through a second three-way valve, the second three-way valve comprising a second stop valve port directly connected to the second cleaning inlet pipe, the second stop device comprising the second stop valve port.

5. The pipe according to any one of claims 1 to 3, characterized in that one end of the cleaning outlet pipe and the medium outlet pipe are connected through a third three-way valve, the third three-way valve comprising a third stop valve port directly connected to the cleaning outlet pipe, the first stop device comprising the third stop valve port.

6. The pipe according to any one of claims 1 to 3, characterized in that the first stop device comprises a first stop valve located on the medium inlet pipe, and / or a second stop valve located on the medium outlet pipe.

7. The pipe according to any one of claims 1 to 3, wherein the medium inlet ends of the first cleaning inlet pipe and the second cleaning inlet pipe are connected to form a cleaning medium inlet.

8. The tubing of claim 1, wherein, the pipe system comprises a plurality of medium outlet pipes, the first cleaning inlet pipe has a plurality of ends, and the ends of the first cleaning inlet pipe are connected to the plurality of medium outlet pipes, for supplying medium to each of the medium outlet pipes.

9. The tubing of claim 1, wherein, the plurality of medium outlet pipes are divided into first medium outlet pipes and second medium outlet pipes, one end of the medium outlet of the second medium outlet pipe being connected to the first medium outlet pipe, and the process medium outlet of the plurality of medium pipes being the medium outlet end of the first medium outlet pipe; The first medium outlet pipe has a plurality of pipes, and the cleaning outlet pipe includes a plurality of cleaning sub-outlet pipes, one end of the plurality of cleaning sub-outlet pipes being in communication with the cleaning passage formed by the plurality of first medium outlet pipes.

10. The tubing set of claim 9, wherein, The first cleaning inlet pipe has a plurality of pipes, and the plurality of first cleaning inlet pipes are one-to-one connected with the plurality of first medium outlet pipes.

11. The pipe according to any one of claims 1 to 3, characterized in that The pipeline further includes a negative pressure device, and one end of the medium outlet of the cleaning outlet pipe is connected with the negative pressure device.

12. The pipe according to any one of claims 1 to 3, characterized in that The first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a one-way valve.

13. The tubing set of claim 12, wherein, The first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a filter, and the filter is located on one side of the one-way valve.

14. The tubing set of claim 12, wherein, The first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a pressure gauge and a pressure regulating valve, and the pressure gauge and the pressure regulating valve are located on the medium inlet side of the one-way valve, and the pressure regulating valve is located on the medium inlet side of the pressure gauge.

15. An apparatus, comprising: The pipeline of any one of claims 1-14 is connected to the medium inlet end of the distribution chamber.

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