An air-bearing light source for isolating vibration and a thin film detection device

Abstract

The present invention relates to an air-floating light source and a film detection device for isolating vibration. The air-floating light source includes a housing, which is of a hollow structure and has an air-floating cavity inside; a breathable block, embedded in the upper part of the housing, the upper surface of which has a number of uniformly distributed air-floating holes, and the inside of which has an air passage connecting each air-floating hole from the air-floating cavity; a light guide glass, in a vertical thin plate structure, which is embedded in the breathable block and penetrates the thickness direction of the breathable block; a linear light source, closely arranged below the light guide glass, and the length direction of the linear light source is along the length direction of the light guide glass. The air-floating light source can not only provide backlight, but also provide an air flow to make the film float, avoiding vibration being transmitted to the film. The film detection device includes an unwinding mechanism, a front reversing roller group, an air-floating light source, a rear reversing roller group and a winding mechanism arranged in sequence, and a vision mechanism is arranged above the air-floating light source. The film detection device enables the film to maintain a high detection accuracy even when the conveying speed is relatively high.

Description

Technical Field

[0001] The present invention relates to the technical field of lighting devices, and particularly relates to an air-floating light source for isolating vibration and a thin film detection device. Background Art

[0002] At present, the domestic semiconductor film products have increasingly high requirements for the accuracy of visual inspection, and also require higher and higher detection efficiency. Under the condition of ensuring continuous operation without interruption of inspection, the camera has extremely high requirements for the depth of field of the product. Theoretically speaking, although the faster the conveying speed of the semiconductor film, the higher the detection efficiency, generally the semiconductor film will be imaged in front of the camera lens during the winding process. However, the faster the conveying speed, the higher the vibration frequency. The equipment frame will transmit the vibration to the camera, and the conveying roller will also transmit the vibration to the semiconductor film. The method to reduce the vibration of the camera is to use a large-depth-of-field camera, but the vibration of the thin film will still cause image blurring, which restricts the improvement of the detection accuracy.

[0003] Chinese Patent CN220084721U discloses a thin film defect detection device, which can complete the detection of internal defects, upper surface defects and lower surface defects during the conveying process of the thin film. Here, the thin film targeted is not a semiconductor film, and the defects are appearance defects such as holes, black dots, crystal dots, scratches, spots, impurities, etc. that can be clearly observed by the naked eye, and the detection accuracy requirements are not high. Under the condition of low conveying speed, the slight vibration of the equipment will not have a great impact on the detection accuracy.

[0004] Japanese Patent JP1995022992B2 discloses an air-floating bar for positioning, drying or curing continuous planar flexible materials. However, this air-floating bar can only provide gas and heat supply, cannot provide light, and the generated heat is not conducive to protecting the semiconductor film.

[0005] Chinese Patent CN210775277U discloses a combined light source for detecting glass scratches, dirt and bubbles. Here, the light emitted by six linear light sources is refracted by a diffuser plate and then emitted from the light outlet, so as to irradiate on the glass to be detected. This light source is targeted at a hard plate such as glass with a large mass, and does not need to consider the influence of vibration on the accuracy.

[0006] Therefore, a new type of light source is needed to solve the above problems. Summary of the Invention

[0007] The main object of the present invention is to provide an air-floating light source for isolating vibration, which can blow air upward through a breathable block to suspend the thin film, and provide light upward to the center of the breathable block through a light guide glass, so as to avoid transmitting vibration to the thin film while providing high-brightness illumination.

[0008] The present invention achieves the above object through the following technical solutions: An air-floating light source for isolating vibration, comprising:

[0009] A housing, having a hollow structure and an air-floating cavity inside;

[0010] A breathable block, embedded in the upper part of the housing, having a plurality of uniformly distributed air-floating holes on its upper surface and an air passage inside that communicates the air-floating cavity with each air-floating hole;

[0011] A light guide glass, in a vertical thin plate structure, embedded in the breathable block and penetrating the thickness direction of the breathable block;

[0012] A linear light source, closely arranged below the light guide glass, and the length direction of the linear light source is along the length direction of the light guide glass.

[0013] Specifically, the air passage is formed by nano micropores in the breathable block.

[0014] Specifically, the linear light source includes a strip-shaped bottom plate and a plurality of LED lamp beads arranged along the length direction of the bottom plate.

[0015] Further, the housing further includes a cooling cavity located below the LED lamp beads, the lower part of the air-floating cavity and the upper part of the cooling cavity are separated by the bottom plate, and the air-floating cavity and the cooling cavity are communicated at the same end by a connecting elbow.

[0016] Further, the housing includes an upper shell, a middle shell and a lower shell spliced in sequence from top to bottom. The upper shell and the lower shell are respectively connected to the middle shell by a plurality of screws. A first sealing ring is clamped between the upper shell and the middle shell, and the first sealing ring surrounds the air-floating cavity. A second sealing ring is clamped between the middle shell and the lower shell, and the second sealing ring surrounds the cooling cavity.

[0017] Further, the housing further includes a bottom shell provided below the lower shell. A gas distribution cavity is formed between the lower shell and the bottom shell. The lower shell is provided with a gas distribution branch that communicates the outlet section of the cooling cavity with the gas distribution cavity, and the bottom shell is provided with a plurality of air outlets.

[0018] Further, a muffler is provided on the gas distribution branch, and the air outlet is arranged close to the muffler.

[0019] Further, an air inlet joint is provided at the outer end of the bottom shell, and the air inlet joint is connected to the inlet of the cooling cavity through a hose. The hose is surrounded in the gas distribution cavity and bypasses the muffler.

[0020] Another main object of the present invention is to provide a film detection device, which can maintain a high detection accuracy even when the film is conveyed at a high speed.

[0021] The present invention achieves the above object through the following technical solutions: A film detection device includes a unwind mechanism, a front reversing roller group, the air-floating light source, a rear reversing roller group, and a winding mechanism arranged in sequence. A vision mechanism for shooting the film downward is provided above the air-floating light source.

[0022] Specifically, it further includes an encoder for measuring the conveying speed of the film, a photoelectric inductor for detecting whether the film breaks, and a distance inductor for detecting the winding thickness of the winding mechanism.

[0023] The beneficial effects of the technical solutions of the present invention are:

[0024] 1. The air-permeable block evenly disperses the air flow to its upper surface through the air channel and ejects it through the air-floating holes, so that the film does not directly contact the air-floating light source. The light guide glass provides a very slender light-transmitting channel. The light emitted from the LED lamp beads can only pass upward through the light guide glass or be reflected multiple times on the side wall of the light guide glass and reach the upper part, thereby illuminating the film in the middle area near the air-permeable block, thus meeting the brightness requirements for detecting the backlight.

[0025] 2. The film detection device provides backlight for the detection area through the air-floating light source on the one hand, and on the other hand, uses the air flow to float the film, so that the detection area on the film does not directly contact any part of the film detection device, and the influence of the device vibration on the film can be ignored. Therefore, even if the conveying speed of the film is relatively high, a high detection accuracy can still be maintained. Description of the Drawings

[0026] Figure 1 Is the three-dimensional front view of the film detection device;

[0027] Figure 2 Is the three-dimensional view of the air-floating light source in the embodiment;

[0028] Figure 3 Is the front view cross-sectional view of the air-floating light source;

[0029] Figure 4 Is the left view cross-sectional view of the air-floating light source;

[0030] Figure 5 Is the three-dimensional view of the linear light source.

[0031] The numbers in the figure represent:

[0032] 100 - Film detection device,

[0033] 1 - Air - floating light source, 11 - housing, 11a - air - floating cavity, 11b - cooling cavity, 11c - air - distributing cavity, 111 - upper shell, 112 - middle shell, 113 - lower shell, 114 - bottom shell, 1141 - air outlet, 12 - air - permeable block, 13 - light - guiding glass, 14 - linear light source, 141 - bottom plate, 142 - LED lamp beads, 15a - first sealing ring, 15b - second sealing ring, 16 - silencer, 17 - air - inlet joint, 18 - hose, 19 - screw;

[0034] 2 - Unwinding mechanism;

[0035] 3 - Front reversing roller group;

[0036] 4 - Rear reversing roller group;

[0037] 5 - Rewinding mechanism;

[0038] 6 - Vision mechanism;

[0039] 7 - Encoder;

[0040] 8 - Photo - electric inductor;

[0041] 9 - Distance inductor.

[0042] 200 - Film. Detailed implementation mode

[0043] The present invention will be further described in detail below with reference to specific embodiments.

[0044] Embodiment:

[0045] As Figure 1 shown, a film detection device 100 of the present invention includes an unwinding mechanism 2, a front reversing roller group 3, an air - floating light source 1, a rear reversing roller group 4, and a rewinding mechanism 5 arranged in sequence. Above the air - floating light source 1, there is a vision mechanism 6 for shooting the film downward.

[0046] The film 200 unwinds from the unwinding mechanism 2, bypasses the front reversing roller group 3 and the rear reversing roller group 4, and then is rewound by the rewinding mechanism 5. During this process, the film 200 will be naturally tightened. When the film 200 is between the front reversing roller group 3 and the rear reversing roller group 4, it will pass through the detection area between the air-floating light source 1 and the vision mechanism 6. On the one hand, the air-floating light source 1 provides backlight for the detection area, and on the other hand, it uses air flow to float the film 200, so that the detection area on the film 200 does not directly contact any part of the film detection device 100. Since the closest contact part on the film 200 to the detection area is on the front reversing roller group 3 and the rear reversing roller group 4, even if there is a small vertical vibration in the front reversing roller group 3 and the rear reversing roller group 4, it will not have a great impact on the lateral direction of the film 200; and the vibration of the air-floating light source 1 will not have a great impact on the air flow velocity acting on the film 200 either. Therefore, the influence of equipment vibration on the film 200 can be ignored. Thus, even if the conveying speed of the film 200 is relatively high, a high detection accuracy can still be maintained.

[0047] As Figure 1 shown, the film detection device 100 further includes an encoder 7 for measuring the conveying speed of the film 200, a photoelectric sensor 8 for detecting whether the film 200 is out of material, and a distance sensor 9 for detecting the winding thickness of the rewinding mechanism 5.

[0048] The encoder 7 includes a roller pressed on the film 200, and the reverse side of the film 200 can be supported by the film roll, the front reversing roller group 3 or the rear reversing roller group 4. During the conveying process of the film 200, it will generate a frictional force on the roller, so that the roller rotates at the same linear speed, and thus the encoder 7 can measure the real-time transmission speed of the film 200, so that the unwinding speed of the unwinding mechanism 2 and the rewinding speed of the rewinding mechanism 5 can be balanced and reach the required speed range. When the film 200 is being conveyed normally, it will block the optical path of the photoelectric sensor 8, so the photoelectric sensor 8 will not output an abnormal signal; once the material is out of stock, the photoelectric sensor 8 can sense the light emitted by itself, and thus output an abnormal signal to control the film detection device 100 to stop immediately. The distance sensor 9 can monitor the winding radius of the film 200. If the raw material roll is used up and the winding radius is insufficient, then it can continue to wind after connecting the material; if the winding radius is sufficient, then the raw material roll can be cut off and then the roll can be changed. The encoder 7, the photoelectric sensor 8 and the distance sensor 9 can ensure the stability of the equipment during operation.

[0049] As Figures 2 to 4As shown in the figure, the air-floating light source 1 includes a housing 11, a ventilation block 12, a light guide glass 13, and a linear light source 14. The housing 11 has a hollow structure, and its interior has an air-floating cavity 11a, a cooling cavity 11b, and an air distribution cavity 11c. The ventilation block 12 is embedded in the upper part of the housing 11. Its upper surface has a number of evenly distributed air-floating holes, and its interior has an air passage connecting the air-floating cavity 11a to each air-floating hole. The light guide glass 13 has a vertical thin plate structure and is embedded in the ventilation block 12 and penetrates the thickness direction of the ventilation block 12. The linear light source 14 is closely arranged below the light guide glass 13, and the length direction of the linear light source 14 is along the length direction of the light guide glass 13.

[0050] The air passage is formed by nano micropores in the ventilation block 2. The main purpose of the ventilation block 12 is to evenly disperse the air flow to its upper surface through the air passage and spray it out through the air-floating holes, so that the film 200 does not directly contact the air-floating light source 1. Since the ventilation block 12 occupies most of the upper area of the air-floating light source 1, the position of the linear light source 14 can only be set below the ventilation block 12, and the light is transmitted to a position close to the upper surface of the ventilation block 12 by relying on the light guide glass 13. The light guide glass 13 provides a very slender light transmission channel. The light emitted from the LED lamp beads 142 can only pass upward through the light guide glass 13 or be reflected multiple times on the side wall of the light guide glass 13 to reach the upper part, thereby illuminating the film 200 in the middle area close to the ventilation block 12, thus meeting the brightness requirements for detecting the backlight.

[0051] As Figure 5 As shown in the figure, the linear light source 14 includes a strip-shaped bottom plate 141 and a plurality of LED lamp beads 142 arranged along the length direction of the bottom plate 141. The cooling cavity 11b is located below the LED lamp beads 142. The lower part of the air-floating cavity 11a and the upper part of the cooling cavity 11b are separated by the bottom plate 141, and the air-floating cavity 11a and the cooling cavity 11b are connected by a connecting elbow at the same end.

[0052] The LED lamp beads 142 are located in the closed space of the housing 11, and heat is inevitably generated when they emit light. In order to prevent heat from accumulating in the housing 11 and causing the air flow temperature to rise, which in turn affects the film 200, the air source is used as a refrigerant at the same time. Since the heat is generated by the LED lamp beads 142 and the air flow cannot directly pass through the LED lamp beads 142 from bottom to top, the upper part of the cooling cavity 11b should be close to the area where the LED lamp beads 142 are located on the bottom plate 141. The flow direction of the air flow in the air-floating cavity 11a and the cooling cavity 11b is generally along the horizontal direction, but in opposite directions. This not only makes reasonable use of the air flow but also ensures the safety of the working temperature.

[0053] As Figures 2 to 4As shown, the housing 11 includes an upper housing 111, a middle housing 112, and a lower housing 113 that are spliced in sequence from top to bottom. The upper housing 111 and the lower housing 113 are respectively connected to the middle housing 112 by a plurality of screws 19. A first sealing ring 15a is clamped between the upper housing 111 and the middle housing 112. The first sealing ring 15a surrounds the air floating cavity 11a. A second sealing ring 15b is clamped between the middle housing 112 and the lower housing 113. The second sealing ring 15b surrounds the cooling cavity 11b.

[0054] Because the interior of the housing 11 has a complex structure, a split-type structure is generally adopted. The upper housing 111 and the middle housing 112 can clamp the air-permeable block 12, and the middle housing 112 and the lower housing 113 can clamp the bottom plate 141. In this way, the lower wall of the air-permeable block 12, the inner wall of the upper housing 111, the inner wall of the middle housing 112, and the upper wall of the bottom plate 141 can enclose to form the air floating cavity 11a. At the same time, the lower wall of the bottom plate 141 and the inner wall of the lower housing 113 enclose to form the cooling cavity 11b. However, air leakage channels may be formed at the contact surfaces between the upper housing 111 and the middle housing 112, and between the middle housing 112 and the lower housing 113. Therefore, two sealing rings are needed for sealing. Here, the upper and lower surfaces of the middle housing 112 are both provided with a circular sealing groove for accommodating the sealing ring. The circular sealing groove can also be provided on the bottom surface of the upper housing 111 or the top surface of the lower housing 113.

[0055] As Figures 2 to 4 As shown, the housing 11 further includes a bottom housing 114 provided below the lower housing 113. A gas distribution cavity 11c is formed between the lower housing 113 and the bottom housing 114. The lower housing 113 is provided with a gas distribution branch that connects the outlet section of the cooling cavity 11b and the gas distribution cavity 11c. The bottom housing 114 is provided with a plurality of air outlet ports 1141. A muffler 16 is provided on the gas distribution branch. The air outlet ports 1141 are arranged close to the muffler 16. An air inlet joint 17 is provided at the outer end of the bottom housing 114. The air inlet joint 17 is connected to the inlet of the cooling cavity 11b through a hose 18. The hose 18 is surrounded in the gas distribution cavity 11c and bypasses the muffler 16.

[0056] When the functions of air flotation and cooling are compatible, the air flow required to cool the LED lamp beads 142 will be much greater than the air flow required to float the film 200 upward. When the air channels of the air-permeable block 12 are only nano micropores, the flow resistance will also be very large. If the air is compressed within the housing 11, it will cause the assembled housing 11 to crack and pose a danger. Therefore, it is necessary to set up a gas separation chamber 11c to separate the excess air on the outlet side of the cooling chamber 11b, and then discharge it to the outside of the air flotation light source 1 through the air outlet 1141. Because the flow rate of this separated air flow in the gas separation branch is very fast, it is easy to generate noise during operation. The silencer 16 can weaken the operating noise. Since the joints (the air inlet joint 17 and the connecting elbow between the air flotation chamber 11a and the cooling chamber 11b) of the air flotation light source 1 are generally set on the outside during installation, and the inlet of the cooling chamber 11b is closer to the inside, pipeline connection is required. However, the rigid pipeline will conflict with the position of the silencer 16, so a flexible hose 18 is used here for connection. The bottom shell 114 not only has the function of protecting the silencer 16 and the flexible hose 18, but also can block noise, making the equipment quieter during operation. In order to increase the air outlet flow rate, the bottom shell 114 is provided with air outlets 1141 on the two sides and the bottom surface close to the silencer 16. The air outlets 1141 on each surface are radially distributed, so that the ventilation area can be increased and the excess air can be quickly discharged.

[0057] The working principle of the air flotation light source 1 is as follows: When the LED lamp beads 142 are powered, the light shines upward through the light guide glass 13. The air flow enters the flexible hose 18 from the air inlet joint 17, and then passes through the cooling chamber 11b, thereby absorbing the heat generated by the LED lamp beads 142. A small amount of the air flow enters the air flotation chamber 11a through the connecting elbow, and then is evenly ejected upward through the nano micropores in the air-permeable block 12 to achieve the purposes of air flotation and illumination in the upper part. A large amount of the air flow enters the gas separation chamber 11c through the silencer 16, and then is discharged from the air outlet 1141.

[0058] The above are only some embodiments of the present invention. For those of ordinary skill in the art, without departing from the inventive concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. An air-floating light source for isolating vibration, characterized in that Comprising: A housing, having a hollow structure with an air floating cavity inside; A breathable block, embedded in the upper part of the housing, having a plurality of uniformly distributed air floating holes on its upper surface and having air channels inside that communicate the air floating cavity with each air floating hole; A light guide glass, having a vertical thin plate structure, embedded in the breathable block and penetrating the thickness direction of the breathable block; A linear light source, closely arranged below the light guide glass, the length direction of the linear light source being along the length direction of the light guide glass, the linear light source including a strip-shaped bottom plate and a plurality of LED lamp beads arranged along the length direction of the bottom plate; Inside the housing, there is also a cooling cavity located below the LED lamp beads. The lower part of the air floating cavity and the upper part of the cooling cavity are separated by the bottom plate, and the air floating cavity and the cooling cavity are connected and communicated at the same end by a connecting elbow.

2. The air-floating light source for isolating vibration according to claim 1, wherein: The air channels are formed by nano micropores in the breathable block.

3. The vibration-isolated air-floating light source according to claim 1, wherein: The housing includes an upper shell, a middle shell, and a lower shell that are spliced in sequence from top to bottom. The upper shell and the lower shell are respectively connected to the middle shell by a plurality of screws. A first sealing ring is clamped between the upper shell and the middle shell, and the first sealing ring surrounds the air floating cavity. A second sealing ring is clamped between the middle shell and the lower shell, and the second sealing ring surrounds the cooling cavity.

4. The vibration-isolated air-floating light source according to claim 3, wherein: The housing further includes a bottom shell provided below the lower shell. A gas distribution cavity is formed between the lower shell and the bottom shell. The lower shell is provided with a gas distribution branch that connects the outlet section of the cooling cavity and the gas distribution cavity. The bottom shell is provided with a plurality of air outlets.

5. The vibration-isolated air-floating light source according to claim 4, wherein: A silencer is provided on the gas distribution branch, and the air outlets are arranged close to the silencer.

6. The vibration-isolated air-floating light source according to claim 5, wherein: An air inlet joint is provided at the outer end of the bottom shell. The air inlet joint is connected to the inlet of the cooling cavity through a hose. The hose is surrounded in the gas distribution cavity and bypasses the silencer.

7. A thin film detection device, characterized in that: Comprising a film unwinding mechanism, a front reversing roller group, the air floating light source according to any one of claims 1-6, a rear reversing roller group, and a film winding mechanism arranged in sequence. A vision mechanism for downwardly photographing the film is provided above the air floating light source.

8. The thin film detection device according to claim 7, wherein: It further includes an encoder for measuring the conveying speed of the film, a photoelectric inductor for detecting whether the film breaks, and a distance inductor for detecting the winding thickness of the winding mechanism.

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