High-thermal-conductivity silicon carbide long pipe sintering furnace

Abstract

The high-thermal-conductivity silicon carbide long pipe sintering furnace comprises a sintering furnace body, a maintenance assembly and a moving assembly, the maintenance assembly comprises an inner furnace body, the inner furnace body is arranged in the sintering furnace body, a supporting plate is fixedly connected to the interior of the sintering furnace body, and the interior of the supporting plate makes contact with the surface of the inner furnace body; a long strip is fixedly connected to the interior of the sintering furnace body, a sliding block is arranged on the front side of the long strip, a connecting strip is fixedly connected to the top of the inner furnace body, a round rod is slidably connected to the interior of the sliding block, a short groove is formed in the sliding block, and an arc-shaped block is fixedly connected to the surface of the round rod. And a limiting rod is arranged at the top of the arc-shaped block. The sintering furnace is conveniently maintained through the maintenance assembly, the internal furnace body of the sintering furnace can be moved, when the internal furnace body of the sintering furnace is damaged, the internal furnace body can be conveniently maintained and disassembled, and no trouble is brought to maintenance personnel.

Description

Technical Field

[0001] The invention relates to the technical field of sintering furnaces, in particular to a high thermal conductivity silicon carbide long tube sintering furnace. Background Art

[0002] A sintering furnace is a special device that allows powder compacts to obtain the required physical, mechanical properties and microstructure through sintering. The sintering furnace is used to dry the slurry on the silicon wafer, remove the organic components in the slurry, and complete the sintering of the aluminum back field and the grid line. In order to ensure the smooth dewaxing, reduction, alloying, and structural transformation of the powder compact during the sintering process, the sintering temperature, protective atmosphere, compact conveying method, heating and cooling speed, etc. need to be precisely controlled during sintering. Therefore, the structure of the sintering furnace should meet the following requirements: (1) It has a complete lubricant burning device , (2) It is airtight, that is, it can isolate the air outside the furnace and ensure the smooth flow of protective atmosphere in the furnace, (3) The temperature of each section in the furnace is controllable and the sintering atmosphere is adjustable, (4) It has a rapid cooling device, which can quickly cool the sintered parts to the furnace outlet temperature without oxidation. Precautions for the use of sintering furnaces: When using hydrogen or decomposing ammonia, nitrogen must be introduced first. Only when the air in the furnace is completely discharged can the power be turned on to increase the temperature to prevent ringing and explosion. For sintering furnaces with molybdenum wire as the heating element, protective gas should be introduced into the furnace body before power is turned on to prevent the molybdenum wire from oxidizing and breaking.

[0003] According to the field of vacuum heat treatment equipment with patent number CN203875338U published on the China Patent Network, a vacuum degreasing sintering furnace includes a furnace base and a sintering furnace fixed thereon, and also includes a water cooling device, a vacuum pumping device and a degreasing device connected to the sintering furnace; the sintering furnace includes a furnace door and a furnace body; an inner insulation door, a graphite storage box, a pulley, a bracket and an exhaust pipe are arranged in the furnace body; the vacuum pumping device includes a vacuum tube, a pneumatic high vacuum baffle valve, a first bellows shock absorber, a Roots vacuum pump, a second bellows shock absorber, a rotary vane vacuum pump, a vacuum pump base and an exhaust pipe; the water cooling device includes a return water tank outside the furnace body and a circulating water pipeline connected thereto. The advantages of the vacuum degreasing sintering furnace are novel structure, good sealing performance and thermal insulation performance, and good stability of the vacuum pumping device during use, but the sintering furnace does not have a maintenance component. Since the inner furnace body of the sintering furnace is fixed inside it, when the furnace body inside the sintering furnace is damaged, it is difficult to conveniently repair and disassemble the inner furnace body, which brings trouble to the maintenance personnel.

[0004] Therefore, it is necessary to redesign the sintering furnace to effectively prevent it from being difficult to maintain. Summary of the invention

[0005] In order to solve the problems raised in the above background technology, the purpose of the present invention is to provide a high thermal conductivity silicon carbide long tube sintering furnace, which has the advantage of easy maintenance and solves the problem of difficult maintenance.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high thermal conductivity silicon carbide long tube sintering furnace, comprising a sintering furnace body, a maintenance component and a moving component;

[0007] The maintenance assembly includes an inner furnace body, which is arranged inside the sintering furnace body, a support plate is fixedly connected to the inside of the sintering furnace body, the inside of the support plate is in contact with the surface of the inner furnace body, a long strip is fixedly connected to the inside of the sintering furnace body, a sliding block is arranged on the front side of the long strip, a connecting strip is fixedly connected to the top of the inner furnace body, a round rod is slidably connected to the inside of the sliding block, a short groove is provided inside the sliding block, an arc block is fixedly connected to the surface of the round rod, a limiting rod is arranged on the top of the arc block, and the top of the limiting rod extends to the inside of the long strip.

[0008] As a preferred embodiment of the present invention, the moving assembly includes a support bar, the bottom of which is fixedly connected to the inside of the sintering furnace body, a long plate is fixedly connected to the inside of the sintering furnace body, a long groove is provided on the top of the long plate, and a roller is fixedly connected to the bottom of the inner furnace body.

[0009] As a preferred embodiment of the present invention, a circular groove is opened inside the sliding block, a circular ring is fixedly connected to the surface of the round rod, a short plate is arranged on the right side of the circular ring, a spring plate is fixedly connected to the right side of the short plate, and the right side of the spring plate is fixedly connected to the right side of the inner wall of the circular groove.

[0010] As a preferred embodiment of the present invention, a round block is fixedly connected to the left end of the round rod, and teeth are fixedly connected to the left side of the round block and the inside of the sliding block.

[0011] As a preferred embodiment of the present invention, a pulling plate is fixedly connected to the right side of the round rod, and the surface of the pulling plate is provided with anti-slip grooves.

[0012] As a preferred embodiment of the present invention, a corrosion-resistant layer is provided on the surface of the sliding block, and the sliding block is located at the front side of the connecting strip.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. The present invention utilizes a maintenance component to conveniently maintain the sintering furnace, and the internal furnace of the sintering furnace can be moved. When the furnace body inside the sintering furnace is damaged, the internal furnace body can be conveniently maintained and disassembled without causing trouble to maintenance personnel.

[0015] 2. The present invention can conveniently move the inner furnace body by providing a moving component, thereby improving the convenience of maintenance of the inner furnace body.

[0016] 3. The present invention can limit the round rod by arranging the spring plate and the short plate, thereby preventing the round rod from moving to the right and improving the stability of the round rod.

[0017] 4. The present invention can limit the round rod by setting the round block and the teeth, prevent the round rod from rotating, and improve the stability of the round rod.

[0018] 5. The present invention can conveniently pull and rotate the round rod by arranging the pulling plate, thereby improving the mobility of the round rod.

[0019] 6. The present invention can prevent the sliding block from being corroded by providing a corrosion-resistant layer, thereby increasing the service life of the sliding block. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the present invention;

[0021] Figure 2 It is a schematic diagram of a left-side cross-sectional view of the inner furnace body of the present invention;

[0022] Figure 3 It is a schematic diagram of a front cross-sectional view of a sliding block of the present invention;

[0023] Figure 4 It is a left side schematic diagram of a round rod of the present invention.

[0024] In the figure: 1. sintering furnace body; 2. maintenance component; 201. inner furnace body; 202. support plate; 203. long strip; 204. sliding block; 205. connecting strip; 206. round rod; 207. short groove; 208. arc block; 209. limit rod; 3. moving component; 301. support strip; 302. long plate; 303. long groove; 304. roller; 4. round groove; 5. circular ring; 6. short plate; 7. spring plate; 8. round block; 9. teeth; 10. pulling plate. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] like Figures 1 to 4 As shown, the present invention provides a high thermal conductivity silicon carbide long tube sintering furnace, comprising a sintering furnace body 1, a maintenance component 2 and a moving component 3;

[0027] The maintenance component 2 includes an inner furnace body 201, which is arranged inside the sintering furnace body 1. A support plate 202 is fixedly connected to the inside of the sintering furnace body 1, and the inside of the support plate 202 contacts the surface of the inner furnace body 201. A long strip 203 is fixedly connected to the inside of the sintering furnace body 1, and a sliding block 204 is arranged on the front side of the long strip 203. A connecting strip 205 is fixedly connected to the top of the inner furnace body 201, and a round rod 206 is slidably connected to the inside of the sliding block 204. A short groove 207 is opened inside the sliding block 204, and an arc block 208 is fixedly connected to the surface of the round rod 206. A limiting rod 209 is arranged on the top of the arc block 208, and the top of the limiting rod 209 extends to the inside of the long strip 203.

[0028] refer to Figure 2 The moving component 3 includes a support bar 301, the bottom of the support bar 301 is fixedly connected to the inside of the sintering furnace body 1, a long plate 302 is fixedly connected to the inside of the sintering furnace body 1, a long groove 303 is opened on the top of the long plate 302, and a roller 304 is fixedly connected to the bottom of the inner furnace body 201.

[0029] As a technical optimization solution of the present invention, by providing the moving component 3 , the inner furnace body 201 can be conveniently moved, thereby improving the convenience of maintenance of the inner furnace body 201 .

[0030] refer to Figure 3 A circular groove 4 is opened inside the sliding block 204, a circular ring 5 is fixedly connected to the surface of the circular rod 206, a short plate 6 is arranged on the right side of the circular ring 5, a spring plate 7 is fixedly connected to the right side of the short plate 6, and the right side of the spring plate 7 is fixedly connected to the right side of the inner wall of the circular groove 4.

[0031] As a technical optimization solution of the present invention, by providing the spring plate 7 and the short plate 6, the round rod 206 can be limited to prevent the round rod 206 from moving to the right, thereby improving the stability of the round rod 206.

[0032] refer to Figure 3 The left end of the round rod 206 is fixedly connected with a round block 8, and the left side of the round block 8 and the inside of the sliding block 204 are fixedly connected with teeth 9.

[0033] As a technical optimization solution of the present invention, by providing the round block 8 and the teeth 9, the round rod 206 can be limited to prevent the round rod 206 from rotating, thereby improving the stability of the round rod 206.

[0034] refer to Figure 3 The right side of the round rod 206 is fixedly connected with a pulling plate 10, and the surface of the pulling plate 10 is provided with anti-slip grooves.

[0035] As a technical optimization solution of the present invention, by providing the pulling plate 10, the round rod 206 can be conveniently pulled and rotated, thereby improving the mobility of the round rod 206.

[0036] refer to Figure 2 The surface of the sliding block 204 is provided with a corrosion-resistant layer, and the sliding block 204 is located at the front side of the connecting strip 205 .

[0037] As a technical optimization solution of the present invention, by providing a corrosion-resistant layer, the sliding block 204 can be prevented from being corroded, thereby increasing the service life of the sliding block 204.

[0038] The working principle and use process of the present invention are as follows: during use, when the inner furnace body 201 needs to be repaired, the pulling plate 10 is pulled to the right, and the pulling plate 10 drives the round rod 206 and the round block 8 to move to the right, so that the teeth 9 are separated from each other, and the pulling plate 10 is rotated backward, and the pulling plate 10 drives the round rod 206 and the arc block 208 to rotate backward, and the limiting rod 209 moves downward due to gravity. When the limiting rod 209 is separated from the long strip 203, the sliding block 204 is pulled to the right to separate it from the connecting strip 205, and the inner furnace body 201 can be pulled forward for repair, thereby achieving the effect of easy maintenance.

[0039] In summary: the high thermal conductivity silicon carbide long tube sintering furnace can be easily repaired by using the maintenance components, and the internal furnace of the sintering furnace can be moved. When the furnace body inside the sintering furnace is damaged, the internal furnace body can be easily repaired and disassembled, which will not cause trouble to the maintenance personnel and solve the problem of difficult maintenance.

[0040] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high thermal conductivity silicon carbide long tube sintering furnace, comprising a sintering furnace body (1), a maintenance component (2) and a moving component (3); The maintenance component (2) comprises an inner furnace body (201), wherein the inner furnace body (201) is arranged inside the sintering furnace body (1), a support plate (202) is fixedly connected inside the sintering furnace body (1), the inside of the support plate (202) is in contact with the surface of the inner furnace body (201), a long strip (203) is fixedly connected inside the sintering furnace body (1), a sliding block (204) is arranged on the front side of the long strip (203), a connecting strip (205) is fixedly connected at the top of the inner furnace body (201), a round rod (206) is slidably connected inside the sliding block (204), a short groove (207) is provided inside the sliding block (204), an arc block (208) is fixedly connected to the surface of the round rod (206), a limiting rod (209) is arranged on the top of the arc block (208), and the top of the limiting rod (209) extends to the inside of the long strip (203).

2. A high thermal conductivity silicon carbide long tube sintering furnace according to claim 1, Features: The moving assembly (3) comprises a support bar (301), the bottom of which is fixedly connected to the inside of the sintering furnace body (1), a long plate (302) is fixedly connected to the inside of the sintering furnace body (1), a long groove (303) is provided on the top of the long plate (302), and a roller (304) is fixedly connected to the bottom of the inner furnace body (201).

3. A high thermal conductivity silicon carbide long tube sintering furnace according to claim 1, Features: A circular groove (4) is provided inside the sliding block (204); a circular ring (5) is fixedly connected to the surface of the circular rod (206); a short plate (6) is provided on the right side of the circular ring (5); a spring plate (7) is fixedly connected to the right side of the short plate (6); and the right side of the spring plate (7) is fixedly connected to the right side of the inner wall of the circular groove (4).

4. A high thermal conductivity silicon carbide long tube sintering furnace according to claim 1, Features: The left end of the round rod (206) is fixedly connected to a round block (8), and the left side of the round block (8) and the inside of the sliding block (204) are both fixedly connected to teeth (9).

5. A high thermal conductivity silicon carbide long tube sintering furnace according to claim 1, Features: A pulling plate (10) is fixedly connected to the right side of the round rod (206), and the surface of the pulling plate (10) is provided with anti-slip grooves.

6. A high thermal conductivity silicon carbide long tube sintering furnace according to claim 1, Features: A corrosion-resistant layer is provided on the surface of the sliding block (204), and the sliding block (204) is located on the front side of the connecting strip (205).

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