Slit coating equipment
By using single motor drive and counterweight blocks to optimize the center of gravity layout in the slit coating equipment, the challenges of existing equipment in high-precision coating and stability are solved, and efficient, stable and economical coating effects are achieved.
Patent Information
- Application Number
- CN202510154565.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-12
- Publication Date
- 2025-05-27
AI Technical Summary
When preparing micro- and nano-scale film layers, existing medium and large slit coating equipment faces the high requirements of motion control algorithms and the challenges of coating accuracy. The high center of gravity leads to a skew moment, affecting the coating accuracy.
The movement of the coating head is realized by using a single motor drive, simplifying the complexity of motion control, and reducing the center of gravity of the moving mechanism by increasing the counterweight block, so that its center of gravity is concentrated near the first transmission mechanism, thereby reducing the eccentric swing torque.
It realizes efficient synergistic movement, improves coating accuracy and equipment stability, reduces equipment cost and complexity, and enhances the compactness and flexibility of equipment.
Smart Images
Figure CN120038077A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a slit coating device, belonging to the technical field of slit coating. Background Art
[0002] In the field of wet preparation of ultra-thin functional layers, slit coating devices play a key and core role and are indispensable in processes such as coating photoresist, nano-coatings, and photosensitive layers. Currently, most existing medium and large-sized slit coating devices adopt a gantry dual-drive structure, and some require dual-motor drive. This structure poses extremely high requirements for the implementation of motion control algorithms and faces huge challenges for preparing micron-level and nano-level film layers. At the same time, due to its relatively high center of gravity, a large yaw moment will be generated during the start-up and stop processes, which has a greater impact on the coating accuracy and is difficult to meet the requirements of high-precision coating processes. Summary of the Invention
[0003] The purpose of the present invention is to provide a slit coating device that can achieve the movement of the coating head by single-motor drive, greatly simplifies the complexity of motion control, and reduces the equipment cost. At the same time, by adding counterweights, the center of gravity of the motion mechanism is lowered, and its center of gravity is concentrated near the first transmission mechanism, thereby greatly reducing the yaw moment during the movement of the mechanism in the Y-axis direction, reducing the difficulty of motion control, and improving the coating accuracy and the stability of the equipment.
[0004] To solve the above technical problems, the present invention is implemented by the following technical solutions.
[0005] On the one hand, the present invention provides a slit coating device, including a base, a first transmission mechanism, an adsorption platform, a second transmission mechanism, a coating die head, a connection mechanism, and a counterweight. The first transmission mechanism is fixedly connected to the base, the adsorption platform is locked to the base, the first transmission mechanism is connected to the second transmission mechanism, the second transmission mechanism is slidably connected to the coating die head, the counterweight is fixed to the connection mechanism, and the connection mechanism connects the first transmission mechanism, the adsorption platform, the second transmission mechanism, the coating die head, and the counterweight into a whole, so that the connected whole moves in coordination along the moving direction of the coating die head.
[0006] Preferably, the base is made of marble material.
[0007] Preferably, the base is provided with a first guide rail, and the first transmission mechanism, the adsorption platform, the second transmission mechanism, the coating die head, the connection mechanism, and the counterweight are installed on the base through the first guide rail.
[0008] Preferably, a driving mechanism is further provided on the adsorption platform, and the driving mechanism drives the connected whole to move back and forth along the moving direction of the coating die head.
[0009] Preferably, the adsorption platform is locked to the base by threads and has no relative movement with the base.
[0010] Preferably, the second transmission mechanism is provided with a second guide rail and a motor. The motor is connected to the first transmission mechanism. The second transmission mechanism is connected to the coating die head through the second guide rail, and the second transmission mechanism controls the up and down movement of the coating die head.
[0011] Preferably, the second transmission mechanism receives a control signal sent by the PLC and drives the coating die head to move along the direction of the motor's lifting and lowering to adjust the coating interval between the coating die head and the coated substrate vacuum adsorbed on the adsorption platform.
[0012] Preferably, the coating die head includes a transverse dispersion channel for dispersing the solution and an extrusion lip for non-contact transfer of the dispersed solution to the surface of the coated substrate. The distance between the extrusion lip and the coated substrate is adjusted by the second transmission mechanism to form a predetermined coating interval.
[0013] Preferably, the center of gravity of the counterweight is located below the first transmission mechanism.
[0014] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: By organically combining the base, the first transmission mechanism, the adsorption platform, the second transmission mechanism, the coating die head, the connection mechanism and the counterweight, the present invention realizes the efficient coordinated movement of the slot coating equipment. First, the coordinated movement of the overall structure makes the operation of the equipment more stable in the moving direction of the coating die head, reducing the vibration and error that may be caused by the independent movement of each component, thereby improving the coating accuracy and uniformity. Second, the reasonable layout of the counterweight effectively reduces the center of gravity of the moving parts, further enhancing the stability of the equipment during movement and reducing the yaw moment generated by the center of gravity offset. In addition, by integrating each component into a whole through the connection mechanism, not only the spatial layout of the equipment is optimized, but also the assembly and maintenance process of the equipment is simplified, reducing the manufacturing and maintenance costs of the equipment. At the same time, this overall design also improves the compactness and flexibility of the equipment, enabling it to better adapt to different production environments and process requirements. Description of the Drawings
[0015] Figure 1 The figure shows a schematic diagram of a slot coating equipment provided by an embodiment of the present invention; In the figure: 1, base; 2, first transmission mechanism; 3, adsorption platform; 4, second transmission mechanism; 5, coating die head; 6, connection mechanism; 7, counterweight. Detailed implementation mode
[0016] The technical solution of the present invention will be described in detail below through the accompanying drawings and specific embodiments. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solution of the present invention, rather than limitations on the technical solution of the present invention. Without conflict, the embodiments of the present invention and the technical features in the embodiments can be combined with each other.
[0017] The term "and / or" is merely a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " generally represents an "or" relationship between the associated objects before and after. Embodiment 1
[0018] See Figure 1 , this embodiment introduces a slit coating device. There is no shielding of the gantry during the coating process. Its core components include a base 1, a first transmission mechanism 2, an adsorption platform 3, a second transmission mechanism 4, a coating die head 5, a connection mechanism 6, and a counterweight 7. Among them, the base 1 serves as the support platform for the entire device, providing a stable installation foundation for other components. The first transmission mechanism 2 is fixedly connected to the base 1 and is used to drive the device to move in the Y-axis direction to ensure precise control during the coating process. The adsorption platform is locked to the base 1 and is used to adsorb and fix the coating substrate to ensure that the coating substrate remains flat and stable during the coating process, thereby improving the coating quality.
[0019] The first transmission mechanism 2 is connected to the second transmission mechanism 4, responsible for transmitting power to the coating die head 5, and realizing the up and down movement of the coating die head in the direction perpendicular to the Y-axis through a sliding connection method to meet the requirements of different coating processes. The coating die head 5 is responsible for evenly dispersing and transferring the coating solution onto the surface of the coating substrate. The connection mechanism 6 connects the first transmission mechanism 2, the adsorption platform 3, the second transmission mechanism 4, the coating die head 5, and the counterweight 7 into a whole, so that these components move in coordination in the direction perpendicular to the Y-axis, that is, along the moving direction of the coating die head 5, to ensure the coherence and consistency of the coating process.
[0020] In addition, the counterweight 7 is fixed to the connection mechanism 6. Its main function is to lower the center of gravity of the entire moving mechanism, reduce the yaw moment generated during the movement in the Y-axis direction, and thus improve the movement stability and coating accuracy of the device.
[0021] In summary, by reasonably arranging each component and using counterweights to optimize the center-of-gravity distribution, efficient and stable movement of the device in the Y-axis direction is achieved, effectively improving the coating quality and production efficiency, while reducing the complexity and cost of the device. Embodiment 2
[0022] In another embodiment of the present invention, the base 1 is made of marble material, which has an extremely low coefficient of thermal expansion, high rigidity, high seismic resistance and high stability. At the same time, it also has the advantages of easy processing performance and low cost. These characteristics enable the base 1 to provide a stable and reliable support platform for the entire device, ensuring the accuracy and stability of the coating process.
[0023] In another embodiment of the present invention, a first guide rail is provided on the base 1. The first transmission mechanism 2, the adsorption platform 3, the second transmission mechanism 4, the coating die head 5, the connecting mechanism 6 and the counterweight 7 are all installed on the base 1 through the first guide rail. These components can move back and forth along the guide rail in the Y-axis direction to ensure the coherence and consistency of the coating process. The adsorption platform 3 is used to adsorb the required coating substrate and is locked to the base 1 by threads to ensure that there is no relative movement between the adsorption platform 3 and the base 1, so as to ensure that the adsorption platform can stably adsorb and fix the coating substrate during the coating process, ensuring the flatness and stability of the coating substrate.
[0024] It should be noted that the coating substrate includes but is not limited to glass, silicon wafers, flexible films, etc.
[0025] A driving mechanism is also provided on the adsorption platform 3. The driving mechanism can drive the connected whole to move back and forth along the Y-axis direction, enabling the entire coating device to achieve precise motion control in the Y-axis direction, so as to meet the requirements of different coating processes. The second transmission mechanism 4 is provided with a second guide rail and a motor. Among them, the motor is connected to the first transmission mechanism 2, and the second transmission mechanism 4 is connected to the coating die head 5 through the second guide rail, enabling the second transmission mechanism 4 to precisely control the movement of the coating die head 5, ensuring the accuracy and stability of the coating process.
[0026] In another embodiment of the present invention, the second transmission mechanism 4 receives a control signal sent by the PLC and drives the coating die head 5 to move in the Z-axis direction (move along the lifting and lowering direction of the motor or move up and down perpendicular to the surface of the adsorption platform 3), thereby adjusting the gap value between the coating die head 5 and the coating substrate, also known as the coating interval, that is, according to different coating requirements and the characteristics of the coating substrate, precisely controlling the coating gap between the coating die head 5 and the coating substrate, so as to achieve the start and end of the coating process.
[0027] Among them, the coating die head 5 includes a transverse dispersion channel and an extrusion lip. The transverse dispersion channel is used for laterally dispersing the solution, and the extrusion lip is used for non-contact transferring the dispersed solution to the surface of the coating substrate. The distance between the extrusion lip and the coating substrate is adjusted by the second transmission mechanism 4 to form a predetermined gap value. For example, when the required coating solution is extruded from the coating die head 5 at a constant speed and moves along the Y-axis direction under the enabling of the first transmission mechanism 2, the coating solution can be evenly transferred to the surface of the coating substrate under the action of gravity and surface tension, thereby achieving a high-quality coating effect.
[0028] Finally, the center of gravity of the counterweight 7 is located near the first transmission mechanism 2. The distribution of this center of gravity not only greatly reduces the yaw moment during the movement of the moving mechanism in the Y-axis direction, reduces the difficulty of motion control, but also improves the motion stability and coating accuracy of the equipment, making the equipment more efficient, stable and economical.
[0029] The embodiments of the present invention have been described above in conjunction with the accompanying drawings. However, the present invention is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present invention, those of ordinary skill in the art can also make many forms without departing from the purpose of the present invention and the scope protected by the claims. These all fall within the protection scope of the present invention.
Claims
1. A slit coating device, characterized in that: The invention comprises a base (1), a first transmission mechanism (2), an adsorption platform (3), a second transmission mechanism (4), a coating die head (5), a connecting mechanism (6) and a counterweight (7), wherein the first transmission mechanism (2) is fixedly connected to the base (1), the adsorption platform (3) is locked to the base (1), the first transmission mechanism (2) is connected to the second transmission mechanism (4), the second transmission mechanism (4) is slidably connected to the coating die head (5), the counterweight (7) is fixed to the connecting mechanism (6), and the connecting mechanism (6) connects the first transmission mechanism (2), the adsorption platform (3), the second transmission mechanism (4), the coating die head (5) and the counterweight (7) into a whole, so that the whole connected together moves in a coordinated manner along the moving direction of the coating die head (5).
2. The slit coating device according to claim 1, characterized in that: The base (1) is made of marble.
3. The slit coating device according to claim 2, characterized in that: The base (1) is provided with a first guide rail, and the first transmission mechanism (2), the adsorption platform (3), the second transmission mechanism (4), the coating die head (5), the connecting mechanism (6) and the counterweight (7) are mounted on the base (1) via the first guide rail.
4. The slit coating device according to claim 3, characterized in that: The adsorption platform (3) is also provided with a driving mechanism, which drives the connected whole to move forward and backward along the moving direction of the coating die head (5).
5. The slit coating device according to claim 4, characterized in that: The adsorption platform (3) is locked onto the base (1) via threads and has no relative movement with the base (1).
6. The slit coating device according to claim 1, characterized in that: The second transmission mechanism (4) is provided with a second guide rail and a motor, the motor is connected to the first transmission mechanism (2), the second transmission mechanism (4) is connected to the coating die head (5) via the second guide rail, and the second transmission mechanism (4) controls the up and down movement of the coating die head (5).
7. The slit coating device according to claim 6, characterized in that: The second transmission mechanism (4) receives a control signal from the PLC to drive the coating die head (5) to move in the direction of the motor lifting and lowering, so as to adjust the coating interval between the coating die head (5) and the coating substrate vacuum-adsorbed on the adsorption platform (3).
8. The slit coating device according to claim 7, characterized in that: The coating die (5) comprises a transverse dispersion channel for dispersing the solution and an extrusion lip for transferring the dispersed solution to the surface of the coating substrate without contact, and the distance between the extrusion lip and the coating substrate is adjusted by the second transmission mechanism (4) to form a predetermined coating interval.
9. The slit coating device according to claim 1, characterized in that: The center of gravity of the counterweight block (7) is located below the first transmission mechanism (2).