Method and device for calibrating and compensating laser beam direction of five-axis laser processing machine tool

Abstract

The invention discloses a laser beam direction calibration compensation method for a five-axis laser processing machine tool, and the method comprises the steps: collecting a laser spot image based on a camera assembly, and controlling the movement of an X axis and a Y axis of the machine tool based on the offset of the laser spot center relative to the view center of the camera assembly, so as to enable the laser spot center to be aligned with the view center of the camera assembly. And performing linear fitting on a series of obtained linear axis coordinates of the machine tool to obtain a laser beam direction fitting straight line. And then, based on the laser beam direction fitting straight line, a machine tool rotating shaft swing angle capable of enabling the laser beam to be perpendicular to the machine tool horizontal carrying table is obtained, the machine tool rotating shaft is adjusted to the machine tool rotating shaft swing angle, iteration adjustment is continuously conducted till no adjustment is needed, and the final machine tool rotating shaft swing angle is obtained. Compared with manual observation or marking measurement, the device is more sensitive to errors in the horizontal direction caused by direction errors of laser beams, the measurement precision is higher, higher calibration and compensation precision can be obtained, and high-precision five-axis laser machining is achieved.

Description

Technical Field

[0001] This application relates to the technical field of laser processing, and more specifically, to a method and device for calibrating and compensating the direction of a laser beam of a five-axis laser processing machine tool. Background Art

[0002] On machine tools for laser processing (including cutting, marking, texture engraving, etc.), there are inevitably angular errors in the installation of the laser processing head (laser head), and it is difficult to be completely perpendicular to the plane to be processed. For the processing of a two-dimensional plane, since the distance from the laser head to the processing plane remains constant, this error basically does not affect the accuracy of the processed pattern, so generally it is not sensitive to this error. However, when performing laser processing on a three-dimensional five-axis laser processing machine tool, to ensure efficiency or due to the accuracy of the workpiece or the machine tool itself, the distance from the laser head to the surface to be processed may change, resulting in a component of the angular error of the laser processing head in the direction parallel to the surface to be processed, causing the laser spot position to shift and the processed pattern to deform.

[0003] Currently, there are two main types of methods for calibrating the direction of a laser beam: First, by engraving concentric circles at different Z-axis heights, and judging the direction of the laser based on the offset of the Z-axis and the offset of the concentric circles in the XY plane. Second, by methods such as the spherical mirror method and the reflective collimator, and obtaining the beam offset direction based on the amplification of the reflected light and manual observation, and finely adjusting the lens group to compensate and calibrate the laser direction. The first type of method has accuracy loss due to the engraving itself, and the second type of method has large errors due to manual observation, resulting in poor sensitivity to the direction error of the laser beam and poor measurement accuracy for both types of methods, and being unable to meet the requirements of high-precision laser five-axis processing. Summary of the Invention

[0004] In view of at least one defect or improvement requirement of the prior art, this application provides a method and device for calibrating and compensating the direction of a laser beam of a five-axis laser processing machine tool, so as to solve the technical problem that the accuracy of the existing beam direction calibration and compensation methods of a five-axis laser processing machine tool is insufficient to meet the requirements of high-precision laser five-axis processing.

[0005] To achieve the above object, in a first aspect, this application provides a method for calibrating and compensating the direction of a laser beam of a five-axis laser processing machine tool, including:

[0006] Step 1: Move the horizontal stage of the machine tool to align the center of the laser spot with the center of the field of view of the camera assembly and minimize the area of the laser spot, and obtain the initial coordinates of the linear axis of the machine tool at this time; the camera assembly is arranged on the horizontal stage of the machine tool for collecting laser spot images.

[0007] Step 2: Vertically move the Z-axis of the machine tool to the first position. Based on the offset of the center of the laser spot relative to the center of the field of view of the camera assembly, control the XY-axes of the machine tool to align the center of the laser spot with the center of the field of view of the camera assembly, and obtain the first coordinates of the linear axes of the machine tool at this time.

[0008] Step 3: Following the logic of Step 2, continue to vertically move the Z-axis of the machine tool multiple times to the nth position different from the first position, and respectively obtain the nth coordinates of the linear axes of the machine tool corresponding thereto; n = 2, 3... n.

[0009] Step 4: Perform linear fitting on the initial coordinates of the linear axes of the machine tool, the first coordinates of the linear axes of the machine tool until the nth coordinates of the linear axes of the machine tool, and obtain the fitting straight line of the laser beam direction.

[0010] Step 5: Based on the fitting straight line of the laser beam direction, obtain the swing angle of the rotary axis of the machine tool that can make the laser beam perpendicular to the horizontal platform of the machine tool, and adjust the rotary axis of the machine tool to the swing angle of the rotary axis of the machine tool.

[0011] Step 6: Repeat Step 1 - Step 5, and iterate until the rotary axis of the machine tool no longer needs to be adjusted, then obtain the final swing angle of the rotary axis of the machine tool and use it as the new zero position of the rotary axis of the machine tool after calibration compensation of the laser beam direction.

[0012] Further, the calculation formula in Step 5 includes:

[0013] R A R B R C [i j k] T =[0 0 1] T ;

[0014] where, [i j k] represents the unit direction vector of the fitting straight line of the laser beam direction; R A 、R B 、R C respectively represent the rotation matrices of the A, B, and C axes of the rotary axis of the machine tool, where:

[0015]

[0016] α, β, and γ respectively represent the rotation angles of the A, B, and C axes of the rotary axis of the machine tool.

[0017] Further, if any one of the A, B, or C axes of the rotary axis of the machine tool does not exist on the five-axis laser processing machine tool, the corresponding rotation matrix is the identity matrix.

[0018] Further, before Step 1, it further includes:

[0019] Set the angles of the A, B, or C axes of the rotary axis of the five-axis laser processing machine tool to 0.

[0020] Furthermore, the method for obtaining the offset of the center of the laser spot relative to the center of the field of view of the camera assembly includes:

[0021] Binarize the laser spot image;

[0022] Extract the contour of the laser spot;

[0023] Obtain the coordinates of the pixel at the center of the laser spot contour;

[0024] Obtain the pixel difference between the center of the laser spot contour and the center of the field of view of the camera assembly;

[0025] Map the pixel difference to the actual XY-axis movement to obtain the offset.

[0026] Furthermore, the camera assembly includes:

[0027] A lens group for improving the pixel accuracy of the laser spot image and thus improving the acquisition accuracy of the center of the laser spot;

[0028] A camera sensor for sensing and collecting the laser spot image passing through the lens group.

[0029] Furthermore, the camera assembly further includes:

[0030] An attenuation device for attenuating the input laser beam to avoid damage to the lens group and the camera sensor by the laser beam.

[0031] In a second aspect, the present application provides a device for calibrating and compensating the direction of a laser beam of a five-axis laser processing machine, including:

[0032] A five-axis laser processing machine including a laser head fixed on its main shaft, the laser head being used to emit a laser beam; driving the movement or rotation of the machine tool axes can achieve the displacement or rotation of the laser head relative to the horizontal table of the machine tool;

[0033] A camera assembly fixed on the horizontal table of the machine tool for collecting the laser spot image of the laser beam emitted by the laser head;

[0034] An upper computer that receives the laser spot image collected by the camera assembly and performs data analysis and calculation and drives the five-axis movement of the machine tool to implement the calibration and compensation method according to any one of claims 1-5.

[0035] Furthermore, the camera assembly includes:

[0036] A lens group for improving the pixel accuracy of the laser spot image and thus improving the acquisition accuracy of the center of the laser spot;

[0037] A camera sensor for sensing and collecting the laser spot image passing through the lens group.

[0038] Further, the camera assembly further includes:

[0039] An attenuation device for attenuating the input laser beam to avoid damage to the lens group and the camera sensor caused by the laser beam.

[0040] Generally speaking, compared with the prior art, the above technical solutions conceived by this application can achieve the following beneficial effects:

[0041] (1) This application measures the laser spot based on the camera assembly. Compared with manual observation or marking measurement, it is more sensitive to the horizontal error caused by the direction error of the laser beam and has higher measurement accuracy. Higher calibration and compensation accuracy can be obtained to achieve high-precision five-axis laser processing.

[0042] (2) Almost all the calibration and compensation processes of this application do not require the participation of manual observation and operation. All process data can be obtained through camera measurement values, feedback values or calculated values of the machine tool axes and drive the movement of each axis of the machine tool to realize the full automation of the calibration and compensation processes. Description of the Drawings

[0043] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings in the following description are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0044] Figure 1 It is the core flowchart of a method for calibrating and compensating the laser beam direction of a five-axis laser processing machine tool provided by an embodiment of this application;

[0045] Figure 2 It is the structural schematic diagram of a device for calibrating and compensating the laser beam direction of a five-axis laser processing machine tool provided by an embodiment of this application;

[0046] Figure 3 It is the principle schematic diagram of the beam direction calibration of a five-axis laser processing machine tool provided by an embodiment of this application;

[0047] Figure 4 It is the schematic diagram of the laser spot in the camera image provided by an embodiment of this application;

[0048] Figure 5 It is the state schematic diagram when the machine tool rotation axis is at zero position after the laser beam compensation provided by an embodiment of this application;

[0049] Reference Signs:

[0050] 1 - Laser head

[0051] 1.1 - Laser beam;

[0052] The camera assembly may include 2.1 - an attenuation device, 2.2 - a lens group, and / or 2.3 - a camera sensor;

[0053] 2.3.1 - The center of the field of view of the camera assembly;

[0054] 3 - Machine tool horizontal carrier;

[0055] 4 - Laser spot;

[0056] 4.1 - The center of the laser spot. Detailed implementation manners

[0057] In order to make the objectives, technical solutions and advantages of the present application clearer and more understandable, the present application will be further described in detail below in combination with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. In addition, the technical features involved in the various embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0058] The terms "first", "second" or "nth", etc. in the specification, claims or drawings of the present application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "include" or "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally further include steps or units not listed, or may optionally further include other steps or units inherent to these processes, methods, products or devices.

[0059] Brief introduction of the background art

[0060] 1. Five-axis machine tools, five-axis machining, etc.

[0061] Five-axis machining is a mode of numerical control machine tool machining. According to the regulations of ISO, when describing the movement of a numerical control machine tool, a right-handed rectangular coordinate system is adopted; among them, the coordinate axis parallel to the spindle is defined as the Z axis, and the rotational coordinates around the X, Y, and Z axes are A, B, and C respectively. The movement of each coordinate axis can be achieved by the workbench or by the movement of the tool, but the direction is defined by the movement direction of the tool relative to the workpiece. Usually, five-axis linkage refers to the linear interpolation movement of any 5 coordinates among X, Y, Z, A, B, and C.

[0062] In other words, five-axis refers to three moving axes (linear axes), namely X, Y, and Z, plus any two rotary axes. Compared with common three-axis (three degrees of freedom of X, Y, and Z) machining, five-axis machining means that when machining parts with relatively complex geometric shapes, the machining tool needs to be able to be positioned and connected in five degrees of freedom. The machine tools used for five-axis machining are usually called five-axis machine tools or five-axis machining centers.

[0063] 2. Working Principle of Five-Axis Machining Center

[0064] The working principle of a five-axis machining center is mainly based on the coordinated control of its five independent axes, which include three linear axes (X, Y, Z) and two rotary axes (A, B, or C). The following is a detailed explanation of the working principle of a five-axis machining center.

[0065] Coordinated control of five independent axes: The core of a five-axis machining center lies in its ability to achieve coordinated control of five axes. The X-axis, Y-axis, and Z-axis respectively represent the movement in the front-back, left-right, and up-down directions of the workpiece, used to control the position of the workpiece in the plane and three-dimensional space. The A-axis and C-axis (or B-axis) are used to control the rotation of the workpiece. The A-axis rotates around the X-axis, the C-axis rotates around the Z-axis (the B-axis rotates around the Y-axis), enabling rotational machining in different directions. This multi-axis coordinated ability allows the five-axis machining center to perform all-round machining on the workpiece in three-dimensional space, greatly improving the machining accuracy and efficiency.

[0066] 3. XYZ Coordinate Axes and ABC Coordinate Axes of Five-Axis Machine Tools

[0067] The XYZ coordinate axes of a five-axis machine tool refer to three linear moving axes of the machine tool in space.

[0068] Specifically:

[0069] X-axis: This is a horizontal moving axis on the five-axis machine tool, usually used to move the workpiece or tool along the length direction of the machine tool. The moving range of the X-axis determines the length of the workpiece that the five-axis machine tool can process.

[0070] Y-axis: The Y-axis is another horizontal moving axis perpendicular to the X-axis. It is used to move the workpiece or tool along the width direction of the five-axis machine tool. The moving range of the Y-axis determines the width of the workpiece that the machine tool can process.

[0071] Z-axis: The Z-axis is a vertical moving axis perpendicular to the X-axis and Y-axis. It is used to move the workpiece or tool along the height direction of the five-axis machine tool. The moving range of the Z-axis determines the height of the workpiece that the machine tool can process and the cutting depth of the tool.

[0072] In addition to the above three linear moving axes, a five-axis machine tool also includes two rotary axes:

[0073] Axis A: Usually an axis that rotates around the X-axis, also known as the head tilt. It allows the tool or workpiece to rotate in the X-axis direction, thus enabling the machining of the side surface or complex curved surface of the workpiece.

[0074] Axis C: An axis that rotates around the Z-axis, also known as the worktable rotation axis. It allows the workpiece to rotate in the horizontal plane, thus enabling the machining of the circumferential surface or complex curved surface of the workpiece.

[0075] 4. Rotary axis swing angle in the XY plane of the machine tool

[0076] The rotary axis swing angle in the XY plane of the machine tool generally refers to the yaw angle of the machine tool guide rail. Yaw means the angle of rotation of the machine tool guide rail surface in the X and Y planes during the operation of the machine tool. The yaw situation can be divided into single-direction yaw and double-direction yaw. Single-direction yaw means the guide rail yaws on the X or Y axis, and double-direction yaw means the guide rail yaws simultaneously in the X and Y planes.

[0077] As described in the background art part of the specification, in the two main methods for calibrating the laser beam direction at present, due to the accuracy loss of the marking itself in the first method and the large error of manual observation in the second method, the current two methods have poor sensitivity to the direction error of the laser beam and poor measurement accuracy, and cannot meet the requirements of high-precision laser five-axis machining. In view of this, the present application provides a method and device for calibrating and compensating the laser beam direction of a five-axis laser processing machine tool to solve the technical problem that the accuracy of the existing beam direction calibration and compensation methods of the five-axis laser processing machine tool is insufficient to meet the requirements of high-precision laser five-axis machining.

[0078] Reference Figure 1 , Figures 3 - 5 , an embodiment of the present application provides a method for calibrating and compensating the laser beam direction of a five-axis laser processing machine tool based on a camera. The calibration and compensation method may include the following steps.

[0079] Step 1: Fix the laser head 1 on the spindle of the five-axis laser processing machine tool (abbreviation: five-axis machine tool). Driving the movement or rotation of the machine tool axis can realize the displacement or rotation of the laser head 1 relative to the machine tool horizontal platform 3. Fix the camera assembly on the XY platform (machine tool horizontal platform 3) of the five-axis machine tool, with the acquisition surface facing up, so as to collect the laser beam emitted downward by the laser head 1.

[0080] In some embodiments, the camera assembly includes a lens group 2.2 and a camera sensor 2.3.

[0081] The lens group 2.2 is used to improve the pixel accuracy of the laser spot image, thereby improving the acquisition accuracy of the laser spot center. The camera sensor 2.3 is used to sense and collect the laser spot image passing through the lens group 2.2.

[0082] Preferably, the camera assembly further includes an attenuation device 2.1. The attenuation device 2.1 is used to attenuate the input laser beam 1.1 with different powers to a range that the camera sensor 2.3 can withstand, so as to avoid damage to the lens group 2.2 and the camera sensor 2.3 caused by the laser beam 1.1 with a higher power.

[0083] Step 2: Set the angles of the rotary axes A, B, or C of the five-axis machine tool to 0.

[0084] At this time, theoretically, the laser beam 1.1 is perpendicular to the XY table of the machine tool. However, due to actual installation errors, the laser beam 1.1 is not completely perpendicular to the XY table of the machine tool.

[0085] Step 3: Move the XY table of the machine tool so that the center 4.1 of the laser spot aligns with the image center of the camera (the center 2.3.1 of the field of view of the camera assembly), and the area of the laser spot 4 reaches the minimum. Record the XYZ coordinates P 0 (i.e., the initial coordinates of the linear axes of the machine tool); at this time, the laser beam 1.1 is focused on the center of the field of view of the camera assembly.

[0086] Step 4: Move the Z axis of the five-axis machine tool up or down to different positions. Based on the offset of the center 4.1 of the laser spot relative to the center 2.3.1 of the field of view of the camera assembly, control the movement of the XY axes of the machine tool so that the center 4.1 of the laser spot aligns with the center 2.3.1 of the field of view of the camera assembly, and record the XYZ coordinates P 1 (i.e., the first coordinates of the linear axes of the machine tool).

[0087] In some embodiments, the method for obtaining the offset of the center 4.1 of the laser spot relative to the center 2.3.1 of the field of view of the camera assembly includes:

[0088] Step 41: Binarize the laser spot image.

[0089] Step 42: Extract the contour of the laser spot.

[0090] Step 43: Obtain the coordinates of the pixel at the center of the laser spot contour.

[0091] Step 44: Obtain the pixel difference between the center of the laser spot contour and the center of the field of view of the camera assembly.

[0092] Step 45: Map the pixel difference to the actual XY-axis movement to obtain the offset.

[0093] Step 5: Repeat the logic for obtaining the coordinates of the linear axes of the machine tool in Step 4. Similarly, obtain the XYZ coordinates P 2 ~P n .

[0094] Step 6: Based on P 0 ~Pn , perform linear fitting to obtain the fitting straight line l of the laser beam direction, and the direction of l is the actual incident direction of the laser beam 1.1 (representing the actual installation direction of the laser head 1).

[0095] Step 7: Solve the swing angle of the machine tool rotation axis that can make the laser beam 1.1 perpendicular to the horizontal platform 3 of the machine tool based on the direction vector of l. The solved swing angle of the machine tool rotation axis is the target angle of the machine tool rotation axis. Then, adjust the machine tool rotation axis to this target angle.

[0096] The solution equation for the rotation adjustment angle of the machine tool rotation axis is:

[0097] R A R B R C [i j k] T =[0 0 1] T ;

[0098] where, [i j k] represents the unit direction vector of the fitting straight line l of the laser beam direction; R A 、R B 、R C respectively represent the rotation matrices of the machine tool rotation axes A, B, and C of the five-axis laser processing machine tool, where:

[0099]

[0100]

[0101] α, β, and γ respectively represent the rotation angles of the machine tool rotation axes A, B, and C.

[0102] Furthermore, if any one of the machine tool rotation axes A, B, or C does not exist on the five-axis laser processing machine tool, the corresponding rotation matrix is the identity matrix.

[0103] Step 8: Repeat steps 3 to 7 until the machine tool rotation axis no longer needs to be adjusted. The target machine tool rotation axis swing angle calculated in step 7 is the actual machine tool rotation axis swing angle; record the machine tool rotation axis angle at this time as the new zero position of the machine tool rotation axis. After that, when the angles of the machine tool rotation axes A, B, or C are set to 0, the machine tool rotation axis will rotate to Figure 5 the new zero position shown, and the laser beam 1.1 will be perpendicular to the horizontal platform 3 of the machine tool, completing the calibration of the laser beam 1.1.

[0104] This application measures the laser spot based on a camera component. Compared with manual observation or marking measurement, it is more sensitive to the horizontal error caused by the direction error of the laser beam and has higher measurement accuracy. It can obtain higher calibration and compensation accuracy and achieve high-precision five-axis laser processing. Almost all calibration and compensation processes of this application do not require the participation of manual observation and operation. All process data can be obtained through camera measurement values, feedback values of machine tool axes, or calculated values, and used to drive the movement of each axis of the machine tool, realizing the full automation of the calibration and compensation processes.

[0105] Reference Figure 2 , Another embodiment of this application provides a calibration and compensation device for the laser beam direction of a five-axis laser processing machine tool based on a camera. The calibration and compensation device may include the following components.

[0106] A five-axis laser processing machine tool, including a laser head 1 fixed on its spindle. The laser head 1 is used to emit a laser beam 1.1; driving the movement or rotation of the machine tool axes can achieve the displacement or rotation of the laser head 1 relative to the machine tool horizontal table 3.

[0107] A camera component, which is fixed on the machine tool horizontal table 3 and is used to collect the laser spot image of the laser beam 1.1 emitted by the laser head 1.

[0108] An upper computer, which receives the laser spot image collected by the camera component, performs data analysis and calculation, and drives the five-axis movement of the machine tool, and can implement the calibration and compensation method described in any one or more of steps 1 - step 8 of the foregoing embodiment.

[0109] In some embodiments, the camera component includes a lens group 2.2 and a camera sensor 2.3.

[0110] The lens group 2.2 is used to improve the pixel accuracy of the laser spot image, thereby improving the acquisition accuracy of the laser spot center. The camera sensor 2.3 is used to sense and collect the laser spot image passing through the lens group 2.2.

[0111] Preferably, the camera component further includes an attenuation device 2.1. The attenuation device 2.1 is used to attenuate the input laser beam 1.1 with different powers to a range that the camera sensor 2.3 can withstand, so as to avoid damage to the lens group 2.2 and the camera sensor 2.3 caused by the high-power laser beam 1.1.

[0112] For the specific technical details in the embodiment of this calibration and compensation device, reference can be made to the embodiment of the foregoing calibration and compensation method, which will not be elaborated here.

[0113] Those skilled in the art will understand that the technical features recited in the various embodiments and / or claims of the present application can be combined and / or combined in various ways, even if such combinations or combinations are not explicitly recited in the present application. In particular, without departing from the spirit and teachings of the present application, the technical features recited in the various embodiments and / or claims of the present application can be combined and / or combined in various ways, and all such combinations and / or combinations fall within the scope of the present application.

[0114] Although the present application has been shown and described with reference to specific exemplary embodiments of the present application, those skilled in the art should understand that various changes in form and detail can be made to the present application without departing from the spirit and scope of the present application as defined by the appended claims and their equivalents. Therefore, the scope of the present application should not be limited to the above embodiments, but should be determined not only by the appended claims, but also by the equivalents of the appended claims.

Claims

1. A method for calibrating and compensating the direction of a laser beam of a five-axis laser machining machine tool, characterized in that: include: Step 1, move the horizontal stage of the machine tool so that the center of the laser spot is aligned with the center of the field of view of the camera component and the area of ​​the laser spot is minimized, and obtain the initial coordinates of the linear axis of the machine tool at this time; the camera component is set on the horizontal stage of the machine tool to collect the laser spot image; Step 2, vertically move the Z axis of the machine tool to the first position, and based on the offset of the center of the laser spot relative to the center of the field of view of the camera assembly, control the XY axis movement of the machine tool to align the center of the laser spot with the center of the field of view of the camera assembly, and obtain the first coordinate of the linear axis of the machine tool at this time; Step 3, following the logic of step 2, continue to vertically move the Z axis of the machine tool to the nth position different from the first position for multiple times, and obtain the corresponding nth coordinates of the linear axis of the machine tool respectively; n=2, 3...n; Step 4, perform straight line fitting on the initial coordinate of the linear axis of the machine tool, the first coordinate of the linear axis of the machine tool, and the nth coordinate of the linear axis of the machine tool to obtain a fitting straight line in the direction of the laser beam; Step 5: based on the laser beam direction fitting straight line, obtain the machine tool rotation axis swing angle that enables the laser beam to be perpendicular to the machine tool horizontal platform, and adjust the machine tool rotation axis to the machine tool rotation axis swing angle; Step 6, repeat steps 1 to 5, iterate until the machine tool rotation axis no longer needs to be adjusted, obtain the final swing angle of the machine tool rotation axis and use it as the new zero position of the machine tool rotation axis after laser beam direction calibration and compensation.

2. The calibration compensation method according to claim 1, characterized in that: Calculation formula for step 5 include: R A R B R C [i j k] T =[0 0 1] T ; Wherein, [ijk] represents the unit direction vector of the fitting line of the laser beam direction; R A , R B , R C Respectively represent the rotation matrices of the machine tool rotation axes A, B and C, where: α, β and γ represent the rotation angles of the machine tool's A, B and C axes, respectively.

3. The calibration compensation method according to claim 2, characterized in that: If any of the A, B or C axis machine tool rotation axes does not exist on the five-axis laser processing machine tool, the corresponding rotation matrix is ​​the unit matrix.

4. The calibration compensation method according to claim 1, characterized in that: Before step 1, also include: The angle of the machine rotation axis A, B or C axis of the five-axis laser processing machine tool is set to 0.

5. The calibration compensation method according to claim 1, characterized in that: Methods for obtaining the offset of the center of the laser spot relative to the center of the camera component's field of view include: Binarize the laser spot image; Extract laser spot profile; Get the coordinates of the center pixel of the laser spot outline; Obtain the pixel difference between the center of the laser spot profile and the center of the camera component field of view; The pixel difference is mapped to the actual XY axis motion to obtain the offset.

6. The calibration compensation method according to claim 1, characterized in that: The camera assembly comprises: The lens group is used to improve the pixel accuracy of the laser spot image, thereby improving the acquisition accuracy of the laser spot center; The camera sensor is used to sense and collect the laser spot image passing through the lens group.

7. The calibration compensation method according to claim 6, characterized in that: The camera assembly further comprises: The attenuation device is used to attenuate the input laser beam to prevent the laser beam from damaging the lens group and the camera sensor.

8. A laser beam direction calibration and compensation device for a five-axis laser machining machine tool, characterized in that: include: A five-axis laser processing machine tool includes a laser head fixed on its main axis, and the laser head is used to emit a laser beam; driving the movement or rotation of the machine tool axis can achieve displacement or rotation of the laser head relative to the horizontal platform of the machine tool; A camera assembly, which is fixed on the horizontal stage of the machine tool and is used to collect a laser spot image of the laser beam emitted by the laser head; A host computer receives the laser spot image collected by the camera component and performs data analysis and calculation and five-axis motion drive of the machine tool to implement the calibration compensation method described in any one of claims 1 to 7.

9. The calibration compensation device according to claim 8, characterized in that: The camera assembly comprises: The lens group is used to improve the pixel accuracy of the laser spot image, thereby improving the acquisition accuracy of the laser spot center; The camera sensor is used to sense and collect the laser spot image passing through the lens group.

10. The calibration compensation device according to claim 9, characterized in that: The camera assembly further comprises: The attenuation device is used to attenuate the input laser beam to prevent the laser beam from damaging the lens group and the camera sensor.

Images