Method for preparing template by using droplet spraying process

Abstract

The invention discloses a method for preparing a template through a microdroplet jetting process. The method comprises the following steps that S1, a bottom plate with a target structure is prepared; s2, carrying out anti-sticking treatment on the surface of the bottom plate; s3, the imprinting glue is dripped to the surface of the bottom plate through micro-droplet jetting; s4, removing bubbles between the imprinting glue and the bottom plate; s5, curing treatment is carried out on the imprinting glue; and S6, separating the imprinting glue from the bottom plate. According to the method, the imprinting glue is dripped to the surface of the bottom plate to form the final template by using the micro-droplet spraying process, and the bubble removal operation is added in the manufacturing process, so that the consistency of the final template and a target structure is ensured.

Description

Technical Field

[0001] The present invention relates to the field of nanoimprint technology, and particularly to a method for preparing a template by using a microdroplet ejection process. Background Art

[0002] Nanoimprint technology is a new type of micro-nano processing technology that transfers patterns by mechanical transfer means. The processing process of nanoimprint technology uses mechanical means for pattern transfer. This method can achieve a very high resolution. Currently, the highest resolution can reach 2 nanometers, which has exceeded the resolution achieved by traditional lithography technology. In addition, the template can be reused, greatly reducing the processing cost and effectively shortening the processing time. Nanoimprint technology has the technical advantages of ultra-high resolution, easy mass production, low cost, and high consistency, and is expected to replace traditional lithography technology in the future and become an important processing means in the fields of microelectronics and materials.

[0003] Microdroplet ejection is a method of ejecting a liquid sample in the form of microdroplets to a specific position. By using the principles of electric field action and hydrodynamics, high-precision and high-speed microdroplet ejection can be achieved, and it is widely used in the fields of biomedicine, chemical analysis, materials science, etc.

[0004] In the nanoimprint process, in order to improve the success rate of demolding and reduce demolding defects, an anti-sticking process is often used, that is, a thin anti-sticking layer is prepared on the surface of the template, and this anti-sticking layer generally has the characteristic of low surface energy. When it is necessary to imprint a structure with a high aspect ratio, a gap will be formed between the template and the imprinting glue, and this gap will cause the imprinted structure to not completely reproduce the template structure.

[0005] The information disclosed in this background art section is only intended to enhance the overall understanding of the present invention and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Invention

[0006] The purpose of the present invention is to provide a method for preparing a template based on a microdroplet ejection process, which is used to solve the problem that the finally formed template is inconsistent with the target structure in the prior art.

[0007] To achieve the above purpose, an embodiment of the present invention provides a method for preparing a template by using a microdroplet ejection process, including the following steps:

[0008] S1. Prepare a bottom plate with a target structure;

[0009] S2. Perform an anti-sticking treatment on the surface of the bottom plate;

[0010] S3. Use microdroplet ejection to drop the imprinting glue onto the surface of the bottom plate;

[0011] S4. Remove the air bubbles between the imprinting glue and the bottom plate;

[0012] S5. Cure the imprinting glue;

[0013] S6. Separate the imprinting glue from the bottom plate.

[0014] In one or more embodiments of the present invention, in step S1, the bottom plate is a silicon bottom plate or a nickel plate.

[0015] In one or more embodiments of the present invention, in step S2, a trichloroperfluorooctylsilane is used to form an anti-adhesive layer on the surface of the bottom plate.

[0016] In one or more embodiments of the present invention, in step S3, the droplet size of the micro-droplet ejection is smaller than the minimum size of the target structure.

[0017] In one or more embodiments of the present invention, in step S4, a vacuum chamber is provided, and the bottom plate sprayed with the imprinting glue is placed in the vacuum chamber.

[0018] In one or more embodiments of the present invention, the pressure in the vacuum chamber is less than 50 mTorr.

[0019] In one or more embodiments of the present invention, in step S5, the imprinting glue on the surface of the bottom plate is cured by ultraviolet light irradiation.

[0020] Compared with the prior art, the template prepared by the preparation method according to the embodiment of the present invention, by adopting micro-droplet jet forming and vacuum defoaming operations, makes the template bubble-free, and the finally formed template is completely consistent with the target structure, ensuring the yield. Description of the Drawings

[0021] Figure 1 is a flowchart of a method for preparing a template by a micro-droplet jet process according to an embodiment of the present invention;

[0022] Figure 2 is a schematic diagram when there is a gap between the imprinting glue and the bottom plate according to an embodiment of the present invention;

[0023] Figure 3 is a schematic diagram of the state where the imprinting glue and the bottom plate are closely attached according to an embodiment of the present invention;

[0024] Figure 4 is a schematic diagram during micro-droplet ejection in the method for preparing a template by a micro-droplet jet process according to an embodiment of the present invention.

[0025] Description of the Main Reference Numerals:

[0026] 10 - Bottom plate, 11 - Groove, 20 - Template, 30 - Gap, 40 - Imprinting glue droplet, 50 - Nozzle. Detailed implementation manners

[0027] The following combines with the attached drawings to describe in detail the specific implementation manners of the present invention. However, it should be understood that the protection scope of the present invention is not limited by the specific implementation manners.

[0028] Unless otherwise clearly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "having" etc. will be understood to include the stated elements or components, without excluding other elements or other components.

[0029] As Figure 1 shown, a method for preparing a template by a micro - droplet injection process according to a preferred embodiment of the present invention includes steps S1 to S7:

[0030] In step S1, a bottom plate with a target structure is prepared.

[0031] Specifically, the bottom plate can be a silicon bottom plate or a nickel plate. Of course, other commonly used material bottom plates in the art can also be selected. The bottom plate has a specific target structure formed on it. According to the imprinting requirements, the target structure can be a specific shape, pattern, etc.

[0032] In step S2, the surface of the bottom plate is subjected to an anti - adhesion treatment.

[0033] Specifically, an anti - adhesion layer can be formed on the bottom plate to improve the demolding success rate and reduce demolding defects. For example, a layer of trichloroperfluorooctylsilane can be formed on the bottom plate. Trichloroperfluorooctylsilane can form a tight chemical bond on the surface of the material to form a protective film, improve the surface wettability and water resistance, and at the same time can also increase the anti - pollution performance of the material surface.

[0034] Of course, in addition to silane - based compounds, fluorocarbon compounds, polymers, etc. can also be used. By soaking, spraying or coating on the surface of the bottom plate, or through pickling, anodizing or electrochemical treatment, the active sites on the metal surface are increased, so that the adhering substances are difficult to adhere to the surface of the bottom plate.

[0035] In step S3, micro - droplet injection is used to drop the imprinting glue onto the surface of the bottom plate.

[0036] Specifically, micro - droplet injection is used to spray the imprinting glue on the surface of the bottom plate. And to make the imprinting glue cover each target structure, the droplet size of the micro - droplet injection is smaller than the minimum size of the target structure.

[0037] In step S4, the air bubbles between the imprinting glue and the bottom plate are removed.

[0038] Specifically, the vacuum degassing method is used to remove the air bubbles in the imprinting glue and between the imprinting glue and the bottom plate. The bottom plate sprayed with the imprinting glue is placed in a vacuum chamber. By creating a high-vacuum environment, the air bubbles that may exist inside the imprinting glue and between the imprinting glue and the bottom plate are removed, so as to ensure that the imprinting glue is closely attached to the bottom plate, making it form a structure identical to the target structure on the surface of the bottom plate.

[0039] Furthermore, to ensure the degassing effect, the pressure in the vacuum chamber is less than 50 mTorr, that is, 6.65 Pa.

[0040] In step S5, the imprinting glue is cured.

[0041] Specifically, the imprinting glue on the surface of the bottom plate is irradiated with ultraviolet light. By using the instantaneous decomposition of ultraviolet light to cause the polymerization and cross-linking of the imprinting glue, a stable curing environment is obtained for later demolding.

[0042] In step S6, the imprinting glue and the bottom plate are separated.

[0043] Specifically, after the imprinting glue is cured to form the final template, it is peeled off from the bottom plate. The cured imprinting glue after peeling is the final template.

[0044] In Figures 2 to 4 In the shown embodiment, the bottom plate 10 is below and the formed final template 20 is above. The target structure on the surface of the bottom plate 10 is a cylindrical dot matrix structure. Each groove 11 is a cylindrical structure with a diameter of 140 μm and a depth of 120 μm, and the distance between adjacent grooves 11 is 200 μm. Before the glue dropping operation, an anti-adhesive layer formed by trichloroperfluorooctylsilane is formed on the surface of the bottom plate 10 (not shown in the figure).

[0045] Subsequently, the glue dropping operation is carried out. In this embodiment, the micro-droplet spraying process is adopted. Therefore, the imprinting glue forms glue droplets 40 by the nozzle 50 and drops onto the bottom plate 10 drop by drop, and the diameter of the glue droplet 40 is 50 μm (as Figure 4 shown). During the glue dropping process, the nozzle 50 makes a displacement action after each release of a glue droplet 40, and then the next glue droplet 40 release operation is carried out. That is, each glue droplet 40 spreads rapidly after dropping onto the surface of the groove 11. When the next glue droplet 40 drops into the groove 11, it continues to spread. Therefore, the spreading speed of the imprinting glue is sufficient to squeeze out the air in the groove 11.

[0046] Of course, in addition to the above setting form, the nozzle 50 can also select to perform the displacement operation after releasing multiple glue droplets 40 according to the thickness requirement of the final template 20.

[0047] After that, the bottom plate 10 after the spraying is completed is placed in a vacuum chamber for vacuum defoaming to further ensure that the air bubbles in the imprinting glue and the gap 30 between the imprinting glue and the bottom plate 10 are completely removed, so that the imprinting glue is closely attached to the bottom plate 10 without gaps, as Figure 3 shown. And to ensure the defoaming effect, the pressure in the vacuum chamber is less than 50 mTorr, that is, less than 6.65 Pa, and the defoaming time is 3 - 5 min.

[0048] After the vacuum defoaming operation is completed, ultraviolet light is used to irradiate the surface of the imprinting glue to cure it. After curing is completed, demolding can be carried out, and finally a formed template is obtained. The template obtained by this method has no air bubbles and is completely consistent with the target structure.

[0049] The foregoing description of the specific exemplary embodiments of the present invention is for the purposes of illustration and exemplification. These descriptions are not intended to limit the invention to the precise forms disclosed, and obviously, many changes and variations are possible in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the invention and its practical applications, so that those skilled in the art can implement and utilize the various different exemplary embodiments of the invention, as well as various different selections and changes. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A method for preparing a template by a micro-droplet injection process, characterized in that, it includes the following steps: S1. Prepare a bottom plate with a target structure; S2. Perform an anti-adhesion treatment on the surface of the bottom plate; S3. Use micro-droplet injection to drop the imprinting glue onto the surface of the bottom plate; S4. Remove the air bubbles between the imprinting glue and the bottom plate; S5. Cure the imprinting glue; S6. Separate the imprinting glue from the bottom plate.

2. The preparation method according to claim 1, characterized in that, in step S1, the bottom plate is a silicon bottom plate or a nickel plate.

3. The preparation method according to claim 1, characterized in that, in step S2, trichloroperfluorooctylsilane is used to form an anti-adhesion layer on the surface of the bottom plate.

4. The preparation method according to claim 1, characterized in that, in step S3, the droplet size of the micro-droplet injection is smaller than the minimum size of the target structure.

5. The preparation method according to claim 1, characterized in that, in step S4, a vacuum chamber is provided, and the bottom plate sprayed with the imprinting glue is placed in the vacuum chamber.

6. The preparation method according to claim 6, characterized in that, the pressure in the vacuum chamber is less than 50 mTorr.

7. The preparation method according to claim 1, characterized in that, in step S5, the imprinting glue on the surface of the bottom plate is cured by ultraviolet light irradiation.

Images