Probe cleaning sheet material containing silicone rubber

Abstract

The invention relates to the technical field of probe cleaning sheets, in particular to a probe cleaning sheet material containing silicone rubber. A probe cleaning sheet material containing silicone rubber is characterized in that the probe cleaning sheet material comprises a bottom film, a cleaning cushion layer is arranged on the bottom film, and viscoelastic layers are arranged on the upper bottom face and the lower bottom face of the bottom film; wherein the cleaning cushion layer comprises a plurality of inverted pyramid-shaped concave structures which are arranged in a matrix, and the shore hardness A of the cleaning cushion layer is 50-80. According to the probe cleaning sheet material containing the silicone rubber, the problems of low test accuracy and high failure rate caused by adhesion of scraps and pollutants and low cleaning efficiency in the signal transmission process of the tip of an existing probe abutting against an element on a die of a wafer are solved, the probe is regularly polished and cleaned, and the detection accuracy is improved. According to the probe grinding device, scraps and pollutants attached to the probe are removed, and the probe is slightly ground, so that the probe can be used for a long time, and the stability and the reliability of a test result are improved.

Description

Technical Field

[0001] The present application relates to the technical field of probe cleaning sheets, and more particularly, to a silicone rubber-containing probe cleaning sheet material. Background Art

[0002] Semiconductor (integrated circuit) devices are produced by fabricating multiple devices on a semiconductor wafer using semiconductor processing techniques including lithography, deposition, and sputtering, with the intention of fabricating a complete functional integrated circuit device (IC) at the wafer level. Individual IC devices are singulated or diced from the semiconductor wafer into discrete and independent die. Assembly techniques include die attachment to a lead frame, wire bonding, or solder ball attachment to assemble the singulated IC devices, which are ultimately completed in a package or incorporated into an electronic device and encapsulated.

[0003] However, in actual singulation to assembly practice, physical defects in the wafer itself and / or defects in wafer processing will inevitably result in some die on the wafer being fully functional, some die being non-functional, and some die having lower performance or requiring repair. It is generally desirable to preferably identify which die on the wafer are fully functional before singulating and assembling the wafer into consumer devices. A process called wafer sorting identifies non-functional, lower performance, and repairable devices caused by certain physical defects in the wafer, defects in the IC circuit layers, and / or defects related to semiconductor processing techniques. Among them, the product performance is determined by electrical testing. Once the device has been singulated, certain process steps during handling and assembly will inevitably result in dicing defects, handling defects, assembly and packaging-related defects, which can only be electrically identified to re-grade the device as fully functional, non-functional, or possibly "repairable". In a typical wafer testing process, a probe card is mounted to a prober, and probe contact elements (simply referred to as "probes") are brought into contact with bonding pads, solder balls, and / or gold bumps formed on the die of the wafer. By applying a controlled displacement of the probe tip against the bonding pad, solder ball, and / or gold bump, an electrical connection is achieved that allows the transmission of power signals, ground signals, and test signals. Repeated scratching, deformation, and penetration of the probe tip against the bonding pad, solder ball, and / or gold bump generate debris and contaminants that adhere and accumulate on the probe contact surface, causing local formation of a heat source on the component surface, resulting in thermal damage and affecting the results of the electrical performance testing process. It is necessary to periodically remove the generated debris from the contact elements to prevent build-up, which leads to increased contact resistance, continuity failures, and false test indications, which in turn artificially result in lower yields and subsequent increased product costs. Summary of the Invention

[0004] In view of the problems of debris and pollutant adhesion generated during the signal transmission process of the existing probe tip against the components on the die of the wafer, low cleaning efficiency, resulting in low test accuracy and high failure rate, the present application provides a probe cleaning sheet material containing silicone rubber, which regularly grinds and cleans the probe, removes the debris and pollutants attached to the probe, and slightly grinds the probe so that it can be used for a long time, improving the stability and reliability of the test results.

[0005] In a first aspect, the present application provides a probe cleaning sheet material containing silicone rubber, and adopts the following technical solution: A probe cleaning sheet material containing silicone rubber, characterized in that: it includes a bottom film, a cleaning cushion layer is arranged on the bottom film, and viscoelastic layers are arranged on both the upper and lower bottom surfaces of the bottom film; wherein, the cleaning cushion layer includes a number of inverted pyramid-shaped concave structures arranged in a matrix, and the Shore hardness A of the cleaning cushion layer is 50-80.

[0006] Preferably, the viscoelastic layer is an acrylic pressure-sensitive adhesive; the bottom film is made of ABS material.

[0007] By adopting the above technical solution, by pasting viscoelastic layers on the upper and lower bottom surfaces of the bottom film, a pressure-sensitive adhesive material is coated on the bottom surface of the bottom film so that the probe sheet cleaning material can be pasted on the probe cleaning platform during use, maintaining the stability of the cleaning process. The cleaning cushion layer has a number of inverted pyramid-shaped concave structures with specific geometric and dimensional characteristics. The inverted pyramid geometric size characteristics are selected to optimize the cleaning material, so that the probe tip enters the inverted pyramid-shaped concave structure, and the pollutants on the probe are cleaned through the inclined grooves. The bottom of the groove is a flat structure to prevent the probe from being overly ground, thereby affecting signal reception and transmission and the long-term use performance of the probe. The cleaning cushion layer has a certain range of Shore hardness to effectively clean the contact area and the surrounding support hardware, and avoid deformation or damage of the inverted pyramid-shaped concave structure. If the hardness of the cleaning cushion layer is too small, the concave structure of the cleaning cushion layer will deform, and the debris on the probe cannot be effectively cleaned and taken out, thereby preventing the contact resistance from increasing during the use of the probe, and thus affecting the detection effect; if the hardness of the cleaning cushion layer is too large, the probe will be over-cleaned and worn, reducing the service life of the probe.

[0008] The depth of the inverted pyramid-shaped concave structure is 30-100μm, the thickness of the bottom of the structure is 150-200μm, and the width of the upper plane of the formed groove is 100-250μm.

[0009] The width ratio of the upper and lower parts of the groove is (1.5-5):1.

[0010] The further limitation of the inverted pyramid-shaped recessed structure enables the probe needle with debris and contaminated tip to enter the recessed structure, and through scraping and grinding, the debris and the like are carried away from the probe needle without exposing the probe, preventing the probe from being damaged as in the case of a flat surface; through the upper and lower widths of the grooves in a certain proportion, the inclination of the grooves of the pyramid-shaped structure is within a certain range, and the inclination angle of the grooves adapts to the probe needle, so that the probe needle is close to the grooves, and then the probe needle is effectively cleaned. The pyramid-shaped recessed structure has four inclined surfaces, which improves the cleaning efficiency of the probe needle, also enables the cleaning sheet to have a longer service life, and also avoids the single force during grinding from damaging the probe needle; the bottom of the recessed structure has a certain thickness, so that when the probe needle is cleaned, there is a certain buffer for each downward pressure, preventing the probe needle from being damaged and reducing the scratches on the probe.

[0011] The cleaning cushion layer includes lignin-modified silicone rubber and wear particles.

[0012] The wear particles include one or more of silicon carbide, magnesium oxide, zirconia, and diamond micropowder.

[0013] Through the lignin in the cleaning cushion layer, lignin is a biopolymer with a three-dimensional network structure and contains a rich aromatic ring structure, enhancing the thermal stability of the cleaning cushion layer material, thereby improving the hardness and toughness of the cleaning sheet material. At the same time, the structure includes a variety of functional functional groups and has a certain surface activity, which can effectively bond debris and pollutants. In this application, the hydroxyl groups in the lignin structure can form hydrogen bonds with the hydroxyl groups on the surface of the silicon material, thereby changing the performance of the silicone rubber. It not only enables the surface of the silicon-containing material to have bonding properties, but also makes the silicone rubber have a certain hardness and toughness, so that the cleaning sheet material has good wear resistance. Moreover, the rich hydroxyl group and other functional group structures on the surface of lignin in this application have a certain ability to disperse inorganic powders and can be used as a dispersant for wear particles, further improving the wear resistance of the cleaning sheet material and enhancing the overall mechanical properties of the material.

[0014] The preparation method of the lignin-modified silicone rubber is to add lignosulfonate and calcium silicate to water and mix and stir for 20 - 60 min, add hydrochloric acid to adjust the pH value to 5 - 6, heat to 50 - 60 °C and stir for 20 - 30 min to obtain lignin-modified calcium silicate; take vinyl silicone rubber, lignin-modified calcium silicate, aluminum sulfate, and hydroxyl silicone oil and mix them, and stir at 100 - 110 °C for 15 - 20 min to obtain lignin-modified silicone rubber.

[0015] The mass ratio of the lignin-modified calcium silicate to the vinyl silicone rubber is (1 - 1.3):1.

[0016] The mass ratio of the lignin-modified silicone rubber to the wear particles is 1:(0.8 - 1.2).

[0017] By adopting lignosulfonate, and using the rich phenyl, carboxyl, hydroxyl and other groups in its surface structure and the groups on the surface of calcium silicate to form ester groups, hydrogen bonds and other interaction forces, the calcium silicate powder is more dispersed in the system, increasing the frosting property of the silicone rubber containing silicon. In addition, the three-dimensional structure of lignin itself increases the hardness, toughness and thermal stability of the silicone rubber containing silicon, greatly avoiding the increase in contact resistance, continuous faults and the probability of incorrect test indications caused by the periodic cleaning of the probe needles to remove the generated debris, reducing the wear rate of the probe needles as consumables, and reducing the cost of replacing the probe card. Among them, if the content of lignin-modified calcium silicate is too low, the toughness of the rubber is insufficient, and it is easy for the pyramid-like concave structure to be partially or completely deformed during downward pressure cleaning, affecting the cleaning efficiency. If there are too many abrasive particles, the dispersion of the power is poor, the surface frosting property is too large, and under the same pressure, the probe needles are easily over-cleaned, reducing the service life. If there are too few abrasive particles, the cleaning effect is poor, the speed is slow and the efficiency is low, affecting the normal use of the probe needles.

[0018] In summary, the present application has the following beneficial effects: 1. By attaching viscoelastic layers to the upper and lower bottom surfaces of the bottom film, a pressure-sensitive adhesive material is coated on the bottom surface of the bottom film so that the probe chip cleaning material can be attached to the needle cleaning platform during use, maintaining the stability of the cleaning process. The cleaning cushion layer has a plurality of inverted pyramid-like concave structures with predetermined geometric and dimensional characteristics. The inverted pyramid geometric dimensional characteristics are selected to optimize the cleaning material, so that the tip of the probe needle enters the inverted pyramid-like concave structure, and the pollutants on the probe needle are cleaned through the inclined grooves. The bottom of the groove is a flat structure to prevent the probe needle from being overly ground, thereby affecting signal reception and transmission and the long-term use performance of the probe needle. The cleaning cushion layer has a certain range of Shore hardness to effectively clean the contact area and the surrounding probe needles and avoid deformation or damage of the inverted pyramid-like concave structure. If the hardness of the cleaning cushion layer is too small, the concave structure of the cleaning cushion layer will be deformed, and the debris on the probe needle cannot be effectively cleaned and taken out, thereby preventing the contact resistance from increasing during the use of the probe needle, and thus affecting the detection effect; if the hardness of the cleaning cushion layer is too large, the probe needle will be over-cleaned and worn, reducing the service life of the probe needle.

[0019] The composite resin modified zinc-rich primer prevents rust by sacrificing zinc powder and has a cathodic protection effect on steel. Through the modification of composite resin, the chemical solvent resistance, corrosion resistance and adhesion can be enhanced, making the coating material have the characteristics of good weather resistance and strong adhesion. The heat-insulating and anti-corrosion coating has a high bonding strength between the composite resin emulsion and basalt scales, and forms a barrier effect of parallel superposition of multi-layer flaky structures, with good shielding performance. The scales can form a staggered arrangement, which can make the penetration of corrosive media tortuous, thus delaying the diffusion and intrusion path and time of corrosive media to the metal surface, thereby improving the anti-corrosion performance of the coating. By adding nano-aluminum oxide dispersion liquid, the density, anti-corrosion performance and flame retardancy of the paint film can be significantly improved, the dispersibility and interfacial performance can be improved to prevent sedimentation, and the interfacial compatibility between basalt scales and composite resin solution can be ensured.

[0020] 2. Lignosulfonate is used. The rich phenyl, carboxyl, hydroxyl and other groups in its surface structure form ester groups, hydrogen bonds and other forces with the groups on the surface of calcium silicate, making the calcium silicate powder more dispersed in the system and increasing the abrasiveness of the silicone rubber. In addition, the three-dimensional structure of lignin itself increases the hardness, toughness and thermal stability of the silicone rubber, greatly avoiding the increase in contact resistance, continuous faults and the probability of incorrect test indications caused by the periodic cleaning of the generated debris by the detection needle, reducing the loss rate of the detection needle as a consumable, and reducing the cost of replacing the probe card. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic cross-sectional view of a probe cleaning sheet material containing silicone rubber according to Embodiment 1 of the present application.

[0022] Figure 2 A partially enlarged schematic view of the cleaning cushion layer of Embodiment 1 of the present application for cleaning the detection needle.

[0023] Figure 3 It is a schematic view of the cleaning cushion layer of Embodiment 1.

[0024] Description of reference numerals: 1. Bottom film; 2. Cleaning cushion layer; 3. Viscoelastic layer; 4. Concave structure; 5. Detection needle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The present application will be further described in detail below with reference to the embodiments.

[0026] Some raw materials used in the preparation examples and embodiments: The acrylic pressure-sensitive adhesive model is CF-74B; the ABS model is HP-171; silicon carbide (specification 30-60 mesh); lignosulfonate is purchased from: Hubei Maidehao Biotechnology Co., Ltd.; the product number of calcium silicate is HY-W094349A; the vinyl silicone rubber is methyl vinyl silicone rubber model: MY GUM 110; the product number of alumina is ADS-50.

[0027] For the related raw materials used in the examples and comparative examples that are not specified, they are all conventional products that can be obtained through market purchase.

[0028] Preparation Example 1 Lignin-modified silicone rubber: Add 10 g of lignosulfonate and 60 g of calcium silicate to 250 g of water, mix and stir for 60 min, add hydrochloric acid to adjust the pH value to 5, heat to 50 °C and stir for 30 min to obtain lignin-modified calcium silicate; Take 80 g of vinyl silicone rubber, 104 g of lignin-modified calcium silicate, 8 g of aluminum sulfate and 3 g of hydroxyl silicone oil, mix them, and stir at 100 °C for 20 min to obtain lignin-modified silicone rubber.

[0029] Preparation Example 2 Lignin-modified silicone rubber: Add 10 g of lignosulfonate and 60 g of calcium silicate to 250 g of water, mix and stir for 60 min, add hydrochloric acid to adjust the pH value to 5, heat to 50 °C and stir for 30 min to obtain lignin-modified calcium silicate; Take 80 g of vinyl silicone rubber, 88 g of lignin-modified calcium silicate, 8 g of aluminum sulfate and 3 g of hydroxyl silicone oil, mix them, and stir at 100 °C for 20 min to obtain lignin-modified silicone rubber.

[0030] Preparation Example 3 Lignin-modified silicone rubber: Add 10 g of lignosulfonate and 60 g of calcium silicate to 250 g of water, mix and stir for 60 min, add hydrochloric acid to adjust the pH value to 5, heat to 50 °C and stir for 30 min to obtain lignin-modified calcium silicate; Take 80 g of vinyl silicone rubber, 72 g of lignin-modified calcium silicate, 8 g of aluminum sulfate and 3 g of hydroxyl silicone oil, mix them, and stir at 100 °C for 20 min to obtain lignin-modified silicone rubber.

[0031] Preparation Example 4 Lignin-modified silicone rubber: Add 10 g of lignosulfonate and 60 g of calcium silicate to 250 g of water, mix and stir for 60 min, add hydrochloric acid to adjust the pH value to 5, heat to 50 °C and stir for 30 min to obtain lignin-modified calcium silicate; Take 80 g of vinyl silicone rubber, 116 g of lignin-modified calcium silicate, 8 g of aluminum sulfate and 3 g of hydroxyl silicone oil, mix them, and stir at 100 °C for 20 min to obtain lignin-modified silicone rubber.

[0032] Preparation Example 5 Silicone rubber: Take 80 g of vinyl silicone rubber, 116 g of calcium silicate, 8 g of aluminum sulfate and 3 g of hydroxyl silicone oil, mix them, and stir at 100 °C for 20 min to obtain silicone rubber.

[0033] Preparation Example 6 Lignin-modified silicone rubber: 10 g of lignosulfonate and 60 g of alumina were added to 250 g of water, mixed and stirred for 60 min, hydrochloric acid was added to adjust the pH value to 5, heated to 50 °C and stirred for 30 min to obtain lignin-modified alumina; 80 g of vinyl silicone rubber, 104 g of lignin-modified alumina, 8 g of aluminum sulfate and 3 g of hydroxy silicone oil were taken and mixed, and stirred at 100 °C for 20 min to obtain lignin-modified silicone rubber.

[0034] Example 1 Reference Figure 1 and Figure 3 A detection needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film 1, a cleaning cushion layer 2 is provided on the bottom film 1, and viscoelastic layers 3 are provided on both the upper and lower bottom surfaces of the bottom film 1; wherein, the viscoelastic layer 3 is a 50-μm acrylic pressure-sensitive adhesive; the bottom film 1 is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, dicumyl peroxide was added and mixed and stirred, and then chopped glass fibers were added and kneaded evenly into sheets; the obtained rubber compound was hot-pressed and formed under a mold with a quasi-inverted pyramid-shaped concave structure at 10 MPa and 120 °C, referring to Figure 2 , to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) The slurry obtained in step (1) was coated on a bottom film provided with viscoelastic layers on both the upper and lower bottom surfaces, and the drying temperature was 90 °C to obtain a detection needle cleaning sheet material containing silicone rubber.

[0035] Example 2 A detection needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix and stir, then add chopped glass fibers and knead evenly into sheets; The obtained rubber compound is hot-pressed and formed under a mold with a quasi-inverted pyramid-shaped concave structure at 10 MPa and 120 °C to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 80 μm, the thickness of the bottom of the structure is 180 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0036] Example 3 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix and stir, then add chopped glass fibers and knead evenly into sheets; The obtained rubber compound is hot-pressed and formed under a mold with a quasi-inverted pyramid-shaped concave structure at 10 MPa and 120 °C to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 20 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0037] Example 4 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and mix evenly into a sheet. The obtained rubber compound is hot-pressed and formed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 110 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0038] Example 5 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and mix evenly into a sheet. The obtained rubber compound is hot-pressed and formed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 20 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0039] Example 6 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 72 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fiber and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 75, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0040] Example 7 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is an acrylic pressure-sensitive adhesive with a thickness of 50 μm; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 2, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 2 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fiber and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0041] Example 8 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is an acrylic pressure-sensitive adhesive with a thickness of 50 μm; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 3, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 3 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and knead evenly into sheets; The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0042] Example 9 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is an acrylic pressure-sensitive adhesive with a thickness of 50 μm; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 4, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 4 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and knead evenly into sheets; The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0043] Example 10 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is an acrylic pressure-sensitive adhesive with a thickness of 50 μm; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 5, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 5 at 110°C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120°C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90°C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0044] Example 11 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 6, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 6 at 110°C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fibers and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120°C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90°C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0045] Comparative Example 1 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 90 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fiber and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 95, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0046] Comparative Example 2 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 42 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix well, then add chopped glass fiber and knead evenly into sheets. The obtained rubber compound is hot-pressed at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with a quasi-inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 50, the depth of the quasi-inverted pyramid-shaped concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, the width of the upper plane of the formed groove is 150 μm, and the width of the lower plane of the groove is 80 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0047] Comparative Example 3 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, the cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix and stir, then add chopped glass fiber and mix evenly into sheets; heat press the obtained rubber compound at 10 MPa and 120 °C through a mold with an inverted pyramid-shaped concave structure to obtain a cleaning cushion layer with an inverted pyramid-shaped concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the inverted pyramid-shaped concave structure is 50 μm, the thickness of the cleaning cushion layer slurry is 150 μm, and the width of the upper plane of the formed groove is 150 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0048] Comparative Example 4 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, a cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix and stir, then add chopped glass fiber and mix evenly into sheets; heat press the obtained rubber compound at 10 MPa and 120 °C through a mold with a quasi-inverted pyramid-shaped concave structure to obtain a cleaning cushion layer, and the Shore hardness A of the cleaning cushion layer is 60, and the thickness of the cleaning cushion layer is 150 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a probe needle cleaning sheet material containing silicone rubber.

[0049] Comparative Example 5 A probe needle cleaning sheet material containing silicone rubber, comprising the following components: including a bottom film, a cleaning cushion layer is provided on the bottom film, and viscoelastic layers are provided on both the upper and lower bottom surfaces of the bottom film; wherein, the viscoelastic layer is a 50-μm acrylic pressure-sensitive adhesive; the bottom film is an ABS plastic material with a thickness of 100 μm, a cleaning cushion layer slurry, 52 kg of wear particles, 60 kg of the lignin-modified silicone rubber prepared in Preparation Example 1, and 1.2 kg of dicumyl peroxide; (1) After stirring the wear particles and the lignin-modified silicone rubber prepared in Preparation Example 1 at 110 °C for 10 min, add dicumyl peroxide and mix and stir, then add chopped glass fiber, and knead evenly into sheets; the obtained rubber compound is hot-pressed and formed at 10 MPa and 120 °C through a mold with a rectangular concave structure to obtain a cleaning cushion layer with a rectangular concave structure. The Shore hardness A of the cleaning cushion layer is 60, the depth of the rectangular concave structure is 50 μm, the thickness of the bottom of the structure is 150 μm, and the width of the upper and lower planes of the formed groove is 150 μm; (2) Coat the slurry obtained in step (1) on a bottom film with viscoelastic layers provided on both the upper and lower bottom surfaces, and the drying temperature is 90 °C to obtain a detection needle cleaning sheet material containing silicone rubber.

[0050] Performance detection The performance test of the detection needle cleaning sheet material containing silicone rubber prepared in the examples and comparative examples is carried out by the following method: Grind and clean the detection needle containing foreign matters and debris (the failure rate in the 1000 - time transmission signal test exceeds 8%), and test the percentage reduction of the needle length / needle diameter before and after grinding; Failure rate test: The failure rate of the above - ground detection needle in the 1000 - time transmission signal test; At a temperature of 23 °C and a relative humidity of 60%, use a surface resistivity meter to measure the initial surface resistivity R0 of the detection needle, and then use the detection needle cleaning sheet material containing silicone rubber to grind the detection needle. After 20000 continuous pressing times for cleaning, measure the surface resistivity R1 of the detection needle again, and calculate the percentage reduction of the surface resistivity measured twice.

[0051] Table 1 Performance detection results As can be seen from Table 1, for the detection needle cleaning sheet material containing silicone rubber obtained in the above - mentioned examples, it can clean the debris and contaminants attached during the signal transmission process when the tip of the detection needle abuts against the components on the die of the wafer. It has high cleaning efficiency, improves the test accuracy and reduces the failure rate. The probe is regularly and slightly ground and cleaned to remove the attached debris and contaminants, reduce the resistivity, enabling it to be used for a long time, and improving the stability and reliability of the test results.

[0052] Compared with Embodiment 1, Embodiments 3 - 5 and Comparative Examples 3 - 5, after the detection needle enters the inverted pyramid - shaped depression structure with debris and contaminated tips, through scraping and grinding, the debris and the like are carried away from the detection needle without exposing the probe, preventing the probe from being damaged as in the case of using a flat surface; with a certain ratio of the upper and lower widths of the grooves, the inclination angle of the grooves of the pyramid - like structure is within a certain range, and the inclination angle of the grooves adapts to the detection needle, enabling the detection needle to be close to the grooves, thereby effectively cleaning the detection needle. The pyramid - shaped depression structure has four inclined surfaces, improving the cleaning efficiency of the detection needle, also enabling the cleaning sheet to have a longer service life, and avoiding the single - force loss of the detection needle during grinding; and each time it is pressed down, there is a certain buffer and the contact area with the cleaning sheet surface is large. While effectively cleaning, it prevents the loss of the detection needle and reduces the scratches on the probe.

[0053] Comparing Embodiment 1 with Comparative Examples 1 - 2, the cleaning cushion structure of the present application has a certain range of Shore hardness so that the contact area and the surrounding support hardware can be effectively cleaned, and deformation or damage of the inverted pyramid - shaped depression structure can be avoided. If the hardness of the cleaning cushion is too small, the depression structure of the cleaning cushion will deform, and it cannot effectively clean and carry away the debris on the detection needle, thereby preventing the contact resistance from increasing during the use of the detection needle, and further affecting the detection effect; if the hardness of the cleaning cushion is too large, the length, diameter, etc. of the detection needle will be excessively cleaned and worn, reducing the service life of the detection needle.

[0054] Comparing Embodiment 1 with Embodiments 7 - 11, using lignosulfonate, by forming ester groups, hydrogen bonds and other forces between the rich phenyl, carboxyl, hydroxyl and other groups in its surface structure and the groups on the surface of calcium silicate, the calcium silicate powder is more dispersed in the system, increasing the abrasiveness of the silicone rubber containing it. The three - dimensional structure of lignin itself increases the hardness, toughness and thermal stability of the silicone rubber containing it, greatly avoiding the probability of increased contact resistance, continuous failures and incorrect test indications caused by the periodic cleaning of the detection needle to remove the generated debris, and reducing the loss rate of the detection needle as a consumable. Among them, if the content of lignin - modified calcium silicate is too low, the toughness of the rubber is insufficient, and it is easy to cause partial or complete deformation of the pyramid - like depression structure during the downward pressing and cleaning, affecting the cleaning effect.

[0055] The above are all preferred embodiments of the present application. The protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A probe needle cleaning sheet material containing silicone rubber, characterized in that: The invention comprises a base film (1), a cleaning pad layer (2) being arranged on the base film (1), and a viscoelastic layer (3) being arranged on the upper and lower bottom surfaces of the base film (1); wherein the cleaning pad layer (2) comprises a plurality of inverted pyramid-shaped recessed structures 4 arranged in a matrix, and the Shore A hardness of the cleaning pad layer (2) is 50-80.

2. The probe needle cleaning sheet material containing silicone rubber according to claim 1, characterized in that: The depth of the inverted pyramid-shaped concave structure (4) is 30-100 μm, the thickness of the bottom of the structure is 150-200 μm, and the width of the upper plane of the formed groove is 100-250 μm.

3. The probe needle cleaning sheet material containing silicone rubber according to claim 2, characterized in that: The width ratio of the groove from top to bottom is (1.5-5):

1.

4. The probe needle cleaning sheet material containing silicone rubber according to claim 1, characterized in that: The cleaning pad layer (4) comprises lignin-modified silicone-containing rubber and abrasive particles.

5. The probe needle cleaning sheet material containing silicone rubber according to claim 1, characterized in that: The abrasive particles include one or more of silicon carbide, magnesium oxide, zirconium oxide, and diamond powder.

6. The probe needle cleaning sheet material containing silicone rubber according to claim 1, characterized in that: The preparation method of the lignin-modified silicone rubber comprises adding lignin sulfonate and calcium silicate into water, mixing and stirring for 20-60 minutes, adding hydrochloric acid to adjust the pH value to 5-6, heating to 50-60° C. and stirring for 20-30 minutes to obtain lignin-modified calcium silicate; Vinyl silicone rubber, lignin-modified calcium silicate, aluminum sulfate and hydroxy silicone oil are mixed, and stirred at 100-110° C. for 15-20 minutes to obtain lignin-modified silicone rubber.

7. The probe needle cleaning sheet material containing silicone rubber according to claim 6, characterized in that: The mass ratio of the lignin modified calcium silicate to the vinyl silicone rubber is (1-1.3):

1.

8. The probe needle cleaning sheet material containing silicone rubber according to claim 4, characterized in that: The mass ratio of the lignin-modified silicone-containing rubber to the wear particles is 1:(0.8-1.2).

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