Nickel-iron alloy target material as well as preparation method and application thereof

Abstract

The invention relates to a nickel-iron alloy target material and a preparation method and application thereof, and the preparation method comprises the following steps: (1) mixing nickel powder and iron powder to obtain pre-alloyed powder; (2) the pre-alloyed powder obtained in the step (1) is loaded into a rubber sleeve, cold isostatic pressing pre-pressing forming is carried out, and after demolding, vacuum sintering is carried out under the temperature condition of 440-460 DEG C; and (3) carrying out hot isostatic pressing on the target blank block subjected to vacuum sintering in the step (2) to obtain the nickel-iron alloy target material. The compactness of the nickel-iron alloy target material obtained through the preparation method can reach 99.8% or above, the nickel-iron alloy target material is isotropic, and the average particle size of the nickel phase is smaller than 20 micrometers.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, relates to a target, and particularly relates to a nickel-iron alloy target and its preparation method and application. Background Art

[0002] Nickel-iron alloy targets are widely used in the field of magnetron sputtering, mainly for thin film deposition processes, especially in magnetron sputtering. Nickel-iron alloy targets have good physical and chemical properties, including hardness, strength, electrical conductivity, thermal conductivity, as well as corrosion resistance and oxidation resistance. These characteristics make nickel-iron alloy targets perform excellently in various applications.

[0003] Nickel-iron alloy targets are low coercivity low-frequency soft magnetic materials with high magnetic permeability in weak magnetic fields. General nickel-iron alloy targets are processed through processes such as forging, rolling, heat treatment, and machining of ingots obtained by high-vacuum melting. The internal structure will have non-uniformity or small defects, affecting the normal sputtering of the target.

[0004] CN105463395A discloses a high-performance nickel-iron alloy sputtering target and its preparation method. First, the nickel-iron alloy ingot is hot-forged and bloomed, then cold rolling and heat treatment processes are used to control the microstructure of the nickel-iron alloy, and the magnetic permeability of the target is reduced by rolling deformation with a total deformation of 1%-20% for the target blank. Finally, a high-performance nickel-iron alloy target is obtained by machining. Although it can obtain a high-performance nickel-iron alloy sputtering target with uniform structure, the average grain size is between 20μm - 100μm, and the sputtering surface of the target shows random crystal orientation, and the average particle size of nickel atoms cannot be reduced to less than 20μm.

[0005] The smaller the average size of nickel atoms, the easier it is to disperse evenly to form a uniform alloy. Uniform composition can reduce local defects caused by segregation and make the internal structure of the target more dense. Therefore, in order to obtain a nickel-iron alloy target with higher density, it is necessary to provide a nickel-iron alloy target with an average nickel particle size of less than 20μm and its preparation method and application. Summary of the Invention

[0006] Aiming at the deficiencies of the existing technology, the purpose of the present invention is to provide a nickel-iron alloy target and its preparation method and application. The preparation method first uses cold isostatic pressing for pre-pressing and forming, then conducts vacuum sintering at a relatively low temperature, and then uses hot isostatic pressing for densification treatment, so that the final obtained nickel-iron alloy target has a density of more than 99.8%, is isotropic, and the average grain size of the nickel phase is less than 20μm.

[0007] To achieve the purpose of this invention, the present invention adopts the following technical solutions:

[0008] In a first aspect, the present invention provides a method for preparing a nickel-iron alloy target, and the preparation method includes the following steps:

[0009] (1) Mix nickel powder and iron powder to obtain a pre-alloyed powder;

[0010] (2) Load the pre-alloyed powder obtained in step (1) into a rubber sleeve, perform cold isostatic pressing for pre-compression molding. After demolding, perform vacuum sintering at a temperature of 440°C - 460°C;

[0011] (3) Perform hot isostatic pressing on the target blank after vacuum sintering in step (2) to obtain the nickel-iron alloy target.

[0012] The preparation method provided by the present invention first uses cold isostatic pressing for pre-compression molding, then performs vacuum sintering at a relatively low temperature, and then uses hot isostatic pressing for densification treatment, so that the density of the finally obtained nickel-iron alloy target reaches more than 99.8%, is isotropic, and the average grain size of the nickel phase is less than 20 μm.

[0013] The cold isostatic pressing for pre-compression molding performed first applies uniform pressure to the pre-alloyed powder, so that these powders are uniformly extruded in all directions. The originally loosely packed powders begin to approach each other and fill the voids, initially forming a closely packed structure, laying the foundation for subsequent vacuum sintering; during the atomic diffusion in the vacuum sintering stage, the atoms around the small pores will gradually diffuse into the pores, thereby reducing the porosity of the nickel-iron alloy target. In addition, vacuum sintering can also stabilize the closely packed structure formed after cold isostatic pressing, thus contributing to obtaining a nickel-iron alloy target with a density of more than 99.8% in the subsequent hot isostatic pressing process.

[0014] Preferably, the average particle size of the nickel powder in step (1) is 8 μm - 12 μm.

[0015] Preferably, the average particle size of the iron powder in step (1) is 4 μm - 6 μm.

[0016] Preferably, the mass ratio of the nickel powder to the iron powder in step (1) is (7.5 - 8.5):(2.5 - 1.5).

[0017] Preferably, the mixing method in step (1) includes ball milling.

[0018] Preferably, the mixing in step (1) is carried out in a protective atmosphere.

[0019] Preferably, the gas used in the protective atmosphere includes nitrogen and / or inert gas.

[0020] Preferably, the pressure of the cold isostatic pressing for pre-compression molding in step (2) is 240 MPa - 260 MPa.

[0021] Preferably, the time for cold isostatic pressing pre - pressing in step (2) is 25 min - 35 min.

[0022] Preferably, the time for vacuum sintering in step (2) is more than 6 h.

[0023] Preferably, the temperature for hot isostatic pressing in step (3) is 740 °C - 760 °C.

[0024] Preferably, the heat - preservation time for hot isostatic pressing in step (3) is more than 3 h.

[0025] Preferably, the pressure for hot isostatic pressing in step (3) is 190 MPa - 200 MPa.

[0026] Preferably, the preparation method includes the following steps:

[0027] (1) In a protective atmosphere, nickel powder with an average particle size of 8 μm - 12 μm and iron powder with an average particle size of 4 μm - 6 μm are mixed by ball - milling to obtain pre - alloyed powder; the mass ratio of the nickel powder to the iron powder is (7.5 - 8.5):(2.5 - 1.5);

[0028] (2) The pre - alloyed powder obtained in step (1) is loaded into a rubber sleeve, and cold isostatic pressing pre - pressing is carried out. After demoulding, vacuum sintering is carried out at a temperature of 440 °C - 460 °C for more than 6 h;

[0029] The pressure for cold isostatic pressing pre - pressing is 240 MPa - 260 MPa, and the time is 25 min - 35 min;

[0030] (3) The target blank block after vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel - iron alloy target;

[0031] The temperature for hot isostatic pressing is 740 °C - 760 °C, the heat - preservation time is more than 3 h, and the pressure is 190 MPa - 200 MPa.

[0032] In a second aspect, the present invention provides a nickel - iron alloy target, which is prepared by the preparation method described in the first aspect.

[0033] In a third aspect, the present invention provides an application of the nickel - iron alloy target described in the second aspect, and the nickel - iron alloy target is used for magnetron sputtering.

[0034] The numerical ranges described in the present invention not only include the point values exemplified above, but also include any point values between the above - mentioned numerical ranges that are not exemplified. Due to space limitations and for the sake of brevity, the present invention does not exhaustively list the specific point values included in the ranges.

[0035] Compared with the prior art, the present invention has the following beneficial effects:

[0036] In the preparation method provided by the present invention, cold isostatic pressing pre-pressing is first carried out to apply uniform pressure to the pre-alloyed powder, so that these powders are subjected to uniform extrusion pressure in all directions. The originally loosely packed powders begin to approach each other and fill the voids, initially forming a tightly packed structure, laying a foundation for subsequent vacuum sintering; during the atomic diffusion in the vacuum sintering stage, the atoms around the tiny pores will gradually diffuse into the pores, thereby reducing the porosity of the nickel-iron alloy target. In addition, vacuum sintering can also stabilize the tightly packed structure formed after cold isostatic pressing, which helps to obtain a nickel-iron alloy target with an average grain size of less than 20 μm for nickel phase and a density of more than 99.8% during the subsequent hot isostatic pressing process. Specific embodiments

[0037] The technical solution of the present invention will be further described below through specific embodiments. Those skilled in the art should understand that the embodiments are only for helping to understand the present invention and should not be regarded as specific limitations on the present invention.

[0038] An embodiment of the present invention provides a preparation method of a nickel-iron alloy target, and the preparation method includes the following steps:

[0039] (1) Mix nickel powder and iron powder to obtain pre-alloyed powder;

[0040] (2) Put the pre-alloyed powder described in step (1) into a rubber sleeve, carry out cold isostatic pressing pre-pressing, and after demolding, carry out vacuum sintering at a temperature of 440 °C - 460 °C;

[0041] (3) Carry out hot isostatic pressing on the target blank after vacuum sintering in step (2) to obtain the nickel-iron alloy target.

[0042] The preparation method provided by the present invention first adopts cold isostatic pressing pre-pressing, then carries out vacuum sintering at a relatively low temperature, and then adopts the process of hot isostatic pressing for densification treatment, so that the density of the finally obtained nickel-iron alloy target reaches more than 99.8%, is isotropic, and the average grain size of the nickel phase is less than 20 μm.

[0043] Cold isostatic pressing pre - pressing is carried out first to apply uniform pressure to the pre - alloyed powder, so that these powders are subjected to uniform extrusion pressure in all directions. The originally loosely packed powders begin to approach each other and fill the voids, initially forming a closely packed structure, laying the foundation for subsequent vacuum sintering. During the atomic diffusion in the vacuum sintering stage, atoms around the tiny pores will gradually diffuse into the pores, thereby reducing the porosity of the nickel - iron alloy target. In addition, vacuum sintering can also stabilize the closely packed structure formed after cold isostatic pressing, which helps to obtain a nickel - iron alloy target with a density above 99.8% in the subsequent hot isostatic pressing process.

[0044] In some embodiments, the average particle size of the nickel powder in step (1) is 8μm - 12μm. For example, it can be 8μm, 9μm, 10μm, 11μm or 12μm, but is not limited to the listed values. The other unlisted values within the numerical range are equally applicable.

[0045] In some embodiments, the average particle size of the iron powder in step (1) is 4μm - 6μm. For example, it can be 4μm, 4.5μm, 5μm, 5.5μm or 6μm, but is not limited to the listed values. The other unlisted values within the numerical range are equally applicable.

[0046] The preparation method provided by the present invention selects nickel powder and iron powder with appropriate average particle sizes. The iron powder can effectively fill the gaps formed by the accumulation of nickel powder. Moreover, both nickel powder and iron powder have higher surface activity, and are more likely to diffuse and migrate during vacuum sintering and hot isostatic pressing, forming a stronger metallurgical bond at the particle interface. In addition, the appropriate nickel powder particle size and iron powder particle size can inhibit the growth of nickel grains. A smaller nickel powder particle size forms a large number of crystal nuclei at the initial stage of sintering. During the subsequent heating process, numerous crystal nuclei limit the growth space of a single nickel grain. At the same time, the presence of iron powder may also play a certain role in hindering the growth of nickel grains, which enables the average particle size of nickel in the final target to be maintained below 20μm, avoiding problems such as uneven target performance and decreased density caused by over - sized nickel grains.

[0047] In some embodiments, the mass ratio of the nickel powder to the iron powder in step (1) is (7.5 - 8.5):(2.5 - 1.5). For example, it can be 7.5:2.5, 8:2 or 8.5:1.5, but is not limited to the listed values. The other unlisted values within the numerical range are equally applicable.

[0048] In some embodiments, the method of mixing in step (1) includes ball milling.

[0049] In some embodiments, the mixing in step (1) is carried out in a protective atmosphere.

[0050] In some embodiments, the gas used in the protective atmosphere includes nitrogen and / or inert gas.

[0051] Optionally, the inert gas includes any one or a combination of at least two of helium, neon, or argon. Typical but non-limiting combinations include a combination of helium and neon, a combination of neon and argon, a combination of helium and argon, or a combination of helium, neon, and argon.

[0052] In some embodiments, the pressure of the cold isostatic pressing preforming in step (2) is 240 MPa - 260 MPa. For example, it can be 240 MPa, 245 MPa, 250 MPa, 255 MPa, or 260 MPa, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0053] In some embodiments, the time of the cold isostatic pressing preforming in step (2) is 25 min - 35 min. For example, it can be 25 min, 28 min, 30 min, 32 min, or 35 min, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0054] In some embodiments, the time of the vacuum sintering in step (2) is more than 6 h. For example, it can be 6 h, 6.5 h, 7 h, 7.5 h, or 8 h, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0055] The present invention does not specifically limit the vacuum degree of the vacuum sintering, as long as it is within the range of ≤ 0.1 Pa.

[0056] In some embodiments, the temperature of the hot isostatic pressing in step (3) is 740 °C - 760 °C. For example, it can be 740 °C, 745 °C, 750 °C, 755 °C, or 760 °C, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0057] In some embodiments, the holding time of the hot isostatic pressing in step (3) is more than 3 h. For example, it can be 3 h, 3.5 h, 4 h, 4.5 h, or 5 h, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0058] In some embodiments, the pressure of the hot isostatic pressing in step (3) is 190 MPa - 200 MPa. For example, it can be 190 MPa, 192 MPa, 195 MPa, 198 MPa, or 200 MPa, but is not limited to the listed values. Other unlisted values within the numerical range are equally applicable.

[0059] In some embodiments, the preparation method includes the following steps:

[0060] (1) In a protective atmosphere, nickel powder with an average particle size of 8 μm - 12 μm and iron powder with an average particle size of 4 μm - 6 μm are mixed by ball milling to obtain pre-alloyed powder; the mass ratio of the nickel powder to the iron powder is (7.5 - 8.5):(2.5 - 1.5);

[0061] (2) The pre-alloyed powder obtained in step (1) is loaded into a rubber sleeve and subjected to cold isostatic pressing for pre-pressing and forming. After demolding, it is subjected to vacuum sintering at a temperature of 440°C - 460°C for more than 6 hours;

[0062] The pressure of the cold isostatic pressing for pre-pressing and forming is 240 MPa - 260 MPa, and the time is 25 min - 35 min;

[0063] (3) The target blank block after vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel-iron alloy target;

[0064] The temperature of the hot isostatic pressing is 740°C - 760°C, the holding time is more than 3 hours, and the pressure is 190 MPa - 200 MPa.

[0065] An embodiment of the present invention provides a nickel-iron alloy target, and the nickel-iron alloy target is prepared by using the preparation method described in any one of the embodiments.

[0066] An embodiment of the present invention provides an application of the nickel-iron alloy target described in any one of the embodiments, and the nickel-iron alloy target is used for magnetron sputtering.

[0067] Example 1

[0068] This example provides a preparation method of a nickel-iron alloy target, and the preparation method includes the following steps:

[0069] (1) In a nitrogen atmosphere, nickel powder with an average particle size of 10 μm and iron powder with an average particle size of 5 μm are mixed by ball milling to obtain pre-alloyed powder; the mass ratio of the nickel powder to the iron powder is 8:2;

[0070] (2) The pre-alloyed powder obtained in step (1) is loaded into a polyurethane rubber sleeve and subjected to cold isostatic pressing for pre-pressing and forming. After demolding, it is subjected to vacuum sintering at a temperature of 450°C for 6 hours;

[0071] The pressure of the cold isostatic pressing for pre-pressing and forming is 250 MPa, and the time is 30 min;

[0072] (3) The target blank block after vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel-iron alloy target;

[0073] The temperature of the hot isostatic pressing is 750°C, the holding time is 3 hours, and the pressure is 195 MPa.

[0074] Example 2

[0075] This example provides a method for preparing a nickel-iron alloy target, and the preparation method includes the following steps:

[0076] (1) In a nitrogen atmosphere, nickel powder with an average particle size of 8 μm and iron powder with an average particle size of 4 μm are mixed by ball milling to obtain pre-alloyed powder; the mass ratio of the nickel powder to the iron powder is 8:2;

[0077] (2) The pre-alloyed powder obtained in step (1) is filled into a polyurethane rubber sleeve and subjected to cold isostatic pressing for pre-pressing and forming. After demolding, it is vacuum sintered at a temperature of 440 °C for 6 h;

[0078] The pressure of the cold isostatic pressing for pre-pressing and forming is 240 MPa, and the time is 35 min;

[0079] (3) The target blank block after the vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel-iron alloy target;

[0080] The temperature of the hot isostatic pressing is 740 °C, the holding time is 3 h, and the pressure is 190 MPa.

[0081] Example 3

[0082] This example provides a method for preparing a nickel-iron alloy target, and the preparation method includes the following steps:

[0083] (1) In a nitrogen atmosphere, nickel powder with an average particle size of 12 μm and iron powder with an average particle size of 6 μm are mixed by ball milling to obtain pre-alloyed powder; the mass ratio of the nickel powder to the iron powder is 8:2;

[0084] (2) The pre-alloyed powder obtained in step (1) is filled into a polyurethane rubber sleeve and subjected to cold isostatic pressing for pre-pressing and forming. After demolding, it is vacuum sintered at a temperature of 460 °C for 6 h;

[0085] The pressure of the cold isostatic pressing for pre-pressing and forming is 260 MPa, and the time is 25 min;

[0086] (3) The target blank block after the vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel-iron alloy target;

[0087] The temperature of the hot isostatic pressing is 760 °C, the holding time is 3 h, and the pressure is 200 MPa.

[0088] Example 4

[0089] This embodiment provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the average particle size of the nickel powder is 6 μm.

[0090] Embodiment 5

[0091] This embodiment provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the average particle size of the nickel powder is 15 μm.

[0092] Embodiment 6

[0093] This embodiment provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the average particle size of the iron powder is 2 μm.

[0094] Embodiment 7

[0095] This embodiment provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the average particle size of the iron powder is 8 μm.

[0096] Comparative Example 1

[0097] This comparative example provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the temperature of vacuum sintering is 420 °C.

[0098] Comparative Example 2

[0099] This comparative example provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that the temperature of vacuum sintering is 480 °C.

[0100] Comparative Example 3

[0101] This comparative example provides a method for preparing a nickel-iron alloy target, which is the same as that of Embodiment 1 except that vacuum sintering is not carried out.

[0102] Performance Characterization

[0103] The density and the average particle size of nickel of the nickel-iron alloy targets obtained in the above embodiments and comparative examples were characterized. Among them, the density was measured by the Archimedes drainage method, and the average particle size of the nickel phase was measured by a scanning electron microscope. The obtained results are shown in Table 1.

[0104] Table 1

[0105]

[0106]

[0107] As can be seen from Table 1, the preparation method provided by the present invention can obtain a nickel-iron alloy target with a density of more than 99.8% and an average particle size of the nickel phase of less than 20 μm.

[0108] From the comparison between Example 4, Example 6 and Example 1, it can be seen that when the average particle size of nickel powder or iron powder is small, a large number of crystal nuclei will be formed in the initial stage of vacuum sintering. Due to the high atomic diffusion rate between particles, these crystal nuclei will grow rapidly, resulting in abnormal grain growth, which affects the uniformity of the microstructure and the stability of properties.

[0109] From the comparison between Example 5, Example 7 and Example 1, it can be seen that when the average particle size of nickel powder or iron powder is large, it is difficult to arrange them closely and effectively fill the gaps between each other, resulting in more pores inside the target; moreover, when the average particle size of nickel powder or iron powder is large, it is difficult for nickel powder to be refined during sintering, resulting in a relatively large average particle size of the nickel phase in the final target.

[0110] From the comparison between Comparative Example 1, Comparative Example 2 and Example 1, it can be seen that too low or too high vacuum sintering temperature affects the density of the finally obtained nickel-iron alloy target and the average particle size of the nickel phase. When the vacuum sintering temperature is too low, the diffusion rate of nickel atoms and iron atoms is slow, and the pores cannot be effectively filled. Even after subsequent hot isostatic pressing, the density still cannot reach more than 99.8%; when the vacuum sintering temperature is too high, there is a phenomenon of abnormal grain growth, and the nickel phase grains will continue to grow, which also affects the density of the target. And from the comparison between Comparative Example 3 and Example 1, it can be seen that when no vacuum sintering is carried out, the density of the nickel-iron alloy target and the average particle size of the nickel phase cannot meet the process requirements either.

[0111] In summary, the preparation method provided by the present invention first performs cold isostatic pressing preforming to apply uniform pressure to the pre-alloyed powder, so that these powders are uniformly extruded in all directions. The originally loosely packed powders begin to approach each other and fill the voids, initially forming a close-packed structure, laying a foundation for subsequent vacuum sintering; during the atomic diffusion in the vacuum sintering stage, the atoms around the tiny pores will gradually diffuse into the pores, thereby reducing the porosity of the nickel-iron alloy target. In addition, vacuum sintering can also stabilize the close-packed structure formed after cold isostatic pressing, which helps to obtain a nickel-iron alloy target with an average nickel phase particle size of less than 20 μm and a density of more than 99.8% during subsequent hot isostatic pressing.

[0112] The applicant declares that the above description is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and the disclosure scope of the present invention.

Claims

1. A method for preparing a nickel-iron alloy target, characterized in that: The preparation method comprises the following steps: (1) mixing nickel powder and iron powder to obtain pre-alloyed powder; (2) The pre-alloyed powder in step (1) is placed in a rubber sleeve, subjected to cold isostatic pre-pressing, and after demolding, vacuum sintered at a temperature of 440° C. to 460° C.; (3) The target blank after vacuum sintering in step (2) is subjected to hot isostatic pressing to obtain the nickel-iron alloy target material.

2. The preparation method according to claim 1, characterized in that: The average particle size of the nickel powder in step (1) is 8 μm-12 μm; Preferably, the average particle size of the iron powder in step (1) is 4 μm-6 μm.

3. The preparation method according to claim 1 or 2, characterized in that: The mass ratio of the nickel powder to the iron powder in step (1) is (7.5-8.5):(2.5-1.5).

4. The preparation method according to any one of claims 1 to 3, characterized in that The mixing method in step (1) comprises ball milling; Preferably, the mixing in step (1) is carried out in a protective atmosphere; Preferably, the gas used for the protective atmosphere includes nitrogen and / or an inert gas.

5. The preparation method according to any one of claims 1 to 4, characterized in that: The pressure of the cold isostatic pressing pre-molding in step (2) is 240MPa-260MPa; Preferably, the time for the cold isostatic pre-pressing molding in step (2) is 25 min-35 min.

6. The preparation method according to any one of claims 1 to 5, characterized in that: The vacuum sintering time in step (2) is more than 6 hours.

7. The preparation method according to any one of claims 1 to 6, characterized in that: The temperature of the hot isostatic pressing in step (3) is 740° C.-760° C.; Preferably, the holding time of the hot isostatic pressing in step (3) is more than 3 hours; Preferably, the pressure of the hot isostatic pressing in step (3) is 190 MPa-200 MPa.

8. The preparation method according to claim 1, characterized in that: The preparation method comprises the following steps: (1) In a protective atmosphere, nickel powder with an average particle size of 8 μm-12 μm and iron powder with an average particle size of 4 μm-6 μm are mixed by ball milling to obtain a pre-alloyed powder; the mass ratio of the nickel powder to the iron powder is (7.5-8.5):(2.5-1.5); (2) The pre-alloyed powder in step (1) is placed in a rubber sleeve and pre-formed by cold isostatic pressing. After demolding, vacuum sintering is performed at a temperature of 440° C. to 460° C. for more than 6 hours; The cold isostatic pressing pre-pressing pressure is 240MPa-260MPa and the time is 25min-35min; (3) hot isostatic pressing the target blank after vacuum sintering in step (2) to obtain the nickel-iron alloy target material; The temperature of the hot isostatic pressing is 740° C.-760° C., the holding time is more than 3 hours, and the pressure is 190 MPa-200 MPa.

9. A nickel-iron alloy target, characterized in that: The nickel-iron alloy target is prepared by the preparation method described in any one of claims 1 to 8.

10. An application of the nickel-iron alloy target material as claimed in claim 9, characterized in that: The nickel-iron alloy target is used for magnetron sputtering.

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