Temperature and pressure integrated calibration method and device for high-precision pressure sensor

Abstract

The invention relates to the technical field of sensor calibration, in particular to a temperature and pressure integrated calibration method and device for a high-precision pressure sensor, and the method comprises the steps: placing the high-precision pressure sensor into pressurization equipment, enabling the pressure of the pressurization equipment to be released and returned to zero, and placing the pressurization equipment in a high-temperature environment; performing gradient control on the pressure value of the pressurizing equipment and the temperature value of the high-temperature environment to obtain the pressure measurement value of the high-precision pressure sensor at the temperature-rising and pressure-rising section and the pressure measurement value of the high-precision pressure sensor at the temperature-reducing and pressure-reducing section; and carrying out temperature and pressure integrated calibration through the calibration model by utilizing recorded data. According to the invention, the high-temperature equipment and the pressurizing equipment are used for simulating the environmental influence of an underground high-temperature and high-pressure environment on the high-precision pressure sensor, and temperature compensation is carried out on the high-precision pressure sensor, so that the influence of thermal stress on a test result is weakened; and the detection precision of the high-precision pressure sensor on the downhole annulus pressure under the condition of simultaneous action of high temperature and high pressure is remarkably improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor calibration, and is a temperature and pressure integrated calibration method and device for a high-precision pressure sensor. Background Art

[0002] During the process of deep formation and deep water drilling, the situation of encountering a narrow safety density window (that is, the formation fracture pressure is not much related to the pore pressure) is becoming more and more common, resulting in greater difficulty in controlling the bottom hole pressure. A little higher bottom hole pressure will cause well leakage, and a little lower bottom hole pressure will cause well kick. In the environment of a narrow safety density window, there is an urgent need for high-precision pressure monitoring technology to meet the requirements of wellbore pressure control under harsh conditions with narrow or even no windows.

[0003] The high-precision sensor selected for the downhole pressure monitoring tool only undergoes temperature calibration before being put into the well. Without temperature and pressure integrated calibration, it is easy to make it difficult to accurately measure the change of the bottom hole pressure after being put into the well, seriously affecting the monitoring accuracy of the narrow density window. The calibration method of the conventional pressure sensor mainly compensates for the temperature of the pressure sensor. Due to the complexity of the drilling engineering, high temperature and high pressure are the actual working environments of the sensor, and both affect the monitoring accuracy of the pressure sensor at the same time. The traditional single temperature calibration is difficult to meet the actual working environment downhole. Summary of the Invention

[0004] The present invention provides a temperature and pressure integrated calibration method and device for a high-precision pressure sensor, which overcomes the above-mentioned deficiencies of the prior art and can effectively solve the problem that the calibration method of the existing conventional pressure sensor cannot simulate temperature compensation for the high-precision pressure sensor under high temperature and high pressure environments, and is prone to inaccurate detection of the high-precision pressure sensor.

[0005] One of the technical solutions of the present invention is achieved by the following measures: A temperature and pressure integrated calibration method for a high-precision pressure sensor, comprising:

[0006] Placing the high-precision pressure sensor into a pressurizing device, releasing and zeroing the pressure of the pressurizing device, and placing it in a high-temperature environment;

[0007] Gradient controlling the pressure value of the pressurizing device and the temperature value of the high-temperature environment to obtain the pressure measurement value of the high-precision pressure sensor in the temperature and pressure increasing section and the pressure measurement value of the high-precision pressure sensor in the temperature and pressure decreasing section;

[0008] Using the recorded data to perform temperature and pressure integrated calibration through a calibration model.

[0009] The following is a further optimization and / or improvement of the above-mentioned technical solution of the invention:

[0010] The above-mentioned calibration model includes:

[0011] Sensor correction formula:

[0012] P = (k 0 + k 1 * dT + k 2 * dT 2 ) * AD + b 0 + b 1 * dT + b 2 * dT 2

[0013] Sensor correction coefficient:

[0014]

[0015] β = (X T X) -1 X T Y

[0016] Wherein, X is the temperature correction auxiliary matrix, specifically as follows:

[0017]

[0018] Wherein, Y is the sensor pressure measurement matrix, specifically as follows:

[0019]

[0020] Wherein, dT is the current temperature; dT i is the temperature change value, dT i = T i - T 0 ,T 0 is the initial temperature, T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor in the current environment; AD i，j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, j is the pressure point; P j is the pressurization value of the pressure boosting device, j is the pressure point.

[0021] The pressure value of the gradient control pressure boosting device and the temperature value of the high-temperature environment are obtained, and the pressure measurement values of the high-precision pressure sensor in the heating and pressure boosting section and the pressure measurement values of the high-precision pressure sensor in the cooling and pressure reducing section include:

[0022] Determine the initial temperature point, and record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the pressurization process at the initial temperature point, wherein the pressurization process is to control the pressure boosting device to increase the pressure according to the set pressure point set;

[0023] Determine the highest temperature point, control the gradient heating of the high-temperature environment, and record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the pressurization process at each temperature point. Stop after reaching the highest temperature point to complete the data recording of the heating and pressurization stage. During the pressurization process, control the pressurization equipment to pressurize according to the set pressure point set;

[0024] Record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the depressurization process at the highest temperature point. During the depressurization process, control the pressurization equipment to depressurize according to the set pressure point set;

[0025] Control the gradient cooling of the high-temperature environment, and record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the depressurization process at each temperature point. Stop after reaching the initial temperature point to complete the data recording of the cooling and depressurization stage. During the depressurization process, control the pressurization equipment to depressurize according to the set pressure point set.

[0026] Release the pressure of the above pressurization equipment to zero and place it in a high-temperature environment, where the high-temperature environment is a high-temperature box.

[0027] The second technical solution of the present invention is achieved through the following measures: A temperature-pressure integrated calibration device for a high-precision pressure sensor, including a high-precision pressure sensor, a pressurization device, a high-temperature device, and a calibration device;

[0028] Place the high-precision pressure sensor into the pressurization equipment, release the pressure of the pressurization equipment to zero, and place it in the high-temperature environment of the high-temperature equipment;

[0029] Gradient control the pressure value of the pressurization equipment and the temperature value of the high-temperature environment, and the calibration device records the pressure measurement values of the high-precision pressure sensor in the heating and pressurization stage and the pressure measurement values of the high-precision pressure sensor in the cooling and depressurization stage;

[0030] The calibration device uses the recorded data to perform temperature-pressure integrated calibration through a calibration model.

[0031] The following is a further optimization or / and improvement of the above invention technical solution:

[0032] The above calibration device includes:

[0033] A data recording module that records the pressure measurement values of the high-precision pressure sensor in the heating and pressurization stage and the pressure measurement values of the high-precision pressure sensor in the cooling and depressurization stage;

[0034] A calibration analysis module that uses the recorded data to perform temperature-pressure integrated calibration through a calibration model.

[0035] A calibration model construction module that constructs a calibration model. The calibration model is as follows:

[0036] Sensor correction formula:

[0037] P = (k 0 + k 1 * dT + k 2 * dT 2 ) * AD + b 0 + b 1 * dT + b 2 * dT 2

[0038] Sensor correction coefficient:

[0039]

[0040] β = (X T X) -1 X T Y

[0041] Wherein, X is the temperature correction auxiliary matrix, specifically as follows:

[0042]

[0043] Wherein, Y is the sensor pressure measurement matrix, specifically as follows:

[0044]

[0045] Wherein, dT is the current temperature; dT i is the temperature change value, dT i = T i - T 0 , T 0 is the initial temperature, T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor in the current environment; AD i，j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, j is the pressure point; P j is the pressurization value of the pressure boosting device, j is the pressure point.

[0046] The above pressure boosting device is a hand-operated pump.

[0047] The above high-temperature device is a high-temperature oven.

[0048] The present invention simulates the environmental impact of the downhole high-temperature and high-pressure environment on the high-precision pressure sensor through the high-temperature device and the pressure boosting device, performs temperature compensation on the high-precision pressure sensor, weakens the influence of thermal stress on the test result, and significantly improves the detection accuracy of the high-precision pressure sensor for the bottom-hole annulus pressure under the condition of simultaneous action of high temperature and high pressure. Moreover, the present invention breaks through the calibration problem of the high-precision pressure sensor at 172 MPa and 175 °C in the harsh downhole high-temperature environment, and solves the problem of real-time high-precision monitoring of the downhole annulus pressure in the downhole environment of 175 °C high temperature and 172 MPa high pressure. Description of the Drawings

[0049] Attached Figure 1 is a schematic flow diagram of the method of the present invention.

[0050] Attached Figure 2 is a schematic flow diagram of the data recording process of the temperature and pressure increasing section and the temperature and pressure decreasing section of the present invention.

[0051] Attached Figure 3 is a schematic flow diagram of the method of the present invention.

[0052] The codes in the drawings are respectively: 1 is a high-temperature device, 2 is a pressurizing device, 3 is a high-precision pressure sensor, and 4 is a calibration device. Detailed Embodiments

[0053] The present invention is not limited by the following embodiments, and the specific implementation manners can be determined according to the technical solutions of the present invention and the actual situation.

[0054] The present invention will be further described below in conjunction with the embodiments and the drawings:

[0055] Embodiment 1: As shown in the attached Figure 1 figure, the embodiment of the present invention discloses a temperature and pressure integrated calibration method for a high-precision pressure sensor, including:

[0056] Step S110, placing the high-precision pressure sensor into the pressurizing device, releasing and resetting the pressure of the pressurizing device, and placing it in a high-temperature environment;

[0057] Step S120, controlling the pressure value of the pressurizing device and the temperature value of the high-temperature environment in a gradient manner to obtain the pressure measurement value of the high-precision pressure sensor in the temperature and pressure increasing section and the pressure measurement value of the high-precision pressure sensor in the temperature and pressure decreasing section;

[0058] Step S130, using the recorded data to perform temperature and pressure integrated calibration through the calibration model.

[0059] The present invention discloses a temperature and pressure integrated calibration method for a high-precision pressure sensor. By placing the high-precision pressure sensor into the pressurizing device and placing the pressurizing device in a high-temperature environment, the environmental impact of the high-precision pressure sensor under the downhole high-temperature and high-pressure environment is simulated. Thus, the temperature and pressure integrated calibration of the high-precision pressure sensor is performed through the pressurizing device and the high-temperature environment (especially the 172 MPa and 175 °C under the harsh downhole high-temperature environment can be simulated), so that the high-precision pressure sensor can accurately detect the change of the bottomhole annulus pressure and provide accurate data support for downhole operations.

[0060] Embodiment 2: The embodiment of the present invention discloses a temperature and pressure integrated calibration method for a high-precision pressure sensor, including:

[0061] Step S210: Place the high-precision pressure sensor into the pressurizing device. Release the pressure of the pressurizing device to zero and place it in a high-temperature environment. Here, the pressurizing device can be a hand-operated pump, and the high-temperature environment can be provided by a high-temperature chamber.

[0062] Step S220: Gradually control the pressure value of the pressurizing device and the temperature value of the high-temperature environment to obtain the pressure measurement values of the high-precision pressure sensor during the temperature and pressure increase stage and the pressure measurement values of the high-precision pressure sensor during the temperature and pressure decrease stage.

[0063] The above step S220, as shown in the appendix Figure 2 is specifically as follows:

[0064] Step S221: Determine the initial temperature point and record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the pressurization process at the initial temperature point. Here, the pressurization process is to control the pressurizing device to pressurize according to the set pressure point set. The initial temperature point is set according to actual needs and can be, but is not limited to, 25°C.

[0065] Here, the pressurization process is to control the pressurizing device to pressurize according to the set pressure point set, where the pressure point set is set according to actual needs. The pressure point set can be, but is not limited to, including 0 MPa, 20 MPa, 40 MPa, 60 MPa, 100 MPa, 140 MPa, 175 MPa. Record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the pressurization process at the initial temperature point, that is, it can be: Set the temperature of the high-temperature environment to 25°C, then control the pressurizing device to pressurize, and sequentially record the pressure measurement values of the high-precision pressure sensor at 0 MPa, 20 MPa, 40 MPa, 60 MPa, 100 MPa, 140 MPa, and 175 MPa.

[0066] Step S222: Determine the highest temperature point, control the high-temperature environment to increase the temperature gradually, and record the pressure measurement values of the high-precision pressure sensor corresponding to each pressure point during the pressurization process at each temperature point. Stop after the temperature rises to the highest temperature point to complete the data recording during the temperature and pressure increase stage. Here, the pressurization process is to control the pressurizing device to pressurize according to the set pressure point set.

[0067] The highest temperature point is set according to actual needs and can be, but is not limited to, 175°C.

[0068] Here, control the high-temperature environment to increase the temperature gradually. Each temperature point during the temperature increase process can be, but is not limited to, 50°C, 75°C, 100°C, 125°C, 150°C, and 175°C respectively.

[0069] Here, the high-temperature environment is controlled to increase the temperature in a gradient manner, and the pressure measurement values of the high-precision pressure sensors corresponding to each pressure point during the pressurization process at each temperature point are recorded. After the temperature reaches the highest temperature point, the process stops, and the data recording of the temperature and pressure increase stage is completed. That is, the temperature of the high-temperature environment can be set to 50°C, 75°C, 100°C, 125°C, 150°C, and 175°C in sequence. At each temperature point, the pressurization equipment is controlled to increase the pressure, and the pressure measurement values of the high-precision pressure sensors at 0 MPa, 20 MPa, 40 MPa, 60 MPa, 100 MPa, 140 MPa, and 175 MPa at each temperature point are recorded in sequence, thereby completing the data recording of the temperature and pressure increase stage.

[0070] Step S223: Record the pressure measurement values of the high-precision pressure sensors corresponding to each pressure point during the pressure reduction process at the highest temperature point, where the pressure reduction process is to control the pressurization equipment to reduce the pressure according to the set pressure point set.

[0071] Here, the pressure measurement values of the high-precision pressure sensors corresponding to each pressure point during the pressure reduction process at the highest temperature point are recorded. That is, at the highest temperature point, the pressurization equipment is controlled to reduce the pressure, and the pressure measurement values of the high-precision pressure sensors at 175 MPa, 140 MPa, 100 MPa, 60 MPa, 40 MPa, 20 MPa, and 0 MPa at each temperature point are recorded in sequence.

[0072] Step S224: Control the high-temperature environment to decrease the temperature in a gradient manner, and record the pressure measurement values of the high-precision pressure sensors corresponding to each pressure point during the pressure reduction process at each temperature point. After the temperature reaches the initial temperature point, the process stops, and the data recording of the temperature and pressure reduction stage is completed, where the pressure reduction process is to control the pressurization equipment to reduce the pressure according to the set pressure point set.

[0073] Here, the high-temperature environment is controlled to decrease the temperature in a gradient manner, and the pressure measurement values of the high-precision pressure sensors corresponding to each pressure point during the pressure reduction process at each temperature point are recorded. After the temperature reaches the initial temperature point, the process stops. That is, the temperature of the high-temperature environment can be set to 150°C, 125°C, 100°C, 75°C, 50°C, and 0°C in sequence. At each temperature point, the pressurization equipment is controlled to increase the pressure, and the pressure measurement values of the high-precision pressure sensors at 175 MPa, 140 MPa, 100 MPa, 60 MPa, 40 MPa, 20 MPa, and 0 MPa at each temperature point are recorded in sequence, thereby completing the data recording of the temperature and pressure reduction stage.

[0074] Step S230: Use the recorded data to perform temperature and pressure integration calibration through the calibration model.

[0075] The above calibration model includes:

[0076] Sensor correction formula:

[0077] P = (k 0 +k1 *dT + k 2 *dT 2 ) * AD + b 0 + b 1 *dT + b 2 *dT 2

[0078] Sensor correction coefficient:

[0079]

[0080] β = (X T X) -1 X T Y

[0081] Wherein, X is the temperature correction auxiliary matrix, specifically as follows:

[0082]

[0083] Wherein, Y is the sensor pressure measurement matrix, specifically as follows:

[0084]

[0085] Wherein, dT is the current temperature; dT i is the temperature change value, dT i = T i - T 0 , T 0 is the initial temperature, T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor in the current environment; AD i，j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, j is the pressure point; P j is the pressurization value of the pressure boosting device, j is the pressure point.

[0086] The temperature value of the above temperature point (i.e., the temperature value of the high-temperature environment) is T i , i represents the temperature point, and the temperature rise test is carried out at intervals of 25 °C. For example, T 1 is 25 °C, T 2 is 50 °C... T 7 is 175 °C.

[0087] The pressurization value of the pressure boosting device is P j , j is the pressure point, P 1 is 0 MPa, P 2 is 20 MPa, P 3 is 40 MPa, P 4 is 60 MPa, P 5 is 100 MPa, P 6is 140 MPa, P 7 is 172 MPa.

[0088] Example 3: As shown in the appendix Figure 3 This embodiment of the present invention discloses a temperature-pressure integrated calibration device for a high-precision pressure sensor, including a high-precision pressure sensor, a pressurizing device, a high-temperature device, and a calibration device;

[0089] Place the high-precision pressure sensor into the pressurizing device, release the pressure of the pressurizing device to zero, and place it in the high-temperature environment of the high-temperature device;

[0090] Gradient control the pressure value of the pressurizing device and the temperature value of the high-temperature environment, and the calibration device records the pressure measurement values of the high-precision pressure sensor in the temperature and pressure rising section and the pressure measurement values of the high-precision pressure sensor in the temperature and pressure decreasing section;

[0091] The calibration device uses the recorded data to perform temperature-pressure integrated calibration through the calibration model.

[0092] The above calibration device can be but is not limited to a computer. The calibration device includes:

[0093] A data recording module that records the pressure measurement values of the high-precision pressure sensor in the temperature and pressure rising section and the pressure measurement values of the high-precision pressure sensor in the temperature and pressure decreasing section;

[0094] A calibration analysis module that performs temperature-pressure integrated calibration through the calibration model using the recorded data.

[0095] A calibration model construction module that constructs a calibration model. The calibration model is as follows:

[0096] Sensor correction formula:

[0097] P = (k 0 + k 1 * dT + k 2 * dT 2 ) * AD + b 0 + b 1 * dT + b 2 * dT 2

[0098] Sensor correction coefficient:

[0099]

[0100] β = (X T X) -1 X T Y

[0101] Among them, X is a temperature correction auxiliary matrix, specifically as follows:

[0102]

[0103] Among them, Y is the sensor pressure measurement matrix, specifically as follows:

[0104]

[0105] Among them, dT is the current temperature; dT i is the temperature change value, dT i = T i - T 0 where T 0 is the initial temperature, and T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor under the current environment; AD i，j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, and j is the pressure point; P j is the pressurization value of the pressure boosting device, and j is the pressure point.

[0106] The above pressure boosting device can be a hand-operated pump; the high-temperature device can be a high-temperature oven.

[0107] Example 4: Set the initial temperature to 25°C. During the heating process, each temperature point can be but is not limited to 50°C, 75°C, 100°C, 125°C, 150°C, 175°C respectively. The pressure point set includes 0 MPa, 20 MPa, 40 MPa, 60 MPa, 100 MPa, 140 MPa, 175 MPa. Use the device of Example 3 of the present invention and the methods of Examples 1 and 2 to perform temperature-pressure integrated calibration of the high-precision pressure sensor and verify the calibration effect. The results are shown in Tables 1 and 2:

[0108] Table 1 Data Record of Heating and Pressurization Section

[0109]

[0110]

[0111] Table 2 Data Record of Cooling and Depressurization Section

[0112]

[0113] It can be seen from Tables 1 and 2 that the high-precision pressure sensor calibrated by the present invention can accurately measure the bottom hole annulus pressure.

[0114] The above technical features constitute the best embodiment of the present invention, which has strong adaptability and the best implementation effect. Non-essential technical features can be added or subtracted according to actual needs to meet the requirements of different situations.

Claims

1. A temperature and pressure integrated calibration method for high-precision pressure sensors. It is characterized in that include: Place a high-precision pressure sensor in a pressurized device, release the pressure of the pressurized device to zero, and place it in a high-temperature environment; Gradient control of the pressure value of the pressurizing equipment and the temperature value of the high-temperature environment, to obtain the pressure measurement value of the high-precision pressure sensor in the heating and pressure increasing section and the pressure measurement value of the high-precision pressure sensor in the cooling and pressure decreasing section; Using the recorded data, the temperature and pressure integrated calibration is performed through the calibration model.

2. The temperature-pressure integrated calibration method for a high-precision pressure sensor according to claim 1, It is characterized in that The calibration model includes: Sensor correction formula: P=(k 0 +k 1 *dT+k 2 *dT 2 )*AD+b 0 +b 1 *dT+b 2 *dT 2 Sensor correction factor: β=(X T X) -1 X T Y Among them, X is the temperature correction auxiliary matrix, as follows: Among them, Y is the sensor pressure measurement matrix, as follows: Where, dT is the current temperature; dT i is the temperature change, dT i =T i -T 0 , T 0 is the initial temperature, T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor in the current environment; AD i,j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, j is the pressure point; P j is the pressure value of the pressure equipment, and j is the pressure point.

3. The temperature-pressure integrated calibration method for a high-precision pressure sensor according to claim 1 or 2, It is characterized in that The pressure value of the gradient-controlled pressurizing device and the temperature value of the high-temperature environment are used to obtain the pressure measurement value of the high-precision pressure sensor in the heating and pressure increasing section and the pressure measurement value of the high-precision pressure sensor in the cooling and pressure decreasing section, including: Determine the initial temperature point, and record the high-precision pressure sensor pressure measurement values ​​corresponding to each pressure point during the pressurization process at the initial temperature point, wherein the pressurization process is to control the pressurization equipment to perform pressurization according to the set pressure point set; Determine the highest temperature point, control the gradient temperature rise in the high temperature environment, and record the high-precision pressure sensor pressure measurement values ​​corresponding to each pressure point during the pressurization process at each temperature point. Stop heating after reaching the highest temperature point, and complete the data recording of the heating and pressurization stage. The pressurization process is to control the pressurization equipment to perform pressurization according to the set pressure point set; Record the high-precision pressure sensor pressure measurement values ​​corresponding to each pressure point during the pressure reduction process from the highest temperature point, where the pressure reduction process is to control the pressurizing equipment to reduce the pressure according to the set pressure point set; Control the gradient cooling of the high temperature environment, and record the high-precision pressure sensor pressure measurement values ​​corresponding to each pressure point during the pressure reduction process at each temperature point. Stop cooling after reaching the initial temperature point, and complete the data recording of the cooling and pressure reduction section. The pressure reduction process is to control the pressurization equipment to reduce the pressure according to the set pressure point set.

4. The temperature-pressure integrated calibration method for a high-precision pressure sensor according to claim 1 or 2, It is characterized in that The pressure of the pressurizing device is released to zero and placed in a high temperature environment, which is a high temperature box.

5. A temperature-pressure integrated calibration device for a high-precision pressure sensor using the method according to any one of claims 1 to 4, It is characterized in that Including high-precision pressure sensors, pressurization equipment, high-temperature equipment and calibration equipment; Place the high-precision pressure sensor in the pressurized equipment, release the pressure of the pressurized equipment to zero, and place it in the high-temperature environment of the high-temperature equipment; Gradient control pressure value of pressurized equipment and temperature value of high temperature environment, calibration equipment records pressure measurement value of high-precision pressure sensor in heating and pressure rising section and pressure measurement value of high-precision pressure sensor in cooling and pressure falling section; The calibration equipment uses the recorded data to perform temperature and pressure integrated calibration through the calibration model.

6. The temperature-pressure integrated calibration device for a high-precision pressure sensor according to claim 5, It is characterized in that The calibration equipment comprises: A data recording module records the pressure measurement values ​​of the high-precision pressure sensor in the temperature and pressure increase stage and the pressure measurement values ​​of the high-precision pressure sensor in the temperature and pressure reduction stage; The calibration analysis module uses the recorded data to perform temperature and pressure integrated calibration through the calibration model. The calibration model construction module builds the calibration model. The calibration model is as follows: Sensor correction formula: P=(k 0 +k 1 *dT+k 2 *dT 2 )*AD+b 0 +b 1 *dT+b 2 *dT 2 Sensor correction factor: β=(X T X) -1 X T Y Among them, X is the temperature correction auxiliary matrix, as follows: Among them, Y is the sensor pressure measurement matrix, as follows: Where, dT is the current temperature; dT i is the temperature change, dT i =T i -T 0 , T 0 is the initial temperature, T i is the temperature value of the temperature point, i is the temperature point; AD is the pressure measurement value of the high-precision pressure sensor in the current environment; AD i,j is the pressure measurement value of the high-precision pressure sensor, i is the temperature point, j is the pressure point; P j is the pressure value of the pressure equipment, and j is the pressure point.

7. The temperature-pressure integrated calibration device for a high-precision pressure sensor according to claim 5 or 6, It is characterized in that The pressurizing device is a hand pump.

8. The temperature-pressure integrated calibration device for a high-precision pressure sensor according to claim 5 or 6, It is characterized in that The high temperature equipment is a high temperature box.

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