Test equipment and test method

Abstract

The invention relates to test equipment and a test method. The testing equipment comprises a circulating conveying assembly, at least one testing seat, a dust removal device, a cleaning device, a carrying device, a testing device and a control device, wherein the testing seat is controlled to move along the circulating conveying assembly; the test bench bears a to-be-tested element, the test method is applied to a control device of the test device, and the test method comprises the following steps: obtaining test result information, the test result information being information formed by detecting the to-be-tested element on a target test bench by the test device; analyzing the test result information to form an analysis result, wherein the analysis result comprises an abnormal category and a normal category; and if the analysis result is an abnormal category, controlling at least one of the dust removal device, the cleaning device and the carrying device to execute corresponding operation based on the analysis result. According to the test equipment and the test method, the test seat can be automatically maintained, tested and replaced under the condition of abnormal test, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of testing, and more specifically, to a testing device and a testing method. Background Art

[0002] In the testing process of semiconductors and electronic components, the test socket plays a core component role in the testing device, and its status is crucial for ensuring the accuracy and efficiency of testing. However, during the operation of the testing device, various problems may occur with the test socket, which may then lead to testing errors. For example, the breakage of the component under test may contaminate / damage the test socket. At this time, it is necessary to pause / turn off the testing device and rely on manual means to remove the broken component under test on the test socket, and perform inspection and cleaning operations on the test socket and its probes to evaluate the feasibility of continued use of the test socket. If the test socket cannot be used continuously, it needs to be replaced.

[0003] The traditional methods of manually cleaning the test socket, grinding the probes, and replacing the new test socket have significant drawbacks. The primary problem is that manual operations are time-consuming and limit the overall efficiency, making it difficult to meet the fast-paced requirements of large-scale production. Secondly, frequent manual contact with the testing device also poses potential safety risks, and improper operations may cause mechanical injuries or electrical accidents, threatening the safety of personnel. Summary of the Invention

[0004] The purpose of the present invention is to provide a testing device and a testing method that can improve work efficiency.

[0005] To achieve the above object, the present invention provides the following technical solution: A testing device includes a circulating conveyor assembly, at least one test socket, a dust removal device, a cleaning device, a handling device, a testing device, and a control device;

[0006] The test socket is arranged to move controllably along the circulating conveyor assembly; the test socket carries the component under test;

[0007] The dust removal device, the cleaning device, and the handling device are all arranged on one side of the circulating conveyor assembly; the dust removal device is used to perform the operation of removing the component under test from the test socket; the cleaning device is used to perform the operation of cleaning the test socket; the handling device is used to perform the operation of handling the test socket between the circulating conveyor assembly and a preset position;

[0008] The testing device is electrically connected to the test socket, and the testing device detects the component under test to form test result information and sends it to the control device;

[0009] The control device is respectively in signal connection with the test device, the dust removal device, the cleaning device and the handling device; the control device can control at least one of the dust removal device, the cleaning device and the handling device to operate based on the obtained test result information.

[0010] Based on the above technical solution, the test equipment of the present application is electrically connected to the test socket through the test device to detect the element to be tested to form test result information, and the control device controls at least one of the dust removal device, the cleaning device and the handling device to perform corresponding operations based on the test result information, so as to realize automatic maintenance, testing and replacement of the test socket in case of test abnormality, and improve work efficiency.

[0011] To achieve the above object, the present invention also provides the following technical solution: a test method, which is applied to the control device of the above test device, and the test method includes the following steps:

[0012] Obtain test result information, where the test result information is the information formed by the test device detecting the element to be tested on the target test socket;

[0013] Analyze the test result information to form an analysis result, where the analysis result includes an abnormal category and a normal category; if the analysis result is the abnormal category, then control at least one of the dust removal device, the cleaning device and the handling device to perform corresponding operations based on the analysis result.

[0014] By applying the test method of the present application to the control device of the test equipment, by obtaining the test result information of the element to be tested on the target test socket, after analyzing the test result information, when the analysis result is the abnormal type, then control at least one of the dust removal device, the cleaning device and the handling device to perform corresponding operations, so as to realize automatic processing in case of abnormality and improve work efficiency.

[0015] Further, the abnormal category includes a damage category;

[0016] If the analysis result is the damage category, the test method includes:

[0017] Control the dust removal device to perform an operation of removing the element to be tested in the target test socket.

[0018] Further, the test method further includes:

[0019] Control the handling device to perform a handling operation on the target test socket from which the element to be tested has been removed and the empty test socket at a preset position, so that the empty test socket replaces the target test socket.

[0020] Further, the test method further includes:

[0021] Control the cleaning device to perform a cleaning operation on the target test socket from which the device under test has been removed.

[0022] Further, the test method further includes:

[0023] Obtain new test result information, where the new test result information is information formed by the test device detecting new devices under test on the target test socket;

[0024] Analyze the new test result information to form a new analysis result.

[0025] Further, the test method further includes:

[0026] If the new analysis result is an abnormal category, control at least one of the cleaning device and the handling device to perform corresponding operations.

[0027] Further, the abnormal category includes a non-damaged category;

[0028] If the analysis result is a non-damaged category, the test method includes:

[0029] S201. Control the dust removal device to perform an operation of removing the device under test in the target test socket;

[0030] S202. Control the cleaning device to perform a cleaning operation on the target test socket from which the device under test has been removed;

[0031] S203. Obtain new test result information, where the new test result information is information formed by the test device detecting new devices under test on the target test socket;

[0032] S204. Analyze the test result information to form a new analysis result.

[0033] Further, the test method further includes:

[0034] If the new analysis result is a non-damaged category; repeat steps S201, S202, and S203 for the target test socket, where steps S201, S202, and S203 are set as a cycle period.

[0035] Further, the test method further includes:

[0036] Set the number of repetitions of the cycle period;

[0037] Within the set number of repetitions of the cycle period, when one of the analysis results is a normal category, stop the test method corresponding to the cycle period for the target test socket;

[0038] When the number of repetitions of the set cycle period is reached and all the analysis results are of the abnormal category, the handling device is controlled to perform a handling operation on the target test socket from which the test component to be measured has been removed and the empty test sockets at the preset positions, so that the empty test sockets replace the target test socket.

[0039] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and to be implemented in accordance with the content of the specification, the following describes in detail with reference to the preferred embodiments of the present invention and the accompanying drawings. Brief Description of the Drawings

[0040] Figure 1 It is a schematic structural diagram of a test device shown in an embodiment of the present application;

[0041] Figure 2 It is a schematic structural diagram of a cyclic conveying component shown in an embodiment of the present application;

[0042] Figure 3 It is a schematic structural diagram of a dust removal device shown in an embodiment of the present application;

[0043] Figure 4 For Figure 3 It is a partial structural schematic diagram of the dust removal device shown;

[0044] Figure 5 It is a schematic structural diagram of a cleaning device shown in an embodiment of the present application;

[0045] Figure 6 For Figure 5 It is a schematic diagram of a partial structure of the cleaning device shown;

[0046] Figure 7 For Figure 5 It is a schematic structural diagram of the dust suction plate in

[0047] Figure 8 For Figure 6 It is a cross-sectional view of the dust suction plate shown;

[0048] Figure 9 It is a schematic structural diagram of a handling device shown in an embodiment of the present application;

[0049] Figure 10 For Figure 9 It is a partial structural schematic diagram of the handling device shown;

[0050] Figure 11 For Figure 9 It is a schematic diagram of the partial structure of the handling device in another direction shown;

[0051] Figure 12Schematic flow diagram of the testing method shown in an embodiment of the present application.

[0052] Reference numerals:

[0053] 10 - Circulating conveying assembly; 11 - Straight section; 12 - Arc section;

[0054] 20 - Dust removal device; 21 - First double-axis linear module; 211 - First X-axis linear module; 212 - First Y-axis linear module; 22 - First lifting mechanism; 221 - First cylinder; 222 - Second cylinder; 23 - Dust removal mechanism; 231 - Suction head; 232 - Blowing head; 24 - Circumferential adjustment assembly; 241 - Fixed plate; 242 - Positioning plate; 243 - Locking member;

[0055] 30 - Cleaning device; 31 - Second double-axis linear module; 311 - Second X-axis linear module; 312 - Second Y-axis linear module; 32 - Second lifting mechanism; 33 - Dust suction plate; 341 - Grinding head; 342 - Brush head; 343 - Horizontal cylinder; 344 - Clamping member; 345 - Clamping cylinder; 346 - Lifting cylinder; 35 - Horizontal driving member; 331 - Dust suction port; 332 - Dust suction channel; 333 - Docking port;

[0056] 40 - Handling device; 41 - Third double-axis linear module; 411 - Third bracket; 412 - Third X-axis linear module; 413 - Third Y-axis linear module; 42 Third lifting mechanism; 43 - Rotary driving assembly; 431 - Rotary motor; 432 - Rotary seat; 44 - Clamping assembly; 45 - Bracket plate; 46 - Rotary detection assembly; 461 - Inductor; 462 - Induction plate; 47 - Limit assembly; 471 - Limit baffle; 472 - Limit abutting plate;

[0057] 50 - Test seat; 60 - Preset position. Detailed implementation manners

[0058] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0059] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0060] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0061] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0062] The test equipment shown in an embodiment of the present application is used to detect the performance of semiconductors or electronic components. Among them, the semiconductor can specifically be a chip (a single unit containing a circuit cut from a wafer or the final product after packaging), and the electronic component can be a transistor or other electronic components with specific functions. In this embodiment, the semiconductor or electronic component is referred to as the component to be tested.

[0063] Please refer to Figure 1 and Figure 2 , the test equipment includes a circulating conveying component 10, at least one test seat 50, a dust removal device 20, a cleaning device 30, a handling device 40, a test device (not shown), and a control device (not shown). The circulating conveying component 10 can be any one of a circle, an ellipse, and a quadrilateral in the orthographic projection direction, and no limitation is made thereto herein. The test seat 50 is arranged to move along the circulating conveying component 10 in a controlled manner. The movement of the test seat 50 on the circulating conveying component 10 can be that the test seat 50 is driven by a driving member to drive the moving component below it to move itself on the circulating conveying component 10, or the circulating conveying component 10 drives it to move along the circulating conveying component 10. The test seat 50 carries the component to be tested. Specifically, the test seat 50 has probes for making electrical contact with the component to be tested therein. The structure of the test seat 50 can adopt the existing technology, and no detailed description is given thereto herein.

[0064] The dust removal device 20, the cleaning device 30, and the handling device 40 are all arranged on one side of the circulating conveyor assembly 10. The dust removal device 20 is used to perform the operation of removing the component under test in the test socket 50. The cleaning device 30 is used to perform the operation of cleaning the test socket 50. The handling device 40 performs the operation of handling the test socket 50 between the circulating conveyor assembly 10 and the preset position 60, so as to realize the replacement of the test socket 50 on the circulating conveyor assembly 10 and the test socket 50 at the preset position 60.

[0065] The test device is electrically connected to the test socket 50, and the test device detects the component under test to form test result information and sends it to the control device.

[0066] The control device is respectively signal-connected to the test device, the dust removal device 20, the cleaning device 30, and the handling device 40. The control device can control at least one of the dust removal device 20, the cleaning device 30, and the handling device 40 to perform corresponding operations based on the obtained test result information.

[0067] The test equipment is electrically connected to the test socket 50 through the test device to detect the component under test to form test result information, and the control device controls at least one of the dust removal device 20, the cleaning device 30, and the handling device 40 to operate corresponding operations based on the test result information, thereby realizing the automatic maintenance, testing, and replacement of the test socket in case of test anomalies, and improving work efficiency.

[0068] Here, it should be noted that the detection signals include voltage signals, current signals, frequency signals, digital signals, etc., which are used to indicate various performance signals of the component under test. The test device is built-in with test software, and the test software preprocesses the collected detection signals, such as filtering, amplifying, denoising, etc., and then uses algorithms to analyze the preprocessed data in detail to extract key performance indicators (i.e., test result information). The control device is built-in with analysis software, which compares the obtained performance indicators with the preset qualified standards to form an analysis result, and then controls at least one of the dust removal device, the cleaning device, and the handling device to perform corresponding operations based on the analysis result. The above processing method of the test software can adopt the prior art, and will not be described in detail here.

[0069] To facilitate an intuitive understanding of the circulating conveyor assembly 10, the dust removal device 20, the cleaning device 30, and the handling device 40, this application respectively provides an implementable example of the circulating conveyor assembly 10, the dust removal device 20, the cleaning device 30, and the handling device 40.

[0070] Please refer to Figure 2, in an implementable example, the front projection of the circular conveyor assembly 10 is elliptical. The circular conveyor assembly 10 can adopt an existing conventional structure, for example, it includes a frame (not shown), a conveying structure (not shown) arranged on the frame, and a driving device (not shown) for driving the conveying structure to move circularly. The conveying structure can be a conventional structure such as a conveyor belt or a conveying rack. In this embodiment, the circular conveyor assembly includes several functional areas, and the several functional areas include a testing area, a dust removal area, a cleaning area, and a replacement area. The testing area is arranged corresponding to the testing device, the dust removal area is arranged corresponding to the dust removal device 20, the cleaning area is corresponding to the cleaning device 30, and the replacement area is arranged corresponding to the handling device 40. The testing area is arranged on the straight section 11 of the circular conveyor assembly 10, and the dust removal area, the cleaning area, and the replacement area are arranged on the arc section 12 of the circular conveyor assembly 10.

[0071] Since the test needs to ensure the alignment accuracy and the test space, therefore, it is arranged on the straight section 11 to ensure the smoothness of the test. And the dust removal area, the cleaning area, and the replacement area are arranged on the arc section 12 of the circular conveyor assembly 10, which effectively utilizes the space. Through this kind of setting, the overall layout becomes more reasonable and effective.

[0072] In an embodiment, the several functional areas further include a feeding area and a discharging area. The feeding area is used to place the element to be tested on the test seat 50, and the discharging area is used to take out the element to be tested on the test seat 50. The feeding area is arranged on the straight section 11 of the circular conveyor assembly, and the discharging area is arranged on the arc section 12 of the circular conveyor assembly. This kind of setting takes into account the space required for feeding and the accuracy requirement during the feeding process. Therefore, the feeding area is set on the straight section 11, and the discharging area is set on the arc section 12, which not only effectively reduces the space pressure of the feeding area, but also helps to avoid the possible confusion problem between the feeding and discharging processes, ensuring the smoothness and high efficiency of the overall operation process. In this embodiment, the straight section 11 of the circular conveyor assembly is divided into two relatively arranged sections, the feeding area is set on one of the straight sections 11, and the testing area is set on the other straight section 11.

[0073] In this embodiment, the testing equipment further includes a housing for protecting the testing equipment. Among them, the circular conveyor assembly 10, the dust removal device 20, the cleaning device 30, the handling device 40, and the testing device are all arranged inside the housing to ensure the safety of the operation site and protect the testing equipment.

[0074] To facilitate the replacement and maintenance of the test sockets 50 on the circular conveying assembly 10 while ensuring the continuous operation of the test equipment, in one embodiment, a temporary storage area is provided on one side of the replacement area, a preset position 60 is arranged in the temporary storage area, and a pick-and-place window is provided on one side of the housing located in the temporary storage area. The temporary storage area specifically includes a first area and a second area. The first area is used for stacking a plurality of "qualified test sockets 50", and the second area is used for stacking "replaced test sockets 50". The "qualified test sockets 50" are the test sockets 50 transported to the circular conveying assembly 10 by the handling device 40. The "replaced test sockets 50" are the test sockets 50 transported from the circular conveying assembly 10 by the handling device 40, and the test sockets 50 are temporarily considered to be damaged and need to be maintained or destroyed.

[0075] Please refer to Figure 3 and Figure 4 , in an implementable example, the dust removal device 20 includes a first dual-axis linear module 21, a first lifting mechanism 22, a dust removal mechanism 23, and a circumferential adjustment assembly 24. The first dual-axis linear module 21 includes a first bracket (not shown), a first X-axis linear module 211 arranged on the first bracket, and a first Y-axis linear module 212 arranged on the first X-axis linear module 211. The first X-axis linear module 211, the first Y-axis linear module 212, and the first lifting mechanism 22 enable the dust removal mechanism 23 to move in the XYZ axes.

[0076] The dust removal mechanism 23 is installed on the first lifting mechanism 22. The first lifting mechanism 22 includes a first air cylinder 221 and a second air cylinder 222 arranged vertically side by side. The dust removal mechanism 23 includes a suction head 231 installed below the first air cylinder 221 and a blowing head 232 installed below the second air cylinder 222. The first air cylinder 221 and the second air cylinder 222 can respectively drive the suction head 231 and the blowing head 232 to move in the height direction, so that the suction head 231 and the blowing head 232 are misaligned in the height direction when working, which is convenient for the suction head 231 to adsorb the element to be tested and take the element to be tested out of the test socket 50, and is convenient for the blowing head 232 to blow the test socket 50 to remove dust.

[0077] The axial adjustment assembly 24 is arranged between the first Y-axis linear module 212 and the lifting mechanism 22 to adjust the circumferential position of the dust removal mechanism 23. Specifically, the circumferential adjustment assembly 24 includes a fixing plate 241, a positioning plate 242, and a locking member 243. The fixing plate 241 is fixed below the first Y-axis linear module 212. The positioning plate 242 is installed below the fixing plate 241. The positioning plate 242 is arranged parallel to the fixing plate 241. The locking member 243 connects the positioning plate 242 and the fixing plate 241. The positioning plate 242 rotates relative to the fixing plate 241 with the locking member 243 as the rotation axis. The locking member 243 can lock the positioning plate 242 and the fixing plate 241. When adjusting the positioning plate 242, loosen the locking member 243 and push the positioning plate 242 in the circumferential direction with the locking member 243 as the axis. After the adjustment is completed, tighten the locking member 243 again. The first lifting mechanism 22 is fixed below the positioning plate 242.

[0078] As described above, since the dust removal device 20 is arranged on the arc section 12 of the circulating conveyor assembly 10, the assembly error of the test setup may cause misalignment between the suction head 231 and the blowing head 232 in the dust removal mechanism 23 and the test seat 50 on the circulating conveyor assembly 10. By setting the circumferential adjustment assembly 24, after the test equipment is assembled, the positioning plate 242 is adjusted circumferentially so that the suction head 231 and the blowing head 232 can be aligned with the test seat 50, thereby compensating for any errors that may occur during the assembly process and improving the overall operating efficiency and accuracy.

[0079] Please refer to Figure 5 and Figure 6 In an implementable example, the cleaning device 30 includes a second double-axis linear module 31, a second lifting mechanism 32 arranged on the second double-axis linear module 31, a cleaning component arranged on the second lifting mechanism 32, and a dust suction plate 33 arranged below the cleaning component. The second double-axis linear module 31 includes a second bracket (not shown), a second X-axis linear module 311 arranged on the second bracket, and a second Y-axis linear module 312 arranged on the second X-axis linear module 311. The second X-axis linear module 311, the second Y-axis linear module 312, and the second lifting mechanism 32 enable the cleaning component to move in the XYZ axes.

[0080] The cleaning component includes a grinding head 341 and a brush head 342. The grinding head 341 and the brush head 342 are arranged side by side in the horizontal direction. The grinding head 341 and the brush head 342 are respectively used for grinding and cleaning the probe. When the grinding head 341 / brush head 342 is pushed by the second double-axis linear module 31 and the second lifting mechanism 32 to contact the probe, the second lifting mechanism 32 pushes the grinding head 341 / brush head 342 to move slightly to realize grinding / cleaning of the probe.

[0081] In order to avoid interference problems between one of the grinding head 341 and the brush head 342 during operation, in this embodiment, the grinding assembly further includes a horizontal cylinder 343 for mounting the brush head 342. The horizontal cylinder 343 is fixed on the second lifting mechanism 32. The horizontal cylinder 343 can drive the brush head 342 to move relative to the grinding head 341 in the horizontal direction to protrude from the grinding head 341, so as to enable the brush head 342 to contact the probe. At this time, there is a certain distance between the grinding head 341 and the probe to avoid interference between the grinding head 341 and the probe. When using the grinding head 341, the horizontal cylinder 343 drives the brush head 342 to move in the reverse direction so that the brush head 342 is away from the probe. At this time, when the grinding head 341 contacts the probe, there is a certain distance between the brush head 342 and the probe, thus avoiding interference.

[0082] As described above, the grinding head 341 realizes grinding of the probe through fine movement. During long-term use, the grinding head 341 will wear out. Therefore, it is necessary to replace the grinding head 341. In this embodiment, the grinding head 341 is generally square in structure. To improve work efficiency and ensure the continuous operation of the equipment when replacing the grinding head 341, automatic replacement of the grinding head 341 can be realized in this embodiment. Specifically: The cleaning assembly further includes a clamping mechanism and a lifting cylinder 346. The clamping mechanism clamps or releases the grinding head 341. Specifically, the clamping mechanism includes two oppositely arranged clamping members 344 and a clamping cylinder 345. The two clamping members 344 are used to clamp or release the grinding head 341. The clamping cylinder 345 drives the two clamping members 344 to move relative to each other to clamp or release the grinding head 341. The lifting cylinder 346 drives the clamping mechanism to move in the height direction. The cleaning device 30 further includes a horizontal driving member 35. The horizontal driving member 35 drives the dust suction plate 33 to move in the horizontal direction to switch between a first horizontal position and a second horizontal position. When the dust suction plate 33 is in the first horizontal position, the orthographic projection of the grinding head 341 is located within the dust suction plate 33. When the dust suction plate 33 is in the second horizontal position, the orthographic projection of the grinding head 341 is located outside the dust suction plate 33. By setting the horizontal driving member 35, the dust suction plate 33 can be switched between the first horizontal position and the second horizontal position. In this way, when it is necessary to replace the grinding head 341 to avoid interference of the dust suction plate 33 with the grinding head 341, and when the grinding head 341 is performing grinding work, the dust suction port 331 (described later) of the dust suction plate 33 can be made as close as possible to the grinding head 341 to improve the dust suction capacity.

[0083] Specifically, when replacing the grinding head 341, first, the second dual-axis linear module 31 and the second lifting mechanism 32 are used to push the cleaning component to move to the designated unloading position of the grinding head 341 to be replaced. Then, the cleaning device 30 is used to drive the dust suction plate 33 to move between the first position and the second position, so as to avoid the position below the grinding head 341 when the grinding head 341 needs to be replaced. Furthermore, the lifting cylinder 346 is used to push the clamping cylinder 345, the clamping member 344, and the grinding head 341 to move downward until reaching the designated height. Then, the clamping cylinder 345 is started to drive the two clamping members 344 to move in opposite directions away from each other to loosen the grinding head 341. At this time, the removal of the grinding head 341 is completed. Then, the second dual-axis linear module 31 and the second lifting mechanism 32 are used to push the cleaning component to move to the designated installation position of the grinding head 341 to be replaced. Then, the lifting cylinder 346 is used to push the clamping cylinder 345, the clamping member 344, and the grinding head 341 to move downward until reaching the designated height. Then, the clamping cylinder 345 is started to drive the two clamping members 344 to move relative to each other to clamp the new grinding head 341. At this time, the installation of the new grinding head is completed.

[0084] Please refer to Figure 7 and Figure 8 , the dust suction plate 33 has a dust suction port 331 and a dust suction channel 332. The dust suction port 331 faces the cleaning component. The dust suction channel 332 is formed in the dust suction plate 33. The dust suction port 331 is communicated with the internal dust suction channel 332, and is used to guide the debris generated by grinding / sweeping collected by the dust suction port 331 to the outside. The dust suction channel 332 penetrates the rear surface of the dust suction plate 33 to form a docking port 333 for connecting with a dust suction pipe. In this embodiment, the number of the dust suction plates 33 provided is two, and the two dust suction plates 33 respectively correspond to the grinding head 341 and the brush head 342. Among them, the dust suction plate 33 below the brush head 342 is fixed below the brush head 342 plate for fixing the brush head 342.

[0085] Please refer to Figures 9 to 11 , in an implementable example, the handling device 40 includes a third dual-axis linear module 41, a third lifting mechanism 42, a rotation driving component 43, a clamping component 44, a rotation detection component 46, and a limiting component 47. The third lifting mechanism 42 is arranged on the third dual-axis linear module 41. The third dual-axis linear module 41 includes a third bracket 411, a third X-axis linear module 412 arranged on the third bracket, and a third Y-axis linear module 413 arranged on the third X-axis linear module 412. The third X-axis linear module 412, the third Y-axis linear module 413, and the third lifting mechanism 42 are used to realize the movement of the rotation driving component 43 and other components on the XYZ axes.

[0086] The rotation drive assembly 43 is disposed on the third lifting mechanism 42, and the clamping assembly 44 is disposed below the rotation drive assembly 43. The rotation drive assembly 43 drives the clamping assembly 44 to switch between a first rotation position and a second rotation position. The rotation detection assembly 46 and the limit assembly 47 are both disposed on one side of the rotation drive assembly 43. The rotation detection assembly 46 and the limit assembly 47 are both connected to the control device in a signal manner. When the rotation sensing assembly 46 detects that the clamping assembly 44 reaches the first rotation position or the second rotation position, an induction signal is generated, and the control device controls the rotation drive assembly 43 to run in the reverse direction based on the induction signal. When the clamping assembly 44 crosses the first rotation position / the second rotation position, the limit assembly 47 restricts the clamping assembly 44 from continuing to rotate.

[0087] In this embodiment, the handling device 40 further includes a support plate 45. The rotation drive assembly 43 includes a rotation motor 431 fixed on the third lifting mechanism 42 and a rotation seat 432 disposed on the rotation motor 431 and driven by the drive shaft of the rotation motor 431. The clamping assembly 44 and the support plate 45 are mounted on the rotation seat 432. There are two limit abutting plates 472 disposed at a certain angle, and the two limit abutting plates 472 are fixed on the rotation seat 432. The rotation detection assembly 46 includes two sensors 461 mounted on the rotation seat 432 and an induction plate 462 disposed on the support plate 45, and the two sensors 461 are disposed at a certain angle. In the first position, one of the sensors 461 is located inside the induction plate 462, and in the second position, the other sensor 461 is located inside the induction plate 462. The limit assembly 47 includes a limit baffle 471 disposed on the support plate 45 and a limit abutting plate 472 disposed on the rotation seat 432. When the rotation drive assembly 43 crosses the first rotation position / the second rotation position, the limit abutting plate 472 abuts against the limit baffle 471 to prevent the rotation seat 432 from continuing to rotate in the same direction.

[0088] Please refer to Figure 1 and Figure 12 , an embodiment of the present application further provides a test method, and this test method can be applied to the control device of the test equipment shown in any of the foregoing embodiments. This test method includes the following steps:

[0089] S10. Obtain test result information, where the test result information is information formed by the test device detecting the device under test on the target test seat 50;

[0090] S20. Analyze the test result information to form an analysis result, and the analysis result includes an abnormal category and a normal category; if the analysis result is the abnormal category, then based on the analysis result, control at least one of the dust removal device 20, the cleaning device 30, and the handling device 40 to perform corresponding operations.

[0091] It should be noted that generally, a number of test seats 50 are provided on the cyclic conveying component 10. To facilitate the implementation of this test method, it is necessary to confirm the target test seat 50.

[0092] By applying the test method of the present application to the control device of the test equipment, after obtaining the test result information of the component to be tested on the target test seat 50 and analyzing the test result information, when the analysis result is an abnormal type, then control at least one of the dust removal device 20, the cleaning device 30, and the handling device 40 to perform corresponding operations, thereby realizing the automatic processing in case of abnormality and improving the work efficiency.

[0093] The abnormal categories include a damaged category and a non-damaged category. The damaged category indicates that the component to be tested explodes during the test; the non-damaged category indicates that the component to be tested does not explode during the test, and the test component may be a qualified part or a non-qualified part.

[0094] In the above step S20, if the analysis result is the damaged category, the test method further includes:

[0095] S101. Control the dust removal device 20 to perform an operation of removing the component to be tested in the target test seat 50.

[0096] In the above step S101, the component to be tested in the target test seat 50 is removed. In this case, the target test seat 50 may be damaged due to the explosion of the component to be tested, or only the probe may be contaminated and the target test seat 50 is not damaged. In this regard, the test method of the present application can continue with the following multiple processes after step S101.

[0097] The first process: The test method further includes:

[0098] S102. Control the handling device 40 to perform a handling operation on the target test seat 50 from which the component to be tested has been removed and the empty test seat 50 at the preset position 60, so that the empty test seat 50 replaces the target test seat 50.

[0099] In this process, it is defaulted that the target test seat 50 is damaged. Therefore, when the analysis result is the damaged category, the target test seat 50 is directly replaced.

[0100] The second process: The test method further includes:

[0101] S102'. Control the cleaning device 30 to perform a cleaning operation on the target test seat 50 from which the component to be tested has been removed.

[0102] In this process, it is initially assumed that the target test socket 50 is not damaged, but the probes are contaminated. Therefore, when the analysis result is the damaged category, after removing the device under test on the target test socket 50, the target test socket 50 is cleaned. This cleaning operation is to control the grinding head 341 to grind the probes and control the brush head 342 to clean the probes to remove the contaminants on the probes. After the cleaning is completed, the target test socket 50 can be used again, and new devices under test will be placed on the target test socket 50. Then, the test method further includes:

[0103] S103’, Obtain new test result information, where the new test result information is the information formed by the test device detecting the new device under test on the target test socket 50;

[0104] S104’, Analyze the new test result information to form a new analysis result;

[0105] After step S103, if the new analysis result is the abnormal category, control at least one of the cleaning device 30 and the handling device 40 to perform corresponding operations.

[0106] Specifically, if the new analysis result is the abnormal category, it can be set according to actual needs to control the handling device 40 to replace the target test socket 50 with a new test socket 50 at the preset position 60. In this case, it is initially assumed that the target test socket 50 is damaged; or, replace the device under test on the target test socket 50 again, and then repeat the above steps S103’ and S104’. In this case, it is temporarily assumed that the target test socket 50 is not damaged.

[0107] For the third process, the test method further includes:

[0108] S102”, Obtain new test result information, where the new test result information is the information formed by the test device detecting the new device under test on the target test socket 50;

[0109] S103”, Analyze the new test result information to form a new analysis result;

[0110] After step S103”, if the new analysis result is the abnormal category, control at least one of the cleaning device 30 and the handling device 40 to perform corresponding operations.

[0111] In this process, it is initially assumed that the target test socket 50 is not damaged and the probes are not contaminated. Therefore, when the new analysis result is the damaged category, after removing the device under test on the target test socket 50, new devices under test will be placed on the target test socket 50.

[0112] After the new analysis result is determined to be an abnormal category, the control handling device 40 can be set according to actual requirements to replace the target test socket 50 with a new test socket 50 at the preset position 60. In this case, it is defaulted that the target test socket 50 is damaged; or, the component to be tested on the target test socket 50 is replaced again, and then the above steps S102” to S103” are repeated.

[0113] As described above, the abnormal category also includes a non-damaged category. If the analysis result is determined to be a non-damaged category, the test method includes:

[0114] S201. Control the dust removal device 20 to perform an operation of removing the component to be tested in the target test socket 50;

[0115] S202. Control the cleaning device 30 to perform a cleaning operation on the target test socket 50 from which the component to be tested has been removed;

[0116] S203. Obtain new test result information, where the new test result information is the information formed by the test device detecting new components to be tested on the target test socket 50;

[0117] S204. Analyze the new test result information to form a new analysis result;

[0118] If the new analysis result is a non-damaged category, then repeat steps S201, S202, and S203 for the target test socket 50, where steps S201, S202, and S203 are set as a cycle period.

[0119] In the above steps, in step S204, within the cycle period, it is defaulted that the target test socket 50 is not damaged. In other embodiments, if the new test result information is determined to be a non-damaged category, then control the handling device 40 to perform corresponding operations to directly replace the target test socket 50. In this embodiment, it is defaulted that the target test socket 50 is damaged.

[0120] It should be noted that the cycle period of the above step S204 can be one time or multiple times. The test method further includes:

[0121] Set the number of repetitions of the cycle period;

[0122] Within the set number of repetitions of the cycle period, when one of the test result information is a normal category, stop the test method corresponding to the cycle period for the target test socket 50;

[0123] When the set number of repetitions of the cycle period is reached and all the analysis results are abnormal categories, control the handling device 40 to perform a handling operation on the target test socket 50 from which the component to be tested has been removed and the empty test socket 50 at the preset position 60, so that the empty test socket 50 replaces the target test socket 50.

[0124] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0125] The above embodiments only express several implementation manners of the present invention, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the appended claims.

Claims

1. A testing device, characterized in that: It includes a circulating conveying assembly, at least one test seat, a dust removal device, a cleaning device, a handling device, a testing device and a control device; The test seat is configured to be controlled to move along the cyclic conveying assembly; the test seat carries the component to be tested; The dust removal device, the cleaning device and the transport device are all arranged on one side of the circulating conveying assembly; the dust removal device is used to remove the components to be tested in the test seat; the cleaning device is used to clean the test seat; the transport device is used to transport the test seat between the circulating conveying assembly and the preset position; The testing device is electrically connected to the testing socket, and the testing device detects the component to be tested to form test result information and sends it to the control device; The control device is signal-connected to the testing device, the dust removal device, the cleaning device and the transporting device respectively; the control device can control the operation of at least one of the dust removal device, the cleaning device and the transporting device based on the acquired test result information.

2. A testing method, characterized in that: The test method is applied to the control device of the test device according to claim 1, and the test method comprises the following steps: Acquire test result information, where the test result information is information generated by the test device detecting the component to be tested on the target test socket; Analyzing the test result information to form an analysis result, the analysis result including an abnormal category and a normal category; If the analysis result is an abnormal category, at least one of the dust removal device, the cleaning device, and the transport device is controlled to perform a corresponding operation based on the analysis result.

3. The testing method according to claim 2, characterized in that: The abnormal categories include a damaged category; If the analysis result is a damaged category, the test method includes: The dust removal device is controlled to perform an operation of removing the component under test in the target test seat.

4. The testing method according to claim 3, characterized in that: The test method also includes: The transport device is controlled to perform a transport operation on the target test socket from which the DUT has been removed and an empty test socket at a preset position, so that the empty test socket replaces the target test socket.

5. The testing method according to claim 3, characterized in that: The test method also includes: The cleaning device is controlled to perform a cleaning operation on the target test socket from which the DUT has been removed.

6. The testing method according to claim 3 or 5, characterized in that: The test method also includes: Acquire new test result information, where the new test result information is information generated by the test device detecting a new component to be tested on the target test socket; The new test result information is analyzed to form a new analysis result.

7. The testing method according to claim 6, characterized in that: The test method also includes: If the new analysis result is of an abnormal type, at least one of the cleaning device and the transporting device is controlled to perform a corresponding operation.

8. The testing method according to claim 2, characterized in that: The abnormal categories include non-damaged categories; If the analysis result is a non-destructive category, the test method includes: S201, controlling the dust removal device to remove the DUT in the target test socket; S202, controlling the cleaning device to perform a cleaning operation on the target test socket from which the DUT has been removed; S203, obtaining new test result information, wherein the new test result information is information generated by the test device detecting a new DUT on the target test socket; S204: Analyze the new test result information to form a new analysis result.

9. The testing method according to claim 8, characterized in that: The test method also includes: If the new analysis result is a non-damage category, then steps S201, S202, and S203 are repeated for the target test socket, wherein steps S201, S202, and S203 are set as a cycle.

10. The testing method according to claim 9, characterized in that: The test method also includes: Setting the number of repetitions of the cycle; Within the set number of repetitions of the cycle period, when one of the analysis results is a normal category, the test method corresponding to the cycle period is stopped for the target test socket; When the set number of repetitions of the cycle period is reached and all the analysis results are of the abnormal category, the transport device is controlled to perform a transport operation on the target test seat from which the component to be tested has been removed and the empty test seat at the preset position, so that the empty test seat replaces the target test seat.

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