SiC power semiconductor test equipment voltage rapid adjustment system and method

Abstract

The invention belongs to the technical field of device testing, and particularly relates to a SiC power semiconductor testing equipment voltage rapid adjusting system and method, and the system comprises an industrial control computer, a program control high-voltage power supply, a large-capacity capacitor filtering module, a SiC testing module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, and a photoelectric isolation driving module. A power semiconductor switch module and a charge storage module; the high-capacity capacitor filtering module is connected with the SiC test module so as to provide test bus voltage; the program-controlled high-voltage power supply is respectively connected with the industrial control computer and the power semiconductor switch module; the DSP digital signal processor module is respectively connected with the industrial control computer, the high-speed analog-to-digital conversion module and the photoelectric isolation driving module; the power semiconductor switch module is also respectively connected with the optoelectronic isolation driving module, the high-capacity capacitor filtering module and the charge storage module; according to the invention, the voltage can be rapidly adjusted, and the test efficiency and precision are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of power semiconductor device testing, and particularly to a voltage rapid adjustment system and method for a SiC power semiconductor testing device. Background Art

[0002] With the development of power electronics technology, SiC (silicon carbide) power semiconductor devices have better performance and reliability in special environments such as high voltage, high temperature, and high frequency, and thus have been widely used in the field of power electronics. However, in order to ensure the performance and reliability of SiC power semiconductor devices, strict test screening is required.

[0003] In the current prior art, during the shipping test screening process of SiC power semiconductor devices in chips and modules, the test bus voltage needs to be quickly increased or decreased to a specified test voltage value. Traditional test equipment usually uses mechanical switch devices or traditional power supply charging and resistor discharging methods to achieve voltage adjustment. When testing SiC power semiconductors, these methods have problems such as slow adjustment speed, high heat generation, and poor reliability. Summary of the Invention

[0004] Aiming at the technical defects mentioned in the background art, the purpose of the embodiments of the present invention is to provide a voltage rapid adjustment system and method for a SiC power semiconductor testing device to solve the problems proposed in the above background art.

[0005] To achieve the above object, in a first aspect, the embodiments of the present invention provide a voltage rapid adjustment system for a SiC power semiconductor testing device, including an industrial control computer, a programmable high-voltage power supply, a large-capacity capacitor filtering module, a SiC testing module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, an optoelectronic isolation driving module, a power semiconductor switch module, and a charge storage module; wherein, the large-capacity capacitor filtering module is connected to the SiC testing module to provide a test bus voltage;

[0006] The industrial control computer is used to obtain test voltage parameters and send them externally; wherein, the test voltage parameters include multiple test steps, and corresponding test voltage values are associated with the corresponding test steps;

[0007] The programmable high-voltage power supply is respectively connected to the industrial control computer and the power semiconductor switch module, and is used for:

[0008] Outputting a corresponding high-voltage power supply according to the test voltage parameters;

[0009] Transmitting the high-voltage power supply to the large-capacity capacitor filtering module through the power semiconductor switch module for charging;

[0010] The high-speed analog-to-digital conversion module is used to obtain sampled data;

[0011] The DSP digital signal processor module is respectively connected to the industrial control computer, the high-speed analog-to-digital conversion module and the opto-isolated drive module, and is used for:

[0012] Controlling the opto-isolated drive module to output a corresponding drive signal according to the test voltage parameter and the sampled data;

[0013] The power semiconductor switch module is also respectively connected to the opto-isolated drive module, the large-capacity capacitor filtering module and the charge storage module, and is used for:

[0014] Acting based on the drive signal to control the power transfer between the large-capacity capacitor filtering module and the charge storage module, so as to realize the rapid rise or fall of the test bus voltage to the corresponding test voltage value.

[0015] As a specific implementation manner of the present application, the high-speed analog-to-digital conversion module includes at least two-way voltage sampling, one for sampling the output of the programmable high-voltage power supply, and the other for sampling the input of the large-capacity capacitor filtering module.

[0016] As a specific implementation manner of the present application, a power adjustment circuit is further connected between the large-capacity capacitor filtering module and the charge storage module.

[0017] As a specific implementation manner of the present application, the power adjustment circuit includes a first diode D1, a second diode D2, a first inductor L1 and a second inductor L2;

[0018] The positive input end of the large-capacity capacitor filtering module is respectively connected to one end of the first inductor L1 and the cathode of the second diode D2. The other end of the first inductor L1 is respectively connected to the anode of the first diode D1 and a switching device in the power semiconductor switch module. The cathode of the first diode D1 is connected to the positive input end of the charge storage module;

[0019] The anode of the second diode D2 is respectively connected to another switching device in the power semiconductor switch module and one end of the second inductor L2. The other end of the second inductor L2 is also connected to the positive input end of the charge storage module.

[0020] As an optimized implementation manner of the present application, a current-limiting resistor is further connected between the DSP digital signal processor module and the opto-isolated drive module.

[0021] In a second aspect, an embodiment of the present invention further provides a method for rapid voltage adjustment of a SiC power semiconductor test device, which is applied to a rapid voltage adjustment system of a SiC power semiconductor test device described in the first aspect. The system includes an industrial control computer, a programmable high-voltage power supply, a large-capacity capacitor filtering module, a SiC test module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, an opto-isolated drive module, a power semiconductor switch module, and a charge storage module; wherein, the large-capacity capacitor filtering module is connected to the SiC test module to provide a test bus voltage; the method includes the following steps:

[0022] Obtain test voltage parameters through the industrial control computer and send them externally; wherein, the test voltage parameters include multiple test steps, and corresponding test voltage values are associated with the corresponding test steps;

[0023] Use the programmable high-voltage power supply to output a corresponding high-voltage power supply according to the test voltage parameters;

[0024] Transmit the high-voltage power supply to the large-capacity capacitor filtering module through the power semiconductor switch module for charging;

[0025] Obtain the sampling data of the high-speed analog-to-digital conversion module;

[0026] Control the opto-isolated drive module to output a corresponding drive signal according to the test voltage parameters and the sampling data;

[0027] The power semiconductor switch module operates based on the drive signal to control the charge transfer between the large-capacity capacitor filtering module and the charge storage module, so as to rapidly increase or decrease the test bus voltage to the corresponding test voltage value.

[0028] As a specific implementation manner of the present application, if the voltage of the large-capacity capacitor filtering module at the original moment is zero volts, the industrial control computer issues to the programmable high-voltage power supply and the DSP digital signal processor module according to the voltage parameter requirements of the SiC test, and starts the high-voltage power supply output;

[0029] At the same time, the DSP outputs a digital signal to drive the opto-isolated drive module, and then controls the Q1 switch module in the power semiconductor. The high-voltage power supply charges the large-capacity capacitor filtering module through Q1 to provide the bus voltage for SiC testing.

[0030] As a specific implementation manner of the present application, the test voltage parameters are derived from the input of an input device or the data transmission of an external client.

[0031] The technical solution provided by the embodiment of the present invention is based on digital signal processing technology to achieve rapid voltage adjustment, improve test efficiency and accuracy. Compared with traditional mechanical switches or electronic switches, it does not involve mechanical components and high-power discharge resistors, greatly reducing the energy waste of the large-capacity capacitor filtering module during voltage adjustment. While being low-carbon and environmentally friendly, the system has a low temperature rise, reduces the failure rate, and improves the reliability of the application. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art.

[0033] Figure 1 It is a connection schematic diagram of a voltage rapid adjustment system for a SiC power semiconductor test device provided by an embodiment of the present invention;

[0034] Figure 2 It is a flowchart of a voltage rapid adjustment method for a SiC power semiconductor test device provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0036] It should be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0037] As used in this specification and the appended claims, the term "if" may be construed as "when" or "once" or "in response to determining" or "in response to detecting" depending on the context. Similarly, the phrase "if determined" or "if detecting [the described condition or event]" may be construed as meaning "once determined" or "in response to determining" or "once detecting [the described condition or event]" or "in response to detecting [the described condition or event]" depending on the context.

[0038] It should be noted that unless otherwise specified, the technical terms or scientific terms used in this application should have the ordinary meaning understood by those skilled in the art to which the present invention belongs.

[0039] Please refer to Figure 1 A voltage rapid adjustment system for an SiC power semiconductor test device provided by an embodiment of the present invention includes an industrial control computer, a programmable high-voltage power supply, a large-capacity capacitor filtering module, an SiC test module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, an opto-isolation drive module, a power semiconductor switch module, and a charge storage module; wherein, the large-capacity capacitor filtering module is connected to the SiC test module to provide a test bus voltage;

[0040] The industrial control computer is configured to obtain test voltage parameters and send them externally; wherein, the test voltage parameters include multiple test steps, and corresponding test voltage values are associated with the corresponding test steps;

[0041] The programmable high-voltage power supply is respectively connected to the industrial control computer and the power semiconductor switch module, and is used for:

[0042] Output a corresponding high-voltage power supply according to the test voltage parameters;

[0043] Transmit the high-voltage power supply to the large-capacity capacitor filtering module through the power semiconductor switch module for charging;

[0044] The high-speed analog-to-digital conversion module is used to obtain sampling data;

[0045] The DSP digital signal processor module is respectively connected to the industrial control computer, the high-speed analog-to-digital conversion module, and the opto-isolation drive module, and is used for:

[0046] Control the opto-isolation drive module to output a corresponding drive signal according to the test voltage parameters and the sampling data;

[0047] The power semiconductor switch module is also respectively connected to the opto-isolation drive module, the large-capacity capacitor filtering module, and the charge storage module, and is used for:

[0048] Act based on the drive signal to control the charge transfer between the large-capacity capacitor filtering module and the charge storage module, so as to rapidly increase or decrease the test bus voltage to the corresponding test voltage value.

[0049] In this embodiment, referring to the appendix Figure 1 The opto-isolation drive module includes corresponding optocouplers OP1, OP2, and OP3; the power semiconductor switch module includes corresponding Q1 switch modules, Q2 switch modules, and Q3 switch modules; the above are only examples and are not limitations thereto.

[0050] In this embodiment, the DSP digital signal processor module is the DSP in the attached figure; the large-capacity capacitor filtering module has the same meaning as the large-capacity capacitor module in the attached figure; the industrial control computer is the industrial control PC in the attached figure.

[0051] The high-speed analog-to-digital conversion module includes at least two channels of voltage sampling, one for sampling the output of the programmable high-voltage power supply, and the other for sampling the input of the large-capacity capacitor filtering module.

[0052] Specifically, the high-speed analog-to-digital conversion module uses ADC sampling; referring to the attached Figure 1 , RP1 and RP2 form the output sampling of the programmable high-voltage power supply; RV1 and RV2 form the input sampling of the large-capacity capacitor filtering module.

[0053] Furthermore, to achieve a rapid rise or fall to the corresponding test voltage value, a power adjustment circuit is also connected between the large-capacity capacitor filtering module and the charge storage module.

[0054] Specifically, the power adjustment circuit includes a first diode D1, a second diode D2, a first inductor L1, and a second inductor L2;

[0055] The positive input terminal of the large-capacity capacitor filtering module is respectively connected to one end of the first inductor L1 and the cathode of the second diode D2. The other end of the first inductor L1 is respectively connected to the anode of the first diode D1 and a switching device (i.e., the Q2 switching module) in the power semiconductor switching module. The cathode of the first diode D1 is connected to the positive input terminal of the charge storage module;

[0056] The anode of the second diode D2 is respectively connected to another switching device (i.e., the Q3 switching module) in the power semiconductor switching module and one end of the second inductor L2. The other end of the second inductor L2 is also connected to the positive input terminal of the charge storage module.

[0057] During application, a current-limiting resistor is also connected between the DSP digital signal processor module and the opto-isolation drive module; for example, R1, R3, and R5. Similarly, corresponding resistors are also connected between the opto-isolation drive module and the power semiconductor switching module; for example, R2, R4, and R6.

[0058] The working principle of this system is as follows:

[0059] First, the voltage of the capacitive filter module at the original startup moment of the device is zero volts. When the device is turned on, the industrial control computer sends the SiC test voltage parameter requirements to the programmable high-voltage power supply and the DSP digital signal processor module. The high-voltage power supply starts to output power, and the DSP outputs a digital signal to drive the opto-isolated drive module, and then controls the power semiconductor Q1 switch module. The high-voltage power supply charges the large-capacity capacitive filter module through Q1 to provide the set bus voltage for SiC testing, and then the SiC module or chip is tested;

[0060] When the test requires the test bus voltage to be lowered by a certain amplitude, (since the capacitance value of the large-capacity capacitive filter module is relatively large, if the conventional method is to use a device with a conventional power switch connected to a power discharge resistor circuit to reduce the bus voltage, the power discharge resistor will convert electrical energy into heat and generate heat, resulting in large energy loss, and the entire voltage adjustment system will be affected by the heat of the power discharge resistor, affecting the stability of the voltage adjustment system, and the adjustment speed is also slow). At this time, the DSP turns off Q1, and the DSP sends out a PWM wave to drive OP2 through R3 and drive the Q2 switch through R4 to control L1, quickly transferring the electric charge on the large-capacity capacitive filter module to the charge storage module until the voltage on voltage sampling 1 reaches the set voltage value;

[0061] If the voltage of the SiC test module needs to be quickly increased, the industrial control PC adjusts the programmable power supply voltage to the set voltage value. The DSP turns on Q1 to charge the large-capacity capacitive filter module. The DSP sends out a PWM wave to drive OP3 through R5 and drive the Q3 switch through R6 to control L2, quickly transferring the electric charge on the charge storage module to the large-capacity capacitive filter module until the voltage on voltage sampling 1 reaches the set voltage value.

[0062] The above scheme has the following advantages:

[0063] 1. Fast adjustment: By adopting digital signal processing technology, it can achieve ultra-fast adjustment of the voltage on the large-capacity capacitive filter module, which is efficient, low-carbon and environmentally friendly;

[0064] 2. High precision: Through the feedback control strategy of digital signal processing and sampling, it can realize the monitoring of the voltage situation on the bus and achieve precise control of the voltage on the large-capacity capacitive filter module;

[0065] 3. High reliability: Compared with traditional mechanical switches or electronic switches, this system has no mechanical components and high-power discharge resistors, greatly reducing the energy waste during the voltage adjustment process of the large-capacity capacitive filter module, with low system temperature rise, reducing the failure rate and improving the reliability of the device;

[0066] In summary, the voltage rapid adjustment system is based on digital signal processing technology, which can achieve rapid adjustment of voltage, improve test efficiency and accuracy, and has high reliability. This technology has important application value in the testing equipment and evaluation of SiC (silicon carbide) power semiconductor devices.

[0067] Referring to Figure 2 , based on the same inventive concept, the embodiment of the present invention further provides a method for rapidly adjusting the voltage of an SiC power semiconductor test device, which is applied to a voltage rapid adjustment system of an SiC power semiconductor test device described in the first aspect. The system includes an industrial control computer, a programmable high-voltage power supply, a large-capacity capacitor filtering module, an SiC test module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, an optoelectronic isolation drive module, a power semiconductor switch module, and a charge storage module; wherein, the large-capacity capacitor filtering module is connected to the SiC test module to provide a test bus voltage; the method includes the following steps:

[0068] S101, obtaining test voltage parameters through the industrial control computer and sending them externally; wherein, the test voltage parameters include multiple test steps, and corresponding test voltage values are associated with the corresponding test steps;

[0069] S102, using the programmable high-voltage power supply to output a corresponding high-voltage power supply according to the test voltage parameters;

[0070] S103, transmitting the high-voltage power supply to the large-capacity capacitor filtering module through the power semiconductor switch module for charging;

[0071] S104, obtaining sampling data of the high-speed analog-to-digital conversion module;

[0072] S105, controlling the optoelectronic isolation drive module to output a corresponding drive signal according to the test voltage parameters and the sampling data;

[0073] S106, the power semiconductor switch module acts based on the drive signal to control the power transfer between the large-capacity capacitor filtering module and the charge storage module, so as to rapidly increase or decrease the test bus voltage to the corresponding test voltage value.

[0074] During implementation, the test voltage parameters are derived from the input of an input device or data transmission from an external client.

[0075] Further, if the voltage of the large-capacity capacitor filtering module at the original moment is zero volts, the industrial control computer issues to the programmable high-voltage power supply and the DSP digital signal processor module according to the voltage parameter requirements of SiC testing, and starts the output of the high-voltage power supply;

[0076] Meanwhile, the DSP outputs a digital signal to drive the opto-isolation drive module, and then controls the Q1 switch module in the power semiconductor. The high-voltage power supply charges the large-capacity capacitor filtering module through Q1 to provide the bus voltage for SiC testing.

[0077] It should be noted that for a more specific description of the working process of the method embodiment, please refer to the foregoing device embodiment section and will not be elaborated herein.

[0078] The entire solution is based on digital signal processing technology to achieve rapid voltage adjustment, improve test efficiency and accuracy; compared with traditional mechanical switches or electronic switches, it does not involve mechanical components and high-power discharge resistors, greatly reducing the energy waste of the large-capacity capacitor filtering module during voltage adjustment. While being low-carbon and environmentally friendly, it has a low temperature rise, reduces the failure rate, and improves the reliability of the application.

[0079] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A SiC power semiconductor test equipment voltage rapid adjustment system, characterized in that: It includes an industrial control computer, a programmable high-voltage power supply, a large-capacity capacitor filter module, a SiC test module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, a photoelectric isolation drive module, a power semiconductor switch module and a charge storage module; wherein the large-capacity capacitor filter module is connected to the SiC test module to provide a test bus voltage; The industrial control computer is used to obtain test voltage parameters and send them to the outside; wherein the test voltage parameters include a plurality of test steps, and corresponding test steps are associated with corresponding test voltage values; The program-controlled high-voltage power supply is connected to the industrial computer and the power semiconductor switch module respectively, and is used for: According to the test voltage parameters, output a corresponding high voltage power supply; The high voltage power supply is transmitted to the large-capacity capacitor filter module through the power semiconductor switch module for charging; The high-speed analog-to-digital conversion module is used to obtain sampled data; The DSP digital signal processor module is respectively connected to the industrial control computer, the high-speed analog-to-digital conversion module and the photoelectric isolation drive module, and is used for: Controlling the photoelectric isolation driving module to output a corresponding driving signal according to the test voltage parameter and the sampling data; The power semiconductor switch module is also connected to the photoelectric isolation drive module, the large-capacity capacitor filter module and the charge storage module respectively, for: Based on the driving signal, the module controls the transfer of electric quantity between the large-capacitance capacitor filter module and the charge storage module, so as to realize that the test bus voltage thereof rises or drops quickly to the corresponding test voltage value.

2. A SiC power semiconductor test equipment voltage rapid adjustment system as claimed in claim 1, characterized in that: The high-speed analog-to-digital conversion module includes at least two voltage sampling paths, one for output sampling of the programmable high-voltage power supply, and the other for input sampling of the large-capacity capacitor filter module.

3. A SiC power semiconductor test equipment voltage rapid adjustment system as claimed in claim 1, characterized in that: A power regulation circuit is also connected between the large-capacity capacitor filter module and the charge storage module.

4. A SiC power semiconductor test equipment voltage rapid adjustment system as claimed in claim 3, characterized in that: The power regulation circuit includes a first diode D1, a second diode D2, a first inductor L1 and a second inductor L2; The positive input terminal of the large-capacity capacitor filter module is respectively connected to one end of the first inductor L1 and the cathode of the second diode D2, the other end of the first inductor L1 is respectively connected to the anode of the first diode D1 and a switch device in the power semiconductor switch module, and the cathode of the first diode D1 is connected to the positive input terminal of the charge storage module; The anode of the second diode D2 is respectively connected to another switch device in the power semiconductor switch module and one end of the second inductor L2, and the other end of the second inductor L2 is also connected to the positive input end of the charge storage module.

5. A SiC power semiconductor test equipment voltage rapid adjustment system according to any one of claims 1 to 4, characterized in that: A current limiting resistor is also connected between the DSP digital signal processor module and the photoelectric isolation drive module.

6. A method for quickly adjusting the voltage of SiC power semiconductor testing equipment, characterized in that: A SiC power semiconductor test equipment voltage rapid adjustment system applied to claim 1, the system comprises an industrial computer, a programmable high voltage power supply, a large-capacity capacitor filter module, a SiC test module, a high-speed analog-to-digital conversion module, a DSP digital signal processor module, a photoelectric isolation drive module, a power semiconductor switch module and a charge storage module; wherein the large-capacity capacitor filter module is connected to the SiC test module to provide a test bus voltage; the method comprises the following steps: Acquire test voltage parameters through the industrial computer and send them to the outside; wherein the test voltage parameters include a plurality of test steps, and corresponding test steps are associated with corresponding test voltage values; Utilizing the programmable high-voltage power supply to output a corresponding high-voltage power supply according to the test voltage parameter; The high voltage power supply is transmitted to the large-capacity capacitor filter module through the power semiconductor switch module for charging; Acquiring sampling data of the high-speed analog-to-digital conversion module; Controlling the photoelectric isolation driving module to output a corresponding driving signal according to the test voltage parameter and the sampling data; The power semiconductor switch module operates based on the drive signal to control the power transfer between the large-capacitance capacitor filter module and the charge storage module, so as to achieve a rapid rise or fall of the test bus voltage to a corresponding test voltage value.

7. A method for quickly adjusting voltage of SiC power semiconductor testing equipment according to claim 6, characterized in that: If the voltage of the large-capacity capacitor filter module at the original time is zero volt, the industrial control computer sends the voltage parameter requirements of the SiC test to the programmable high-voltage power supply and the DSP digital signal processor module to start the high-voltage power supply output; At the same time, the DSP outputs a digital signal to drive the optoelectronic isolation drive module, and then controls the Q1 switch module in the power semiconductor. The high-voltage power supply charges the large-capacity capacitor filter module through Q1 to provide the bus voltage for SiC testing.

8. A method for quickly adjusting voltage of SiC power semiconductor testing equipment according to claim 7, characterized in that: The test voltage parameter is derived from an input of an input device or data transmission from an external client.

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