Cleaning device and glue uniformizing system

Abstract

The invention discloses a cleaning device and a glue uniformizing system. The cleaning device comprises a cleaning tank and a driving assembly, the cleaning tank is provided with a receding opening allowing the glue outlet pipe to be inserted therein, and the cleaning tank is used for containing a cleaning solvent. The driving assembly is in transmission connection with the cleaning tank so as to drive the cleaning tank to be close to the glue outlet pipe, and the glue outlet pipe can penetrate through the avoiding opening to stretch into the cleaning tank. According to the technical scheme, the phenomenon of glue condensation at the pipe opening of the glue outlet pipe can be delayed.

Description

Technical Field

[0001] The invention relates to the technical field of glue spreading, and in particular to a cleaning device and a glue spreading system. Background Art

[0002] Wafers are important materials for making integrated circuits. Various semiconductor devices can be made by photolithography, ion implantation and other methods. During production, a glue-splitting device is required to glue the wafers. The wafer rotates on a rotating device, and the glue-splitting device has a glue outlet pipe. The glue flows out of the glue outlet pipe and drips onto the rotating wafer to achieve the glue-splitting effect. However, the nozzle of the existing glue outlet pipe is in contact with the outside air, and glue condensation is likely to occur here. When the glue condenses, it is easy to affect the effect of another glue-splitting. Summary of the invention

[0003] The main purpose of the present invention is to provide a cleaning device, aiming to improve the problem that glue is easily coagulated at the pipe mouth of the glue outlet pipe in the traditional glue spreading device.

[0004] To achieve the above-mentioned purpose, the cleaning device proposed in the present invention includes a cleaning tank and a driving assembly; the cleaning tank has an avoidance opening for inserting a rubber outlet hose, and the cleaning tank is used to hold a cleaning solvent; the driving assembly is transmission-connected to the cleaning tank to drive the cleaning tank to approach the rubber outlet hose, and enable the rubber outlet hose to pass through the avoidance opening to extend into the cleaning tank.

[0005] In one embodiment, the cleaning device further comprises a liquid level sensor assembly, wherein the liquid level sensor assembly is installed in the cleaning tank to detect and control the liquid level in the cleaning tank.

[0006] In one embodiment, the liquid level sensor assembly comprises:

[0007] a lower limit liquid replenishment sensor, the lower limit liquid replenishment sensor being disposed in the cleaning tank and being arranged higher than the bottom wall of the cleaning tank; and

[0008] An upper limit stop liquid replenishment sensor is arranged in the cleaning tank and is arranged higher than the lower limit liquid replenishment sensor.

[0009] In one embodiment, the liquid level sensor assembly further comprises:

[0010] An upper limit alarm liquid level sensor is provided in the cleaning tank, and a liquid replenishment stop sensor is provided when the liquid level exceeds the upper limit; and

[0011] A lower limit alarm liquid level sensor is provided in the cleaning tank, and the lower limit alarm liquid level sensor is higher than the bottom wall of the cleaning tank and lower than the lower limit liquid replenishment sensor.

[0012] In one embodiment, the cleaning tank is further provided with an overflow port, and the overflow port is higher than the upper limit stop liquid replenishment sensor and lower than the upper limit alarm liquid level sensor.

[0013] In one embodiment, a plurality of liquid spraying ports are provided on the cleaning tank, and the liquid spraying ports are arranged close to the avoidance ports.

[0014] In one embodiment, the cleaning tank further comprises an air jet, and the air jet is arranged close to the liquid spraying port.

[0015] In one embodiment, the cleaning tank has a bottom wall, and the bottom wall of the cleaning tank is also provided with a liquid discharge port;

[0016] And / or, the cleaning tank has a top wall, and the cleaning tank is also provided with an exhaust port, and the exhaust port is close to the top wall or arranged on the top wall;

[0017] And / or, a movable cover is movably provided on the cleaning tank, and the movable cover is used to cover the avoidance opening.

[0018] The present invention further provides a glue spreading system, comprising a glue spreading device and the above-mentioned cleaning device, wherein the glue spreading device has a glue outlet pipe, and the glue outlet pipe is used to be inserted into the avoidance port.

[0019] In one embodiment, the glue spreading system further includes an inspection device, which is detachably mounted on the cleaning tank and is used to perform microscopic inspection on the nozzle of the glue outlet pipe.

[0020] The technical solution of the present invention is to set up a cleaning tank, and the cleaning solvent is contained in the cleaning tank, so that the cleaning tank has a high degree of wetness. By providing a avoidance port for the glue outlet pipe to be inserted in the cleaning tank, when the glue outlet pipe is inserted into the avoidance port, the glue at the mouth of the glue outlet pipe is in the cleaning tank with a high degree of wetness. In this high humidity environment, the glue at the mouth of the glue outlet pipe is not easy to condense, and then it is easy to clean the mouth of the glue outlet pipe, and there is no need to clean the mouth of the glue outlet pipe. In addition, by connecting the drive component to the cleaning tank by transmission, the drive component can drive the cleaning tank to approach the glue outlet pipe, so that the mouth of the glue outlet pipe is in a high humidity environment; or the drive component can drive the cleaning tank away from the glue outlet pipe, so as to facilitate the movement of the glue outlet pipe to the top of the wafer for glue spreading operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0022] Figure 1 It is a structural schematic diagram of an embodiment of a cleaning device of the present invention;

[0023] Figure 2 It is a schematic diagram of the structure of the cleaning device of the present invention after the movable cover plate is removed;

[0024] Figure 3 It is a schematic diagram of the state structure when the avoidance opening in the cleaning device of the present invention is close to and aligned with the pipe opening of the rubber outlet pipe;

[0025] Figure 4 It is a schematic diagram of the structure of the state when a rubber outlet hose is inserted into the avoidance opening of the cleaning device of the present invention;

[0026] Figure 5 for Figure 4 Sectional view at AA in the middle;

[0027] Figure 6 It is a structural schematic diagram of an embodiment of a glue-spinning system of the present invention.

[0028] Description of Figure Numbers:

[0029] Label name Label name 100 Cleaning tank 110 Avoidance 120 Overflow 130 drain port 140 Liquid spray port 150 Jet 160 Exhaust vent 101 bottom wall 102 Top wall 200 Liquid level sensor components 210 Lower limit fluid sensor 220 Upper limit stop fluid replenishment sensor 230 Upper limit alarm level sensor 240 Lower limit alarm level sensor 300 Active cover 400 Rubber hose 500 Check the equipment

[0030] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0033] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0034] In the manufacturing process of chips or AR optical waveguides, there is a process of performing glue coating on the wafer, that is, the wafer is placed on a rotating device so that the wafer rotates under the drive of the rotating device. The glue coating device has a glue discharge tube for discharging glue. When the wafer needs to be glued, the nozzle of the glue discharge tube is located directly above the wafer, so that the glue flowing out of the nozzle drips on the wafer. During the rotation of the wafer, the glue is evenly applied to the surface of the wafer under the action of centrifugal force. If there is condensed glue at the nozzle of the glue discharge tube before discharging the glue, when the condensed glue drips on the wafer, the quality of the wafer coating will be poor, thereby affecting the final quality of the product. Therefore, after the glue discharge tube completes the glue coating in sequence each time, it is necessary to manually wipe and clean the glue discharge tube before the next use, but it is difficult to achieve a better cleaning effect during cleaning. Or use a wafer again for glue coating test, and then formally enter the glue coating process after the test is qualified, but this will lead to a waste of wafers, glue, and manpower.

[0035] In order to improve the problem of glue coagulation at the outlet of the glue outlet pipe 400 , the present invention provides a cleaning device.

[0036] In the embodiments of the present invention, please refer to Figures 1 to 4 The cleaning device includes a cleaning tank 100 and a driving assembly; the cleaning tank 100 has an avoidance opening 110 for inserting a rubber outlet hose 400, and the cleaning tank 100 is used to hold a cleaning solvent; the driving assembly is transmission-connected to the cleaning tank 100 to drive the cleaning tank 100 to approach the rubber outlet hose 400, and enable the rubber outlet hose 400 to pass through the avoidance opening 110 to extend into the cleaning tank 100.

[0037] It should be noted that the cleaning device is a device used after the glue dispensing tube 400 dispenses glue and before dispensing glue again, that is, the cleaning device plays a role when the glue dispensing tube 400 does not dispense glue to the wafer. The cleaning tank 100 in the cleaning device is used to hold the cleaning solvent. Since the cleaning solvent is a liquid, it makes the cleaning tank 100 have a certain degree of wetness during the volatilization process. Therefore, when the nozzle of the glue dispensing tube 400 for dispensing glue is inserted into the cleaning tank 100, it will maintain a certain degree of wetness in the cleaning tank 100 with a certain degree of wetness, thereby delaying the condensation of glue at its nozzle. When the nozzle of the glue dispensing tube 400 is cleaned again, the nozzle of the glue dispensing tube 400 can be cleaned more cleanly.

[0038] The driving assembly is in transmission connection with the cleaning tank 100, and is used to drive the cleaning tank 100 to move in a direction close to the glue outlet pipe 400 or away from the glue outlet pipe 400. When the driving assembly drives the cleaning tank 100 to move in a direction close to the glue outlet pipe 400, the avoidance port 110 of the cleaning tank 100 also approaches the glue outlet pipe 400, until the glue outlet pipe 400 can be inserted into the avoidance port 110, so that the glue outlet pipe 400 is connected with the cleaning tank 100, so that the pipe mouth of the glue outlet pipe 400 is in an environment with a certain degree of humidity to delay the condensation of the glue. When the driving assembly drives the cleaning tank 100 to move in a direction away from the glue outlet pipe 400, the glue outlet pipe 400 is separated from the avoidance port 110 of the cleaning tank 100 until there is a certain distance between the glue outlet pipe 400 and the cleaning tank 100, so that the glue outlet pipe 400 can move to the center of the wafer for dispensing.

[0039] Specifically, the driving assembly may be a linear motor, a cylinder, or a screw-nut assembly, etc., as long as it can drive the cleaning tank 100 to move toward the direction approaching the glue outlet pipe 400 or move away from the glue outlet pipe 400.

[0040] The technical solution of the present invention is provided with a cleaning tank 100, and a cleaning solvent is contained in the cleaning tank 100, so that the cleaning tank 100 has a high degree of humidity. By providing a avoidance port 110 for inserting the glue outlet pipe 400 on the cleaning tank 100, when the glue outlet pipe 400 is inserted into the avoidance port 110, the glue at the pipe mouth of the glue outlet pipe 400 is in the cleaning tank 100 with a high degree of humidity. In the high humidity environment, the glue at the pipe mouth of the glue outlet pipe 400 is not easy to condense, and then it is easy to clean the pipe mouth of the glue outlet pipe 400, and even the pipe mouth of the glue outlet pipe 400 does not need to be cleaned. In addition, by connecting the driving component to the cleaning tank 100, the driving component can drive the cleaning tank 100 to be close to the glue outlet pipe 400, so that the mouth of the glue outlet pipe 400 is in a high humidity environment; or the driving component can drive the cleaning tank 100 away from the glue outlet pipe 400, so as to facilitate the movement of the glue outlet pipe 400 to the center of the wafer for glue spreading operation.

[0041] Further, please refer to Figures 1 to 4 The cleaning device also includes a liquid level sensor component 200, which is installed in the cleaning tank 100 to detect and control the liquid level in the cleaning tank 100.

[0042] By installing the liquid level sensor assembly 200 on the cleaning tank 100, the liquid level sensor assembly 200 can sense the liquid level in the cleaning tank 100 to remind the user to add cleaning solvent to the cleaning tank 100 or remind the user that there is too much cleaning solvent in the cleaning tank 100. It is understandable that when there is too little cleaning solvent in the cleaning tank 100, it is difficult to make the cleaning tank 100 have good wetness, and it is difficult to achieve the effect of delaying the condensation of glue at the nozzle of the glue outlet pipe 400. When there is too much cleaning solvent in the cleaning tank 100, the cleaning solvent in the cleaning tank 100 may flood the nozzle of the glue outlet pipe 400, thereby affecting the quality of the glue in the glue outlet pipe 400.

[0043] In one embodiment, please refer to Figures 1 to 4 The liquid level sensor assembly 200 includes a lower limit liquid replenishment sensor 210 and an upper limit stop liquid replenishment sensor 220. The lower limit liquid replenishment sensor 210 is arranged in the cleaning tank 100 and is higher than the bottom wall 101 of the cleaning tank 100; the upper limit stop liquid replenishment sensor 220 is arranged in the cleaning tank 100 and is higher than the lower limit liquid replenishment sensor 210.

[0044] The lower limit replenishment sensor 210 refers to a sensor for sending a replenishment signal. Specifically, when the cleaning solvent in the cleaning tank 100 reaches or is lower than the height of the lower limit replenishment sensor 210, the lower limit replenishment sensor 210 sends a signal that the cleaning solvent needs to be added to the cleaning tank 100. The signal can be transmitted to a liquid adding device or a reminder device, so that the cleaning solvent can be automatically added by the liquid adding device or manually added according to the reminder of the reminder device. In addition, by setting the lower limit replenishment sensor 210 higher than the bottom wall 101 of the cleaning tank 100, the drying state in the cleaning tank 100 can be avoided, or the situation where there is too little liquid in the cleaning tank 100 and it is impossible to increase the high wetness to delay the condensation of glue at the mouth of the glue outlet hose 400 can be reduced.

[0045] The upper limit stop liquid replenishment sensor 220 refers to a sensor for sending a stop liquid replenishment signal. Specifically, when the cleaning solvent in the cleaning tank 100 reaches or exceeds the height of the upper limit stop liquid replenishment sensor 220, the upper limit stop liquid replenishment sensor 220 sends a signal to stop replenishing the cleaning solvent into the cleaning tank 100. The signal can be transmitted to the liquid adding device to stop the liquid adding device from adding the cleaning solvent into the cleaning tank 100; or the signal can be transmitted to the reminder device so that the manual stop adding the cleaning solvent into the cleaning tank 100 according to the reminder of the reminder device. By setting the upper limit stop liquid replenishment sensor 220, and the upper limit stop liquid replenishment sensor 220 is set higher than the lower limit liquid replenishment sensor 210, the height of the cleaning solvent added into the cleaning tank 100 will not be too high, thereby reducing the risk of the nozzle of the rubber outlet hose 400 being immersed in the cleaning solvent.

[0046] Further, please refer to Figures 1 to 4 The liquid level sensor assembly 200 also includes an upper limit alarm liquid level sensor 230 and a lower limit alarm liquid level sensor 240; the upper limit alarm liquid level sensor 230 is arranged in the cleaning tank 100 and is higher than the upper limit stop liquid replenishment sensor 220; the lower limit alarm liquid level sensor 240 is arranged in the cleaning tank 100, and the lower limit alarm liquid level sensor 240 is higher than the bottom wall 101 of the cleaning tank 100 and is lower than the lower limit liquid replenishment sensor 210.

[0047] The height of the upper limit alarm liquid level sensor 230 is the maximum height that the liquid can reach. The upper limit alarm liquid level sensor 230 is arranged in the cleaning tank 100 and is higher than the upper limit stop liquid replenishment sensor 220. If the liquid level is higher than the height of the upper limit stop liquid replenishment sensor 220, if the liquid level reaches the upper limit alarm liquid level sensor 230, the sensor immediately transmits a signal of excessive liquid level to the alarm device, so that the alarm device issues an alarm prompt of excessive liquid level, and then the excess solution needs to be discharged from the cleaning tank 100 to avoid the risk of the cleaning solvent immersing the nozzle of the rubber outlet hose 400 due to excessive liquid level. When the excess solution is discharged to make the liquid level lower than the height of the upper limit alarm liquid level sensor 230, the upper limit alarm is eliminated, so that the normal working state can be restored.

[0048] Similarly, the height of the lower limit alarm liquid level sensor 240 is the lowest height allowed for the cleaning solvent. By arranging the lower limit alarm liquid level sensor 240 in the cleaning tank 100, and the lower limit alarm liquid level sensor 240 is higher than the bottom wall 101 of the cleaning tank 100 and lower than the lower limit liquid replenishment sensor 210, if the liquid level of the cleaning solvent is lower than the height of the lower limit alarm liquid level sensor 240, that is, when the lower limit alarm liquid level sensor 240 does not detect the cleaning solvent, the lower limit alarm liquid level sensor 240 immediately transmits a signal of too low liquid level to the alarm device, so that the alarm device issues an alarm prompt of too low liquid level, so as to prompt the user that the liquid level has reached a certain level and needs to continue to replenish the cleaning solvent in the cleaning tank 100, so that the alarm signal is eliminated only when the liquid level of the cleaning solvent is not lower than the height of the lower limit alarm sensor, thereby restoring the normal working state.

[0049] By providing the above-mentioned upper limit alarm liquid level sensor 230 and lower limit alarm liquid level sensor 240, the user is further prompted if the liquid level is too high or too low, thereby providing another reminder guarantee, thereby ensuring a high degree of wetness in the cleaning tank 100 while reducing the risk of the cleaning solvent flooding the outlet hose 400.

[0050] Further, please refer to Figures 1 to 4 The cleaning tank 100 is also provided with an overflow port 120. When the overflow port 120 is higher than the upper limit, a liquid replenishment stop sensor 220 is set, and when the overflow port 120 is lower than the upper limit, an alarm liquid level sensor 230 is set.

[0051] By setting an overflow port 120 at a position higher than the upper limit stop replenishment sensor 220, when the upper limit stop replenishment sensor 220 fails, excess cleaning solvent can still flow out from the overflow port 120, preventing the cleaning solvent level in the cleaning tank 100 from being too high and flooding the outlet hose 400.

[0052] In combination with the setting of the upper limit alarm liquid level sensor 230, the overflow port 120 can be set lower than the upper limit alarm liquid level sensor 230, so that the excess solvent can flow out from the overflow port 120 in most cases, reducing the alarm times of the upper limit alarm liquid level sensor 230 and improving work efficiency. By setting the upper limit alarm liquid level sensor 230, when the overflow port 120 is blocked and the liquid level continues to rise, the upper limit alarm sensor can transmit a signal of excessive liquid level to the user, so that the user can promptly inspect the drain port 130 and discharge the excess cleaning solvent in time. The cooperation between the upper limit alarm liquid level sensor 230 and the overflow port 120 can further improve work efficiency and ensure that the liquid level is within an appropriate range.

[0053] In one embodiment, please refer to Figures 1 to 4 The cleaning tank 100 is also provided with a plurality of liquid spraying ports 140 , and the liquid spraying ports 140 are arranged close to the avoidance port 110 .

[0054] When the liquid level in the cleaning tank 100 is too low and the amount of cleaning solvent is too small, the humidity in the cleaning tank 100 will not be too high, which may cause a part of the glue at the mouth of the glue outlet pipe 400 to condense. By further providing a plurality of liquid spraying ports 140 on the cleaning tank 100, and the liquid spraying ports 140 are arranged close to the avoidance port 110, the cleaning solution sprayed from the liquid spraying ports 140 can flush the condensed glue at the mouth of the glue outlet pipe 400, thereby achieving the effect of cleaning the mouth of the glue outlet pipe 400. In addition, by arranging the liquid spray port 140 close to the avoidance port 110, the liquid sprayed from the liquid spray port 140 can not only flush the pipe mouth of the glue outlet pipe 400, but also make the sprayed liquid fall into the cleaning tank 100, so as to increase the liquid level height of the cleaning solvent in the cleaning tank 100, so as to provide a higher wetness condition for the pipe mouth of the glue outlet pipe 400 next time, and delay the condensation of glue at the pipe mouth of the glue outlet pipe 400 next time.

[0055] Specifically, there may be one, two, three or more liquid spraying ports 140. When there are at least two liquid spraying ports 140, at least two liquid spraying ports 140 surround the avoidance port 110 and are arranged at intervals, so that all directions of the rubber outlet pipe 400 can be cleaned, thereby improving the cleaning effect.

[0056] Further, please refer to Figures 1 to 5 The cleaning tank 100 further includes an air jet 150 , which is disposed close to the liquid spraying port 140 .

[0057] It is understandable that after the cleaning solvent is sprayed to the mouth of the rubber outlet pipe 400 through the liquid spray port 140, the cleaning solvent will remain at the mouth of the rubber outlet pipe 400. By arranging the air jet port 150 near the liquid spray port 140, the air jet port 150 can be opened to blow the mouth of the rubber outlet pipe 400 dry after the mouth of the rubber outlet pipe 400 is flushed, thereby drying the cleaning solvent remaining on the rubber outlet pipe 400.

[0058] There can be one, two, three or more air jets 150. When there are at least two air jets 150, at least two air jets 150 surround the avoidance opening 110 and are arranged at intervals, so that air can be sprayed in all directions of the rubber outlet pipe 400, thereby improving the effect of air drying.

[0059] In addition, when the liquid spray port 140 and the air jet port 150 are both arranged around the avoidance port 110, the liquid spray port 140 and the air jet port 150 can together form a circular array arrangement, and the liquid spray port 140 and the air jet port 150 are arranged at staggered intervals, so that the liquid spray port 140 and the air jet port 150 are distributed more evenly.

[0060] Of course, in other embodiments, the air jet 150 may also be disposed around the liquid jet 140 .

[0061] In one embodiment, please refer to Figures 1 to 4 The bottom wall 101 of the cleaning tank 100 is also provided with a drain port 130 .

[0062] By providing the drain port 130 on the bottom wall 101 of the cleaning tank 100 , when the cleaning solvent in the cleaning tank 100 is replaced, the drain port 130 can be opened to allow the cleaning solvent to quickly flow out of the cleaning tank 100 .

[0063] In one embodiment, please refer to Figures 1 to 4 The cleaning tank 100 has a top wall 102 . The cleaning tank 100 is also provided with an exhaust port 160 . The exhaust port 160 is close to the top wall 102 or is provided on the top wall 102 .

[0064] By providing the exhaust port 160 , it is convenient to remove a portion of the volatile gas in the cleaning solvent.

[0065] Furthermore, if Figure 1 As shown, a movable cover plate 300 is further provided on the cleaning tank 100 , and the movable cover plate 300 is used to cover the avoidance opening 110 .

[0066] The movable cover 300 is used to cover the avoidance opening 110 , so that when the cleaning tank 100 is not needed, the avoidance opening 110 can be covered by the movable cover 300 to reduce the risk of excessive volatilization of the cleaning solvent in the cleaning tank 100 resulting in too little cleaning solvent in the cleaning tank 100 .

[0067] The movable cover 300 is movably arranged on the cleaning tank 100, and the movable cover 300 can be driven to move so that the movable cover 300 has a state of covering the avoidance opening 110 and a state of opening the avoidance opening 110. When the movable cover 300 is driven to move, it can be driven manually or by setting a driving device. For example, it can be driven by a motor or a cylinder. In addition, by movably arranging the movable cover 300 on the cleaning tank 100, after the rubber outlet pipe 400 is inserted into the avoidance opening 110, the gap between the rubber outlet pipe 400 and the inner wall of the avoidance opening 110 can be covered by the movable cover 300, thereby reducing the phenomenon of volatilization of the cleaning solvent. Specifically, the movable cover 300 can be slidably arranged on the cleaning tank 100, and can also be rotatably arranged on the cleaning tank 100.

[0068] The present invention also proposes a glue-splitting system, please refer to Figures 1 to 6 The glue-splitting system includes a glue-splitting device and a cleaning device. The specific structure of the cleaning device refers to the above embodiment. Since the glue-splitting system adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here. Among them, the glue-splitting device has a glue outlet pipe 400, which is used to be inserted into the avoidance port 110.

[0069] When the glue outlet pipe 400 is inserted into the avoidance port 110, the glue at the pipe mouth of the glue outlet pipe 400 is in the cleaning tank 100 with high humidity. In this high humidity environment, the glue at the pipe mouth of the glue outlet pipe 400 is not easy to condense, and then it is easy to clean the pipe mouth of the glue outlet pipe 400, and there is even no need to clean the pipe mouth of the glue outlet pipe 400.

[0070] Furthermore, if Figure 6 As shown, the glue spreading system further includes an inspection device 500 , which can be detachably installed at the avoidance opening 110 to perform microscopic inspection on the pipe opening of the glue outlet pipe 400 .

[0071] The inspection device 500 may be a micro microscope, a magnifying glass or other equipment that can observe the cleanliness of the outlet of the glue pipe 400 which cannot be inspected by human eyes. By detachably installing the inspection device 500 at the avoidance opening 110, the inspection device 500 can detect the outlet of the glue pipe 400, thereby visualizing the cleaning effect of the outlet of the glue pipe 400, and no longer wasting wafers and glue materials for pre-testing, thereby saving manpower, materials, etc.

[0072] When the cleaning device of the present invention is used to wet or clean the nozzle of the rubber outlet hose 400, the following steps may be included:

[0073] First, a cleaning solvent is injected into the cleaning tank 100 to ensure that the cleaning tank 100 has a certain humidity;

[0074] Next, the driving assembly drives the cleaning tank 100 to rise or drives the rubber outlet hose 400 to move to the top of the cleaning tank 100, so that the rubber outlet hose 400 is arranged opposite to the avoidance opening 110;

[0075] Finally, the rubber outlet hose 400 is inserted into the escape opening 110 .

[0076] By injecting cleaning solvent into the cleaning tank 100, a certain humidity is created in the cleaning tank 100. Therefore, when the glue outlet hose 400 is inserted into the avoidance port 110, the outlet of the glue outlet hose 400 is placed in a relatively high humidity environment, thereby reducing the risk of glue condensation at the outlet of the glue outlet hose 400.

[0077] Further, based on the solution that the cleaning tank 100 has the above-mentioned liquid level sensor assembly 200, before the step of injecting a cleaning solvent into the cleaning tank 100 to ensure that the cleaning tank 100 has a certain humidity, the following steps are also included:

[0078] Open the liquid level sensing assembly 200.

[0079] By opening the liquid level sensor assembly 200 before injecting the cleaning solvent into the cleaning tank 100, the user can get a prompt from the liquid level sensor assembly 200 when injecting the cleaning solvent into the cleaning tank 100, so as to avoid injecting too much or too little cleaning solvent, thereby ensuring that the cleaning tank 100 has a certain degree of wetness and reducing the risk of the cleaning solvent immersing the rubber hose 400.

[0080] Furthermore, based on the solution that the cleaning tank 100 has the overflow port 120 and the exhaust port 160, before the step of injecting the cleaning solvent into the cleaning tank 100 to ensure that the cleaning tank 100 has a certain humidity, the following steps are further included:

[0081] The overflow port 120 and the exhaust port 160 are opened.

[0082] By opening the overflow port 120 , when the user injects cleaning solvent into the cleaning tank 100 , if the liquid level is too high, the excess cleaning solvent will be discharged from the overflow port 120 , thereby reducing the risk of the cleaning solvent liquid level being too high.

[0083] Further, based on the solution that the cleaning tank 100 has the above-mentioned drain port 130, before the step of injecting the cleaning solvent into the cleaning tank 100 to ensure that the cleaning tank 100 has a certain humidity, the following steps are further included:

[0084] The drain port 130 is closed.

[0085] By closing the drain port 130 , when the user injects the cleaning solvent into the cleaning tank 100 , there is no risk of the cleaning solvent being injected into the cleaning tank 100 and discharged from the drain port 130 .

[0086] Furthermore, based on the solution that the cleaning device also includes the above-mentioned movable cover plate 300, before the step of inserting the rubber outlet hose 400 into the avoidance opening 110, it also includes:

[0087] The movable cover plate 300 is moved away from the escape opening 110 to open the escape opening 110 .

[0088] Such a configuration makes it easier for the rubber outlet hose 400 to be inserted into the avoidance opening 110 , thereby avoiding the risk of the movable cover plate 300 interfering with the insertion of the rubber outlet hose 400 into the avoidance opening 110 .

[0089] Further, based on the solution that the cleaning device further includes the liquid spray port 140 and the air spray port 150, after the step of inserting the rubber outlet hose 400 into the avoidance port 110, the following steps are further included:

[0090] Open the liquid spray port 140 to flush the nozzle of the rubber outlet pipe 400;

[0091] The air jet 150 is opened to blow off the cleaning solvent remaining on the rubber outlet pipe 400 .

[0092] By opening the liquid spray port 140 after inserting the glue outlet pipe 400 into the avoidance port 110, the cleaning solvent sprayed from the liquid spray port 140 can also flush the pipe opening of the glue outlet pipe 400, thereby improving the cleanliness of the glue outlet pipe 400. It should be noted that when the glue outlet pipe 400 is in an environment with a high humidity, the phenomenon of glue condensation at its pipe opening is weakened or even eliminated, so the cleaning quality can be improved by opening the liquid spray port 140 to flush the pipe opening of the glue outlet pipe 400.

[0093] After cleaning for several times or for a certain period of time, the liquid spray port 140 is closed and the air jet port 150 is opened. It is understandable that after flushing, a portion of the cleaning solvent will remain on the glue outlet pipe 400. By opening the air jet port 150 to blow and dry the glue outlet pipe 400, the residual cleaning solvent can be blown dry to prevent the cleaning solvent from affecting the glue at the outlet of the glue outlet pipe 400 in the glue dispensing system.

[0094] Furthermore, after the step of opening the air jet 150 to dry the residual cleaning solvent on the rubber outlet pipe 400, the following steps are further included:

[0095] The driving assembly drives the cleaning tank 100 to descend, and a distance is provided between the rubber hose 400 and the top wall 102 of the cleaning tank 100;

[0096] The inspection device 500 is placed on the top wall 102 of the cleaning tank 100 and is arranged corresponding to the avoidance opening 110 .

[0097] The cleaning tank 100 is driven to descend by the driving assembly, so that the rubber pipe 400 is pulled out from the avoidance port 110. In the process of descending with the cleaning tank 100, the distance between the rubber pipe 400 and the top wall 102 of the cleaning tank 100 gradually becomes larger and larger. By providing a distance between the rubber pipe 400 and the top wall 102 of the cleaning tank 100, it is convenient to provide an avoidance space for the placement of the microscope. By placing the microscope on the top wall 102 of the cleaning tank 100 and corresponding to the avoidance port 110, the microscope is also facing the nozzle of the rubber pipe 400, so that it is convenient to directly observe the surface cleaning condition at the nozzle of the rubber pipe 400 through the microscope, so as to determine whether it needs to be cleaned again. When it is necessary to clean again, the microscope is removed, and the driving assembly is executed again to drive the cleaning tank 100 to rise or drive the rubber pipe 400 to move to the top of the cleaning tank 100, so that the rubber pipe 400 and the avoidance port 110 are arranged relative to each other. When cleaning is not required, the driving assembly will no longer drive the cleaning tank 100 to rise. By placing the microscope on the top wall 102 of the cleaning tank 100, the cleaning condition of the nozzle of the glue outlet pipe 400 can be visualized, thereby further improving the detection effect and reducing the need to re-set the wafer for glue spreading test, thereby greatly saving manpower and materials and improving production capacity.

[0098] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A cleaning device, It is characterized in that include: A cleaning tank, the cleaning tank having an escape opening for inserting a rubber hose, and the cleaning tank is used to contain a cleaning solvent; and A driving assembly is connected to the cleaning tank in a transmission manner to drive the cleaning tank to approach the rubber outlet pipe and enable the rubber outlet pipe to pass through the avoidance opening to extend into the cleaning tank.

2. The cleaning device according to claim 1, It is characterized in that The cleaning device also includes a liquid level sensor component, which is installed in the cleaning tank to detect and control the liquid level in the cleaning tank.

3. The cleaning device according to claim 2, It is characterized in that The liquid level sensor assembly comprises: a lower limit liquid replenishment sensor, the lower limit liquid replenishment sensor being disposed in the cleaning tank and being arranged higher than the bottom wall of the cleaning tank; and An upper limit stop liquid replenishment sensor is arranged in the cleaning tank and is arranged higher than the lower limit liquid replenishment sensor.

4. The cleaning device according to claim 3, It is characterized in that The liquid level sensor assembly also includes: An upper limit alarm liquid level sensor is provided in the cleaning tank, and a liquid replenishment stop sensor is provided when the liquid level exceeds the upper limit; and A lower limit alarm liquid level sensor is provided in the cleaning tank, and the lower limit alarm liquid level sensor is higher than the bottom wall of the cleaning tank and lower than the lower limit liquid replenishment sensor.

5. The cleaning device according to claim 4, It is characterized in that The cleaning tank is also provided with an overflow port, and when the overflow port is higher than the upper limit, a liquid replenishment stop sensor is set, and when the overflow port is lower than the upper limit, an alarm liquid level sensor is set.

6. The cleaning device according to claim 1, It is characterized in that The cleaning tank is also provided with a plurality of liquid spraying ports, and the liquid spraying ports are arranged close to the avoidance ports.

7. The cleaning device according to claim 6, It is characterized in that The cleaning tank also includes an air jet port, and the air jet port is arranged close to the liquid spray port.

8. The cleaning device according to any one of claims 1 to 7, It is characterized in that The cleaning tank has a bottom wall, and the bottom wall of the cleaning tank is also provided with a liquid discharge port; And / or, the cleaning tank has a top wall, and the cleaning tank is also provided with an exhaust port, and the exhaust port is close to the top wall or arranged on the top wall; And / or, the cleaning tank is also provided with a movable cover plate, and the movable cover plate is used to cover the avoidance opening.

9. A coating system, It is characterized in that It comprises a glue spreading device and a cleaning device as claimed in any one of claims 1 to 8, wherein the glue spreading device has a glue outlet pipe, and the glue outlet pipe is used to be inserted into the avoidance port.

10. The coating system according to claim 9, It is characterized in that The glue spreading system also includes an inspection device, which is detachably mounted on the cleaning tank and is used to perform microscopic inspection on the nozzle of the glue outlet pipe.

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