Unified latch for wafer cassette

Abstract

In a wafer container, a latch mechanism is provided to secure a wafer cassette within the container. The latch mechanism is driven by contact between inner surfaces of domes of a wafer cassette to contact the wafer cassette at a horizontal bar disposed in the wafer cassette. The latch mechanism includes a dome contact element configured to contact the inner surface of the dome. The latch mechanism is further configured to retract and not overlap with the horizontal bar when not in contact with the dome. The latch mechanism is incorporated into or attached to a door.

Description

Technical Field

[0001] The present disclosure relates to a latch for fixing a cassette within a wafer container, particularly by contacting the cassette at a horizontal bar. Background Art

[0002] Wafers (such as semiconductor wafers) can be stored in cassettes. The cassette is placed into a container that includes a dome and a door. To reduce or prevent movement, cassette clamping features can be provided on the dome or one or more cassette clamping components can be installed between the dome and the cassette. The internal features of the dome and the features on the cassette that can be engaged by a clamping device are not standardized and can vary significantly between manufacturers, product lines, product generations, and the like. Summary of the Invention

[0003] The present disclosure relates to a latch for fixing a cassette within a wafer container, particularly by contacting the cassette at a horizontal bar.

[0004] By fixing the cassette by contacting a standard feature (such as the horizontal bar of the wafer cassette), the latch mechanism can provide a more widely applicable solution that is less affected by product-specific design variations. Additionally, according to an embodiment, the latch mechanism automatically extends when the dome and the door are engaged and retracts when the dome is removed. This facilitates the use of a wafer container having an automated latch mechanism that does not require handling or consideration of potentially different cassette clamping structures. The latch mechanism further has a profile that does not interfere with the storage of wafers within the cassette. By attaching the latch mechanism to the door of the wafer container, the latch mechanism can further be incorporated into an existing wafer container.

[0005] In an embodiment, a wafer container includes a dome defining a space configured to receive a wafer cassette, the dome including an inner surface and a door opening. The wafer container further includes a door configured to be received in the door opening, the door including a latch mechanism. The latch mechanism includes a dome contact and a cassette contact, and the latch mechanism is configured such that when the inner surface of the dome contacts the dome contact, the cassette contact is driven to contact the wafer cassette, and when the inner surface of the dome does not contact the dome contact, the latch does not overlap with the wafer cassette.

[0006] In an embodiment, the dome contact is a roller element. In an embodiment, the roller element includes a core made of a first material and an outer portion made of a second material that is relatively softer than the first material.

[0007] In an embodiment, the cassette contact is configured to contact the wafer cassette at a horizontal bar included in the wafer cassette.

[0008] In an embodiment, the latch mechanism includes: a base; a latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cassette contact is disposed at a second end of the latch arm; and a plurality of linkages, each linkage rotatably connected to each of the base and the latch arm. In an embodiment, the base is engaged to the door. In an embodiment, the wafer container further includes a biasing spring configured to contact the latch arm.

[0009] In an embodiment, the latch mechanism includes: a base including a channel configured to receive the dome contact; a latch arm including the cassette contact; and a linkage rotatably connected to each of the base and the latch arm. The base includes a pin configured to interface with the latch arm. In an embodiment, the latch mechanism further includes a guide roller disposed in the channel.

[0010] In an embodiment, the latch mechanism includes: a base defining a channel; a latch arm including the cassette contact; a linkage, wherein the dome contact is attached to the linkage and the linkage is rotatably connected to each of the base and the latch arm; and a guide roller attached to the latch arm, the guide roller configured to travel within the channel.

[0011] In an embodiment, the latch mechanism includes: a base; a drive arm, wherein the dome contact is attached to the drive arm; and a latch arm rotatably connected to the base. The latch arm includes the cassette contact. The drive arm and the latch arm are engaged by a cam structure including a protrusion and a groove and configured to drive rotation of the latch arm between an unlatched position and a latched position.

[0012] In an embodiment, a method of fixing a wafer cassette within a container includes driving the latch mechanism by contact between a dome contact of the latch mechanism and an inner surface of a dome such that the cassette contact is brought into contact with the wafer cassette.

[0013] In an embodiment, the method further includes retracting the cassette contact such that when the dome is removed from contact with the dome contact, the cassette contact does not overlap the wafer cassette.

[0014] In an embodiment, the latch mechanism is included in a door of the container.

[0015] In an embodiment, the cassette contact contacts the wafer cassette at a horizontal bar included in the wafer cassette.

[0016] In an embodiment, the latch mechanism includes: a base; a latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cartridge contact is disposed at a second end of the latch arm; and a plurality of linkages. Each linkage is rotatably connected to each of the base and the latch arm.

[0017] In an embodiment, the latch mechanism includes: a base including a channel configured to receive the dome contact; a latch arm including the cartridge contact; and a linkage. The linkage is rotatably connected to each of the base and the latch arm. The base includes a pin configured to interface with the latch arm. In an embodiment, the latch mechanism further includes a guide roller disposed in the channel.

[0018] In an embodiment, the latch mechanism includes: a base defining a channel; a latch arm including the cartridge contact; a linkage; and a guide roller. The dome contact is attached to the linkage and the linkage is rotatably connected to each of the base and the latch arm. The guide roller is attached to the latch arm and is configured to travel within the channel.

[0019] In an embodiment, the latch mechanism includes: a base; a drive arm, wherein the dome contact is attached to the drive arm; and a latch arm rotatably connected to the base. The latch arm includes the cartridge contact. The drive arm and the latch arm are engaged by a cam structure including a protrusion and a groove. The cam is configured to drive rotation of the latch arm between an unlatched position and a latched position. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Shows a wafer container according to an embodiment.

[0021] Figure 2A Shows a cross-sectional view of the wafer container when the latch mechanism according to an embodiment is in an unlatched position.

[0022] Figure 2B Shows when the latch mechanism according to an embodiment is in a latched position Figure 2A of the wafer container.

[0023] Figure 3A Shows a cross-sectional view of the wafer container when the latch mechanism according to an embodiment is in an unlatched position.

[0024] Figure 3B Shows when the latch mechanism according to an embodiment is in a latched position Figure 3A of the wafer container.

[0025] Figure 4AShows a cross-sectional view of a wafer container when the latch mechanism according to an embodiment is in the unlatched position.

[0026] Figure 4B Shows when the latch mechanism according to an embodiment is in the latched position Figure 4A of a cross-sectional view of a wafer container.

[0027] Figure 5A Shows a cross-sectional view of a wafer container when the latch mechanism according to an embodiment is in the unlatched position.

[0028] Figure 5B Shows when the latch mechanism according to an embodiment is in the latched position Figure 5A of a cross-sectional view of a wafer container.

[0029] Figure 6A Shows a cross-sectional view of a wafer container when the latch mechanism according to an embodiment is in the unlatched position.

[0030] Figure 6B Shows when the latch mechanism according to an embodiment is in the latched position Figure 6A of a cross-sectional view of a wafer container.

[0031] Figure 7 Shows an exploded view of the latch mechanism according to an embodiment. Detailed Description

[0032] The present disclosure relates to a latch for fixing a cassette to a wafer container, particularly by contacting the cassette at a horizontal bar.

[0033] Figure 1 Shows a wafer container according to an embodiment. The wafer container 100 includes a dome 102, a door 104, and a wafer cassette 106.

[0034] The dome 102 is configured to define an internal space capable of accommodating the wafer cassette 106. The dome 102 has a door opening 108 configured to receive the door 104 such that the door 104 encloses the internal space of the dome 102.

[0035] The door 104 is configured to be placed into the door opening 108. The door 104 includes a latching mechanism 110. The latching mechanism 110 is configured such that when the door 104 and the dome 102 are combined, the inner surface of the dome 102 contacts a portion of the latching mechanism 110, thereby driving the latching mechanism 110 from its unlatched state where it does not contact or overlap with the cassette 106 to its latched state where it contacts the cassette 106 to fix the position of the cassette within the wafer container 100. The latching mechanism 110 can contact the cassette 106 at any suitable location such that the cassette 106 can be fixed at least in part by this contact. The latching mechanism 110 can contact the cassette 106 at any standard feature of the cassette 106, such as a flange, tab, protrusion, or the like included in the cassette 106. In an embodiment, the latching mechanism 110 can contact the cassette at a horizontal bar 114 included in the cassette 106. The door 104 can further include one or more alignment features 112 configured to contact the cassette 106 when the wafer container 100 is assembled.

[0036] The cassette 106 is configured to store one or more wafers. The cassette 106 can include one or more wafer slots 112. The horizontal bar 114 can extend across the cassette 106 (e.g., at its bottom).

[0037] In use, the cassette 106 can be placed onto the door 104. The placement of the cassette 106 can be guided by one or more alignment features 112 on the door 104. The dome 102 can then be placed onto the door 104 and the cassette 106 such that when the door 104 is received within the door opening 108, the cassette 106 is within the inner space of the dome 102. When the dome 102 and the door 104 are combined, the inner surface of the dome 102 contacts the latching mechanism 110. The contact between the dome 102 and the latching mechanism 110 drives the latching mechanism 110 to bring the contact surface into contact with the cassette 106 to fix the cassette 106. In an embodiment, the contact surface can contact the horizontal bar 114 of the cassette 106. When the pod dome 102 is separated from the pod door 104, the inner surface of the pod dome 102 no longer contacts the latching mechanism 110. When the pod dome 102 no longer contacts the latching mechanism 110, the latching mechanism 110 can be configured to return to the unlatched position.

[0038] Figure 2A A cross-sectional view of a wafer container is shown with the latching mechanism in an unlatched position according to an embodiment. The wafer container 200 includes a dome 202 having an inner surface 204 and a door 206 including a latching mechanism 208. The wafer container 200 further includes a cassette 210 placed onto the door 206, the cassette 210 having a horizontal bar 212. In Figure 2AIn the view shown, the dome 202 is separated from the door 206 and the latching mechanism 208 is in its unlatched position where it does not overlap the horizontal bar 212.

[0039] The latching mechanism 208 includes a latch arm 214. The latch arm 214 includes a first end 216 where a contact surface 218 is disposed. The latch arm 214 further includes a second end 220 where a dome contact holder 222 is disposed. A plurality of latch arm link connectors 224 are provided on the latch arm 214. A dome contact element 226 is held in the dome contact holder 222. The latching mechanism further includes a base 228. The base 228 includes a base link connector 230. A biasing spring 232 is provided on the base 228. A plurality of links 234 are provided, each link 234 being connected to the latch arm link connector 224 and the base link connector 230.

[0040] The latch arm 214 is configured to be movable between an unlatched position that allows the cassette 210 to be easily positioned on or removed from the door 206 and a latched position where the latch arm 214 secures the cassette 210 by contacting the horizontal bar 212 of the cassette 210. The latch arm 214 has a first end 216 that includes the contact surface 218. The contact surface 218 may be integrally formed with the latch arm 214 or be an additional element attached to the first end 216 of the latch arm 214. The contact surface 218 is configured to contact the horizontal bar 212 to secure the cassette 210. The contact surface 218 may be configured to contact the cassette 210 at any suitable location (one non-limiting example being the horizontal bar 212) such that the cassette 210 can be secured. The latch arm 214 further includes a second end 220 opposite the first end 216. The dome contact holder 222 is disposed at the second end 222. The dome contact holder 222 may include, for example, an opening, recess, groove, or the like configured to receive a protrusion (such as the shaft of the dome contact element 226) of the dome contact element 226.

[0041] The arm link connectors 224 are provided along the length of the latch arm 214 to allow the latch arm 214 to be connected to each of the plurality of links 234. The arm link connector can be any suitable feature that allows a rotatable connection. In Figure 2A and 2B the non-limiting example shown, the arm link connector 224 includes an opening in the latch arm 214 and a cylindrical extension across the opening. The cylindrical extension is sized such that a clamp disposed at the end of the link 234 can engage the cylindrical extension, thus providing a rotatable connection between the link 234 and the latch arm 214 at the arm link connector 224.

[0042] The dome contact element 226 is an element configured to contact the inner surface 204 of the dome 202. The dome contact element 226 can be any suitable contact element, such as an element including a cam surface or a fixed curved surface, a roller, or the like. The dome contact element 226 can be, for example, a roller. In an embodiment, the dome contact element 226 includes at least one rounded surface, for example, is circular, oval, or any other shape including a rounded surface. In an embodiment, the dome contact element 226 is in a circular shape. In an embodiment, the dome contact element 226 is a single piece. In an embodiment, the dome contact element 226 includes at least two different materials, for example, a core including a relatively harder and / or more rigid core material and a contact surface made of a relatively softer and / or more flexible contact surface material. In an embodiment, the contact surface can be overmolded onto the core. In an embodiment, the contact surface material can be selected from elastomers such as thermoplastic elastomers, silicones, or the like. The dome contact element 226 can be configured to be received in or held by the dome contact holder 222, for example, having an outward protrusion forming an axis that allows the dome contact element 226 to be held in the dome contact holder 222 and allows the dome contact element 226 to rotate when held. In an embodiment, the dome contact element 226 is integrally formed with the latch arm 214.

[0043] The base 228 is configured to attach the latch mechanism 208 to the door 206. The base 228 can be attached to the door 206, integrally formed with the door 206, or include some portions attached to the door 206 and other portions integrally formed with the door 206. The base 228 can be sized such that the maximum height of the latch mechanism 228 above the surface of the door 206 on which the base 228 is placed is such that the latch mechanism 208 will not interfere with a wafer placed in the cassette 210. In an embodiment, the base 228 is sized such that the height of the latch mechanism is equal to or less than 0.8 inches (about 2 cm).

[0044] The base link connector 230 is disposed on the base 228. The base link connector can be a cylindrical rod extending across an open space disposed in the base 228. The cylindrical rod can be sized such that a clamp disposed on the link 234 can engage the cylindrical rod to attach an end of the link 234 to one of the base link connectors 230. The attachment of the link 234 to the corresponding base link connector 230 can enable the link 234 to rotate, for example, in response to a force on the latch arm 214 to which the link 234 is also connected.

[0045] The biasing spring 232 is disposed on the base 228. The biasing spring 232 can be any suitable spring for applying a force to the latch arm 214, such as a leaf spring, a leaf spring, a helical spring, or the like. The biasing spring 232 can be a separate element attached to the base 228 or integrally formed with the base 228. The biasing spring is configured to contact the latch arm 214. The biasing spring is configured to drive the latch arm 214 to an unlatched state in which the latch arm 214 does not overlap with the horizontal bar 212. In Figure 2A In the embodiment shown, the force applied by the biasing spring 232 drives the latch arm 214 upward. The upward movement of the latch arm 214 is converted into an outward movement of the latch arm 214 into the unlatched state through the fixed length of the link 234 and the rotating portion of the link 234.

[0046] The link 234 engages the latch arm 232 to the base 228. The link 234 can rotate at each of its connections to the latch arm 232 and the base 228. In an embodiment, each of the links 234 includes a first clamp attached to one of the arm link connectors 224 at a first end and a second clamp attached to one of the base link connectors 230 at the opposite end of the link 234. Each of the links 234 has a fixed length. The fixed length of the link 234 and the rotatable connectors control the movement of the latch arm 214 relative to the base 228 such that the latch arm 214 can move between a latched position and an unlatched position.

[0047] Figure 2B A cross-sectional view of a wafer container when the latch mechanism is in the latched position according to an embodiment is shown. In Figure 2A In the latched position shown in Figure 2B the inner surface 204 of the dome 202 contacts the dome contact element 226. The contact between the inner surface 204 and the dome contact element 226 drives the dome contact element 226 inward. The connection of the dome contact element 226 to the latch arm 214 causes the latch arm 214 to also be driven inward. The inward movement of the latch arm 214 causes the link 234 to rotate, pulling the latch arm 214 downward as the latch arm 214 moves inward. The force overcomes the force provided by the biasing spring 232, thus bringing the contact surface 218 above the horizontal bar 212 of the wafer cassette 210 and downward onto the horizontal bar 212 of the wafer cassette 210. Thus, the contact surface 218 fixes the position of the wafer cassette 210 on the door 206. When the dome 202 is removed from the door 206, the biasing spring drives the latch arm 214 downward, causing a rotational movement defined by the link 234 such that the latch arm 214 returns to its unlatched position where it does not overlap with the horizontal bar 212 and the wafer cassette 210 can be removed from the door 206 without interference from the latch mechanism 208.

[0048] Figure 3AA cross-sectional view of a wafer container when the latch mechanism according to an embodiment is in the unlatched position is shown. The wafer container 300 includes a dome 302 having an inner surface 304 and a door 306 including a latch mechanism 308. The wafer container 300 further includes a cassette 310 placed on the door 306, and the cassette 310 has a horizontal bar 312. In Figure 3A In the view shown, the dome 302 is separated from the door 306 and the latch mechanism 308 is in its unlatched position where it does not overlap with the horizontal bar 312.

[0049] The latch mechanism 308 includes a latch arm 314. The latch arm 314 includes a first end 316 where a contact surface 318 is disposed. The latch arm 314 further includes a second end 320 where a dome contact retainer 322 is disposed. A plurality of latch arm link connectors 324 are provided on the latch arm 314. A dome contact element 326 is held in the dome contact retainer 322. The latch mechanism further includes a base 328. The base 328 includes a base link connector 330. A biasing spring 332 is provided on the base 328. A plurality of links 334 are provided, and each link 334 is connected to the latch arm link connector 324 and the base link connector 330.

[0050] The latch arm 314 is configured to be movable between an unlatched position that allows the cassette 310 to be easily positioned on or removed from the door 306 and a latched position where the latch arm 314 fixes the cassette 310 by contacting the horizontal bar 312 of the cassette 310. The latch arm 314 has a first end 316 that includes the contact surface 318. The contact surface 318 may be integrally formed with the latch arm 314 or may be an additional element attached to the first end 316 of the latch arm 314. The contact surface 318 may be configured to contact the cassette 310 at any suitable location such that the cassette 310 can be fixed. In an embodiment, the contact surface 318 is configured to contact the horizontal bar 312 to fix the cassette 310. The contact surface 318 may include a bevel, an inclined surface, a step, a shoulder, a flange, or any other suitable feature such that the contact surface 318 can effectively hold the horizontal bar 312 even though the latch arm 314 is moved upward when the latch arm 314 is driven to the latched position. The latch arm 314 further includes a second end 320 opposite the first end 316. The dome contact retainer 322 is disposed at the second end 322. The dome contact retainer may include, for example, an opening, a recess, a groove, or the like configured to receive a protrusion (such as the shaft of the dome contact element 326) of the dome contact element 326.

[0051] The arm link connectors 324 are provided along the length of the latch arm 314 to allow the latch arm 314 to be connected to each of the plurality of links 334. The arm link connectors may be any suitable feature that allows a rotatable connection. In Figure 3A and3B In the non-limiting example shown in 3B , the arm link connector 324 includes an opening in the latch arm 314 and a cylindrical extension across the opening. The cylindrical extension is sized such that a clamp disposed at the end of the link 334 can engage the cylindrical extension, thereby providing a rotatable connection between the link 334 and the latch arm 314 at the arm link connector 324.

[0052] The dome contact element 326 is an element configured to contact the inner surface 304 of the dome 302. The dome contact element 326 can be any suitable contact element, such as an element including a cam surface or a fixed curved surface, a roller, or the like. In an embodiment, the dome contact element 326 includes at least one rounded surface, for example, is circular, elliptical, or any other shape including a rounded surface. In an embodiment, the dome contact element 326 is circular. In an embodiment, the dome contact element 326 is a single piece. In an embodiment, the dome contact element 326 includes at least two different materials, for example, a core including a relatively harder and / or more rigid core material and a contact surface made of a relatively softer and / or more flexible contact surface material. In an embodiment, the contact surface can be overmolded onto the core. In an embodiment, the contact surface material can be selected from elastomers such as thermoplastic elastomers, silicones, or the like. The dome contact element 326 is configured to be received in or held by the dome contact holder 322, for example, having an outward protrusion forming a shaft that allows the dome contact element 326 to be held in the dome contact holder 322 and allows the dome contact element 326 to rotate when held.

[0053] The base 328 is configured to attach the latch mechanism 308 to the door 306. The base 328 can be attached to the door 306, integrally formed with the door 306, or include some portions attached to the door 306 and other portions integrally formed with the door 306. The base 328 is sized and configured to provide an open space through which the latch arm 314 can travel between the latched position and the unlatched position. The base 328 can be sized such that the maximum height of the latch mechanism 328 above the surface of the door 306 on which the base 328 is placed is such that the latch mechanism 308 will not interfere with the wafers placed in the cassette 310. In an embodiment, the base 328 is sized such that the height of the latch mechanism is equal to or less than 0.8 inches (about 2 cm).

[0054] The base link connector 330 is disposed on the base 328. The base link connector can be a cylindrical rod extending across an open space in the base 328. The cylindrical rod can be sized such that a clamp disposed on the link 334 can engage the cylindrical rod to attach an end of the link 334 to one of the base link connectors 330. Attachment of the link 334 to the corresponding base link connector 330 can enable the link 334 to rotate, for example, in response to a force on the latch arm 314 to which the link 334 is also connected.

[0055] A biasing spring 332 is disposed on the base 328. The biasing spring 332 can be any suitable spring for applying a force to the latch arm 314, such as a leaf spring, a plate spring, a helical spring, or the like. The biasing spring 332 can be a separate element attached to the base 328 or integrally formed with the base 328. The biasing spring is configured to contact the latch arm 314. The biasing spring is configured to drive the latch arm 314 to an unlatched state in which the latch arm 314 does not overlap the horizontal bar 312. In Figure 3A the embodiment shown, the force applied by the biasing spring 332 drives the latch arm 314 outward to the unlatched state. The biasing spring 332 can interface with the latch arm 314 at an interface feature 336 disposed on the latch arm 314, such as a tab including a protrusion or a recess, a contact surface configured to receive a portion of the biasing spring 332, or another suitable feature that allows the biasing spring to act reliably on the latch arm 314.

[0056] The link 334 couples the latch arm 314 to the base 328. The link 334 can rotate at each of its connections to the latch arm 314 and the base 328. In an embodiment, each of the links 334 includes a first clamp attached to one of the arm link connectors 324 at a first end and a second clamp attached to one of the base link connectors 330 at an opposite end of the link 334. Each of the links 334 has a fixed length. The fixed length of the link 334 and the rotatable connectors control the movement of the latch arm 314 relative to the base 328 such that the latch arm 314 can move between a latched position and an unlatched position.

[0057] Figure 3B Shown in a cross-sectional view of a wafer container when the latch mechanism is in the latched position according to an embodiment Figure 3A In Figure 3BIn the latch position shown, the inner surface 304 of the dome 302 contacts the dome contact element 326. The contact between the inner surface 304 and the dome contact element 326 drives the dome contact element 326 inward. The connection of the dome contact element 326 to the latch arm 314 causes the latch arm 314 to also be driven inward. The inward movement of the latch arm 314 causes the link 334 to rotate, pulling the latch arm 314 downward as the latch arm 314 moves inward. The force overcomes the force provided by the biasing spring 332, thus bringing the contact surface 318 above the horizontal bar 312 of the wafer cassette 310. Accordingly, the contact surface 318 fixes the position of the wafer cassette 310 to the door 306. When the dome 302 is removed from the door 306, the biasing spring drives the latch arm 314 upward, causing a rotational movement defined by the link 334 such that the latch arm 314 returns to its unlatched position where it does not overlap the horizontal bar 312 and the wafer cassette 310 can be removed from the door 306 without interference from the latch mechanism 308.

[0058] Figure 4A A cross-sectional view of a wafer container is shown when the latch mechanism is in an unlatched position according to an embodiment. The wafer container 400 includes a dome 402 having an inner surface 404, a door 406 having a latch mechanism 408, and a wafer cassette 410 having a horizontal bar 412. The latch mechanism 408 includes a latch arm 414, the latch arm 414 including a first end 416 having a contact surface 418. The latch arm 414 further includes a second end 420 having a dome contact retainer 422. A dome contact element 424 is attached to the latch arm 414 at the dome contact retainer 422. The latch arm 414 further includes an arm link attachment 426 and a aperture 428. The latch mechanism further includes a base 430 having a base link attachment 432, and a biasing pin 434 having a protrusion 436 and a spring 438. A link 442 is connected to each of the latch arm 414 and the base 430.

[0059] The latch mechanism 408 includes a latch arm 414, and the latch arm 414 includes a first end 416 having a contact surface 418. The contact surface 418 is configured to contact the cassette 410 when the latch mechanism is in the latched position. The contact surface 418 can be configured to contact the cassette 410 at any suitable location (a non-limiting example of which is the horizontal bar 412), such that the cassette 410 can be fixed. The latch mechanism 408 further includes a second end 420, and a dome contact element 424 is attached at the second end 420. In an embodiment, a dome contact holder 422 is at the second end 420. The dome contact element 424 is attached to the latch arm 414 at the dome contact holder 422, for example. The dome contact element 424 can be any suitable contact element, such as an element including a cam surface or a fixed curved surface, a roller, or the like. In an embodiment, the dome contact element 424 includes at least two different materials, for example, a core including a harder or more rigid core material and a softer or more flexible contact surface. In an embodiment, the contact surface can be overmolded onto the core. In an embodiment, the contact surface material can be selected from one or more of the elastomers in the following list: thermoplastic elastomer, polysiloxane, or the like.

[0060] The arm link attachment 426 is configured to allow the link 442 to be attached to the latch arm 414. The arm link attachment 426 can be any suitable structure (such as a cylinder surrounded by an opening) that allows the link 442 to be mechanically attached to the latch arm 414, allowing a clamp included in the link 442 to be attached to the arm link attachment 426. In an embodiment, the arm link attachment 426 can be a clamp or a socket configured to receive a portion of the link 442. The connection of the arm link attachment 426 to the link 442 can be such that the link 442 and the latch arm 414 can rotate relative to each other.

[0061] The latch arm 414 includes a pore 428. The pore 428 is configured to receive a protrusion 436 included in the biasing pin 434. In an embodiment, the pore 428 can have rounded or beveled edges, for example, to facilitate the insertion of the protrusion 436 of the biasing pin 434 into the pore 428. The pore 428 is formed in the latch arm 414 such that the protrusion 436 of the biasing pin 434 can apply a force to the latch arm 414, for example, to drive the latch arm 414 toward the unlatched state when no force is applied to the latch arm through the dome contact element 424.

[0062] The latch mechanism 408 further includes a base 430. The base 430 is disposed on the door 406. In an embodiment, the base 430 has a maximum height of 0.8 inches or less above the door 406. The base 430 defines a channel 440. The channel 440 is configured such that the dome contact element 424 attaches to an attachment 432, which can be any suitable structure that allows for a rotatable connection of the link 442 to the base 430. The base link attachment 432 can be, for example, a cylindrical member having an opening therearound to allow an attachment clamp, a clamp configured to receive a portion of the link 442, or a socket or the like.

[0063] The base 430 further includes a biasing pin 434 configured to return the latch arm 414 to the unlatched position when no other forces act on the latch arm 414. The biasing pin 434 includes a protrusion 436 and a spring 438. The protrusion 436 is configured to be received in a pore 428 disposed on the latch arm 414. The protrusion 436 is seated on the spring 438. The spring 438 is configured to allow deflection of the protrusion 436 when other forces are applied (e.g., when the dome 402 contacts the dome contact element 424), and to provide a force that returns the protrusion 436 to a position in which the latch arm 414 is in the unlatched position. The spring 438 can be any suitable spring, such as one or more spring arms. The spring 438 can be a separate spring attached to the base 430 or formed integrally with the base 430. The protrusion 436 can be an element separate from and attached to the spring 438, or formed integrally with the spring 438. In an embodiment, the base 430, the spring 438, and the protrusion 436 are all formed integrally with each other. In an alternative embodiment, the relative positions of the pore 428 and the protrusion 436 can be reversed, where the protrusion 436 extends from the latch arm 414 and the pore 428 is defined in a material attached to or included along the spring 438. In another alternative embodiment, the spring 438 can alternatively be included in the latch arm 414, where one of the protrusion 436 or the material defining the pore 428 is seated on the spring 438, and the other of the protrusion 436 or the material defining the pore 428 is disposed in a fixed position on the base 430.

[0064] The link 442 is rotatably attached to the latch arm 414 at the arm link attachment 426 and rotatably attached to the base 430 at the base link attachment 432. The link 442 is configured to control the movement of the latch arm 414 relative to the base 430 when a force is applied to the latch arm 414 through contact between the dome 402 and the dome contact element 424 and / or through the biasing pin 434. The link 442 can be rigid and have a fixed length. The attachments of the link 442 to the latch arm 414 and the base 430 can be at opposite ends of the link 442. The link 442 can include any suitable structure for engaging and rotatably attaching to the arm link attachment 426 and the base link attachment 432, such as a clamp, a socket, or corresponding engaging features (such as a ball joint, a cylindrical portion with adjacent openings, or the like).

[0065] Figure 4B showing a cross-sectional view of a wafer container when the latch mechanism is in the latched position according to an embodiment Figure 4A When the dome 402 is attached to the door 406, the inner surface 404 contacts the dome contact element 424, driving the dome contact element 424 to move within the channel 440 and thus also driving the latch arm 414 inward. The force causing the movement of the latch arm 414 overcomes the force applied by the spring 438 on the protrusion 436, thus causing the protrusion 436 to move at least partially out of the aperture 428 and allowing the movement of the latch arm 414. The inward movement of the latch arm 414 is controlled by the link 442 such that the contact surface 418 moves inward and downward to contact the horizontal bar 412. The contact between the contact surface 418 and the horizontal bar 412 secures the cassette 410 to the door 406. When the dome 402 is removed, the force applied by the spring 438 on the protrusion 436 drives the protrusion 436 back into the aperture 428 and returns the latch arm 414 to its unlatched position where it does not overlap with the horizontal bar 412 and the cassette 410 can be removed from the door 406 without interference from the latch mechanism 408.

[0066] Figure 5AShows a cross-sectional view of a wafer container when the latch mechanism according to an embodiment is in the unlatched position. The wafer container 500 includes a dome 502 having an inner surface 504, a door 506 having a latch mechanism 508, and a cassette 510 having a horizontal bar 512. The latch mechanism 508 includes a latch arm 514, and the latch arm 514 includes a first end 516 having a contact surface 518. The contact surface 518 can be configured to contact the cassette 510 at any suitable location, one non-limiting example of which is the horizontal bar 512, such that the cassette 510 can be fixed. The latch arm 514 further includes a second end 520 having a dome contact retainer 522. A dome contact element 524 and a guide roller 526 can each be attached to the latch arm 514 at the dome contact retainer 522. The latch arm 514 further includes an arm link attachment 528 and a pore 530. The latch mechanism further includes a base 532 defining a channel 542. The base 532 can include a base link attachment 534, and a biasing pin 536 having a protrusion 538 and a spring 540. A link 544 is connected to each of the latch arm 514 and the base 532.

[0067] The latch mechanism 508 includes a latch arm 514, and the latch arm 514 includes a first end 516 having a contact surface 518. The contact surface 518 is configured to contact the cassette 510 when the latch mechanism is in the latched position. The latch mechanism 508 further includes a second end 520, and the dome contact element 524 is attached at the second end 520. In an embodiment, the dome contact retainer 522 is at the second end 520. The dome contact element 524 is attached to the latch arm 514 at the dome contact retainer 522, for example. The dome contact element 524 can be any suitable contact element, such as an element including a cam surface or a fixed curved surface, a roller, or the like. In an embodiment, the dome contact element 524 includes at least two different materials, for example, a core including a harder or more rigid core material and a softer or more flexible contact surface. In an embodiment, the contact surface can be overmolded onto the core. In an embodiment, the contact surface material can be selected from one or more of the following list of elastomers: thermoplastic elastomer, polysiloxane, or the like.

[0068] The guide roller 526 is attached to the latch arm 514. The guide roller 526 can assist in guiding the movement of the latch arm 514 from the latched position to the unlatched position. The guide roller 526 can be sized such that it contacts only the door 506 when traveling between the latched position and the unlatched position. The guide roller 526 includes at least two different materials, for example, a core including a harder or more rigid core material and a softer or more flexible contact surface. In an embodiment, the contact surface can be overmolded onto the core. In an embodiment, the contact surface material can be selected from one or more of the following list of elastomers: thermoplastic elastomer, polysiloxane, or the like.

[0069] The arm link attachment 528 is configured to permit attachment of the link 544 to the latch arm 514. The arm link attachment 528 can be any suitable structure (e.g., a cylinder surrounded by an opening) that permits mechanical attachment of the link 544 to the latch arm 514, allowing a clamp included in the link 544 to be attached to the arm link attachment 528. In an embodiment, the arm link attachment 528 can be a clamp or socket configured to receive a portion of the link 544. The connection of the arm link attachment 528 to the link 544 can be such that the link 544 and the latch arm 514 can rotate relative to each other.

[0070] The latch arm 514 includes a pore 530. The pore 530 is configured to receive a protrusion 538 included in the biasing pin 536. In an embodiment, the pore 530 can have rounded or beveled edges, for example, to facilitate insertion of the protrusion 538 of the biasing pin 536 into the pore 530. The pore 530 is formed in the latch arm 514 such that the protrusion 538 of the biasing pin 536 can apply a force to the latch arm 514, for example, to drive the latch arm 514 toward the unlatched state when no force is applied to the latch arm by the dome contact element 524.

[0071] The latch mechanism 508 further includes a base 532. The base 532 is disposed on the door 506. In an embodiment, the base 530 has a maximum height of 0.8 inches or less above the door 506. The base 532 defines a channel 542. The channel 542 is configured such that the dome contact element 524 can move through the channel 542 coplanarly with the door 506. The channel 542 can be sized such that when the dome contact element 524 travels through the channel, the dome contact element 524 contacts at most one surface of the interior of the channel 542. The channel 542 can be sized such that when the guide roller 526 travels through the channel, the guide roller 526 contacts only one surface of the interior of the channel 542. The guide roller 526 and the channel 542 can be configured such that the guide roller 526 rolls along the door 506 and / or the base 532 without friction against any other surface disposed in the channel 542. The base 532 includes a base link attachment 534 that can be any suitable structure that permits a rotatable connection of the link 544 to the base 532. The base link attachment 534 can be, for example, a cylindrical member having an opening around it to permit attachment of a clamp, a clamp or socket configured to receive a portion of the link 544, or the like.

[0072] The base 532 further includes a biasing pin 536 configured to return the latch arm 514 to the unlatched position when no other force is acting on the latch arm 514. The biasing pin 536 includes a protrusion 538 and a spring 540. The protrusion 538 is configured to be received in a pore 530 provided on the latch arm 514. The protrusion 538 is seated on the spring 540. The spring 540 is configured to allow deflection of the protrusion 538 when other forces are applied (e.g., when the dome 502 contacts the dome contact element 524), and to provide a force to return the protrusion 538 to a position in which the latch arm 514 is in the unlatched position. The spring 540 can be any suitable spring, e.g., one or more spring arms. The spring 540 can be a separate spring attached to the base 532 or formed integrally with the base 532. The protrusion 538 can be an element separate from and attached to the spring 540, or formed integrally with the spring 540. In an embodiment, the base 532, the spring 540, and the protrusion 538 are all formed integrally with each other. In an alternative embodiment, the relative positions of the pore 530 and the protrusion 538 can be reversed, where the protrusion 538 extends from the latch arm 514 and the pore 530 is defined in the material attached to or included along the spring 540. In another alternative embodiment, the spring 540 can alternatively be included in the latch arm 514, where one of the protrusion 538 or the material defining the pore 530 is seated on the spring 540, and the other of the protrusion 538 or the material defining the pore 530 is provided in a fixed position on the base 532.

[0073] The link 544 is rotatably attached to the latch arm 514 at the arm link attachment 528 and rotatably attached to the base 532 at the base link attachment 534. The link 544 is configured to control the movement of the latch arm 514 relative to the base 532 when a force is applied to the latch arm 514 through the contact between the dome 502 and the dome contact element 524 and / or through the biasing pin 536. The link 544 can be rigid and have a fixed length. The attachment of the link 544 to the latch arm 514 and the base 532 can be at opposite ends of the link 544. The link 544 can include any suitable structure for engaging and rotatably attaching to the arm link attachment 528 and the base link attachment 534, such as a clamp, a socket, or corresponding engaging features (e.g., a ball joint, a cylindrical portion with adjacent openings, or the like).

[0074] Figure 5B Shown when the latch mechanism is in the latched position according to an embodiment Figure 5ACross-sectional view of a wafer container. When the dome 502 is attached to the door 506, the inner surface 504 contacts the contact dome contact element 524, driving the contact dome contact element 524 and guiding the dome contact element 524 to move within the channel 542 and thus also driving the latch arm 514 inward. The contact dome contact element 524 can roll along the upper surface of the channel 542, and the guiding dome contact element can roll along the lower surface of the channel 542. In an embodiment, the contact dome contact element 524 does not contact the lower surface of the channel 542, and the guiding dome contact element 526 does not contact the upper surface of the channel 542. This can reduce or eliminate particle generation caused by the sliding of the dome contact elements 524, 526 along the surface of the channel 542. The force that moves the latch arm 514 overcomes the force exerted by the spring 540 on the protrusion 538, thus causing the protrusion 538 to move at least partially out of the aperture 530 and allowing the movement of the latch arm 514. The inward movement of the latch arm 514 is controlled by the link 544 such that the contact surface 518 moves inward and downward to contact the horizontal bar 512. The contact between the contact surface 518 and the horizontal bar 512 secures the wafer cassette 510 to the door 506. When the dome 502 is removed, the force exerted by the spring 540 on the protrusion 538 drives the protrusion 538 back into the aperture 530 and returns the latch arm 514 to its unlatched position where it does not overlap with the horizontal bar 512 and the wafer cassette 510 can be removed from the door 506 without interference from the latching mechanism 508.

[0075] Figure 6A Cross-sectional view showing a wafer container when the latching mechanism is in the unlatched position according to an embodiment. The wafer container 600 includes a dome 602 having an inner surface 604, a door 606 containing a latching mechanism 608, and a wafer cassette 610 containing a horizontal bar 612. The latching mechanism 608 includes a link 614. A dome contact element 616 is attached to the link 614. The link 614 is also attached to a latch arm 618. The latch arm 618 includes a contact surface 620 at a first end 622, a link attachment 624, and a second end 626, as well as a guide roller 628. The link 614 is also attached to a base 630. The base 630 defines a channel 632.

[0076] The link 614 is joined to the base 630 at a first attachment point and to the latch arm 618 at a second attachment point. The attachments are configured such that the link 614 is rotatable relative to the base 630 and the latch arm 618 is rotatable relative to the link 614. The link 614 includes a dome contact element 616. In an embodiment, the dome contact element 616 is directly fixed to the link 614 (e.g., formed integrally with the link 614). In an embodiment, the dome contact element 616 is a separate element attached to the link 614, e.g., a roller attached to the link 614 by a retainer. The dome contact element 616 can be any suitable contact element, e.g., an element including a cam surface or a fixed curved surface, a roller, or the like. In an embodiment, the dome contact element 616 has a relatively rigid core and a relatively flexible contact surface. In an embodiment, the link 614 is triangular in shape, with the attachment of the link 614 to the latch arm 618 at a first point of the triangle, the attachment of the link 614 to the base 630 at a second point of the triangle, and the dome contact element 616 at a third point of the triangle. The shape of the link 614 can be such that when the link 614 is at rest with no other forces acting on the link 614, the mass distribution of the link 614 results in the attachment 614 to the latch arm 618 being the relatively lowest point of the link 614.

[0077] The latch arm 618 is attached to the link 614. The latch arm 618 includes a contact surface 620 at a first end 622. The contact surface 620 can be configured to contact the cassette 610 at any suitable location, one non-limiting example of which is the horizontal bar 612, such that the cassette 610 can be fixed. A link attachment 624 is provided at a second end 626 opposite the first end 622. The link attachment can be any suitable feature for attaching the latch arm 618 to the link 614 such that the latch arm 618 is rotatable relative to the link 614. Guide rollers 628 are disposed along the latch arm 618. The latch arm 618 can be disposed at a point closer to the first end 622 than the second end 626 such that the mass on the side of the guide rollers 628 toward the second end 626 exceeds the mass on the side of the guide rollers 628 toward the first end 622. The distribution of the mass of the latch arm 618 relative to the guide rollers 628 can be such that in the absence of other forces acting on the link 614 or the latch arm 618, the second end 626 will tend to be pulled downward by gravity. Additionally, in an embodiment, a spring is configured to allow deflection of the side of the guide rollers 628 when other forces are applied (e.g., when the dome 604 contacts the dome contact element 616) and return the side of the guide rollers 628 to a position in which the latch arm 618 is in an unlatched position.

[0078] The base 630 is disposed in a fixed position on the door 606. The base 630 can be integrally formed with the door 606 or can be a separate element fixed to the door 606 by any suitable means (such as mechanical connectors, adhesives, welding, or the like). In an embodiment, the base 630 is welded to the door 606. The base 630 can have a height of 0.8 inches or less above the surface of the door 606. The base 630 can define a channel 632 that is configured to allow the guide roller 628 to travel within the channel 632. In an embodiment, the guide roller 628 and the channel 632 are sized such that the guide roller 628 contacts only one surface of the interior of the channel 632 and can roll along that surface without rubbing against any other surface disposed within the channel 632. The base 630 can be configured to allow the link 614 to be rotatably attached to the base, for example, by providing a clamp, a cylindrical area surrounded by an opening, or any other suitable feature corresponding to an attachment feature disposed on the link 614.

[0079] Figure 6B Showing when the latch mechanism is in the latched position according to an embodiment Figure 6A A cross-sectional view of the wafer container. When the inner surface 604 of the dome 602 contacts the dome contact element 616, the link 614 is driven to rotate about its connection to the base 630 and drives the latch arm 618 inward toward the latched position. The rotation of the link 614 also raises the link attachment 624, raising the second end 626 and lowering the first end 622 as the latch arm 618 rotates about the guide roller 628. Thus, the contact surface 620 is moved inward and downward to contact the horizontal bar 612, thereby holding the cassette 610 within the wafer container 600. When the dome 602 is removed and the inner surface 604 no longer contacts the dome contact element 616, the weight of the latch arm 618 and the link 614 causes the link attachment 624 and the attached portion of the link 614 to drop, where the resulting rotation of the link 614 pulls the latch arm 618 to its unlatched position where it does not overlap the horizontal bar 612 and allows the first end 622 to be raised by the rotation of the latch arm 618 about the guide roller 628.

[0080] Figure 7 Showing an exploded view of the latch mechanism according to an embodiment. The latch mechanism 700 can be used as a wafer container (such as described above and Figure 1The latch mechanism in the wafer container 100 shown. The latch mechanism 700 includes a base 702. The base 702 includes a base body 704, a hinge pin 706, a biasing spring 708, and a biasing pin 710. The latch mechanism 700 further includes a latch tab 712. The latch tab 712 includes a contact surface 714, a hinge aperture 716, and a cam aperture 718. The latch mechanism 700 also includes a latch arm 720. The latch arm 720 includes a cam protrusion 722, a biasing aperture 724, and a roller holder 726. A dome contact element 728 including a core 730, a shaft protrusion 732, and a contact surface 734 can be held in the roller holder 726.

[0081] The base 702 is configured to engage with the door of the wafer container. In an embodiment, the base 702 can be integrally formed with the door of the wafer container. In an embodiment, the base 702 is joined to the door of the wafer container by welding. The base 702 includes a base body 704. The base body 704 is configured to define a channel capable of accommodating the latch arm 720. The base 702 further includes a hinge pin 706. The hinge pin 706 is a pin extending from the base body 704 and sized to be received in the hinge aperture 716 of the latch tab 712. In an embodiment, the hinge pin 706 can be replaced by an aperture and the hinge aperture 716 can be replaced by a pin, causing Figure 7 the arrangement of the hinge pin 706 and the hinge aperture 716 shown to be reversed. The hinge pin 706 and the hinge aperture 716 are configured to allow the latch tab 712 to engage with the base 702 such that the latch tab can rotate between an unlatched position and a latched position about the axis of the hinge pin 706. The base 702 includes a biasing spring 708 and a biasing pin 710. The biasing pin 710 is disposed along or engaged with the biasing spring 708 such that the biasing spring provides a force to position the biasing pin 710. The biasing pin 710 is a protrusion configured to be received in the biasing aperture 724 formed in the latch arm 720. The biasing spring 708 can be configured such that when a force is applied to the latch arm (e.g., by the dome of the dome contact element 728), the biasing pin 710 can be deflected. The spring 708 can then return the biasing pin 710 to a position where, when no other force is applied to the latch arm 720, the biasing pin 710 brings the latch arm 720 to the unlatched position.

[0082] The latch tab 712 is configured to extend and retract to hold or release the horizontal bar of the wafer cassette, respectively. The latch tab 712 includes a contact surface 714 that is configured to contact the wafer cassette at any suitable position capable of securing the wafer cassette when the latch tab 712 rotates into the latched position. In an embodiment, the contact surface 714 is configured to contact the horizontal bar included in the wafer cassette. The latch tab 712 includes a hinge aperture 716 that is configured to receive a hinge pin 706 such that the latch tab is rotatable relative to the base 702. The latch tab 712 further includes a cam aperture 718. The cam aperture 718 is sized and shaped such that a cam projection 722 of the latch arm 720 can be received within the cam aperture 718, and the cam projection 722 can slide within the cam aperture 718 in at least one direction coplanar with the latch tab 712.

[0083] The latch arm 720 is configured to drive the latch tab 712 into a latched or unlatched position. The latch arm includes a cam projection 722 at an end of the latch arm 720. The cam projection 722 is configured to be received within the cam aperture 718 such that the cam projection 722 can slide within the cam aperture 718 to extend or retract the latch tab 712. A latch arm biasing aperture 724 is disposed along the length of the latch arm 720. The latch arm biasing aperture 724 is configured to receive a biasing pin 710. The latch arm biasing aperture 724 is positioned such that when the biasing pin 710 is received within the latch arm biasing aperture 724 and the spring 708 is in a neutral position, the latch arm 720 is in an unlatched position. The latch arm biasing aperture 724 may include rounded or beveled edges. The latch arm 720 may include a dome contact element 728. The dome contact element 728 can be any suitable element for contacting the wafer container such that the latch arm 720 can be driven by contact of the dome with the dome contact element 728. In Figure 7 the embodiment shown, the dome contact element 728 is a roller held within a roller retainer 726. In Figure 7 the embodiment shown, the roller serving as the dome contact element 728 includes a core 730, a shaft projection 732, and a contact surface 734. The core 730 may be made of a relatively more rigid material, while a relatively more flexible material is used for the contact surface 734. In an embodiment, the contact surface 734 is overmolded onto the core 730. The shaft projection 732 can be received within the roller retainer 726 to couple the dome contact element 728 to the latch arm 720.

[0084] When the wafer container including the latch mechanism 700 is assembled, the contact between the dome of the wafer container and the dome contact element 726 drives the latch arm 720 inward relative to the wafer container. The force applied to the dome contact element 726 overcomes the force applied by the biasing spring 708 to the biasing pin 710, and the biasing pin moves away from the biasing aperture 724, allowing the latch arm 720 to move inward. As the latch arm 720 moves inward, the cam protrusion 722 moves within the cam aperture 718, driving the latch tab 712 to rotate about the hinge pin 706 into the latched position, where the contact surface 714 overlaps with the horizontal bar of the wafer cassette. Thus, the contact surface 714 can hold the wafer cassette within the wafer container including the latch mechanism 700. When the dome is removed from the door of the wafer container including the latch mechanism 700, the dome no longer applies a force to the dome contact element and the biasing pin 710 can be driven into the biasing aperture 724 by the biasing spring 708, moving the latch arm 720 outward and causing the cam protrusion 722 to move within the cam aperture 718 to retract the latch tab 712 to its unlatched position where it does not overlap with the horizontal bar of the wafer cassette.

[0085] Aspect:

[0086] It should be understood that any one of aspects 1 to 11 can be combined with any one of aspects 12 to 20.

[0087] Aspect 1. A wafer container, comprising:

[0088] A dome defining a space configured to receive a wafer cassette, the dome including an inner surface and a door opening; and

[0089] A door configured to be received in the door opening, the door including a latch mechanism,

[0090] wherein the latch mechanism includes a dome contact and a cassette contact, and the latch mechanism is configured such that when the inner surface of the dome contacts the dome contact, the cassette contact is driven to contact the wafer cassette, and when the inner surface of the dome does not contact the dome contact, the latch does not overlap with the wafer cassette.

[0091] Aspect 2. The wafer container according to aspect 1, wherein the dome contact is a roller element.

[0092] Aspect 3. The wafer container according to aspect 2, wherein the roller element includes a core made of a first material and an outer portion made of a second material, the second material being relatively softer than the first material.

[0093] Aspect 4. The wafer container according to any one of aspects 1 to 3, wherein the cassette contact is configured to contact the wafer cassette at a horizontal bar included in the wafer cassette.

[0094] Aspect 5. The wafer container according to any one of aspects 1 to 4, wherein the latch mechanism includes:

[0095] A base;

[0096] A latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cassette contact is disposed at a second end of the latch arm; and

[0097] A plurality of linkages, each linkage being rotatably connected to each of the base and the latch arm.

[0098] Aspect 6. The wafer container according to aspect 5, wherein the base is joined to the door.

[0099] Aspect 7. The wafer container according to any one of aspects 5 to 6, further comprising a biasing spring configured to contact the latch arm.

[0100] Aspect 8. The wafer container according to any one of aspects 1 to 4, wherein the latch mechanism includes:

[0101] A base, the base including a channel configured to receive the dome contact;

[0102] A latch arm, which includes the cassette contact; and

[0103] A linkage, the linkage being rotatably connected to each of the base and the latch arm,

[0104] wherein the base includes a pin configured to interface with the latch arm.

[0105] Aspect 9. The wafer container according to aspect 8, wherein the latch mechanism further includes a guide roller disposed in the channel.

[0106] Aspect 10. The wafer container according to any one of aspects 1 to 4, wherein the latch mechanism includes:

[0107] A base, the base defining a channel;

[0108] A latch arm, which includes the cassette contact;

[0109] A linkage, wherein the dome contact is attached to the linkage and the linkage is rotatably connected to each of the base and the latch arm; and

[0110] A guide roller, the guide roller being attached to the latch arm, the guide roller being configured to travel within the channel.

[0111] Aspect 11. The wafer container according to claim 1, wherein the latch mechanism comprises:

[0112] A base;

[0113] A drive arm, wherein the dome contact is attached to the drive arm; and

[0114] A latch arm, rotatably connected to the base, the latch arm including the cassette contact, wherein the drive arm and the latch arm are engaged by a cam structure, the cam structure including a protrusion and a groove and configured to drive the rotation of the latch arm between an unlatched position and a latched position.

[0115] Aspect 12. A method of fixing a wafer cassette within a container, comprising driving the latch mechanism by contact between a dome contact of the latch mechanism and an inner surface of the dome such that the cassette contact is brought into contact with the wafer cassette.

[0116] Aspect 13. The method according to aspect 12, further comprising retracting the cassette contact such that when the dome is removed from contact with the dome contact, the cassette contact does not overlap with the wafer cassette.

[0117] Aspect 14. The method according to any one of aspects 12 to 13, wherein the latch mechanism is included in a door of the container.

[0118] Aspect 15. The method according to any one of aspects 12 to 14, wherein the cassette contact contacts the wafer cassette at a horizontal bar included in the wafer cassette.

[0119] Aspect 16. The method according to any one of aspects 12 to 15, wherein the latch mechanism comprises:

[0120] A base;

[0121] A latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cassette contact is disposed at a second end of the latch arm; and

[0122] A plurality of linkages, each linkage being rotatably connected to each of the base and the latch arm.

[0123] Aspect 17. The method according to any one of aspects 12 to 15, wherein the latch mechanism comprises:

[0124] A base, the base including a channel configured to receive the dome contact;

[0125] A latch arm that includes the cartridge contact; and

[0126] A link rotatably connected to each of the base and the latch arm,

[0127] wherein the base includes a pin configured to interface with the latch arm.

[0128] Aspect 18. The method according to aspect 17, wherein the latch mechanism further includes a guide roller disposed in the channel.

[0129] Aspect 19. The method according to any one of aspects 12 to 15, wherein the latch mechanism includes:

[0130] A base that defines a channel;

[0131] A latch arm that includes the cartridge contact;

[0132] A link, wherein the dome contact is attached to the link and the link is rotatably connected to each of the base and the latch arm; and

[0133] A guide roller attached to the latch arm and configured to travel within the channel.

[0134] Aspect 20. The method according to any one of aspects 12 to 15, wherein the latch mechanism includes:

[0135] A base;

[0136] A drive arm, wherein the dome contact is attached to the drive arm; and

[0137] A latch arm rotatably connected to the base, the latch arm including the cartridge contact, wherein the drive arm and the latch arm are engaged by a cam structure that includes a protrusion and a groove, and the cam is configured to drive rotation of the latch arm between an unlatched position and a latched position.

[0138] The examples disclosed in this application should be considered illustrative in all respects and not restrictive. The scope of the present invention is indicated by the appended claims rather than by the foregoing description; and all changes within the equivalent meaning and scope of the claims are intended to be covered therein.

Claims

1. A wafer container, which comprises: a dome that defines a space configured to receive a wafer cassette, the dome including an inner surface and a door opening; and a door configured to be received in the door opening, the door including a latch mechanism, wherein the latch mechanism includes a dome contact and a cassette contact, and the latch mechanism is configured such that when the inner surface of the dome contacts the dome contact, the cassette contact is driven to contact the wafer cassette, and when the inner surface of the dome does not contact the dome contact, the latch does not overlap with the wafer cassette.

2. The wafer container according to claim 1, wherein the dome contact is a roller element.

3. The wafer container according to claim 1, wherein the latch mechanism includes: a base; a latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cassette contact is disposed at a second end of the latch arm; and a plurality of linkages, each linkage rotatably connected to each of the base and the latch arm.

4. The wafer container according to claim 3, further comprising a biasing spring configured to contact the latch arm.

5. The wafer container according to claim 1, wherein the latch mechanism includes: a base that includes a channel configured to receive the dome contact; a latch arm that includes the cassette contact; and a linkage rotatably connected to each of the base and the latch arm, wherein the base includes a pin configured to interface with the latch arm.

6. The wafer container according to claim 5, wherein the latch mechanism further includes a guide roller disposed in the channel.

7. The wafer container according to claim 1, wherein the latch mechanism includes: a base that defines a channel; a latch arm that includes the cassette contact; a linkage, wherein the dome contact is attached to the linkage and the linkage is rotatably connected to each of the base and the latch arm; and a guide roller attached to the latch arm, the guide roller configured to travel within the channel.

8. The wafer container according to claim 1, wherein the latch mechanism includes: a base; a drive arm, wherein the dome contact is attached to the drive arm; and a latch arm rotatably connected to the base, the latch arm including the cassette contact, wherein the drive arm and the latch arm are engaged by a cam structure that includes a protrusion and a groove and is configured to drive rotation of the latch arm between an unlatched position and a latched position.

9. A method of fixing a wafer cassette within a container, which includes driving the latch mechanism by contact between a dome contact of the latch mechanism and an inner surface of a dome such that a cassette contact is brought into contact with the wafer cassette.

10. The method according to claim 9, further comprising retracting the cassette contact such that when the dome is removed from contact with the dome contact, the cassette contact does not overlap with the wafer cassette.

11. The method according to claim 9, wherein the latch mechanism includes: Base; A latch arm, wherein the dome contact is disposed at a first end of the latch arm and the cartridge contact is disposed at a second end of the latch arm; and A plurality of linkages, each linkage being rotatably connected to each of the base and the latch arm.

12. The method according to claim 9, wherein the latch mechanism comprises: A base, the base comprising a channel configured to receive the dome contact; A latch arm, which comprises the cartridge contact; and A linkage, the linkage being rotatably connected to each of the base and the latch arm, wherein the base comprises a pin configured to interface with the latch arm.

13. The method according to claim 12, wherein the latch mechanism further comprises a guide roller disposed in the channel.

14. The method according to claim 8, wherein the latch mechanism comprises: A base, the base defining a channel; A latch arm, which comprises the cartridge contact; A linkage, wherein the dome contact is attached to the linkage and the linkage is rotatably connected to each of the base and the latch arm; and A guide roller, the guide roller being attached to the latch arm, the guide roller being configured to travel within the channel.

15. The method according to claim 8, wherein the latch mechanism comprises: A base; A drive arm, wherein the dome contact is attached to the drive arm; and A latch arm, which is rotatably connected to the base, the latch arm comprising the cartridge contact, wherein the drive arm and the latch arm are engaged by a cam structure, the cam structure comprising a protrusion and a groove, the cam being configured to drive rotation of the latch arm between an unlatched position and a latched position.

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