A vertical continuous electroplating equipment vacuum pre-dipping tank

Abstract

The present invention discloses a vacuum pre-impregnation tank for a vertical continuous electroplating device, which relates to the technical field of electroplating. It includes a machine body, a first connecting pipe, a second connecting pipe and a liquid storage tank. The upper end of the left wall of the inner cavity of the machine body is movably connected with a top cover and an immersion tank through a sealing cylinder. The immersion tank is arranged below the top cover. A bottom block is fixed at the bottom of the inner cavity of the immersion tank. A first liquid flow groove and a second liquid flow groove are formed at the top left of the bottom block. The second liquid flow groove is arranged on the right side of the first liquid flow groove. A third liquid flow groove is formed at the front side of the bottom block. By providing the bottom block, the fixed frame and the installation frame, the pre-wetting cavity where the packaging carrier plates of different thicknesses are located can adaptively adjust the cavity size according to the pressure change during vacuum suction. By providing the fixed frame, the installation frame, the opening and closing orifice plate assembly and the opening and closing orifice plate assembly, the fluidity of the pre-impregnation liquid inside can be increased during the process of filling the pre-impregnation liquid in the pre-impregnation tank cavity.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating, and particularly to a vacuum pre-impregnation tank for a vertical continuous electroplating device. Background Art

[0002] The vacuum pre-impregnation tank of the vertical continuous electroplating device is an important device used in the electronic manufacturing process, mainly for metal deposition on printed circuit boards (PCBs) and other similar substrates. This device can drain the internal bubbles in the holes such as through-silicon vias (TSVs) engraved on the board-level package carrier through pre-wetting with plasma water or a specific electroplating pretreatment solution before the package carrier is electroplated, and at the same time make the substrate surface more active, which is beneficial to improving the adsorption efficiency and quality of metal ions in the subsequent electroplating process.

[0003] However, in the actual production and use process of the existing vacuum pre-impregnation tank, during the vacuum pre-wetting process of the pre-impregnation tank with a fixed cavity size for package carriers of different thicknesses, the vacuum suction link in the pre-impregnation tank takes a relatively long time, reducing the efficiency of the continuous electroplating production of the package carrier. As a result, the existing vacuum pre-impregnation tank is not convenient to adaptively adjust the cavity size in the pre-impregnation tank according to the pressure change during vacuum suction in cooperation with the thickness of the package carrier to improve the vacuum pumping speed. On the other hand, after the existing pre-impregnation tank finishes vacuum pumping, it needs to be filled with the pre-impregnation liquid, and then equipment such as shaking and swinging is used to increase the fluidity of the pre-impregnation liquid in the pre-impregnation tank to improve the pre-wetting effect. The use of the shaking and swinging equipment in this process further reduces the efficiency of continuous electroplating production. As a result, the existing pre-impregnation tank is not convenient to increase the fluidity of the pre-impregnation liquid by setting multiple adaptively adjustable cavities in the process of filling the pre-impregnation liquid, in cooperation with the pressure change and the liquid flow in the pre-impregnation tank. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum pre-impregnation tank for a vertical continuous electroplating device to solve the problems proposed in the above background art that the existing vacuum pre-impregnation tank is not convenient to adaptively adjust the cavity size in the pre-impregnation tank according to the pressure change during vacuum suction in cooperation with the thickness of the package carrier to improve the vacuum pumping speed, and that the existing pre-impregnation tank is not convenient to increase the fluidity of the pre-impregnation liquid by setting multiple adaptively adjustable cavities in the process of filling the pre-impregnation liquid, in cooperation with the pressure change and the liquid flow in the pre-impregnation tank. The technical solution of the present invention provides a solution significantly different from the prior art for the technical problem that the prior art solution is too single.

[0005] To achieve the above object, the present invention provides the following technical solution: a vacuum pre-impregnation tank for a vertical continuous electroplating device, comprising a machine body, a first connecting pipe, a second connecting pipe, and a liquid storage tank. The upper end of the left wall of the inner cavity of the machine body is movably connected with a top cover and an immersion tank through a sealing cylinder. The immersion tank is arranged below the top cover. A bottom block is fixed at the bottom of the inner cavity of the immersion tank. A first liquid flow groove and a second liquid flow groove are formed at the top left side of the bottom block. The second liquid flow groove is arranged on the right side of the first liquid flow groove. A third liquid flow groove is formed at the front side of the bottom block. A plug block is movably connected to the inner rear wall of the third liquid flow groove through an electric push rod. A fixing frame is fixed at the top left side of the bottom block. The fixing frame is connected to the right side wall of the inner cavity of the immersion tank through the convex blocks on the upper right side. Slide columns are fixed at the notch positions of the two convex blocks on the upper right side of the fixing frame. An installation frame is slidably sleeved on the outer sides of the two slide columns. The installation frame is slidably arranged between the bottom block and the fixing frame. A clamping strip is arranged between the fixing frame and the installation frame. The clamping strip is slidably placed between the two slide columns. An opening and closing orifice plate assembly is arranged on the right side of the inner frame of the fixing frame. The opening and closing orifice plate assembly is connected to the installation frame through an adjusting assembly.

[0006] Preferably, the immersion tank is installed at the upper end of the left partition layer in the inner cavity of the machine body. The left port of the first connecting pipe is connected to a vacuum pump through a pipeline. The vacuum pump is installed in the left partition layer in the inner cavity of the machine body. The first connecting pipe penetrates and is installed on the left side wall of the immersion tank and the bottom of the fixing frame. The lower front port of the immersion tank is connected to the liquid storage tank through a pipeline. The right port of the second connecting pipe is sequentially connected to a filtering mechanism and a suction pump through a pipeline and an electric control valve. The second connecting pipe penetrates and is fixed at the bottom of the installation frame and the right side wall of the immersion tank. The suction pump is connected to the liquid storage tank through a pipeline. The filtering mechanism is installed in the upper part of the inner cavity of the machine body. The liquid storage tank and the suction pump are sequentially installed at the bottom of the middle partition layer in the inner cavity of the machine body from back to front.

[0007] Preferably, the first liquid flow groove, the second liquid flow groove, and the third liquid flow groove communicate with each other. The communicating position of the first liquid flow groove, the second liquid flow groove, and the third liquid flow groove is located at the inner top of the third liquid flow groove. The third liquid flow groove is arranged between the fixing frame and the installation frame. The designed shape of the plug block corresponds to the third liquid flow groove. The plug block is used to block the communicating position of the first liquid flow groove, the second liquid flow groove, and the third liquid flow groove. A notch is designed at the bottom of the plug block. The plug block is used for liquid outflow.

[0008] Preferably, the opening and closing orifice plate assembly includes a panel. The panel is installed on the right side inside the fixing frame. A slide plate is slidably connected to the left groove of the panel. A top block is arranged at the rear of the bottom of the slide plate. The top block is installed on the adjusting assembly.

[0009] Preferably, the panel and the slide plate are both provided with multiple rows of tiny holes in an array. The holes formed in the panel and the slide plate are opened and closed by overlapping and staggering.

[0010] Preferably, the adjustment assembly includes a plug plate No. 1, a first opening, a plug plate No. 2, a second opening and a third opening, the plug plate No. 1 being slidably disposed in a groove on the inner side of a fixed frame, a top block being fixed on the right side of the bottom of the plug plate No. 1, the first opening being provided at the inner bottom of the fixed frame, the plug plate No. 2 being slidably disposed in a groove on the right side of the installation frame, a top strip being fixed on the right side of the plug plate No. 2, the second opening being provided at the upper right end of the inner side of the fixed frame, and the third opening being provided at the upper left wall of the installation frame.

[0011] Preferably, the cavity between the groove of the No. 2 plug plate and the mounting frame is connected to the cavity between the No. 1 plug plate and the immersion tank through a hose, and the opening position of the first opening corresponds to the position of the No. 2 flow tank.

[0012] Preferably, the top block is designed as an inclined surface structure, and the inclined surface structure of the top block is used to overlap and penetrate with the hole of the skateboard after the skateboard slides.

[0013] Preferably, the second opening is used for the cavity between the top block and the mounting frame and the cavity between the top block and the first plug plate to pass through, the third opening is used for the cavity between the top block and the mounting frame and the cavity between the inner side of the right groove of the mounting frame and the second plug plate to pass through, the top of the fixed frame is in seal contact with the top cover, and the mounting frame and the top cover are seal-slidable.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The present invention provides a bottom block, a fixing frame and an installation frame in an immersion tank. When the clamping strips clamp and fix the packaging carriers of different thicknesses and place them on two sliding columns, the cavity between the panel and the installation frame is evacuated. The installation frame slides leftward on the bottom block and the fixing frame, and resists and drives the clamping strips to slide synchronously at a limit position, so that the size of the cavity between the panel and the installation frame is adaptively adjusted to the corresponding cavity size as the clamping strips clamp the packaging carriers of different thicknesses. In the process of evacuating the cavity, the size of the cavity where the packaging carrier is located is reduced, the speed of vacuum suction is increased, and the speed of pre-wetting of the packaging carrier during the pre-wetting process is accelerated.

[0016] In the present invention, a first plug plate and a second plug plate are respectively arranged in the fixed frame and the mounting frame, so that the fixed frame and the mounting frame divide a plurality of cavities in the inner cavity of the immersion tank, and the cavities are automatically adjusted as the pre-immersion liquid increases. During the process of injecting the pre-immersion liquid into the plurality of cavities, the order of injecting the pre-immersion liquid in the plurality of cavities is changed by cooperating with the pressure, and the positions of the first plug plate and the second plug plate in the fixed frame and the mounting frame are respectively changed. Then, by cooperating with the opening and closing orifice plate assembly, during the process of filling all the cavities in the immersion tank with the pre-immersion liquid, the fluidity of the pre-immersion liquid inside the immersion tank is increased, so that the plasma water or specific electroplating pretreatment liquid in the flowing pre-immersion liquid can fully penetrate into the pores on the surface of the packaging carrier plate to achieve sufficient pre-wetting, and further improve the pre-wetting speed of the packaging carrier plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the front cross-sectional structure of the body of the present invention;

[0018] Figure 2 is a schematic diagram of the rear cross-sectional structure of the body of the present invention;

[0019] Figure 3 is a schematic diagram of the top view structure of the body of the present invention;

[0020] Figure 4 is a schematic diagram of the structure of the immersion tank, vacuum pump, liquid storage tank, suction pump and filtering mechanism of the present invention;

[0021] Figure 5 is a schematic diagram of the upper cross-sectional and front cross-sectional structures of the immersion tank of the present invention;

[0022] Figure 6 is a schematic diagram of the front cross-sectional structure of the immersion tank of the present invention;

[0023] Figure 7 is Figure 6 a schematic diagram at position A in

[0024] Figure 8 is a schematic diagram of the left-view split structure of the cross-section, bottom block, fixed frame, mounting frame and clamping strip of the immersion tank of the present invention;

[0025] Figure 9 is Figure 8 an enlarged schematic diagram at position B in

[0026] Figure 10 is a schematic diagram of the right-view split structure of the cross-section, bottom block, fixed frame, mounting frame and clamping strip of the immersion tank of the present invention;

[0027] Figure 11 is Figure 10 an enlarged schematic diagram at position C in

[0028] Figure 12 is a schematic diagram of the structure of the bottom block, fixed frame and mounting frame of the present invention;

[0029] Figure 13 is Figure 12 The enlarged schematic view of part D in

[0030] Figure 14 is the top-down exploded structural schematic view of the bottom block, fixed frame, opening and closing orifice plate assembly and adjustment assembly of the present invention;

[0031] Figure 15 is Figure 14 The enlarged schematic view of part E in

[0032] Figure 16 is the bottom-up exploded structural schematic view of the bottom block, fixed frame, opening and closing orifice plate assembly and adjustment assembly of the present invention;

[0033] Figure 17 is Figure 16 The enlarged schematic view of part F in

[0034] Figure 18 is Figure 17 The enlarged schematic view of part H in

[0035] Figure 19 is the exploded structural schematic view of the installation frame and adjustment assembly of the present invention;

[0036] Figure 20 is Figure 19 The enlarged schematic view of part G in

[0037] Figure 21 is the top-down exploded structural schematic view of the bottom block, electric push rod and plug block of the present invention.

[0038] In the figure: 1. Body; 2. Sealing cylinder; 3. Top cover; 4. Immersion tank; 41. First connecting pipe; 42. Second connecting pipe; 5. Bottom block; 6. First liquid flow groove; 7. Second liquid flow groove; 8. Third liquid flow groove; 9. Electric push rod; 10. Plug block; 11. Fixed frame; 12. Slide column; 13. Installation frame; 14. Clip; 15. Opening and closing orifice plate assembly; 151. Panel; 152. Slide plate; 153. Top block; 16. Adjustment assembly; 161. First plug plate; 162. First opening; 163. Second plug plate; 164. Top bar; 165. Second opening; 166. Third opening; 17. Vacuum pump; 18. Liquid storage tank; 19. Suction pump; 20. Filter mechanism. Detailed implementation manners

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Embodiment

[0040] Please refer to Figures 1 to 21, the present invention provides a technical solution: a vertical continuous electroplating equipment vacuum pre-impregnation tank, including a machine body 1, a first connecting pipe 41, a second connecting pipe 42 and a liquid storage tank 18. The upper end of the left inner wall of the machine body 1 is movably connected with a top cover 3 and an immersion tank 4 through a sealing cylinder 2. The immersion tank 4 is arranged below the top cover 3. A bottom block 5 is fixed at the bottom of the inner cavity of the immersion tank 4. A first liquid flow groove 6 and a second liquid flow groove 7 are formed at the top left side of the bottom block 5. The second liquid flow groove 7 is arranged on the right side of the first liquid flow groove 6. A third liquid flow groove 8 is formed at the front side of the bottom block 5. A plug block 10 is movably connected to the inner rear wall of the third liquid flow groove 8 through an electric push rod 9. A fixing frame 11 is fixed at the top left side of the bottom block 5. The fixing frame 11 is connected to the right inner wall of the inner cavity of the immersion tank 4 through the upper right convex block. Two sliding columns 12 are fixed at the positions of the notches of the upper right two convex blocks of the fixing frame 11. An installation frame 13 is slidably sleeved on the outer sides of the two sliding columns 12. The installation frame 13 is slidably arranged between the bottom block 5 and the fixing frame 11. The top of the fixing frame 11 is in sealing contact with the top cover 3. The installation frame 13 is in sealing sliding with the top cover 3. The first liquid flow groove 6, the second liquid flow groove 7 and the third liquid flow groove 8 are interconnected. The interconnected position of the first liquid flow groove 6, the second liquid flow groove 7 and the third liquid flow groove 8 is located at the inner top of the third liquid flow groove 8. The position where the third liquid flow groove 8 is formed is located between the fixing frame 11 and the installation frame 13. The designed shape of the plug block 10 corresponds to the third liquid flow groove 8. The plug block 10 is used to block the interconnected position of the first liquid flow groove 6, the second liquid flow groove 7 and the third liquid flow groove 8. A notch is designed at the bottom of the plug block 10. The plug block 10 is used for liquid outflow. A clamping strip 14 is arranged between the fixing frame 11 and the installation frame 13. The clamping strip 14 is slidably placed between the two sliding columns 12. An opening and closing orifice plate assembly 15 is arranged on the right inner frame of the fixing frame 11. The opening and closing orifice plate assembly 15 is connected to the installation frame 13 through an adjusting assembly 16. The immersion tank 4 is installed at the upper end of the left inner layer of the machine body 1. The left port of the first connecting pipe 41 is connected to a vacuum pump 17 through a pipeline. The vacuum pump 17 is installed in the left inner layer of the machine body 1. The first connecting pipe 41 is installed through the left side wall of the immersion tank 4 and the bottom of the fixing frame 11. The lower front port of the immersion tank 4 is connected to the liquid storage tank 18 through a pipeline. The right port of the second connecting pipe 42 is connected to a filtering mechanism 20 and a suction pump 19 through a pipeline and an electric control valve in sequence. The second connecting pipe 42 is installed through and fixed at the bottom of the installation frame 13 and the right side wall of the immersion tank 4. The suction pump 19 is connected to the liquid storage tank 18 through a pipeline. The filtering mechanism 20 is installed at the upper part of the inner cavity of the machine body 1. The liquid storage tank 18 and the suction pump 19 are installed at the bottom of the middle partition layer of the inner cavity of the machine body 1 from back to front in sequence;

[0041] When the clamping strip 14 clamps and fixes the packaging substrates of different thicknesses and places them on the two sliding posts 12, and then during the vacuuming process of the cavity between the panel 151 and the mounting frame 13, the mounting frame 13 slides to the left on the bottom block 5 and the fixing frame 11, and contacts and drives the clamping strip 14 to slide synchronously to a limit position, so that the size of the cavity between the panel 151 and the mounting frame 13 is adaptively adjusted to the corresponding cavity size as the clamping strip 14 clamps the packaging substrates of different thicknesses.

[0042] Embodiment 1

[0043] Based on Example 1, please refer to Figures 1 to 21 , an opening and closing orifice plate assembly 15 is arranged on the right side of the inner frame of the fixed frame 11, and the opening and closing orifice plate assembly 15 is connected to the installation frame 13 through an adjusting assembly 16, and the opening and closing orifice plate assembly 15 includes a panel 151, and the panel 151 is installed on the right side of the inner side of the fixed frame 11, and a slide plate 152 is slidably connected in the groove on the left side of the panel 151, and the panel 151 and the slide plate 152 are both arrayed with multiple rows of tiny holes, and the holes opened by the panel 151 and the slide plate 152 are opened and closed by overlapping and staggering, and a top block 153 is arranged at the rear of the bottom of the slide plate 152, and the top block 153 is installed on the adjusting assembly 16, and the adjusting assembly 16 includes a No. 1 plug plate 161, a first opening 162, a No. 2 plug plate 163, a second opening 165 and a third opening 166, and the No. 1 plug plate 161 is slidably arranged in the inner groove of the fixed frame 11, and a top block 153 is fixed on the right side of the bottom of the No. 1 plug plate 161, and the top block 153 is designed as an inclined structure. The inclined surface structure is used for overlapping and penetrating with the hole of the slide plate 152 after the slide plate 152 slides, the first opening 162 is provided at the inner bottom of the fixed frame 11, the second plug plate 163 is slidably arranged in the groove on the right side of the installation frame 13, the cavity between the groove of the second plug plate 163 and the installation frame 13 is connected to the cavity between the first plug plate 161 and the immersion tank 4 through a hose, the opening position of the first opening 162 corresponds to the position of the second flow tank 7, a top strip 164 is fixed on the right side of the second plug plate 163, the second opening 165 is provided at the upper right end of the inner side of the fixed frame 11, the third opening 166 is provided at the upper left wall of the installation frame 13, the second opening 165 is used for the cavity between the top block 153 and the installation frame 13 and the cavity between the top block 153 and the first plug plate 161 to be communicated, the third opening 166 is used for the cavity between the top block 153 and the installation frame 13 and the cavity between the inner side of the groove on the right side of the installation frame 13 and the second plug plate 163 to be communicated;

[0044] When the encapsulation carrier board is pre-wetted and the pre-impregnation liquid starts to be poured into the cavity between the mounting frame 13 and the panel 151, after the pre-impregnation liquid in the vacuum cavity between the mounting frame 13 and the panel 151 is filled, the pressure in the cavity between the mounting frame 13 and the panel 151 returns to normal. The continuous supply of the pre-impregnation liquid causes the mounting frame 13 to slide to the right on the bottom block 5 and the fixed frame 11. Part of the pre-impregnation liquid respectively flows into the cavity between the panel 151 and the first plug plate 161, and the cavity between the second plug plate 163 and the right groove of the mounting frame 13 through the second opening 165 and the third opening 166 synchronously, and causes the positions of the first plug plate 161 and the second plug plate 163 to change within the fixed frame 11 and the mounting frame 13 respectively, making the top bar 164 protrude from the right side of the mounting frame 13. During this process, when the mounting frame 13 continues to slide to the right on the bottom block 5 and the fixed frame 11 until the top bar 164 abuts against the right inner wall of the inner cavity of the immersion tank 4, the second plug plate 163 slides to the left in the right groove of the mounting frame 13, and squeezes the pre-impregnation liquid in the cavity between the second plug plate 163 and the right groove of the mounting frame 13 into the cavity between the first plug plate 161 and the immersion tank 4, and causes the first plug plate 161 and the top block 153 to slide to the right within the fixed frame 11. Together with the opening and closing orifice plate assembly 15, during the process of filling all the cavities in the immersion tank 4 with the pre-impregnation liquid, the fluidity of the pre-impregnation liquid inside the immersion tank 4 is increased.

[0045] Working principle: When using the vacuum pre-impregnation tank of this vertical continuous electroplating equipment, first clamp and fix the encapsulation carrier boards with different thicknesses through the clamping bar 14, then place the clamping bar 14 on the two sliding columns 12, and then start the sealing cylinder 2 to contract to close the top cover 3 and the immersion tank 4. Then start the vacuum pump 17 to perform vacuum suction through the first connecting pipe 41. During the suction process, the first plug plate 161 slides to the right within the fixed frame 11 along with the suction and abuts against the panel 151. The second plug plate 163 slides to the left within the groove of the mounting frame 13 and abuts against the right inner wall of the groove of the mounting frame 13. At the same time, the mounting frame 13 slides to the left on the bottom block 5 and the fixed frame 11, and abuts and drives the clamping bar 14 to slide synchronously until the left side of the sliding bar of the clamping bar 14 abuts against the fixed frame 11 and reaches the limit position. At this time, the size of the cavity between the panel 151 and the mounting frame 13 adapts to adjust the corresponding cavity size with the clamping bar 14 clamping the encapsulation carrier boards with different thicknesses. Then continue to perform vacuum suction on the cavity between the panel 151 and the mounting frame 13 until the cavity reaches the corresponding pressure and then turn off the vacuum pump 17. During this process, the position adjustment of the mounting frame 13 reduces the size of the cavity where the encapsulation carrier board is located, improving the speed of vacuum suction;

[0046] When the encapsulation carrier plate is pre-wetted, the suction pump 19 and the electromagnetic control valve are opened, and the pre-impregnating liquid in the liquid storage tank 18 is sent into the cavity between the mounting frame 13 and the panel 151 through a pipeline, a filtering mechanism 20 and a second connecting pipe 42. When the cavity between the mounting frame 13 and the panel 151 is filled with the pre-impregnating liquid in the vacuum cavity, the pressure in the cavity between the mounting frame 13 and the panel 151 returns to normal. The continuous supply of the pre-impregnating liquid causes the mounting frame 13 to slide to the right on the bottom block 5 and the fixed frame 11. Part of the pre-impregnating liquid synchronously flows into the cavity between the panel 151 and the first plug plate 161 through the second opening 165 and the third opening 166 respectively, and into the cavity between the second plug plate 163 and the right groove of the mounting frame 13, causing the first plug plate 161 to slide to the left to the limit position in the fixed frame 11, and synchronously causing the second plug plate 163 to slide to the right to the limit position in the right groove of the mounting frame 13. At this time, the top bar 164 protrudes from the right side surface of the mounting frame 13. During this process, when the mounting frame 13 continues to slide to the right on the bottom block 5 and the fixed frame 11 until the top bar 164 abuts against the right inner wall of the liquid immersion tank 4, the second plug plate 163 slides to the left in the right groove of the mounting frame 13, and squeezes the pre-impregnating liquid in the cavity between the second plug plate 163 and the right groove of the mounting frame 13 into the cavity between the first plug plate 161 and the liquid immersion tank 4 through a hose, causing the first plug plate 161 and the top block 153 to slide to the right in the fixed frame 11. When the moving top block 153 abuts against the sliding plate 152, the sliding plate 152 slides upward to the limit position in the groove of the panel 151. At this time, the array holes on the panel 151 and the sliding plate 152 overlap and penetrate. The pre-impregnating liquid in the cavity between the panel 151 and the first plug plate 161 will flow out from the overlapping and penetrating array holes on the panel 151 and the sliding plate 152. These holes are of micro-hole design and not shown in the figure, increasing the fluidity of the pre-impregnating liquid inside the liquid immersion tank 4 during the process of filling all the cavities in the liquid immersion tank 4 with the pre-impregnating liquid;

[0047] When the pre-wetting of the encapsulation carrier plate is completed, the electric push rod 9 is activated to push the plug block 10 to slide forward in the third liquid flow groove 8, making the upper end inside the third liquid flow groove 8 communicate with the first liquid flow groove 6 and the second liquid flow groove 7. The pre-impregnating liquid in the cavity between the panel 151 and the mounting frame 13 flows into the third liquid flow groove 8 through the second liquid flow groove 7, and the pre-impregnating liquid in the cavity between the first plug plate 161 and the liquid immersion tank 4 flows into the third liquid flow groove 8 through the first liquid flow groove 6 and the first opening 162, and then flows into the liquid storage tank 18 through a pipeline from the notch of the plug block 10.

[0048] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art. In the description of the present invention, unless otherwise specified, the meaning of "a plurality of" is two or more; the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, terms such as "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vertical continuous electroplating equipment vacuum pre-impregnation tank, characterized in that: It includes a machine body (1), a first connecting pipe (41), a second connecting pipe (42) and a liquid storage tank (18). The upper end of the left wall inside the machine body (1) is movably connected with a top cover (3) and a dipping tank (4) through a sealing cylinder (2). The dipping tank (4) is arranged below the top cover (3). A bottom block (5) is fixed at the bottom of the inner cavity of the dipping tank (4). A first liquid flow groove (6) and a second liquid flow groove (7) are formed at the top left of the bottom block (5). The second liquid flow groove (7) is formed on the right side of the first liquid flow groove (6). A third liquid flow groove (8) is formed at the front side of the bottom block (5). A plug block (10) is movably connected to the inner rear wall of the third liquid flow groove (8) through an electric push rod (9). A fixing frame (11) is fixed at the top left of the bottom block (5). The fixing frame (11) is connected to the right side wall inside the dipping tank (4) through the convex block at the upper right end. Slide columns (12) are fixed at the notch positions of the two convex blocks on the upper right side of the fixing frame (11). An installation frame (13) is slidably sleeved on the outer sides of the two slide columns (12). The installation frame (13) is slidably arranged between the bottom block (5) and the fixing frame (11). A clamping strip (14) is arranged between the fixing frame (11) and the installation frame (13). The clamping strip (14) is slidably placed between the two slide columns (12). An opening and closing orifice plate assembly (15) is arranged on the right side of the inner frame of the fixing frame (11). The opening and closing orifice plate assembly (15) is connected to the installation frame (13) through an adjusting assembly (16). The dipping tank (4) is installed at the upper end of the left side partition inside the machine body (1). The left port of the first connecting pipe (41) is connected to a vacuum pump (17) through a pipeline. The vacuum pump (17) is installed in the left side partition inside the machine body (1). The first connecting pipe (41) passes through and is installed at the left side wall of the dipping tank (4) and the bottom of the fixing frame (11). The lower front port of the dipping tank (4) is connected to the liquid storage tank (18) through a pipeline. The right port of the second connecting pipe (42) is sequentially connected to a filtering mechanism (20) and a suction pump (19) through a pipeline and an electric control valve. The second connecting pipe (42) passes through and is fixed at the bottom of the installation frame (13) and the right side wall of the dipping tank (4). The suction pump (19) is connected to the liquid storage tank (18) through a pipeline. The filtering mechanism (20) is installed at the upper part inside the machine body (1). The liquid storage tank (18) and the suction pump (19) are sequentially installed at the bottom of the middle partition inside the machine body (1) from back to front. The first liquid flow groove (6), the second liquid flow groove (7) and the third liquid flow groove (8) communicate with each other. The communicating position of the first liquid flow groove (6), the second liquid flow groove (7) and the third liquid flow groove (8) is located at the inner top of the third liquid flow groove (8). The position where the third liquid flow groove (8) is formed is located between the fixing frame (11) and the installation frame (13). The designed shape of the plug block (10) corresponds to that of the third liquid flow groove (8). The plug block (10) is used to block the communicating position of the first liquid flow groove (6), the second liquid flow groove (7) and the third liquid flow groove (8). A notch is designed at the bottom of the plug block (10).The plug block (10) is used for liquid outflow., 2. The vacuum pre-impregnation tank of a vertical continuous electroplating device according to claim 1, wherein: The opening and closing orifice plate assembly (15) includes a panel (151), the panel (151) is installed on the inner right side of the fixed frame (11), a sliding plate (152) is slidably connected in the left groove of the panel (151), a top block (153) is arranged at the rear of the bottom of the sliding plate (152), and the top block (153) is installed on the adjusting assembly (16).

3. The vacuum pre-impregnation tank of a vertical continuous electroplating device according to claim 2, characterized in that: The panel (151) and the sliding plate (152) are both provided with multiple rows of tiny holes in an array, and the holes opened in the panel (151) and the sliding plate (152) are opened and closed by overlapping and staggering.

4. A vertical continuous electroplating equipment vacuum pre-impregnation tank according to claim 3, characterized in that: The adjusting assembly (16) includes a first plug plate (161), a first opening (162), a second plug plate (163), a second opening (165) and a third opening (166). The first plug plate (161) is slidably arranged in the inner groove of the fixed frame (11), and a top block (153) is fixed to the right side of the bottom of the first plug plate (161). The first opening (162) is opened at the inner bottom of the fixed frame (11). The second plug plate (163) is slidably arranged in the right groove of the installation frame (13), and a top bar (164) is fixed to the right side of the second plug plate (163). The second opening (165) is opened at the upper right end of the inner side of the fixed frame (11), and the third opening (166) is opened at the upper part of the left wall of the installation frame (13).

5. A vertical continuous electroplating equipment vacuum pre-impregnation tank according to claim 4, characterized in that: The cavity between the groove of the second plug plate (163) and the installation frame (13) is connected by a hose to the cavity between the first plug plate (161) and the immersion tank (4), and the position where the first opening (162) is opened corresponds to the position of the second liquid flow groove (7).

6. A vacuum pre-impregnation tank of a vertical continuous electroplating device according to claim 5, characterized in that: The top block (153) is designed with an inclined surface structure, and the inclined surface structure of the top block (153) is used for the holes of the sliding plate (152) to overlap and penetrate after the sliding plate (152) slides.

7. A vacuum pre-impregnation tank for a vertical continuous electroplating apparatus according to claim 6, characterized in that: The second opening (165) is used for the cavity between the top block (153) and the installation frame (13) and the cavity between the top block (153) and the first plug plate (161) to communicate. The third opening (166) is used for the cavity between the top block (153) and the installation frame (13) and the cavity between the inner side of the right groove of the installation frame (13) and the second plug plate (163) to communicate. The top of the fixed frame (11) is in sealed contact with the top cover (3), and the installation frame (13) is in sealed sliding with the top cover (3).

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